CN103969034B - A kind of mechanical-optical setup stability assessment method resolved based on optical system misalignment rate - Google Patents
A kind of mechanical-optical setup stability assessment method resolved based on optical system misalignment rate Download PDFInfo
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Abstract
A kind of mechanical-optical setup stability assessment method resolved based on optical system misalignment rate belongs to optical system integration field, the method resolves unbalance of system amount according to the corrugated deviation of initial time and moment optical system to be assessed, corresponding compensator is adjusted according to unbalance of system amount, using the system corrugated deviation of system and initial time after adjustment as the criterion whether completing stability assessment, the misalignment rate resolved is the secular instability of corresponding mechanical-optical setup within this time period.Method of the present invention is applicable to the real-time assessment of the optical system long-time stability of mechanical-optical setup complexity, overcomes the problem that conventional stability appraisal procedure is limited to locus.
Description
Technical field
The invention belongs to optical system integration field, relate to a kind of mechanical-optical setup long-time stability appraisal procedure resolved based on optical system misalignment rate.
Background technology
High-precision optical system needs high system corrugated long-time stability, and with the demand meeting system calibrating He debug, and the corrugated stability dependency of system is in the stability of system mechanical-optical setup.The stability of optical system mechanical-optical setup is one of content needing emphasis to consider in system and manufacture process.At document (Dimensionalstability:anoverviewProc.OfSPIE, 1990,1335:2-19), the instability of mechanical-optical setup is divided into four classes by Mr. Mr.Paquin: instantaneous instability, periodic fever circulation produces instability, the instability that thermal stress causes and the magnetic hysteresis instability of stress.Debuging with testing process of the instability that the instantaneous instability wherein caused due to change and the stress relief of system micromechanism and the thermal stress that variation of ambient temperature causes residing for system cause and optical system is closely bound up.We can define the long-time stability that they are optical system mechanical-optical setup, and influential system is debug the iteration speed in process by them, even causes debuging of system to restrain.Conventional mechanical-optical setup long term stability tests equipment has commercial two-frequency laser interferometer, capacitive transducer, the XL80 system etc. of such as renishaw.But when mechanical-optical setup is comparatively complicated or need to measure mechanical-optical setup stability in real time, the mode of this direct measurement may run into space and arrange and limitedly wait difficulty.
According to the correlativity of optical system corrugated stability and system mechanical-optical setup stability, in conjunction with the Computer Aided Assembly Process Planning technology of optical system, a kind of mechanical-optical setup long-time stability real-time assessment scheme resolved based on optical system misalignment rate is provided, the long-time stability of mechanical-optical setup can be assessed to a certain extent comparatively accurately.
Summary of the invention
The object of this invention is to provide a kind of mechanical-optical setup long-time stability appraisal procedure resolved based on optical system misalignment rate, realize real-time mechanical-optical setup long-time stability assessment.
In order to achieve the above object, the technical scheme taked of the present invention is as follows:
Based on the mechanical-optical setup stability assessment method that optical system misalignment rate resolves, comprise the steps:
Step one, complete optical system Automatic manual transmission and computer assistant resetting technology completes the integrated of optical system debugs;
The emergent pupil ground roll aberration of the optical system obtained in step 2, completing steps one detects;
Step 3, by the emergent pupil ground roll aberration testing result in step 2, set up the sensitivity matrix J of optical system, process is as follows:
Step 3.1, be reflective or Zigzag type or refraction type system design feature according to optical system, the structural parameters of Rational choice element to be assessed generate preliminary election compensator group;
Step 3.2, artificially in each preliminary election compensator of step 3.1 gained introduce misalignment rate Δ x, record system emergent pupil ground roll aberration z corresponding with it respectively;
Step 3.3, solve the sensitivity matrix of optical system:
In formula, Δ x
nfor the misalignment rate of the n-th preliminary election compensator artificially introduced, Δ z
m=z
m-z
0for emergent pupil ground roll aberration z before and after misalignment rate is introduced in optical system m visual field
0with z
mdifference;
Step 4, svd is carried out to the sensitivity matrix J that step 3 obtains, obtain J=UWV
t(2), the column vector u of matrix U in formula
ifor the aberration singular value vector of optical system, the column vector v of matrix V
ifor the structured singular value vector of optical system, W is the diagonal matrix containing corresponding singular value, the element w on diagonal line
imode in monotone decreasing arranges (w
1>w
2> ... >w
n); w
ivalue represent that system is to structured singular value vector v
isusceptibility, v
iposition n residing for the element of middle maximum absolute value is corresponding n-th preliminary election compensator, that the adjustment of its unit distance has the greatest impact is u
ithe aberration that the element present position of middle maximum absolute value is corresponding; According to the susceptibility size of system aberration singular value vector to structured singular value vector, preliminary election compensator is divided into groups, set up the priority of compensator adjustment;
Step 5, adopt the detection method identical with in step 2, complete and the wave aberration of the optical system obtained in step one is detected, the system emergent pupil ground roll aberration in acquisition A moment and initial time and B moment and moment to be assessed;
Step 6, system emergent pupil ground roll aberration according to the A moment obtained in step 5 and B moment, the compensator group result in integrating step four solves misalignment rate, and the misalignment rate completing corresponding compensator calculates, and detailed process is as follows:
In optical system, the corresponding relation of element attitude and system emergent pupil ground roll aberration is represented by function z=z (x), wherein z is system emergent pupil ground roll aberration, x is the system architecture vector characterizing optical element attitude, and the element in x vector represents each preliminary election compensator; Adopting the Newton iteration method based on svd, realizing by resolving z (x)=0 || z (x) || minimum, be specially: Taylor Taylor expansion is carried out near suitable misalignment rate to z (x)=0:
z(x+δx)=z(x)+Jδx+Ο(δx
2)(3)
In formula, J is the system sensitivity matrix of being tried to achieve by step 3, and δ x, for making the misalignment rate of z (x+ δ x)=0, ignores the higher order term in formula (3), then:
Jδx=-z(x)(4)
In formula, z (x) is the deviation of the system emergent pupil ground roll aberration of actual measurement and the system emergent pupil ground roll aberration after optimizing, and by solution formula (4) can be in the hope of misalignment rate δ x:
In formula, V, W, U are all by obtaining the svd of the sensitivity matrix J obtained in step 3, the symbology adjustment direction of δ x;
Step 7, according to the misalignment rate obtained in step 6, corresponding adjustment is made to each compensator, record the optical system emergent pupil ground roll aberration after adjustment, the optical system emergent pupil ground roll aberration in contrast A moment, if both deviations are less than threshold value, then completes the long-time stability assessment of mechanical-optical setup; If both deviations are greater than threshold value, then recalculate misalignment rate according to deviation and lay equal stress on till the system emergent pupil ground roll aberration of duplicate step after adjustment and the deviation of the system emergent pupil ground roll aberration in A moment be less than threshold value.
The adjustment completing resolving of misalignment rate and corresponding compensator according to the wave aberration testing result in A, B moment is the key component in technical solution of the present invention, and main process is: (1) completes the decoupled method of grouping compensator misalignment rate according to corrugated deviation; (2) adjustment of the corresponding compensator of each misalignment rate is completed.
In technical scheme of the present invention, the compensator of described optical system refers to the adjustment degree of freedom of each optical element and object point and picture point in system, characterizes the element attitude such as bias, inclination; The misalignment rate of system refers to that calculating the adjustment degree of freedom obtained is debuging the adjustment amount that should complete in process; The singular value of sensitivity matrix has reacted the adjustment of misalignment rate unit distance to the influence degree of system wave aberration; Aberration singular value is made up of Zernike coefficient, characterization system emergent pupil ground roll aberration; The adjustment degree of freedom that structured singular value comprises object point and picture point by element each in system forms, corresponding with aberration singular value, the foundation that construction system compensator is selected together with the singular value of sensitivity matrix.
The invention has the beneficial effects as follows:
(1) in optical system mechanical-optical setup stability assessment method of the present invention, the sensitivity matrix that experimentally system is set up more is conducive to the long-time stability assessing optical system mechanical-optical setup accurately, grouping compensator scheme, solve the coupled problem of compensator, the each compensator misalignment rate resolved characterizes the long-time stability of the optical system mechanical-optical setup in different time interval, solves commercial testing apparatus and arrange limited problem in space in mechanical-optical setup stability assessment process;
(2) the present invention is conducive to the variation tendency of the long-time stability assessment result prediction optical system according to optical system, and carries out pre-adjustment targetedly to this system;
(3) optical system mechanical-optical setup stability assessment method of the present invention is applicable to the real-time assessment of long-time stability of mechanical-optical setup of refraction type, reflective or refractive and reflective optical system.
Accompanying drawing explanation
Fig. 1 is the process flow diagram of the mechanical-optical setup stability assessment resolved based on optical system misalignment rate.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
As shown in Figure 1, the implementation process that the present invention is based on the mechanical-optical setup stability assessment method that optical system misalignment rate resolves mainly comprises following steps:
(1) complete the Automatic manual transmission of optical system, and computer assistant resetting technology completes the integrated of optical system debugs;
(2) complete integrated after optical system emergent pupil ground roll aberration detect;
(3) sensitivity matrix of experimental system is set up, the corresponding relation finding optical system emergent pupil ground roll aberration and optical element attitude is the key issue that optical system precision is debug, Computer Aided Assembly Process Planning provides a kind of scheme of effective this problem of solution, setting up system sensitivity matrix is emphasis of the present invention, and the detailed process setting up sensitivity matrix is:
A. according to the design feature of the optical system of optical software design, the structural parameters of Rational choice element to be assessed generate compensator group;
B. artificial introducing misalignment rate Δ x in each compensator, records system emergent pupil ground roll aberration z corresponding with it respectively;
C. the sensitivity matrix of solving system:
In formula, Δ x
nfor the misalignment rate of the n-th preliminary election compensator artificially introduced, Δ z
m=z
m-z
0for system emergent pupil ground roll aberration z before and after misalignment rate is introduced in optical system m visual field
0with z
mdifference;
(4) because aberration number and system architecture number can not accomplish one_to_one corresponding completely, non-singular matrix J can not be obtained
,make the acquisition of unbalance of system amount in subsequent step not by realizing the mode of J finding the inverse matrix, need to carry out svd to J, obtain the generalized inverse of J, finally solve the misalignment rate of system, the svd of J is as follows:
J=UWV
T(2)
Column vector u in formula in matrix U, V
iand v
ibe respectively aberration singular value vector and the structured singular value vector of optical system, W is the diagonal matrix containing corresponding singular value, the element w on diagonal line
imode in monotone decreasing arranges (w
1>w
2> ... >w
n); w
ivalue represent that system is to structured singular value vector v
isusceptibility, v
iposition n residing for the element of middle maximum absolute value is corresponding n-th preliminary election compensator, that the adjustment of its unit distance has the greatest impact is u
ithe element of middle maximum absolute value is in the aberration corresponding to position;
(5) record not system emergent pupil ground roll aberration (A moment and B moment) in the same time, calculate misalignment rate according to corrugated deviation, and the compensator that adjustment is corresponding, the computation process of misalignment rate is as follows:
In optical system, element attitude (adjustment degree of freedom) can be described by funtcional relationship z=z (x) with the corresponding relation of system emergent pupil ground roll aberration, wherein z is system emergent pupil ground roll aberration, x is the system architecture vector characterizing optical element attitude, element in x vector represents each preliminary election compensator, the object of Computer Aided Assembly Process Planning is exactly find a best system architecture, make || z (x) || minimum, the optimizing process of this process and optical design is similar, but because z and x is nonlinear relationship, and each structure components non-fully is separate, make to solve || z (x) || minimum process becomes one and non-ly determines problem, thus create a convergent iterations process, it is at present conventional that to solve the non-algorithm determining equation be Newton iteration method based on svd, realize by resolving z (x)=0 || z (x) || minimum.Non-ly determine equation z (x)=0 for solving, Taylor Taylor expansion carried out near suitable misalignment rate to it:
z(x+δx)=z(x)+Jδx+Ο(δx
2)(3)
Wherein J is the sensitivity matrix of system, and calculate in step (2) and obtain, δ x is that the misalignment rate of required analytical system makes z (x+ δ x)=0, and ignores higher order term, then:
Jδx=-z(x)(4)
In formula, z (x) is the deviation of the system emergent pupil ground roll aberration after actual measurement system emergent pupil ground roll aberration and optimization, this equation characterizes the relation of system emergent pupil ground roll aberration and structure, misalignment rate δ x can be obtained, the symbology of δ x adjustment direction by solution formula (4):
In formula, V, W, U can by obtaining the svd of J;
(6) the emergent pupil ground roll aberration of adjustment rear optical system is recorded;
(7) if system and A after adjustment time etching system corrugated deviation be less than threshold value, think that mechanical-optical setup long-time stability assesss, the misalignment rate of calculating acquisition is the instability of corresponding mechanical-optical setup within this time period; Otherwise, misalignment rate is calculated according to the corrugated deviation of etching system when the rear system of adjustment and A, the compensator that adjustment is corresponding, repeat step (6), (7) until adjust after system and A time etching system corrugated deviation meet threshold value till, the misalignment rate sum resolved in the data of storage is the secular instability of corresponding mechanical-optical setup between A, B moment.
In the specific embodiment of the invention, actual experimental system can being adopted to set up optical system sensitivity matrix, also can set up optical system sensitivity matrix by adopting the system model in software.
The effect of mechanical-optical setup stability assessment method of table 1 for the present invention is based on optical system misalignment rate and resolving, as follows:
Table 1
Can find out that the part misalignment rate of an Iterative is comparatively close to the test result of two-frequency laser interferometer by table 1, but due to the system that the optical system in order to verify the method is band central obscuration, the repeated detection poor repeatability than other aberration of detection of the metrical aberrations in system wave aberration, finally the misalignment rate along Z-direction will be caused to resolve deviation larger, but according to the feature of Computer Aided Assembly Process Planning iteration convergence, the carrying out along with debuging iterative process can be estimated, the result of misalignment rate multiple iterative calculation will be in close proximity to the result of two-frequency laser interferometer, thus the long-time stability of real reflection mechanical-optical setup within this time period.
Claims (1)
1., based on the mechanical-optical setup stability assessment method that optical system misalignment rate resolves, it is characterized in that, the method comprises the steps:
Step one, complete optical system Automatic manual transmission and computer assistant resetting technology completes the integrated of optical system debugs;
The emergent pupil ground roll aberration of the optical system obtained in step 2, completing steps one detects;
Step 3, by the emergent pupil ground roll aberration testing result in step 2, set up the sensitivity matrix J of optical system, process is as follows:
Step 3.1, be reflective or Zigzag type or refraction type system design feature according to optical system, the structural parameters of Rational choice element to be assessed generate preliminary election compensator group;
Step 3.2, artificially in each preliminary election compensator of step 3.1 gained introduce misalignment rate Δ x, record system emergent pupil ground roll aberration z corresponding with it respectively;
Step 3.3, solve the sensitivity matrix of optical system:
In formula, Δ x
nfor the misalignment rate of the n-th preliminary election compensator artificially introduced, Δ z
m=z
m-z
0for emergent pupil ground roll aberration z before and after misalignment rate is introduced in optical system m visual field
0with z
mdifference;
Step 4, svd is carried out to the sensitivity matrix J that step 3 obtains, obtain J=UWV
t(2), the column vector u of matrix U in formula
ifor the aberration singular value vector of optical system, the column vector v of matrix V
ifor the structured singular value vector of optical system, W is the diagonal matrix containing corresponding singular value, the element w on diagonal line
imode in monotone decreasing arranges (w
1>w
2> ... >w
n); w
ivalue represent that system is to structured singular value vector v
isusceptibility, v
iposition n residing for the element of middle maximum absolute value is corresponding n-th preliminary election compensator, that the adjustment of its unit distance has the greatest impact is u
ithe aberration that the element present position of middle maximum absolute value is corresponding; According to the susceptibility size of system aberration singular value vector to structured singular value vector, preliminary election compensator is divided into groups, set up the priority of compensator adjustment;
Step 5, adopt the detection method identical with in step 2, complete and the wave aberration of the optical system obtained in step one is detected, the system emergent pupil ground roll aberration in acquisition A moment and initial time and B moment and moment to be assessed;
Step 6, system emergent pupil ground roll aberration according to the A moment obtained in step 5 and B moment, the compensator group result in integrating step four solves misalignment rate, and the misalignment rate completing corresponding compensator calculates, and detailed process is as follows:
In optical system, the corresponding relation of element attitude and system emergent pupil ground roll aberration is represented by function z=z (x), wherein z is system emergent pupil ground roll aberration, x is the system architecture vector characterizing optical element attitude, and the element in x vector represents each preliminary election compensator; Adopting the Newton iteration method based on svd, realizing by resolving z (x)=0 || z (x) || minimum, be specially: Taylor Taylor expansion is carried out near suitable misalignment rate to z (x)=0:
z(x+δx)=z(x)+Jδx+O(δx
2)(3)
In formula, J is the system sensitivity matrix of being tried to achieve by step 3, and δ x, for making the misalignment rate of z (x+ δ x)=0, ignores the higher order term in formula (3), then:
Jδx=-z(x)(4)
In formula, z (x) is the deviation of the system emergent pupil ground roll aberration of actual measurement and the system emergent pupil ground roll aberration after optimizing, and by solution formula (4) can be in the hope of misalignment rate δ x:
In formula, V, W, U are all by obtaining the svd of the sensitivity matrix J obtained in step 3, the symbology adjustment direction of δ x;
Step 7, according to the misalignment rate obtained in step 6, corresponding adjustment is made to each compensator, record the optical system emergent pupil ground roll aberration after adjustment, the optical system emergent pupil ground roll aberration in contrast A moment, if both deviations are less than threshold value, then completes the long-time stability assessment of mechanical-optical setup; If both deviations are greater than threshold value, then recalculate misalignment rate according to deviation and lay equal stress on till the system emergent pupil ground roll aberration of duplicate step after adjustment and the deviation of the system emergent pupil ground roll aberration in A moment be less than threshold value.
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CN109002567B (en) * | 2017-06-07 | 2023-02-03 | 中国航空工业集团公司洛阳电光设备研究所 | Computer-aided debugging method based on actual optical system debugging detection optical path |
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CN112946880B (en) * | 2021-02-24 | 2022-07-01 | 北京理工大学 | Model-based automatic adjustment method for wavefront-free sensor optical system |
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