CN103777617B - Upper and lower computer communication monitoring method - Google Patents
Upper and lower computer communication monitoring method Download PDFInfo
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- CN103777617B CN103777617B CN201410058349.0A CN201410058349A CN103777617B CN 103777617 B CN103777617 B CN 103777617B CN 201410058349 A CN201410058349 A CN 201410058349A CN 103777617 B CN103777617 B CN 103777617B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The present invention relates to semiconductor equipment monitoring technology, disclose a upper and lower computer communication monitoring method, step includes: S1, host computer send set signal to slave computer, starts monitoring；S2, slave computer send feedback signal to host computer after receiving described set signal, and preset the laggard horizontal reset of time delay first, carry out reset timing simultaneously；S3, host computer send set signal according to described feedback signal to slave computer, and preset the laggard horizontal reset of time delay second, carry out reset timing simultaneously；S4, determine whether that arbitrary reset timing time exceedes predetermined threshold value, if without, return and perform step S2, if having arbitrary reset timing time to exceed predetermined threshold value, then corresponding host computer or slave computer send alarm signal.
Description
Technical field
The present invention relates to the monitoring technical field of semiconductor production equipment, lead to particularly to upper and lower computer
News monitoring technology.
Background technology
Vertical oxidation equipment is indispensable in semiconductor production industry, to its reliability and stability
Require higher.The technique failure caused because of Equipment is lost millions of up to ten million easily, has
The leakage of process gas is also possible to threaten the security of the lives and property.So any potentially unstable of equipment
Details all should draw attention, wherein for because generation is asked in host computer and slave computer communication
The process disruption inscribed and cause, if it find that process proper in time, it is possible to can save millions of meter
Economic loss and the security of the lives and property.
Partial domestic equipment uses simple host computer to carry out set to slave computer relay at present
Method, and resetted with the time interval more than set cycle by slave computer, if reset to
Merit, then it is assumed that communicating interrupt.When communicating interrupt occurs, locate accordingly only for slave computer
Reason, and host computer cannot obtain the information of communicating interrupt, from without taking any stringent effort,
Any information is not had to feed back to the total activation of whole semiconductor production line yet.
Such as Chinese patent CN200620022731.7 discloses a kind of communication condition of sensor monitoring
Device, has single-chip microcomputer, signal output apparatus, testing circuit, control circuit and display circuit.
This device can monitor the communication state of communication line in real time, at the scene by communication cable normal,
The duty such as open circuit, short circuit is shown by display lamp, in order to field personnel can be instant
Understand the communication state between sensor and monitoring station.Communicating interrupt occur time, this device only for
Communication cable processes accordingly, and monitoring station cannot obtain the information of communicating interrupt, thus not
Any stringent effort can be taked.
And in document " a kind of detect the straightforward procedure that whether normal PLC network communication is " (2012)
Although middle stated Communication Monitoring method comparison is easy, but just for a side in upper and lower computer
Just can detect communication abnormality, certainly process abnormal and respond an also wherein side.
Therefore, in semiconductor production equipment, need a kind of new upper and lower computer communication monitoring side
Method, it is possible to make upper and lower computer interactive in Communication Monitoring, and upper and lower computer has sound to communication abnormality
Should.
Summary of the invention
It is an object of the invention to, it is provided that a upper and lower computer communication monitoring method, increase upper and lower computer
Interaction in Communication Monitoring, upper and lower computer has response to communication abnormality simultaneously, it is possible to solve existing
Have in communication monitoring and detect only for a upper and lower computer wherein side, process abnormal and ring
Should be also just for the problem of a wherein side.
To achieve these goals, the invention provides a upper and lower computer communication monitoring method, including
Step: S1, host computer send set signal to slave computer, start monitoring；S2, slave computer receive
Send feedback signal to host computer after described set signal, and carry out after presetting time delay first multiple
Position, carries out reset timing simultaneously；S3, host computer are sent out to slave computer again according to described feedback signal
Send set signal, and preset the laggard horizontal reset of time delay second, carry out reset timing simultaneously；S4、
Determine whether that arbitrary reset timing time exceedes predetermined threshold value, if having, corresponding host computer or bottom
Machine sends alarm signal, if without, return and perform step S2.
Alternatively, described predetermined threshold value is that host computer sends adjacent twice set
The time of signal, or slave computer sends the time of adjacent twice feedback signal；Host computer sends adjacent
The time that the time of twice set signal sends adjacent twice feedback signal with slave computer is identical.
Alternatively, described first preset time delay and send adjacent two more than host computer
The time of secondary set signal, described second presets time delay sends adjacent twice feedback letter more than slave computer
Number time.Further, described first preset delay time and described second and preset delay time
Identical.
Alternatively, described host computer sends to a certain relay of slave computer and puts
Position signal, described relay presets the laggard horizontal reset of time delay first after receiving set signal, same
Shi Jinhang reset timing.Further, described relay exceedes described predetermined threshold value resetting time
Time, slave computer sends alarm signal.
Alternatively, described slave computer sends feedback to a certain passage of host computer
Signal, presets the laggard horizontal reset of time delay second after described channel reception to feedback signal, enters simultaneously
Horizontal reset timing.Further, when the described channel reset time exceedes described predetermined threshold value, upper
Machine sends alarm signal.
Alternatively, with to upper after described slave computer receives described set signal
The mode of the described passage write data of machine sends feedback signal.
It is an advantage of the current invention that by the periodic set of upper and lower computer, reset, for upper bottom
Machine provides the Communication Monitoring of a kind of " half-duplex ", simplifies the information interacting method of upper and lower computer,
Increase upper and lower computer interaction in Communication Monitoring, increase the reliability of monitoring, improve communication failure
The reliability reported to the police；Upper and lower computer has response to communication abnormality simultaneously, can send out at communication failure
Distinguish upper and lower computer after life to process, the beneficially Improving Equipment system process side to communication abnormality
Method.
Accompanying drawing explanation
The upper and lower computer communication monitoring method step flow chart that Fig. 1 provides for the present invention；
Communication monitoring schematic diagram in the upper and lower computer communication monitoring method that Fig. 2 provides for the present invention.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing pair
Embodiments of the present invention are described in further detail.Those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through
The most different detailed description of the invention is carried out or applies, and the every details in this specification also may be used
With based on different viewpoints and application, under the spirit without departing from the present invention, carry out various modification or change
Become.
The upper and lower computer communication monitoring method step flow chart that Fig. 1 provides for the present invention.
As it is shown in figure 1, the upper and lower computer communication monitoring method that this detailed description of the invention provides includes step
Rapid:
Step S1: host computer sends set signal to slave computer, starts monitoring.
In this step, after semiconductor production equipment powers on and starts working, host computer is first to bottom
Machine sends set signal, starts monitoring.
As preferred forms, host computer sends set signal to a certain relay of slave computer.
The most just the signal with slave computer feedback triggers for trigger condition, thus periodically to bottom
Machine relay sends set signal.
Step S2: slave computer sends feedback signal to host computer after receiving described set signal, and
Preset the laggard horizontal reset of time delay first, carry out reset timing simultaneously.
In this step, after slave computer receives the set signal that host computer sends, after being set, and
In an identical manner, feedback signal is sent to host computer.As preferred forms, slave computer to
The a certain passage of host computer sends feedback signal, it may be assumed that slave computer writes to a certain passage of host computer
Data, thus by this passage set.
Additionally, in this step, at slave computer after host computer sends feedback signal, pre-through first
If the relay that be set being resetted after time delay, and this first preset delay time will more than host computer
Slave computer relay set cycle time, namely send adjacent twice set signal more than host computer
Time.Relay resets to start simultaneously at and carries out reset timing；The normal situation of upper and lower computer communication
Under, this reset timing sends set signal and by corresponding relay to slave computer again at host computer
Interrupt during device set, that is, reset timing time should be less than host computer sends adjacent twice set letter
Number time；If upper and lower computer communication occurs abnormal, such as host computer do not send set signal or
Person's slave computer relay cannot be set, then this reset timing is continued for；If reset timing time
When exceeding predetermined threshold value, then slave computer produces alarm signal.Described predetermined threshold value can be host computer
Send the time of adjacent twice set signal.
Step S3: host computer according to described feedback signal to slave computer send set signal, and
Second preset time delay after the passage receiving feedback signal resetted carry out reset timing simultaneously.
In this step, a certain passage of host computer receives the feedback signal that slave computer sends, this passage
It is set, triggers the transmission of set signal again simultaneously.Host computer after second presets time delay
The channel reset that will be set, channel reset starts simultaneously at and carries out reset timing, and this second preset
Delay time is greater than slave computer and writes the cycle time of data to this passage, namely more than slave computer
Send the time of adjacent twice feedback signal.Reset timing with slave computer is similar, at upper and lower computer
Under normal circumstances, this reset timing should be when slave computer writes data to this passage again in communication
Interrupt, that is, reset timing time should be less than slave computer send adjacent twice feedback signal time
Between；If upper and lower computer communication occurs abnormal, such as slave computer does not send feedback signal or this leads to
Road communicating interrupt cannot write data, then this reset timing is continued for；If reset timing time surpasses
When crossing predetermined threshold value, then host computer produces alarm signal.Described predetermined threshold value can be that slave computer is sent out
Go out the time of adjacent twice feedback signal.
Step S4: determine whether that arbitrary reset timing time exceedes predetermined threshold value, if without, return
Receipt row step S2；Otherwise perform step S5.
In this step, the process of upper and lower computer communication monitoring is equivalent to upper and lower computer the most worked
Cheng Zhong, the reset timing of upper and lower computer can be write number by corresponding set signal or feedback signal always
According to operation disruption；If any one reset timing is still continuing after exceeding predetermined threshold value, then demonstrate,prove
Bright either because the reason of the reason of host computer or slave computer result in communicating interrupt.Once
Communicating interrupt then corresponding up/down position machine will send alarm signal；Simultaneously because a side is interrupted, it is impossible to
Send set signal or feedback signal to the opposing party, then the opposing party exceedes default at reset timing time
Also alarm signal can be sent after threshold value；Namely once communicating interrupt upper and lower computer all can go out alarm signal
Number.Only when reset timing time is not above predetermined threshold value, go back to perform step S2, from
And periodically perform down by monitoring process.
As preferred forms, host computer sends time and the slave computer of adjacent twice set signal
The time sending adjacent twice feedback signal is identical；Described first presets delay time and described second
Preset delay time identical.
Step S5: corresponding host computer or slave computer send alarm signal.
In this step, when communication occurs to interrupt, corresponding up/down position machine will send alarm signal, and
The opposing party also can send alarm signal after reset timing time exceedes predetermined threshold value, the most perfect
Processing method in the case of communicating interrupt, as send alarm, feedback information, disconnection process gas,
The control of slave computer temperature, significant data record etc. process.
The communication monitoring schematic diagram of the upper and lower computer communication monitoring method that Fig. 2 provides for the present invention.
As in figure 2 it is shown, semiconductor production equipment powers on after starting working, host computer is first to bottom
Machine one relay sends set signal, and (the most then the signal with slave computer feedback is carried out for trigger condition
Triggering, cycle time is t)；The corresponding relay of slave computer is set and is timed reset behaviour simultaneously
Make, namely relay reset will be set through certain time-delay time interval, and between this delay time
Every more than host computer by slave computer relay set cycle t；If this relay is reset more than one
Fix time (namely diagram " resetting successfully "), then slave computer produces and reports to the police.
Slave computer can write value (namely upwards to host computer one passage after receiving the set signal of host computer
Position machine sends feedback signal), it writes the phase on weekly duty also for t；The respective channel of host computer is write value (also
I.e. be set) be timed simultaneously reset operation, namely host computer to this passage ceaselessly to be more than
The time interval of set cycle t resets；Once this passage is reset and exceedes certain time, then
Host computer produces reports to the police.
In sum, upper and lower computer carries out the most mutual in course of normal operation, once leads to
News are interrupted, either because the reason of the reason of host computer or slave computer result in communication
Disconnected, then upper and lower computer all will can cause warning, be conducive to improving the process side in the case of communicating interrupt
Method, as sent alarm, feedback information, disconnect process gas, slave computer temperature controls, important number
Process according to record etc..
The upper and lower computer monitoring method that this detailed description of the invention provides, periodic by upper and lower computer
Set, reset, provide the Communication Monitoring of a kind of " half-duplex ", letter for host computer and slave computer
Change the information interacting method of upper and lower computer, increase upper and lower computer interaction in Communication Monitoring, increase
The reliability of monitoring, improves the reliability that communication failure is reported to the police；Upper and lower computer is to communication abnormality simultaneously
There is response, upper and lower computer can be distinguished after communication failure occurs and process, the most perfect
The device systems processing method to communication abnormality.
Although by referring to some of the preferred embodiment of the invention, the present invention being schemed
Show and describe, but it will be understood by those skilled in the art that can be in the form and details
To it, various changes can be made, without departing from the spirit and scope of the present invention.
Claims (10)
1. a upper and lower computer communication monitoring method, including step:
S1: host computer sends set signal to slave computer, starts monitoring；
S2: slave computer sends feedback signal to host computer after receiving described set signal, and presets first
The laggard horizontal reset of time delay, carries out reset timing simultaneously；
S3: host computer sends set signal to slave computer again according to described feedback signal, and pre-second
If the laggard horizontal reset of time delay, carry out reset timing simultaneously；
S4: determine whether that arbitrary reset timing time exceedes predetermined threshold value, if having, corresponding host computer or
Slave computer sends alarm signal, if without, return and perform step S2.
Upper and lower computer communication the most according to claim 1 monitoring method, it is characterised in that described
Predetermined threshold value is the time that host computer sends adjacent twice set signal, or slave computer send adjacent twice anti-
The time of feedback signal.
Upper and lower computer communication the most according to claim 1 monitoring method, it is characterised in that described
First presets time delay sends time of adjacent twice set signal more than host computer, and described second presets and prolong
Time send time of adjacent twice feedback signal more than slave computer.
Upper and lower computer communication the most according to claim 1 monitoring method, it is characterised in that upper
Machine sends the time of adjacent twice set signal and sends the time phase of adjacent twice feedback signal with slave computer
With.
5. monitor method according to the upper and lower computer communication described in claim 1 or 3, it is characterised in that
Described first presets delay time, and to preset delay time with described second identical.
Upper and lower computer communication the most according to claim 1 monitoring method, it is characterised in that described
Host computer sends set signal to a certain relay of slave computer, after described relay receives set signal
Preset the laggard horizontal reset of time delay first, carry out reset timing simultaneously.
Upper and lower computer communication the most according to claim 6 monitoring method, it is characterised in that described
When relay exceedes described predetermined threshold value resetting time, slave computer sends alarm signal.
Upper and lower computer communication the most according to claim 1 monitoring method, it is characterised in that described
Slave computer sends feedback signal to a certain passage of host computer, the after described channel reception to feedback signal
Two preset the laggard horizontal reset of time delay, carry out reset timing simultaneously.
Upper and lower computer communication the most according to claim 8 monitoring method, it is characterised in that described
When the channel reset time exceedes described predetermined threshold value, host computer sends alarm signal.
Upper and lower computer communication the most according to claim 8 monitoring method, it is characterised in that described
Slave computer is anti-to send in the way of the described passage of host computer write data after receiving described set signal
Feedback signal.
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| CN201410058349.0A CN103777617B (en) | 2014-02-20 | 2014-02-20 | Upper and lower computer communication monitoring method |
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| CN201410058349.0A CN103777617B (en) | 2014-02-20 | 2014-02-20 | Upper and lower computer communication monitoring method |
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| CN103777617B true CN103777617B (en) | 2016-10-19 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104777805B (en) | 2015-02-11 | 2017-12-15 | 北京配天技术有限公司 | A kind of industrial robot safety control system and backup safety circuit, security module |
| CN106444620A (en) * | 2016-12-08 | 2017-02-22 | 中国石油天然气集团公司 | Method for monitoring oil-gas pipeline SCADA system data communication on-off |
| CN106597979A (en) * | 2016-12-08 | 2017-04-26 | 中国石油天然气集团公司 | Oil and gas pipeline SCADA (supervisory control and data acquisition) system data communication on-off real-time monitoring method |
| CN111176170B (en) * | 2019-12-31 | 2021-07-09 | 北京北方华创微电子装备有限公司 | Starting method and device of semiconductor equipment control system |
| CN112415946B (en) * | 2020-12-01 | 2022-07-29 | 华能鹤岗发电有限公司 | Method and device for monitoring communication state of PLC (programmable logic controller) lower computer |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6788989B2 (en) * | 2001-05-09 | 2004-09-07 | Fuji Machine Mfg. Co., Ltd. | Electric-circuit board assembling line, electric-circuit board producing method and electric-circuit board assembling line controlling program |
| US7895385B2 (en) * | 2008-12-09 | 2011-02-22 | Nvidia Corporation | Establishing communication over serial buses in a slave device |
| KR20120136477A (en) * | 2011-06-09 | 2012-12-20 | 전동욱 | Data transmitting/receiving system using local wireless communication of terminals and method thereof |
| CN202748417U (en) * | 2012-07-11 | 2013-02-20 | 华锐风电科技(集团)股份有限公司 | Parameter monitoring system of frequency converter in wind generating set |
| CN103092802A (en) * | 2013-02-07 | 2013-05-08 | 飞天诚信科技股份有限公司 | Method of communication of card reader and upper computer |
-
2014
- 2014-02-20 CN CN201410058349.0A patent/CN103777617B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6788989B2 (en) * | 2001-05-09 | 2004-09-07 | Fuji Machine Mfg. Co., Ltd. | Electric-circuit board assembling line, electric-circuit board producing method and electric-circuit board assembling line controlling program |
| US7895385B2 (en) * | 2008-12-09 | 2011-02-22 | Nvidia Corporation | Establishing communication over serial buses in a slave device |
| KR20120136477A (en) * | 2011-06-09 | 2012-12-20 | 전동욱 | Data transmitting/receiving system using local wireless communication of terminals and method thereof |
| CN202748417U (en) * | 2012-07-11 | 2013-02-20 | 华锐风电科技(集团)股份有限公司 | Parameter monitoring system of frequency converter in wind generating set |
| CN103092802A (en) * | 2013-02-07 | 2013-05-08 | 飞天诚信科技股份有限公司 | Method of communication of card reader and upper computer |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180105 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |