CN104039121B - One kind inhales waveguide magnetic shield film and preparation method thereof - Google Patents

One kind inhales waveguide magnetic shield film and preparation method thereof Download PDF

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CN104039121B
CN104039121B CN201310075143.4A CN201310075143A CN104039121B CN 104039121 B CN104039121 B CN 104039121B CN 201310075143 A CN201310075143 A CN 201310075143A CN 104039121 B CN104039121 B CN 104039121B
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CN104039121A (en
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祝琼
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Guangzhou Hong Qing Electronics Co., Ltd.
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祝琼
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Abstract

Waveguide magnetic shield film and preparation method thereof is inhaled the invention discloses one kind, the absorption magnetic conduction screened film has layer structure, by inhaling ripple layer, magnetic layer and the reasonable superposition of screen layer, there is preferable shielding action to 100MHZ 10GHZ electromagnetic wave, shield effectiveness reaches more than 80DB;Its preparation method is carried out by the way of routinely coating and magnetron sputtering are combined, simple to operate, the frivolous densification of film layer of formation, it is adaptable to various electronic products and communication equipment.

Description

One kind inhales waveguide magnetic shield film and preparation method thereof
Technical field
It is more particularly to a kind of to inhale waveguide magnetic shield film and preparation method thereof the invention belongs to the communications field.
Background technology
The various electronic products and equipment of communication field can form many electromagnetic waves in space and interfere, not only to itself And environmental concerns, also make to realize high frequency, the transmission of high speed becomes difficult.Electromagnetic shielding film can be with trapped electromagnetic wave in electronics Mutual propagation between product component and between electronic product and environment, reduces the destruction that electromagnetic interference is caused, in communication neck The application in domain is increasingly extensive.
But there is following both sides defect in traditional electromagnetic shielding film:First, in terms of raw material, selection shielding material Material can realize shielding action by reflection electromagnetic wave, but the electromagnetic wave of its reflection does not disappear or decayed, thus may Cause secondary electromagnetic pollution;Although and select absorbing material to absorb and decay electromagnetic wave, generally only to a certain narrower frequency range With preferable shielding action.Second, it is general that ferrite plated film is realized using sintering processing in terms of plated film mode, obtain Shield film thickness larger, it is not pliable, thus there is limitation using upper.
" thin, light, wide, height "(Thickness of thin, light weight, frequency range are wide, intensity is high)The hair that Modern New shields instrument is turned into Exhibition trend, the need for traditional electromagnetic shielding film obviously can not meet people.
The content of the invention
The purpose of the present invention is to overcome above problem of the prior art to inhale waveguide magnetic shield film and its making side there is provided one kind Method, by inhaling ripple layer, magnetic layer and the reasonable superposition of screen layer, has farthest widened maskable frequency range, and inhale The electromagnetic wave in environment and in electronic device is received, while the suction waveguide magnetic shield film made using the method for the present invention is simple and direct light It is thin, it is easy to use, it can be mass, it is adaptable to various electronic products and communication equipment.
To achieve the above object, one aspect of the present invention provides a kind of suction waveguide magnetic shield film, including the carrier being sequentially overlapped Film layer, suction ripple layer, conductive adhesive layer and protection film layer, wherein including magnetic layer and screen layer between ripple layer and conductive adhesive layer inhaling.
It is preferred that, described magnetic layer and screen layer be it is described suction ripple layer surface according to magnetic layer, screen layer it is suitable Sequence is superimposed.
It is furthermore preferred that it is described it is a kind of inhale waveguide magnetic shield film, by be sequentially overlapped carrier layer, inhale ripple layer, magnetic layer, Screen layer, conductive adhesive layer and protection film layer composition.
Wherein, described magnetic layer and screen layer can also be on the surfaces of the suction ripple layer according to screen layer, magnetic layer Laminated structure, it is preferred that by the carrier layer being sequentially overlapped, suction ripple layer, screen layer, magnetic layer, conductive adhesive layer and protection film layer Composition.
Wherein, it can also include inhaling ripple layer between suction ripple layer and conductive adhesive layer.It is preferred that, by the carrier film being sequentially overlapped Layer, suction ripple layer, magnetic layer, screen layer, suction ripple layer, magnetic layer, screen layer, conductive adhesive layer and protection film layer composition.
Wherein, described carrier layer includes the basement membrane layer through corona pre-treatment and is attached to its corona pre-treatment surface Following layer, wherein the thickness of following layer be 0.1 μm -5 μm.
Particularly, described basement membrane layer is polyethylene terephthalate (PET), PEN (PEN), polyimides(PI), polyethylene(PE), polypropylene(PP)Deng polyester film, described following layer is acrylic acid, polyester, The dope layer of the resins such as polyurethane, organosilicon, Organic fluoride or its modified resin through organic solvent diluting, described is organic molten Agent is butanone, acetone, ethyl ester, butyl ester, polymethyl methacrylate(The volatile organic solvent such as PMA).
Carrier layer with following layer can make antiradar coatings be easier to coating, so as to form more stable with inhaling ripple layer Combination.
Wherein, described suction ripple layer is the film layer being made up of antiradar coatings, and the thickness for inhaling ripple layer is 2 μm -50 μm, described Antiradar coatings include resin, ferrite, inorganic filler and organic solvent, and the wherein content of resin is 10wt%-40wt%, ferrite Content be 5wt%-40wt%, the content of inorganic filler is 4wt%-20wt%, and the consumption of adjustment organic solvent makes antiradar coatings Solid content is 30%-60%.
Especially, described resin be the resin such as organosilicon, Organic fluoride, epoxy resin, acrylic acid, polyurethane, polyester or Its modified resin, described ferrite is iron and its oxi or nitride, ferroalloy and its oxide or nitride, and granularity exists 0.1 μm -2 μm, described inorganic filler is barium sulfate, calcium carbonate, talcum powder, mica, wollastonite, kaolin, aluminium hydroxide, hydrogen One or more in magnesia, described solvent is organic molten for volatility such as butanone, acetone, ethyl ester, butyl ester or PMA Agent.
Inhale ripple layer effectively can be directed into internal ferrite layer by external electromagnetic waves, play the work for absorbing external electromagnetic waves With.
Wherein, described magnetic layer is the film formed by magnetron sputtering on the suction ripple layer using ferrite as target Layer, the thickness of magnetic layer is 0.2 μm -2 μm.
Particularly described ferrite is iron and its oxi or nitride, ferroalloy and its oxide or nitride.
Ferrite in high frequency with higher magnetic conductivity, thus the ferrite magnetic conduction film layer energy direct high-frequency section that constitutes Electromagnetism wave direction screen layer is propagated, simultaneously because ferrite has higher resistivity, the eddy-current loss produced when using is also smaller.
Wherein, described screen layer be using metal or its alloy as target, by magnetron sputtering on the magnetic layer shape Into film layer, the thickness of screen layer is 0.1 μm -2 μm.
Particularly described metal or its alloy are gold, silver, nickel, copper, cadmium, chromium, zinc, iron etc. or its alloy.
Heat energy is converted into the electromagnetic wave part for inhaling ripple layer, magnetic layer conducts, is partly released, screen layer can be effectively Receive the electromagnetic wave of release.
Wherein, described conductive adhesive layer is the film layer being made up of conducting resinl coating, and the thickness of conductive adhesive layer is 5 μm -50 μm, Matrix resin, conductive particle can be included for isotropic conductive adhesive layer or anisotropy conductiving glue layer, described conducting resinl coating Son, inorganic filler, curing agent and organic solvent, wherein conducting particles can have the conducting particles being laterally or longitudinally orientated, It can also be all-directional conductive particle;Wherein, the content of matrix resin is 10wt%-40wt%, and the content of conducting particles is 10wt%-50wt%, the content of inorganic filler is 4wt%-20wt%, and the content of curing agent is 1wt%-5wt%, adjustment organic solvent Consumption makes the solid content of conducting resinl coating be 25%-60%.
Particularly, described matrix resin be organosilicon, Organic fluoride, epoxy resin, acrylic acid, polyurethane, polyester or its Modified resin;Described conducting particles is gold, silver, nickel, copper, cadmium, chromium, zinc, iron etc. or its alloy;Described inorganic filler is sulphur One or more in sour barium, calcium carbonate, talcum powder, mica, wollastonite, kaolin, aluminium hydroxide, magnesium hydroxide, it is excellent Elect barium sulfate as;Described curing agent is the one or more in isocyanates, acid anhydrides, amino resins, described solvent For volatile organic solvents such as butanone, acetone, ethyl ester, butyl ester or PMA.
Conductive adhesive layer can by the electromagnetic wave of each layer Assimilation and conductivity by be flexible coupling or thermosetting connection be grounded.
Wherein, described protection film layer can be the polyester films such as PET, PEN, PI, PE, PP.
Another aspect of the present invention provides a kind of preparation method for inhaling waveguide magnetic shield film, including:In basement membrane layer through electricity The side surface attachment following layer of dizzy pretreatment, forms carrier layer, is then sequentially overlapped suction ripple on the surface of the following layer Layer, functional layer, conductive adhesive layer and protection film layer.
Wherein, described functional layer includes magnetic layer and screen layer, optional to include inhaling ripple layer.
It is preferred that, a kind of preparation method of described suction waveguide magnetic shield film comprises the following steps:
1)Corona pre-treatment is carried out in the side surface of basement membrane layer one, and in the side surface attachment through corona pre-treatment then Layer, forms carrier layer, the wherein thickness of following layer is 0.1 μm -5 μm;
2)Antiradar coatings are coated on the surface of the following layer, is formed and inhales ripple layer, the thickness for inhaling ripple layer is 2 μm -50 μm;
3)On the surface of the suction ripple layer, using ferrite as target, magnetron sputtering plating is carried out, magnetic layer, magnetic conduction is formed The thickness of layer is 0.1 μm -2 μm;
4)On the surface of the magnetic layer, using metal or its alloy as target, magnetron sputtering plating is carried out, shielding is formed Layer, the thickness of screen layer is 0.1 μm -2 μm;
5)Coat conducting resinl coating on the surface of the screen layer, form conductive adhesive layer, the thickness of conductive adhesive layer for 5 μm- 50μm;
6)Protection film layer is enclosed in a side surface of the conductive adhesive layer.
The suction waveguide magnetic shield film being made according to the method described above is by the carrier layer being sequentially overlapped, suction ripple layer, magnetic layer, screen Cover layer, conductive adhesive layer and protection film layer composition.In use, first protection film layer is torn, conductive adhesive film aspect is enclosed into circuit board Hot pressing or cold bonding, then remove carrier film, make suction ripple layer exposed.
Wherein, step 1)Described basement membrane layer is the polyester films such as PET, PEN, PI, PE, PP.
Wherein, step 1)Voltage is 5000-20000V, the table of the basilar memebrane after processing during described corona pre-treatment Face tension force reaches 35-60 dynes, can strengthen the adhesion of basilar memebrane and then coating.
Wherein, step 1)Described attachment following layer refers to use common fabrography or micro- rotogravure application then coating Following layer is formed, particularly, described then coating includes resin and organic solvent, especially, and described resin is propylene The resins such as acid, polyester, polyurethane, organosilicon, Organic fluoride or its modified resin, described organic solvent are butanone, acetone, second The volatile organic solvents such as ester, butyl ester, PMA.Wherein, the content of resin is 5wt%-40wt%.
Wherein, when step 2)When the described thickness for inhaling ripple layer is 2 μm -10 μm, net roller, rubber roll, nick version etc. may be selected Mode is coated;When step 2)When the described thickness for inhaling ripple layer is 10 μm -50 μm, the side of scraper or slit extrusion may be selected Formula is coated.
Wherein, step 2)Described antiradar coatings include resin, ferrite, inorganic filler and organic solvent, wherein resin Content be 10wt%-40wt%, ferritic content is 5wt%-40wt%, and the content of inorganic filler is 4wt%-20wt%, addition Organic solvent, and the solid content of antiradar coatings is controlled for 30-60%.
Wherein, step 2)Described resin is the tree such as organosilicon, Organic fluoride, epoxy resin, acrylic acid, polyurethane, polyester Fat or its modified resin, described ferrite are iron and its oxi or nitride, ferroalloy and its oxide or nitride, grain Degree is at 0.1 μm -2 μm, and described inorganic filler is barium sulfate, calcium carbonate, talcum powder, mica, wollastonite, kaolin, hydroxide One or more in aluminium, magnesium hydroxide, described solvent has for volatility such as butanone, acetone, ethyl ester, butyl ester or PMA Machine solvent.
Wherein, step 3)Described ferrite is iron and its oxi or nitride, ferroalloy and its oxide or nitridation Thing.Particularly, the magnetron sputtering that can be realized when using iron as target using common power, the oxide or nitride using iron is targets The magnetron sputtering that need to be realized during material using radio-frequency power supply.
Wherein, step 4)Described metal can be gold, silver, nickel, copper, cadmium, chromium, zinc, iron etc. or its alloy.Particularly, Described magnetron sputtering, can be realized, it is preferred to use radio-frequency power supply using common power or radio-frequency power supply.
Wherein, step 5)Described coating can be using the conventional coating method such as scraper for coating shape or slit extrusion.
Wherein, step 5)Described conducting resinl coating includes matrix resin, conducting particles, inorganic filler, curing agent and had The content of machine solvent, wherein matrix resin is 10wt%-40wt%, and the content of conducting particles is 10wt%-50wt%, inorganic filler Content is 4wt%-20wt%, and the content of curing agent is 1wt%-5wt%, and the consumption of adjustment organic solvent contains consolidating for conducting resinl coating Measure as 25%-60%.
Particularly, step 5)Described matrix resin is organosilicon, Organic fluoride, epoxy resin, acrylic acid, polyurethane, poly- Ester or its modified resin;Described conducting particles is gold, silver, nickel, copper, cadmium, chromium, zinc, iron etc. or its alloy;It is described inorganic to fill out Expect for one kind in barium sulfate, calcium carbonate, talcum powder, mica, wollastonite, kaolin, aluminium hydroxide, magnesium hydroxide or it is a kind of with On;Described curing agent is the one or more in isocyanates, acid anhydrides, amino resins, and described solvent is butanone, third The volatile organic solvents such as ketone, ethyl ester, butyl ester or PMA.As needed, levelling agent, defoamer, dispersant etc. can also be added extremely Conducting resinl.
Wherein, step 6)Described protection film layer can be the polyester films such as PET, PEN, PI, PE, PP.
The preparation method of described suction waveguide magnetic shield film can also be:Suction ripple is sequentially overlapped on the surface of carrier layer Layer, screen layer, magnetic layer, conductive adhesive layer and protection film layer;Suction ripple layer, shielding are either sequentially overlapped on the surface of carrier layer Layer, magnetic layer, suction ripple layer, screen layer, magnetic layer, conductive adhesive layer and protection film layer.
The present invention has the following advantages that and effect compared with prior art:
1. the suction waveguide magnetic shield film made by the present invention, the electromagnetism not only produced to external world and inside electronic component is done Disturb with good shield effectiveness, moreover it is possible to absorb the electromagnetic wave in environment, prevent internal electromagnetism leaked wave, reduce electromagnetic pollution, Beneficial to environmental protection.
2. the functional layer of the suction waveguide magnetic shield film made by the present invention, that is, inhale ripple layer, magnetic layer, screen layer, conducting resinl Layer, can according to specific needs replacing order or be superimposed repeatedly, it is applied widely, multilayer realize can be achieved preferably shielding effect Energy.Especially, screen layer choosing multiple metal plated film repeatedly, to realize shield effectiveness good in wider frequency range.
3. the present invention is realized when making magnetic conduction film layer and screen layer using magnetron sputtering mode, simple to operate, safe and convenient, Suitable industrialization promotion, the frivolous even compact of institute's film plating layer, soft bent, tensile property is excellent, can paste in any electricity Sub- component surface, simple to operate, shield effectiveness is good.
Brief description of the drawings
Fig. 1 is the structural representation of the suction waveguide magnetic shield film of the embodiment of the present invention 1 and 3.
Fig. 2 is the structural representation of the suction waveguide magnetic shield film of the embodiment of the present invention 2.
Fig. 3 is the structural representation of the suction waveguide magnetic shield film of the embodiment of the present invention 4.
Embodiment
The present invention is further described with reference to specific embodiments and the drawings, advantages of the present invention and feature will be with retouching State and apparent.But embodiment is only exemplary, does not constitute any limitation to the scope of the present invention.People in the art Member to the details and form of technical solution of the present invention it should be understood that can enter without departing from the spirit and scope of the invention Row modifications or substitutions, but these are changed and replacement is each fallen within protection scope of the present invention.
Embodiment 1
As shown in figure 1, the suction waveguide magnetic shield film of the present invention includes carrier layer 1, inhales ripple layer 2, leads successively from inside to outside Magnetosphere 3, screen layer 4, conductive adhesive layer 5 and protection film layer 6.
1. make carrier layer:
1)It is 50 μm to select thickness, and width 600mm PET polyester films are as basement membrane layer, to the side table of the film layer Face carries out corona pre-treatment, wherein, voltage is 20000V in preprocessing process, and its surface tension reaches 60 dynes;Then in warp One side surface of corona pre-treatment coats following layer using common fabrography, and drying forms carrier layer, drying temperature after coating Spend for 150 DEG C, drying time is 50 seconds.
Wherein, the coating selection epoxy resin and ethyl ester of described formation following layer are according to 40:60 weight is than configuration Into the thickness of following layer is 2.5 μm.
2. ripple layer is inhaled in superposition:
Antiradar coatings are coated using slit extrusion way on the surface of the following layer, drying, which is formed, after coating inhales ripple layer, The thickness for inhaling ripple layer is 25 μm, and drying time is 2 minutes, and drying temperature is 160 DEG C.
Wherein, the component and content of described antiradar coatings are:
Organic siliconresin 10%
Iron oxide 40%
Barium sulfate 4%
Ethyl ester 46%
Wherein, solid matter is powdered in coating, and particle mean size is less than 10 μm, and its content is 44%.According to above-mentioned ratio At the uniform velocity stirring is produced after example configuration coating.
3. it is superimposed magnetic layer:
Magnetron sputtering is carried out to the surface of the suction ripple layer, the temperature for controlling the vacuum chamber of magnetron sputtering apparatus is -250 DEG C, the magnetron sputtering mode supported under high-purity argon gas environment using radio-frequency power supply uses iron oxide(Purity is more than 99%)Target, control Target chamber temperature processed is below 100 DEG C, in the surface deposition plating of the suction ripple layer, forms magnetic layer, the thickness of magnetic layer is 1 μ m。
Wherein, the condition of work of magnetron sputtering is as follows:
Working gas:High-purity argon gas(99.99%)
Operating air pressure:20×10-3MMPa
Sputtering current:10A
Power:600KW
Sputtering rate:5m/min
Wherein, working gas is in addition to argon gas, and other gases such as helium, nitrogen etc. are applied to the present invention.
4. it is superimposed screen layer:
Magnetron sputtering is carried out to the surface of the magnetic layer, using with step 3 identical process conditions, with corronil (57:43)For target, in the magnetic conduction layer surface deposition plating, screen layer is formed, the thickness of screen layer is 1 μm.
5. it is superimposed conductive adhesive layer:
Conducting resinl coating is coated using slit extrusion way on the surface of the screen layer, conductive adhesive layer, conducting resinl is formed The thickness of layer is 50 μm.
Wherein, the composition and content of described conducting resinl coating are:
Wherein, solid matter is powdered in coating, and particle mean size is less than 10 μm, and its content is 60%.Particularly, institute The conducting particles stated is nickel, copper, iron according to 1:1:1 ratio mixing.
After being configured according to aforementioned proportion, fully dispersed stirring, stand 1 hour after prepare coating, coating is using scraping cutter painting Mode for cloth, 160 DEG C, 2 minutes of drying temperature.
6. it is superimposed protection film layer:
Thickness is enclosed on the surface of the conductive adhesive layer for 50 μm, width 600mm PET polyester films are used as diaphragm Layer.In use, first protection film layer is torn, conductive adhesive film aspect is enclosed into circuit board hot pressing or cold bonding, finally removes carrier film .
According to standard SJ20524-1995《The method of testing of Materials ' Shielding Effectiveness》, to obtained suction waveguide in the method The shield effectiveness of magnetic shield film is tested, and test result is shown in Table 1.
Embodiment 2
As shown in figure 1, the suction waveguide magnetic shield film of the present invention includes carrier layer 1, inhales ripple layer 2, leads successively from inside to outside Magnetosphere 3, screen layer 4, conductive adhesive layer 5 and protection film layer 6.
1. make carrier layer:
1)It is 50 μm to select thickness, and width 600mm PEN polyester films are as basement membrane layer, to the side table of the film layer Face carries out corona pre-treatment, wherein, voltage is 5000V in preprocessing process, and its surface tension reaches 35 dynes;Then through electricity One side surface of dizzy pretreatment coats following layer using nick platemaking technology, and drying forms carrier layer after coating, and drying temperature is 200 DEG C, drying time is 60 seconds.
Wherein, the coating selection epoxy resin and ethyl ester of described formation following layer are according to 5:95 weight is than configuration Into the thickness of following layer is 0.1 μm.
2. ripple layer is inhaled in superposition:
Antiradar coatings are coated using rubber roll mode on the surface of the following layer, drying, which is formed, after coating inhales ripple layer, inhales ripple The thickness of layer is 2 μm, and drying time is 2.5 minutes, and drying temperature is 160 DEG C.
Wherein, the component and content of described antiradar coatings are:
Organic fluorine 10%
Iron oxide 5%
Barium sulfate 15%
Ethyl ester 70%
Wherein, solid matter is powdered in coating, and particle mean size is less than 10 μm, and its content is 30%.According to above-mentioned ratio At the uniform velocity stirring is produced after example configuration coating.
3. it is superimposed screen layer:
Magnetron sputtering is carried out to the surface of the suction ripple layer, except using silver-nickel(30:70)Plated film, the thickness of screen layer For 0.1 μm, sputtering rate is that remaining is identical with the step 4 of embodiment 1 outside 10m/min.
4. it is superimposed magnetic layer:
Magnetron sputtering is carried out to the surface of the screen layer, the temperature for controlling vacuum chamber is -250 DEG C, in high-purity argon compression ring The magnetron sputtering mode supported under border using radio-frequency power supply uses pure iron target(Purity is more than 99%), control target chamber temperature is at 100 DEG C Hereinafter, in the surface deposition plating of the suction ripple layer, magnetic layer is formed, the thickness of magnetic layer is 2 μm.
Wherein, remaining is identical with the step 3 of embodiment 1 in addition to sputtering rate is 1m/min for the condition of work of magnetron sputtering.
5. it is superimposed conductive adhesive layer:
Conducting resinl coating is coated using scraper coating method on the surface of the screen layer, conductive adhesive layer, conducting resinl is formed The thickness of layer is 45 μm.
Wherein, the composition and content of described conducting resinl coating are:
Wherein, solid matter is powdered in coating, and particle mean size is less than 10 μm, and its content is 58%.Particularly, institute The conducting particles stated is nickel, copper, iron according to 1:1:1 ratio mixing.
After being configured according to aforementioned proportion, fully dispersed stirring, stand 1 hour after prepare coating, coating is using scraping cutter painting Mode for cloth, 160 DEG C, 2 minutes of drying temperature.
6. it is superimposed protection film layer:
Thickness is enclosed on the surface of the conductive adhesive layer for 50 μm, width 600mm PI polyester films are used as protection film layer. In use, first protection film layer is torn, conductive adhesive film aspect is enclosed into circuit board hot pressing or cold bonding, finally removes carrier film i.e. Can.
According to standard SJ20524-1995《The method of testing of Materials ' Shielding Effectiveness》, to obtained suction waveguide in the method The shield effectiveness of magnetic shield film is tested, and test result is shown in Table 1.
Embodiment 3
As shown in figure 1, the suction waveguide magnetic shield film of the present invention includes carrier layer 1, inhales ripple layer 2, leads successively from inside to outside Magnetosphere 3, screen layer 4, conductive adhesive layer 5 and protection film layer 6.
1. make carrier layer:
Except voltage is 10000V during corona pre-treatment, its surface tension is set to reach 40 dynes, drying temperature is 180 DEG C, the content of resin is 20% in following layer, and the thickness of following layer is that remaining is same as Example 1 outside 5 μm.
2. ripple layer is inhaled in superposition:
Continue to coat antiradar coatings using rubber roll mode on the surface of the following layer, coating thickness is 50 μm, after coating Drying, which is formed, inhales ripple layer, and drying time is 5 minutes, and drying temperature is 200 DEG C.
Wherein, the component and content of described antiradar coatings are:
Polyurethane resin 40%
Iron oxide 10%
Talcum powder 10%
Acetone 40%
Wherein, solid matter is powdered in coating, and particle mean size is less than 10 μm, and its content is 60%.According to above-mentioned ratio At the uniform velocity stirring is produced after example configuration coating.
3. it is superimposed magnetic layer:
Except selecting four nitrided irons(Purity is more than 99%)As target, the thickness of magnetic layer is 0.2 μm, and sputtering rate is 9m/ Outside min, remaining is that embodiment 1 is identical.
4. it is superimposed screen layer:
Except the thickness of screen layer is 2 μm, sputtering rate is, outside 1m/min, and remaining is same as Example 1.
5. it is superimposed conductive adhesive layer:
Conducting resinl coating is coated using net roller mode on the surface of the screen layer, conductive adhesive layer is formed, conductive adhesive layer Thickness is 5 μm.
Wherein, the composition and content of described conducting resinl coating are:
In addition to drying temperature is 130 DEG C, remaining operation is same as Example 1, forms conductive adhesive layer.
6. it is superimposed protection film layer:
Operation is same as Example 1.
According to standard SJ20524-1995《The method of testing of Materials ' Shielding Effectiveness》, to obtained suction waveguide in the method The shield effectiveness of magnetic shield film is tested, and test result is shown in Table 1.
Embodiment 4
The shield effectiveness of waveguide magnetic shield film is inhaled for enhancing, ripple layer, magnetic layer and screen layer can will be inhaled and be folded repeatedly Plus, as indicated with 2, the suction waveguide magnetic shield film from inside to outside successively include carrier layer 1, inhale ripple layer 2, magnetic layer 3, screen layer 4, Inhale ripple layer 5, magnetic layer 6, screen layer 7, conductive adhesive layer 8 and protection film layer 9.
1-4. operations are same as Example 1.
5. coating antiradar coatings on the surface of the screen layer, operate identical with the step 2 of embodiment 1.
6. operation is identical with the step 3 of embodiment 1.
7. operation is identical with the step 4 of embodiment 1.
8. operation is identical with the step 5 of embodiment 1.
9. operation is identical with the step 6 of embodiment 1.
According to standard SJ20524-1995《The method of testing of Materials ' Shielding Effectiveness》, to obtained suction waveguide in the method The shield effectiveness of magnetic shield film is tested, and test result is shown in Table 1.
Shield effectiveness test result made from the embodiment 1-4 of table 1
Thickness Frequency range Shield effectiveness
Embodiment 1 77μm 100MHZ-3000MHz 92DB
Embodiment 2 49.1μm 100MHZ-8O00MHZ 80DB
Embodiment 3 57.2μm 100MHZ-8000MHZ 85DB
Embodiment 4 104μm 100MHZ-10GHZ 98DB

Claims (10)

1. one kind inhales waveguide magnetic shield film, it is characterised in that including carrier layer, inhale ripple layer, conductive adhesive layer and protection film layer, with And include magnetic layer and screen layer between ripple layer and conductive adhesive layer positioned at inhaling;
Wherein, inhale ripple stacking to be added on the carrier layer, magnetic layer is superimposed upon on suction ripple layer, and screen layer is superimposed upon magnetic layer On, conductive adhesive layer is superimposed on the shielding layer, and protection film layer is superimposed upon on conductive adhesive layer;
Wherein, the magnetic layer is the film layer formed by magnetron sputtering on the suction ripple layer using ferrite as target;
Wherein, the screen layer is the film formed by magnetron sputtering on the magnetic layer using metal or its alloy as target Layer.
2. as claimed in claim 1 a kind of inhale waveguide magnetic shield film, it is characterised in that described magnetic layer and screen layer be The surface for inhaling ripple layer is according to magnetic layer, the laminated structure of screen layer.
3. a kind of suction waveguide magnetic shield film as claimed in claim 1, it is characterised in that described carrier layer is included through corona The basement membrane layer of pretreatment and the following layer for being attached to its corona pre-treatment surface, the wherein thickness of following layer are 0.1 μm -5 μm.
4. a kind of suction waveguide magnetic shield film as claimed in claim 1, it is characterised in that described suction ripple layer is by antiradar coatings The film layer being made, the thickness for inhaling ripple layer is 2 μm -50 μm, and described antiradar coatings include resin, ferrite, inorganic filler and had The content of machine solvent, wherein resin is 10wt%-40wt%, and ferritic content is 5wt%-40wt%, and inorganic filler contains Measure as 4wt%-20wt%, the consumption of adjustment organic solvent makes the solid content of antiradar coatings be 30%-60%.
5. as claimed in claim 1 a kind of inhale waveguide magnetic shield film, it is characterised in that the thickness of the magnetic layer is 0.2 μm- 2μm。
6. as claimed in claim 1 a kind of inhale waveguide magnetic shield film, it is characterised in that the thickness of the screen layer is 0.1 μm- 2μm。
7. a kind of suction waveguide magnetic shield film as claimed in claim 1, it is characterised in that described conductive adhesive layer is by conducting resinl The film layer that coating is made, the thickness of conductive adhesive layer is 5 μm -50 μm, and described conducting resinl coating includes matrix resin, conductive particle The content of son, inorganic filler, curing agent and organic solvent, wherein matrix resin is 20wt%-50wt%, the content of conducting particles For 10wt%-50wt%, the content of inorganic filler is 4wt%-20wt%, and the content of curing agent is 0.3wt%-5wt%, adjustment The consumption of organic solvent makes the solid content of conducting resinl coating be 25%-60%.
8. a kind of preparation method for inhaling waveguide magnetic shield film, it is characterised in that comprise the following steps that:
1) corona pre-treatment is carried out in the side surface of basement membrane layer one, and in the side surface attachment following layer through corona pre-treatment, Carrier layer is formed, the wherein thickness of following layer is 0.1 μm -5 μm;
2) antiradar coatings are coated on the surface of the following layer, is formed and inhale ripple layer, the thickness for inhaling ripple layer is 2 μm -50 μm;
3) on the surface of the suction ripple layer, using ferrite as target, magnetron sputtering plating is carried out, magnetic layer is formed, magnetic layer Thickness is 0.1 μm -2 μm;
4) on the surface of the magnetic layer, using metal or its alloy as target, magnetron sputtering plating is carried out, screen layer, screen is formed The thickness for covering layer is 0.1 μm -2 μm;
5) conducting resinl coating is coated on the surface of the screen layer, forms conductive adhesive layer, the thickness of conductive adhesive layer is 5 μm -50 μm;
6) protection film layer is enclosed in a side surface of the conductive adhesive layer.
9. the preparation method of waveguide magnetic shield film is inhaled as claimed in claim 8, it is characterised in that described antiradar coatings include The content of resin, ferrite, inorganic filler and organic solvent, wherein resin is 10wt%-40wt%, and ferritic content is 5wt%-40wt%, the content of inorganic filler is 4wt%-20wt%, and the consumption of adjustment organic solvent contains consolidating for antiradar coatings Measure as 30-60%.
10. the preparation method of waveguide magnetic shield film is inhaled as claimed in claim 8, it is characterised in that described conducting resinl coating Including matrix resin, conducting particles, inorganic filler, curing agent and organic solvent, the wherein content of matrix resin is 10wt%- 40wt%, the content of conducting particles is 10wt%-50wt%, the content of inorganic filler is 4wt%-20wt%, and curing agent contains Measure as 1wt%-5wt%, the consumption of adjustment organic solvent makes the solid content of conducting resinl coating be 25%-60%.
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