CN104096931A - Method for electrochemically machining micro-pit array - Google Patents
Method for electrochemically machining micro-pit array Download PDFInfo
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- CN104096931A CN104096931A CN201410303580.1A CN201410303580A CN104096931A CN 104096931 A CN104096931 A CN 104096931A CN 201410303580 A CN201410303580 A CN 201410303580A CN 104096931 A CN104096931 A CN 104096931A
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Abstract
The invention discloses a method for electrochemically machining a micro-pit array and belongs to the technical field of chemical machining. The method mainly comprises the following steps of (a) coating microparticles (6) by using electrically isolated porous cloth (3) to prepare a mask (4); (b) gluing the mask (4) on the surface of a workpiece (8) to be machined; (c) pressing a tool cathode (2) on the other surface of the mask (4), and allowing the thickness distribution of the mask (4) to be uniform; (d) introducing electrolyte (1) in a pole clearance (5) which is formed between the tool cathode (2) and the workpiece (8) to be machined and is filled with the mask (4); (e) connecting the workpiece (8) to be machined with the positive pole of a power supply (9), connecting the tool cathode (2) with the negative pole of the power supply (9), and electrifying for performing electrochemical machining; (f) after the machining requirement is met, switching off the power supply (9), stopping the electrolyte (1), removing the mask (4), and taking the workpiece (8) to be machined out to finish machining. The method has the characteristics of simple mask manufacture, wide application range, low process cost and the like, and is suitable for machining micro-pit arrays on planar or curved surface metal parts.
Description
Technical field
The present invention relates to a kind of method of Electrolyzed Processing micro-pit array, belong to electrochemistry processing technique field.
Background technology
In many dynamic friction pairs, working surface, in relative motion and interactional state, therefore, is certainly existing friction and wear phenomenon, and they are one of key factors of work mechanism energy loss, Efficiency Decreasing, friction pair inefficacy, the lost of life.Research shows, the surface texture with micro-pit array can reduce friction and wear effectively.In addition, at device surface, processing certain dimple structure, can to increase device surface long-pending, and this is to improving surface radiating and liquid flowing state has certain effect.
Because have, instrument in process does not directly contact with workpiece Electrolyzed Processing,, surface of the work high without tool electrode loss, working (machining) efficiency can not produce the advantages such as machining stress, distortion and heat affected area, be one of important technical of the fine structures such as the micro-hole of processing, micropore, very promising.Wherein mask Electrolyzed Processing is the most conventional processing method in the micro-hole of Electrolyzed Processing.In this method, the manufacture of mask is crucial, is generally to do mask with photoresist, need to through gluing, front baking, exposure, after the series of complex operation such as baking, development, complex operation, process costs is high, and on curved surface, implements above-mentioned steps and difficulty thereof.Therefore be necessary to research and develop a kind of simple to operate, process costs is low and the method that can process the new mask Electrolyzed Processing micro-pit array of micro-pit array on curved surface.
Summary of the invention
The present invention is directed to ubiquitous mask fabrication complex process in existing mask Electrolyzed Processing micro-pit array method, cost is high and the extremely difficult deficiency of implementing on curved surface, propose a kind of based on simple and easy flexible mask simple to operate, process costs is low and be not subject to the method for the mask Electrolyzed Processing micro-pit array of workpiece to be machined surface configuration restriction.
Technical scheme of the present invention is:
A method for Electrolyzed Processing micro-pit array, mainly comprises the following steps:
(a) with electric insulation porous cloth parcel microparticle, prepare mask;
(b) mask is fitted on workpiece to be machined surface;
(c) tool cathode is pressed on the another side of mask, and makes the thickness distribution of mask even;
(d) between by tool cathode and workpiece to be machined, in pole clearance that form and that be filled with mask, pass into electrolyte;
(e) workpiece to be machined connects positive source, tool cathode connects after power cathode, and Electrolyzed Processing is carried out in energising;
(f) reach after processing request, power cutoff, closes down electrolyte, removes mask, takes out workpiece to be machined, completes processing.
In technique scheme, described electric insulation porous cloth is the porous cloth of the low and acid-alkali-corrosive-resisting of the swellabilities such as nylon, terylene.Like this, when the micro-hole of processing, reduce the negative effects such as porous cloth dwindles because adsorptive liquid causes aperture, electrical insulating property attenuating.
Being shaped as of described electric insulation porous cloth hole is square, circular, rhombus etc.In actual processing, can select as required hole shape.Generally speaking, preferentially select circular port.
The size of described pole clearance is 0.1mm ~ 2mm.The size of pole clearance is regulated by the thickness of mask.Mask thicknesses is crossed conference and is caused current density little, and working (machining) efficiency and machining accuracy are low; The discharge of the too small electrolysate of mask thicknesses is difficult, affects the stability of processing technology.Generally speaking, micro-hole of intending formation is less, and the pole clearance of choosing should be less.
The microparticle of described electric insulation porous cloth parcel is the corrosion-resistant hard particles such as silica, alundum (Al2O3).Like this, adding man-hour, utilize on the one hand microparticle transmission from the pressure of negative electrode to the muscle in porous cloth or line, make it and surface of the work close contact, reach the object that protection workpiece does not need working position and definition microcellular structure figure; The circulation that gap between microparticle is electrolyte on the other hand provides passage, is beneficial to carrying out smoothly of electrolytic processing process.Microparticle is hard particles, prevents that on the one hand particle is excessive to the seal face of cloth because of excessive deformation when compressing anode and cathode, thereby hinder electrolyte, arrives machined surface; Prevent on the other hand microparticle excessive deformation and closely knit, cause the pole clearance electrolyte that cannot circulate.
Described microparticle particle diameter is less than the size in its electric insulation porous cloth hole of parcel, and microparticle particle diameter is 0.01mm ~ 0.3mm.The size of microparticle is less than the size in porous cloth hole, in case microparticle flows out porous cloth during electrolyte circulation.If microparticle is excessive, its may compacting porous well muscle or the line of cloth, thereby make cloth lose the effect that selective electric insulation shields non-machining area; Otherwise microparticle may cannot form good electrolyte stream passage because too little between particle, affect the enforcement of technique.
Add man-hour, first with electric insulation porous cloth, wrap up appropriate microparticle and prepare mask and be fitted on workpiece to be machined surface.Again tool cathode is pressed on to the another side of mask, and mask thicknesses is evenly distributed.During compression, must guarantee that porous cloth and workpiece to be machined fit tightly, otherwise not have the object of selective protection workpiece to be machined.Then connect electrolyte, the topping up mode of electrolyte can adopt side direction topping up (be parallel to workpiece to be machined surface and introduce electrolyte) or two kinds of modes of forward topping up (from the inner electrolyte of introducing of tool cathode).During forward topping up, need on tool cathode, open one or several equally distributed inlet.Open processing power source, on workpiece to be machined surface, the corresponding part in hole of electric insulation porous cloth is because there being the circulation of electrolyte that the dissolved removal of cell reaction occurs, form dimple structure, and the part closely being covered by the muscle of electric insulation porous cloth or line is because of few electrolyte flow and shielded not by chemolysis by electric insulation, like this, Electrolyzed Processing through certain hour, can form certain depth and big or small micro-pit array on workpiece to be machined surface.
Compare with other technology, beneficial effect of the present invention is:
1. mask manufacture is simple.The present invention directly adopts flexible electrical insulation porous cloth parcel microparticle to do mask, does not need the complex techniques process of the traditional fabrication masks such as gluing, front baking, exposure, rear baking, development.Link is few, easily implements.
2. applied range.The present invention does mask with flexible electrical insulation porous cloth parcel microparticle, and this mask can be fixed on plane and curved surface neatly, is not subject to the restriction of processing work shape.
3. processing cost is low.The present invention only need wrap up appropriate microparticle with the electric insulation porous cloth of dimension and do mask, and electric insulation porous cloth, microparticle are bargain goods, and process costs is low.
Accompanying drawing explanation
Fig. 1 utilizes the inventive method to adopt side direction topping up mode to carry out the schematic diagram of micro-pits machining.
Fig. 2 utilizes the inventive method to adopt forward topping up mode to carry out the schematic diagram of micro-pits machining.
Number in the figure title: 1, electrolyte, 2, tool cathode, 3, electric insulation porous cloth, 4, mask, 5, pole clearance, 6, microparticle, 7, Wei Keng, 8, workpiece to be machined, 9, power supply, 10, inlet.
The specific embodiment
Embodiment one
Below in conjunction with Fig. 1 to the present invention---the specific implementation process of " a kind of method of Electrolyzed Processing micro-pit array " is described in further detail.
1) with the solid silica microballon 6 that the appropriate diameter of 400 order square net shape terylene electric insulation porous cloth 3 parcel is 80 μ m, prepare mask 4;
2) mask 4 is fitted on 201 stainless steel disk (workpiece to be machined) 8 surfaces that diameter is 17mm;
3) copper that is 17mm diameter (tool cathode) 2 is pressed on the another side of mask 4, and makes the thickness distribution of mask 4 even, and mask thicknesses is 1mm;
4) from being parallel to workpiece to be machined 8 surfaces, to pole clearance 5 that form and that be filled with mask 4 between tool cathode 2 and workpiece to be machined 8, introduce the NaNo that concentration is 15%
3electrolyte 1;
5) workpiece to be machined 8 connects power supply 9 positive poles, tool-electrode 2 connects after power supply 9 negative poles, and Electrolyzed Processing is carried out in energising;
6) after Electrolyzed Processing 10s, power cutoff 9, closes down electrolyte 1, removes mask 4, takes out workpiece to be machined 8, completes processing.
Embodiment two
Below in conjunction with Fig. 2 to the present invention---the specific implementation process of " a kind of method of Electrolyzed Processing micro-pit array " is described in further detail.
In this specific embodiment, except step 4), all the other each steps are all identical with step corresponding in the specific embodiment 1, and in this specific embodiment, step 4) topping up mode is to introduce electrolyte from tool cathode.
The technical process of just utilizing 400 order square net shape terylene electric insulation porous cloth to process in the plane micro-hole that above example is described, in practice, can also utilize the electric insulation porous cloth of other specifications on curved surface, to carry out the Electrolyzed Processing in micro-hole, the fixed form of electric insulation porous cloth also needs to do corresponding adjustment.
Claims (6)
1. a method for Electrolyzed Processing micro-pit array, is characterized in that: comprise the following steps:
With electric insulation porous cloth (3) parcel microparticle (6), prepare mask (4);
(b) mask (4) is fitted on workpiece to be machined (8) surface;
(c) tool cathode (2) is pressed on the another side of mask (4), and makes the thickness distribution of mask (4) even;
(d) between by tool cathode (2) and workpiece to be machined (8), in pole clearance that form and that be filled with mask (4) (5), pass into electrolyte (1);
(e) workpiece to be machined (8) connects power supply (9) positive pole, tool cathode (2) connects after power supply (9) negative pole, and Electrolyzed Processing is carried out in energising;
(f) reach after processing request, power cutoff (9), closes down electrolyte (1), removes mask (4), takes out workpiece to be machined (8), completes processing.
2. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, is characterized in that: described electric insulation porous cloth (3) is for the swellabilities such as nylon, terylene are low and the porous cloth of acid-alkali-corrosive-resisting.
3. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, is characterized in that: being shaped as of described electric insulation porous cloth (3) hole is square, circular, rhombus etc.
4. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, is characterized in that: the size of described pole clearance (5) is 0.1mm ~ 2mm.
5. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, is characterized in that: the microparticle (6) of described electric insulation porous cloth (3) parcel is the corrosion-resistant hard particles such as silica, alundum (Al2O3).
6. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, is characterized in that: described microparticle (6) particle diameter is less than the size in its electric insulation porous cloth (3) hole of parcel, and microparticle particle size is 0.01mm ~ 0.3mm.
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| CN201410303580.1A CN104096931B (en) | 2014-06-30 | 2014-06-30 | Method for electrochemically machining micro-pit array |
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| CN201410303580.1A CN104096931B (en) | 2014-06-30 | 2014-06-30 | Method for electrochemically machining micro-pit array |
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| CN104096931B CN104096931B (en) | 2017-05-17 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104668675A (en) * | 2015-03-05 | 2015-06-03 | 华南理工大学 | Electrode with micro-conical tower array end surface and processing method and application thereof |
| CN105364237A (en) * | 2015-11-20 | 2016-03-02 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for controlling honeycomb size of thin-walled honeycomb part |
| CN105648491A (en) * | 2016-03-24 | 2016-06-08 | 河南理工大学 | System and method for electrochemically processing three-dimensional metal microstructure |
| CN106064261A (en) * | 2016-06-12 | 2016-11-02 | 南京航空航天大学 | The System and method for of micro-pit array Electrolyzed Processing based on magnetic PDMS mask |
| CN106270853A (en) * | 2016-09-21 | 2017-01-04 | 河南理工大学 | A kind of processing method of micro structure array |
| CN106435656A (en) * | 2016-09-29 | 2017-02-22 | 河南理工大学 | Manufacturing method of sprayer plate |
| CN109014462A (en) * | 2018-10-09 | 2018-12-18 | 河南理工大学 | A kind of metal surface micro-structure electrolytic machining device |
| CN109811342A (en) * | 2019-02-21 | 2019-05-28 | 清华大学 | The method that net exposure mask large area prepares micro- bowl configurations and super-hydrophobic metal surface |
| CN110369815A (en) * | 2019-08-02 | 2019-10-25 | 河南理工大学 | A kind of method of the micro- texture of Electrolyzed Processing |
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| CN1699006A (en) * | 2005-06-01 | 2005-11-23 | 清华大学 | Electrochemical machining process for array micro type hole |
| CN101862870A (en) * | 2010-06-21 | 2010-10-20 | 南京航空航天大学 | Array micro-pit electrolytic machining method and system |
| CN103084682A (en) * | 2013-01-16 | 2013-05-08 | 河南理工大学 | Method of liquid beam jet flows electrolyzing and processing dimples |
| CN103526266A (en) * | 2013-10-22 | 2014-01-22 | 河南理工大学 | Method for processing micro-pit arrays on metal surface |
| CN103600144A (en) * | 2013-11-18 | 2014-02-26 | 南京航空航天大学 | Method and device for electrolytic machining of massive array tiny pits through wedge-shaped runner |
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| CN1699006A (en) * | 2005-06-01 | 2005-11-23 | 清华大学 | Electrochemical machining process for array micro type hole |
| CN101862870A (en) * | 2010-06-21 | 2010-10-20 | 南京航空航天大学 | Array micro-pit electrolytic machining method and system |
| CN103084682A (en) * | 2013-01-16 | 2013-05-08 | 河南理工大学 | Method of liquid beam jet flows electrolyzing and processing dimples |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104668675A (en) * | 2015-03-05 | 2015-06-03 | 华南理工大学 | Electrode with micro-conical tower array end surface and processing method and application thereof |
| CN104668675B (en) * | 2015-03-05 | 2017-01-04 | 华南理工大学 | A kind of electrode with micro cone tower array end face and processing method thereof and application |
| CN105364237A (en) * | 2015-11-20 | 2016-03-02 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for controlling honeycomb size of thin-walled honeycomb part |
| CN105648491A (en) * | 2016-03-24 | 2016-06-08 | 河南理工大学 | System and method for electrochemically processing three-dimensional metal microstructure |
| CN105648491B (en) * | 2016-03-24 | 2017-11-10 | 河南理工大学 | A kind of System and method for of electrical-chemistry method 3-dimensional metal micro-structural |
| CN106064261A (en) * | 2016-06-12 | 2016-11-02 | 南京航空航天大学 | The System and method for of micro-pit array Electrolyzed Processing based on magnetic PDMS mask |
| CN106270853A (en) * | 2016-09-21 | 2017-01-04 | 河南理工大学 | A kind of processing method of micro structure array |
| CN106435656A (en) * | 2016-09-29 | 2017-02-22 | 河南理工大学 | Manufacturing method of sprayer plate |
| CN106435656B (en) * | 2016-09-29 | 2018-06-26 | 河南理工大学 | A kind of production method for piece of spraying |
| CN109014462A (en) * | 2018-10-09 | 2018-12-18 | 河南理工大学 | A kind of metal surface micro-structure electrolytic machining device |
| CN109811342A (en) * | 2019-02-21 | 2019-05-28 | 清华大学 | The method that net exposure mask large area prepares micro- bowl configurations and super-hydrophobic metal surface |
| CN110369815A (en) * | 2019-08-02 | 2019-10-25 | 河南理工大学 | A kind of method of the micro- texture of Electrolyzed Processing |
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| CN104096931B (en) | 2017-05-17 |
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