CN104045019B - A kind of Synchronous lifting moves in and out mechanism - Google Patents
A kind of Synchronous lifting moves in and out mechanism Download PDFInfo
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- CN104045019B CN104045019B CN201310075487.5A CN201310075487A CN104045019B CN 104045019 B CN104045019 B CN 104045019B CN 201310075487 A CN201310075487 A CN 201310075487A CN 104045019 B CN104045019 B CN 104045019B
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- lift columns
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Abstract
A kind of Synchronous lifting moves in and out mechanism, including lift columns, drive mechanism, moves in and out mechanism and handle;Move in and out mechanism described in the driving of described drive mechanism to move up and down along described lift columns;The described mechanism that moves in and out includes mobile load bearing cross beam and moves in and out drive mechanism;Described mobile load bearing cross beam includes that crossbeam and slide rail, described slide rail include being arranged on the track of described crossbeam both sides and arrange the chute outside described track;The described drive mechanism that moves in and out is connected with described chute, drives described chute to slide on described slide rail;Described handle is connected with described drive mechanism.
Description
Technical field
The present invention relates to field of lithography, the Synchronous lifting particularly for lithographic equipment moves in and out mechanism.
Background technology
At present hoisting mechanism has number of different types, conventional for chain-type, sling type, rack type, cylinder type, and these are several for Worm-gear type.Type of drive then has manual mode, electrodynamic type, fluid pressure type etc..
Example for some particular/special requirement, it is necessary to careful selection structure and type of drive just can meet requirement.Synchronous lifting mechanism as described by Chinese patent application CN200810233969.8 requires to have employed chain structure for meeting heavy duty, and driving aspect have employed electrodynamic type.And for meeting heavy duty and improving stability, the synchronous lifting mechanism described by Chinese patent application CN200620040835.0 requires that requirement have employed corner sling type structure, each angle of plummer is respectively arranged with a hoist cable seat connection has wirerope, driving aspect to have employed fluid pressure type.
But to some precision equipment such as lithographic equipment, during its integrated and maintenance maintenance, often mask platform is risen to certain altitude and move in and out again.Its precision, environment cleanliness, space hold require the highest, and load-carrying requires relatively low.And the lifting being had at present and travel mechanism not by lifting and move in and out mechanism's integrated design, Liang Tao mechanism separately designs and takes up room greatly.The most unrealized linkage of hoisting mechanism itself simultaneously, the synchronicity of lifting is bad, the most stuck.And using the electric systems such as servomotor to link, cost is the most fairly expensive, and structure is more complicated, and action required space is big, also flexible not as convenient manual operation.And the type of drive of widely used fluid pressure type is not suitable for requiring lower use at clean environment in conventional environment.
Summary of the invention
In order to solve the problems referred to above, the present invention proposes a kind of Synchronous lifting and moves in and out mechanism, and this mechanism includes lift columns, drive mechanism, moves in and out mechanism and handle;Move in and out mechanism described in the driving of described drive mechanism to move up and down along described lift columns;The described mechanism that moves in and out includes mobile load bearing cross beam and moves in and out drive mechanism;Described mobile load bearing cross beam includes that crossbeam and slide rail, described slide rail include being arranged on the track of described crossbeam both sides and arrange the chute outside described track;The described drive mechanism that moves in and out is connected with described chute, drives described chute to slide on described slide rail;Described handle is connected with described drive mechanism.
Wherein, described lift columns has four, is equipped with gear-box in every lift columns;Moved load bearing cross beam by first between the first lift columns and the second lift columns in described lift columns to connect, moved load bearing cross beam by second between the 3rd lift columns and the 4th lift columns and connect;Between described second lift columns and the 3rd lift columns, there is the first power transmission shaft;Between described 4th lift columns and the first lift columns, there is second driving shaft;It is provided with the 3rd power transmission shaft between described first lift columns and the second lift columns;Described first two ends moving load bearing cross beam are connected with the first gear-box in described first lift columns and the second lift columns and the second gear-box respectively;Described second two ends moving load bearing cross beam are even connected with the 4th gear-box with the 3rd gear-box in described 3rd lift columns and the 4th lift columns respectively;The two ends of described first power transmission shaft are connected with described second gear-box and the 3rd gear-box respectively;The two ends of described second driving shaft are connected with the 4th gear-box and the first gear-box respectively;The two ends of described 3rd power transmission shaft are connected with the first gear-box and the 4th gear-box respectively;Described first power transmission shaft, second driving shaft and the 3rd power transmission shaft transmit power between each lift columns.
Wherein, move in and out drive mechanism described in and include screw rod, the nut being arranged on described screw rod and the 4th power transmission shaft;Described 4th power transmission shaft is arranged in described first gear-box;Described screw rod two ends are connected with the first gear-box and the 4th gear-box respectively.
Wherein, described nut is connected with described chute, and described 4th power transmission shaft is connected by belt wheel with described screw rod, drives the most described screw motion of described nut, and then drives described chute along described slide.
Synchronous lifting according to the present invention moves in and out mechanism and utilizes same structure to synchronize achieve lifting and move in and out, this integrated design is taken up space little, the Gear Transmission Design of synchronous lifting mechanism improves lifting synchronicity, manual actuation design makes flexible operation, and will not discharge pollution, thus it is particularly suitable for the lifting of middle side crops industry and moves in and out.
Accompanying drawing explanation
Can be described in detail by invention below about the advantages and spirit of the present invention and institute's accompanying drawings is further understood.
Fig. 1 show the Synchronous lifting according to the present invention and moves in and out the population structure schematic diagram of mechanism;
Fig. 2 show the structural representation of gear-box;
Fig. 3 a and 3b show the structural representation moving in and out mechanism;
Fig. 4 show transmission schematic diagram.
Detailed description of the invention
Describe the specific embodiment of the present invention below in conjunction with the accompanying drawings in detail.
Synchronous lifting according to the present invention move in and out mechanism population structure as it is shown in figure 1, this mechanism include four lift columns, three power transmission shafts with its belonging to shaft joint, one move in and out drive mechanism, two mobile load bearing cross beams, handles.Move in and out drive mechanism and mobile load bearing cross beam composition moves in and out mechanism.Between lift columns 1 and lift columns 7, connected together by mobile load bearing cross beam 2 and 5 respectively between lift columns 3 and lift columns 4, transmitting power by two power transmission shafts 6 and a power transmission shaft 8 between each lift columns, power transmission shaft 6 two ends are connected with gear shaft 23 by universal joint shaft joint.Separately it is connected between lift columns 1 with lift columns 7 and moves in and out mechanism 9.Mobile 2 two lift columns 1 and 7 of load bearing cross beam connect together and form a unit.Mobile 5 two lift columns 3 and 4 of load bearing cross beam connect together and form another unit.Promote the handle 10 being provisionally attached in lift columns 1 by rotation when of moving in and out drive mechanism to realize, the when of removal, be also adopted by handle manual actuation.
In order to ensure Synchronous lifting, lifting tooth roller box it is provided with in lift columns, gear-box needs correctly to be assembled, as shown in Figure 2, dead eye in bearing block 24, location side plate 27 needs to align axle center, so being machined with two pairs of dowel holes on gear-box 211, being used for positioning bearing seat 24 a pair, another is to being used for positioning side plate 27.Also have corresponding dowel hole on bearing block 24 and side plate 27, use during assembling these location holes penetrate alignment pin positioning bearing seat 24 and side plate 27 with ensure both dead eye to the heart.Bevel gear 29, bearing 22, bearing 28, worm screw 210 and round nut 21 are first fitted together, and adjust its preload by round nut 21.Then round nut 21, bearing 22, bearing 25, bevel gear 26 are contained in inside part 24 with axle 23 in advance, then assembly are arranged on part 211.With the gap between clearance gauge detection bevel gear 26 and bevel gear 29, adjust gap by the pad inside increase and decrease assembly 24, be allowed to arrive the requirement of regulation.As a example by the only gear-box in lift columns 7 described above, accompanying drawing 4 and related content thereof are shown in the explanation of concrete drive mechanism.
As best shown in figures 3 a and 3b, move in and out mechanism and there are mobile load bearing cross beam and drive mechanism two parts.At the two ends of mobile load bearing cross beam 2, two bearings 31 are installed, are individually fixed on lift columns 1 and the lifting tooth roller box within lift columns 4.The standing part of a slide rail 33 is respectively installed in two sides of crossbeam 2, and the slipper of slide rail 33 is then fixed with sliding rail frame 34, makes sliding rail frame 34 by slide rail 33 can crossbeam 2 be slidably relatively.Drive mechanism is utilized to drive mobile load bearing cross beam, being described as follows of the concrete structure of drive mechanism.Screw rod 38 two ends are respectively fixed in lift columns 1 and lift columns 4 with a bearing block 37 and bearing block 310.Power transmission shaft 313 is arranged on bearing block 312 and 314 also by bearing, on bearing block 312 and 314 lifting tooth roller boxs being arranged within lift columns 4.One end of power transmission shaft 313 is provided with belt wheel, can transfer power on screw rod 38 with Timing Belt 311, and the other end is shaped with square toes, is used for installing handle when needed.The nut that on screw rod 38, surface cover is connected with the sliding rail frame 34 of mobile load bearing cross beam, therefore when lift mechanism lifts to top, after i.e. two mobile load bearing cross beams cross the top of four lift columns, with rotatable handle power transmission shaft 313, screw rod 38 just can be driven to rotate, and the nut on screw rod 38 just can drive load weight on two one slide rail framves 34 to move in and out along crossbeam 2.
As shown in Figure 4, rotate the handle as driving link, drive link I is driven to rotate, bevel gear 29, bevel gear 103, worm screw 210, worm screw 303, universal joint 403, universal joint 404 and drive link I are fixed together, so rotating together with regard to band dynamic bevel gear 29, bevel gear 103, worm screw 210, worm screw 303, universal joint 403, universal joint 404.Bevel gear 29 engages with bevel gear 26, and bevel gear 26, universal joint 401, universal joint 402, worm screw 301 are fixed together, thus the rotation of bevel gear 102 has just driven bevel gear 26, universal joint 401, universal joint 402, worm screw 301 to rotate together.Bevel gear 103 engages with bevel gear 104, and bevel gear 104, universal joint 405, universal joint 406, worm screw 304 are fixed together, and has just driven bevel gear 104, universal joint 405, universal joint 406, worm screw 30 to rotate together so bevel gear 103 rotates.Worm screw 301 engages with worm gear 201, worm screw 302 engages with worm gear 202, worm screw 303 engages with worm gear 203, worm screw 304 engages with worm gear 204.Thus turning handle, the most just drive worm gear 201, worm gear 202, worm gear 203, worm gear 204 synchronous axial system, and then drive weight to be lifted up.
The preferred embodiment of the simply present invention described in this specification, above example is only in order to illustrate technical scheme rather than limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (3)
1. Synchronous lifting moves in and out a mechanism, including lift columns, drive mechanism, moves in and out mechanism and handle;Move in and out mechanism described in the driving of described drive mechanism to move up and down along described lift columns;The described mechanism that moves in and out includes mobile load bearing cross beam and moves in and out drive mechanism;Described mobile load bearing cross beam includes that crossbeam and slide rail, described slide rail include being arranged on the track of described crossbeam both sides and arrange the chute outside described track;The described drive mechanism that moves in and out is connected with described chute, drives described chute to slide on described slide rail;Described handle is connected with described drive mechanism;
Described lift columns has four, is equipped with gear-box in every lift columns;Moved load bearing cross beam by first between the first lift columns and the second lift columns in described lift columns to connect, moved load bearing cross beam by second between the 3rd lift columns and the 4th lift columns and connect;Between described second lift columns and the 3rd lift columns, there is the first power transmission shaft;Between described 4th lift columns and the first lift columns, there is second driving shaft;It is provided with the 3rd power transmission shaft between described first lift columns and the second lift columns;Described first two ends moving load bearing cross beam are connected with the first gear-box in described first lift columns and the second lift columns and the second gear-box respectively;Described second two ends moving load bearing cross beam are even connected with the 4th gear-box with the 3rd gear-box in described 3rd lift columns and the 4th lift columns respectively;The two ends of described first power transmission shaft are connected with described second gear-box and the 3rd gear-box respectively;The two ends of described second driving shaft are connected with the 4th gear-box and the first gear-box respectively;The two ends of described 3rd power transmission shaft are connected with the first gear-box and the 4th gear-box respectively;Described first power transmission shaft, second driving shaft and the 3rd power transmission shaft transmit power between each lift columns.
Synchronous lifting the most according to claim 1 moves in and out mechanism, wherein, described in move in and out drive mechanism and include screw rod, the nut being arranged on described screw rod and the 4th power transmission shaft;Described 4th power transmission shaft is arranged in described first gear-box;Described screw rod two ends are connected with the first gear-box and the 4th gear-box respectively.
Synchronous lifting the most according to claim 2 moves in and out mechanism, wherein, described nut is connected with described chute, and described 4th power transmission shaft is connected by belt wheel with described screw rod, drive the most described screw motion of described nut, and then drive described chute along described slide.
Priority Applications (1)
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CN201310075487.5A CN104045019B (en) | 2013-03-11 | 2013-03-11 | A kind of Synchronous lifting moves in and out mechanism |
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CN201310075487.5A CN104045019B (en) | 2013-03-11 | 2013-03-11 | A kind of Synchronous lifting moves in and out mechanism |
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CN104045019A CN104045019A (en) | 2014-09-17 |
CN104045019B true CN104045019B (en) | 2016-08-03 |
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CN201310075487.5A Active CN104045019B (en) | 2013-03-11 | 2013-03-11 | A kind of Synchronous lifting moves in and out mechanism |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107885037B (en) | 2016-09-30 | 2020-01-24 | 上海微电子装备(集团)股份有限公司 | Workpiece table moving-in and moving-out device |
CN109051558A (en) * | 2018-09-10 | 2018-12-21 | 华南理工大学 | A kind of device for regulating tightness of synchronous belt and lifting device |
CN115072606B (en) * | 2022-05-25 | 2024-02-09 | 无锡圣迈亿精密制造科技有限公司 | Anti-toppling safety protection jacking transplanter lifting mechanism |
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CN2361152Y (en) * | 1999-01-30 | 2000-02-02 | 白新军 | Multi-functional table |
JP2000344478A (en) * | 1999-06-04 | 2000-12-12 | Nippon Yusoki Co Ltd | Automatic guided vehicle |
US6550584B1 (en) * | 1998-10-15 | 2003-04-22 | Snap-On Deutschland Holding Gmbh | Vehicle lift of the type with four columns |
JP2004182352A (en) * | 2002-11-29 | 2004-07-02 | Kazuo Saegusa | Lifter for portable wheelchair |
DE202007017404U1 (en) * | 2007-12-13 | 2009-04-16 | Annas, Sven | Lifting platform for motor vehicles with exhaust extraction |
CN201236129Y (en) * | 2008-05-10 | 2009-05-13 | 海克斯康测量技术(青岛)有限公司 | Synchronous lifting and lowering mechanism and material feeding/discharging system |
CN101759120A (en) * | 2009-12-31 | 2010-06-30 | 四川虹欧显示器件有限公司 | Lifting device |
CN201560095U (en) * | 2009-11-24 | 2010-08-25 | 上海东富龙科技股份有限公司 | Elevating transmission device of automatic guiding dolly for sterile room |
CN202335531U (en) * | 2011-08-28 | 2012-07-18 | 何少华 | Dining table with automatically flexible and liftable tabletop |
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2013
- 2013-03-11 CN CN201310075487.5A patent/CN104045019B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US6550584B1 (en) * | 1998-10-15 | 2003-04-22 | Snap-On Deutschland Holding Gmbh | Vehicle lift of the type with four columns |
CN2361152Y (en) * | 1999-01-30 | 2000-02-02 | 白新军 | Multi-functional table |
JP2000344478A (en) * | 1999-06-04 | 2000-12-12 | Nippon Yusoki Co Ltd | Automatic guided vehicle |
JP2004182352A (en) * | 2002-11-29 | 2004-07-02 | Kazuo Saegusa | Lifter for portable wheelchair |
DE202007017404U1 (en) * | 2007-12-13 | 2009-04-16 | Annas, Sven | Lifting platform for motor vehicles with exhaust extraction |
CN201236129Y (en) * | 2008-05-10 | 2009-05-13 | 海克斯康测量技术(青岛)有限公司 | Synchronous lifting and lowering mechanism and material feeding/discharging system |
CN201560095U (en) * | 2009-11-24 | 2010-08-25 | 上海东富龙科技股份有限公司 | Elevating transmission device of automatic guiding dolly for sterile room |
CN101759120A (en) * | 2009-12-31 | 2010-06-30 | 四川虹欧显示器件有限公司 | Lifting device |
CN202335531U (en) * | 2011-08-28 | 2012-07-18 | 何少华 | Dining table with automatically flexible and liftable tabletop |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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