CN103964233A - Control method and control device for wafer transferring - Google Patents
Control method and control device for wafer transferring Download PDFInfo
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- CN103964233A CN103964233A CN201310046214.8A CN201310046214A CN103964233A CN 103964233 A CN103964233 A CN 103964233A CN 201310046214 A CN201310046214 A CN 201310046214A CN 103964233 A CN103964233 A CN 103964233A
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Abstract
The invention discloses a contro method and a control device for wafer transferring to solve the problem of wafer stacking which is caused by damage of wafers in the prior art. The device comprises a wafer transferring module, a detecting module and a controlling module. The detecting module is used for detecting whether the wafers stay in a setting position of the wafer transfrringmodule, if so, transferring the detection signal to the controlling module. The controlling module is used for receiving the detection signal and determining if the staying time of the wafers is less than the preset time threshold, if so, then controlling the wafer transfrringmodule to transfer the wafers as normal, and if not, then controlling the wafer transfrringmodule to stop transferring the wafer. By detecting the staying time of the wafer, the wafer transfrringis stopped when the staying time exceeds the preset time threshold, and accordingly the wafers are prevented from being stacked by the later wafers.
Description
Technical field
The present invention relates to semiconductor equipment and manufacture field, relate in particular to a kind of wafer transmission control method and device.
Background technology
ATRM-2000B membrane removal machine is in the process of making wafer, wafer need to be sent in unload cassette unload cassette, generally judge whether correctly wafer to be sent to unload cassette by being arranged on the wafer inspection inductor passing on sheet track, in the process transmitting toward unload cassette the inside at wafer, if wafer inspection inductor does not detect wafer, reporting to the police and Suspend Job appears in board; If wafer inspection inductor detects wafer, the belt that transmits wafer just stops transmission, when wafer enters in unload cassette, unload cassette up moves, because distance becomes far away, wafer inspection inductor has wafer to become without wafer by detection, repeats the process that wafer transmits, and there will not be abnormal.
But in wafer transport process, when having wafer breakage or other abnormal causes to cause a certain wafer can not normally be sent in unload cassette, and be mounted on wafer inductor, when unload cassette moves up, the wafer of breakage can not move with unload cassette, cause wafer inspection inductor to sense the existence of wafer, think that wafer enters in unload cassette by mistake, the firm starting of belt that transmits wafer just stops, so normal wafer just can not pass in unload cassette, rest on a position, next wafer can not reach unload cassette yet, also circulation like this of next wafer again, push and be stacked in unload cassette entrance with front a slice, thereby there is abnormal lamination phenomenon, but now sense the existence of wafer due to wafer inspection inductor, board can't be reported to the police, also can not stop operation, thereby cause damage.
Summary of the invention
The object of this invention is to provide a kind of wafer transmission control method and device, to solve in prior art when having wafer breakage on wafer inductor, the problem that board can not stop operation.
The object of the invention is to be achieved through the following technical solutions:
One aspect of the present invention provides a kind of wafer channel control unit, comprises wafer delivery module, also comprises: the detection module being connected with described wafer delivery module, and the control module being connected respectively with described wafer delivery module with described detection module, wherein,
Whether described detection module, stopped wafer for detection of the setting position at described wafer delivery module, in the time that stop has wafer, detection signal is sent to described control module;
Described control module, receive the detection signal of described control module transmission the length of the halt of definite described wafer, when time that described length of the halt does not exceed setting is when threshold values, control described wafer delivery module and normally transmit wafer, in the time that described length of the halt exceeds setting-up time threshold values, control described wafer delivery module and stop transmitting wafer.
The present invention also provides a kind of wafer transmission control method on the other hand, and the method comprises:
Detect whether stopped wafer at setting position, and determine the length of the halt of described wafer;
When time that described length of the halt does not exceed setting is when threshold values, normally transmit wafer, when time that described length of the halt exceeds setting is when threshold values, stop transmitting wafer.
Wafer transmission control method provided by the invention and device, by detecting the length of the halt of wafer, whether can judge wafer is normal transmission, when length of the halt exceeds the threshold values of setting, illustrate that wafer transmits appearance extremely, now stop transmitting wafer, can avoid follow-up wafer to be added on it, lamination occurs.
Brief description of the drawings
The wafer channel control unit formation schematic diagram that Figure 1A provides for the embodiment of the present invention;
The another formation schematic diagram of wafer channel control unit that Figure 1B provides for the embodiment of the present invention;
Fig. 2 is the wafer transfer circuit schematic diagram that includes position transduser in prior art;
Fig. 3 is the transfer circuit schematic diagram after the open contact of series relay in the embodiment of the present invention;
Fig. 4 includes the transfer circuit schematic diagram in parallel with relay normally open contact in the embodiment of the present invention;
Fig. 5 is the partial circuit diagram of implementing wafer transfer control in the embodiment of the present invention;
Fig. 6 is wafer transfer control mode realization flow schematic diagram in the embodiment of the present invention.
Detailed description of the invention
Wafer transmission control method provided by the invention, detects the length of the halt of wafer on wafer inductor; When time that length of the halt exceeds setting is when threshold values, stop transmitting wafer, can avoid the generation of lamination phenomenon in wafer transport process.
The embodiment of the present invention one provides a kind of wafer channel control unit, is the improvement to existing wafer transfer system (hereinafter to be referred as wafer delivery module 1).Wafer channel control unit in the embodiment of the present invention comprises the detection module 2 being connected with wafer delivery module 1, and the control module 3 being connected respectively with wafer delivery module 1 with detection module 2, as shown in Figure 1A.
Concrete, in the embodiment of the present invention, detection module 2 can detect at the setting position of wafer delivery module 1 whether stopped wafer, in the time that stop has wafer, has the detection signal of wafer to be sent to control module 3 stop.In the embodiment of the present invention, desired location can be to arrange according to actual needs, such as selecting often to occur the position of lamination, can also be the position that wafer inspection inductor is set.
The detection signal that control module 3 transmits according to the detection module receiving, carries out wafer transmission whether control.When control module receives detection signal, start timing, to receive the time of detection signal as the length of the halt of wafer, then according to the transmission of this length of the halt control wafer whether, when time that length of the halt does not fry setting is when threshold values, control the normal wafer that transmits of wafer delivery module 1, when time that length of the halt exceeds setting is when threshold values, control wafer delivery module 1 and stop transmitting wafer.When the time threshold values of setting in the embodiment of the present invention can normally transmit according to wafer, the needed time is set, and length of the halt exceeds the needed time of normal transmission and shows to occur abnormal, does not certainly regard it as and is limited, and also can arrange according to actual conditions.
Preferably, the control module 3 providing in the embodiment of the present invention can comprise that control signal generates submodule 31 and drives implementation sub-module 32, as shown in Figure 1B.
Described control signal generates submodule 31 and is connected with detection module 2, and receive stop that detection module 2 transmits and have the detection signal of wafer, control signal generates submodule 31 stops the initial time that receives detection signal initial time as wafer, receives the most at last the time of detection signal as the length of the halt of wafer.Control signal generates submodule 31 according to definite wafer length of the halt and the time threshold values of setting, generates low and high level signal and exports described driving implementation sub-module to.Concrete, when time that definite length of the halt does not exceed setting is when threshold values, output low level signal, when time that definite length of the halt exceeds setting is when threshold values, output high level signal.
Drive implementation sub-module 32 reception control signals to generate the low and high level control signal of submodule output, in the time receiving low level signal, control the normal wafer that transmits of wafer delivery module 1, in the time receiving high level signal, control wafer delivery module 1 and stop transmitting wafer.
The wafer channel control unit that the embodiment of the present invention provides, by detecting the length of the halt of wafer, whether can judge wafer is normal transmission, when length of the halt exceeds the threshold values of setting, illustrate that wafer transmits appearance extremely, now stop transmitting wafer, can avoid follow-up wafer to be added on it, lamination occurs.
The embodiment of the present invention two is described in detail the wafer channel control unit in embodiment mono-in connection with practical application, does not certainly regard it as and is limited.
In existing wafer delivery module 1, there is the position transduser 4 of a detection unload cassette position, as shown in Figure 2, in wafer transport process, unload cassette is in the time of normal condition, and position transduser is in closure state, when unload cassette does not put well, or while not placing unload cassette, position transduser 4 is in off-state, thereby makes whole transfer circuit in off state, stops transmitting wafer.
In the embodiment of the present invention, generate according to control signal the low and high level control signal that submodule generates and can obtain the relay 5 of electric or dead electricity driving implementation sub-module 32 to be set to one, relay 5 has individual coil, when coil has electric current to flow through, open contact can be closed, while not having electric current to flow through, open contact can disconnect, in the embodiment of the present invention, the open contact of this relay 5 can be connected with position transduser 4, when relay obtains when electric, this open contact is in closure state, the circuit of original signal delivery module 1 is not changed, can normally transmit wafer, in the time of relay 5 dead electricity, this open contact disconnects, thereby make original transfer circuit in off state, stop transmitting wafer, be illustrated in figure 3 the circuit diagram that the open contact of relay 5 is connected with position transduser 4.
Further, embodiment of the present invention repeat circuit 5 electric and dead electricity can be controlled according to the length of the halt of wafer, by relay 5 electric or dead electricity is carried out wafer transmission whether control.In the time that detection module 2 detects that in wafer delivery module 1, stop has wafer, send detection signal to control signal and generate submodule 31, control signal generation submodule 31 can be determined according to the time that receives detection signal the length of the halt of wafer, when the length of the halt of this wafer exceeds the time threshold values of setting, control signal generates submodule 31 and generates low level signal, make relay electric-loss, open contact disconnects, thereby make wafer transfer circuit in wafer delivery module 1 in off state, stop transmitting wafer.The length of the halt of wafer does not exceed the time of setting when threshold values, and control signal generates submodule 31 and generates high level signal, make relay 5 electric, open contact is in closure state, the normal wafer that transmits of wafer delivery module 1.
In the embodiment of the present invention, by an additional relay on the wafer transfer circuit of original wafer delivery module 1, by the closure and the disconnection that obtain electric or dead electricity control raw wafers transfer circuit of relay, make the control whether wafer transmits realize more simple.
More preferred, can control signal in the embodiment of the present invention generate submodule be set to one formed by 555 timers can repeated trigger monostable circuit.
Concrete, what 555 timers formed can generate low and high level signal according to energizing signal by repeated trigger monostable circuit, and can set by the resistance of potential device in circuit and the size of electric capacity the time length of low and high level pulse.Therefore, the detection signal that detection module 2 can be exported in the embodiment of the present invention as energizing signal input to can repeated trigger monostable circuit triggering input end, then carry out setting-up time threshold values by the size of adjusting potentiometer resistance and capacitance.Can determine by the time threshold values of setting the time that receives detection signal, thereby can realize the comparison between setting-up time threshold values and wafer length of the halt, can judge the time threshold values whether this length of the halt exceeds setting, and reflect with low and high level signal whether length of the halt exceeds the time threshold values of setting, and also can obtain electric or dead electricity by this low and high level signal control relay, whether transmit wafer thereby control wafer delivery module.
Further preferred, fiber amplifier and optical fiber transducer also can be set in the embodiment of the present invention in detection module 2 and whether have the detection that stops wafer.Optical fiber transducer and fiber amplifier are whether the setting position for detecting in wafer delivery module 1 exists stop wafer.Concrete, in optical fiber transducer, there are two optical fiber, an optical fiber transmission goes out utilizing emitted light, and another root is passed reflected light back.If there is no wafer, because there is no the object of reflection, just there is no reflected light; If there is wafer, light will be reflected back toward fiber amplifier through passing catoptrical optical fiber back.Whether fiber amplifier sends back reflected light according to optical fiber transducer, determines whether the setting position of wafer delivery module 1 has stopped wafer, and in the time that stop has wafer, having the detection signal of wafer to be sent to stop can repeated trigger monostable circuit.
Further preferred, in the embodiment of the present invention for the wafer inspection signal that fiber amplifier can be transmitted better be sent to can repeated trigger monostable circuit in, can transmit detection signal to before can repeated trigger monostable circuit at image amplifier, carried out light-coupled isolation, by the detection signal of fiber amplifier output after light-coupled isolation, export to can repeated trigger monostable circuit in.
Preferably, one alarm module being connected with control module also can be set in the embodiment of the present invention, also the alarm module being connected with relay 5, when the length of the halt of wafer exceeds the time threshold values of setting, when relay 5 dead electricity, send the alarm that stops transmitting wafer, certainly the alarm module of this alarm module in can preferred original wafer delivery module 1.
Further preferred, a switch 6 in parallel with the open contact of relay 5 also can be set in wafer transfer control module, as shown in Figure 4 in the embodiment of the present invention.When this switch 6 is closed, can't change original wafer transfer circuit, when switch 6 disconnects, relay 5 works, and can carry out the monitoring of wafer transmission.
In the embodiment of the present invention, can eliminate flase alarm by switch 6, for example, in the time that optical fiber transducer just detects a wafer, board is suspended operation, and wafer length of the halt herein will exceed the time threshold values of setting, thereby there will be flase alarm, at this moment just can be switch 6 closures, eliminating reports to the police and continue transmits wafer, after wafer has transmitted, switch 6 can be disconnected, make relay 5 again electric, the wafer continuing in monitor wafer delivery module 1 transmits situation.
The implementation process of the above embodiment of the present invention, can adopt the circuit shown in Fig. 5, in Fig. 5, a part realizes the signal of fiber amplifier output is carried out to light-coupled isolation for optical coupling isolation circuit, b part be form by 555 timers can repeated trigger monostable circuit, c part be by relay and switch control wafer delivery module transmission wafer whether realize circuit.Certainly the implementation of the embodiment of the present invention also can adopt other circuit to realize, and the present invention only, with this casehistory, does not regard it as and is limited.
The thought of the embodiment of the present invention three based on identical with embodiment bis-with embodiment mono-, also provides a kind of wafer transfer method, and the realization flow of the method as shown in Figure 6, comprising:
Step S601: detect wafer and whether stopped wafer at setting position, and the length of the halt of definite wafer.
Concrete, the desired location relating in the embodiment of the present invention can arrange according to actual needs, such as selecting often to occur the position of lamination, can also be the position that wafer inspection inductor is set.
Step S602: judge whether exceed the time threshold values of setting, the length of the halt obtaining according to detection carries out wafer transmission whether control if detecting the wafer length of the halt that obtains, when the time that exceeds setting is when threshold values, go to step S603, otherwise carry out step S604.
Step S603: the length of the halt obtaining when detection exceeds the time of setting when threshold values, stops transmitting wafer.
Step S604: normally transmit wafer.
Preferably, in the embodiment of the present invention, when time that length of the halt exceeds setting is when threshold values, can send alarm, and stop transmitting wafer.
Further, in the time that above-mentioned alarm is flase alarm, also can again control wafer transmission.
It should be noted that, the embodiment of the present invention three is applicable to all embodiments of wafer channel control unit in embodiment mono-and embodiment bis-, does not repeat them here.
The wafer transmission control method that the embodiment of the present invention three provides, by detecting the length of the halt of wafer, whether can judge wafer is normal transmission, when length of the halt exceeds the threshold values of setting, illustrate that wafer transmits appearance extremely, now stop transmitting wafer, can avoid follow-up wafer to be added on it, lamination occurs.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the present invention.Like this, if these amendments of the present invention and within modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.
Claims (11)
1. a wafer channel control unit, comprises wafer delivery module, it is characterized in that, this device also comprises: the detection module being connected with described wafer delivery module, and the control module being connected respectively with described wafer delivery module with described detection module, wherein,
Whether described detection module, stopped wafer for detection of the setting position at described wafer delivery module, in the time that stop has wafer, detection signal is sent to described control module;
Described control module, determine the length of the halt of described wafer according to the time that receives detection signal, when time that described length of the halt does not exceed setting is when threshold values, control described wafer delivery module and normally transmit wafer, in the time that described length of the halt exceeds setting-up time threshold values, control described wafer delivery module and stop transmitting wafer.
2. device as claimed in claim 1, is characterized in that, described control module comprises that control signal generates submodule and drives implementation sub-module, wherein,
Described control signal generates submodule, the initial time that the initial time that receives detection signal is stopped as wafer, and the length of the halt of definite wafer, generate low and high level signal and export described driving implementation sub-module to according to the time threshold values of described length of the halt and setting; Wherein, when time that described length of the halt does not exceed setting is when threshold values, output low level signal, when time that described length of the halt exceeds setting is when threshold values, output high level signal;
Drive implementation sub-module, in the time receiving low level signal, control described wafer delivery module and normally transmit wafer, in the time receiving high level signal, control described wafer delivery module and stop transmitting wafer.
3. device as claimed in claim 2, is characterized in that, described driving implementation sub-module is the relay that a low and high level signal generating according to described control signal generation submodule can obtain electric or dead electricity, wherein,
In the time receiving low level signal, described relay obtains electric, and described wafer delivery module normally transmits wafer;
In the time receiving high level signal, described relay electric-loss, described wafer delivery module stops transmitting wafer.
4. device as claimed in claim 3, is characterized in that, described control signal generate submodule be one formed by 555 timers can repeated trigger monostable circuit.
5. device as claimed in claim 4, is characterized in that, described detection module comprises fiber amplifier and optical fiber transducer, wherein,
Described optical fiber transducer, for outwards transmitting utilizing emitted light, in the time that the setting position stop of described wafer delivery module has wafer, transmits the extremely described fiber amplifier of reflected light that described wafer is reflected back;
Described fiber amplifier, for whether sending back reflected light according to described optical fiber transducer, whether the setting position of determining described wafer delivery module has stopped wafer, in the time that stop has wafer, transmit stop the detection signal that has a wafer to described can repeated trigger monostable circuit.
6. device as claimed in claim 5, is characterized in that, described control module also comprises an optical coupling isolation circuit, can repeated trigger monostable circuit described in exporting to after light-coupled isolation for the detection signal that described fiber amplifier is exported.
7. the device as described in claim 3 or 6, is characterized in that, this device also comprises the alarm module being connected with described relay, and wherein, in the time of described relay electric-loss, described alarm module sends the alarm that stops transmitting wafer.
8. device as claimed in claim 7, is characterized in that, this device also comprises a switch in parallel with the open contact of described relay, by relay described in described switch control again electric.
9. a wafer transmission control method, is characterized in that, the method comprises:
Detect whether stopped wafer at setting position, and determine the length of the halt of described wafer;
When time that described length of the halt does not exceed setting is when threshold values, normally transmit wafer, when time that described length of the halt exceeds setting is when threshold values, stop transmitting wafer.
10. method as claimed in claim 9, is characterized in that, the method also comprises:
When time that described length of the halt exceeds setting is when threshold values, send alarm, and stop transmitting wafer.
11. methods as claimed in claim 10, is characterized in that, in the time that described alarm is flase alarm, the method also comprises:
Control retransferring of wafer.
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| CN201310046214.8A CN103964233A (en) | 2013-02-05 | 2013-02-05 | Control method and control device for wafer transferring |
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| CN201310046214.8A CN103964233A (en) | 2013-02-05 | 2013-02-05 | Control method and control device for wafer transferring |
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| CN110187668A (en) * | 2019-06-03 | 2019-08-30 | 珠海格力智能装备有限公司 | Method, device and system for controlling abnormal operation state based on conveyor |
| CN112103223A (en) * | 2020-11-17 | 2020-12-18 | 晶芯成(北京)科技有限公司 | Semiconductor device and alarm method thereof |
| CN112397413A (en) * | 2019-08-15 | 2021-02-23 | 长鑫存储技术有限公司 | Semiconductor manufacturing apparatus and control method thereof |
| WO2024002008A1 (en) * | 2022-06-27 | 2024-01-04 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | System and method for monitoring moving and stepping silicon wafers |
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Application publication date: 20140806 |