CN103996967B - The device of beam quality is improved for high power solid state laser - Google Patents
The device of beam quality is improved for high power solid state laser Download PDFInfo
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- CN103996967B CN103996967B CN201410256946.4A CN201410256946A CN103996967B CN 103996967 B CN103996967 B CN 103996967B CN 201410256946 A CN201410256946 A CN 201410256946A CN 103996967 B CN103996967 B CN 103996967B
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Abstract
A kind of device that beam quality is improved for high power solid state laser, including:One laser, the laser output spectrum have certain width, non-single-frequency laser;Multiple wave filters, each wave filter select different wave length λ 1 respectively, λ 2 ... λ N, and the number of wave filter is N number of, 1≤N≤50, and the plurality of wave filter is sequentially in the light path of the laser, and the light path of the plurality of wave filter and laser is into a predetermined angle;One convertible lens, it is located in the light path of multiple wave filters refraction;The convertible lens has focusing function, is condenser lens or focusing concave mirror;One diffraction grating, it is located in the light path of convertible lens transmission or reflection, and the light path of the diffraction grating and convertible lens transmission or reflection is into a predetermined angle;One output coupling mirror, it is located in the light path of diffraction grating reflection.It is characteristic of the invention that varying without the structure of former laser, only increase an exocoel in outside and be used for improving beam quality.
Description
Technical field
The present invention relates to laser and laser technology, and in particular to one kind is applied to high power solid state laser and improves light beam
The device of quality.
Background technology
Superpower laser is widely used in the industry manufacture fields such as cutting, welding, drilling, reinforcing, for example automobile adds
Industrial and commercial bank's industry, aviation precision manufactureing industry and ship shape extrusion industry.Realize the Laser Processing of high quality, wide scope, laser
Device must simultaneously meet high power and high light beam quality.At present, countries in the world will research and development novel high-power, high beam matter
The high power laser of amount is as an important research direction, to meet to require the Materialbearbeitung mit Laserlicht of higher laser power density
The demand of application.Beam quality embody laser beam transmit and focusing power, determine the quality of Laser Processing, but Gao Gong
The beam quality of rate laser is often not fully up to expectations.
The content of the invention
It is an object of the invention to provide the device that a kind of base is used for high power solid state laser raising beam quality, the present invention
The characteristics of be the structure for varying without former laser, only increase exocoel in outside and be used for improving beam quality.
The present invention provides a kind of device that beam quality is improved for high power solid state laser, including:
One laser, the laser output spectrum have certain width, non-single-frequency laser;
Multiple wave filters, each wave filter select different wave length λ 1 respectively, λ 2 ... λ N, the number of wave filter be it is N number of, 1
≤ N≤50, for the plurality of wave filter sequentially in the light path of the laser, the light path of the plurality of wave filter and laser is pre- into one
Clamp angle;
One convertible lens, it is located in the light path of multiple wave filters refraction;The convertible lens has focusing function, is poly-
Focus lens or focusing concave mirror;
One diffraction grating, it is located in the light path of convertible lens transmission or reflection, and the diffraction grating transmits with convertible lens
Or the light path of reflection is into a predetermined angle;
One output coupling mirror, it is located in the light path of diffraction grating reflection.
The invention has the advantages that varying without the structure of former laser, only increase an exocoel in outside and be used for carrying
High light beam quality.
Brief description of the drawings
To further illustrate the particular technique content of the present invention, with reference to embodiments and accompanying drawing is described in detail as after, its
In:
Fig. 1 is a kind of schematic diagram for the device that beam quality is improved suitable for superpower laser in the present invention.
Embodiment
Refer to shown in Fig. 1, the present invention provides a kind of device that beam quality is improved for high power solid state laser, bag
Include:
One laser 1, the laser 1 are solid state laser, and laser output spectrum has certain width, non-single-frequency
Laser.
Multiple wave filters 2, each wave filter select different wave length λ 1, λ 2 ... λ N respectively.The number of wave filter 2 is N number of, and 1
≤ N≤50, the plurality of wave filter 2 sequentially in the light path of the laser 1, the light path of the plurality of wave filter 2 and laser 1 into
One predetermined angle, the plurality of wave filter 2 and the angle of the light path of laser 1 are 10-80 degree;
One convertible lens 3, it is located in the light path of multiple wave filters 2 refraction, and the convertible lens 3 has focusing function,
For condenser lens or focusing concave mirror;
Convertible lens 3 has the function that convergence light, and the beamlet that the beamlet of diverse location is become to different angle enters
It is mapped on grating.Convertible lens includes transmission-type and reflective
One diffraction grating 4, it is located at convertible lens 3 and transmitted in the light path of (or reflection), the diffraction grating 4 and convertible lens
The light path of 3 transmissions (or reflection) is into a predetermined angle;
Diffraction grating 4 is by the beamlet of different wave length, different incidence angles using its first order diffraction with the identical angle of emergence
Diffraction, so that the synthesis light beam of output coupling mirror output keeps overlapping near field and far field.Diffraction grating includes body grating, dodged
Credit grating.
The diffraction grating 4 is body grating or balzed grating, and the first-order diffraction efficiency of the diffraction grating 4 is 20%-99%
The angle for the light path that the diffraction grating 4 transmits with convertible lens 3 is 0-90 degree;
One output coupling mirror 5, it is located in the light path of the reflection of diffraction grating 4, and the reflectivity of the output coupling mirror 5 is
0.1%-99.99%.
The effect of output coupling mirror 5 is to form exterior resonant cavity, and the coupling mirror reflects a part of power to grating, through grating
Laser is returned to after secondary reflection.
Laser sends beam of laser, includes multiple wavelength.Laser beam is divided into N parts by N number of wave filter, passes through convertible lens
Focus on diffraction grating, diffraction grating emits N parts laser with approximately parallel light beam along the direction of first-order diffraction, enters
It is mapped on output coupling mirror.The output coupling mirror reflects a part of power to grating, is returned to after the secondary reflection of grating each
The wave filter of individual beamlet, then the outgoing mirror to laser itself, form a complete resonator.The resonance of each beamlet
Chamber will lock a wavelength.Finally laser of the output with higher beam quality.
Particular embodiments described above, the purpose of the present invention, technical scheme and beneficial effect are carried out further in detail
Describe in detail bright, it should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., the protection of the present invention should be included in
Within the scope of.
Claims (7)
1. a kind of device that beam quality is improved for high power solid state laser, including:
One laser, the laser output spectrum have certain width, non-single-frequency laser;
N number of wave filter, each wave filter select different wave length λ 1 respectively, and λ 2 ... λ N, 1≤N≤50, N number of wave filter is sequentially
In the light path of the laser, the light path of the N number of wave filter and laser is into a predetermined angle;
One convertible lens, it is located in the light path of N number of wave filter refraction;The convertible lens has focusing function, saturating to focus on
Mirror or focusing concave mirror;
One diffraction grating, it is located in the light path of convertible lens transmission or reflection, the diffraction grating and convertible lens transmission or anti-
The light path penetrated is into a predetermined angle;
One output coupling mirror, it is located in the light path of diffraction grating reflection;
Laser sends beam of laser, and comprising multiple wavelength, laser beam is divided into N parts by N number of wave filter, is focused on by convertible lens
Onto diffraction grating, diffraction grating emits N parts laser with parallel light beam along the direction of first-order diffraction, incides output
On coupling mirror, the output coupling mirror reflects a part of power to grating, and each beamlet is returned to after the secondary reflection of grating
Wave filter, then the outgoing mirror to laser itself forms a complete resonator, and the resonator of each beamlet will be locked
A fixed wavelength, finally output have the laser of higher beam quality.
2. the device according to claim 1 that beam quality is improved for high power solid state laser, wherein N number of wave filter
Angle with laser light path is 10-80 degree.
3. the device according to claim 1 that beam quality is improved for high power solid state laser, wherein the conversion
Lens are transmission-type or reflective lens.
4. the device according to claim 1 that beam quality is improved for high power solid state laser, wherein diffraction grating
For body grating or balzed grating,.
5. the device according to claim 4 that beam quality is improved for high power solid state laser, wherein diffraction grating
First-order diffraction efficiency be 20%-99%.
6. the device according to claim 1 that beam quality is improved for high power solid state laser, wherein diffraction grating
The angle theta of light path with convertible lens transmission is:0 degree of ﹤ θ≤90 degree.
7. the device according to claim 1 that beam quality is improved for high power solid state laser, wherein output coupling
The reflectivity of mirror is 0.1%-99.99%.
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Citations (2)
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US6327292B1 (en) * | 1998-09-08 | 2001-12-04 | Massachusetts Institute Of Technology | External cavity laser source using spectral beam combining in two dimensions |
CN102931585A (en) * | 2012-10-31 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | External-cavity-beam-combination semiconductor laser fiber coupling module |
Family Cites Families (2)
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WO2003036766A2 (en) * | 2001-10-23 | 2003-05-01 | Torsana Laser Technologies A/S | Laser apparatus |
JP4984537B2 (en) * | 2006-01-16 | 2012-07-25 | 横河電機株式会社 | External resonator type tunable light source |
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2014
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6327292B1 (en) * | 1998-09-08 | 2001-12-04 | Massachusetts Institute Of Technology | External cavity laser source using spectral beam combining in two dimensions |
CN102931585A (en) * | 2012-10-31 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | External-cavity-beam-combination semiconductor laser fiber coupling module |
Non-Patent Citations (2)
Title |
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970nm百瓦级半导体激光外腔反馈光谱合束光源;张俊等;《光学学报》;20131130;第33卷(第11期);1114001(1)-1114001(7) * |
Spectral beam combining of a broad-stripe diode laser array in an external cavity;V. Daneu et al.;《Optics Letters》;20000315;第25卷(第6期);405-406页,附图1 * |
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