CN104018135B - A kind of method for short arc high pressure gas-discharge lamp anode surface roughening - Google Patents
A kind of method for short arc high pressure gas-discharge lamp anode surface roughening Download PDFInfo
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- CN104018135B CN104018135B CN201410171689.4A CN201410171689A CN104018135B CN 104018135 B CN104018135 B CN 104018135B CN 201410171689 A CN201410171689 A CN 201410171689A CN 104018135 B CN104018135 B CN 104018135B
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- tungsten
- discharge lamp
- high pressure
- pressure gas
- short arc
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Abstract
The invention discloses a kind of method for short arc high pressure gas-discharge lamp anode surface roughening, comprise the steps: that forging state pure tungsten rod is dimensioned to required geometry according to required anode component by (1)；(2) the pure tungsten anode component processed is carried out a certain degree of surface texturing process, subsequently that surface clean is clean, remove removing oxide layer；(3) with tungsten hexafluoride as raw material, hydrogen is reducing gas, under the conditions of 350 600 DEG C of base material temperatures, carries out chemical gaseous phase deposition on pure tungsten anode component surface, to form 0.1 6mm thickness tungsten coating, i.e. prepare described in be coated with the super-pressure xenon short-act lamp anode component of tungsten coating.Utilizing high-purity, high fine and close CVD tungsten coating surface has the appearance structure of certain roughness, reaches to increase electrode specific surface area, improves the purpose of electrode heat dispersion.
Description
Technical field
The invention belongs to metallurgical material technical field, be specifically related to a kind of for short arc high pressure gas-discharge lamp
The method of anode surface roughening.
Background technology
Short arc high pressure xenon lamp be also referred to as super-pressure xenon short-act lamp (about 10 atmospheric pressure of operating air pressure with
On), xenon short-act lamp (arc length several millimeters), spherical xenon lamp (shell is spherical in shape), xenon lamp (filling xenon in lamp).
Owing to the parameters such as xenon lamp Spectral structure, colour temperature are similar to daylight, as gas-discharge lamp, there is light efficiency high
(30-70 lumens/watt), colour rendering good (> 95%), power big (maximum up to 6000 watts), in performing art
The light source aspect of light and large-scale projector is widely used.
Xenon lamp is made up of shell, negative electrode and anode component, and negative electrode and anode component are fixed on full xenon
In quartz envelopes, it is typically located at the big current work state of direct current.In actual applications, itself has anode
There are high temperature (generally reaching about 2000 DEG C), " the high-temperature plasma ball " simultaneously existed near it
Part electric arc can be caused to be absorbed by anode, make anode heat further, cause anode tap mask to have high
Temperature.Therefore the heat dispersion of anode component is the main factor in affect electrode even xenon lamp life-span.
Xenon lamp is under application conditions, and the radiating mode of its anode is conducted to xenon mainly by heat radiation mode,
Only a small amount of heat passes to molybdenum foil and lead-out wire along anode handle.It is experimentally confirmed that on anode dissipate energy up to
The 1/3 of total power input.Merit to be born on the very zonule (area) of arc light is accepted at anode end face
Rate density is bigger, temperature is higher.Too high temperature can cause the evaporation of tungsten, makes fluorescent tube turn black, can simultaneously
Make temperature at anode lead wire sealing-in also raise, and easily explode lamp.
To this end, want emphasis to consider its heat dissipation problem in the design and manufacture process of anode component.According to heat
Radiation formula: Me=σ SB ε tT4, the heat radiation power of object is relevant with himself temperature, i.e. anode component
Temperature the highest, thermal-radiating power is the biggest.But in the design improving electrode heat radiation power, tungsten sun
Pole parts can not design oversized dimensions, and anode working temperature to be ensured is less than 2300K, so need to lead to
The heat radiation area crossing increase anode self makes up.The most conventional way is to output number at anode surface
Bar groove, increases the heat radiation area of anode surface by the porosity and fluctuating increasing anode surface,
Improve heat-radiating properties, at utmost reduce anode surface temperature, reduce anode end face occur be full of cracks, recessed
Sunken, protruding phenomenon, extends the life-span of lamp.
In xenon lamp anode component preparation process, its rough surface metallization processes need to carry out machine to electrode surface and add
Work processes, and machining accuracy and size evenness is had higher requirement simultaneously.Currently for anode table
The major way that face carries out being roughened has the most several:
1 pair of anode surface uses machining mode to carry out cutting, coats tungsten powder subsequently on its surface, through burning
Form one layer of thin tungsten powder layer after knot and increase anodic surface toughness, and then improve its heat dispersion；(Xu Qin
Jade, heat radiating type bend pipe xenon lamp, number of patent application: 201320320745.7).
2 pairs of anode surfaces use laser to carry out cutting, and groove depth is about hundreds of micron, similar fin form
(USHIO)；
3 use specially treated mode to be roughened on pure tungsten electrodes surface, it is thus achieved that surface is cellular
Pure tungsten electrodes, significantly improves its surface radiating performance (Philip).
Use above-mentioned several method that pure tungsten electrodes surface is carried out roughening there is problems in that
(1) method 1 uses machining form that electrode surface is cut grooving, subsequently in its surface coated with tungsten
Powder is sintered forming pure tungsten coating；Although which can get the pure tungsten anode that surface roughness is higher,
But higher to the requirement on machining accuracy of groove in machining process, man-hours requirement is longer, and table easily occurs
Face machining tiny flaw；In later stage coating tungsten powder and sintering process, to tungsten powder thickness evenness and
Sintering method all has higher requirements, and sintering process also easily causes anode dimension and interior tissue crystal grain changes,
Thus affect its luminescent properties.
(2) method 2 increases, at anode surface, the groove that the degree of depth is about hundreds of microns by laser grooving mode
To increase the surface roughness of electrode, then increase its heat-radiating properties；But laser machining process is complicated,
Technological requirement is high, and cost is of a relatively high, adds somewhat to manufacturing procedure and the time of electrode.After
During phase electrode is on active service, groove root is easier to become the weak location of crack due to thermal stress germinating.
(3) electrode surface is processed into cellular by certain processing mode by method 3, for overall electrode
Surface roughness tool improves a lot, but disposably processes substantial amounts of cellular pit at electrode surface,
Requiring dimple size, the degree of depth is relatively uniform simultaneously, and microdefect can not occurs, required processing technology water
Flat, required precision, difficulty is the most high, and process time also can be the longest, thus causes electrode cost to show
Writing and increase, the high-volume manufacture to electrode brings difficulty.
Owing to tungsten hardness is high, fragility is big, and machining difficulty, tungsten electrode demand is big simultaneously, cost taken by themselves
The highest, for the processing technology of electrode surface roughness can be improved, usually require that its technique is simple, warp
Ji, as far as possible without being readily achieved under the conditions of changing original modular construction.
Summary of the invention
It is an object of the invention to overcome prior art defect and difficulty, it is provided that a kind of for short arc high pressure gas
The method of body discharging lamp anode surface roughening.
Technical scheme is as follows:
For the method preparation method of short arc high pressure gas-discharge lamp anode surface roughening, including walking as follows
Rapid:
(1) forging state pure tungsten rod requires to be processed into required geometry and size according to anode component；
(2) forging state pure tungsten electrodes surface employing 1000#～3000# sand paper is polished, remove surface
Oxide layer, uses acetone ultrasonic cleaning oil removing subsequently, more successively with ultra-pure water, analyzes absolute alcohol and carry out clearly
Wash, dry up；
(3) with tungsten hexafluoride as raw material, with hydrogen as reducing gas, at the base material of 350-600 DEG C
Under temperature conditions, carrying out chemical gaseous phase deposition on forging state pure tungsten electrodes surface, coating thickness is 0.1-6mm
Tungsten coating, i.e. prepare described in there is the xenon short-act lamp anode component of coarse CVD-W coating surface.
Wherein, described anode component can be the short arc high pressure gas including mercury shot arc lamp and xenon lamp etc.
The anode component of discharge lamp.
In a preferred embodiment of the invention, described one is used for short arc high pressure gas-discharge lamp
The method of anode surface roughening, it is characterised in that: described base material is forging state pure tungsten material.
In a preferred embodiment of the invention, forging state pure tungsten electrodes surface keeps mill as required
The flat surface of light.
In a preferred embodiment of the invention, forging state pure tungsten electrodes surface processes as required
There is certain size, the groove of a determining deviation.These grooves can be screw thread etc..
In a preferred embodiment of the invention, forging state pure tungsten electrodes surface is processed into as required
Certain configuration of surface, described certain configuration of surface includes pit or concavo-convex etc..
In a preferred embodiment of the invention, substrate surface is used by described step (2)
1000#～3000# sand paper carries out surface polishing, and texturing also removes surface oxide layer.
In a preferred embodiment of the invention, the base material temperature in described step (3) is 400-580
℃。
In a preferred embodiment of the invention, tungsten hexafluoride and hydrogen pure in described step (3)
Degree at least 99.99%；Before being passed through CVD reactor, tungsten hexafluoride temperature is less than its point higher than 45 DEG C
Solving temperature, pressure is 70-120kPa.
In a preferred embodiment of the invention, the H being passed through described in step (3)2And WF6's
Mol ratio is 1:2-3.5, and the sedimentation rate of chemical gaseous phase deposition is 0.2-0.6mm/h.
In a preferred embodiment of the invention, the thickness of the tungsten coating of described step (3) is
0.5-5mm。
The present invention uses chemical vapor deposition manner, coats one layer at processing state electrode surface and has certain thickness
High-purity (more than the 6N) of degree, high fine and close (19.2g/cm3Tungsten coating above), utilizes CVD-W crystal
The rough surface (coating layer thickness is the biggest, and surface roughness is the biggest) that structure own growth is had, at electrode
Military service can have good heat-radiating properties.CVD method is simple simultaneously, and flow process is extremely short, and technology is difficult
Spend relatively low, it is thus achieved that tungsten coating coating uniformly, good with base material binding ability, and can prepare by mass,
Cost increases less.Therefore, CVD tungsten coating of the present invention is manufacturing super-pressure xenon short-act lamp anode component
Surface pure tungsten coating, has extraordinary application prospect.
The invention has the beneficial effects as follows:
(1) phase comparison electrode surface machining grooving-coating tungsten powder be sintered, surface laser grooving and
Surface Machining is the modes such as cellular morphology, and the inventive method has that technical process is simple, the process-cycle is short,
Low cost, the advantage such as it is easily achieved；
(2) the inventive method uses vapour deposition mode to prepare the pure tungsten coating with rough surface, base material
Can be complex geometric shapes, be not limited to cylindrical-shaped structure, compare machining grooving, laser grooving etc.
Technique, adaptability is wider；
(3) tungsten coating thickness is controlled in the range of 0.1.0-6.0mm by this method, by depositing temperature (i.e.
Described base material temperature) control in the range of 350-600 DEG C, (preferably in the range of 400-580 DEG C), also may be used
Properly increase sedimentation rate, coarsened grain, improve coating surface degree of roughness；
(4) the inventive method uses high-purity WF6And H2For raw material, high-purity (more than 6N) can be prepared,
High fine and close (19.2g/cm3Tungsten coating above), texture is uniform, zero defect.Coating and substrate interface
Adhesion is good.Using other processing modes, such as machining grooving, Surface Machining honeycomb etc., processed
Journey easily produces localized micro defect, affects the luminescent properties during electrode is on active service and life-span.
Accompanying drawing explanation
Fig. 1 is the tungstenic coated electrode construction schematic diagram prepared by embodiment 1, A forging state pure depressed place base material
Schematic perspective view, B add sectional view after CVD-W coating；1-tungsten electrode；2-CVD-W coating；
Fig. 2 is the tungstenic coated electrode construction schematic diagram prepared by embodiment 2, A forging state pure depressed place base material
Schematic perspective view, B add sectional view after CVD-W coating；1-tungsten electrode；2-CVD-W coating；3-
Screw thread；
Fig. 3 is the certain thickness tungsten coating surface microscopic topographic of electrode surface coating.
Detailed description of the invention
By detailed description below technical solution of the present invention it is further described and describes.
Embodiment 1
The present embodiment, for the method for short arc high pressure gas-discharge lamp anode surface roughening, sees Fig. 1, tool
It is as follows that body implements step:
(1) forging state pure tungsten rod is processed into required geometry according to required size, this electrode base material
Surface be common tumbled condition.
(2) 2000#～3000# sand paper is used suitably to polish on the surface of the pure tungsten electrodes base material processed,
Employing ultra-pure water cleans up, and removes surface oxide layer, with acetone and absolute alcohol ultra-sonic dehydration, finally
Dry up with nitrogen.
(3) chemical vapor deposition reaction chamber put into by the base material after processing, and is evacuated to 1.0 × 10-1Pa
Left and right, is passed through nitrogen and deposit cavity air pressure is supplemented to normal pressure, repeatedly for three times, be subsequently passed hydrogen, at hydrogen
Heat up under gas shielded atmosphere.Treat that substrate surface temperature reaches default depositing temperature 580 DEG C and stablizes
After, it is heavy the mixed gas of tungsten hexafluoride that purity is 99.99% and hydrogen to be passed through by cvd furnace upper vent
In long-pending stove, wherein tungsten hexafluoride flow is 0.1mol/min (WF6Temperature is decomposed less than it higher than 45 DEG C
Temperature, pressure is 70-120kPa), hydrogen flowing quantity is 0.2mol/min, mixed gas at substrate surface and
React near it, generate tungsten and hydrogen fluoride gas.Sedimentation time is about 20min.Tungsten is deposited on base
Material surface forms coating, the hydrogen fluoride gas of generation and unreacting gas and discharges cvd furnace.
(5) after having reacted, close tungsten hexafluoride, stop heating, continue to be passed through hydrogen to in-furnace temperature
It is down to less than 100 DEG C, changes logical nitrogen and be cooled to room temperature, then tear stove open, take out sample, i.e. prepare coating
The electrod assembly of tungsten coating.Tungsten coating (CVD-W) thickness 0.2mm, tungsten coating sedimentation rate is about
0.6mm/h.Coating surface is smooth, and without protruding particle, coating is without cracking, skin effect phenomenon.
Embodiment 2
The present embodiment, for the preparation method of short arc high pressure gas-discharge lamp anode surface roughening, sees figure
2, it is embodied as step as follows:
(1) forging state pure tungsten rod is processed into required geometry according to required size, at this electrode base
Material surface uses lathe tool to finish out certain size, there is the groove of certain intervals each other, and these grooves are arranged
It is classified as shape of threads.
(2) by the sand papering of forging state pure tungsten electrodes substrate surface about 3000#, use acetone clear
Wash clean, removes surface oxide layer, absolute alcohol ultra-sonic dehydration, finally dries up with nitrogen,
(3) by above-mentioned cleaning, the base material dried up is put into chemical vapor deposition reaction chamber, and is evacuated to
1.0×10-1About Pa, is passed through nitrogen and deposit cavity air pressure is supplemented to normal pressure, repeatedly for three times, be subsequently passed
Hydrogen, heats up under hydrogen shield atmosphere.Treat that substrate surface temperature reaches default depositing temperature 550
DEG C and stable after, the mixed gas of tungsten hexafluoride that purity is 99.99% and hydrogen is ventilated by cvd furnace
Mouth is passed through in cvd furnace, and wherein tungsten hexafluoride flow is 0.134mol/min (WF6Temperature is higher than 45 DEG C
Less than its decomposition temperature, pressure is 70-120kPa), hydrogen flowing quantity is 0.402mol/min, mixed gas
Substrate surface and near react, generate tungsten and hydrogen fluoride gas.Sedimentation time is about 10min.
Tungsten is deposited on substrate surface and forms coating, the hydrogen fluoride gas of generation and unreacted gas discharge cvd furnace.
(4) after having reacted, close tungsten hexafluoride, stop heating, continue to be passed through hydrogen to in-furnace temperature
It is down to less than 100 DEG C, changes logical nitrogen and be cooled to room temperature, then tear stove open, take out sample, i.e. prepare coating
Having the electrod assembly on coarse CVD tungsten coating surface, its surface microscopic figure is shown in Fig. 3.Tungsten coating
(CVD-W) thickness is 0.1mm, and tungsten coating sedimentation rate is about 0.6mm/h.Coating surface is smooth,
Without protruding particle, coating is without cracking, skin effect phenomenon.
The above, only presently preferred embodiments of the present invention, therefore the present invention can not be limited according to this and implement
Scope, i.e. according to the scope of the claims of the present invention and description made equivalence change with modify, all should be still
In the range of the genus present invention contains.
Claims (10)
1. the method for short arc high pressure gas-discharge lamp anode surface roughening, it is characterised in that:
Comprise the steps:
(1) forging state tungsten bar is processed into required geometry and size as requested；
(2) forging state pure tungsten electrodes surface employing 1000#～3000# sand paper is polished, remove surface
Oxide layer, carries out acetone ultrasonic cleaning oil removing subsequently, more successively with ultra-pure water, analyzes absolute alcohol and carry out clearly
Wash, dry up；
(3) with tungsten hexafluoride as raw material, with hydrogen as reducing gas, at the base material of 350-600 DEG C
Under temperature conditions, carry out chemical gaseous phase deposition on forging state pure tungsten electrodes surface, form 0.1-6mm thickness
Tungsten coating, i.e. prepare have high-purity, the xenon short-act lamp anode component of high dense tungsten coating.
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: described anode component base material is forging state pure tungsten material.
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: forging state pure tungsten electrodes surface keeps the flat surface of polishing as required.
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: forging state pure tungsten electrodes surface processes as required has certain size, necessarily
The groove of spacing.
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: forging state pure tungsten electrodes surface is processed into certain configuration of surface, institute as required
State certain configuration of surface and include pit or concavo-convex.
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: substrate surface is used by described step (2) 1000#～3000# sand paper carry out table
Polishing in face, texturing also removes surface oxide layer.
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: in described step (3), base material temperature is 400-580 DEG C.
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: in described step (3), the purity of tungsten hexafluoride and hydrogen is at least 99.99%；
Before being passed through CVD reactor, tungsten hexafluoride temperature is higher than 45 DEG C less than its decomposition temperature, and pressure is
70-120kPa。
A kind of side for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: the H being passed through described in step (3)2And WF6Mol ratio be 1:2-3.5, change
The sedimentation rate learning vapour deposition is 0.2-0.6mm/h.
A kind of for short arc high pressure gas-discharge lamp anode surface roughening
Method, it is characterised in that: the tungsten coating thickness of described step (3) is 0.5-5mm.
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| CN201410171689.4A CN104018135B (en) | 2014-04-25 | 2014-04-25 | A kind of method for short arc high pressure gas-discharge lamp anode surface roughening |
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| CN201410171689.4A CN104018135B (en) | 2014-04-25 | 2014-04-25 | A kind of method for short arc high pressure gas-discharge lamp anode surface roughening |
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| CN104018135B true CN104018135B (en) | 2016-08-24 |
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| JP7013068B1 (en) * | 2020-04-30 | 2022-01-31 | 株式会社ユメックス | Electrodes for short arc discharge lamps and their generation methods |
| JP7193676B1 (en) | 2022-10-25 | 2022-12-20 | 株式会社オーク製作所 | discharge lamp |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS59123765A (en) * | 1982-12-28 | 1984-07-17 | Toho Kinzoku Kk | Chemical vapor deposition method |
| US7633226B2 (en) * | 2005-11-30 | 2009-12-15 | General Electric Company | Electrode materials for electric lamps and methods of manufacture thereof |
| CN1962935A (en) * | 2006-12-08 | 2007-05-16 | 北京工业大学 | Process for preparing high-purity compact profile tungsten products |
| CN103484830A (en) * | 2012-06-12 | 2014-01-01 | 核工业西南物理研究院 | Preparation method of thick tungsten coating material and tungsten coating material |
| CN203386719U (en) * | 2013-05-31 | 2014-01-08 | 常州玉宇电光器件有限公司 | A heat-radiation-type bent pipe xenon lamp |
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