CN103777617A - Upper-and-lower computer communication monitoring method - Google Patents
Upper-and-lower computer communication monitoring method Download PDFInfo
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- CN103777617A CN103777617A CN201410058349.0A CN201410058349A CN103777617A CN 103777617 A CN103777617 A CN 103777617A CN 201410058349 A CN201410058349 A CN 201410058349A CN 103777617 A CN103777617 A CN 103777617A
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Abstract
The invention relates to the monitoring technology of semiconductor devices, and discloses an upper-and-lower computer communication monitoring method. The upper-and-lower computer communication monitoring method includes the steps that S1, an upper computer sends a setting signal to a lower computer to start monitoring; S2, the lower computer sends a feedback signal to the upper computer after receiving the setting signal, conducts resetting after a first preset delay time, and meanwhile conducts resetting timing; S3, the upper computer sends a setting signal to the lower computer according to the feedback signal, conducts resetting after a second preset delay time, and meanwhile conducts resetting timing; S4 it is judged whether any resetting timing time exceeds a preset threshold value or not, and executing the step S2 if no resetting timing time exceeds the preset threshold value, and the upper computer or the lower computer correspondingly gives out an alarm signal if any resetting timing time exceeds the preset threshold value.
Description
Technical field
The present invention relates to the monitoring technical field of semiconductor production equipment, particularly upper and lower computer communication monitoring technique.
Background technology
Vertical oxidation equipment is indispensable in semiconductor production industry, and its reliability and stability are had relatively high expectations.The technique failure causing because of Equipment is lost millions of up to ten million easily, has the leakage of some process gass also may threaten the security of the lives and property.So the details of any potentially unstable of equipment all should draw attention, wherein for the process disruption causing because of the problem producing in host computer and slave computer communication, if find that processing is proper in time, likely can save millions of economic losses and the security of the lives and property.
The method that at present partial domestic equipment adopts simple host computer to carry out set to slave computer relay, and being resetted with the time interval that is greater than set cycle by slave computer, if resetted successfully, thinks communicating interrupt.When communicating interrupt occurs, only process accordingly for slave computer, and host computer cannot obtain the information of communicating interrupt, thereby can not take any emergency measures, also feed back to the total activation of whole semiconductor production line without any information.
For example Chinese patent CN200620022731.7 discloses a kind of device for monitoring communication condition of sensor, has single-chip microcomputer, signal output apparatus, testing circuit, control circuit and display circuit.This device can real time monitoring communication line communication state, at the scene by communication cable normal, open circuit, the duty such as short circuit shows by pilot lamp, so that field personnel can understand the communication state between sensor and monitoring station immediately.When communicating interrupt occurs, this device is only processed accordingly for communication cable, and monitoring station cannot obtain the information of communicating interrupt, thereby can not take any emergency measures.
And at document " the whether normal straightforward procedure of a kind of PLC of detection network communication " (2012) although in the Communication Monitoring method explained easier, but just for one detecting just now communication abnormality in upper and lower computer, certainly to extremely processing and respond also just a wherein side.
Therefore, in semiconductor production equipment, need a kind of new upper and lower computer communication method for supervising, can make upper and lower computer interactive in Communication Monitoring, and upper and lower computer has response to communication abnormality.
Summary of the invention
The object of the invention is to, one upper and lower computer communication method for supervising is provided, increase the interaction of upper and lower computer in Communication Monitoring, upper and lower computer has response to communication abnormality simultaneously, only can solve in existing communication monitoring for upper and lower computer wherein a side detect, to extremely processing and only responding also for a side problem wherein.
To achieve these goals, the invention provides a upper and lower computer communication method for supervising, comprise step: S1, host computer send asserts signal to slave computer, start monitoring; S2, slave computer send feedback signal to host computer after receiving described asserts signal, and at the first default laggard horizontal reset of time delay, timing resets simultaneously; S3, host computer send asserts signal according to described feedback signal to slave computer, and at the second default laggard horizontal reset of time delay, timing resets simultaneously; S4, judge whether that arbitrary reset timing time exceedes predetermined threshold value, if having corresponding host computer or slave computer send alerting signal, if without returning to execution step S2.
As selectable technical scheme, described predetermined threshold value is the time that host computer sends adjacent twice asserts signal, or slave computer sends the time of adjacent twice feedback signal; It is identical with the time that slave computer sends adjacent twice feedback signal that host computer sends the time of adjacent twice asserts signal.
As selectable technical scheme, the time that the described first default time delay is greater than host computer sends adjacent twice asserts signal, the time that the described second default time delay is greater than slave computer sends adjacent twice feedback signal.Further, the described first default delay time is identical with the described second default delay time.
As selectable technical scheme, described host computer sends asserts signal to a certain relay of slave computer, and described relay is preset the laggard horizontal reset of time delay first after receiving asserts signal, and timing resets simultaneously.Further, when described relay exceedes described predetermined threshold value reset time, slave computer sends alerting signal.
As selectable technical scheme, described slave computer sends feedback signal to a certain passage of host computer, and described passage is preset the laggard horizontal reset of time delay second after receiving feedback signal, and timing resets simultaneously.Further, while exceeding described predetermined threshold value, host computer sends alerting signal the described channel reset time.
As selectable technical scheme, described slave computer sends feedback signal in the mode of the described passage data writing to host computer after receiving described asserts signal.
The invention has the advantages that, by the periodic set of upper and lower computer, reset, for upper and lower computer provides the Communication Monitoring of a kind of " half-duplex ", simplify the information interacting method of upper and lower computer, increase the interaction of upper and lower computer in Communication Monitoring, increase the reliability of monitoring, improve the reliability that communication failure is reported to the police; Upper and lower computer has response to communication abnormality simultaneously, can after communication failure occurs, distinguish upper and lower computer and process, and is conducive to the disposal route of Improving Equipment system to communication abnormality.
Accompanying drawing explanation
Fig. 1 is upper and lower computer communication method for supervising flow chart of steps provided by the invention;
Fig. 2 is communication monitoring schematic diagram in upper and lower computer communication method for supervising provided by the invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing, embodiments of the present invention are described in further detail.Those skilled in the art can understand other advantages of the present invention and effect easily by the disclosed content of this instructions.The present invention can also be implemented or be applied by other different embodiment, and the every details in this instructions also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present invention.
Fig. 1 is upper and lower computer communication method for supervising flow chart of steps provided by the invention.
As shown in Figure 1, the upper and lower computer communication method for supervising that this embodiment provides comprises step:
Step S1: host computer sends asserts signal to slave computer, starts monitoring.
In this step, after semiconductor production equipment powers on and starts working, first host computer sends asserts signal to slave computer, starts monitoring.
As preferred forms, host computer sends asserts signal to a certain relay of slave computer.Just trigger take the signal of slave computer feedback as trigger condition afterwards, thereby periodically send asserts signal to slave computer relay.
Step S2: slave computer sends feedback signal to host computer after receiving described asserts signal, and at the first default laggard horizontal reset of time delay, timing resets simultaneously.
In this step, slave computer receives after the asserts signal of host computer transmission, after being set, and in an identical manner, sends feedback signal to host computer.As preferred forms, slave computer sends feedback signal to a certain passage of host computer, that is: slave computer is to a certain passage data writing of host computer, thereby by this passage set.
In addition, in this step, send after feedback signal to host computer at slave computer, after the first default time delay, the relay being set is resetted, and this first default delay time is greater than host computer by the slave computer relay set cycle time, the time that is also greater than host computer and sends adjacent twice asserts signal.Relay resets and starts the timing that resets simultaneously; In the normal situation of upper and lower computer communication, this reset timing sends asserts signal and interrupts during by corresponding relay set to slave computer again at host computer, also, and the time that reset timing time should be less than host computer and sends adjacent twice asserts signal; If upper and lower computer communication occurs abnormal, for example host computer does not send asserts signal or slave computer relay cannot be set, and this reset timing continues always; If when reset timing time exceedes predetermined threshold value, slave computer produces alerting signal.Described predetermined threshold value can be sent for host computer the time of adjacent twice asserts signal.
Step S3: host computer sends asserts signal according to described feedback signal to slave computer, and after the second default time delay to receive the timing that resets that resets of the passage of feedback signal simultaneously.
In this step, a certain passage of host computer is received the feedback signal that slave computer sends, and this passage is set, and triggers again the transmission of asserts signal simultaneously.After the second default time delay, host computer is by the channel reset being set, channel reset starts the timing that resets simultaneously, and this second default delay time is greater than the cycle length of slave computer to this passage data writing, the time that is also greater than slave computer and sends adjacent twice feedback signal.Similar with the reset timing of slave computer, in upper and lower computer communication under normal circumstances, this reset timing should be interrupted during again to this passage data writing at slave computer, also, and the time that reset timing time should be less than slave computer and sends adjacent twice feedback signal; Abnormal if upper and lower computer communication occurs, for example slave computer does not send that feedback signal or this channel communications interrupt cannot data writing, and this reset timing continues always; If when reset timing time exceedes predetermined threshold value, host computer produces alerting signal.Described predetermined threshold value can be sent for slave computer the time of adjacent twice feedback signal.
Step S4: judged whether that arbitrary reset timing time exceedes predetermined threshold value, if without returning to execution step S2; Otherwise execution step S5.
In this step, the process of upper and lower computer communication monitoring is equivalent to upper and lower computer in course of normal operation, and the reset timing of upper and lower computer always can be by corresponding asserts signal or feedback signal data writing operation disruption; If any one reset timing is continuing exceeding after predetermined threshold value still, prove no matter be because the reason of host computer or the reason of slave computer have caused communicating interrupt.Once communicating interrupt, corresponding up/down position machine will send alerting signal; Because a side is interrupted, cannot send asserts signal or feedback signal to the opposing party, the opposing party also can send alerting signal after reset timing time exceedes predetermined threshold value simultaneously; Once also communicating interrupt upper and lower computer all can go out alerting signal.Only, in the time that reset timing time does not exceed predetermined threshold value, go back to execution step S2, thereby periodically monitor procedure is carried out down.
As preferred forms, it is identical with the time that slave computer sends adjacent twice feedback signal that host computer sends the time of adjacent twice asserts signal; The described first default delay time is identical with the described second default delay time.
Step S5: corresponding host computer or slave computer send alerting signal.
In this step, in the time that communication occurs to interrupt, corresponding up/down position machine will send alerting signal, and the opposing party also can send alerting signal after reset timing time exceedes predetermined threshold value, be conducive to improve the disposal route in communicating interrupt situation, as give the alarm, the processing such as feedback information, disconnection process gas, the control of slave computer temperature, significant data record.
Fig. 2 is the communication monitoring schematic diagram of upper and lower computer communication method for supervising provided by the invention.
As shown in Figure 2, after semiconductor production equipment powers on and starts working, first host computer sends asserts signal to slave computer one relay, and (trigger take the signal of slave computer feedback as trigger condition, be t) cycle length later; The corresponding relay of slave computer is set and carries out timing reset operation simultaneously, also will be set relay through the certain time-delay time interval and reset, and this delay time interval is greater than host computer by slave computer relay set cycle t; Exceed certain hour (also illustrating " resetting successfully ") if this relay is reset, slave computer produces and reports to the police.
Slave computer can be to host computer one passage value of writing (also sending feedback signal to host computer) after receiving the asserts signal of host computer, and it writes the phase on weekly duty is also t; The respective channel of host computer is carried out timing reset operation by the value of writing (being also set) simultaneously, is also that host computer ceaselessly resets with the time interval that is greater than set cycle t to this passage; Exceed certain hour once this passage is reset, host computer produces and reports to the police.
In sum, upper and lower computer carries out periodically mutual in course of normal operation, once no matter communicating interrupt is that upper and lower computer will all can cause warning because the reason of host computer or the reason of slave computer have caused communicating interrupt, be conducive to improve the disposal route in communicating interrupt situation, as give the alarm, feedback information, disconnects process gas, the control of slave computer temperature, the processing such as significant data record.
The upper and lower computer method for supervising that this embodiment provides, by the periodic set of upper and lower computer, reset, for host computer and slave computer provide the Communication Monitoring of a kind of " half-duplex ", simplify the information interacting method of upper and lower computer, increase the interaction of upper and lower computer in Communication Monitoring, increase the reliability of monitoring, improve the reliability that communication failure is reported to the police; Upper and lower computer has response to communication abnormality simultaneously, can after communication failure occurs, distinguish upper and lower computer and process, and is conducive to the disposal route of Improving Equipment system to communication abnormality.
Although pass through with reference to some of the preferred embodiment of the invention, the present invention is illustrated and described, but those of ordinary skill in the art should be understood that and can do various changes to it in the form and details, and without departing from the spirit and scope of the present invention.
Claims (10)
1. a upper and lower computer communication method for supervising, comprises step:
S1: host computer sends asserts signal to slave computer, starts monitoring;
S2: slave computer sends feedback signal to host computer after receiving described asserts signal, and at the first default laggard horizontal reset of time delay, timing resets simultaneously;
S3: host computer sends asserts signal according to described feedback signal to slave computer, and at the second default laggard horizontal reset of time delay, timing resets simultaneously;
S4: judged whether that arbitrary reset timing time exceedes predetermined threshold value, if having corresponding host computer or slave computer send alerting signal, if without returning to execution step S2.
2. upper and lower computer communication method for supervising according to claim 1, is characterized in that, described predetermined threshold value is the time that host computer sends adjacent twice asserts signal, or slave computer sends the time of adjacent twice feedback signal.
3. upper and lower computer communication method for supervising according to claim 1, it is characterized in that, the time that the described first default time delay is greater than host computer sends adjacent twice asserts signal, the time that the described second default time delay is greater than slave computer sends adjacent twice feedback signal.
4. upper and lower computer communication method for supervising according to claim 1, is characterized in that, it is identical with the time that slave computer sends adjacent twice feedback signal that host computer sends the time of adjacent twice asserts signal.
5. according to the upper and lower computer communication method for supervising described in claim 1 or 3, it is characterized in that, the described first default delay time is identical with the described second default delay time.
6. upper and lower computer communication method for supervising according to claim 1, it is characterized in that, described host computer sends asserts signal to a certain relay of slave computer, and described relay is preset the laggard horizontal reset of time delay first after receiving asserts signal, and timing resets simultaneously.
7. upper and lower computer communication method for supervising according to claim 6, is characterized in that, when described relay exceedes described predetermined threshold value reset time, slave computer sends alerting signal.
8. upper and lower computer communication method for supervising according to claim 1, it is characterized in that, described slave computer sends feedback signal to a certain passage of host computer, and described passage is preset the laggard horizontal reset of time delay second after receiving feedback signal, and timing resets simultaneously.
9. upper and lower computer communication method for supervising according to claim 8, is characterized in that, the described channel reset time, while exceeding described predetermined threshold value, host computer sent alerting signal.
10. upper and lower computer communication method for supervising according to claim 1, is characterized in that, described slave computer sends feedback signal in the mode of the described passage data writing to host computer after receiving described asserts signal.
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| CN201410058349.0A CN103777617B (en) | 2014-02-20 | 2014-02-20 | Upper and lower computer communication monitoring method |
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| WO2016127830A1 (en) * | 2015-02-11 | 2016-08-18 | 深圳配天智能技术研究院有限公司 | Industrial robot safety control system, backup safety circuit, and safety module |
| CN106444620A (en) * | 2016-12-08 | 2017-02-22 | 中国石油天然气集团公司 | Method for monitoring oil-gas pipeline SCADA system data communication on-off |
| CN106597979A (en) * | 2016-12-08 | 2017-04-26 | 中国石油天然气集团公司 | Oil and gas pipeline SCADA (supervisory control and data acquisition) system data communication on-off real-time monitoring method |
| CN111176170A (en) * | 2019-12-31 | 2020-05-19 | 北京北方华创微电子装备有限公司 | Starting method and device of semiconductor equipment control system |
| CN112415946A (en) * | 2020-12-01 | 2021-02-26 | 华能鹤岗发电有限公司 | Method and device for monitoring communication state of PLC (programmable logic controller) lower computer |
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| CN112415946A (en) * | 2020-12-01 | 2021-02-26 | 华能鹤岗发电有限公司 | Method and device for monitoring communication state of PLC (programmable logic controller) lower computer |
| CN112415946B (en) * | 2020-12-01 | 2022-07-29 | 华能鹤岗发电有限公司 | Method and device for monitoring communication state of PLC (programmable logic controller) lower computer |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180105 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
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