CN104049326B - Semiconductor laser array output beam well-balancedization and fiber coupling system - Google Patents
Semiconductor laser array output beam well-balancedization and fiber coupling system Download PDFInfo
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- CN104049326B CN104049326B CN201410045319.6A CN201410045319A CN104049326B CN 104049326 B CN104049326 B CN 104049326B CN 201410045319 A CN201410045319 A CN 201410045319A CN 104049326 B CN104049326 B CN 104049326B
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Abstract
The present invention discloses a kind of semiconductor laser array output beam well-balancedization and fiber coupling system, comprise multiple parallel placement and form one-dimensional array semiconductor laser, a fast axis collimation lens and a slow axis collimation lens are successively placed in the front end of semiconductor laser array; The output light of each semiconductor laser element by being deflected by field lens through a field lens vertical with z direction on the z direction vertical with x direction after fast axis collimation lens and slow axis collimation lens, in z direction after certain distance parallel arranged in y-direction; Field lens is made up of multiple sub-lens, and the number of sub-lens is consistent with the semiconductor laser element number exporting beamlet; The output beam of each semiconductor laser element points to optical device and a focus device respectively through collimating lens, in a z-direction again by after field lens; Light beam coupling after focusing enters an output optical fibre.
Description
Technical field
The present invention relates to a kind of semiconductor laser array output beam well-balancedization and fiber coupling system.
Background technology
With the arragement direction of laser instrument for x-axis, due to semiconductor laser one-dimensional array x-axis direction width (being generally 10mm) and beam divergence angle (being generally 8-12 °) with in y-axis direction height (being approximately 1 micron) and beam divergence angle (being generally 30-60 °) difference very greatly, light beam coupling is more difficult.Traditional way adopts the optical fiber identical with number of lasers to assemble a fibre bundle.During coupling before semiconductor laser array in x direction parallel placement one piece of collimation lens, aimed at one by one with each semiconductor laser beam by optical fiber, the output light of each semiconductor laser is coupled in each optical fiber of fibre bundle one by one.The shortcoming of this method is that the output energy in unit area is low because the end area of fibre bundle is large.
Usually the method adopted in order to the energy improved on optical fiber output unit area adopts optical device to split in the x direction the output beam of semiconductor laser array, make the light beam of segmentation produce dislocation in the y-axis direction simultaneously, superposed in the y-axis direction by the light beam of another optical device by each segmentation, after rearrangement in x-y plane homogenising hot spot, be coupled into an optical fiber by focus device.The shortcoming of this method is considering that light beam segmentation number non-light-emitting area domain sizes between the luminous size of all semiconductor lasers and two adjacent semiconductor laser instruments all will be counted in x-axis direction, and improving the energy on optical fiber output unit area has a definite limitation.
Summary of the invention
For the problems referred to above, the invention provides a kind of semiconductor laser one-dimensional array output beam well-balancedization and fiber coupling system.
For achieving the above object, semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system, described system comprises the semiconductor laser group that equidistant parallel arrangement is one-dimensional array, with the arragement direction of described laser array for x-axis, be z-axis perpendicular to described laser array arragement direction, the light beam that described laser instrument exports transmits along the z-axis direction;
Described semiconductor laser group comprises the main laser be arranged in the middle of described one-dimensional array and the sub-laser instrument being arranged in described main laser both sides, and the light beam that described main laser exports is main beam, and the light beam that described sub-laser instrument exports is beamlet;
Described system also comprises the accurate lens of fast axle, the accurate lens of slow axis, field lens, collimation lens that described laser array front end sets gradually and again points to the condenser lens again pointing to the beam outlet of optical device described in optical device and correspondence, the beam outlet of described condenser lens is provided with optical fiber, wherein
The accurate lens of described fast axle, for carrying out the collimation on y-axis direction by the main beam of laser instrument output sub-described in described main laser and each and beamlet and described main beam and beamlet exported;
Described slow axis collimation lens, carries out the collimation on x-axis direction for the described main beam that described fast axis collimation lens exported and described beamlet and described main beam and beamlet is exported;
Described field lens, deflects for the described main beam that exports described slow axis collimation lens and described beamlet, and described main beam and described beamlet are equidistantly arranged output in the y-axis direction;
Described collimation lens, the described beamlet for exporting described field lens carries out the collimation on y-axis direction, makes to parallel in y-z plane through the beamlet of described collimation lens and described main beam;
Describedly again point to optical device, described beamlet for exporting described main beam and described field lens carries out the deflection in x-axis direction, and the main beam making again to point to optical device through described and described beamlet carry out the deflection of equal angular and export in x-axis side;
Described condenser lens, for the described main beam of the described optical device of sensing again output and described beamlet are polymerized to a focus, described focus inputs described optical fiber.
Further, described fast axis collimation lens comprises into the collimation post lens of one-dimensional array arrangement, and wherein, described main laser and the front end of sub-laser instrument described in each are placed with collimation post lens respectively separately.
Further, described slow axis collimation lens comprises into the post lens of one-dimensional array arrangement, and wherein, described main laser and the front end of sub-laser instrument described in each are placed with post lens respectively separately.
Further, described field lens comprises the first plano-convex sub-post lens identical with the quantity of described sub-laser instrument, wherein said first plano-convex sub-post lens and described sub-laser instrument one_to_one corresponding, the sub-post lens of described first plano-convex are arranged successively in x-axis, in y-axis, spacing first is apart from arrangement, and described first distance makes the beamlet equidistant output arranged in parallel in the y-axis direction through described plano-convex lens.
Further, described collimation lens comprises the second plano-convex sub-post lens identical with the quantity of described sub-laser instrument, wherein said second plano-convex sub-post lens and described sub-laser instrument one_to_one corresponding, the sub-post lens of described second plano-convex are arranged successively in x-axis, spacing second distance arrangement in y-axis, described second distance makes to collimate in y-axis direction through the beamlet of described second plano-convex lens, and described beamlet is parallel in y-z plane with described main beam, described main beam and beamlet described in each form stair-stepping parallel beam and export.
Further, the described optical device that again points to comprises stepped base, each ladder of described base is provided with a prism, described prism and described main beam and beamlet one_to_one corresponding described in each, described main beam and described beamlet are carried out deflection in the direction of the x axis by described prism, make through the described described main beam again pointing to optical device all parallel in x-z with y-z plane with described beamlet.
Further, the described optical device that again points to comprises stepped base, each ladder of described base is provided with a catoptron, described catoptron and described main beam and beamlet one_to_one corresponding described in each, described main beam and described beamlet are carried out deflection in the direction of the x axis by described catoptron, make through the described described main beam again pointing to optical device all parallel in x-z with y-z plane with described beamlet.
Further, the end face of described optical fiber is plane, hemisphere face, circular conical surface.
The beneficial effect of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system:
In the present invention, each sub-lens of field lens can control the deflection angle of corresponding Laser Output Beam, by using the output beam buckling phenomenon in the x direction that can compensate to a certain extent and be caused by semiconductor laser one-dimensional array paster process and fast axis collimation lens regulating error together with collimation lens, output beam carry out well-balancedization.
The present invention need not consider the non-luminous region between two adjacent semiconductor laser instruments when carrying out light beam well-balancedization to conductor laser one-dimensional array, by field lens and collimation lens, the position to each independent Laser Output Beam rearranges, the output beam of laser instrument is made to superpose with high density in y-axis direction as far as possible, energy density after raising light beam well-balancedization in unit area and brightness, allow light beam coupling to enter in the optical fiber of a little core diameter.
Accompanying drawing explanation
Fig. 1 is semiconductor laser one-dimensional array light beam well-balancedization in x-z plane and the coupling fiber schematic diagram of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system;
Fig. 2 is semiconductor laser one-dimensional array light beam well-balancedization in y-z plane and the coupling fiber schematic diagram of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system;
Fig. 3 is the front elevation of the field lens of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system;
Fig. 4 is the vertical view of the field lens of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system;
Fig. 5 is the vertical view again pointing to optical device based on reflecting prism of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system;
Fig. 6 is the side view again pointing to optical device based on reflecting prism of the embodiment of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system;
Fig. 7 is the vertical view again pointing to optical device based on catoptron of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system;
Fig. 8 is the side view again pointing to optical device based on catoptron of semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system.
Embodiment
Below in conjunction with Figure of description, the present invention will be further described.
Semiconductor laser array output beam well-balancedization of the present invention and fiber coupling system, described system comprises the semiconductor laser group that equidistant parallel arrangement is one-dimensional array, with the arragement direction of described laser array for x-axis, be z-axis perpendicular to described laser array arragement direction, the light beam that described laser instrument exports transmits along the z-axis direction;
Described semiconductor laser group comprises the main laser be arranged in the middle of described one-dimensional array and the sub-laser instrument being arranged in described main laser both sides, and the light beam that described main laser exports is main beam, and the light beam that described sub-laser instrument exports is beamlet;
Described system also comprises the accurate lens of fast axle, the accurate lens of slow axis, field lens, collimation lens that described laser array front end sets gradually and again points to the condenser lens again pointing to the beam outlet of optical device described in optical device and correspondence, the beam outlet of described condenser lens is provided with optical fiber, wherein
The accurate lens of described fast axle, for carrying out the collimation on y-axis direction by the main beam of laser instrument output sub-described in described main laser and each and beamlet and described main beam and beamlet exported;
Described slow axis collimation lens, carries out the collimation on x-axis direction for the described main beam that exported by the straight lens of described fast fiducial axis and described beamlet and described main beam and beamlet is exported;
Described field lens, deflects for the described main beam that exports described slow axis collimation lens and described beamlet, and described main beam and described beamlet are equidistantly arranged output in the y-axis direction;
Described collimation lens, the described beamlet for exporting described field lens carries out the collimation on y-axis direction, makes to parallel in y-z plane through the beamlet of described collimation lens and described main beam;
Describedly again point to optical device, described beamlet for exporting described main beam and described field lens carries out the deflection in x-axis direction, and the main beam making again to point to optical device through described and described beamlet carry out the deflection of equal angular and export in x-axis side;
Described condenser lens, for the described main beam of the described optical device of sensing again output and described beamlet are polymerized to a focus, described focus inputs described optical fiber.
Further, described fast axis collimation lens comprises into the collimation post lens of one-dimensional array arrangement, and wherein, described main laser and the front end of sub-laser instrument described in each are placed with collimation post lens respectively separately.
Further, described slow axis collimation lens comprises into the post lens of one-dimensional array arrangement, and wherein, described main laser and the front end of sub-laser instrument described in each are placed with post lens respectively separately.
Further, described field lens comprises the first plano-convex sub-post lens identical with the quantity of described sub-laser instrument, wherein said plano-convex sub-post lens and described sub-laser instrument one_to_one corresponding, the sub-post lens of described first plano-convex are arranged successively in x-axis, in y-axis, spacing first is apart from arrangement, and described first distance makes after transmission, equidistantly to arrange output in the y-axis direction in a z-direction through the beamlet of described plano-convex lens.
Further, described collimation lens comprises the second plano-convex sub-post lens identical with the quantity of described sub-laser instrument, wherein said second plano-convex sub-post lens and described sub-laser instrument one_to_one corresponding, the sub-post lens of described second plano-convex are arranged successively in x-axis, spacing second distance arrangement in y-axis, described second distance makes to collimate in y-axis direction through the beamlet of described second plano-convex lens, and described beamlet is parallel in y-z plane with described main beam, described main beam and beamlet described in each form stair-stepping light beam and export.
Further, the described optical device that again points to comprises stepped base, each ladder of described base is provided with a prism, described prism and described main beam and beamlet one_to_one corresponding described in each, described main beam and described beamlet are carried out deflection in the direction of the x axis by described prism, make through the described described main beam again pointing to optical device all parallel in x-z with y-z plane with described beamlet.
Further, the described optical device that again points to comprises stepped base, each ladder of described base is provided with a catoptron, described catoptron and described main beam and beamlet one_to_one corresponding described in each, described main beam and described beamlet are carried out deflection in the direction of the x axis by described catoptron, make through the described described main beam again pointing to optical device all parallel in x-z with y-z plane with described beamlet.
Further, the end face of described optical fiber is plane, hemisphere face, circular conical surface.
As shown in Fig. 1 to 8, multiple semiconductor laser element 2, here only drawn for convenience of description 7 semiconductor laser elements with a determining deviation in the x-direction in a plane parallel being placed on heat sink 1 form one dimension semiconductor laser array.Each semiconductor laser element output beam 3 is propagated along the z direction vertical with x direction.Wherein light beam 4 is positioned in the middle of the light beam boundling that is made up of light beam 3, and be called main beam, the direction of propagation of main beam is optical axis.Place the fast axis collimation lens 5 of a high numerical aperture before each semiconductor laser, noise spectra of semiconductor lasers array output beam 3 collimates in y direction.After fast axis collimation lens 5, place a slow axis collimation lens 6 in the z-direction, every sub-post lens of slow axis collimation lens and each semiconductor laser element one_to_one corresponding, compress the angle of divergence of each conductor laser unit output beam 3 in x-z plane.
After slow axis collimation lens, z direction is placed a field lens 7 vertical with optical axis, this field lens noise spectra of semiconductor lasers unit exports beamlet 3 and deflects in y-z plane, but does not deflect main beam 4.
Field lens 7 is made up of the sub-post lens 12 of multiple first plano-convex.The number of plano-convex sub-post lens 12 is consistent with the semiconductor laser element number exporting beamlet, the corresponding beamlet 3 of the sub-post lens of each first plano-convex.The sub-post lens 12 of the plurality of plano-convex are at main beam 4 both sides, x direction close-packed arrays, stagger in y-direction and highly place, the beam deflection angle that different height is corresponding different, the height staggered ensure deflected beamlet 3 in the z-direction after certain distance transmission in y-direction with certain same intervals parallel arranged.The focal length of the sub-post lens 12 of each plano-convex is different, makes the focus of each deflected light beam be in same position in a z-direction.Main beam 4 by the sub-post lens of plano-convex, does not change beam direction after field lens 7.
This field lens is made up of monolithic glass body, and a surface is plane, and there are the sub-post lens 12 of multiple first plano-convex on another surface, and its manufacture method is identical with slow axis collimation lens 6 with fast axis collimation lens 5.There is sub-post lens 12 one side of the first plano-convex towards semiconductor laser array.
Collimating lens 8 is placed in the direction that field lens 7 is vertical with optical axis below in a z-direction.This collimation lens 8 structure is identical with field lens 7 to be made up of the sub-post lens of multiple second plano-convex, and plane is towards semiconductor laser array.The corresponding deflected sub-beams of the sub-post lens 12 of each plano-convex, the sub-post lens of the plurality of second plano-convex are at main beam 4 both sides, x direction close-packed arrays, stagger in y-direction and highly guarantee to collimate in y-direction every bar deflected beam 3, parallel in y-z plane with main beam 4, reduce the beam divergence angle in y-z plane simultaneously.Ladder light beam bar side by side at certain intervals is in y-direction formed after beamlet 3 and main beam 4 leave collimation lens.
Place one in a z-direction after collimation lens and again point to optical device 9.This again points to optical device 9 and deflects in x-z plane all light beams after collimation lens.This again points to optical device 9 and is made up of stair-stepping base 13 and prism 14.On base adjacent steps in y-direction stagger height and consistent by the interval of ladder light beam bar after collimation lens.Each ladder places a prism 14, and prism 14 can be the reflecting prism of right-angle prism or other shape.The corresponding incident beam of each reflecting prism 14, carries out the deflection of equal angular in the x direction to incident beam, all light beams are overlapped in the x direction after leaving again sensing optical device 9, all parallel in x-z with y-z plane.Light beam boundling after overshoot and z direction angled, this angle can be 90 °.
This again points to optical device 9 and also can be made up of stair-stepping base 15 and catoptron 16.On base adjacent steps in y-direction stagger height and consistent by the interval of ladder light beam bar after collimation lens.Each ladder is placed a catoptron 16.
Place a condenser lens 10 again pointing on optical device 9 direction vertical with optical axis below.This condenser lens can be a non-spherical lens, and aspheric surfaces is towards again pointing to optical device.This condenser lens is focused into a focus the light beam of well-balancedization, before the end face that focus is positioned at coupled fiber 11, after end face surface or end face.
Finally it should be noted that: above embodiment is only for illustration of technical scheme of the present invention, not for limitation of the present invention, although with reference to above-described embodiment to invention has been detailed description, it will be understood by those skilled in the art that: still can modify to the specific embodiment of the present invention or equivalent replacement, and not departing from any amendment of spirit and scope of the invention or equivalent replacement, it all should be encompassed in right of the present invention.
Claims (8)
1. semiconductor laser array output beam well-balancedization and fiber coupling system, described system comprises the semiconductor laser group that equidistant parallel arrangement is one-dimensional array, with the arragement direction of described laser array for x-axis, be z-axis perpendicular to described laser array arragement direction, the light beam that described laser instrument exports transmits along the z-axis direction;
Described semiconductor laser group comprises the main laser be arranged in the middle of described one-dimensional array and the sub-laser instrument being arranged in described main laser both sides, and the light beam that described main laser exports is main beam, and the light beam that described sub-laser instrument exports is beamlet; It is characterized in that:
Described system also comprises the accurate lens of fast axle, the accurate lens of slow axis, field lens, collimation lens that described laser array front end sets gradually and again points to the condenser lens again pointing to the beam outlet of optical device described in optical device and correspondence, the beam outlet of described condenser lens is provided with optical fiber, wherein
The accurate lens of described fast axle, for carrying out the collimation on y-axis direction by the main beam of laser instrument output sub-described in described main laser and each and beamlet and described main beam and beamlet exported;
The accurate lens of described slow axis, carry out the collimation on x-axis direction for the described main beam that exported by the accurate lens of described fast axle and described beamlet and described main beam and beamlet are exported;
Described field lens, deflects for the described main beam that exports the accurate lens of described slow axis and described beamlet, and described main beam and described beamlet are equidistantly arranged output in the y-axis direction;
Described collimation lens, the described beamlet for exporting described field lens carries out the collimation on y-axis direction, makes to parallel in y-z plane through the beamlet of described collimation lens and described main beam;
Describedly again point to optical device, described beamlet for exporting described main beam and described field lens carries out the deflection in x-axis direction, and the main beam making again to point to optical device through described and described beamlet carry out the deflection of equal angular and export in x-axis side;
Described condenser lens, for the described main beam of the described optical device of sensing again output and described beamlet are polymerized to a focus, described focus inputs described optical fiber.
2. semiconductor laser array output beam well-balancedization according to claim 1 and fiber coupling system, it is characterized in that: described fast axis collimation lens comprises into the collimation post lens of one-dimensional array arrangement, wherein, described main laser and the front end of sub-laser instrument described in each are placed with collimation post lens respectively separately.
3. semiconductor laser array output beam well-balancedization according to claim 1 and fiber coupling system, it is characterized in that: described slow axis collimation lens comprises into the post lens of one-dimensional array arrangement, wherein, described main laser and the front end of sub-laser instrument described in each are placed with post lens respectively separately.
4. semiconductor laser array output beam well-balancedization according to claim 1 and fiber coupling system, it is characterized in that: described field lens comprises the first plano-convex sub-post lens identical with the quantity of described sub-laser instrument, wherein said first plano-convex sub-post lens and described sub-laser instrument one_to_one corresponding, the sub-post lens of described first plano-convex are arranged successively in x-axis, in y-axis, spacing first is apart from arrangement, and described first distance makes the beamlet equidistant output arranged in parallel in the y-axis direction through described plano-convex lens.
5. semiconductor laser array output beam well-balancedization according to claim 1 and fiber coupling system, it is characterized in that: described collimation lens comprises the second plano-convex sub-post lens identical with the quantity of described sub-laser instrument, wherein said second plano-convex sub-post lens and described sub-laser instrument one_to_one corresponding, the sub-post lens of described second plano-convex are arranged successively in x-axis, spacing second distance arrangement in y-axis, described second distance makes to collimate in y-axis direction through the beamlet of described second plano-convex lens, and described beamlet is parallel in y-z plane with described main beam, described main beam and beamlet described in each form stair-stepping light beam and export.
6. semiconductor laser array output beam well-balancedization according to claim 1 and fiber coupling system, it is characterized in that: the described optical device that again points to comprises stepped base, each ladder of described base is provided with a prism, described prism and described main beam and beamlet one_to_one corresponding described in each, described main beam and described beamlet are carried out deflection in the direction of the x axis by described prism, make through the described described main beam again pointing to optical device all parallel in x-z with y-z plane with described beamlet.
7. semiconductor laser array output beam well-balancedization according to claim 1 and fiber coupling system, it is characterized in that: the described optical device that again points to comprises stepped base, each ladder of described base is provided with a catoptron, described catoptron and described main beam and beamlet one_to_one corresponding described in each, described main beam and described beamlet are carried out deflection in the direction of the x axis by described catoptron, make through the described described main beam again pointing to optical device all parallel in x-z with y-z plane with described beamlet.
8. semiconductor laser array output beam well-balancedization according to claim 1 and fiber coupling system, is characterized in that: the end face of described optical fiber is plane, hemisphere face, circular conical surface.
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CN107121781B (en) * | 2017-06-19 | 2023-12-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Beam shaping device |
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JPH06227040A (en) * | 1992-12-07 | 1994-08-16 | Eastman Kodak Co | Multibeam laser printer |
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US5982553A (en) * | 1997-03-20 | 1999-11-09 | Silicon Light Machines | Display device incorporating one-dimensional grating light-valve array |
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JPH06227040A (en) * | 1992-12-07 | 1994-08-16 | Eastman Kodak Co | Multibeam laser printer |
US5521748A (en) * | 1994-06-16 | 1996-05-28 | Eastman Kodak Company | Light modulator with a laser or laser array for exposing image data |
CN1389007A (en) * | 2000-08-09 | 2003-01-01 | 皇家菲利浦电子有限公司 | Laser system |
CN101165540A (en) * | 2006-06-10 | 2008-04-23 | 翰兹-利索兹切科专利管理有限公司及两合公司 | Apparatus for generating a homogeneous angular distribution of laser irradiation |
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