CN104006893A - Temperature sensor with multi-protection function - Google Patents

Temperature sensor with multi-protection function Download PDF

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Publication number
CN104006893A
CN104006893A CN201410236558.XA CN201410236558A CN104006893A CN 104006893 A CN104006893 A CN 104006893A CN 201410236558 A CN201410236558 A CN 201410236558A CN 104006893 A CN104006893 A CN 104006893A
Authority
CN
China
Prior art keywords
temperature
temperature sensor
thermistor
thermal cut
temperature controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201410236558.XA
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Chinese (zh)
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CN104006893B (en
Inventor
龙克文
颜天宝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chuandong Magnetic Electronic Co Ltd
Original Assignee
FOSHAN CHUANDONG LIGHTING TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FOSHAN CHUANDONG LIGHTING TECHNOLOGY Co Ltd filed Critical FOSHAN CHUANDONG LIGHTING TECHNOLOGY Co Ltd
Priority to CN201410236558.XA priority Critical patent/CN104006893B/en
Priority to CN201610703385.7A priority patent/CN106092347B/en
Publication of CN104006893A publication Critical patent/CN104006893A/en
Application granted granted Critical
Publication of CN104006893B publication Critical patent/CN104006893B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08Protective devices, e.g. casings
    • G01K1/12Protective devices, e.g. casings for preventing damage due to heat overloading
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor

Abstract

The invention discloses a temperature sensor with a multi-protection function. The temperature sensor with the multi-protection function comprises an outer shell, a thermistor, a thermo fuse and a temperature controller, wherein a fixed piece is arranged in the outer shell, and the thermistor, the thermo fuse and the temperature controller are mounted on the fixed piece and in the outer shell. The thermistor, the thermo fuse and the temperature controller are respectively and tightly attached to a temperature sensing surface of the outer shell. According to the temperature sensor with the multi-protection function, corresponding actions can be carried out accurately in time according to actual temperatures, flexibility is high, safety is high, the temperature sensor with the multi-protection function is ingenious and reasonable in structure, the fixed piece is easy to produce and machine, all accessories are convenient to mount, the fixed piece and the outer shell are fixed through one-off riveting, and production and assembling efficiency is improved greatly.

Description

A kind of temperature sensor of multiple protective
Technical field
The present invention relates to a kind of temperature sensor, in particular a kind of temperature sensor of multiple protective.
Background technology
Temperature is the physical quantity that characterizes the cold and hot degree of object, is a very important and general measurement parameter in industrial and agricultural production process, is also important parameter in daily-use electrical appliance.In daily life, the safety that the measurement of temperature and control are used electrical equipment, the lifting of automaticity, the saving energy, lifting people's living standard play very important effect.Due to thermometric ubiquity, the quantity of temperature sensor ranks first in various sensors, accounts for 50%.
Temperature sensor is varied with temperature and is changed certain specific character and indirectly measure by object.Along with social development, the application of temperature sensor is more and more general, and the electric cooker being well known is a typical case.Application number be 201220187962.9 utility model patent disclose a kind of thermistor at upper, two thermal cut-ofves the temperature sensor in lower series connection, this temperature sensor is realized thermistor and thermal cut-off is fixed on to aluminium lid inside by the fixed head of thermistor fixed card and thermal cut-off.Application number is that 201220709843.5 utility model patent discloses the temperature sensor that another comprises thermistor and thermal cut-off, and this temperature sensor utilizes groove type thermistor fixed card and semi-surrounding frame thermal cut-off fixed support to realize the fixing of thermistor and thermal cut-off.These two utility model patents, cannot second protection after thermal cut-off excess temperature power-off protection, must dismantle temperature sensor and just can again realize overheat protector effect, and the use cost of temperature sensor is high, removes and installs trouble, and security is low.
In above-mentioned two schemes, thermal cut-off is all less than the one side that be simultaneously arranged on temperature-sensitive aluminium lid the same as thermistor, and two thermal cut-ofves cannot direct feeling temperature-sensitive aluminium lid temperature, in practical operation, just the fusing-off temperature of thermal cut-off need to be heightened, generally to exceed 180 DEG C, strengthen so again the adaptive capacity to environment of other devices at this overtemperature prote temperature, on the other hand, two thermal cut-ofves directly are separately connected to arrange and are also easily caused the temperature sensing of itself inconsistent, need to be by 2 fusing-off temperatures that thermal cut-off is different be set, otherwise cannot sync response.
Cannot automatically reset and again realize the deficiency of excess temperature power-off protection in order to overcome in temperature sensor thermal cut-off, the utility model patent of the patent No. 201320247908.3 discloses one and has comprised thermistor, the temperature sensor of the multiple Thermal Protection Structural of thermal cut-off and temperature controller, but due to the small volume of temperature sensor, substantially limited by application products such as electric cooker/pressure cookers, in this patent, the structure setting of temperature sensor is not too reasonable, cause thermal cut-off cannot be arranged on enclosure (easily impaired cannot work), this has affected the security of temperature sensor greatly, reduce installation effectiveness simultaneously.
In addition, the temperature sensor of above-mentioned three kinds of structures fix the parts that thermistor, thermal cut-off adopt many, need to fix respectively simultaneously, multi-pass operations is wanted in production and assembly, comparatively loaded down with trivial details, production and application cost is higher.Simultaneously; the set position of temperature controller, thermal cut-off and the thermistor of the temperature sensor of above-mentioned three kinds of structures is inconsistent; the actual temperature of responding to has larger difference (error); therefore the sensitivity of temperature sensor overheating protection is lower; cannot move accordingly according to actual temperature timely, have larger potential safety hazard.
Therefore, prior art has yet to be improved and developed.
Summary of the invention
The object of the present invention is to provide a kind of temperature sensor of multiple protective; be intended to solve that traditional temperature sensor fixed part is many, repeatedly fixing assembling causes that cost is high, efficiency is low; and thermal cut-off removes and installs trouble, heat protective device directly temperature-sensitive causes the low technical matters of security.
Technical scheme of the present invention is as follows: a kind of temperature sensor of multiple protective, comprise shell, thermistor, thermal cut-off and temperature controller, wherein, in described shell, be provided with fixture, described thermistor, thermal cut-off and temperature controller, by fixture and shell fixed installation, are placed in enclosure setting; Described thermistor, thermal cut-off and temperature controller are close to respectively the setting of shell temperature-sensitive face.
The temperature sensor of described multiple protective, wherein, described fixture comprises the joint face that is fixedly connected with shell, and described joint face is provided with temperature controller installation position, and side, described temperature controller installation position is respectively arranged with thermistor fabricated section and thermal cut-off fabricated section; Described thermistor fabricated section and thermal cut-off fabricated section and the one-body molded setting of joint face.
The temperature sensor of described multiple protective; wherein; described thermistor fabricated section is connected with joint face is vertical; thermistor fabricated section arches upward and forms the thermistor installation position of U-shaped structure; described thermistor installation position is arranged on enclosure, with the common position, chamber that forms fixing thermistor of shell temperature-sensitive face.
The temperature sensor of described multiple protective; wherein, described thermal cut-off fabricated section is connected with joint face is vertical, and thermal cut-off fabricated section both sides are provided with multiple cards; described card is bent to form the lock chamber of stationary heat fuse, and described thermal cut-off bottom arranges near shell temperature-sensitive face.
The temperature sensor of described multiple protective, wherein, the one side opening setting of described temperature controller installation position.
The temperature sensor of described multiple protective, wherein, described fixture also comprises the wire fixture with the one-body molded setting of joint face.
The temperature sensor of described multiple protective, wherein, described joint face and shell once rush riveting and are fixedly installed.
The temperature sensor of described multiple protective, wherein, the temperature-sensitive face of described enclosure and the surface of contact of thermistor, temperature controller or thermal cut-off are provided with heat-conducting silicone grease layer.
Beneficial effect of the present invention: the present invention has optimized the structure of temperature sensor; under the condition of volume that does not increase temperature sensor; thermal cut-off, temperature controller and thermistor three are arranged on to enclosure; make temperature sensor realize the technique effect of multiple overheating protection; can extend the serviceable life of temperature sensor by the overheating protection setting of temperature controller; reduce use cost, temperature controller and thermal cut-off multiple protective are set simultaneously, improve the security of temperature sensor.Thermal cut-off of the present invention, temperature controller and thermistor three are all close to the temperature-sensitive face setting of shell, directly induction heat transmits temperature, compare with traditional thermel protection device directly not contacting, the operating temperature that the present invention reduces by 10 DEG C of left and right (is that the former temperature that is set in is that 183 DEG C of realizations disconnect action, in the time that temperature-sensitive surface temperature reaches 183 DEG C, the present invention can carry out power-off protection action, traditional need in the time that reaching 193 DEG C, temperature-sensitive surface temperature just carry out power-off protection action), temperature controller and thermal cut-off are combined to form the protection of step heat and prevent that thermel protection device lost efficacy, the temperature that three responds to is simultaneously the same, and error is little.Temperature sensor of the present invention can be according to actual temperature accurately, move timely accordingly, highly sensitive, high safety.Structure of the present invention is ingenious rationally, the production and processing of fixture is simple, each accessory is easy for installation, 1 fixture and shell rush riveting 1 time and are fixedly installed, and compare traditional temperature sensor and need to repeatedly rush riveting assembling, and every production packaging efficiency improves 6%, each product reduces by 1 fixture and reduces by 1 fixed installation operation, cost 3%, for the product of this large-scale production, has promoted significant benefit.
Brief description of the drawings
Fig. 1 is the structural representation of the temperature sensor of multiple protective in the present invention.
Fig. 2 is the structural representation of fixture and shell.
Fig. 3 is the fixture semi-finished product structure schematic diagram after moulding.
Fig. 4 is the structural representation of thermal cut-off.
Embodiment
For making object of the present invention, technical scheme and advantage clearer, clear and definite, developing simultaneously referring to accompanying drawing, the present invention is described in more detail for embodiment.
Traditional temperature sensor enclosure generally only arranges two kinds of temperature-sensing elements, for example, thermistor and thermal cut-off are set, or thermistor and temperature controller are set.This is to arrange unreasonablely due to the structure of traditional temperature sensor, and parts are more, and the limited space of enclosure cannot add thermal protective element to enclosure again.Ensureing under the prerequisite of temperature sensor microminiaturization, how to optimize temperature sensor structure, improve its assembling production efficiency and improve the security of its use, be a great problem of present temperature sensor development.
The present invention is optimized the structure of traditional temperature sensor, has proposed a kind of portion in the enclosure and arrange the arrangement of temperature sensor of temperature controller, thermal cut-off and thermistor.As shown in Figure 1, temperature sensor of the present invention comprises shell 100, in shell 100 inside, fixture 500 is set, wherein thermistor 200, thermal cut-off 300 and temperature controller 400 are all fixed on fixture 500, be placed in shell 100 inside (wherein Fig. 1, the 910 output line connectors that are thermistor, the 920 output line connectors that are thermal cut-off, 930 is the output line connector of temperature controller, 940 connectors that are ground wire).This structure that in shell 100 inside, three kinds of temperature-sensing elements is set and realizes multiple protective, the security that has improved greatly temperature sensor; Simultaneously, these three kinds of temperature-sensing elements are set together comparatively closely, and the temperature-sensitive face 110 of being all close to shell 100 arranges, its actual temperature situation of responding to is basic identical, divide the mode being arranged than the temperature-sensing element of traditional temperature sensor, the sensitivity of this temperature sensor of the present invention is high, and the temperature error that each temperature-sensing element is responded to is little, can accurately and timely move accordingly according to actual temperature conditions.For example, in traditional temperature sensor, thermal cut-off and thermistor are not to arrange at grade, thermistor is generally close to the setting of temperature-sensitive face, thermal cut-off exists certain distance with temperature-sensitive face, and (this is because arrangement of temperature sensor is unreasonable, enclosure space is little, the setting of temperature-sensing element must being staggered), in the time of temperature-sensitive surface temperature 183 DEG C time, the temperature that thermistor is responded to is 183 DEG C, and the temperature that thermal cut-off is responded to is 172 DEG C, like this in 183 DEG C of situations about will overtemperature disconnecting originally, just need to wait temperature-sensitive surface temperature to rise to 192 DEG C (now thermal cut-off temperature sensor just just can reach 183 DEG C), may exist so improper destruction has occurred in temperature-rise period between 183 DEG C to 192 DEG C.And if the structures of two thermal cut-ofves series connection, having the temperature of 1 induction is 172 DEG C, the temperature of another 1 induction is 170 DEG C, has lost the objects for avoiding single thermal cut-off to lose efficacy of two series connection protections.Therefore there is larger potential safety hazard in this setup.And three kinds of temperature-sensing elements of the present invention are all close to the setting of temperature-sensitive face, the temperature that three responds to is consistent, does not substantially have error, therefore can accurately and timely move accordingly according to actual temperature conditions, and security performance is good.
More excellent a kind of scheme, thermal cut-off wherein as shown in Figure 4, be by 2 in inside hot melt fracture of wires arranged side by side realize the object that prevents that single thermal cut-off lost efficacy, wherein 2 hot melt fracture of wires are erect to dwindle transverse width and are placed in temperature-sensitive shell.
The present invention proposes a kind of structure fixture 500 cleverly, can be realized and in little space, be put into these three kinds of temperature-sensing elements of thermistor, thermal cut-off and temperature controller by this fixture 500.As shown in Figure 2, this fixture 500 comprises a joint face 510, three sides at joint face 510 are respectively arranged with temperature controller installation position 511, thermal cut-off fabricated section 530 and thermistor fabricated section 520, thermistor 200, thermal cut-off 300 and temperature controller 400 are placed in respectively thermistor fabricated section 520, fixing in thermal cut-off fabricated section 530 and temperature controller installation position 511, form a class cylindrical structure, the cavity that just can put into shell 100 is fixing, and thermistor 200, the temperature-sensitive face 110 that shell 100 is close in the bottom of thermal cut-off 300 and temperature controller 400 arranges.
Concrete, temperature controller installation position 511 is for being arranged on a circular mounting position coordinating with temperature controller profile on joint face 510, and temperature controller installation position 511 outer openings, put into temperature controller 400 so that install, and also can save material simultaneously and save space.
In practical application, in order to extend the serviceable life of temperature sensor and to improve its security, temperature controller is preferably power-off restoration temperature controller, and its break-off signal is lower than the response temperature of thermal cut-off.More specifically, power-off restoration temperature controller is taking soft magnetic ferrite as temperature-sensing element, and heater circuit is printed on the another side of soft magnetic ferrite temperature-sensitive face.
Be provided with thermistor fabricated section 520 in the side of temperature controller installation position 511, referring to Fig. 2, thermistor fabricated section 520 is connected with joint face 510 is vertical, arch upward and form thermistor installation position 521 at thermistor fabricated section 520 ends, thermistor 200 is horizontally installed in thermistor installation position 521, fill at fixture 500 after the cavity of shell 100, thermistor 521 is fixed jointly with the bottom surface (temperature-sensitive face 110) of shell 100 in thermistor installation position 521.This setup on the one hand can be by the thermistor 200 temperature-sensitive face 110 that is fixed on shell 100 steadily, on the other hand, the thermistor 200 of horizontally set can obtain the larger area contacting with temperature-sensitive face 110, improve the sensitivity of thermistor 200 temperature-sensitives, improve the security of temperature sensor.
Be provided with thermal cut-off fabricated section 530 at the opposite side of temperature controller installation position 511, this fuse fabricated section 530 is connected with joint face 510 is vertical, on thermal cut-off fabricated section 530, be provided with multiple cards 531, these cards are bent to form the lock chamber 532 that blocks thermal cut-off.As shown in Figure 2, lock chamber 532 opening upwards settings, thermal cut-off 300 inserts in lock chamber 532, and the bottom of thermal cut-off 300 is near temperature-sensitive face 110.The setting of multiple cards 531, is conducive to stationary heat fuse 300 on the one hand, can shield to thermal cut-off 300 on the other hand, has certain drawing-resistant function.And the lock chamber 532 of opening upwards, vertical setting can be conducive to save space on the one hand, be also convenient on the other hand insert thermal cut-off 300.
As shown in Figure 2, thermistor fabricated section 520 and thermal cut-off fabricated section 530 are arranged on below joint face 510, on joint face 510, be provided with wire fixture 540, these wire fixture 540 tops are provided with wire fixed frame 541, each wire (comprising lead-in wire, the lead-in wire of thermal cut-off and the lead-in wire of temperature controller of thermistor) of temperature sensor is all fixing by the unified binding of wire fixed frame 541, reaches unified, neat effect.This setup, is conducive to mounting temperature sensor, the security that has indirectly improved on the other hand temperature sensor on the one hand.
Further, for the ease of connecting ground wire, on joint face 510, be provided with ground line three-way hole 512.
As shown in Figure 3, be in actual production, the structural representation of crude semi-manufacture fixture 500.This fixture 500 disclosed by the invention, not only can realize three kinds of temperature-sensing elements are placed in to space minimum shell 100 cavitys, and, this fixture 500 structures and be easy to production and processing.Below, the production procedure of fixture 500 is described.
First, make mould, one-shot forming obtains the semi-manufacture fixture 500 in Fig. 3, this semi-manufacture fixture 500 has three positions to be processed (be respectively in Fig. 3 label 10,20 and 30), these three positions to be processed are carried out bending at temperature sensor assembling process temperature-sensing element and output line are carried out to screens, can obtain respectively corresponding thermal cut-off fabricated section 530, thermistor fabricated section 520 and wire fixture 540.On three positions to be processed, be provided with multiple folding lines, these folding lines form (the position thinner thickness of folding line, is easy to bending) after by mould one-shot forming, when actual production, only need to carry out bending to working position according to these folding lines, can obtain as fixture 500 finished products in Fig. 2.Because three positions to be processed are not associated, therefore this structure to be processed is extremely applicable to streamline production, arranges multiple working procedure on streamline, and each procedure completes the processing to a position to be processed, no matter be to utilize staff or equipment to process, its efficiency is high.Meanwhile, because fixture 500 is that one-shot forming obtains, convenient for production, only need to make corresponding mould, can be mass-produced.In actual applications, it is fixed that fixture 500 once rushes rivet clasp by its joint face 510 and shell 100, and the parts of temperature sensor are few, and installation procedure is simple, has improved greatly the production and assembly efficiency of temperature sensor.
In practical application, the structural representation of thermal cut-off 300 of the present invention as shown in Figure 4, two hot melt fracture of wires 310 that thermal cut-off 300 is arranged by series connection form, two hot melt fracture of wires 310 that these two series connection are arranged are encapsulated in and in thermal cut-off shell 320, fixedly obtain label 330 in thermal cut-off 300(Fig. 4 is wire), then this thermal cut-off is vertically inserted to setting in the lock chamber 532 of thermal cut-off fabricated section 530.The thermal cut-off structure that this series connection arranges, the security that has further improved temperature sensor can be guaranteed the heat transmission temperature that 2 hot melt fracture of wires are identical extremely to the greatest extent simultaneously as far as possible, avoids in the time that one of them hot melt fracture of wire 310 breaks down, temperature sensor is malfunctioning.This vertical mounting means of while not only can be realized hot melt fracture of wire 310 and arrange near temperature-sensitive face 110, also helps the occupy-place of dwindling hot melt fracture of wire 310, ensures the microminiaturization of temperature sensor.
In practical application, in order to improve the sensitivity of temperature sensor, the place that can contact with temperature-sensing element at the temperature-sensitive face of shell arranges heat-conducting silicone grease layer, and this heat-conducting silicone grease layer can improve the heat conductivility of shell, makes the temperature-sensing element of being close to the setting of shell temperature-sensitive face be more prone to respond to actual temperature; Meanwhile, arranging of heat-conducting silicone grease layer can also play connection function, and fixture 500 and each temperature-sensing element are better fixed on to enclosure.
Arrangement of temperature sensor of the present invention is ingenious, can in minimum space, put into thermistor, thermal cut-off and three kinds of temperature-sensing elements of temperature controller, these three kinds of temperature-sensing elements are placed in same plane substantially simultaneously, the actual temperature error of responding to is little, the sensitivity of temperature sensor, safe.Meanwhile, this anchor structure production and processing that the present invention proposes is convenient, has reduced the number of components of temperature sensor, has improved the production and assembly efficiency of temperature sensor.
Should be understood that, application of the present invention is not limited to above-mentioned giving an example, and for those of ordinary skills, can be improved according to the above description or convert, and all these improvement and conversion all should belong to the protection domain of claims of the present invention.

Claims (8)

1. the temperature sensor of a multiple protective, comprise shell, thermistor, thermal cut-off and temperature controller, it is characterized in that, in described shell, be provided with fixture, described thermistor, thermal cut-off and temperature controller are arranged on fixture, are placed in enclosure setting; Described thermistor, thermal cut-off and temperature controller are close to respectively the setting of shell temperature-sensitive face.
2. the temperature sensor of multiple protective according to claim 1, it is characterized in that, described fixture comprises the joint face that is fixedly connected with shell, and described joint face is provided with temperature controller installation position, and side, described temperature controller installation position is respectively arranged with thermistor fabricated section and thermal cut-off fabricated section; Described thermistor fabricated section and thermal cut-off fabricated section and the one-body molded setting of joint face.
3. the temperature sensor of multiple protective according to claim 2; it is characterized in that; described thermistor fabricated section is connected with joint face is vertical; thermistor fabricated section arches upward and forms the thermistor installation position of U-shaped structure; described quick resistance installation position is arranged on enclosure, with the common position, chamber that forms fixing thermistor of shell temperature-sensitive face.
4. the temperature sensor of multiple protective according to claim 2; it is characterized in that; described thermal cut-off fabricated section is connected with joint face is vertical; thermal cut-off fabricated section both sides are provided with multiple cards; described card is bent to form the lock chamber of stationary heat fuse, and described thermal cut-off bottom arranges near shell temperature-sensitive face.
5. the temperature sensor of multiple protective according to claim 2, is characterized in that, the one side opening setting of described temperature controller installation position, blocks temperature controller body, and temperature controller temperature-sensitive face and shell are close to setting.
6. the temperature sensor of multiple protective according to claim 2, is characterized in that, described fixture also comprises the wire fixture with the one-body molded setting of joint face.
7. the temperature sensor of multiple protective according to claim 2, is characterized in that, described fixture joint face and shell once rush riveting and be fixedly installed.
8. the temperature sensor of multiple protective according to claim 2, is characterized in that, described temperature controller is power-off restoration temperature controller.
CN201410236558.XA 2014-05-30 2014-05-30 A kind of temperature sensor of multiple protective Expired - Fee Related CN104006893B (en)

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CN201410236558.XA CN104006893B (en) 2014-05-30 2014-05-30 A kind of temperature sensor of multiple protective
CN201610703385.7A CN106092347B (en) 2014-05-30 2014-05-30 A kind of production method of the temperature sensor of multiple protective

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CN106706143A (en) * 2016-12-20 2017-05-24 陈关莲 Temperature sensor outside clamp and temperature sensor using same
CN107348847A (en) * 2017-05-27 2017-11-17 何志雄 Vehicle-mounted coffee maker
CN110707035A (en) * 2019-10-16 2020-01-17 北京北方华创微电子装备有限公司 Electrostatic chuck, semiconductor processing chamber and apparatus

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104316218A (en) * 2014-10-31 2015-01-28 国家电网公司 Method for improving accuracy in measuring temperature of casing of GIS disconnecting switch
CN106706143A (en) * 2016-12-20 2017-05-24 陈关莲 Temperature sensor outside clamp and temperature sensor using same
CN107348847A (en) * 2017-05-27 2017-11-17 何志雄 Vehicle-mounted coffee maker
CN110707035A (en) * 2019-10-16 2020-01-17 北京北方华创微电子装备有限公司 Electrostatic chuck, semiconductor processing chamber and apparatus

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