CN104004994A - Coating device and coating method for rotary part - Google Patents
Coating device and coating method for rotary part Download PDFInfo
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- CN104004994A CN104004994A CN201410161353.XA CN201410161353A CN104004994A CN 104004994 A CN104004994 A CN 104004994A CN 201410161353 A CN201410161353 A CN 201410161353A CN 104004994 A CN104004994 A CN 104004994A
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- gear
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- rotating
- rotating shaft
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Abstract
The invention relates to a coating device and a coating method for a rotary part. The device comprises a revolution disc fixed on equipment. The bottom center of the revolution disc is connected to a rotation shaft, which is fixedly connected to a rotation gear, and the rotation gear realizes supporting through connection of the rotation shaft and a support frame. A rotary gear and a rotary shaft are in fixed connection, and the rotary shaft is fixed on the support frame through two brackets. The rotary gear and the rotation gear are in engaged connection. One end of the rotary shaft is equipped with a pre-evaporation part. Through a gear transmission mechanism, surface coating of the rotary part with a complex shape can be realized, and the uniformity and quality of the film are improved. The device and the method provided by the invention have high application value in evaporated dielectric films and solder films.
Description
Technical field
The present invention relates to film, particularly a kind of film coating apparatus of rotary part and film coating method.
Background technology
Plated film is at material surface, to plate one deck dielectric film by the method for physics or chemistry, or plating layer of metal film, object is the transmission and reflection characteristic that changes material surface, the welding characteristic that increases material surface, has very wide application in fields such as optical thin film, welding, unicircuit manufacture, information demonstration, protective coatings.The film plating out, except requiring expertly to grasp coating process and operative technique, also requiring has feasible fixture, and existing coating clamp great majority are applicable to part coating single side, all want plated film to need to design a rotary drive mechanism realize for part surrounded surface.
Summary of the invention
The invention provides a kind of film coating apparatus and film coating method of rotary part, object is to overcome the deficiency of existing plated film mode and the homogeneity of film and the undesirable problem of quality of forming film.
Technical solution of the present invention is as follows:
A film coating apparatus for rotary part, comprises rotary table, the axis of rotation, bracing frame, rotating gear, swiveling gear, rotating shaft and support, and rotary table is circular, is fixed on filming equipment, and the axis of rotation is fixedly connected below its center; The axis of rotation and rotating gear are fixedly connected, and rotating gear was realized and being supported by the axis of rotation and connecting of bracing frame; Swiveling gear and rotating shaft are fixed, and rotating shaft is fixed on bracing frame by two supports; Swiveling gear and rotating gear are connected with a joggle; Rotating shaft one end connected component.
Described rotating gear and swiveling gear are all conical gear.
The rotation centerline of described rotating gear and the transmission of swiveling gear institute is 90 degree each other.
Described rotating gear and swiveling gear are made of aluminum.
Utilize the film coating apparatus of above-mentioned rotary part to piece surface film coating method, the method comprises the following steps:
1. rotary table is arranged on equipment;
2. rotating gear is arranged on to one end of the axis of rotation, the other end of the axis of rotation is fixedly connected on rotary table through the supported hole on bracing frame, and subsequently, the axis of rotation connects with bracing frame;
3. swiveling gear and rotating shaft are fixedly connected, then support are connected in to the appropriate location of rotating shaft;
4. swiveling gear, rotating shaft are connected on bracing frame by support, but unfixing;
5. regulate swiveling gear position, until appropriately mesh rear fixed support and bracing frame with rotating gear;
6. part is arranged on rotating shaft;
7. first rotary table rotates, and by rotating gear and swiveling gear transmission rig, makes part have turning motion;
8. according to evaporation technology parameter, evaporation source is heated, from evaporation source vapour molecule out, deposit to piece surface and realize film forming.
Advantage of the present invention is:
This device is to make part have the motion of turning direction own by gear drive, can meet the surface coating requirement of complicated shape, can obtain good homogeneity, effectively improves film quality.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention 1;
Fig. 2 is the structural representation of the embodiment of the present invention 2;
Embodiment
Fig. 1 is the structural representation of the embodiment of the present invention 1, and the present invention is a rotary part surface film coating device, comprises rotary table 1, the axis of rotation 2, bracing frame 3, rotating gear 4, swiveling gear 5, rotating shaft 6, support 7, part 8.Rotary table 1 is circular, and lower central place connects the axis of rotation 2, and the axis of rotation 2 is fixedly connected with rotating gear 4, and rotating gear 4 is connected on bracing frame 3 by autobiography axle 2, thereby guarantees that 4 of rotating gears have the autobiography of itself, motionless in the other direction.Swiveling gear 5 is fixedly connected with rotating shaft 6, and rotating shaft 6 is fixedly connected on bracing frame 3 by two supports 7, thereby guarantees that 5 of gears of passback have the autobiography of itself, motionless in the other direction.Rotating gear 4 connects with swiveling gear 5 engagements, and the rotation centerline of two gear institutes transmission is 90 degree each other.
Implementation method is as follows: whole device is fixed on equipment by rotary table 1, needing the part 8 of plated film to be arranged on rotating shaft 6.Under external force, first make rotary table 1 rotate, drive autobiography axle 2 and rotating gear 4 that autobiography occurs, because rotating gear 4 connects with swiveling gear 5 engagements, so swiveling gear 5 has spinning motion, because swiveling gear 5 is fixedly connected on bracing frame 3 by support 7, so swiveling gear 5 does not have the motion of other directions.The autobiography of swiveling gear 5 drives part 8 to realize turning motion.To evaporation source 9 heating, from evaporation source vapour molecule out along evaporation paths 10, be deposited on part 8 surfaces, can be at the high-quality uniform rete of part 8 surface deposition.
Fig. 2 is the structural representation of the embodiment of the present invention 2, is to utilize to increase the top view that gear drive increases plated film number of spare parts.The rotation centerline that rotating gear 4 meshes the transmission of swiveling gear 5, two gear institutes is below 90 degree each other; Rotating shaft 6 is fixedly connected with swiveling gear 5; The gear 11 that is fixedly connected on rotating shaft 6, gear 12 and gear 11 engagements, the rotation centerline of two gear institutes transmission is parallel to each other; Rotating shaft 13 is fixedly connected with gear 12, like this, is arranged in order and can forms a plurality of transmission rigs.During evaporation part, part 14 is arranged on rotating shaft 6 and rotating shaft 13, the rotation of rotating gear 4 drives swiveling gear 5 to rotate, by rotating shaft 6 driven gear 11 autobiographies, because gear 12 connects with gear 11 engagements, so gear 12 has autobiography motion, the rotation of rotating shaft 6 and rotating shaft 13 drives part to have turning motion, realize surface coating, adopt this mechanism can realize a plurality of piece surface plated films.
Claims (4)
1. a film coating apparatus for rotary part, is characterized in that comprising rotary table, the axis of rotation, bracing frame, rotating gear, swiveling gear, rotating shaft and support, connects the axis of rotation below described rotary table center; The axis of rotation and rotating gear are fixedly connected, and rotating gear was realized and being supported by the axis of rotation and connecting of bracing frame; Swiveling gear and rotating shaft are fixedly connected, and rotating shaft is fixed on bracing frame by support; Swiveling gear connects with rotating gear engagement; The pre-part that steams is installed in rotating shaft one end, realizes part itself and has turning motion, and the turning motion method of employing part itself realizes the plated film of complex-shaped piece surface, has guaranteed homogeneity and the quality of rete.
2. rotary part surface film coating device according to claim 1, is characterized in that described rotating gear and swiveling gear are all conical gear.
3. rotary part surface film coating device according to claim 1, the rotation centerline that it is characterized in that described rotating gear and swiveling gear is 90 degree each other.
4. rotary part surface film coating device according to claim 1, is characterized in that described rotating gear and swiveling gear are made of aluminum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410161353.XA CN104004994A (en) | 2014-04-22 | 2014-04-22 | Coating device and coating method for rotary part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410161353.XA CN104004994A (en) | 2014-04-22 | 2014-04-22 | Coating device and coating method for rotary part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104004994A true CN104004994A (en) | 2014-08-27 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410161353.XA Pending CN104004994A (en) | 2014-04-22 | 2014-04-22 | Coating device and coating method for rotary part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104004994A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294218A (en) * | 2014-10-23 | 2015-01-21 | 中国科学院上海光学精密机械研究所 | Device and method for preparing Au-Sn film |
| CN107299329A (en) * | 2017-07-14 | 2017-10-27 | 信利光电股份有限公司 | A kind of coating apparatus and film plating process of curved surface cover plate |
| CN107740063A (en) * | 2017-11-16 | 2018-02-27 | 温州卡耐夫电器有限公司 | Vacuum aluminum-plating equipment workpiece-carrying structure |
| CN108823537A (en) * | 2018-07-16 | 2018-11-16 | 安康学院 | A kind of magnetic material vacuum coating equipment |
| CN110747442A (en) * | 2019-09-10 | 2020-02-04 | 天津大学 | Rotating device for coating film on outer surface of hollow cylindrical plated part |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7182814B1 (en) * | 2005-08-12 | 2007-02-27 | Hong-Cing Lin | Sample holder for physical vapor deposition equipment |
| CN101736309A (en) * | 2009-12-18 | 2010-06-16 | 广州市光机电技术研究院 | Horizontal revolution and rotation mechanism for vacuum coating |
| CN201567365U (en) * | 2009-11-17 | 2010-09-01 | 深圳市振恒昌实业有限公司 | Novel multipurpose film coating machine rotating frame |
-
2014
- 2014-04-22 CN CN201410161353.XA patent/CN104004994A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7182814B1 (en) * | 2005-08-12 | 2007-02-27 | Hong-Cing Lin | Sample holder for physical vapor deposition equipment |
| CN201567365U (en) * | 2009-11-17 | 2010-09-01 | 深圳市振恒昌实业有限公司 | Novel multipurpose film coating machine rotating frame |
| CN101736309A (en) * | 2009-12-18 | 2010-06-16 | 广州市光机电技术研究院 | Horizontal revolution and rotation mechanism for vacuum coating |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294218A (en) * | 2014-10-23 | 2015-01-21 | 中国科学院上海光学精密机械研究所 | Device and method for preparing Au-Sn film |
| CN107299329A (en) * | 2017-07-14 | 2017-10-27 | 信利光电股份有限公司 | A kind of coating apparatus and film plating process of curved surface cover plate |
| CN107740063A (en) * | 2017-11-16 | 2018-02-27 | 温州卡耐夫电器有限公司 | Vacuum aluminum-plating equipment workpiece-carrying structure |
| CN108823537A (en) * | 2018-07-16 | 2018-11-16 | 安康学院 | A kind of magnetic material vacuum coating equipment |
| CN108823537B (en) * | 2018-07-16 | 2020-03-24 | 安康学院 | Magnetic material vacuum coating equipment |
| CN110747442A (en) * | 2019-09-10 | 2020-02-04 | 天津大学 | Rotating device for coating film on outer surface of hollow cylindrical plated part |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140827 |