CN104065956B - The detection of a kind of imageing sensor and caliberating device and method - Google Patents
The detection of a kind of imageing sensor and caliberating device and method Download PDFInfo
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Abstract
The present invention discloses detection and the caliberating device of a kind of imageing sensor, including: a light source, for providing a light beam；This light beam interferes after the first grating, lens and the second grating；This interference image gathers through this imageing sensor, detects and demarcate this imageing sensor according to this interference image, it is characterised in that the cycle of this first grating is multiplied by 3 multiplying powers of these lens equal to the cycle of this second grating.Present invention simultaneously discloses detection and the scaling method of a kind of imageing sensor.
Description
Technical field
The present invention relates to integrated circuit equipment manufacturing field, particularly relate to detection and the caliberating device of a kind of imageing sensor
And method.
Background technology
Imageing sensor is capable of the optical signal conversion to the signal of telecommunication, thus is widely used in Aero-Space and image biography
Sense field.Imageing sensor generally can be divided into CMOS and CCD two kinds, and both imageing sensors have photoelectric response characteristic, i.e.
Certain relation is there is between input light intensity signal and the output signal of telecommunication.Ideally, input light intensity with output the signal of telecommunication it
Between be linear relationship, be not a preferable linear relationship between actually entering and exporting, but there is nonlinearity erron, non-
Linearity error may be considered desired output and the deviation of actual output.Each pixel light electrical response characteristics linear coefficient simultaneously
(sensitivity) is also different.By to sensitivity with non-linear detect and demarcate, the essence that imageing sensor is measured can be improved
Degree.
Sensor light electrical characteristics are carried out demarcation exists multiple method at present, as patent CN200910024039.6 is " a kind of
Ccd detector scaling method and device " described in calibration system by laser instrument, attenuator, integrating sphere, imageing sensor group
Become, by the output of the different illumination intensity hypograph sensor of detection, photoelectric response characteristic is demarcated.The program needs
To be reached the effect of Uniform Illumination by integrating sphere, expense is relatively big, and maintaining uniform illumination degree direct influence certainty of measurement.With
These are different, by the method for pinhole Fraunhofer diffraction method nominal light electrical response characteristics, it is not necessary to Uniform Illumination, but by reality
Difference between diffraction image and expectation diffraction image, carrys out the photoelectric response characteristic of uncalibrated image sensor.This method and its
He is similar to by diffraction scaling method, is required for introducing pixel alignment procedures, and the error of alignment can affect certainty of measurement, and this type of spreads out
Penetrate the luminous point response characteristic of the whole sensor that method is demarcated, it is impossible to the photoelectric response characteristic of each pixel is demarcated.
It practice, when using imageing sensor, more concerned be the sensitivity of each pixel and non-linear, particularly with
Interferometry, the error that the sensitivity difference of pixel brings is the least, and the non-linear error brought of pixel is bigger.
Summary of the invention
In order to overcome defect present in prior art, the present invention provides detection and the caliberating device of a kind of imageing sensor
And method, for solving the test problems of the photoelectric response characteristic of imageing sensor.By detection sensitivity and non-linear permissible
Calibrate the pixel that part is bigger with sensor average sensitivity difference.When using imageing sensor, can be by directly picking
Go out or these bad pixels are processed by the method for interpolation, thus reduce its impact on measurement result.
In order to realize foregoing invention purpose, the present invention discloses detection and the caliberating device of a kind of imageing sensor, including: one
Light source, for providing a light beam；Described light beam concurrently gains interest through the first grating and penetrates, and sends out after lens converge to the second grating
Gaining interest and penetrate, diffraction light interferes, and described first grating is mutually matched with described second grating, and described first grating can move
To carry out phase shift modulation；Described interference image gathers through described imageing sensor, detects and demarcate institute according to described interference image
State imageing sensor.
Further, an attenuator is included between described light source and described first grating, in order to regulate illumination intensity.
Further, the distance variable between described second grating and described imageing sensor, in order to adjust measurement light
Speckle size.
Present invention simultaneously discloses detection and the scaling method of a kind of imageing sensor, including: light source sends a light beam successively
Concurrently gaining interest through the first grating and penetrate, diffraction occurs after lens converge to the second grating, diffraction light interferes, Qi Zhongsuo
Stating the first grating to be mutually matched with described second grating, described first grating can move to carry out phase shift modulation, described image
Interference image described in sensor acquisition, detects and demarcates described imageing sensor according to described interference image.
Further, an attenuator is also set up between described light source and described first grating, in order to regulate illumination intensity.
Further, the distance variable between described second grating and described imageing sensor, in order to adjust measurement light
Speckle size.
Further, this detects and demarcates this imageing sensor according to this interference image and specifically includes:
A (), adjustment are measured hot spot and are reached desired size and adjust the illumination intensity of described light beam；
(b), close described light source, measure dark current Idark；
(c), open described light source, interfere after described second grating phase shift, and described imageing sensor gather institute
State interference image；
(d), according to described interference image compensate dark current, calculate described imageing sensor correction output I and ideal defeated
Enter Iideal:
I=Idetect-Idark, Idetect are the sensor output digit signals detected;
Iideal=Acos (θ)+B, A are the amplitude that described imageing sensor measurement is arrived, and θ is phase shift phase place, and B is normal
Several；
(e), described correction output I is carried out cosine matching:
I=A ' cos (θ ')+B ', A ' are the amplitude that matching obtains, and θ ' is the phase shift phase place that matching obtains, and B ' is matching
The constant term obtained；
F () calculates each pixel relative sensitivity sensitivity, average sensitivity sens_mean and non-linear
nonlinearity:
sensitivity = A/A’；
sens_mean = mean(sensitivity)；
, Rmax is the maximum deviation of preferable input Iideal and correction output I, and Imax is correction
The maximum of output I；
(g), sensitivity is differed bigger pixel, non-linear bigger pixel, dark current relatively with average sensitivity
Big pixel is demarcated as bad pixel.
Further, this step d also includes: before calculating ideal input, first demarcate described imageing sensor and institute
State the position relationship between beam optical axis.
Compared with prior art, progressive effect is mainly reflected in the present invention:
The first, compared with traditional detection method being produced Uniform Illumination light by integrating sphere, this method due to without
Uniform light illumination is so without using integrating sphere.The precision simultaneously detected is determined by phase shifting accuracy, and tens micro-relative to one
Rice periodic labelling, not so difficult realize 0.1% phase shifting accuracy, it is possible to achieve the measurement of degree of precision, naturally it is also possible to
By using the labelling of large period to carry out testing to alleviate the required precision to sports platform.
The second, compared with measuring with pinhole Fraunhofer diffraction method or two-slit interference method, this programme interferes row by phase shift
Measure, pixel can be avoided to be directed at the error brought, and this programme can be by adjusting the size of interference region, to sensing
Each pixel of device is demarcated.
3rd, simultaneously this programme are applicable to object lens test platform, and due to object lens test platform itself, not possess big visual field equal
Even illumination and the measuring condition of pinhole Fraunhofer diffraction method, and needed for this programme, measurement equipment is complete with picture sensor subsystem
Unanimously, can directly use.
Accompanying drawing explanation
Can be described in detail by invention below about the advantages and spirit of the present invention and institute's accompanying drawings obtains further
Solve.
Fig. 1 show the structural representation of the detection device of the photoelectric response characteristic of imageing sensor used in the present invention
Figure；
Fig. 2 is the schematic diagram of the incident illumination being produced linear change by phase shift；
Fig. 3 is the non-linear test simulation result figure utilizing the method shown by the present invention；
Fig. 4 is the sensitivity test simulation result figure utilizing the method shown by the present invention；
Fig. 5 is detection and the flow chart of scaling method of the imageing sensor shown by the present invention.
Detailed description of the invention
Describe the specific embodiment of the present invention below in conjunction with the accompanying drawings in detail.
The detection device of the photoelectric response characteristic of the imageing sensor used in the present invention is as it is shown in figure 1, this device includes:
Light source 1, grating 2, lens 3, grating 4, imageing sensor 5, attenuator 6, controller 7.Grating 2 and grating 4 lay respectively at lens 3
Object plane and image planes.Light source requirements coherence is preferable, such as LASER Light Source.Grating 2 and grating 4 are the grating being mutually matched, phase
Coupling refers to mutually: grating 4 cycle is multiplied by the multiplying power of lens 3 equal to grating 2 cycle.
The illumination light that light source 1 sends by interfering after the grating 2 that is mutually matched and grating 4, such imageing sensor 5
Interference image can be collected.Carrying out phase shift modulation by controller 7 moving grating 2, imageing sensor will collect one group and do
Relate to image.Ideally in this group image interference region, the output of pixel will fit completely into varies with cosine, but actual pixels
Output is cosine signal and dark current and the superposition of noise.The impact of dark current can be eliminated by dark current compensation, then
Eliminate each pixel output after dark current impact and may be used for calculating non-linear.Non-linear relatively big or sensitivity exists substantially
The pixel of difference may be considered bad pixel.By regulation imageing sensor 5 and the distance of grating 4, and attenuator, can adjust
Joint interference light intensity, thus in reference sensor output, the pixel of whole sensor is detected.
In the technical program, the input light of each pixel can be varies with cosine, it is also possible to by adjusting the big of each phase shift
Little acquisition equidistantly changes, thus reaches higher certainty of measurement, with reference to Fig. 2.No matter which kind of method, all without as aperture husband thinkling sound
Demarcate with fraunhofer-diffraction method and introduce pixel error like that.
As it is shown in figure 1, the illumination light that laser instrument (193nm) sends is irradiated to light after optical attenuator device (clouded glass)
On grid 2, (cycle is 48 microns) concurrently gains interest and penetrates, the most again through lens 3(lens multiplying power be 0.25) converge to the grating 4(cycle
It is 12 microns) there is re-diffraction, different diffraction level time light (0 ,+1 ,-1 grade) interferes, and uses dimension sensor to adopt
Collection is to far field interference fringe.The size in interference fringe region is determined by the spacing grating 4 to imageing sensor 5.In Fig. 5
Shown in, detection and the scaling method of this imageing sensor specifically include:
The interval size of 501. calibration sensor as required, adjusts the spacing between imageing sensor and grating 4 so that
Measure hot spot and reach desired size.
502. adjust attenuator makes illumination intensity can cover whole reference sensor output.With an output area
(0-1024) as a example by sensor, regulation attenuator make sensor acquisition to light intensity can reach about 900.For a biography
For sensor, not all output interval is all linear interval.The sensor of such as example from above, it is more likely that (950-
1023) the interval linearity is the most bad, carries out so the adjustment of illumination intensity is also required to combine sensor itself.Sensor will
Incident optical signal is converted into the signal of telecommunication, then is changed by A/D, is converted into digital signal.
503. close light source, measure the dark current Idark of sensor output.
504. open light source, control grating 2 by controller and carry out phase shift, and imageing sensor 5 gathers interference image.
Equidistantly n times are measured in phase shift, until phase shift distance reaches a screen periods.Phase shift range can also be more than one
In the individual cycle, increase phase shift range and can improve certainty of measurement, but the testing time can be increased.
505., according to the one group of image collected, use equation below to compensate dark current for the pixel in interference region,
Calculate and correct output I:
I = Idetect-Idark
Idetect is the sensor output digit signals detected, and Idark is that step 503 measures the dark current output arrived
Digital signal.
506. calculating ideal input Iideal:
Iideal = Acos(θ) + B
A is the amplitude that sensor measurement arrives, and θ is phase shift phase place, and B is constant term.Need consideration remaining when calculating ideal input
String radiates, and calculates using spot center position as cosinusoidal radiation center.
507. cosinusoidal radiation accurate calibrations.
Under normal circumstances, the non-linear and sensitive of sensor can have been calculated by Amplitude and regression criterion
Degree, but actually use spot center to calculate cosinusoidal radiation effect and there is error, final certainty of measurement can be affected.So such as
Fruit needs more accurate calibration sensor sensitivity and non-linear, then the position being accomplished by between calibration sensor and optical axis is closed
System.This position relationship can be demarcated by positive and negative out of focus measurement.Assume that each location of pixels of calibrated sensor is permissible
(x, y), pupil coordinate can be expressed as Pupil(m, n), can calculate sensor picture by ray tracing to be expressed as Pixel
Element position Pupil(m_pixel, n_pixel under pupil coordinate), so weight Weight of this pixel is exactly that it is at pupil
Area under coordinate system is divided by its area under sensor coordinate system.So preferable input light intensity after calibration can represent
For:
Iideal = Acos(θ)*Weight + B
A is amplitude, and θ is phase shift phase place, and Weight is the weight that pixel is corresponding.
508. calculate each pixel sensitivity and non-linear.
Relation between the preferable input Iideal and correction output I of sensor can be represented by following formula:
I = sensitivity* Iideal + offset
Sensitivity is exactly transducer sensitivity, and offset is biasing.
Calculate non-linear:
Rmax is the maximum deviation i.e. residual error of preferable input Iideal and correction output I, and Imax is the maximum of correction output I
Value.
During meter sensitivity, first carry out cosine matching according to correction output I:
I = A’cos(θ’) + B’
A ' is the amplitude that matching obtains, and θ ' is the phase shift phase place that matching obtains, and B ' is the constant term that matching obtains
Relative sensitivity between pixel can be expressed as: sensitivity=A/A '
Calculate sensor average sensitivity sens_mean=mean (sensitivity).
Sensitivity is differed with sensor average sensitivity bigger pixel, non-linear bigger pixel, dark current
Bigger pixel is designated as bad pixel.Detection and demarcation flow process terminate.
The sensor of one 100*100 pixel, when phase shifting accuracy is 0.2%, uses this method of testing 16 step phase shift to measure
As shown in Figure 3 and Figure 4, nonlinear calibration precision reaches 0.3% to simulation result, and Sensitivity Calibration precision is 0.35%.Actual at light
In quarter machine, the labelling cycle is 48 microns, and sports platform precision is several nanometer scale, so actual phase shifting accuracy is far above
0.2%, fully achieve higher precision.
Passed through tradition scaling method calibrated photoelectric response characteristic imageing sensor for one, due to aging or
Other reasons needs timing signal again, embodiment as described above can again demarcate, determines certain pixel simultaneously
After being unsatisfactory for photoelectric response characteristic, it is generally required to the pixel ratio re-scaled is less, it is possible to use following method demarcates it again
Photoelectric response characteristic:
1. determine the pixel needing again to demarcate；
2. export varies with cosine curve according to the signal of this pixel and determine its initial phase；
3. determining a kind of phase shift system according to its initial phase, which can make the input during phase shift of this pixel
Light intensity is linear equidistantly change.Being simultaneously entered luminosity sampling number of times should be more more than embodiment 1, to improve accuracy of detection；
4. phase shift gather image；
5. calculate the sensitivity of this pixel and non-linear；
6. sensitivity is differed with sensor average sensitivity bigger pixel, non-linear bigger pixel, secretly electricity
Flow bigger pixel and be designated as bad pixel.
The preferred embodiment of the simply present invention described in this specification, above example is only in order to illustrate the present invention
Technical scheme rather than limitation of the present invention.All those skilled in the art are under this invention's idea by logical analysis, reasoning
Or the available technical scheme of limited experiment, all should be within the scope of the present invention.
Claims (4)
1. the detection of an imageing sensor and scaling method, it is characterised in that including: light source sends a light beam and sequentially passes through
One grating concurrently gains interest and penetrates, and diffraction occurs after lens converge to the second grating, and diffraction light interferes, and wherein said first
Grating is mutually matched with described second grating, and described first grating can move to carry out phase shift modulation, described imageing sensor
Gather interference image, detect and demarcate described imageing sensor according to described interference image, wherein,
Described detect and demarcate described imageing sensor according to described interference image and specifically include:
A (), adjustment are measured hot spot and are reached desired size and adjust the illumination intensity of described light beam；
(b), close described light source, measure dark current Idark；
(c), open described light source, interfere at the second grating after described first grating phase shift, and described imageing sensor
Gather described interference image；
(d), compensate dark current according to described interference image, calculate the correction output I of described imageing sensor and preferable input
Iideal:
I=Idetect-Idark, Idetect are the sensor output digit signals detected;
Iideal=Acos (θ)+B, A are the amplitude that described imageing sensor measurement is arrived, and θ is phase shift phase place, and B is constant term；
(e), described correction output I is carried out cosine matching:
I=A ' cos (θ ')+B ', A ' are the amplitude that matching obtains, and θ ' is the phase shift phase place that matching obtains, and B ' is that matching obtains
Constant term；
F () calculates each pixel relative sensitivity sensitivity, average sensitivity sens_mean and non-linear
nonlinearity:
sensitivity = A/A’;
sens_mean = mean(sensitivity)；
, Rmax is the maximum deviation of preferable input Iideal and correction output I, and Imax is correction output I
Maximum, mean is for averaging；
(g), that sensitivity differs bigger pixel, non-linear bigger pixel, dark current with average sensitivity is bigger
Pixel is demarcated as bad pixel.
2. the detection of imageing sensor as claimed in claim 1 and scaling method, it is characterised in that described light source and described the
An attenuator is also set up, in order to regulate illumination intensity between one grating.
3. the detection of imageing sensor as claimed in claim 1 and scaling method, it is characterised in that described second grating and institute
State the distance variable between imageing sensor, in order to adjust measurement spot size.
4. the detection of imageing sensor as claimed in claim 1 and scaling method, it is characterised in that described step (d) is also wrapped
Include: before calculating ideal input, first demarcate the position relationship between described imageing sensor and described beam optical axis.
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| CN106534629B (en) * | 2016-10-10 | 2019-05-07 | 珠海市广浩捷精密机械有限公司 | A kind of lens and imaging sensor active focusing system and method |
| CN108627467B (en) * | 2018-04-26 | 2021-02-02 | 深圳怡化电脑股份有限公司 | Method and device for detecting linearity of image sensor |
| CN109788278B (en) * | 2019-01-16 | 2020-12-01 | 深圳市壹欣科技有限公司 | Camera glare testing method and glare collecting device thereof |
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