CN104062753B - A kind of photoelectric auto-collimator - Google Patents
A kind of photoelectric auto-collimator Download PDFInfo
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- CN104062753B CN104062753B CN201410267727.6A CN201410267727A CN104062753B CN 104062753 B CN104062753 B CN 104062753B CN 201410267727 A CN201410267727 A CN 201410267727A CN 104062753 B CN104062753 B CN 104062753B
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Abstract
The invention discloses a kind of photoelectric auto-collimator, including signal-processing board, described signal plate is for driving ccd signal and resolving crack array position in CCD coordinate; CCD support plate, described CCD support plate is for being adjusted to CCD and the focal plane of slit array relative lens conjugation; Compensation graticle, by being specially designed to carrying slit array and ensureing that slit array and CCD are as face relative lens conjugation; The CCD of Sensitive Apparatus for precise engineering surveying angular surveying it is provided with between described CCD support plate and compensation graticle, the present invention adopts the compensation structural design of graticle, wherein this device utilizes slit array to be imaged on CCD and lift up the photoelectric auto-collimation method for designing of high measurement accuracy, improve high accuracy and the imaging definition of collimator.
Description
Technical field
The present invention relates to optical instrument field, especially relate to a kind of photoelectric auto-collimator.
Background technology
Collimator is to obtain the light beam from infinity by it, and this light beam is directional light. It is the important tool of dress school adjustment optical instrument, is also the important component part in optical metrology instrument, the graticle that adapted is different, together with micrometer eyepiece head, or microscopic system, then can measure the focal length of battery of lens and other image quality. Its operation principle is be fixed on examined workpiece by the attached adjustment type plane mirror joined, and with the attached Gauss autocollimating eyepiece head being assigned in light pipe, is observed by the Gauss eyepiece on light pipe, it is possible to carry out the rectilinearity inspection of Moving Workpieces. The light that light source sends is uniform illumination graticle after condenser lens is assembled and reflected with beam-splitter. When graticle is positioned on the focal plane of object lens, the picture of the graticle infinite point in object lens image space, the just collimated light beam namely sent by collimator. But in practice, certainty of measurement is constantly proposed higher requirement, the digitized requirement introduced especially because automatically checking by modern project technology. And existing collimator can not meet high accuracy and digitized feature.
Summary of the invention
Present invention aim to address problem set forth above, it is provided that a kind of photoelectric auto-collimator of a kind of satisfied high accuracy and digitized feature.
It is an object of the invention to realize as follows: a kind of photoelectric auto-collimator, including signal-processing board, described signal-processing board is for driving ccd signal and settling accounts slit array position in CCD coordinate; CCD support plate, described CCD support plate is for being adjusted to CCD and the focal plane of slit array relative lens conjugation; Compensation graticle, for ensure that the conjugation of slit array and CCD image planes; The CCD of Sensitive Apparatus for precise engineering surveying angular surveying it is provided with between described CCD support plate and compensation graticle.
Above-mentioned a kind of photoelectric auto-collimator, also includes lighting source, and described lighting source is for producing the uniform light of illumination slit; Described lighting source is fixed on signal-processing board, and the light that described lighting source irradiates is dropped on compensation graticle by the hole in CCD support plate.
Above-mentioned a kind of photoelectric auto-collimator, is positioned at described compensation graticle and is provided with slit array, and described slit array is positioned at compensation graticle first half middle part.
Above-mentioned a kind of photoelectric auto-collimator, described slit array is some vertical bar structures.
Advantages of the present invention: the present invention adopts the compensation structural design of graticle, wherein utilizes slit array to be imaged on CCD and lifts up the photoelectric auto-collimation method for designing of high measurement accuracy in this device. Making whole circuit be divided into CCD to drive and two parts of signal processing, light source illuminates slit array 6 by CCD support plate 2 mesopore. This reduces the structure that volume facilitates device to install on CPG550 type collimator, improves precision and the imaging definition of collimator.
Accompanying drawing explanation
Being clearly understood to make present disclosure be easier to, below according to specific embodiment and in conjunction with accompanying drawing, the present invention is further detailed explanation, wherein
Fig. 1 is the structural representation of the present invention;
Fig. 2 is the structure principle chart of the present invention.
Detailed description of the invention:
See described in Fig. 1 and Fig. 2, a kind of photoelectric auto-collimator, including signal-processing board 1, described signal-processing board 1 is for driving ccd signal and settling accounts slit array position in CCD coordinate; CCD support plate 2, described CCD support plate 2 is for being adjusted to CCD4 and the focal plane of slit array relative lens conjugation; Compensation graticle 3, for ensureing the location of slit array; The CCD4 of Sensitive Apparatus for precise engineering surveying angular surveying it is provided with between described CCD support plate 2 and compensation graticle 3. Wherein also including lighting source 5, described lighting source 5 is for producing the uniform light of illumination slit; Described lighting source 5 is fixed on signal-processing board, and the light that described lighting source 5 irradiates is dropped on compensation graticle 3 by the hole in CCD support plate 2. Being positioned at described compensation graticle 3 and be provided with slit array 6, described slit array 6 is positioned at compensation graticle 3 first half middle part, and described slit array 6 is some vertical bar structures.
Its operation principle is: by the object point 7 of light source uniform illumination, and plane mirror 9 is placed to the front end of lens 8 by it on the focal plane of lens 8, and its normal vector is parallel with the optical axis of collimator, and now compensation graticle 3 will have the clear picture point 10 of object point 7. When plane mirror 9 has minor rotation in the horizontal direction, if corner is α, then clear picture point 10 moves to picture point 11, now has:
LBB'=f tan2 α
Wherein f is collimator focal length, when α is only small, has approximation relation:
LBB'≈2fα
Therefore line array CCD is used to measure the position of B or B'. Take full advantage of the feature that line array CCD image-generating unit arranges at equal intervals. Object point 7 is launched the array of 20 slits of growth 4mm, wide 0.1mm, interval 0.1mm. After such array image-forming is on CCD4, utilize pixel center method, it is possible to determine the center of slit array accurately. 0.1 can be obtained when selecting the CCD4 of Pixel-space within 12um " resolution.
Particular embodiments described above; the purpose of the present invention, technical scheme and beneficial effect have been further described; it is it should be understood that; the foregoing is only specific embodiments of the invention; it is not limited to the present invention; all within the spirit and principles in the present invention, any amendment of making, equivalent replacement, improvement etc., should be included within protection scope of the present invention.
Claims (4)
1. a photoelectric auto-collimator, it is characterised in that: including signal-processing board, described signal-processing board is for driving ccd signal and resolving slit array position in CCD coordinate;CCD support plate, described CCD support plate is for being adjusted to CCD and the focal plane of slit array relative lens conjugation; Compensation graticle, for ensureing CCD image planes and the slit array conjugate condition relative to lens; The CCD of the Sensitive Apparatus measured for fine angle it is provided with between described CCD support plate and compensation graticle.
2. a kind of photoelectric auto-collimator according to claim 1, it is characterised in that: also including lighting source, described lighting source is for producing the uniform light of illumination slit; Described lighting source is fixed on signal-processing board, and the light that described lighting source irradiates is dropped on compensation graticle by the hole in CCD support plate.
3. a kind of photoelectric auto-collimator according to claim 2, it is characterised in that: being positioned at described compensation graticle and be provided with slit array, described slit array is positioned at compensation graticle first half middle part.
4. a kind of photoelectric auto-collimator according to claim 3, it is characterised in that: described slit array is some vertical bar structures.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410267727.6A CN104062753B (en) | 2014-06-16 | 2014-06-16 | A kind of photoelectric auto-collimator |
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| CN201410267727.6A CN104062753B (en) | 2014-06-16 | 2014-06-16 | A kind of photoelectric auto-collimator |
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| CN104062753B true CN104062753B (en) | 2016-06-15 |
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| CN104406546B (en) * | 2014-12-03 | 2017-04-05 | 成都姜业光电科技有限公司 | The method that Reference Transforming is realized using removable graticle |
| CN109341596A (en) * | 2018-10-25 | 2019-02-15 | 北京航天计量测试技术研究所 | A kind of autocollimator beam depth of parallelism control method |
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| AU2003220397A1 (en) * | 2002-03-19 | 2003-10-08 | Lasermax, Inc. | Artificial star generation apparatus and method for reflective, refractive and catadioptric telescope systems |
| CN100504293C (en) * | 2007-09-07 | 2009-06-24 | 中国科学院长春光学精密机械与物理研究所 | Device for detecting light axis parallelism of laser and visual light system |
| CN100580366C (en) * | 2008-03-03 | 2010-01-13 | 中国科学院光电技术研究所 | Device for detecting distance between primary mirror and secondary mirror of large telescope |
| CN102175188A (en) * | 2011-01-24 | 2011-09-07 | 上海理工大学 | Embedded photoelectric auto-collimator based on planar array CMOS (Complementary Metal-Oxide-Semiconductor Transistor) image sensor and operation method thereof |
| RU2484508C2 (en) * | 2011-04-28 | 2013-06-10 | ОБЩЕСТВО С ОГРАНИЧЕННОЙ ОТВЕТСТВЕННОСТЬЮ "РусОптикСистем" | Telescopic sight (versions) |
| CN204422861U (en) * | 2014-06-16 | 2015-06-24 | 苏州理欧电子科技有限公司 | A kind of photoelectric auto-collimator |
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Effective date of registration: 20180802 Address after: 215000 401, room 17, 158 Jinfeng Road, hi tech Zone, Suzhou, Jiangsu. Patentee after: Suzhou Zhongke Speed Electronics Co., Ltd. Address before: 215000 room 1101, block B, 168 Xiangcheng Avenue, Xiangcheng District and Xiangcheng District, Suzhou, Jiangsu. Patentee before: Suzhou Li Ou Electronic Science and Technology Co., Ltd. |
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