CN104035289A - Photoetching projection objective environment collection control system and control method thereof - Google Patents
Photoetching projection objective environment collection control system and control method thereof Download PDFInfo
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Abstract
The invention relates to a photoetching projection objective environment collection control system and a control method thereof, belonging to the field of photoetching projection objective control. The photoetching projection objective environment collection control system comprises a control machine box, a collection driving machine box, an analog-to-digital conversion machine box, multiple actuators and multiple sensors, wherein an optical fiber communication board card is connected with an environmental control algorithm board card through an optical fiber transmission link; an environment collection driving board card is connected with an analog-to-digital conversion board card or an interface conversion card through a digital signal transmission link, and the environment collection driving board card is connected with the multiple actuators through a driving signal transmission link; the analog-to-digital conversion board card is connected with the multiple sensors through a low-voltage analog signal transmission link; the multiple actuators are arranged in a photoetching machine environment cabinet; the multiple sensors are arranged on a photoetching projection objective. According to the photoetching projection objective environment collection control system disclosed by the invention, the regulation time of every regulation is shortened, the accuracy of environmental parameter regulation is ensured, the response time is shortened and the integral property of the photoetching projection objective and a photoetching machine can be ensured.
Description
Technical field
The invention belongs to photoetching projection objective lens control field, be specifically related to a kind of photoetching projection objective lens environment acquisition control system and control method thereof.
Background technology
Photoetching projection objective lens is a kind of ultraprecise optical system, is the core component in litho machine, and it is the key that affects photolithography resolution and live width.Along with the raising of lithographic accuracy, as the requirement to environment temperature, air pressure, cleanliness factor etc., also more and more harsher to the requirement of environment.Object lens inside exists a large amount of thermals source to comprise various motors and excimer laser etc., the variation of temperature can cause object lens position of focal plane to change and affect the image quality of object lens, object lens inside needs sealed environment and high-purity, clean nitrogen to prevent that air from entering projection objective internal contamination optical mirror slip simultaneously, need to ensure that nitrogen has constant pressure and flow simultaneously, reduce the impact on Optical Surface.
Environment acquisition control system is in order to ensure that the environmental parameters such as temperature under projection objective normal operation, pressure, cleanliness factor are stable.Photoetching projection objective lens environment acquisition control system can be divided into Water-cooling circulating temperature control modules, high pure nitrogen cycle control module.Wherein Water-cooling circulating temperature control modules can utilize the performers such as interior circulation constant temperature water tank and solenoid valve that object lens jacket water temperature, constant flow, adjustable recirculated water are provided, and adopt many temperature sensors that are arranged in diverse location as feedback, realize by closed loop control algorithm.But the actuators such as interior circulation constant temperature water tank and solenoid valve can produce a large amount of heats, the thermal power of generation can affect the image quality of projection objective; High pure nitrogen cycle control module can utilize the performers such as reduction valve group, purifier, filtrator that outside nitrogen is regulated, and adopts pressure sensor, flow sensor etc. are as feedback, provide the inner nitrogen circulation of object lens to use by closed loop control algorithm.But pneumatic element also can produce amount of heat and vibration, can affect the image quality of projection objective.In litho machine complete machine inside, the cable run distance of photoetching projection objective lens environment acquisition control system and photoetching projection objective lens is about 10-15 rice, and the simulating signals such as temperature sensor, pressure transducer, flow sensor need to be converted into digital signal and carry out long-distance transmissions.Water-cooled temperature control simultaneously need to meet superhigh precision (± 0.01 DEG C) requirement of large time thermal response constant projection objective, and high pure nitrogen cycle control module need to meet ultra-high purity (nitrogen content 99.999999%), granularity (maximum 3nm), constant rate (12NL/H), pressure (100 ± 10pa).Therefore, need a kind of photoetching projection objective lens environment acquisition control system structure.
Summary of the invention
For solve that control cabinet thermal power that prior art exists affect that image quality, sensor die analog signal distant signal decay and etching system in the technical matters such as temperature, pressure, cleanliness factor response time and superhigh precision requirement, the present invention proposes a kind of photoetching projection objective lens environment acquisition control system and control method thereof.
The technical scheme that technical solution problem of the present invention is taked is as follows:
A kind of photoetching projection objective lens environment acquisition control system comprises controls cabinet, collection driving cabinet, analog to digital conversion cabinet, multiple actuator and multiple sensors; In described control cabinet, comprise standard VME backboard, master control board card and optical fiber communication board, described master control board card and optical fiber communication board are inserted on described standard VME backboard, described collection drives in cabinet and comprises that nonstandard VME backboard, environment control algolithm board and environment gather Driver Card, described environment control algolithm board and environment gather Driver Card and are inserted on described nonstandard VME backboard, in described analog to digital conversion cabinet, comprise analog to digital conversion board and interface conversion card; Described Optical Interface Board cartoon is crossed fiber transmission link and is connected with environment control algolithm board, environment gathers Driver Card and is connected with analog to digital conversion board or interface conversion card by digital data transmission link, environment gathers Driver Card transmission link and is connected with multiple actuator, analog to digital conversion board or interface conversion card are connected with multiple sensors by low-voltage analog signal transmission link, described multiple sensors is arranged on described photoetching projection objective lens, and described multiple actuator is arranged in complete machine ring control rack; Described environment gathers Driver Card and is connected with described nonstandard VME backboard with power supply signal connector by self-defined digital signal front connector respectively, described nonstandard VME backboard by self-defined digital signal after connector be connected with described environment control algolithm board;
Described control cabinet, collection drive cabinet and analog to digital conversion cabinet to be placed in litho machine complete machine control rack, described control cabinet and collection drive the span of the distance B between cabinet and photoetching projection objective lens to be: 10m≤D≤15m, the span of the distance d between described analog to digital conversion cabinet and photoetching projection objective lens is: 2m≤d≤3m.
In described analog to digital conversion cabinet, have self-defining pump drainage mode, and by the cooling system of litho machine complete machine, the heat pump drainage of generation is walked, the thermal power of generation can not affect projection objective.
The high template size of list in the size conforms VME bus system specification of optical fiber communication board, have VME bus system specification from functions of modules, connector on optical fiber communication board adopts the P1 connector in VME bus system specification.
On described environment control algolithm board, be provided with the joints of optical fibre, described Optical Interface Board cartoon is crossed fiber transmission link and is connected with the joints of optical fibre, described environment gathers on Driver Card and is provided with sensor digital signal connector and multiple actuator driven signal connector, described sensor digital signal connector is connected with described analog to digital conversion board or interface conversion card by digital data transmission link, and described driving signal connector is by driving signal transmission link to be connected with multiple actuator.
J1 connector and J2 connector size in connector size conforms VME bus system specification on described nonstandard VME backboard, rear strap form size in the size conforms VME bus system specification of environment control algolithm board, environment drives the two high template size in the size conforms VME bus system specification of analog input card, does not have principal and subordinate's functions of modules of VME bus system specification.
The P1 connector of described driving analog input card transmits self-defined digital signal, and P2 connector transmits self-defined power supply signal.
Photoetching projection objective lens environment acquisition control system of the present invention drives cabinet to be positioned over apart from the complete machine switch board outside photoetching projection objective lens 10-15 rice by gathering, the driving circuit of multiple actuator is positioned to gather and drives cabinet inside, its heat shedding is taken out of outside litho machine by the exhaust system of complete machine switch board, can not affect the image quality of photoetching projection objective lens.Near placing mold number conversion cabinet photoetching projection objective lens, the sensor such as temperature, pressure is gathered to gained artificial capacitor signal and be converted to digital signal, and long-distance transmissions drives cabinet to gathering, to realize the long-distance transmissions of multiple sensors collection signal, and analog to digital conversion cabinet takes by the exhaust system of complete machine the heat shedding out of litho machine by self-defining pump drainage mode, can not affect the image quality of projection objective.Controlling cabinet drives cabinet to be jointly positioned in complete machine rack with collection, and connect communication by fiber transmission link, the control command that each environmental parameter regulates is sent to by the optical fiber communication board of controlling in cabinet the environment control algolithm board that gathers driving cabinet inside, environment control algolithm board gathers Driver Card by the self-defined signaling interface of high speed and environment and is connected, environment gathers Driver Card can drive various actuator signal by direct control, and treatment temperature, the digital position signal that the sensors such as pressure gather, control algolithm complete independently temperature not of the same race control in environment control algolithm board, flow control, pressure controlled single regulates, without repeating to receive the regulating command of controlling cabinet, the transmission link of control command is placed in outside the servo period of control algolithm, to shorten the time of every secondary environment control.
The invention has the beneficial effects as follows: the present invention can be in ensureing multiple actuator and multiple sensors track lengths and radiating requirements, from hardware, control command transmission link is placed in outside the servo period of environment control algolithm, for the implementation efficiency that improves control algolithm provides necessary hardware platform, thereby shorten adjusting time, the precision of guarantee environment parameter adjusting, the reduction response time of each adjusting, ensure the overall performance of photoetching projection objective lens and litho machine.
Brief description of the drawings
Fig. 1 is the structural representation of photoetching projection objective lens environment acquisition control system of the present invention;
Fig. 2 gathers the inner structure schematic diagram that drives cabinet in the present invention;
Wherein: 1, control cabinet, 2, optical fiber communication board, 3, fiber transmission link, 4, gather and drive cabinet, 5, environment gathers Driver Card, 6, digital data transmission link, 7, actuator signal transmission link, 8, multiple actuator, 9, photoetching projection objective lens, 10, standard VME backboard, 11, master control board card, 12, nonstandard VME backboard, 13, environment control algolithm board, 14, analog to digital conversion board or interface conversion card, 15, analog to digital conversion cabinet, 16, low-voltage analog signal transmission link, 17, multiple sensors, 18, the joints of optical fibre, 19, connector after self-defined digital signal, 20, self-defined digital signal front connector, 21, sensor digital signal connector, 22, self-defined power supply signal connector, 23, drive signal connector.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
As shown in Figure 1, photoetching projection objective lens environment acquisition control system of the present invention comprises control cabinet 1, gathers driving cabinet 4, analog to digital conversion cabinet 15, multiple actuator 8 and multiple sensors 17.Multiple actuator 8 comprises solenoid valve, reduction valve etc., and multiple sensors 17 comprises 4 temperature sensors, a 3-4 pressure transducer, a 2-3 flow sensor etc.
In described control cabinet 1, comprise standard VME backboard 10, master control board card 11 and optical fiber communication board 2, described master control board card 11 and optical fiber communication board 2 are inserted on described standard VME backboard 10, described collection drives in cabinet 4 and comprises that nonstandard VME backboard 12, environment control algolithm board 13 and environment gather Driver Card 5, described environment control algolithm board 13 and environment gather Driver Card 5 and are inserted on described nonstandard VME backboard 12, comprise analog to digital conversion board or interface conversion card 14 in described analog to digital conversion cabinet 15.
Described optical fiber communication board 2 is connected with environment control algolithm board 13 by fiber transmission link 3, environment gathers Driver Card 5 and is connected with analog to digital conversion board or interface conversion card 14 by digital data transmission link 6, environment gathers Driver Card 5 by driving signal transmission link 7 to be connected with multiple actuator 8, analog to digital conversion board or interface conversion card 14 are connected with the multiple sensors such as temperature, pressure 17 by low-voltage analog signal transmission link 16, and described multiple actuator 8 is arranged in described litho machine environment control rack.The multiple sensors 17 such as described temperature, pressure are arranged on described photoetching projection objective lens 9.
As shown in Figure 2, environment gather Driver Card 5 be connected with described nonstandard VME backboard 12 with power supply signal connector 22 by self-defined digital signal front connector 20 respectively, described nonstandard VME backboard 12 by self-defined digital signal after connector 19 be connected with described environment control algolithm board 13.
Described control cabinet 1, collection drive cabinet 4 and analog to digital conversion cabinet 15 to be all placed in litho machine complete machine control rack, described control cabinet 1, collection drive the span of the distance B between cabinet 4 and photoetching projection objective lens 9 to be: 10m≤D≤15m, the span of the distance d between described analog to digital conversion cabinet 15 and photoetching projection objective lens 9 is: 2m≤d≤3m.
The high template size of list in the size conforms VME bus system specification of optical fiber communication board 2, have VME bus system specification from functions of modules, connector on optical fiber communication board 2 adopts the P1 connector in VME bus system specification.
On described environment control algolithm board 13, be provided with the joints of optical fibre 18, described optical fiber communication board 2 is connected with the joints of optical fibre 18 by fiber transmission link 3, described environment gathers on Driver Card 5 and is provided with sensor digital signal connector 21 and actuator driven signal connector 23, described sensor digital signal connector 21 is connected with described analog to digital conversion board or interface conversion card 14 by digital data transmission link 6, and described driving signal connector 23 is by driving signal transmission link 7 to be connected with multiple actuator 8.
J1 connector and J2 connector size in connector size conforms VME bus system specification on described nonstandard VME backboard 12, rear strap form size in the size conforms VME bus system specification of environment control algolithm board 13, two high template size in the size conforms VME bus system specification of environment collection Driver Card 5, do not have principal and subordinate's functions of modules of VME bus system specification, described sensor digital signal connector 21 and actuator driven signal connector 23 adopt respectively P1 connector and the P2 connector in VME bus system specification.
The P1 connector that described environment gathers Driver Card 5 transmits self-defined digital signal, and P2 connector transmits self-defined power supply signal.
The control method that the present invention is based on photoetching projection objective lens environment acquisition control system comprises the steps:
Step 1: the master control board card 11 in control cabinet 1 is from the control command of complete machine environmental control system reception environment parameter, and this order is sent to optical fiber communication board 2 by standard VME backboard 10, optical fiber communication board 2 is transmitted it to and is gathered in the environment control algolithm board 13 driving in cabinet 4 by fiber transmission link 3 and the joints of optical fibre 18 after control command is encapsulated;
Step 2: environment control algolithm board 13 is resolved control command, start servocontrol, first by connector 19 after the self-defined digital signal on nonstandard VME backboard 12 and self-defined digital signal front connector 20, driving signal is sent to environment and gathers Driver Card 5, environment gathers Driver Card 5 and obtains power supply by power supply signal connector 22, and by driving signal connector 23 and driving signal transmission link 7 to realize the remote driving to multiple actuator 8, the temperature of photoetching projection objective lens 9 interior environment, the environmental parameters such as pressure are by temperature, the multiple sensors such as pressure 17 gather, and transfer to by low-voltage analog signal transmission link 16 in the analog to digital conversion board or interface conversion card 14 of analog to digital conversion cabinet 15, analog to digital conversion board 14 is to the temperature collecting, the environmental parameters such as pressure are carried out analog to digital conversion, and digital displacement signal is transferred in environment collection Driver Card 5 by digital data transmission link 6 and digital sensor signal connector 21, environment gathers Driver Card 5 and resolves after this digital signal, by connector 19 after the self-defined digital signal on nonstandard VME backboard 12 and self-defined digital signal front connector 20, environmental parameter signals is fed back to environment control algolithm board 13, so far complete an operation of controlling servo period,
Step 3: the environmental parameter signals Correction and Control algorithm parameter that environment control algolithm board 13 obtains by feedback, repeating step two, until complete servo adjusting;
Step 4: complete after an environmental parameter adjusting, environment control algolithm board 13 transfers to optical fiber communication board 2 by the joints of optical fibre 18 and fiber transmission link 3 by adjusting result, optical fiber communication board 2 is notified master control board card 11 by standard VME backboard 10 by the mode of interrupting by warp after regulating result to resolve, and master control board card 11 sends to complete machine control system the control command that environmental parameter has regulated.
Be more than the specific embodiment of the present invention, but limitation of the present invention absolutely not.
Claims (7)
1. a photoetching projection objective lens environment acquisition control system, it is characterized in that, this system comprises controls cabinet (1), collection driving cabinet (4), analog to digital conversion cabinet (15), multiple actuator (8) and multiple sensors (17);
In described control cabinet (1), comprise standard VME backboard (10), master control board card (11) and optical fiber communication board (2), described master control board card (11) and optical fiber communication board (2) are inserted on described standard VME backboard (10), described collection drives in cabinet (4) and comprises nonstandard VME backboard (12), environment control algolithm board (13) and environment gather Driver Card (5), described environment control algolithm board (13) and environment gather Driver Card (5) and are inserted on described nonstandard VME backboard (12), in described analog to digital conversion cabinet (15), comprise analog to digital conversion board or interface conversion card (14),
Described optical fiber communication board (2) is connected with environment control algolithm board (13) by fiber transmission link (3), environment gathers Driver Card (5) and is connected with analog to digital conversion board or interface conversion card (14) by digital data transmission link (6), environment gathers Driver Card (5) by driving signal transmission link (7) to be connected with multiple actuator (8), analog to digital conversion board (14) is connected with multiple sensors (17) by low-voltage analog signal transmission link (16), described multiple sensors (17) is arranged on described photoetching projection objective lens (9), described multiple actuator (8) is arranged in litho machine environment rack,
Described environment gathers Driver Card (5) and is connected with described nonstandard VME backboard (12) with power supply signal connector (22) by self-defined digital signal front connector (20) respectively, described nonstandard VME backboard (12) by self-defined digital signal after connector (19) be connected with described environment control algolithm board (13).
2. a kind of photoetching projection objective lens environment acquisition control system according to claim 1, it is characterized in that, described control cabinet (1), collection drive cabinet (4) and analog to digital conversion cabinet (15) to be placed in litho machine complete machine control rack, described control cabinet (1) and collection drive the span of the distance B between cabinet (4) and photoetching projection objective lens (9) to be: 10m≤D≤15m, the span of the distance d between described analog to digital conversion cabinet (15) and photoetching projection objective lens (9) is: 2m≤d≤3m.
3. a kind of photoetching projection objective lens environment acquisition control system according to claim 1, it is characterized in that, the high template size of list in the size conforms VME bus system specification of optical fiber communication board (2), have VME bus system specification from functions of modules, connector on optical fiber communication board (2) adopts the P1 connector in VME bus system specification.
4. a kind of photoetching projection objective lens environment acquisition control system according to claim 1, it is characterized in that, on described environment control algolithm board (13), be provided with the joints of optical fibre (18), described optical fiber communication board (2) is connected with the joints of optical fibre (18) by fiber transmission link (3), on described environment collection Driver Card (5), be provided with sensor digital signal connector (21) and drive signal connector (23), described sensor digital signal connector (21) is connected with described analog to digital conversion board or interface conversion card (14) by digital data transmission link (6), described driving signal connector (23) is by driving signal transmission link (7) to be connected with multiple actuator (8).
5. a kind of photoetching projection objective lens environment acquisition control system according to claim 1, it is characterized in that, J1 connector and J2 connector size in connector size conforms VME bus system specification on described nonstandard VME backboard (12), rear strap form size in the size conforms VME bus system specification of environment control algolithm board (13), two high template size in the size conforms VME bus system specification of environment collection Driver Card (5), do not there is principal and subordinate's functions of modules of VME bus system specification, described sensor digital signal connector (21) and driving signal connector (23) adopt respectively P1 connector and the P2 connector in VME bus system specification.
6. a kind of photoetching projection objective lens environment acquisition control system according to claim 1, is characterized in that, the P1 connector that described environment gathers Driver Card (5) transmits self-defined digital signal, and P2 connector transmits self-defined power supply signal.
7. the control of the photoetching projection objective lens environment acquisition control system based on described in above-mentioned any one claim, is characterized in that, the method comprises the steps:
Step 1: the master control board card (11) in control cabinet (1) is from the control command of complete machine environmental control system reception environment parameter, and this order is sent to optical fiber communication board (2) by standard VME backboard (10), optical fiber communication board (2) is transmitted it to and is gathered in the environment control algolithm board (13) driving in cabinet (4) by fiber transmission link (3) and the joints of optical fibre (18) after control command is encapsulated;
Step 2: environment control algolithm board (13) is resolved control command, start servocontrol, first by connector (19) after the self-defined digital signal on nonstandard VME backboard (12) and self-defined digital signal front connector (20), driving signal is sent to environment and gathers Driver Card (5), environment gathers Driver Card (5) and obtains power supply by power supply signal connector (22), and by driving signal connector (23) and driving signal transmission link (7) to realize the remote driving to multiple actuator (8), the temperature of the interior environment of photoetching projection objective lens (9), the environmental parameters such as pressure are gathered by multiple sensors (17), and transfer to by low-voltage analog signal transmission link (16) in the analog to digital conversion board or interface conversion card (14) of analog to digital conversion cabinet (15), analog to digital conversion board (14) is to the temperature collecting, the environmental parameters such as pressure are carried out analog to digital conversion, and digital displacement signal is transferred in environment collection Driver Card (5) by digital data transmission link (6) and digital sensor signal connector (21), environment gathers Driver Card (5) and resolves after this digital signal, by connector (19) after the self-defined digital signal on nonstandard VME backboard (12) and self-defined digital signal front connector (20), environmental parameter signals is fed back to environment control algolithm board (13), so far complete an operation of controlling servo period,
Step 3: the environmental parameter signals Correction and Control algorithm parameter that environment control algolithm board (13) obtains by feedback, repeating step two, until complete servo adjusting;
Step 4: complete after an environmental parameter adjusting, environment control algolithm board (13) transfers to optical fiber communication board (2) by the joints of optical fibre (18) and fiber transmission link (3) by adjusting result, optical fiber communication board (2) is notified master control board card (11) by standard VME backboard (10) by the mode of interrupting by warp after regulating result to resolve, and master control board card (11) sends to complete machine control system the control command that environmental parameter has regulated.
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| CN104316104A (en) * | 2014-09-28 | 2015-01-28 | 中国科学院长春光学精密机械与物理研究所 | Photolithography projection objective lens internal chamber high-precision gas measuring device |
| CN106197738A (en) * | 2015-05-24 | 2016-12-07 | 上海微电子装备有限公司 | A kind of object lens interior temperature distribution and strain measurement system and measuring method thereof |
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Application publication date: 20140910 |