CN103956311A - Charged particle beam trajectory control device - Google Patents
Charged particle beam trajectory control device Download PDFInfo
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- CN103956311A CN103956311A CN201410210102.6A CN201410210102A CN103956311A CN 103956311 A CN103956311 A CN 103956311A CN 201410210102 A CN201410210102 A CN 201410210102A CN 103956311 A CN103956311 A CN 103956311A
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- 239000002245 particle Substances 0.000 title claims abstract description 46
- 238000009413 insulation Methods 0.000 claims description 32
- 229910052755 nonmetal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000001269 time-of-flight mass spectrometry Methods 0.000 description 1
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Abstract
The invention provides a charged particle beam trajectory control device and relates to an electronic ion optical device. The charged particle beam trajectory control device is provided with an electrode fixing plate, an upper insulating plate, a lower insulating plate, an upper electrode plate array, a lower electrode plate array and a voltage divider resistor. The upper insulating plate and the lower insulating plate are respectively fixed on the upper and lower faces of the electrode fixing plate and specularly and symmetrically installed. The upper electrode plate array and the lower electrode plate array on the upper insulating plate and the lower insulating plate in the charged particle flying direction form two rows of electrode plates which are distributed and arranged at intervals. The electrode plates on the upper electrode plate array and the lower electrode plate array have different potentials through voltage dividing of the voltage divider resistor. The charged particle beam trajectory control device is not influenced by the charged particle positions, and charged particles spacing the electrode plates for different distances deflect at the same angle. The charged particles reach to designated positions according to predetermined trajectories by adjusting appropriate electric parameters. The angular divergence problem of a charged particle beam is solved fundamentally.
Description
Technical field
The present invention relates to electronic and ionic optical device, especially relate to a kind of charged particle beam track control device.
Background technology
Electronic and ionic optical system, be a kind of control electronics and ion at elect magnetic field motion and electronics, ion beam the device in elect magnetic field focusing, imaging, deflection.Its theoretical foundation is: charged particle can be subject to the effect of Coulomb force (in electric field) and Lorentz force at elect magnetic field, produces and is similar to the effect of engineering optics system, realizes focusing to charged particle, disperses and direction control.Electronics and ion-optic system are widely used in many ambits such as radioelectronics, electronics and ion micrology, mass-spectrometry, solid-state physics and surface physics, material science, high energy acclerator physics and plasma physics.Common electronic and ionic optics has electron-beam tube and picture tube etc., and common electronic and ionic optical electronic equipment has mass spectrometer, energy disperse spectroscopy, electron microscope etc.
Conventionally use two parallel metal sheets staggered relatively to the control of Charged Particle Trajectories direction, on two plates, add different voltage, just formed a pair of charged particle beam track control device, can realize the control to ion beam heading.At document (Yongxuan Su, Yixiang Duan, and Zhe Jin, " Helium Plasma Source Time-of-Flight Mass Spectrometry:Off-Cone Sampling for Elemental Analysis ", Anal.Chem.2000,72,2455-2462) in what adopt is two pairs of flat track control devices, control the flight angle of ion in X and Y-direction, structure as shown in Figure 2.Fig. 3 is its ion trajectory analogous diagram in the Y direction, although can find out that this flat track control device is simple in structure, only have electrode fixed head 7, electric pole plate 8 and lower electrode plate 9 to form, in palette, field intensity is affected by external electrical field, electric field disperse is very serious, the charged particle degree of deflection difference of the battery lead plate of adjusting the distance diverse location, causes the angular dispersed of charged particle, cannot realize the accurate control to charged particle beam heading.
Summary of the invention
The object of this invention is to provide a kind of charged particle beam track control device.
The present invention is provided with electrode fixed head, upper insulation plate, lower insulation plate, electric pole plate array, lower electrode plate array and divider resistance;
Described upper insulation plate and lower insulation plate are individually fixed in upper and lower surface the mirror symmetry of electrode fixed head and install; On upper insulation plate and lower insulation plate, form 2 column electrode plates along charged particle beam heading electric pole plate array and lower electrode plate array, arrangement is equally spaced between every strip electrode plate; Every strip electrode plate on electric pole plate array and lower electrode plate array has different current potentials by divider resistance dividing potential drop.
Described electrode fixed head can adopt metal electrode fixed head or non-metal electrode fixed head.
Described upper insulation plate and lower insulation plate can adopt nonmetal insulation board.
Described electric pole plate array and lower electrode plate array can adopt metallic plate or printed circuit board (PCB) (PCB), equidistant linear array between each battery lead plate of electric pole plate array, equidistant linear array between each battery lead plate of lower electrode plate array, battery lead plate quantity in electric pole plate array is not limit, battery lead plate quantity in lower electrode plate array is not limit, and can determine according to demand.
Operation principle of the present invention is as follows:
When work, the voltage of electric pole plate array is applied between the high order end battery lead plate of electric pole plate array and the low order end battery lead plate of electric pole plate array, the voltage of lower electrode plate array is applied between the high order end battery lead plate of lower electrode plate array and the low order end battery lead plate of lower electrode plate array, and the battery lead plate of all the other mid portions obtains by electric resistance partial pressure; The high order end battery lead plate of electric pole plate array and the low order end battery lead plate of lower electrode plate array form diagonal angle, and the low order end battery lead plate of electric pole plate array and the high order end battery lead plate of lower electrode plate array form diagonal angle; Wherein the battery lead plate current potential of pair of horns position is idiostatic, is designated as V
0; One of two battery lead plate current potential on pair of horns is higher than V in addition
0, one lower than V
0, and they and V
0the absolute value of potential difference equates, is V
0± Δ V, what on two row battery lead plates, obtain is the current potential of contrary graded.The last electric field that forms an origin symmetry between battery lead plate array.Charged particle beam is entered by the left side of electrode fixed head, and under the electric field force effect forming between upper and lower battery lead plate, deflection at a certain angle, is penetrated by the right side of electrode fixed head.Due to process be an origin symmetry electric field, the deflection angle of each charged particle and its ionization electrode plate range-independence, can be with same angular deflection, without any angular dispersed; By adjusting upside battery lead plate and the added voltage of underside electrical pole plate, can change deflection angle size, thereby realize the control to Charged Particle Trajectories.
The present invention is not subject to the position influence of charged particle beam, and the charged particle of the battery lead plate of adjusting the distance diverse location is all with same angular deflection; By regulating suitable electrical quantity, just can make charged particle arrive assigned address as Fig. 5 according to projected path; Made up conventional flat track control device because of field disperse cause in the different shortcoming of diverse location charged particle deflection angle, fundamentally solved the problem of particle beams angular divergence.The present invention is applied in electron gun, mass spectrometer isoelectronic ion optical instrument, can significantly improve instrument performance.
Brief description of the drawings
Fig. 1 is the planar structure schematic diagram of the embodiment of the present invention;
Fig. 2 is traditional charged particle beam track control device structural representation;
Fig. 3 is traditional charged particle beam track control device computer simulation chart;
Fig. 4 is the perspective view of the embodiment of the present invention;
Fig. 5 is the computer simulation chart of the embodiment of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further illustrated, and battery lead plate array quantity is taking 4 as example.
The embodiment of the present invention is provided with electrode fixed head 1, upper insulation plate 2, lower insulation plate 3, electric pole plate array 4, lower electrode plate array 5 and divider resistance 6.
Described upper insulation plate 2 and lower insulation plate 3 are individually fixed in upper and lower surface the mirror symmetry of electrode fixed head 1 and install; On upper insulation plate 2 and lower insulation plate 3, form 2 column electrode plates along charged particle beam heading electric pole plate array 4 and lower electrode plate array 5, arrangement is equally spaced between every strip electrode plate; Every strip electrode plate on electric pole plate array 4 and lower electrode plate array 5 has different current potentials by divider resistance 6 dividing potential drops.
Described electrode fixed head 1 can adopt metal electrode fixed head or non-metal electrode fixed head.
Described upper insulation plate 2 and lower insulation plate 3 can adopt nonmetal insulation board.
Described electric pole plate array 4 and lower electrode plate array 5 can adopt metallic plate or printed circuit board (PCB) (PCB), equidistant linear array between each battery lead plate of electric pole plate array 4, equidistant linear array between each battery lead plate of lower electrode plate array 5, battery lead plate quantity in electric pole plate array 4 is not limit, battery lead plate quantity in lower electrode plate array 5 is not limit, and can determine according to demand.
Operation principle of the present invention is as follows:
When work, the voltage of electric pole plate array 4 is applied between the high order end battery lead plate 41 of electric pole plate array 4 and the low order end battery lead plate 42 of electric pole plate array 4, the voltage of lower electrode plate array 5 is applied between the high order end battery lead plate 51 of lower electrode plate array 5 and the low order end battery lead plate 52 of lower electrode plate array 5, and the battery lead plate of all the other mid portions obtains by electric resistance partial pressure;
The high order end battery lead plate 41 of electric pole plate array 4 and the low order end battery lead plate 52 of lower electrode plate array 5 form diagonal angle, and the low order end battery lead plate 42 of electric pole plate array 4 and the high order end battery lead plate 51 of lower electrode plate array 5 form diagonal angle; Wherein the battery lead plate current potential of pair of horns position is idiostatic, is designated as V
0; One of two battery lead plate current potential on pair of horns is higher than V in addition
0, one lower than V
0, and they and V
0the absolute value of potential difference equates, is V
0± Δ V, what on two row battery lead plates, obtain is the current potential of contrary graded.The last electric field that forms an origin symmetry between battery lead plate array.Charged particle beam is entered by the left side 11 of electrode fixed head, and under the electric field force effect forming between upper and lower battery lead plate, deflection at a certain angle, is penetrated by the right side 12 of electrode fixed head.Due to process be an origin symmetry electric field, the deflection angle of each charged particle and its ionization electrode plate range-independence, can be with same angular deflection, without any angular dispersed; By adjusting upside battery lead plate and the added voltage of underside electrical pole plate, can change deflection angle size, thereby realize the control to Charged Particle Trajectories.
Charged particle beam is entered by electrode fixed head left side 11.Wherein, electrode fixed head 1 is as support frame; Upper insulation plate 2 and lower insulation plate 3 are fixed on respectively the upper and lower faces of electrode fixed head 1, the parallel placement of mirror symmetry by 4 screws; On upper insulation plate 2 and lower insulation plate 3,4 battery lead plates along charged particle beam heading difference linear distribution, the low order end battery lead plate 52 of the high order end battery lead plate 41 of electric pole plate array 4 to the low order end battery lead plate 42 of electric pole plate array 4 and the high order end battery lead plate 51 of lower electrode plate array 5 to lower electrode plate array 5, forming 2 row 4 row battery lead plates, is equidistant symmetric arrays between 4 battery lead plates; The high order end battery lead plate 41 of electric pole plate array 4 to the low order end battery lead plate 42 of electric pole plate array 4 and the high order end battery lead plate 51 of lower electrode plate array 5 to the low order end battery lead plate 52 of lower electrode plate array 5 on every electrode plate there is different current potentials by divider resistance 6 dividing potential drops.
The high order end battery lead plate 41 of described upper electric pole plate array 4 to the low order end battery lead plate 42 of electric pole plate array 4 and the high order end battery lead plate 51 of lower electrode plate array 5 to the low order end battery lead plate 52 of lower electrode plate array 5 is metal electrode, also can be made of one with printing board PCB, with the basic unit of insulation board printed circuit board (PCB), cover copper face and form battery lead plate array.
Described divider resistance 6 is welded on every strip electrode sheet in the mode of series connection.
As shown in Figure 4.The charged particle distributing along Y-direction moves along directions X with certain initial kinetic energy.The high order end battery lead plate 41 of for example electric pole plate array 4 and the low order end battery lead plate 52 of lower electrode plate array 5 keep current potential at-2100V; Be respectively-the 1800V of current potential of the low order end battery lead plate 42 of electric pole plate array 4 and the high order end battery lead plate 51 of lower electrode plate array 5 and-2400V.Now, Potential distribution and X-axis in deflector have angle, and form the electric field of origin symmetry between two electrode plate arrays.Be parallel to each other enter charged particle in battery lead plate will be all with after same angular deflection, more parallel ejaculation battery lead plate, can not cause angular spread of the ion beam.
, be made up of upper and lower two pole plates as a comparison as Fig. 3 with traditional flat track control device, top crown 8 current potentials are-2100V that bottom crown 9 is-1800V.The same with the distribution of charged particle shown in Fig. 5, distribute along Y-direction, and there is identical initial kinetic energy at directions X.Can find out, the non-uniform electric in plate, is subject to outside disperse electric field influence large, and equipotential line is arc surfaced; In device, the charged particle of different Y coordinates is subject to electric deflection degree difference, has caused the angular divergence of Charged Particle Trajectories.
Claims (4)
1. charged particle beam track control device, is characterized in that being provided with electrode fixed head, upper insulation plate, lower insulation plate, electric pole plate array, lower electrode plate array and divider resistance;
Described upper insulation plate and lower insulation plate are individually fixed in upper and lower surface the mirror symmetry of electrode fixed head and install; On upper insulation plate and lower insulation plate, form 2 column electrode plates along charged particle beam heading electric pole plate array and lower electrode plate array, arrangement is equally spaced between every strip electrode plate; Every strip electrode plate on electric pole plate array and lower electrode plate array has different current potentials by divider resistance dividing potential drop.
2. charged particle beam track control device as claimed in claim 1, is characterized in that described electrode fixed head adopts metal electrode fixed head or non-metal electrode fixed head.
3. charged particle beam track control device as claimed in claim 1, is characterized in that described upper insulation plate and lower insulation plate adopt nonmetal insulation board.
4. charged particle beam track control device as claimed in claim 1, it is characterized in that described electric pole plate array and lower electrode plate array adopt metallic plate or printed circuit board (PCB), equidistant linear array between each battery lead plate of electric pole plate array, equidistant linear array between each battery lead plate of lower electrode plate array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410210102.6A CN103956311B (en) | 2014-05-16 | 2014-05-16 | Charged particle beam trajectory control device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410210102.6A CN103956311B (en) | 2014-05-16 | 2014-05-16 | Charged particle beam trajectory control device |
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| Publication Number | Publication Date |
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| CN103956311A true CN103956311A (en) | 2014-07-30 |
| CN103956311B CN103956311B (en) | 2017-02-22 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105469914A (en) * | 2015-11-18 | 2016-04-06 | 中国电力科学研究院 | Device utilizing electric field force to drive orientation of nano particles in thin film materials |
| CN108364839A (en) * | 2018-01-12 | 2018-08-03 | 中国科学院近代物理研究所 | Line adaptively correcting device and correction plate electrode |
| CN109037016A (en) * | 2018-08-13 | 2018-12-18 | 常焱瑞 | A kind of electrical body motion profile control device based on Composite Field |
| CN111023325A (en) * | 2019-11-22 | 2020-04-17 | 珠海格力电器股份有限公司 | Air conditioner condenser self-cleaning system, control method and air conditioner |
| CN112413811A (en) * | 2020-11-26 | 2021-02-26 | 珠海格力电器股份有限公司 | Dust removal device, heat exchanger, air conditioner and dust removal method of air conditioner heat exchanger |
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| CN86105201A (en) * | 1985-08-13 | 1987-02-18 | 源技术公司 | Utilize the flat electronic control device of free electron uniform space-charge cloud as virtual cathode |
| US4782304A (en) * | 1986-08-20 | 1988-11-01 | Applied Materials, Inc. | Systems and methds for ion beam acceleration |
| EP0501638A1 (en) * | 1991-02-25 | 1992-09-02 | Eaton Corporation | Reduced path ion beam implanter |
| CN101063672A (en) * | 2006-04-29 | 2007-10-31 | 复旦大学 | Ion trap array |
| CN102723254A (en) * | 2012-06-20 | 2012-10-10 | 清华大学 | Focusing device and method of flat high-field asymmetric waveform ion mobility spectrometer |
| CN203812834U (en) * | 2014-05-16 | 2014-09-03 | 厦门大学 | Charged particle beam track control device |
-
2014
- 2014-05-16 CN CN201410210102.6A patent/CN103956311B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86105201A (en) * | 1985-08-13 | 1987-02-18 | 源技术公司 | Utilize the flat electronic control device of free electron uniform space-charge cloud as virtual cathode |
| US4782304A (en) * | 1986-08-20 | 1988-11-01 | Applied Materials, Inc. | Systems and methds for ion beam acceleration |
| EP0501638A1 (en) * | 1991-02-25 | 1992-09-02 | Eaton Corporation | Reduced path ion beam implanter |
| CN101063672A (en) * | 2006-04-29 | 2007-10-31 | 复旦大学 | Ion trap array |
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| CN203812834U (en) * | 2014-05-16 | 2014-09-03 | 厦门大学 | Charged particle beam track control device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105469914A (en) * | 2015-11-18 | 2016-04-06 | 中国电力科学研究院 | Device utilizing electric field force to drive orientation of nano particles in thin film materials |
| CN108364839A (en) * | 2018-01-12 | 2018-08-03 | 中国科学院近代物理研究所 | Line adaptively correcting device and correction plate electrode |
| CN109037016A (en) * | 2018-08-13 | 2018-12-18 | 常焱瑞 | A kind of electrical body motion profile control device based on Composite Field |
| CN111023325A (en) * | 2019-11-22 | 2020-04-17 | 珠海格力电器股份有限公司 | Air conditioner condenser self-cleaning system, control method and air conditioner |
| CN112413811A (en) * | 2020-11-26 | 2021-02-26 | 珠海格力电器股份有限公司 | Dust removal device, heat exchanger, air conditioner and dust removal method of air conditioner heat exchanger |
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| CN103956311B (en) | 2017-02-22 |
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Granted publication date: 20170222 |