CN104034311B - In pairs trisection ring-circle nesting pole plate is staggeredly placed formula inclination angle measurement method and device in opposite directions - Google Patents
In pairs trisection ring-circle nesting pole plate is staggeredly placed formula inclination angle measurement method and device in opposite directions Download PDFInfo
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- CN104034311B CN104034311B CN201410179245.5A CN201410179245A CN104034311B CN 104034311 B CN104034311 B CN 104034311B CN 201410179245 A CN201410179245 A CN 201410179245A CN 104034311 B CN104034311 B CN 104034311B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
- G01C9/20—Measuring inclination, e.g. by clinometers, by levels by using liquids the indication being based on the inclination of the surface of a liquid relative to its container
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/02—Details
- G01C9/06—Electric or photoelectric indication or reading means
- G01C2009/062—Electric or photoelectric indication or reading means capacitive
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
- G01C2009/185—Measuring inclination, e.g. by clinometers, by levels by using liquids dielectric
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Abstract
In pairs the nested pole plate of the trisection ring circle formula inclination angle measurement method that is staggeredly placed in opposite directions belongs to angle measurement technique with device, wherein the annular coplanar capacitance gauge head of sensor unit is made up of a circular metal plate and three 1/3rd circular ring metal plates, four pieces of metallic plates are coplanar with one heart, three 1/3rd circular ring metal plates are uniformly distributed circumferentially, each piece forms electric capacity with circular metal plate, two above-mentioned annular coplanar capacitance gauge heads are placed on two round insulation substrates respectively, two round insulation substrates are as two bottom surfaces of cylindrical container, and by horizontal for this cylindrical container, seal the insulating liquid of injected slurry volume 1/2 in a reservoir, the current potential of eight pieces of metallic plates is taken out and is connected with the input of capacitance measurement unit by current potential lead-in wire, capacitance measurement unit is connected with Dip countion unit；During container run-off the straight, two annular coplanar capacitance gauge heads change with the relative position of insulating liquid, by measuring the change of capacitor's capacity, can try to achieve inclination value.
Description
Technical field
The invention belongs to technical field of angle detection, relate generally to a kind of inclination angle measurement method and device.
Background technology
At present, the method for sensing at known measurement inclination angle is that the surface utilizing liquid under static state remains level
Principle.Inside adds the container run-off the straight of liquid, stable after liquid level keep level, but the relative position of liquid and container
There occurs change.The electrical quantities caused by detecting this process changes, and calculates container relative to internal liquid surface
Angle, and then measure the inclination angle of container.
For the sensing mode at the inclination angle between detection container and its internal liquid surface added, electricity can be divided into
Resistive and the big class of electrostatic capacitive two.
Japan Patent 2001-13160 publication describes the correlation technique of resistance sensor, one end is closed
Being encapsulated into appropriate conductive liquid in cylindric canister, opening circular metal plate blocks.Pair of metal electrodes is passed through
Lead to and be fixed on plectane.When the receptacle is tilted, container changes with internal liquid surface angulation, so that metal
Electrode changes with the contact area of conductive liquid so that the resistance between canister and each metal electrode changes.Logical
Cross the change measuring its resistance value, just can detect the inclination angle of container.
But, metal electrode directly contacts with conductive liquid, causes the precipitation of the metal of electrode own, conductive liquid
The electrochemical reaction such as electrolysis, the precision of sensor and stability hardly result in long-term guarantee.
About static capacity type sensor, China's CN1668892A patent describes correlation technique.This sensor is just
It is the conductive liquid of 1/2 amount being encapsulated into internal volume in the tubular hermetic container of electric insulation system, in container parallel two
Placing tabular main electrode on individual side, its surface has silicon to aoxidize coverlay, serves as electrolyte.When the receptacle is tilted, container is with interior
The liquid surface angulation in portion changes so that the electric capacity between tabular main electrode and conductive liquid changes.
Thus, the change to its capacitance measures, to detect the size at the inclination angle of container.
But, in the case of this static capacity type sensor, the angle of inclination occurred when tubular hermetic container is excessive
Time, liquid biasing side within container and lose and the contacting of another main electrode, the most this sensor loses effect.By
In the limitation of principle, its range that can survey inclination angle is the most limited, and depends on the physical dimension within container.
Summary of the invention
The present invention is directed to directly the contacting of metal electrode and conductive liquid in the sensing mode at above-mentioned existing detection inclination angle,
Sensor stability hardly results in long-term guarantee, can survey the problem such as finiteness of inclination angle range, and the present invention proposes and devises
In pairs the nested pole plate of trisection ring-circle is staggeredly placed formula inclination angle measurement method and device in opposite directions, the insulating properties of use in this invention
Liquid avoids the electrochemical reactions such as the precipitation of pole plate, the annular coplanar capacitance structure in sensor unit achieve 360 degree complete
Range is measured.
The purpose of the present invention is achieved through the following technical solutions:
A kind of trisection ring in pairs-circle nesting pole plate is staggeredly placed formula inclination angle measurement method in opposite directions, and described method step is such as
Under:
(1), by coplanar to a circular metal plate and outer circle annular metal sheet concentric placement, and outer circle annular metal sheet
Radially trisection, obtains three part of 1/3rd circular ring metal plate, and described every a 1/3rd circular ring metal plates are respectively
Form electric capacity, one circular metal plate and three part of 1/3rd circular ring metal plate combination with circular metal plate and obtain annular
Coplanar capacitance gauge head；
(2), two above-mentioned annular coplanar capacitance gauge heads are dipped vertically in insulating liquid, two annular coplanar capacitance
Gauge head is coaxial to be placed in opposite directions, and 1/3rd circular ring metal plates of two annular coplanar capacitance gauge heads are interspersed, insulating properties
The liquid level of the liquid center by two annular coplanar capacitance gauge heads, every a 1/3rd circular ring metal plate and circular metals
The capacitor's capacity that plate is formed is by the dielectric constant of air, the dielectric constant of insulating liquid, the exposed portion in atmosphere of respective pole plate
Point to segment angle and be immersed in insulating liquid part to segment angle together decide on；
(3), above-mentioned two annular coplanar capacitance gauge head carry out along center circumference rotate time, its inclination angle changes, insulation
Property liquid liquid level keep level, two annular coplanar capacitance gauge heads change with the relative position of insulating liquid, each pole
Plate exposed in atmosphere part to segment angle and be immersed in insulating liquid part to segment angle change, survey
Measure the change of the capacitor's capacity that above-mentioned 1/3rd circular ring metal plates are formed with circular metal plate, try to achieve inclination value；
(4), above-mentioned two annular coplanar capacitance gauge head carry out circumference rotation along center, insulating liquid liquid level closes on arbitrary
Annular coplanar capacitance gauge head radial direction cut-off rule time, take another annular coplanar capacitance gauge head gained result of calculation as finally inclining
Angle result of calculation.
A kind of trisection ring in pairs-circle nesting pole plate is staggeredly placed formula dip measuring device in opposite directions, including capacitance measurement list
Unit and Dip countion unit, described capacitance measurement unit is connected with Dip countion unit；Described device also includes sensor unit,
The structure of described sensor unit is: two openings of the cylindrical container opening-like at two ends seal two circles of assembling respectively
Shape insulated substrate, is positioned on face, two round insulation substrate inboards at cylindrical container intracavity and is equipped with two coplanar electricity of annular respectively
Hold gauge head A, B；Described annular coplanar capacitance gauge head A by a circular metal plate a and three 1/3rd circular ring metal plate b,
C, d are constituted, and wherein three 1/3rd circular ring metals plate b, c, d are arranged in outside a circular metal plate a, and three three points
One of circular ring metal plate b, c, d coplanar concentric with a circular metal plate a, three 1/3rd metallic plates b, c, d are circumferentially
It is uniformly distributed；Described annular coplanar capacitance gauge head B by a circular metal plate e and three 1/3rd circular ring metal plate f, g,
H is constituted, and wherein three 1/3rd circular ring metals plate f, g, h are arranged in outside a circular metal plate e, and three three/
One circular ring metal plate f, g, h is coplanar concentric with a circular metal plate e, three 1/3rd circular ring metal plate f, g, h edges
Circumference is uniformly distributed；Three 1/3rd circular ring metals plate b, c, d of described annular coplanar capacitance gauge head A and the coplanar electricity of annular
Three 1/3rd circular ring metals plate f, g, h holding gauge head B are interspersed；Eight current potentials go between the most respectively by circular metal
Plate a, three 1/3rd circular ring metal plate b, c, d and circular metal plate e, three 1/3rd circular ring metal plate f, g, h
It is connected with the input of capacitance measurement unit；Described cylindrical container is horizontal, seals injection and account in described cylindrical container
The insulating liquid of cylindrical container volume 1/2nd.
The invention have the characteristics that and good result:
(1) compared with resistance-type dip measuring device, it is insulating liquid due to contact with electrode pad, it is to avoid pole
The electrochemical reactions such as the precipitation of the metal of plate own, therefore, it is possible to the stability of long term maintenance sensor and reliability.
(2) compared with electrostatic capacitive dip measuring device, due to horizontal container can along central axis 360 degree rotation,
The capacitance of output all the time with inclination angle existence function relation, therefore measure scope unrestricted, there are 360 degree of gamuts and measure
Feature.
(3) owing to employing the coaxial annular coplanar capacitance gauge head of two placed in opposite directions, and two annular coplanar capacitance are surveyed
/ 3rd circular ring metal plates of head are interspersed, and improve insulating liquid liquid level and close on the footpath of annular coplanar capacitance gauge head
The sensitivity of measurement of dip angle when cut-off rule, measurement result is more accurate.
Accompanying drawing explanation
Fig. 1 is that the nested pole plate of paired trisection ring-circle is staggeredly placed the sensor unit of formula dip measuring device in opposite directions
Perspective physical form view
Fig. 2 is that the nested pole plate of paired trisection ring-circle is staggeredly placed in the sensor unit of formula dip measuring device in opposite directions
The principle schematic of annular coplanar capacitance gauge head A
Fig. 3 is that the nested pole plate of paired trisection ring-circle is staggeredly placed in the sensor unit of formula dip measuring device in opposite directions
The principle schematic of annular coplanar capacitance gauge head B
Fig. 4 is that the nested pole plate of paired trisection ring-circle is staggeredly placed in the sensor unit of formula dip measuring device in opposite directions
The front view of annular coplanar capacitance gauge head A
Fig. 5 is that the nested pole plate of paired trisection ring-circle is staggeredly placed in the sensor unit of formula dip measuring device in opposite directions
The front view of annular coplanar capacitance gauge head B
Fig. 6 is that the nested pole plate of paired trisection ring-circle is staggeredly placed in the sensor unit of formula dip measuring device in opposite directions
Explanatory diagram when annular coplanar capacitance gauge head A tilts
Fig. 7 is that the nested pole plate of paired trisection ring-circle is staggeredly placed in the sensor unit of formula dip measuring device in opposite directions
Explanatory diagram when annular coplanar capacitance gauge head B tilts
Fig. 8 is that the nested pole plate of paired trisection ring-circle is staggeredly placed the overall structure signal of formula dip measuring device in opposite directions
Figure
In figure piece number explanation: 1 annular coplanar capacitance gauge head A, 2 circular metal plate a, 1/3rd three circular ring metal plate b, 4
/ 3rd circular ring metal plate c, 1/5th three circular ring metal plate d, 6 round insulation substrates, 7 annular coplanar capacitance gauge heads
B, 8 circular metal plate e, 1/9th three circular ring metal plate f, 1/10th 3 circular ring metal plate g, 1/11st 3 annulus
Shape metallic plate h, 12 round insulation substrates, 13 cylindrical containers, 14 insulating liquid, 15,16,17,18,19,20,21,22 electricity
Position lead-in wire, 23 sensor units, 24 capacitance measurement unit, 25 Dip countion unit.
Detailed description of the invention
Below in conjunction with the accompanying drawings the embodiment of the present invention is described in detail.
A kind of trisection ring in pairs-circle nesting pole plate is staggeredly placed formula dip measuring device in opposite directions, including sensor unit
23, capacitance measurement unit 24 and Dip countion unit 25, is illustrated in figure 8 the overall structure schematic diagram of dip measuring device.
The perspective physical form view of the sensor unit of dip measuring device shown in Fig. 1, the structure of described sensor unit 23
It is: two openings of the cylindrical container 13 opening-like at two ends seal two round insulation substrates 6,12 of assembling respectively,
Cylindrical container 13 intracavity is positioned on the inboard face of two round insulation substrates 6,12 and is equipped with two annular coplanar capacitance gauge heads respectively
A1、B7；Described annular coplanar capacitance gauge head A1 by a circular metal plate a2 and three 1/3rd circular ring metal plate b3,
C4, d5 are constituted, and wherein three 1/3rd circular ring metals plate b3, c4, d5 are arranged in outside a circular metal plate a2, and three
Individual 1/3rd circular ring metal plate b3, c4, d5 are coplanar concentric with a circular metal plate a2, three 1/3rd metallic plates
B3, c4, d5 are uniformly distributed circumferentially；Described annular coplanar capacitance gauge head B7 is by a circular metal plate e8 and three 1/3rd
Circular ring metal plate f9, g10, h11 are constituted, and wherein three 1/3rd circular ring metals plate f9, g10, h11 are arranged in a circle
Outside shape metallic plate e8, and three 1/3rd circular ring metals plate f9, g10, h11 and circular metal plate e8 coplanar with
The heart, three 1/3rd circular ring metals plate f9, g10, h11 are uniformly distributed circumferentially；Described annular coplanar capacitance gauge head A1's
Three 1/3rd circular ring metals plate b3, c4, d5 and three 1/3rd circular ring metals of annular coplanar capacitance gauge head B7
Plate f9, g10, h11 are interspersed；Eight current potential lead-in wires 15,16,17,18,19,20,21,22 are the most respectively by circular metal plate
A2, three 1/3rd circular ring metal plate b3, c4, d5 and circular metal plate e8, three 1/3rd circular ring metal plate f9,
G10, h11 are connected with the input of capacitance measurement unit 24；Described cylindrical container 13 is in horizontal, at described cylindrical container 13
Interior sealing injection accounts for the insulating liquid 14 of cylindrical container 13 volume 1/2nd.
Described round insulation substrate 6,12 is made up of resin glass fiber material.
Described insulating liquid 14 is by methanol, ethanol, the alcohols of isopropanol, acetone, the ketone of butanone, diglycol monotertiary
One or more in the ethers of butyl ether become the liquid of subassembly.
A kind of trisection ring in pairs-circle nesting pole plate is staggeredly placed formula inclination angle measurement method in opposite directions, and the method step is as follows:
(1) by coplanar to a circular metal plate and outer circle annular metal sheet concentric placement, and outer circle annular metal sheet
Radially trisection, obtains three part of 1/3rd circular ring metal plate, and described every a 1/3rd circular ring metal plates are respectively
Form electric capacity, one circular metal plate and three part of 1/3rd circular ring metal plate combination with circular metal plate and obtain annular
Coplanar capacitance gauge head.
Referring to the drawings 2,3, between the metallic plate of annular coplanar capacitance gauge head A, B, electric lines of force is uniformly distributed along metallic plate, can be near
Replace like with semicircular arc line.Solution formula according to single coplanar capacitance, it is known that annular coplanar capacitance and dielectric dielectric
Constant is proportional, can be represented by the formula.
C=K ε
(2) two above-mentioned annular coplanar capacitance gauge heads are dipped vertically in insulating liquid, two annular coplanar capacitance
Gauge head is coaxial to be placed in opposite directions, and 1/3rd circular ring metal plates of two annular coplanar capacitance gauge heads are interspersed, insulating properties
The liquid level of the liquid center by two annular coplanar capacitance gauge heads, every a 1/3rd circular ring metal plate and circular metals
The capacitor's capacity that plate is formed is by the dielectric constant of air, the dielectric constant of insulating liquid, the exposed portion in atmosphere of respective pole plate
Point to segment angle and be immersed in insulating liquid part to segment angle together decide on.
Fig. 4 be dip measuring device sensor unit in annular coplanar capacitance gauge head A front view, metallic plate 2,3 institute
The electric capacity that the electric capacity formed and the electric capacity that formed of metallic plate 2,4 and metallic plate 2,5 are formed can represent with following formula respectively.
Fig. 5 be dip measuring device sensor unit in annular coplanar capacitance gauge head B front view, metallic plate 8,9 institute
The electric capacity that the electric capacity formed and the electric capacity that formed of metallic plate 8,10 and metallic plate 8,11 are formed can represent with following formula respectively.
(3), when above-mentioned two annular coplanar capacitance gauge head carries out circumference rotation along center, its inclination angle changes, insulating properties
The liquid level of liquid keeps level, and two annular coplanar capacitance gauge heads change with the relative position of insulating liquid, each pole plate
Exposed in atmosphere part to segment angle and be immersed in insulating liquid part to segment angle change.
Fig. 6 illustrates explanatory diagram when annular coplanar capacitance gauge head A tilts.Electric capacity that now metallic plate 2,3 is formed and gold
Belong to the electric capacity that formed of plate 2,4 and electric capacity that metallic plate 2,5 is formed is respectively as follows:
Above formula is carried out make poor, sue for peace can obtain:
And then the solution formula trying to achieve inclination angle is:
Fig. 7 illustrates explanatory diagram when annular coplanar capacitance gauge head B tilts.Electric capacity that now metallic plate 8,9 is formed and gold
Belong to the electric capacity that formed of plate 8,10 and electric capacity that metallic plate 8,11 is formed is respectively as follows:
Above formula is carried out make poor, sue for peace can obtain:
And then the solution formula trying to achieve inclination angle is:
By capacitance measurement unit and Dip countion unit, the signal obtained is compared process, i.e. can get inclination angle
Output.
(4) above-mentioned two annular coplanar capacitance gauge head carries out circumference rotation along center, and insulating liquid liquid level closes on arbitrary
Annular coplanar capacitance gauge head radial direction cut-off rule time, take another annular coplanar capacitance gauge head gained result of calculation as finally inclining
Angle result of calculation.
When inclination angle is near-90 °, 30 ° and 150 °, the liquid level of insulating liquid closes on annular coplanar capacitance gauge head B
Radial direction cut-off rule, now using annular coplanar capacitance gauge head A as the input of capacitance measurement unit, dip measuring device can be improved
Sensitivity, make measurement result more accurate.In like manner, when inclination angle is near-150 ° ,-30 ° and 90 °, insulating liquid
Liquid level closes on the radial direction cut-off rule of annular coplanar capacitance gauge head A, now using annular coplanar capacitance gauge head B as capacitance measurement unit
Input, also can reach identical effect.
Claims (4)
1. the nested pole plate of a paired trisection ring-circle is staggeredly placed formula inclination angle measurement method in opposite directions, it is characterised in that: described side
Method step is as follows:
(1), by coplanar to a circular metal plate and outer circle annular metal sheet concentric placement, and outer circle annular metal sheet is along footpath
To trisection, obtaining three part of 1/3rd circular ring metal plate, every a 1/3rd circular ring metal plates are golden with circle respectively
Belong to plate formation electric capacity, one circular metal plate and three part of 1/3rd circular ring metal plate combination and obtain annular coplanar capacitance
Gauge head；
(2), two above-mentioned annular coplanar capacitance gauge heads are dipped vertically in insulating liquid, two annular coplanar capacitance gauge heads
Coaxial place in opposite directions, and 1/3rd circular ring metal plates of two annular coplanar capacitance gauge heads are interspersed, insulating liquid
Liquid level by the center of two annular coplanar capacitance gauge heads, every a 1/3rd circular ring metal plates and circular metal plate shape
The capacitor's capacity become is by the dielectric constant of air, the dielectric constant of insulating liquid, respective pole plate exposed part in atmosphere institute
To segment angle and be immersed in insulating liquid part to segment angle together decide on；
(3), above-mentioned two annular coplanar capacitance gauge head carry out along center circumference rotate time, its inclination angle changes, insulating properties liquid
The liquid level of body keeps level, and two annular coplanar capacitance gauge heads change with the relative position of insulating liquid, and each pole plate is naked
Be exposed in air part to segment angle and be immersed in insulating liquid part to segment angle change, in measurement
State the change of the capacitor's capacity that 1/3rd circular ring metal plates are formed with circular metal plate, try to achieve inclination value；
(4), above-mentioned two annular coplanar capacitance gauge head carry out circumference rotation along center, insulating liquid liquid level closes on arbitrary annular
During the radial direction cut-off rule of coplanar capacitance gauge head, take the result of calculation of another annular coplanar capacitance gauge head gained as final inclinometer
Calculate result.
2. the nested pole plate of paired trisection ring-circle is staggeredly placed a formula dip measuring device in opposite directions, including capacitance measurement unit
(24) and Dip countion unit (25), described capacitance measurement unit (24) is connected with Dip countion unit (25)；It is characterized in that:
Described device also includes that sensor unit (23), the structure of described sensor unit (23) are: the cylinder opening-like at two ends
Two openings of body container (13) seal two round insulation substrates (6,12) of assembling respectively, in cylindrical container (13) intracavity position
Two annular coplanar capacitance gauge head A, B (1,7) it are equipped with respectively on the inboard face of two round insulation substrates (6,12)；Described annular
Coplanar capacitance gauge head A (1) is by a circular metal plate a (2) and three 1/3rd circular ring metal plate b, c, d (3,4,5) structures
Becoming, wherein three 1/3rd circular ring metal plate b, c, d (3,4,5) are arranged in circular metal plate a (2) outside, and three
Individual 1/3rd circular ring metal plate b, c, d (3,4,5) are coplanar concentric with a circular metal plate a (2), three 1/3rd gold medals
Belong to plate b, c, d (3,4,5) to be uniformly distributed circumferentially；Described annular coplanar capacitance gauge head B (7) is by a circular metal plate e (8)
Constitute with three 1/3rd circular ring metal plate f, g, h (9,10,11), wherein three 1/3rd circular ring metal plate f, g,
H (9,10,11) is arranged in circular metal plate e (8) outside, and three 1/3rd circular ring metals plate f, g, h (9,10,
11) coplanar concentric with a circular metal plate e (8), three 1/3rd circular ring metal plate f, g, h (9,10,11) are circumferentially
It is uniformly distributed；Three 1/3rd circular ring metal plate b, c, d (3,4,5) of described annular coplanar capacitance gauge head A (1) and annular
Three 1/3rd circular ring metal plate f, g, h (9,10,11) of coplanar capacitance gauge head B (7) are interspersed；Eight current potential lead-in wires
(15,16,17,18,19,20,21,22) the most respectively by circular metal plate a (2), three 1/3rd circular ring metal plate b,
C, d (3,4,5) and circular metal plate e (8), three 1/3rd circular ring metal plate f, g, h (9,10,11) and capacitance measurement list
The input of unit (24) connects；Described cylindrical container (13), in horizontal, seal injection in described cylindrical container (13) and accounts for
The insulating liquid (14) of cylindrical container (13) volume 1/2nd.
The nested pole plate of paired trisection ring the most according to claim 2-circle is staggeredly placed formula dip measuring device in opposite directions, its
It is characterised by: described round insulation substrate (6,12) is made up of resin glass fiber material.
The nested pole plate of paired trisection ring the most according to claim 2-circle is staggeredly placed formula dip measuring device in opposite directions, its
It is characterised by: described insulating liquid (14) is by methanol, ethanol, the alcohols of isopropanol, acetone, the ketone of butanone, two sweet
One or more in the ethers of alcohol single-butyl ether become the liquid of subassembly.
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| CN112815921B (en) * | 2021-01-07 | 2023-05-30 | 深圳市杜比激光有限公司 | High-precision horizontal sensitive structure and processing method thereof |
| CN112815922B (en) * | 2021-01-07 | 2023-05-30 | 深圳市杜比激光有限公司 | High-precision angle sensor sensitive structure and processing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1011067B (en) * | 1988-06-08 | 1991-01-02 | 中国科学院上海冶金研究所 | Apparatus for measuring degree of inclination |
| JP2012202849A (en) * | 2011-03-25 | 2012-10-22 | Dt Japan Inc | Inclination measuring device and inclination measuring method |
| US8800155B2 (en) * | 2011-04-22 | 2014-08-12 | Jack A. Ekchian | Displacement sensor with reduced hysteresis |
| CN102818560A (en) * | 2012-08-29 | 2012-12-12 | 王业路 | Trisection circular level |
| TWI454664B (en) * | 2012-09-27 | 2014-10-01 | Sagatek Co Ltd | A liquid multilayer capacitive micro inclinometer |
| CN203274678U (en) * | 2013-06-16 | 2013-11-06 | 衡水华锘光电科技有限公司 | 360 DEG electrolyte horizontal inclination sensor |
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