CN103983557B - For the unicellular double light path device automatically analyzed of micro-fluidic chip - Google Patents

For the unicellular double light path device automatically analyzed of micro-fluidic chip Download PDF

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CN103983557B
CN103983557B CN201410192064.6A CN201410192064A CN103983557B CN 103983557 B CN103983557 B CN 103983557B CN 201410192064 A CN201410192064 A CN 201410192064A CN 103983557 B CN103983557 B CN 103983557B
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light path
laser
mirror
micro
plane
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CN103983557A (en
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刘彧
李金波
陈奕冰
简丹丹
高健
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Qilu University of Technology
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Qilu University of Technology
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Abstract

A kind of laser-induced fluorescence (LIF) double light path device automatically detected for micro-fluidic chip, including double light path optical unit, data acquisition unit, data processing unit, micro-fluidic power supply, light path control unit.It is characterized in that all position of components in light path are the most fixing, only by rotating light path converting dish, laser propagation direction can be changed, make it at sample introduction stage and detection-phase respectively along two different paths, thus realize single laser instrument and choose and automatic conversion between two functions of cellular component laser-Induced Fluorescence Detection unicellular.This device is applicable to unicellular automatically analyzing, and can be automatically performed single-cell injection, molten film, separate, detects overall process, reproducible, precision is high.

Description

For the unicellular double light path device automatically analyzed of micro-fluidic chip
Technical field
The present invention relates to that micro-fluidic chip is unicellular to be automatically analyzed, a kind of micro-fluidic chip list based on double light path Cell automatic analysing apparatus.
Background technology
Single cell analysis opinion controls for the early diagnosis and therapy of disease or the design of medicine and side effect all to have Potential significance.Therefore study efficient, easy single cell analysis method and instrument, seem in clinical practice the heaviest Want.Single cell components analysis generally includes cell sample introduction, derivative, molten film, separate and multiple steps such as detection, operates more complicated. Although microchip combines micro-valve, Micropump with its network channel and achieves some achievements in terms of unicellular manipulation, it is achieved that slender Being integrated in steps on one piece of micro-fluidic chip that born of the same parents analyze completes.But, the behaviour to the step such as single-cell injection and molten film Make, still need to rely on experimenter to utilize various cell manipulation technology to manually complete by microscope.Afterwards, laser could be utilized to lure Lead fluorescence detection device and carry out cellular component detection.
It is monochromatic light line structure that the existing fluidic chip laser-induced fluorescence for single cell analysis detects device, its base Present principles is: laser instrument is fixed on inverted microscope side.Exciting light arrives dichroic beam splitter through space filtering beam expander, by instead It is incident upon chip microchannel, and is focused into the hot spot of diameter tens microns.Tested cell or component are excited through hot spot, launch Light arrives inverted microscope optical focusing system through dichroic beam splitter, and is reflected onto detecting pinhole, enters through long wave optical filter Photomultiplier tube.The energy of incident illumination is converted to photoelectron by the negative electrode of photomultiplier tube, and photoelectron is via being connected to photoelectricity times The low-light-level measurement instrument of increasing pipe is collected and converted to the signal of telecommunication and exports monitor.Owing to existing detection device is monochromatic light line structure, Laser spot position is fixed, and as detected the target of zones of different, then needs manual mobile measured object, operates complicated, time-consuming, and not Easily repeat.As a example by single cell analysis in cross channel chip, in the single-cell injection stage, need first under bright field, will Passage intersection region is placed in field of microscope, utilizes microflow control technique manual manipulation cell, by individual cells from a large amount of cell bases Body catches out, is transported to split tunnel, carry out molten film.Then need rapidly split tunnel end point detection point to be placed in microscope Bright field is also transferred rapidly to dark field by the visual field, and recycling chip capillary cataphoresis carries out Component seperation and laser-induced fluorescence (LIF) inspection Survey.
Therefore, existing single light path device is difficult to realize continuously and automatically detecting, and there is device complicated, hand-manipulated numerous The problems such as trivial, efficiency is low, poor reproducibility, are difficult to be grasped by more experimenters.Also have impact on micro-analysis system at list simultaneously The further development of field of cell analysis.And yet there are no patent and pertinent literature report for the unicellular device automatically analyzed.
Summary of the invention
In order to overcome the shortcoming of existing single cell analysis device, improve detection efficiency and experiment repeatability, simplify instrument dress Putting, the present invention provides a kind of double light path device making laser beam automatically switch at sample intake passage and split tunnel, and the present invention is also Matched micro-fluidic supply unit and data acquisition and processing (DAP) interface are provided.
The technical solution of the present invention is as follows:
A kind of for the unicellular double light path device automatically analyzed of micro-fluidic chip, it is characterized in that including double light path optics list Unit, data acquisition unit, micro-fluidic power supply, light path control unit: wherein: the photomultiplier tube in double light path optical unit (119) outfan is connected with the amplifying circuit (2) in data acquisition unit;Analog-digital converter (3) in data acquisition unit It is connected with data processing unit (4) by RS232 interface;The output of data processing unit (4) is through RS232 interface and high direct voltage Power supply (5) connects;The output of data processing unit (4) connects through the digital to analog converter (6) of RS232 interface with light path control unit Connect, control servomotor (7) and drive light path converting dish (102).
(1) double light path optical unit: include LASER Light Source, light path converting dish, plane mirror group, microscope objective group, Sample stage, collecting lens group, concave mirror, pin hole, long wave pass filter, photomultiplier tube.All element positions in light path Put the most fixing, only by a rotatable light path converting dish, change laser propagation direction;
Double light path optical unit includes starting stage i.e. single-cell injection stage light path and detection-phase light path:
Wherein: single-cell injection stage light path, including LASER Light Source (101), light path converting dish (102), plane mirror Group (103 ~ 105,109), microscope objective (106), collecting lens (107), semi-transparent semi-reflecting lens (108), concave mirror (110), pin hole (117), long wave pass filter (118), photomultiplier tube (119), sample stage (120);Send along light source (101) The direction of advance of light beam i.e. OX direction of principal axis, is the circular hole on light path converting dish (102) successively, plane mirror (103) and plane Reflecting mirror (103) normal becomes 30 ~ 60 jiaos with OX axle in XOZ plane;Plane mirror (104) normal is in XOZ face and puts down Face reflecting mirror (103) normal parallel, in opposite direction, distance 20 ~ 30 mm;Plane mirror (105) normal in XOY face and with OX axle becomes 130 ~ 160 jiaos;Microscope objective (106) focused laser beam becomes the hot spot of diameter 10 ~ 20 μm, carries out glimmering in advance The individual cells of signal flows through laser facula at micro-fluidic chip (8) channel intersection, sends fluorescence;Collecting lens (107) It is placed in micro-fluidic chip (8) top, converges fluorescence and laser;Semi-transparent semi-reflecting lens (108) and plane mirror (105) normal exist In XOY face vertically, through laser, reflected fluorescent light;Plane mirror (109) is disposed along the fluorescence that semi-transparent semi-reflecting lens (108) reflects Direction of advance and normal become 30 ~ 60 jiaos with OX axle in XOZ face;Concave mirror (110) normal in XOZ face and with OX axle Parallel, by fluorescence reflected in parallel;It is pin hole (117), the logical optical filtering of long wave successively along the fluorescence direction that concave mirror (110) reflects Sheet (118), photomultiplier tube (119);
Detection-phase light path, including LASER Light Source (101), light path converting dish (102), plane mirror group (111 ~ 112, 116), microscope objective (113), collecting lens group (114), semi-transparent semi-reflecting lens (115), concave mirror (110), pin hole (117), long wave pass filter (118), photomultiplier tube (119), sample stage (120);Light path converting disc spins 30 ~ 90, edge Light source (101) sends the direction of advance i.e. OX direction of principal axis of light beam, is the plane mirror on light path converting dish (102);Light path turns The plane mirror normal changed on dish (102) becomes 30 ~ 60 jiaos with OX axle in XOZ plane;Putting down on light path converting dish (102) Face reflecting mirror by laser-bounce to plane mirror (111), plane mirror (111) normal in XOZ face with light path converting dish (102) the plane mirror normal parallel on, in opposite direction, distance 20 ~ 30 mm.Plane mirror (112), microscope objective (113), collecting lens (114), the position of semi-transparent semi-reflecting lens (115), direction correspond respectively to the element on initial optical path.Plane Reflecting mirror (116) normal is vertical with (109) normal in XOZ face;
Single-cell injection stage light path and detection-phase light path share original paper to be had: LASER Light Source (101), light path converting dish (102), concave mirror (110), pin hole (117), long wave pass filter (118), photomultiplier tube (119), sample stage (120);The laser that LASER Light Source (101) sends realizes the conversion of light path through the deflection of light path converting dish (102);Two light paths Launch light to converge through concave mirror (110) respectively, along pin hole (117), long wave pass filter (118), eventually arrive at photoelectricity times Increase pipe (119).
(2) data acquisition unit: the outfan of described photomultiplier tube connects amplifying circuit, analog-digital converter and RS232 Interface is connected with data processing unit.
(3) micro-fluidic power supply: the output of described data processing unit is connected with DC high-voltage power supply through RS232 interface, journey Sequence controls power supply and applies folder stream voltage sample solution in passage, completes single-cell injection.
(4) light path control unit: the output of described data processing unit is through RS232 interface, digital to analog converter, servomotor Driving light path converting disc spins 90, laser facula is placed in test point position.
(5) data processing unit: the data of the data acquisition unit described in process;Micro-fluidic electricity described in programme-control Source;Light path control unit described in programme-control.
Preferably, the light source in the unicellular double light path device automatically analyzed of described micro-fluidic chip is LASER Light Source, This LASER Light Source is arranged in draw-in groove, draw-in groove be accurately positioned, convenient disassembly, can change different wave length laser instrument as required.
Preferably, all position of optical element in the unicellular double light path device automatically analyzed of described micro-fluidic chip The most fixing, only by a rotatable light path converting dish, change laser propagation direction.
Preferably, the light path converting dish in the unicellular double light path device automatically analyzed of described micro-fluidic chip is by motor Driving, rotate around axle center, changeover panel edge becomes an angle of 90 degrees position, is respectively provided with a circular hole and a reflecting mirror, to be directed through Or reflection laser.Sample introduction phase transition is spiraled and is gone to initial position, and laser is directly through circular hole, anti-through one group of plane mirror Penetrate and focused on by object lens, arrive chip upper channel intersection region, as single-cell injection.After single-cell injection, changeover panel is revolved Going to final position, laser, by the mirror reflection on dish to dish external mirror group, gathers through triple reflection and by another object lens Jiao, arrives split tunnel end point detection point position on chip, as single cell components laser-Induced Fluorescence Detection.Two-way produces Fluorescence all can be reflected to same pin hole and long wave pass filter, finally to photomultiplier transit through the plane mirror of respective light path Pipe.
Preferably, the sample stage in the unicellular double light path device automatically analyzed of described micro-fluidic chip is three-dimensional fine-tuning Workbench, can manual fine-tuning chip position, auxiliary focusing.Moving range 0 ~ 13 mm, precision 0.001 mm.
Preferably, the data processing unit in the unicellular double light path device automatically analyzed of described micro-fluidic chip has Data acquisition process program, micro-fluidic power supply control program and light path control program.Data processing unit can be computer, also It can be the chip etc. with data processing function.
The feature of the unicellular double light path device automatically analyzed of micro-fluidic chip of the present invention and advantage:
1. the double light design of apparatus of the present invention, by light path converting, makes single LASER Light Source in sample introduction stage and detection Stage is respectively along two different paths, thus realizes single laser instrument at laser valve and laser-induced fluorescence (LIF) exciting light Automatic conversion between the function of two, source;
2. the data processing unit described in can process the data that described data acquisition unit is gathered, according to this data control Micro-fluidic power supply described in system and light path control unit, thus realize unicellular automatically analyzing;
3. the LASER Light Source described in can be replaced by the LASER Light Source of different wave length as required.
To sum up, the collaborative work of this device each unit, it is achieved that the Automatic continuous of each analytical procedure unicellular is carried out, and carries High work efficiency, overcomes the unfavorable factor of manual operation, and favorable reproducibility, degree of accuracy are high.
Accompanying drawing explanation
Fig. 1 is that micro-fluidic chip of the present invention is unicellular automatically analyzes double light path apparatus structure block diagram.
Fig. 2 is apparatus of the present invention double light path optical unit structural representations.
Fig. 3 is that apparatus of the present invention are unicellular automatically analyzes schematic diagram.
1: double light path optical unit 101: LASER Light Source 102: light path converting dish
103 ~ 105,109,111 ~ 112,116: plane mirror
106,113: microscope objective 107,114: collecting lens 108,115: semi-transparent semi-reflecting lens
110: concave mirror 117: pin hole 118: long wave pass filter
119: photomultiplier tube 120: sample stage
2: amplifying circuit 3: analog-digital converter 4: data processing unit
5: DC high-voltage power supply 6: digital to analog converter 7: servomotor
8: micro-fluidic chip.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the protection model of the present invention with this Enclose.
Embodiment 1
Refering to Fig. 1 and Fig. 2, the present invention is a kind of for the unicellular double light path device automatically analyzed of micro-fluidic chip, its Composition includes:
1) double light path optical unit 1: micro-fluidic chip 8 is placed in sample stage (120).The starting stage i.e. single-cell injection stage Light path, LASER Light Source (101), draw-in groove it is accurately positioned, convenient disassembly, different wave length laser instrument can be changed as required.Light source (101) light beam sent passes the circular hole on light path converting dish (102) along OX axle, reflexes to through plane mirror (103 ~ 105) Microscope objective (106), wherein 103,104 normals are parallel and become 45 jiaos with OX axle in XOZ face, plane mirror (105) method Line becomes 135 jiaos in XOY face and with OX axle.Laser beam is focused into diameter at channel intersection through microscope objective (106) The hot spot of 10 ~ 20 μm, flows through laser facula when carrying out fluorescently-labeled individual cells in advance, sends fluorescence.Fluorescence and laser warp Collecting lens (107) converges and arrives semi-transparent semi-reflecting lens (108), and semi-transparent semi-reflecting lens (108) and plane mirror (105) normal exist In XOY face vertically.Here, laser light semi-transparent semi-reflecting lens (108), and fluorescence is reflected onto plane mirror (109), plane is anti- Penetrate mirror (109) normal and become 45 jiaos in XOZ face and with OX axle.Then, fluorescence is reflected onto concave mirror (110), and concave surface is anti- Penetrate mirror (110) normal parallel with OX axle, by fluorescence reflected in parallel to pin hole (117).Fluorescence filters through needle passing hole (117) and passes through Long wave pass filter (118), eventually arrives at photomultiplier tube (119).All optical elements in double light path device are the most fixed Position, only by a rotatable light path converting dish (102), changes laser propagation direction;
Termination phase i.e. detection-phase light path, light path converting disc spins 90, the light beam that light source (101) sends arrives along OX axle Reach light path converting dish (102), reflected by the plane mirror on light path converting dish (102) and redirect to plane mirror (111), arriving chip channel test point position through the light path parallel with the sample introduction stage, the fluorescence excited is through parallel with the sample introduction stage Light path eventually arrive at photomultiplier tube (119), refer to Fig. 2.
2) data acquisition unit: the outfan of described photomultiplier tube (119) connects amplifying circuit (2), analog-digital converter (3) it is connected with data processing unit (4) with RS232 interface.
3) DC high-voltage power supply: the output of described data processing unit (4) is through RS232 interface and DC high-voltage power supply (5) Connecting, programmable power supply applies folder stream voltage sample solution in passage, completes single-cell injection.
4) light path control unit: the output of described data processing unit (4) through RS232 interface, digital to analog converter (6), watch Taking motor (7) and drive light path converting disc spins 90, laser facula is placed in micro-fluidic chip (8) split tunnel end point detection point Position.
5) data processing unit: the data of the data acquisition unit described in process;Data processing unit (4) has data acquisition Collection processing routine, micro-fluidic power supply control program and light path control program.DC high-voltage power supply (5) described in programme-control performs The single-cell injection in sample introduction stage separates with the chip capillary cataphoresis of detection-phase;Light path control list described in programme-control Unit.
Light path converting dish (102) in the unicellular double light path device automatically analyzed of described micro-fluidic chip is by servo electricity Machine (7) drives, and rotates around axle center, and changeover panel edge becomes an angle of 90 degrees position, is respectively provided with a circular hole and a reflecting mirror, with directly Pass through or reflection laser.
Sample stage (120) in the unicellular double light path device automatically analyzed of described micro-fluidic chip is three-dimensional fine-tuning work Station, can manual fine-tuning chip (8) position, auxiliary focusing.Moving range 0 ~ 13 mm, precision 0.001 mm.
The work process of apparatus of the present invention includes:
1. open LASER Light Source (101), double light path optical unit (1), data processing unit (4) etc..
2. micro-fluidic chip (8) is placed in sample stage (120), and micro-regulation sample table, laser facula is vernier focusing in microchannel.
3. inject cell suspension, DC high-voltage power supply (5), apply one group of voltage as shown in Figure 3 a, make cell in single file by Sample cell S flows to sample waste pond SW, and simultaneous buffering solution is flowed to SW by B and BW, forms folder stream.When cell flows through laser light Speckle, produces fluorescence, and signal is received by photomultiplier tube (119), amplified circuit (2), and it is single that analog-digital converter (3) send data to process Unit (4) processes.Data processing unit (4) determines whether unicellular according to signal magnitude, as no, does not do action;In this way, then open Dynamic servomotor (7) and adjustment DC high-voltage power supply (5).
4. as described in 3, data processing unit (4) starts servomotor (7), promotes light path converting dish (102) half-twist Angle, laser facula is converted to micro-fluidic chip (8) split tunnel end point detection point position, as shown in Figure 3 b.
5., as described in 3, data processing unit (4) adjusts DC high-voltage power supply (5), exports one group of molten film and separation voltage, Complete unicellular to choose, molten film and Component seperation.
6. single cell components is at micro-fluidic chip (8) split tunnel end point detection point by laser excitation, and fluorescence signal is by light Electricity multiplier tube (119) receives, amplified circuit (2), and analog-digital converter (3) send data processing unit (4) to process, and exports result.
Embodiment 2
The other the same as in Example 1, difference is, 103,104 normals are parallel and become 60 jiaos with OX axle in XOZ face, flat Face reflecting mirror (105) normal becomes 120 jiaos in XOY face and with OX axle.Plane mirror (109) normal in XOZ face and with OX axle becomes 60 jiaos.

Claims (6)

1. for the unicellular double light path device automatically analyzed of micro-fluidic chip, its constitute include double light path optical unit, Data acquisition unit, micro-fluidic power supply, light path control unit;Wherein: the photomultiplier tube (119) in double light path optical unit Outfan is connected with the amplifying circuit (2) in data acquisition unit;Analog-digital converter (3) in data acquisition unit passes through RS232 interface is connected with data processing unit (4);The output of data processing unit (4) is through RS232 interface and DC high-voltage power supply (5) connect;The output of data processing unit (4) is connected with the digital to analog converter (6) of light path control unit through RS232 interface, control Servomotor processed (7) drives light path converting dish (102);
1) double light path optical unit (1): include starting stage i.e. single-cell injection stage light path and detection-phase light path:
Wherein: single-cell injection stage light path, including LASER Light Source (101), light path converting dish (102), the first plane mirror (103), the second plane mirror (104), the 3rd plane mirror (105), fourth plane reflecting mirror (109), the first microscope Object lens (106), the first collecting lens (107), the first semi-transparent semi-reflecting lens (108), concave mirror (110), pin hole (117), length Ripple pass filter (118), photomultiplier tube (119), sample stage (120);The direction of advance i.e. OX of light beam is sent along light source (101) Direction of principal axis, is the circular hole on light path converting dish (102) successively, the first plane mirror (103) and the first plane mirror (103) Normal becomes 30 °~60 ° of angles in XOZ plane with OX axle;Second plane mirror (104) normal in XOZ face with the first plane Reflecting mirror (103) normal parallel, in opposite direction, distance 20~30mm;3rd plane mirror (105) normal in XOY face and 130 °~160 ° of angles are become with OX axle;First microscope objective (106) focused laser beam becomes the hot spot of diameter 10~20 μm, in advance Carry out fluorescently-labeled individual cells and flow through laser facula at micro-fluidic chip (8) channel intersection, send fluorescence;First optically focused Lens (107) are placed in micro-fluidic chip (8) top, converge fluorescence and laser;First semi-transparent semi-reflecting lens (108) is anti-with the 3rd plane Penetrate mirror (105) normal vertical, through laser, reflected fluorescent light in XOY face;Fourth plane reflecting mirror (109) is disposed along the first half Semi-reflective mirror (108) reflects thoroughly fluorescence direction of advance and normal become 30 °~60 ° of angles in XOZ face with OX axle;Concave mirror (110) normal is in XOZ face and parallel with OX axle, by fluorescence reflected in parallel;The fluorescence direction reflected along concave mirror (110) It is pin hole (117), long wave pass filter (118), photomultiplier tube (119) successively;
Detection-phase light path, including LASER Light Source (101), light path converting dish (102), the 5th plane mirror (111), the 6th flat Face reflecting mirror (112), the 7th plane mirror (116), the second microscope objective (113), the second collecting lens (114), second Semi-transparent semi-reflecting lens (115), concave mirror (110), pin hole (117), long wave pass filter (118), photomultiplier tube (119), Sample stage (120);Light path converting disc spins 30 °~90 °, sends the direction of advance i.e. OX direction of principal axis of light beam, is along light source (101) Plane mirror on light path converting dish (102);Plane mirror normal on light path converting dish (102) in XOZ plane with OX axle becomes 30 °~60 ° of angles;Plane mirror on light path converting dish (102) by laser-bounce to the 5th plane mirror (111), the 5th plane mirror (111) normal is put down with the plane mirror normal on light path converting dish (102) in XOZ face OK, in opposite direction, distance 20~30mm;6th plane mirror (112), the second microscope objective (113), the second optically focused are saturating Mirror (114), the position of the second semi-transparent semi-reflecting lens (115), direction correspond respectively to the element on initial optical path;7th plane reflection Mirror (116) normal is vertical with fourth plane reflecting mirror (109) normal in XOZ face;
Single-cell injection stage light path and detection-phase light path common elements have: LASER Light Source (101), light path converting dish (102), Concave mirror (110), pin hole (117), long wave pass filter (118), photomultiplier tube (119), sample stage (120);Laser The laser that light source (101) sends realizes the conversion of light path through the deflection of light path converting dish (102);The transmitting light of two light paths is respectively Converge through concave mirror (110), along pin hole (117), long wave pass filter (118), eventually arrive at photomultiplier tube (119);
2) data acquisition unit: include amplifying circuit (2), analog-digital converter (3), the outfan of described photomultiplier tube (119) Connect amplifying circuit (2), analog-digital converter (3) is connected with data processing unit (4) with RS232 interface;
3) DC high-voltage power supply: the output of described data processing unit (4) is connected with DC high-voltage power supply (5) through RS232 interface, Programmable power supply applies folder stream voltage sample solution in passage, completes single-cell injection;
4) light path control unit: include digital to analog converter (6), servomotor (7), the output warp of described data processing unit (4) RS232 interface, digital to analog converter (6), servomotor (7) drive light path converting dish (102) half-twist, and laser facula is placed in Micro-fluidic chip (8) split tunnel end point detection point position;
5) data processing unit: the data of the data acquisition unit described in process;DC high-voltage power supply (5) described in programme-control Perform the single-cell injection in sample introduction stage to separate with the chip capillary cataphoresis of detection-phase;Light path control described in programme-control Unit.
It is the most according to claim 1 for the unicellular double light path device automatically analyzed of micro-fluidic chip, it is characterised in that Described LASER Light Source (101), is arranged in draw-in groove.
It is the most according to claim 1 for the unicellular double light path device automatically analyzed of micro-fluidic chip, it is characterised in that By a rotatable light path converting dish (102), change laser propagation direction.
It is the most according to claim 1 for the unicellular double light path device automatically analyzed of micro-fluidic chip, it is characterised in that Light path converting dish (102) in double light path device rotates by driven by motor and around axle center;Light path converting dish (102) edge becomes 90 Degree Angle Position, is respectively provided with a circular hole and a reflecting mirror, to be directed through or to reflect laser.
It is the most according to claim 1 for the unicellular double light path device automatically analyzed of micro-fluidic chip, it is characterised in that Sample stage in double light path device is three-dimensional fine-tuning workbench, moving range 0~13mm, precision 0.001mm.
6. according to the unicellular double light path device automatically analyzed of the micro-fluidic chip described in any one of claim 1 to 5, its feature It is that described data processing unit has data acquisition process program, micro-fluidic power supply control program and light path control program.
CN201410192064.6A 2014-05-08 2014-05-08 For the unicellular double light path device automatically analyzed of micro-fluidic chip Expired - Fee Related CN103983557B (en)

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