CN103969034A  Method for evaluating stability of opticalmechanical structure based on optical system misalignment rate solution  Google Patents
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 CN103969034A CN103969034A CN201410182055.9A CN201410182055A CN103969034A CN 103969034 A CN103969034 A CN 103969034A CN 201410182055 A CN201410182055 A CN 201410182055A CN 103969034 A CN103969034 A CN 103969034A
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Abstract
Description
一种基于光学系统失调量解算的光机结构稳定性评估方法 An evaluation method of the optical system of structural stability of the light amount of misalignment based Solver
技术领域 FIELD
[0001] 本发明属于光学系统集成领域，涉及一种基于光学系统失调量解算的光机结构长期稳定性评估方法。 [0001] The present invention belongs to the field of integrated optical systems, to a longterm stability of the optical mechanism of the optical system evaluation method based on the amount of misalignment solver.
背景技术 Background technique
[0002] 高精度的光学系统需要高的系统波面长期稳定性，以满足系统标定和装调的需求，而系统的波面稳定性依赖于系统光机结构的稳定性。 [0002] The highprecision optical systems require high longterm stability of the system wavefront, to meet system needs calibration and adjustment means, the wavefront system stability depends on the stability of the optical mechanism of the system. 光学系统光机结构的稳定性是在系统设计和制造过程中需要重点考虑的内容之一。 Stability of optical mechanism of the optical system is one of the elements in the system design and manufacturing processes important consideration. 在文献(Dimensionalstability:anoverviewProc.0fSPIE, 1990, 1335:219)中Mr.Paquin先生将光机结构的不稳定性分为四类:瞬时不稳定性，周期热循环产生应力的不稳定性，热应力导致的不稳定性以及磁滞不稳定性。 In the literature (Dimensionalstability: anoverviewProc.0fSPIE, 1990, 1335: 219) in the instability of Mr. Mr.Paquin ray structure into four categories: transient instability, the instability of thermal cycling periods of stress, thermal stress results in instability and hysteresis instability. 其中由于系统微观结构的改变以及应力释放引起的瞬时不稳定性和由系统所处环境温度变化引起的热应力导致的不稳定性与光学系统的装调和检测过程息息相关。 Wherein the detecting means harmonic instability of the optical system transient instability due to changes in microstructure and a stress release systems due to thermal stresses caused by changes in ambient temperature results in a process which is closely related to the system. 我们可以定义它们为光学系统光机结构的长期稳定性，它们将影响系统装调过程中的迭代速度，甚至导致系统的装调无法收敛。 We can define them as longterm stability of the optical mechanism of the optical system, which will affect the speed of the system installed iterative adjustment process, and even lead to assembly and adjust the system fail to converge. 常用的光机结构长期稳定性测试设备有商用的双频激光干涉仪、电容传感器，比如renishaw的XL80系统等。 Commonly used optical mechanism have longterm stability of commercial test equipment frequency laser interferometers, capacitive sensors, such as the renishaw XL80 system. 但当光机结构较为复杂或需要实时测量光机结构稳定性时，这种直接测量的方式可能会遇到空间布置受限等困难。 However, when optical mechanism is complex or requires real time measurement ray structural stability, such direct measurement may encounter difficulties such as restricted arrangement space.
[0003] 根据光学系统波面稳定性与系统光机结构稳定性的相关性，结合光学系统的计算机辅助装调技术，提供一种基于光学系统失调量解算的光机结构长期稳定性实时评估方案，可以在一定程度上较为准确的评估光机结构的长期稳定性。 [0003] The correlation between stability and structural stability of the wavefront of the optical system of the optical system, the optical system in conjunction with computeraided alignment, there is provided a longterm stability of the optical mechanism of the optical system, realtime evaluation program solver based on the amount of misalignment , can be more accurately assess longterm stability of the optical mechanism is to some extent.
发明内容 SUMMARY
[0004] 本发明的目的是提供一种基于光学系统失调量解算的光机结构长期稳定性评估方法，实现实时的光机结构长期稳定性评估。 [0004] The object of the present invention is to provide an evaluation method for longterm stability of optical mechanism of the optical system based on the offset amount of the resolver, realtime assessment of the longterm stability of optical mechanism.
[0005] 为了达到上述目的，本发明采取的技术方案如下: [0005] To achieve the above object, the present invention takes the following technical solutions:
[0006] 一种基于光学系统失调量解算的光机结构稳定性评估方法，包括如下步骤: [0006] A method for evaluation of structural stability of the light amount of misalignment of the optical system based solver, comprising the steps of:
[0007] 步骤一、完成光学系统的机械装配并借助计算机辅助装调技术完成光学系统的集成装调； [0007] Step a, to complete the mechanical assembly of the optical system and the adjustment means by means of an integrated computeraided alignment of the optical system is completed;
[0008] 步骤二、完成步骤一中所得到的光学系统的出瞳面波像差检测； [0008] Step two, the pupil plane wave aberration of the optical system is completed in a step obtained detected;
[0009] 步骤三、借助步骤二中的出瞳面波像差检测结果，建立光学系统的敏感度矩阵J，过程如下: [0009] Step three, the pupil plane of the wavefront aberration by the detection result of step two, to establish the sensitivity matrix J of the optical system, as follows:
[0010] 步骤3.1、根据光学系统为反射式或折返式或折射式系统的结构特点，合理选取待评估元件的结构参数生成预选补偿器组； [0010] Step 3.1, the optical system is a reflective or refractive system switchback or structural characteristics, reasonable selection of the structural parameters to be evaluated to generate precompensator element group;
[0011] 步骤3.2、在步骤3.1所得的各预选补偿器中人为引入失调量Λ X，分别测得与之对应的系统出瞳面波像差ζ ； [0011] Step 3.2, obtained in step 3.1 in each artificially introduced into the precompensation amount offset Λ X, respectively, corresponding to the measured wavefront aberration ζ a system pupil surface;
[0012] 步骤3.3、求解光学系统的敏感度矩阵: [0012] Step 3.3, solving the sensitivity matrix of the optical system:
[0013] [0013]
[0014] 式中，八\为人为引入的第η个预选补偿器的失调量，Azm = ZmZtl为光学系统第m个视场引入失调量前后出瞳面波像差Ztl与Zm之差； [0014] wherein eight \ [eta] is a preselected compensation of the offset amount introduced artificially, Azm = ZmZtl introduced difference before and after the offset amount of wave aberration of the pupil plane Zm ZTL and mth field of view of the optical system ;
[0015] 步骤四、对步骤三所得到的敏感度矩阵J进行奇异值分解，得到J = UWVT，式中矩阵U的列向量Ui为光学系统的像差奇异值向量，矩阵V的列向量Vi为光学系统的结构奇异值向量，W为含有相应奇异值的对角阵，对角线上的元素Wi呈单调递减的方式排列(W1)W2)>wn) ,W1的值表示系统对结构奇异值向量Vi的敏感度，Vi中绝对值最大的元素所处的位置η对应了第η个预选补偿器，其单位距离的调整影响最大的为Ui中绝对值最大的元素所处位置对应的像差；根据系统像差奇异值向量对结构奇异值向量的敏感度大小，对预选补偿器进行分组，建立补偿器调整的优先级； [0015] Step 4 of sensitivity matrix J obtained in step three singular value decomposition, to give J = UWVT, column vectors of the matrix U where Ui is a column vector of the singular values of the optical system aberration vector matrix V Vi Singular value vector for the structure of the optical system, W containing the corresponding singular value diagonal matrix elements on the diagonal Wi monotonic decreasing arrayed (W1) W2) > wn) , W1 represents the value of the system structure sensitivity singular vectors Vi, Vi, the maximum absolute value of the position which the elements corresponding to the first η η preselected compensator adjust the unit distance corresponding to the maximum effect of the location of the maximum element of absolute value Ui aberration; sensitivity to the size of structured singular value vector, for precompensator are grouped according to the aberration singular vectors, establishing priority compensator adjustment;
[0016] 步骤五、采用与步骤二中相同的检测方法，完成对步骤一中所获得的光学系统的波像差检测，获得A时刻即初始时刻和B时刻即待评估时刻的系统出瞳面波像差； [0016] Step 5 using the same detection method step two complete wave aberration detection optical system of a step obtained, i.e., the time to obtain an initial time A and B, i.e. the time until the time of evaluation of the system pupil plane wave aberration;
[0017] 步骤六、根据步骤五中所得到的A时刻和B时刻的系统出瞳面波像差，结合步骤四中的补偿器分组结果求解失调量，完成对应补偿器的失调量计算，具体过程如下: [0017] Step six, the pupil plane wavefront A system according to time and the time step 5 B obtained, combined grouping results in four steps to solve the amount of misalignment compensator, the amount of complete offset compensation calculation corresponding to the specific process is as follows:
[0018] 光学系统中元件姿态与系统出瞳面波像差的对应关系通过函数ζ = Z(X)表示，其中Z为系统出瞳面波像差，X为表征光学元件姿态的系统结构向量，X向量中的元素代表各预选补偿器；采用基于奇异值分解的牛顿迭代法，通过解算Z(X) = O实现I Iz(X) II最小，具体为:对Z(X) = O在适当的失调量附近进行泰勒Taylor展开: [0018] The optical system illustrating the system components and the corresponding relationship between the attitude pupil plane of the wavefront aberration represented by the function ζ = Z (X), wherein Z is a system exit pupil plane wavefront aberration, X is a system configuration of the optical element characterized posture vector , X vector element represents each of the preselected compensation; based on singular value decomposition Newton iterative method, (X) = O realized I Iz (X) minimum II, in particular by solving Z: of Z (X) = O Taylor Taylor expansion in the vicinity of the appropriate amount of imbalance:
[0019] ζ (X+ δ X) = ζ (X) +J δ X+ O ( δ χ2) (3) [0019] ζ (X + δ X) = ζ (X) + J δ X + O (δ χ2) (3)
[0020] 式中J为由步骤三求得的系统敏感度矩阵，6 1为使2(^63 = O的失调量，忽略式⑶中的高阶项，则: [0020] wherein J by the system sensitivity matrix obtained in step three, such that 61 (= 63 ^ O in an amount of imbalance, ignore the higher order terms in the formula ⑶ 2, then:
[0021] J δ χ = ζ (χ) (4) [0021] J δ χ = ζ (χ) (4)
[0022] 式中Z(X)为实测的系统出瞳面波像差与优化后的系统出瞳面波像差的偏差，通过求解公式(4)可以求得失调量δ χ为: [0022] wherein Z (X) is the measured system deviation of the wavefront aberration of a system pupil plane after the pupil plane wavefront aberration and optimization, can be determined by solving the offset amount δ χ equation (4):
[0023] Sx = V ^Ut ζ{χ) (5) [0023] Sx = V  ^ Ut ζ {χ) (5)
[0024] 式中V、W、U均通过对步骤三中所得到的敏感度矩阵J的奇异值分解获得，δ X的符号代表调整方向； [0024] wherein V, W, U are sensitivity matrix by the singular value obtained in step three decomposition J obtained, δ X symbol representing the direction of adjustment;
[0025] 步骤七、根据步骤六中所得到的失调量对各补偿器做出相应的调整，测得调整后的光学系统出瞳面波像差，对比A时刻的光学系统出瞳面波像差，若两者的偏差小于阈值，则完成光机结构的长期稳定性评估；若两者的偏差大于阈值，则根据偏差重新计算失调量并重复本步骤直至调整后的系统出瞳面波像差与A时刻的系统出瞳面波像差的偏差小于阈值为止。 [0025] Step seven, six according to the amount of the offset obtained in step make the appropriate adjustments to each of the compensator, the optical system is measured after adjusting the pupil plane wavefront aberration of the optical system, compared to the time the A image pupil plane wave the difference, if the deviation of both is less than the threshold, the long term stability assessment ray completed structure; if the deviation of both is greater than the threshold value, the amount of offset is recalculated based on the deviation of both copies of the system until the step of adjusting the image of the exit pupil plane wave a time difference between the system pupil plane deviation of the wavefront aberration is smaller than the threshold value.
[0026] 根据Α、B时刻的波像差检测结果完成失调量的解算和对应补偿器的调整是本发明技术方案中的关键部分，主要过程为:(1)根据波面偏差完成分组补偿器失调量的分步计算；(2)完成各失调量对应补偿器的调整。 Adjust the resolver and the corresponding compensator [0026] complete offset amount of the aberration detection result Α, B timing wave is a key part of the technical solutions of the present invention, the main process are: (1) The wavefront deviation complete packet compensator offset amount calculation step; (2) adjust the offset by an amount corresponding to complete compensator.
[0027] 本发明的技术方案中，所述光学系统的补偿器是指系统中各光学元件以及物点和像点的调整自由度，表征偏心、倾斜等元件姿态；系统的失调量是指计算获得的调整自由度在装调过程中应完成的调整量；敏感度矩阵的奇异值反应了失调量单位距离的调整对系统波像差的影响程度；像差奇异值由Zernike系数组成，表征系统出瞳面波像差；结构奇异值由系统中各元件包括物点和像点的调整自由度组成，与像差奇异值对应，与敏感度矩阵的奇异值一起构成系统补偿器选择的依据。 [0027] aspect of the present invention, the compensator of the optical system means that each optical element and the object point and image point adjustment of the degree of freedom system, characterized by an eccentric, inclined posture like element; refers to the amount of misalignment calculated system amount adjusting means to adjust the degree of freedom is obtained in the adjustment process should be completed; sensitivity matrix singular value reflects the degree of influence amount of offset adjustment system unit distance of wave aberration; aberrations of Zernike coefficients composed of singular values, the system characterized by a pupil plane wave aberration; structured singular value of each element of the system object point and image point comprises adjusting the composition of freedom, the aberration corresponding to singular values, sensitivity matrix with singular values together form the system according to the compensator selection.
[0028] 本发明的有益效果是: [0028] Advantageous effects of the present invention are:
[0029] (I)本发明的光学系统光机结构稳定性评估方法中，根据实验系统建立的敏感度矩阵更有利于准确的评估光学系统光机结构的长期稳定性，分组补偿器方案，解决补偿器的耦合问题，解算的各补偿器失调量表征了不同时间间隔内的光学系统光机结构的长期稳定性，解决商用测试设备在光机结构稳定性评估过程中空间布置受限的问题； [0029] (I) ray structural stability evaluation method of the optical system of the present invention, according to the experimental system establishes a sensitivity matrix is more conducive to an accurate assessment of the longterm stability of the optical mechanism of the optical system, a packet compensation scheme, to solve coupling problem compensator, the offset compensator amount of each resolver characterizes the long term stability of the optical mechanism of the optical system in different time intervals, commercial test equipment to solve the problem of structural stability of the light during the assessment of the spatial arrangement of the restricted ;
[0030] (2)本发明有利于根据光学系统的长期稳定性评估结果预测光学系统的变化趋势，并对该系统进行有针对性的预调整； [0030] (2) The present invention facilitates the predicted trend of the optical system according to a longterm stability evaluation results of the optical system and the system for targeted preadjustment;
[0031] (3)本发明的光学系统光机结构稳定性评估方法适用于折射式、反射式或折反射式光学系统的光机结构的长期稳定性的实时评估。 [0031] (3) Stability evaluation method of the optical structure of the optical system of the machine according to the present invention is applicable to refractive, realtime assessment of longterm stability of the reflective or catadioptric optical system structure of the machine.
附图说明 BRIEF DESCRIPTION
[0032] 图1为基于光学系统失调量解算的光机结构稳定性评估的流程图。 [0032] FIG. 1 is a flowchart stability assessment of optical mechanism of the optical system based on the amount of misalignment solver.
具体实施方式 Detailed ways
[0033] 下面结合附图对本发明做进一步详细说明。 [0033] The following figures described in further detail in conjunction with the present invention.
[0034] 如图1所示，本发明基于光学系统失调量解算的光机结构稳定性评估方法的实施过程主要包含以下步骤: [0034] As shown in FIG. 1, a method based on the evaluation of structural stability of the light amount of misalignment of the optical system of the embodiment of the process of solving the present invention mainly comprises the following steps:
[0035] (I)完成光学系统的机械装配，并借助计算机辅助装调技术完成光学系统的集成装调； [0035] (I) to complete the mechanical assembly of the optical system, and with the completion of integration of computeraided alignment optical system adjusting means;
[0036] (2)完成集成后的光学系统出瞳面波像差检测； [0036] (2) after the completion of integration of the optical system exit pupil plane wave aberration detection;
[0037] (3)建立实验系统的敏感度矩阵，寻找光学系统出瞳面波像差与光学元件姿态的对应关系是光学系统精密装调的关键问题，计算机辅助装调提供一种有效的解决该问题的方案，建立系统敏感度矩阵是本发明的重点，建立敏感度矩阵的具体过程为: [0037] (3) the establishment of the experimental system sensitivity matrix, to find out the correspondence relationship between the optical system wavefront aberration of the optical element posture pupil plane is the key issue precise assembly and adjust an optical system, computeraided alignment provides an effective solution for this problem, the establishment of the system is the focus sensitivity matrix of the present invention, the specific process of establishing the sensitivity matrix is:
[0038] a.根据光学软件设计的光学系统的结构特点，合理选取待评估元件的结构参数生成补偿器组； . [0038] a structure according to the characteristics of the optical system of the optical design software, the reasonable selection of the structural parameters to be evaluated generate a compensation element group;
[0039] b.在各补偿器中人为引入失调量Λ X，分别测得与之对应的系统出瞳面波像差Ζ ； . [0039] b artificially introduced offset amount Λ X in the compensator, respectively, corresponding to the measured wavefront aberration Ζ a system pupil surface;
[0040] c.求解系统的敏感度矩阵: . [0040] c sensitivity matrix for solving the system:
[0041] [0041]
[0042] 式中，八\为人为引入的第η个预选补偿器的失调量，Azm = ZmZtl为光学系统第m个视场引入失调量前后系统出瞳面波像差Ztl与Zm之差； [0042] wherein eight \ amount of η preselected offset compensator artificially introduced, Azm = ZmZtl introduced into the system before and after the pupil plane of the offset amount of wave aberration of ZTL and Zm is the mth field of view of the optical system difference;
[0043] (4)由于像差数与系统结构数不能做到完全的一一对应，不能获得满秩矩阵J，使得后续步骤中系统失调量的获得不能通过对J求逆矩阵的方式实现，需要对J进行奇异值分解，求出J的广义逆，最终求解出系统的失调量，J的奇异值分解如下: [0043] (4) As the number of aberrations of the system structure can not be completely correspond, full rank matrix J can not be obtained, so that the offset amount of the subsequent step can not be obtained by means of the system inverse matrix J achieved, J need to singular value decomposition to determine the generalized inverse of J, finally solved the amount of misalignment of the system, singular value decomposition of J as follows:
[0044] J = UWVt (2) [0044] J = UWVt (2)
[0045] 式中矩阵U、V中的列向量Ui和Vi分别为光学系统的像差奇异值向量和结构奇异值向量，W为含有相应奇异值的对角阵，对角线上的元素Wi呈单调递减的方式排列(W1)W2)>Wn) ,W1的值表示系统对结构奇异值向量Vi的敏感度，Vi中绝对值最大的元素所处的位置η对应了第η个预选补偿器，其单位距离的调整影响最大的为Ui中绝对值最大的元素处于位置所对应的像差； [0045] wherein the matrix U, the column vectors Ui V and Vi are aberration singular vector and the structure of the optical system of the singular vectors, W is a diagonal matrix containing the singular values of the corresponding elements on the diagonal Wi was arranged in a monotonically decreasing (W1) W2) > Wn) , W1 represents the value of the singular value structure of the system sensitivity vector Vi, Vi, the maximum absolute value of the position which the elements corresponding to the first η η preselected compensator adjustment unit distance at most influential element is the maximum absolute value Ui position corresponding to aberration;
[0046] (5)测得不同时刻的系统出瞳面波像差(Α时刻与B时刻)，根据波面偏差计算失调量，并调整对应的补偿器，失调量的计算过程如下: [0046] (5) measured at different times of the system pupil plane wavefront aberration ([alpha] time and the time point B), calculated according to the amount of offset wavefront deviation, and adjusting the corresponding compensator, the offset amount calculation process is as follows:
[0047] 光学系统中元件姿态(调整自由度)与系统出瞳面波像差的对应关系可以通过函数关系Z = Z(X)描述，其中Z为系统出瞳面波像差，X为表征光学元件姿态的系统结构向量，X向量中的元素代表了各预选补偿器，计算机辅助装调的目的就是找到一个最佳的系统结构，使得I Iz(X) 11最小，这一过程与光学设计的优化过程类似，但由于Z与X为非线性关系，而且各结构分量并非完全相互独立，使得求解I Iz(X) 11最小的过程成为一个非定问题，从而产生了一个收敛迭代过程，目前最为常用的求解非定方程的算法是基于奇异值分解的牛顿迭代法，通过解算Z(X) =0实现I Iz(X) II最小。 [0047] The optical system element position (adjustment DOF) corresponding relationship between the system pupil plane that wave aberration can be Z = Z (X) is described by a function, wherein Z is a system pupil plane wavefront aberration, X is characterized by vector system configuration of an optical element posture, X represents a vector the elements of each preselected compensation, computeraided alignment of the object is to find an optimal system configuration, so that I Iz (X) 11 minimum, the optical design process similar optimization process, but the Z and X is a nonlinear relationship, and the respective structural components are not completely independent, so that solving I Iz (X) 11 becomes a minimum during nonposed problem, resulting in a convergent iterative process, the current the most common nonconstant equation solving algorithm is based on Newton iteration method of singular value decomposition, (X) = 0 realized I Iz (X) II minimum by solving Z. 为求解非定方程Z(X) =0，对其在适当的失调量附近进行泰勒Taylor展开: Solving the system of equations for the nonZ (X) = 0, Taylor, Taylor its vicinity appropriate offset amount to the development:
[0048] ζ (χ+ δ χ) = ζ (χ) +J δ χ+ O ( δ χ2) (3) [0048] ζ (χ + δ χ) = ζ (χ) + J δ χ + O (δ χ2) (3)
[0049] 其中J为系统的敏感度矩阵，在步骤(2)中计算获得，δ χ为所要求解的系统的失调量使得ζ (χ+ δ χ) = O,并忽略高阶项，则: [0049] where J is the sensitivity matrix system, obtained by calculation in step (2), the offset amount δ χ is the system to be solved such that ζ (χ + δ χ) = O, and ignore the higher order terms, the :
[0050] J δ χ = ζ (χ) (4) [0050] J δ χ = ζ (χ) (4)
[0051] 式中ζ(χ)为实测系统出瞳面波像差与优化后的系统出瞳面波像差的偏差，该方程表征了系统出瞳面波像差与结构的关系，通过求解公式(4)可以获得失调量δχ，δχ的符号代表了调整方向: [0051] where ζ (χ) out of the system and optimization of the wavefront aberration measured pupil plane of the system pupil plane of the deviation of the wavefront aberration, the equations characterizing the relationship between the wave aberration and the system pupil plane of the structure, by solving (4) the amount of offset can be obtained formula δχ, δχ characters represent the adjustment direction:
[0052] [0052]
[0053] 式中V，W，U可以通过对J的奇异值分解获得； [0053] wherein V, W, U J by singular value decomposition is obtained;
[0054] (6)测得调整后光学系统的出瞳面波像差； [0054] (6) a pupil plane of the wavefront aberration measured after adjustment of the optical system;
[0055] (J)如若调整后的系统与A时刻系统的波面偏差小于阈值,认为光机结构长期稳定性评估完成，计算获得的失调量即为对应光机结构在该时间段内的不稳定性；否则，根据调整后系统与A时刻系统的波面偏差计算失调量，调整对应的补偿器，重复步骤(6)、(7)直至调整后的系统与A时刻系统的波面偏差满足阈值为止，存储的数据中解算的失调量之和即为对应光机结构在A、B时刻间的长期不稳定性。 [0055] (J) Should the system and the wavefront A timing system deviation is less than the adjusted threshold value, the longterm stability of the optical mechanism that assessment, the offset amount calculating achieve is unstable optical mechanism corresponding to the time period sex; otherwise, calculating the offset amount in accordance with the wavefront deviation after the adjustment system and the time a system, adjusting the corresponding compensator, repeating step (6), (7) until the wavefront system a timing system adjusted deviation meet up threshold, data stored in the resolver offset is the sum of the amounts corresponding to the longterm stability of the optical mechanism between the a, B time.
[0056] 本发明具体实施方式中，可以采用实际的实验系统建立光学系统敏感度矩阵，也可以通过采用软件内的系统模型建立光学系统敏感度矩阵。 DETAILED DESCRIPTION [0056] In the present invention, an experimental system can be used to establish the actual sensitivity matrix of the optical system, the optical system can be established by using the sensitivity matrix of the system model in software.
[0057] 表1为本发明基于光学系统失调量解算的光机结构稳定性评估方法的应用效果，如下: [0057] Table 1 Effect of the present invention is applied ray structural stability evaluation method of the optical system based on the offset amount of the resolver, as follows:
[0058]表1 [0058] TABLE 1
[0060] 通过表1可以看出一次迭代解算的部分失调量已较接近双频激光干涉仪的测试结果，但由于用以验证该方法的光学系统为带中心遮拦的系统，系统波像差中的对称像差的检测重复性比其它像差的检测重复性差，最终将会导致沿Z向的失调量解算偏差较大，但根据计算机辅助装调迭代收敛的特点，可以预计随着装调迭代过程的进行，失调量多次迭代解算的结果将非常接近于双频激光干涉仪的结果，从而真实的反映光机结构在该时间段内的长期稳定性。 [0060] It can be seen in Table 1 the amount of the offset portion has a closer iterative solver results frequency laser interferometer, but because of the method for verification of the optical system with a central obscuration of the system, the wavefront aberration system the symmetric aberration detector detects repetitive reproducibility worse than other aberrations, will eventually lead to the amount of misalignment in the Z direction large deviation solver, but iterative convergence according to the computeraided alignment characteristic can be expected as the modulation means iterative process, the results of multiple offset amounts iterative solver is very close to the results of the dualfrequency laser interferometer, thereby reflecting the true optical mechanism in the longterm stability time period.
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