CN104045019A - Synchronizing lifting shifting-in and shifting-out mechanism - Google Patents
Synchronizing lifting shifting-in and shifting-out mechanism Download PDFInfo
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- CN104045019A CN104045019A CN201310075487.5A CN201310075487A CN104045019A CN 104045019 A CN104045019 A CN 104045019A CN 201310075487 A CN201310075487 A CN 201310075487A CN 104045019 A CN104045019 A CN 104045019A
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- lift columns
- gear case
- moves
- transmission shaft
- shifting
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Abstract
The invention discloses a synchronizing lifting shifting-in and shifting-out mechanism, which comprises lifting pillars, a transmission mechanism, a shifting-in and shifting-out mechanism and a handle, wherein the transmission mechanism is used for driving the shifting-in and shifting-out mechanism to do up-and-down motion along the lifting pillars; the shifting-in and shifting-out mechanism comprises moving bearing cross beams and a shifting-in and shifting-out driving mechanism; each moving bearing cross beam comprises a cross beam and sliding rails; each sliding rail comprises tracks and chutes, wherein the tracks are respectively arranged at both sides of the corresponding cross beam, and the chutes are respectively formed in outer sides of the tracks; the shifting-in and shifting-out driving mechanism is connected with the chutes, and the chutes are driven to slide on the sliding rails; the handle is connected with the transmission mechanism.
Description
Technical field
The present invention relates to field of lithography, relate in particular to for the Synchronous lifting of lithographic equipment and move in and out mechanism.
Background technology
At present lift system has number of different types, and conventional is chain-type, sling type, and rack-and-pinion, cylinder type, these are several for Worm-gear type.Type of drive has manual mode, electrodynamic type, fluid pressure type etc.
For the example of some particular/special requirement, must careful selection structure and type of drive just can meet the demands.Synchronous lifting mechanism as described in Chinese patent application CN200810233969.8 requires to have adopted chain structure for meeting heavy duty, and driving aspect has adopted electrodynamic type.And the described synchronous lifting mechanism of Chinese patent application CN200620040835.0 has adopted four jiaos of sling type structures for meeting heavy duty and improving stability requirement requirement, each angle of plummer respectively has a hoist cable seat to be connected with wirerope, and driving aspect has adopted fluid pressure type.
But some precision equipment, as lithographic equipment, in its integrated and maintenance maintenance process, often to be risen to certain altitude by mask platform and be moved in and out.Its precision, environment cleanliness, space hold require all very high, and load-carrying requires relatively low.And current had lifting and travel mechanism not by lifting with move in and out mechanism's integrated design, Liang Tao mechanism design respectively take up room large.Also unrealized interlock of lift system itself simultaneously, the synchronism of lifting is bad, easily stuck.And adopt the electric systems such as servomotor to link, and cost is quite expensive again, and structure is more complicated, and action required space is large, also be not as flexible as convenient manual operation.And in conventional environment, extensively adopt the type of drive of fluid pressure type to be not suitable for requiring lower use at clean environment.
Summary of the invention
In order to address the above problem, the present invention proposes a kind of Synchronous lifting and move in and out mechanism, this mechanism comprises lift columns, transmission device, moves in and out mechanism and handle; Described transmission device moves in and out mechanism along described lift columns up-and-down movement described in driving; The described mechanism that moves in and out comprises mobile load bearing cross beam and moves in and out driver train; Described mobile load bearing cross beam comprises crossbeam and slide rail, and described slide rail comprises the chute that is arranged on the track of described crossbeam both sides and described track outside is set; The described driver train that moves in and out is connected with described chute, drives described chute to slide on described slide rail; Described handle is connected with described transmission device.
Wherein, described lift columns has four, in every lift columns, is equipped with gear case; Between the first lift columns in described lift columns and the second lift columns, move load bearing cross beam by first and connect, between the 3rd lift columns and the 4th lift columns, move load bearing cross beam by second and connect; Between described the second lift columns and the 3rd lift columns, there is the first transmission shaft; Between described the 4th lift columns and the first lift columns, there is second driving shaft; Between described the first lift columns and the second lift columns, be provided with the 3rd transmission shaft; The described first two ends of moving load bearing cross beam are connected with the first gear case and the second gear case in described the first lift columns and the second lift columns respectively; The described second two ends of moving load bearing cross beam connect with the 3rd gear case in described the 3rd lift columns and the 4th lift columns respectively and the 4th gear case is connected; The two ends of described the first transmission shaft are connected with described the second gear case and the 3rd gear case respectively; The two ends of described second driving shaft are connected with the 4th gear case and the first gear case respectively; The two ends of described the 3rd transmission shaft are connected with the first gear case and the 4th gear case respectively; Described the first transmission shaft, second driving shaft and the 3rd transmission shaft transferring power between each lift columns.
Wherein, described in, moving in and out driver train comprises screw rod, is arranged on nut and the 4th transmission shaft on described screw rod; Described the 4th transmission shaft is arranged in described the first gear case; Described screw rod two ends are connected with the first gear case and the 4th gear case respectively.
Wherein, described nut is connected with described chute, and described the 4th transmission shaft is connected by belt wheel with described screw rod, drives the relatively described screw motion of described nut, and then drives described chute to slide along described Guidong.
Synchronous lifting according to the present invention moves in and out mechanism and utilizes same structure synchronously to realize lifting and moved in and out, this integrated design takes up space little, the Gear Transmission Design of synchronous lifting mechanism has improved lifting synchronism, manual drives design makes flexible operation, and can not discharge pollution, thereby be particularly suitable for the lifting of medium and small load and move in and out.
Brief description of the drawings
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Figure 1 shows that Synchronous lifting according to the present invention moves in and out the overall structure schematic diagram of mechanism;
Figure 2 shows that the structural representation of gear case;
Fig. 3 a and 3b are depicted as the structural representation that moves in and out mechanism;
Figure 4 shows that transmission schematic diagram.
Detailed description of the invention
Describe specific embodiments of the invention in detail below in conjunction with accompanying drawing.
As shown in Figure 1, this mechanism comprises four lift columns, three transmission shafts and drive coupling under it, one move in and out driver train, two mobile load bearing cross beams, a handle for the overall structure that Synchronous lifting according to the present invention moves in and out mechanism.Moving in and out driver train and mobile load bearing cross beam forms and moves in and out mechanism.Between lift columns 1 and lift columns 7, between lift columns 3 and lift columns 4, connected together by mobile load bearing cross beam 2 and 5 respectively, between each lift columns, by two transmission shafts 6 and transmission shaft 8 transferring power, transmission shaft 6 two ends are connected with gear wheel shaft 23 by universal-joint drive coupling.Between lift columns 1 and lift columns 7, be separately connected with and move in and out mechanism 9.Mobile load bearing cross beam 2 connects together two lift columns 1 and 7 to form a unit.Mobile load bearing cross beam 5 connects together two lift columns 3 and 4 to form another unit.When lifting moves in and out driver train, realize by rotate the handle 10 being installed in lift columns 1 temporarily, when shifting out, also adopt handle manual drives.
In order to ensure Synchronous lifting, in lift columns, be provided with lifting tooth roller box, gear case need to correctly be assembled, as shown in Figure 2, bearing hole in bearing seat 24, location side plate 27 need to align axle center, so be processed with two pairs of dowel holes on gear case 211, a pair of for positioning bearing seat 24, another is to for locating side plate 27.On bearing seat 24 and side plate 27, also have corresponding dowel hole, when assembling, use these knock holees penetrate locating dowel pin positioning bearing seat 24 and side plate 27 with ensure the two bearing hole to the heart.Finishing bevel gear cuter 29, bearing 22, bearing 28, worm screw 210 and circular nut 21 are first fitted together, and adjust its preload by circular nut 21.Then circular nut 21, bearing 22, bearing 25, finishing bevel gear cuter 26 are contained in to part 24 the insides in advance with axle 23, then handle component is arranged on part 211.With the gap between clearance gauge detection cone gear 26 and finishing bevel gear cuter 29, come adjusting play by the pad of increase and decrease assembly 24 the insides, make it to arrive the requirement of regulation.More than explanation is only taking the gear case in lift columns 7 as example, and accompanying drawing 4 and related content thereof are shown in concrete drive mechanism explanation.
As shown in Fig. 3 a and 3b, move in and out mechanism and there are mobile load bearing cross beam and driver train two parts.Two bearings 31 are installed at the two ends of mobile load bearing cross beam 2, it is fixed on the lifting tooth roller box of lift columns 1 and lift columns 4 inside separately.The each fixed part that a slide rail 33 is installed in two sides of crossbeam 2, the slipper of slide rail 33 is fixing with sliding rail frame 34, make sliding rail frame 34 by slide rail 33 relatively crossbeam 2 be free to slide.Utilize driver train to drive mobile load bearing cross beam, being described below of the concrete structure of driver train.Screw rod 38 two ends are respectively fixed in lift columns 1 and lift columns 4 with a bearing seat 37 and bearing seat 310.Transmission shaft 313 is also arranged on bearing seat 312 and 314 by bearing, and 312 and 314 of bearing seats are arranged on the lifting tooth roller box of lift columns 4 inside.One end of transmission shaft 313 is provided with belt wheel, can with Timing Belt 311 by transmission of power to screw rod 38, the other end is shaped with square toes, is used for mounting handle when needed.The nut that on screw rod 38, surface cover is connected with the sliding rail frame of mobile load bearing cross beam 34, therefore in the time that lift mechanism lifts arrives top, two mobile load bearing cross beams are crossed behind the top of four lift columns, with rotatable handle transmission shaft 313, just can drive screw rod 38 to rotate, the nut on screw rod 38 just can drive the weight of load on two one slide rail framves 34 to move in and out along crossbeam 2.
As shown in Figure 4, rotate the handle as driving link, drive drive link I to rotate, finishing bevel gear cuter 29, finishing bevel gear cuter 103, worm screw 210, worm screw 303, universal-joint 403, universal-joint 404 and drive link I are fixed together, so be just with dynamic bevel gear 29, finishing bevel gear cuter 103, worm screw 210, worm screw 303, universal-joint 403, universal-joint 404 to rotate together.Finishing bevel gear cuter 29 engages with finishing bevel gear cuter 26, and finishing bevel gear cuter 26, universal-joint 401, universal-joint 402, worm screw 301 are fixed together, thereby the rotation of finishing bevel gear cuter 102 has just driven finishing bevel gear cuter 26, universal-joint 401, universal-joint 402, worm screw 301 to rotate together.Finishing bevel gear cuter 103 engages with finishing bevel gear cuter 104, and finishing bevel gear cuter 104, universal-joint 405, universal-joint 406, worm screw 304 are fixed together, and has just driven finishing bevel gear cuter 104, universal-joint 405, universal-joint 406, worm screw 30 to rotate together so finishing bevel gear cuter 103 rotates.Worm screw 301 engages with worm gear 201, worm screw 302 engages with worm gear 202, worm screw 303 engages with worm gear 203, worm screw 304 engages with worm gear 204.Thereby turning handle, also just drive worm gear 201, worm gear 202, worm gear 203, worm gear 204 synchronously to rotate, and then driven weight upwards to promote.
Described in this specification sheets is preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (4)
1. Synchronous lifting moves in and out a mechanism, comprises lift columns, transmission device, moves in and out mechanism and handle; Described transmission device moves in and out mechanism along described lift columns up-and-down movement described in driving; The described mechanism that moves in and out comprises mobile load bearing cross beam and moves in and out driver train; Described mobile load bearing cross beam comprises crossbeam and slide rail, and described slide rail comprises the chute that is arranged on the track of described crossbeam both sides and described track outside is set; The described driver train that moves in and out is connected with described chute, drives described chute to slide on described slide rail; Described handle is connected with described transmission device.
2. Synchronous lifting according to claim 1 moves in and out mechanism, and wherein, described lift columns has four, in every lift columns, is equipped with gear case; Between the first lift columns in described lift columns and the second lift columns, move load bearing cross beam by first and connect, between the 3rd lift columns and the 4th lift columns, move load bearing cross beam by second and connect; Between described the second lift columns and the 3rd lift columns, there is the first transmission shaft; Between described the 4th lift columns and the first lift columns, there is second driving shaft; Between described the first lift columns and the second lift columns, be provided with the 3rd transmission shaft; The described first two ends of moving load bearing cross beam are connected with the first gear case and the second gear case in described the first lift columns and the second lift columns respectively; The described second two ends of moving load bearing cross beam connect with the 3rd gear case in described the 3rd lift columns and the 4th lift columns respectively and the 4th gear case is connected; The two ends of described the first transmission shaft are connected with described the second gear case and the 3rd gear case respectively; The two ends of described second driving shaft are connected with the 4th gear case and the first gear case respectively; The two ends of described the 3rd transmission shaft are connected with the first gear case and the 4th gear case respectively; Described the first transmission shaft, second driving shaft and the 3rd transmission shaft transferring power between each lift columns.
3. Synchronous lifting according to claim 2 moves in and out mechanism, wherein, described in move in and out driver train and comprise screw rod, be arranged on nut and the 4th transmission shaft on described screw rod; Described the 4th transmission shaft is arranged in described the first gear case; Described screw rod two ends are connected with the first gear case and the 4th gear case respectively.
4. Synchronous lifting according to claim 2 moves in and out mechanism, wherein, described nut is connected with described chute, and described the 4th transmission shaft is connected by belt wheel with described screw rod, drive the relatively described screw motion of described nut, and then drive described chute to slide along described Guidong.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310075487.5A CN104045019B (en) | 2013-03-11 | 2013-03-11 | A kind of Synchronous lifting moves in and out mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310075487.5A CN104045019B (en) | 2013-03-11 | 2013-03-11 | A kind of Synchronous lifting moves in and out mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104045019A true CN104045019A (en) | 2014-09-17 |
| CN104045019B CN104045019B (en) | 2016-08-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201310075487.5A Active CN104045019B (en) | 2013-03-11 | 2013-03-11 | A kind of Synchronous lifting moves in and out mechanism |
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| CN (1) | CN104045019B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2018059377A1 (en) * | 2016-09-30 | 2018-04-05 | 上海微电子装备（集团）股份有限公司 | Device for moving workpiece platform |
| CN109051558A (en) * | 2018-09-10 | 2018-12-21 | 华南理工大学 | A kind of device for regulating tightness of synchronous belt and lifting device |
| CN115072606A (en) * | 2022-05-25 | 2022-09-20 | 无锡圣迈亿精密制造科技有限公司 | Prevent empting safety protection jacking transplanter hoist mechanism |
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| CN202335531U (en) * | 2011-08-28 | 2012-07-18 | 何少华 | Dining table with automatically flexible and liftable tabletop |
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| US6550584B1 (en) * | 1998-10-15 | 2003-04-22 | Snap-On Deutschland Holding Gmbh | Vehicle lift of the type with four columns |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2018059377A1 (en) * | 2016-09-30 | 2018-04-05 | 上海微电子装备（集团）股份有限公司 | Device for moving workpiece platform |
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| CN107885037B (en) * | 2016-09-30 | 2020-01-24 | 上海微电子装备（集团）股份有限公司 | Workpiece table moving-in and moving-out device |
| US10754263B2 (en) | 2016-09-30 | 2020-08-25 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Device for moving workpiece platform |
| CN109051558A (en) * | 2018-09-10 | 2018-12-21 | 华南理工大学 | A kind of device for regulating tightness of synchronous belt and lifting device |
| CN115072606A (en) * | 2022-05-25 | 2022-09-20 | 无锡圣迈亿精密制造科技有限公司 | Prevent empting safety protection jacking transplanter hoist mechanism |
| CN115072606B (en) * | 2022-05-25 | 2024-02-09 | 无锡圣迈亿精密制造科技有限公司 | Anti-toppling safety protection jacking transplanter lifting mechanism |
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|---|---|
| CN104045019B (en) | 2016-08-03 |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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