CN103997341B - A kind of high-precision adc and its analog front circuit applied to magnetic survey - Google Patents
A kind of high-precision adc and its analog front circuit applied to magnetic survey Download PDFInfo
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- CN103997341B CN103997341B CN201310051364.8A CN201310051364A CN103997341B CN 103997341 B CN103997341 B CN 103997341B CN 201310051364 A CN201310051364 A CN 201310051364A CN 103997341 B CN103997341 B CN 103997341B
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- 238000012937 correction Methods 0.000 claims abstract description 14
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- 230000010354 integration Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 11
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- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 238000009825 accumulation Methods 0.000 claims description 2
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- 238000012545 processing Methods 0.000 abstract description 3
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- 230000033228 biological regulation Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000000686 essence Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 238000007429 general method Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
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Abstract
The invention discloses a kind of high-precision adc and its analog front circuit applied to magnetic survey.Described analog front circuit is made up of CMOS Magnetic Sensors, the low-noise amplifier of Ripple Suppression loop, the cumulative type analog-to-digital converter of integration, clock phase control with correction unit and temperature-compensation circuit.Phase controlling is mainly used to eliminate the imbalance of CMOS Magnetic Sensor devices with correction unit, ripple caused by amplifier circuit in low noise can be suppressed simultaneously to disturb, the faint output voltage signal of geomagnetic sensor can effectively be amplified, then cumulative type analog-to-digital converter is integrated by high accuracy, data signal is produced, sends MCU (micro-control unit) or DSP (digital signal processing unit) processing to.In addition, phase controlling is controlled with correction unit by digital register, it can be set simply by disposable fuse, realize the application of different accuracy rank.The clock phase and clock frequency of the present invention is all linearly related with random white noise, and cost substantially reduces.
Description
Technical field
The present invention relates to a kind of circuit structure, more particularly to CMOS magnetic field sensors and other low noise sensors reads electricity
Road field, belongs to microelectronic.
Background technology
The existing geomagnetic sensor device overwhelming majority uses non-standard cmos device, such as GMR (giant magnetoresistance) device
With the device based on MEMS (micromachining technology), therefore the cost of these sensors is by the non-standard technique system of integrated circuit
The influence with package quality is made, and sensor and post processing IC manufacturing are incompatible, also have impact on whole earth magnetism sensing
The performance of device, so in order to realize high performance geomagnetic sensor, cause system cost very high.
Geomagnetic sensor based on standard CMOS process is overcome nonstandard earth magnetism device disadvantage and reduction system cost one
The very effective solution of kind, the geomagnetic sensor of the Hallistor based on CMOS technology, is the basis in the present invention
Device.But Hallistor standard CMOS process manufacture in, by different silicon substrate crystalline phase stress and the shadow of temperature change
Ring, produce very big random offset voltage, reduce precision of the magnetic field to voltage conversion, and field effect transistor in CMOS technology
For pipe in production due to the deviation of ion machine implantation concentration, the intrinsic offset voltage of device is also very big, therefore directly magneto-resistor
Part is connected with common CMOS reading circuits, is the function that can not effectively realize geomagnetic sensor system.Many research works at present
Work is solving the problems, such as this respect, it is proposed that many correcting circuits, such as the electric current method of average, the device method of average etc..These methods
The offset voltage of Magnetic Sensor can effectively be suppressed, but sensor readout circuit is due to the offset voltage of field-effect transistor
Etc. the influence of factor, also determine the precision of entirely magnetic sensor system, thus be also required to correcting circuit disinthibite reading electricity
The offset voltage on road, the method generally used at present are all that copped wave or Correlated Double Sampling go to eliminate the offset voltage of circuit
With circuit intrinsic noise.Because the bearing calibration of Magnetic Sensor and reading circuit is unrelated, and solves the thinking of problem not
Equally, therefore realize between these errors and the code of correction there is no uniformity, cause the system of realization extremely complex.Usually
Realize that different accuracy requirements can only distinguish flow manufacture.One kind that the present invention develops can correct code simultaneously with identical
The analog front circuit of the correction of sensor and reading circuit is realized, manufacturing cost can be effectively reduced and simplified system is set
Meter.
The content of the invention
The purpose of the present invention is the analog front circuit that a kind of CMOS magnetic field sensors of design can configure precision, therein
CMOS geomagnetic sensors and reading circuit share same correcting circuit.The present invention can reduce product system design and into
This.The present invention device of the integrated circuit based on standard CMOS manufacturing process, therefore its cost and reliability be have very much it is competing
Strive power.
Fig. 1 is whole analog front circuit structure proposed by the present invention.101 be the geomagnetic sensor of standard CMOS process,
102 be the low-noise amplifier of Ripple Suppression, and 103 be increment accumulation type ADC, and 104 are clock phase control and correct unit,
105 be temperature compensation unit.101 according to the location of device, and the magnetic field signal of locality is converted into faint voltage signal,
Then 103 amplitudes that can be recognized are amplified to by 102 signals, then 103 are converted into data signal.At the same time, 105
The temperature information of device at that time sends 104, the 104 clock correction frequencies for generating temperature-compensating to and phase is disinthibited 101
With 102 offset voltage.Circuit structure proposed by the present invention is sensed by inserting different phases in dominant frequency clock to adjust magnetic
The precision of device.
The output voltage of magnetoresistive transducer can pass through fourier progression expanding method：
V=a0+a1cosφ+a2cos2φ+a3cos3φ+b1sinφ+b2sin2φ+b3sin3φ+...
In order to obtain akAnd bk, can be by dominant frequency clock n phase of interpolation, and n phase depends on the essence of Magnetic Sensor
Degree demand, in addition the phase accuracy of clock by phase occur circuit precision limited, include the operating temperature of circuit, clock
Shake and the phase noise of circuit.Fig. 2 is whole clock generator and clock phase control unit circuit, and it is low to include 106
Phase noise clock generator, 105 be temperature-compensation circuit unit, and 107 be arbitrary integer frequency divider, and 108 be clock interpolation phase
Position circuit, 109 be clock duty cycle regulation circuit.
Ripple Suppression loop in chopper amplifier and piece is also used in invention, to eliminate the noise and device of amplifier in itself
Part is lacked of proper care.Chopper amplifier is that noise and offset voltage are moved on chopping frequency by frequency modulation(PFM), although whole electricity
The noise on road greatly reduces, but the offset voltage ripple of remaining still has a great impact to whole amplifier circuit.It is special
Not when the gain of amplifier is very big, the offset voltage amplification of remaining can be also exported to 103, therefore reduce whole biography
The precision of sensor reading circuit.In general method is to increase filter capacitor outside piece, but can so increase the output pin of chip
With the peripheral component of chip.As shown in figure 3,109 be ripple suppression circuit in piece.The present invention uses in low-noise amplifier
109, this can more effectively reduce chip cost.109 are in negative feedback loop in whole amplifier, and the backfeed loop
The amplitude size of ripple can be effectively adjusted, while by the bandwidth of 104 output frequencies control 109, so that chopper amplification
Device circuit uses identical 104 with Magnetic Sensor.
It can be seen that as long as the frequency and phase of whole analog front circuit regulation clock proposed by the present invention, can be with non-
The often output accuracy of the output accuracy of convenient control Magnetic Sensor and low-noise amplifier, and different essences can be selected
Degree goes to configure the input dynamic range and sample rate of the cumulative type analog-to-digital converter of performance suitably integration, reaches optimal solution
Scheme.
Brief description of the drawings
Fig. 1, the analog front circuit of geomagnetic sensor
Fig. 2, the circuit composition of magnetic resistance correction
Fig. 3, ripple suppression circuit on piece
Embodiment
An exemplary embodiment of the present invention is elaborated below with reference to accompanying drawings.As shown in figure 1,104 productions
The master clock of whole AFE(analog front end) is given birth to, Fig. 2 is that 104 function realizes block diagram, and the frequency division value of arbitrary integer frequency divider 107 passes through
Register is set, and is obtained the chopper clock frequency and Magnetic Sensor correction frequency and phase needed for system, is then output to 108
16 even more phases, then by 109 are produced, are sent to 101 and 102 offset voltages for disinthibiting magnetic device and amplifying circuit
And noise.Copped wave suppression loop in piece is employed herein, as shown in Figure 3, suppression loop is by SCF group
Into therefore the bandwidth of whole wave filter is by clock frequency control caused by 104 so that the output ripple amplitude of amplifier is also
It is linear with clock frequency.When we obtain the correction accuracy magnetic corresponding with frequency according to the clock frequency configured
Electric potential signal, then by same correction accuracy 102 amplified signals corresponding with frequency, then by 103 it is converted into digital letter
Number, finally give system and carry out Digital Signal Processing, calculate corresponding Geomagnetism Information.The reading accuracy of whole system completely by
To the control of the clock frequency and phase of register setting.
As described above, without departing from the spirit and scope of the invention, can also form many has very big difference
Embodiment.It should be appreciated that except as defined by the appended claims, the invention is not restricted to described specific in the description
Example.
Claims (2)
1. the analog front circuit structure that a kind of clock frequency and phase can configure, it is characterised in that the circuit structure includes one
Individual CMOS Magnetic Sensors, the low-noise amplifier of Ripple Suppression loop, the cumulative type analog-to-digital converter of an integration, one when
Clock phase controlling and correction unit and a temperature-compensation circuit；Described CMOS Magnetic Sensors output is connected to low noise amplification
The input of device, the then output of low-noise amplifier are connected to the cumulative type ADC of integration input, and clock phase control and correction are single
The output of member is connected respectively to CMOS Magnetic Sensors, and low-noise amplifier and the cumulative type ADC of integration, the output of temperature sensor connect
Clock phase control and correction unit are connected to, the wherein structure goes to control CMOS Magnetic Sensors and low using clock frequency and phase
The imbalance of noise amplifier and noise size；The clock frequency of Magnetic Sensor correcting circuit and the clock frequency of ripple suppression circuit
It is integral multiple relation.
2. the analog front circuit of a kind of configurable precision for CMOS Magnetic Sensors, it is characterised in that including following function electricity
Road and process：
Magnetic Sensor is to be based on standard CMOS process；
Ripple suppression circuit is that on-chip circuit is realized, independent of chip exterior passive device；
Switched capacitor technique of the ripple suppression circuit based on clock circuit, clock frequency and the ripple of Magnetic Sensor correcting circuit press down
The clock frequency of circuit processed is integral multiple relation；
Whole clock phase control and the realization of correcting circuit include clock circuit, temperature-compensation circuit, frequency dividing circuit, phase
Interpolating circuit and duty-cycle correction circuit, go to control CMOS Magnetic Sensors and low-noise amplifier using clock frequency and phase
Imbalance and noise size；
Increment accumulation type ADC resolution ratio is associated with clock phase number, is programmable configuration.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310051364.8A CN103997341B (en) | 2013-02-16 | 2013-02-16 | A kind of high-precision adc and its analog front circuit applied to magnetic survey |
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| CN201310051364.8A CN103997341B (en) | 2013-02-16 | 2013-02-16 | A kind of high-precision adc and its analog front circuit applied to magnetic survey |
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| CN103997341A CN103997341A (en) | 2014-08-20 |
| CN103997341B true CN103997341B (en) | 2017-12-19 |
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| CN108627190B (en) * | 2017-07-28 | 2023-12-19 | 杭州思泰微电子有限公司 | High-precision magnetic sensor correction structure and correction method based on integrated circuit |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1695066A (en) * | 2002-11-29 | 2005-11-09 | 雅马哈株式会社 | Magnetic sensor and temperature dependency characteristic compensation method for the same |
| CN1879006A (en) * | 2004-10-07 | 2006-12-13 | 雅马哈株式会社 | Geomagnetic sensor and geomagnetic sensor correction method, temperature sensor and temperature sensor correction method, geomagnetism detection device |
| CN101082506A (en) * | 2006-06-02 | 2007-12-05 | 株式会社电装 | Semiconductor device, magnetic sensor and physical quantity sensor |
| CN101576610A (en) * | 2009-05-27 | 2009-11-11 | 秦轲 | Device and method for improving data sampling precision in oscillograph |
| CN102683377A (en) * | 2012-06-15 | 2012-09-19 | 湖南追日光电科技有限公司 | Double-drain type CMOS magnetic field induction transistor and fabricating method thereof |
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- 2013-02-16 CN CN201310051364.8A patent/CN103997341B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1695066A (en) * | 2002-11-29 | 2005-11-09 | 雅马哈株式会社 | Magnetic sensor and temperature dependency characteristic compensation method for the same |
| CN1879006A (en) * | 2004-10-07 | 2006-12-13 | 雅马哈株式会社 | Geomagnetic sensor and geomagnetic sensor correction method, temperature sensor and temperature sensor correction method, geomagnetism detection device |
| CN101082506A (en) * | 2006-06-02 | 2007-12-05 | 株式会社电装 | Semiconductor device, magnetic sensor and physical quantity sensor |
| CN101576610A (en) * | 2009-05-27 | 2009-11-11 | 秦轲 | Device and method for improving data sampling precision in oscillograph |
| CN102683377A (en) * | 2012-06-15 | 2012-09-19 | 湖南追日光电科技有限公司 | Double-drain type CMOS magnetic field induction transistor and fabricating method thereof |
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