CN103993260A - Combined mask - Google Patents
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- CN103993260A CN103993260A CN201310054271.0A CN201310054271A CN103993260A CN 103993260 A CN103993260 A CN 103993260A CN 201310054271 A CN201310054271 A CN 201310054271A CN 103993260 A CN103993260 A CN 103993260A
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- frame plate
- main frame
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Abstract
The invention relates to a combined mask. The combined mask comprises four main frame plates that are vertically and horizontally overlapped to form a rectangular frame internally provided with a main rectangular coating area, and ones sides of the main frame plates can form a flush coated object contact surface. Thereby, the mask with a large-area coating area can be formed. In addition, and the characteristics of easy manufacturing and no material waste of the strip-shaped main frame plates are utilized to reach the efficacy of saving manufacturing materials and reducing the cost. Also, the coated object contact surface of the combined mask is flush, can be attached to the coated object surface as far as possible. In a coating deposition process, the coating material for evaporation or sputtering can be effectively prevented from passing through the gap between the combined mask and the coated object, thus avoiding the circumstance of coating pattern distortion.
Description
Technical field
The present invention is about a kind of shade, espespecially a kind of being applied to as the built-up type shade of the coated film deposition technology field such as sputter or evaporation.
Background technology
In coated film deposition technique, for making deposition material accurately be deposited on the plated film of the predetermined position formation specified shape of base material, between sources of deposition and base material, can install shade, while making deposition material Atom or molecular dissociation so as to clashing into via thermal evaporation or high energy ion in sources of deposition, utilize hole, plated film position set on shade, make a part for the deposition material Atom that dissociates or molecule by the hole, plated film position in shade, and be deposited on the plated film that substrate surface predetermined position forms specified shape, remaining deposition material atom or molecule are because covering of shade is blocked, so, reach and control the plated film position of base material deposited and the object of shape.
Now if the electronic products such as display panels are towards large size future development, based on large scale liquid crystal display panel in the demand of coated film deposition technique, the shade that coated film deposition technique is used is relative its size of increasing also, the structure of formula but at present general conventional shade is all one of the forming, also shade is when manufacturing, need to cut out the shade of predetermined shape in a large-area base material, therefore, the manufacture of this integrate shaped type shade has the problem of waste material.Moreover the manufacturing of the one-body molded shade of large size is difficulty very, except material is difficult for obtaining problem, the production unit of all uses all needs the amplification of equal proportion, causes that equipment investment cost is very big, production cost is high.
Summary of the invention
Object of the present invention, is in order to solve existing integrally formed formula shade manufacture waste material, to manufacture difficulty and high in cost of production problem, and a kind of built-up type shade is provided.
The object of the invention described above is to be realized by following technical scheme:
A built-up type shade, is characterized in that, comprises four main frame plate, and these four main frame plate overlap in length and breadth and form the rectangular frame that has main rectangle plated film district in.
One side of described four main frame plate of built-up type shade as above forms concordant plated body contact surface.
Described four main frame plate of built-up type shade as above form respectively the overlap joint groove of corresponding main frame plate width in the overlapping part of its adjacent end, utilize the corresponding overlap joint combination of overlap joint groove each other between every two main frame plate.
In described four main frame plate of built-up type shade as above, part main frame plate is the first main frame plate, all the other main frame plate are the second main frame plate, wherein the second main frame plate thickness is greater than the first main frame plate thickness, described the second main frame plate forms the overlap joint groove corresponding to the first main frame plate width and thickness in the overlapping part of its adjacent end, and the second main frame plate is overlapped in the first main frame plate and combines with the first main frame plate with its overlap joint groove.
Built-up type shade as above, also comprise frame plate at least one times, described time frame plate is set up in the rectangle framework of these four main frame plate overlap joint compositions, the main rectangle plated film zoning that main frame plate corral is become is divided into a plurality of inferior rectangle plated film districts that are arranged, and a side of described frame plate is concordant with the described plated body contact surface forming after described main frame plate combination.
In a kind of embodiment that comprises time frame plate in the present invention, described frame plate of described built-up type shade is a plurality of, and the plurality of frame plate is arranged in parallel and is erected in the rectangular frame of described four main frame plate overlap joint composition.
Built-up type shade as above, described main frame plate forms respectively the overlap joint groove of corresponding main frame plate width in the overlapping part of its adjacent end, utilize the corresponding overlap joint combination of overlap joint groove each other between every two main frame plate.
Built-up type shade as above, in described four main frame plate, part main frame plate is the first main frame plate, all the other main frame plate are the second main frame plate, and at least there are two second main frame plate of relatively arranging, the second main frame plate thickness is greater than the first main frame plate thickness, and described the second main frame plate forms the overlap joint groove corresponding to the first main frame plate width and thickness in the overlapping part of its adjacent end, and the second main frame plate is overlapped in the first main frame plate and combines with the first main frame plate with its overlap joint groove.
Built-up type shade as above, in overlapping part between described main frame plate and time frame plate, in main frame plate, form the overlap joint groove corresponding to inferior frame plate width, described frame plate two ends adjacent end forms the overlap joint groove of corresponding main frame plate width, between main frame plate and time frame plate, by corresponding overlap joint groove contraposition overlap joint, combines.
Built-up type shade as above, described time frame plate is the frame plate that thickness does not wait with the main frame plate overlapping, in described frame plate and main frame plate, the frame plate that thickness is larger forms the overlap joint groove corresponding to the less frame plate width of thickness and thickness, and the frame plate that thickness is larger is erected on the frame plate that thickness is less with its overlap joint groove.
In the another kind of embodiment that comprises time frame plate in the present invention, described frame plate of described built-up type shade is a plurality of, and the plurality of time frame plate is arranged in the rectangular frame that is erected on described four main frame plate overlap joint composition in length and breadth.
Built-up type shade as above, described four main frame plate form respectively the overlap joint groove of corresponding main frame plate width in the overlapping part of its adjacent end, make to utilize the corresponding overlap joint of overlap joint groove each other to combine between every two main frame plate.
Built-up type shade as above, in described four main frame plate, part main frame plate is the first main frame plate, all the other main frame plate are the second main frame plate, the second main frame plate thickness is greater than the first main frame plate thickness, described the second main frame plate forms the overlap joint groove corresponding to the first main frame plate width and thickness in the overlapping part of its adjacent end, and the second main frame plate is overlapped in the first main frame plate and combines with the first main frame plate with its overlap joint groove.
Built-up type shade as above, forms the overlap joint groove corresponding to inferior frame plate width in described main frame plate, described frame plate two ends adjacent end forms the overlap joint groove of corresponding main frame plate width, between main frame plate and time frame plate, by corresponding overlap joint groove contraposition overlap joint, combines; In described frame plate, form the overlap joint groove of corresponding time frame plate width, between inferior frame plate and time frame plate, by corresponding overlap joint groove contraposition, overlap combination.
Built-up type shade as above, described time frame plate is the frame plate that thickness does not wait with the main frame plate overlapping, in described frame plate and main frame plate, the frame plate that thickness is larger forms the overlap joint groove corresponding to the less frame plate width of thickness and thickness, and the frame plate that thickness is larger is erected on the frame plate that thickness is less with its overlap joint groove; In described frame plate, form the overlap joint groove of corresponding time frame plate width, between inferior frame plate and time frame plate, by corresponding overlap joint groove contraposition, overlap combination.
Built-up type shade as above, described time frame plate is the frame plate that thickness does not wait with the main frame plate overlapping, in described frame plate and main frame plate, the frame plate that thickness is larger forms the overlap joint groove corresponding to the less frame plate width of thickness and thickness, and the frame plate that thickness is larger is erected on the frame plate that thickness is less with its overlap joint groove; Not etc., the larger inferior frame plate formation of thickness is not corresponding to the less inferior frame plate width of thickness and the overlap joint groove of thickness for inferior frame plate thickness of described overlap joint mutually, and the inferior frame plate that thickness is larger overlaps groove with it and is erected on the inferior frame plate that thickness is less.
By above technical scheme, attainable beneficial effect is:
First, utilize the main frame plate of strip to overlap in length and breadth this built-up type shade of formation, its decapacitation is formed outside large-area shade, also the effect that can utilize strip main frame plate to be easy to make, solve the problem of the manufacture waste material of existing integrate shaped type shade, and utilize and use built-up type mode to produce shade, can significantly reduce processing unit and the starting materials dimensional requirement of shade, make built-up type shade of the present invention there is the effect significantly reducing costs.
Moreover, built-up type shade of the present invention more can further borrow its main frame plate one side to form concordant plated body contact surface, make this built-up type shade plated body contact surface can fit in as far as possible plated body surface, in coated film deposition technique, the Coating Materials that can effectively prevent evaporation or sputter passes the gap between this built-up type shade and plated body, avoids causing the situation of plated film pattern distortion.
In addition, each forms overlap joint groove to utilize described main frame plate two ends, make the overlap joint groove of a main frame plate down, the overlap joint groove of another main frame plate is overlap joint combination relatively upward, or, when the main frame plate thickness of overlap joint does not wait mutually, also can make in the second main frame plate and form and overlap groove, in the first main frame plate, do not establish overlap joint groove, the second main frame plate is overlapped in the first main frame plate with overlap joint groove, makes these main frame plate when combination, have easy and easy effect; In aforementioned, utilize the first main frame plate not establish overlap joint groove, with the second main frame plate, establish overlap joint groove and be connected in the composite construction in the first main frame plate, still can further utilize the first main frame plate not establish overlap joint groove and can bear larger tensile stress, and then improving the bulk strength of this built-up type shade; On the other hand, still can select the made main frame plate of low-expansion material, make to be difficult for because the temperature change of implementation environment produces the function of distortion after its combination, guarantee the quality of shade.
On the other hand, make this built-up type shade also include frame plate at least one times, inferior frame plate can be set up in the rectangle framework of these four main frame plate overlap joint compositions, the main rectangle plated film zoning that main frame plate corral is become is divided into a plurality of inferior rectangle plated film districts that are arranged, makes it also can be applied to a plurality of small area plated films district and carries out the purposes of coated film deposition technique simultaneously.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view of the first preferred embodiment of built-up type shade of the present invention.
Fig. 2 is the perspective exploded view of the shade of built-up type shown in Fig. 1 the first preferred embodiment.
Fig. 3 is the perspective exploded view of the second preferred embodiment of built-up type shade of the present invention.
Fig. 4 is the schematic perspective view after the second preferred embodiment combination of the shade of built-up type shown in Fig. 3.
Fig. 5 is the schematic perspective view of built-up type shade the 3rd preferred embodiment of the present invention.
Fig. 6 is the schematic perspective view of built-up type shade the 4th preferred embodiment of the present invention.
Fig. 7 is the perspective exploded view of built-up type shade the first preferred embodiment of the present invention and shade framework.
Fig. 8 is that the schematic perspective view in shade framework is fixed in the preferred embodiment of the shade of built-up type shown in Fig. 7.
Fig. 9 is that the preferred embodiment of the shade of built-up type shown in Fig. 1 is fixed in shade framework, provides plated body to stretch into diagrammatic cross-section wherein.
Figure 10 is the perspective exploded view of the second preferred embodiment of the shade of built-up type shown in Fig. 4 and shade framework.
Figure 11 is that the preferred embodiment of the shade of built-up type shown in Figure 10 is fixed in shade framework, and the diagrammatic cross-section of the plated body contact surface that plated body from top to bottom contacts built-up type shade is provided.
Main element label declaration:
1 built-up type shade
10 main frame plate 101 overlap joint grooves
102 contrapositions, the 103 main rectangle plated film districts of boring a hole
11 frame plate 111 overlap joint grooves
112 113 rectangle plated film districts of contraposition perforation
2 shade framework 20 alignment marks
21 caulking grooves
3 plated bodies
Embodiment
For making goal of the invention of the present invention, technique means and technique effect have more complete and clearly disclose, be below elaborated, and see also accompanying drawing and parts label.
As shown in Figure 1, it is the first preferred embodiment that discloses built-up type shade of the present invention, described built-up type shade 1 is to comprise four main frame plate 10, these four main frame plate 10 are to be in length and breadth overlap joint and corral becomes the rectangular frame that has main rectangle plated film district 103 in, and make a side of these main frame plate 10 after combination form concordant plated body contact surface.
Described main frame plate 10 be select low-expansion material made become good, the Rhometal as nickeliferous 36% (Invar 36), Rhometal (Invar 42) of nickeliferous 42% etc.; Make after these main frame plate 10 overlap joint combinations, the envrionment temperature change being difficult for because implementing produces distortion, guarantees the stability of this built-up type shade 1 shape.Based on cost consideration or because Rhometal (Invar) sheet material is difficult for obtaining event, also can change and adopt the stainless material that the coefficient of expansion is higher.
As shown in Figures 1 and 2, in this preferred embodiment, described four main frame plate 10 can all be all the frame plate of thin type, and main frame plate 10 thickness of these thin types be take 0.05mm～0.20mm as good; Or, as shown in Figures 3 and 4, in these main frame plate 10, also can main frame plate 10 partly be the frame plate of thin type (being the first above-mentioned main frame plate), remaining main frame plate 10 is greater than the frame plate (being the second above-mentioned main frame plate) of thick shape of main frame plate 10 thickness of described thin type for thickness, thickness by part main frame plate 10 increases, and can improve the bulk strength of this built-up type shade 1.
As Fig. 2, shown in Fig. 3, in the lapped configuration that described main frame plate 10 and main frame plate are 10, the thickness of described four main frame plate 10 can be and not equate or not etc., for example: these main frame plate 10 are all the frame plate of thin type or are all the frame plate of thick shape, or, the frame plate that one main frame plate 10 is thin type, the frame plate that another main frame plate 10 is thick shape, described four main frame plate 10 form the overlap joint groove 101 corresponding to main frame plate 10 width in place, contiguous two ends, the overlap joint groove 101 at described main frame plate 10 two ends can be arranged at main frame plate 10 same sides or lay respectively at relative two sides, in this preferred embodiment, the overlap joint groove 101 at described main frame plate 10 two ends is to be arranged at main frame plate 10 same sides, whereby, 10 utilizations of every two main frame plate corresponding overlap joint of overlap joint groove 101 each other combines and locates.
When part main frame plate 10 frame plate that is thin type, during frame plate that all the other main frame plate 10 are thick shape, in the overlap joint composite construction of the main frame plate 10 of thin type and the main frame plate 10 of thick shape, also can make the main frame plate 10 of thin type not establish overlap joint groove (not shown), the main frame plate 10 of thick shape arranges corresponding to main frame plate 10 width of thin type and the overlap joint groove 101 of thickness, so, the main frame plate 10 of thick shape can be overlapped in the main frame plate 10 that groove 101 is directly erected on thin type with it, and the overlap joint that completes 10 of main frame plate combines, and make after the main frame plate 10 of thin type and the 10 overlap joint combinations of the main frame plate of thick shape, make one side form concordant plated body contact surface, and this thin type main frame plate 10 is not established overlap joint groove, with the main frame plate 10 of thick shape, arrange in the composite construction in the main frame plate 10 that overlap joint groove 101 is overlapped in thin type, more can further utilize the main frame plate 10 of thin type not establish overlap joint groove and can bear larger tensile stress, improve the bulk strength of this built-up type shade 1.
In preferred embodiment as shown in Figures 1 and 2, described main frame plate 10 thickness are all while equating, the groove depth of described overlap joint groove 101 is 1/2nd of main frame plate 10 thickness, and described main frame plate 10 is overlapped after combination mutually, and these built-up type shade 1 one sides form concordant plated body contact surface; In preferred embodiment as shown in Figures 3 and 4, in these main frame plate 10, part main frame plate 10 is that thin type frame plate, all the other main frame plate 10 are during for thick shape frame plate, the groove depth that can see through overlap joint groove 101 changes, and described main frame plate 10 is overlapped after combination mutually, in these built-up type shade 1 one sides, form the state of concordant plated body contact surface.
As shown in Figure 1 or 2, described main frame plate 10 still can respectively form contraposition perforation 102 on the end with respect to overlap joint groove 101 outsides in its two ends, by described contraposition perforation 102, this built-up type shade 1 can be mounted in shade framework in contraposition.
As shown in Figure 5, to disclose the 3rd preferred embodiment of the present invention, described built-up type shade 1 also comprises frame plate 11 at least one times, described frame plate 11 is to be mounted in the rectangle framework of these four main frame plate, 10 overlap joint compositions, and then main rectangle plated film district 103 Further Divisions that main frame plate 10 corrals are become be a plurality of be arranged compared with the inferior rectangle plated film district 113 of small area, and make time frame plate 11 concordant with the plated body contact surface after main frame plate 10 combinations, accordingly, built-up type shade 1 of the present invention is except being applicable to the coated film deposition technique of large size specification object, also can be applicable to a plurality of small size rule plate plated film areas and carry out coated film deposition technique.
In this preferred embodiment, the material of described frame plate 11 and main frame plate 10 is good with being made for low-expansion material, as nickeliferous 36% Rhometal (Invar 36), nickeliferous 42% Rhometal (Invar 42) etc.; Based on cost consideration or because Rhometal (Invar) sheet material is difficult for obtaining event, also can change and adopt the stainless material that the coefficient of expansion is higher.
When described frame plate 11 is single, as shown in Figure 5, described frame plate 11 can not equate with the thickness of overlapped main frame plate 10 or not etc., for example: main frame plate 10 is all the frame plate of thin type with time frame plate 11 or is all the frame plate of thick shape, or, arbitrary in main frame plate 10 and time frame plate 11 is the frame plate of thin type, the frame plate of Yuing is the frame plate of thick shape, in the lapped configuration of described frame plate 11 and main frame plate 10, described frame plate 11 two ends adjacent end form the overlap joint groove 111 of corresponding main frame plate 10 width, in two corresponding main frame plate 10 in these four main frame plate 10, form respectively the overlap joint groove 101 corresponding to inferior frame plate 11 width, when described frame plate 11 equates with main frame plate 10 thickness of wanting corresponding overlap joint, can make described overlap joint groove 101, 111 the degree of depth is 1/2nd of its plate thickness, whereby, in these single frame plate 11 these two main frame plate 10 of overlap joint, by the corresponding overlap joint groove 101 of main frame plate 10 and time frame plate 11, 111 cooperatively interact and locate, and main frame plate 10 forms concordant plated body contact surface with time frame plate 11 1 sides, main rectangle plated film district 103 Further Divisions that main frame plate 10 corrals are become be 2 compared with the inferior rectangle plated film district 113 of small area.
If arbitrary in inferior frame plate 11 of overlap joint and main frame plate 10 is the thin type frame plate of thinner thickness mutually, when another is the thicker thick shape frame plate of thickness, still can make the inferior frame plate 11 of thin type or the main frame plate 10 of thin type not establish overlap joint groove, the main frame plate 10 of thick shape or the inferior frame plate 11 of thick shape arrange thin type time frame plate 11 or the width of thin type main frame plate 10 and the overlap joint groove of thickness 101 (111) corresponding to wish overlap joint in one side, the main frame plate 10 of thick shape or the inferior frame plate 11 of thick shape are erected in the inferior frame plate 11 of thin type or the main frame plate 10 of thin type with its overlap joint groove 101 (111), make main frame plate 10 form concordant plated body contact surface with time frame plate 11 1 sides.
When described frame plate 11 is while being a plurality of, described a plurality of frame plates 11 can be arranged in parallel and be erected on (not shown) in the rectangular frame that described main frame plate 10 forms, and make main frame plate 10 form concordant plated body contact surface with inferior frame plate 11 1 sides; Or as shown in Figure 6, the plurality of frame plate 11 also can utilize and overlap in length and breadth each other and be mounted in the rectangular frame that described main frame plate 10 forms, and makes main frame plate 10 form concordant plated body contact surface with inferior frame plate 11 1 sides.Take the preferred embodiment shown in Fig. 6 as example, it is to use two frame plates 11 to be cross-lap joint combination, and be overlapped in respectively the middle section position of these four main frame plate 10 with these two frame plate 11 two ends, and be four inferior rectangle plated film districts 113 that are arranged by the main rectangle plated film district Further Division of former main frame plate 10 corrals one-tenth.
In aforementioned, described frame plate 11 can not equate with the thickness of overlapped main frame plate 10 or not etc., for example: main frame plate 10 is all the frame plate of thin type with time frame plate 11 or is all the frame plate of thick shape, or, arbitrary in main frame plate 10 and time frame plate 11 is the frame plate of thin type, the frame plate of Yuing is the frame plate of thick shape, in the lapped configuration of described frame plate 11 and main frame plate 10, described frame plate 11 two ends adjacent end form the overlap joint groove 111 of corresponding main frame plate 10 width, in described four main frame plate 10, form the overlap joint groove 111 of corresponding time frame plate 11 width, whereby, these frame plate 11 is arranged in parallel, and described frame plate 11 located with corresponding overlap joint 101 pairs of bit patterns of groove in the overlap joint groove 111 at its two ends and main frame plate 10, make main frame plate 10 form concordant plated body contact surface with time frame plate 11 1 sides.
When frame plate that the inferior frame plate 11 of mutual overlap joint and main frame plate 10 are different thickness, also can make the inferior frame plate 11 (or main frame plate 10 of thin type) of thin type that overlap joint groove is not set, in upper the setting corresponding to inferior frame plate 11 (or main frame plate 10 of the thin type) width of thin type and the overlap joint groove 101 (111) of thickness of main frame plate 10 (or inferior frame plate 11 of thick shape) of thick shape, the main frame plate 10 (or inferior frame plate 11 of thick shape) of thick shape can be overlapped on the inferior frame plate 11 (or main frame plate 10 of thin type) of thin type, and make main frame plate 10 form concordant plated body contact surface with the side after the 11 overlap joint combinations of time frame plate.And these are not in main frame plate 10 and time frame plate 11 overlap joint composite constructions of equal thickness, can utilize the main frame plate 10 of thin type or inferior frame plate 11 do not establish overlap joint groove and can bear larger tensile stress, improve the bulk strength of this built-up type shade.
In aforementioned a plurality of frame plates 11, inferior frame plate 11 two ends are divided by outside aforementioned various overlapping modes and main frame plate 10 overlap joint combinations, mutually the thickness of inferior frame plate of overlap joint is equal or not etc., for example: inferior frame plate 11 is all the frame plate of thin type or is all the frame plate of thick shape, or, the frame plate that frame plate 11 is thin type, the frame plate that another frame plate is thick shape etc., in 11 mutual lapped configuration of the plurality of frame plate, can utilize overlap accordingly each other groove 111 overlap in length and breadth combination and location etc.; Or, when the inferior frame plate 11 of mutual overlap joint be thickness do not wait frame plate time, on the inferior frame plate 11 of thick shape, also can be arranged at corresponding to inferior frame plate 11 width of thin type and the overlap joint groove 111 of thickness, the inferior frame plate 11 of thin type is not established overlap joint groove, the inferior frame plate 11 of thick shape is overlapped on the inferior frame plate 11 of thin type, and the side after inferior frame plate 11 combinations that make to overlap mutually forms concordant plated body contact surface.And this inferior frame plate 11 of equal thickness mutually in overlap joint composite construction not can utilize inferior frame plate 11 of thin type not establish and overlaps groove and can bear larger tensile stress, improving the bulk strength of this built-up type shade.
In preferred embodiment as above, the thickness of described frame plate 11 is except main frame plate 10 thickness corresponding to thin type, inferior frame plate 11 thickness that are thin type be take 0.05mm～0.20mm as good, the needs that also can use according to built-up type shade 1, make the thickness of time frame plate 11 corresponding to the thickness of the main frame plate 10 of thick shape, maybe can make time frame plate 11 thickness be not equal to main frame plate 10 thickness etc., but not as limit.In the preferred embodiment shown in Fig. 6, the thickness of described frame plate 11 is corresponding to main frame plate 10 thickness of thin type, be located at overlap joint groove in main frame plate 10 101 and overlap joint groove 111 groove depths in time frame plate 11 be all main frame plate 10 or inferior frame plate 11 thickness 1/2nd, so, described main frame plate 10 overlaps after combination mutually with time frame plate 11, and these built-up type shade 1 one sides form concordant plated body contact surface; As shown in Figure 6, described frame plate 11 Shang Yuqi two ends can respectively form contraposition perforation 112 with respect to the end that overlaps groove 111 outsides.
Built-up type shade of the present invention is when reality is used, as shown in Figures 7 and 8, this built-up type shade 1 must be fixed in a shade framework 2, wherein that this built-up type shade 1 is positioned in this shade framework 2, and the built-up type shade 1 in shade framework 2 is applied with pulling force, and adjust predetermined contraposition perforation 102 alignment mark 20 contrapositions default with shade framework 2 end faces of these four main frame plate 10 ends, after each alignment mark 20 is aimed at respectively the contraposition perforation 102 in main frame plate 10, with welding means such as spot welding or laser welderings, each main frame plate 10 is fixed in shade framework 2 again, make built-up type shade 1 smooth in shade framework 2, by shade framework 2 these built-up type shades 1 of carrying, this built-up type shade 1 is installed in sputter or evaporated device, provide plated body to carry out the purposes of coated film deposition technique.
Built-up type shade of the present invention is applied in coated film deposition technique, as shown in Figure 8, this built-up type shade 1 is to be fixed on face-down in shade framework 2 with its plated body contact, and make built-up type shade 1 smooth in the upper surface of shade framework 2 with its concordant plated body contact surface, as shown in Figure 9, this built-up type shade 1 is fixed in coated film deposition equipment by shade framework 2, wherein the plated body contact surface of built-up type shade 1 be below, make again plated body 3 from bottom to top send into shade framework 2 inside with driving mechanism, wherein by the concordant form of plated body contact surface of main frame plate 10 (or main frame plate and the inferior frame plate) side in built-up type shade 1, the plated body contact surface of this built-up type shade 1 can be fitted with plated body 3 surfaces as far as possible, in coated film deposition technique, the Coating Materials that evaporation or sputter disengage is deposited on plated body 3 surfaces through the plated film district of this built-up type shade 1.
As shown in figure 10, this built-up type shade 1 is to be fixed on upward in shade framework 2 with its plated body contact surface, when the main frame plate 10 in this built-up type shade (or main frame plate and inferior frame plate) is the lapped configuration of not equal thickness, this shade framework 2 is by position forming caulking groove 21, with described caulking groove 21, provide the thickness that the main frame plate 10 (or inferior frame plate) of thick shape in built-up type shade 10 is protruded thin type main frame plate 10 to be partially submerged into wherein, make built-up type shade 1 with respect to bottom surface and the 2 upper surface laminatings of shade framework of plated body contact surface opposite side, as shown in figure 11, this built-up type shade 1 is fixed in coated film deposition equipment by shade framework 2, the plated body contact surface of this built-up type shade 1 is position up, utilize again driving mechanism to drive plated body 3 from top to bottom to move on built-up type shade 1, wherein by the concordant form of plated body contact surface of the main frame plate 10 in built-up type shade 1 (or main frame plate and secondly frame plate) side, make the plated body contact surface of this built-up type shade 1 plated body 3 surfaces of can fitting as far as possible, and built-up type shade 1 is smooth with shade framework 2 again, so, in coated film deposition technique, can prevent that the Coating Materials that evaporation or sputter disengage from passing the gap of this built-up type shade 1 and 3 of plated bodies or built-up type shade 1 and shade framework 2, avoid causing the situation of plated film pattern distortion.
Above for being only the schematic part embodiment of the present invention; not in order to limit the scope of the invention; any those skilled in the art, is not departing from equivalent variations and the modification of having done under the prerequisite of design of the present invention and principle, within all should being included in this patent protection domain.
Claims (16)
1. a built-up type shade, is characterized in that, comprises four main frame plate, and these four main frame plate overlap in length and breadth and form the rectangular frame that has main rectangle plated film district in.
2. built-up type shade according to claim 1, is characterized in that, a side of described four main frame plate forms concordant plated body contact surface.
3. built-up type shade according to claim 2, is characterized in that, described four main frame plate form respectively the overlap joint groove of corresponding main frame plate width in the overlapping part of its adjacent end, utilizes the corresponding overlap joint combination of overlap joint groove each other between every two main frame plate.
4. built-up type shade according to claim 2, it is characterized in that, in described four main frame plate, part main frame plate is the first main frame plate, all the other main frame plate are the second main frame plate, wherein the second main frame plate thickness is greater than the first main frame plate thickness, and described the second main frame plate forms the overlap joint groove corresponding to the first main frame plate width and thickness in the overlapping part of its adjacent end, and the second main frame plate is overlapped in the first main frame plate and combines with the first main frame plate with its overlap joint groove.
5. built-up type shade according to claim 2, it is characterized in that, described built-up type shade also comprises frame plate at least one times, described time frame plate is set up in the rectangle framework of these four main frame plate overlap joint compositions, the main rectangle plated film zoning that main frame plate corral is become is divided into a plurality of inferior rectangle plated film districts that are arranged, and a side of described frame plate is concordant with the described plated body contact surface forming after described main frame plate combination.
6. built-up type shade according to claim 5, is characterized in that, described time frame plate is a plurality of, and the plurality of frame plate is arranged in parallel and is erected in the rectangular frame of described four main frame plate overlap joint composition.
7. built-up type shade according to claim 6, is characterized in that, described main frame plate forms respectively the overlap joint groove of corresponding main frame plate width in the overlapping part of its adjacent end, utilizes the corresponding overlap joint combination of overlap joint groove each other between every two main frame plate.
8. built-up type shade according to claim 6, it is characterized in that, in described four main frame plate, part main frame plate is the first main frame plate, all the other main frame plate are the second main frame plate, and at least there are two second main frame plate of relatively arranging, the second main frame plate thickness is greater than the first main frame plate thickness, described the second main frame plate forms the overlap joint groove corresponding to the first main frame plate width and thickness in the overlapping part of its adjacent end, and the second main frame plate is overlapped in the first main frame plate and combines with the first main frame plate with its overlap joint groove.
9. according to the built-up type shade described in claim 7 or 8, it is characterized in that, in overlapping part between described main frame plate and time frame plate, in main frame plate, form the overlap joint groove corresponding to inferior frame plate width, described frame plate two ends adjacent end forms the overlap joint groove of corresponding main frame plate width, between main frame plate and time frame plate, by corresponding overlap joint groove contraposition overlap joint, combines.
10. according to the built-up type shade described in claim 7 or 8, it is characterized in that, described time frame plate is the frame plate that thickness does not wait with the main frame plate overlapping, in described frame plate and main frame plate, the frame plate that thickness is larger forms the overlap joint groove corresponding to the less frame plate width of thickness and thickness, and the frame plate that thickness is larger is erected on the frame plate that thickness is less with its overlap joint groove.
11. built-up type shades according to claim 5, is characterized in that, described time frame plate is a plurality of, and the plurality of time frame plate is arranged in the rectangular frame that is erected on described four main frame plate overlap joint composition in length and breadth.
12. built-up type shades according to claim 11, is characterized in that, described four main frame plate form respectively the overlap joint groove of corresponding main frame plate width in the overlapping part of its adjacent end, make to utilize the corresponding overlap joint of overlap joint groove each other to combine between every two main frame plate.
13. built-up type shades according to claim 11, it is characterized in that, in described four main frame plate, part main frame plate is the first main frame plate, all the other main frame plate are the second main frame plate, the second main frame plate thickness is greater than the first main frame plate thickness, and described the second main frame plate forms the overlap joint groove corresponding to the first main frame plate width and thickness in the overlapping part of its adjacent end, and the second main frame plate is overlapped in the first main frame plate and combines with the first main frame plate with its overlap joint groove.
14. according to the built-up type shade described in claim 12 or 13, it is characterized in that, in described main frame plate, form the overlap joint groove corresponding to inferior frame plate width, described frame plate two ends adjacent end forms the overlap joint groove of corresponding main frame plate width, between main frame plate and time frame plate, by corresponding overlap joint groove contraposition overlap joint, combines; In described frame plate, form the overlap joint groove of corresponding time frame plate width, between inferior frame plate and time frame plate, by corresponding overlap joint groove contraposition, overlap combination.
15. according to the built-up type shade described in claim 12 or 13, it is characterized in that, described time frame plate is the frame plate that thickness does not wait with the main frame plate overlapping, in described frame plate and main frame plate, the frame plate that thickness is larger forms the overlap joint groove corresponding to the less frame plate width of thickness and thickness, and the frame plate that thickness is larger is erected on the frame plate that thickness is less with its overlap joint groove; In described frame plate, form the overlap joint groove of corresponding time frame plate width, between inferior frame plate and time frame plate, by corresponding overlap joint groove contraposition, overlap combination.
16. according to the built-up type shade described in claim 12 or 13, it is characterized in that, described time frame plate is the frame plate that thickness does not wait with the main frame plate overlapping, in described frame plate and main frame plate, the frame plate that thickness is larger forms the overlap joint groove corresponding to the less frame plate width of thickness and thickness, and the frame plate that thickness is larger is erected on the frame plate that thickness is less with its overlap joint groove; Not etc., the larger inferior frame plate formation of thickness is not corresponding to the less inferior frame plate width of thickness and the overlap joint groove of thickness for inferior frame plate thickness of described overlap joint mutually, and the inferior frame plate that thickness is larger overlaps groove with it and is erected on the inferior frame plate that thickness is less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310054271.0A CN103993260B (en) | 2013-02-20 | 2013-02-20 | Combined type shade |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310054271.0A CN103993260B (en) | 2013-02-20 | 2013-02-20 | Combined type shade |
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| Publication Number | Publication Date |
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| CN103993260A true CN103993260A (en) | 2014-08-20 |
| CN103993260B CN103993260B (en) | 2017-10-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310054271.0A Active CN103993260B (en) | 2013-02-20 | 2013-02-20 | Combined type shade |
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| Country | Link |
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| CN (1) | CN103993260B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104911538A (en) * | 2015-05-18 | 2015-09-16 | 中国华能集团清洁能源技术研究院有限公司 | Masking plate structure for solar cell electrode vacuum evaporation |
| CN105951041A (en) * | 2016-05-25 | 2016-09-21 | 唐军 | Manufacturing method of large-size mask plate frame |
| CN110158027A (en) * | 2019-05-17 | 2019-08-23 | 深圳市华星光电半导体显示技术有限公司 | Exposure mask panel assembly and its setting method and application method |
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| CN1404343A (en) * | 2001-07-03 | 2003-03-19 | Lg电子株式会社 | Organic EL display apparatus and processing method thereof |
| JP2004091830A (en) * | 2002-08-30 | 2004-03-25 | Hirai Seimitsu Kogyo Corp | Metallic mask and method for manufacturing the same |
| CN200996043Y (en) * | 2004-07-16 | 2007-12-26 | 应用材料公司 | Shielding frame assembly |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1404343A (en) * | 2001-07-03 | 2003-03-19 | Lg电子株式会社 | Organic EL display apparatus and processing method thereof |
| JP2004091830A (en) * | 2002-08-30 | 2004-03-25 | Hirai Seimitsu Kogyo Corp | Metallic mask and method for manufacturing the same |
| CN200996043Y (en) * | 2004-07-16 | 2007-12-26 | 应用材料公司 | Shielding frame assembly |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104911538A (en) * | 2015-05-18 | 2015-09-16 | 中国华能集团清洁能源技术研究院有限公司 | Masking plate structure for solar cell electrode vacuum evaporation |
| CN105951041A (en) * | 2016-05-25 | 2016-09-21 | 唐军 | Manufacturing method of large-size mask plate frame |
| CN110158027A (en) * | 2019-05-17 | 2019-08-23 | 深圳市华星光电半导体显示技术有限公司 | Exposure mask panel assembly and its setting method and application method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103993260B (en) | 2017-10-27 |
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