CN103956220A - Method for manufacturing electrode of radio frequency thermal therapy instrument - Google Patents
Method for manufacturing electrode of radio frequency thermal therapy instrument Download PDFInfo
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- CN103956220A CN103956220A CN201410205903.3A CN201410205903A CN103956220A CN 103956220 A CN103956220 A CN 103956220A CN 201410205903 A CN201410205903 A CN 201410205903A CN 103956220 A CN103956220 A CN 103956220A
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Abstract
The invention relates to a method for manufacturing metal aluminum based electrodes, in particular to a method for manufacturing an electrode of a radio frequency thermal therapy instrument. The technical problem of electromagnetic field shielding of a metal electrode of a current thermal therapy instrument is solved. The method comprises the following steps of electrode machining and forming, alkali and acid liquid cleaning and polishing, anodic oxidation, insulation layer forming, electrochemical metal film plating, metal shielding layer forming, mask photoetching, wet etching metal film removing, wet etching alumina film removing, electromagnetic field radiant surface forming, mask photoetching, wet etching metal film removing, wet etching alumina film removing, electrode leading-out terminal manufacturing, radio frequency signal wire connecting through screws, shielded wire welding, metal shielding hood installing and electrode of radio frequency thermal therapy instrument forming. The metal aluminum based electrode with the electromagnetic field shielding function can be used in cooperation with the radio frequency thermal therapy instrument, an ultrasound thermal therapy instrument and a microwave thermal therapy instrument, the electromagnetic field intensity which is radiated by the electrode outwards is effectively reduced, the shielding effect of an electromagnetic field is improved, and the electrode of the radio frequency thermal therapy instrument has the advantages of being small in size and integrated, and suitable for clinical application.
Description
Technical field
The invention belongs to electronic medical equipment field, specially refer to a kind of manufacture method with anodic oxidation, electrochemical filming, photo etched mask, wet etching feature of metal aluminum based.
Background technology
Along with the development and progress of clinical medicine and bio-heat transfer, thermotherapy has become the method for a kind of more effective treatment tumour after radiotherapy, chemotherapy.Tumor thermotherapy is to utilize the thermal effect of the various pyrogens such as radio frequency electromagnetic, microwave or ultrasonic wave, tumor area or whole body are heated to effectively treat temperature range and maintain a period of time, make the metabolic response of tumor tissues generation instantaneity, thereby cause that tumour cell molecular structure changes and lysosome increased activity, reach killing off tumor cells, the object for the treatment of tumour.Thermotherapy not only has direct cellulotoxic effect to tumour cell, can also strengthen the curative effect of chemotherapy, radiotherapy, improves the immunity of body, suppresses the transfer of tumour, thereby is called " green remedy " by international the world of medicine.
All thermal therapeutic apparatus are all launched various " energy wave " by metal electrode and are carried out work, because electromagnetic shielding is bad, often cause electromagnetic field to external radiation, gently cause environmental pollution, heavy jeopardize doctor and patient.Due to the fine solution of electromagnetic shielding kerosene, the mode adopting is at present exactly that therapeutic room and control room separate, and installs metallic shield net additional, for the protection of doctor's safety, in the true harm environment in electromagnetic radiation always of patient.
By the survey, research and analysis of domestic and international tumor thermal-therapeutic apparatus electrode technology, consult the achievement in research of domestic and international technique for hyperthermia in nearly 10 years, a kind of manufacture metal aluminum based electrode method with features such as anodic oxidation, electrochemical filming, photo etched mask, wet etchings has been proposed, respond well through verification experimental verification.For thermal therapeutic apparatus use have integrated shielding layer feature metal electrode scientific achievement have not been reported.
The beneficial effect of the inventive method is, can make as required the aluminium based metal electrode of various geomeries, the alundum (Al2O3) dielectric film forming due to anodic oxidation has acid and alkali resistance corrosion after treatment, be difficult for producing layering obscission, there is higher insulation characterisitic simultaneously, can ensure in radio frequency, ultrasonic and microwave range and not breakdown under high voltage; Utilize electrochemical filming technology to form shielding metal film layer at the alundum (Al2O3) surface of insulating layer of aluminium electrode, can realize the comprehensive plated film that does not leak dead angle, play fine and close screen effect; Utilize photo etched mask, the wet corrosion technique of microelectric technique can be according to designing and manufacturing electrode radiating surface and electrode leads to client.The present invention has the thermal therapeutic apparatus metal electrode of the advantages such as manufacture is controlled, integrated, shield effectiveness is good.
Summary of the invention
The object of the invention is the following problem existing in order to solve thermal therapeutic apparatus metal electrode: (1) metal electrode shield effectiveness is bad; (2) metal electrode screen method is loaded down with trivial details; (3) install shield member additional and make electrode volume excessive.
The object of the present invention is achieved like this:
A, employing metallic aluminium section bar, utilize machining process to process metal electrode structure;
B, utilize alkaline solution clean metal aluminium electrode;
C, utilize acid solution to carry out electrochemical polish to metal aluminium electrode;
D, employing alumilite process technique, carry out comprehensive anodic oxidation to aluminium electrode, forms insulating barrier;
E, employing electrochemical filming technique form shielding metal film layer at the alundum (Al2O3) surface of insulating layer of aluminium electrode;
F, employing photo etched mask technique, transfer electrode radiating surface figure, wet etching removes metal film and di-aluminium trioxide film, forms the electromagnetic field radiation face of electrode;
G, employing photo etched mask technique, transfer electrode radiating surface figure, wet etching removes metal film and di-aluminium trioxide film, forms the exit of electrode;
H, at the exit place of electrode, rf signal line is coupled together with screw, fix;
M, utilize welding procedure, multicore shielding line is evenly welded on the metal screen layer of rf signal line surrounding, form the electrode with electromagnetic-field-shielded function for RF heat therapy equipment;
N, utilize mechanical processing technique, manufacture metallic shield, and be arranged on shielding conductor outside, with there being machine screw to be fixed on electrode, radome is contacted well with screen intermetallic, and have and fix and hot strength;
The present invention can also comprise some features like this:
1, described employing anode oxidation method, anodic oxidation electrolyte can adopt electrolyte sulfuric acid, phosphoric acid electrolyte, oxalic acid electrolyte, boric acid electrolyte, and composition thereof;
2, described electrochemistry plating screen, can be copper base metal, nickel, chromium, molybdenum etc., also noble metal platinum, gold, silver etc.
The beneficial effect of the inventive method is, can make as required the aluminium based metal electrode of various geomeries, the alundum (Al2O3) dielectric film forming due to anodic oxidation has acid and alkali resistance corrosion after treatment, be difficult for producing layering obscission, there is higher insulation characterisitic simultaneously, can ensure in radio frequency, ultrasonic and microwave range and not breakdown under high voltage; Utilize electrochemical filming technology to form shielding metal film layer at the alundum (Al2O3) surface of insulating layer of aluminium electrode, can realize the comprehensive plated film that does not leak dead angle, play fine and close screen effect; Utilize photo etched mask, the wet corrosion technique of microelectric technique can be according to designing and manufacturing electrode radiating surface and electrode leads to client.The present invention has the thermal therapeutic apparatus metal electrode of the advantages such as manufacture is controlled, integrated, shield effectiveness is good.
Brief description of the drawings
Fig. 1 is aluminium base electrode manufacturing process block flow diagram for RF heat therapy equipment; Fig. 2 is RF heat therapy equipment metal aluminum based electrode sections schematic diagram; In figure 1---metal electrode radiating surface, 2---metal film screen, 3---alumina insulating layer, 4---metal aluminium electrode, 5---radio frequency line tie point, 6---metallic RF line, 7---organic insulator, 8---outer organic insulator, 9---metal-shielded wire, 10---metal-shielded wire solder joint, 11---shielding conductor and cover solder joint, 12---metallic shield, 13---there is machine screw.
Embodiment
With reference to Fig. 1, represent aluminium base electrode manufacturing process block flow diagram for RF heat therapy equipment, this flow process sums up as following 17 work steps: electrode machine add-on type-alkali, acid solution cleaning polishing-anodic oxidation-formation insulating barrier-electrochemistry metal-coated membrane-formation metal screen layer-photo etched mask-wet etching go metal film-wet etching deoxidation aluminium film-formation electromagnetic field radiation face-photo etched mask-wet etching to go metal film-wet etching deoxidation aluminium film-formation electrode leads to client-screw to connect rf signal line-welding shielding conductor-installation radome.Manufacture method between each work step can be carried out combination in any according to specific requirement.
With reference to metal aluminum based electrode sections schematic diagram for Fig. 2 RF heat therapy equipment, represent metal aluminum based electrode sections structure and mounting means schematic diagram.
Embodiment is as follows:
A, adopt metallic aluminium section bar, utilize machining process to process metal electrode structure 60mm × 80mm, 70mm × 90mm, 80mm × 100mm, 90mm × 120mm, Φ 70mm, Φ 80mm, Φ 90mm, thickness can 2-25mm;
B, utilize the NaOH of 5-15% concentration, or potassium hydroxide alkalescence solution clean metal aluminium electrode, time 1-5 minute;
C, utilize acid solution, sulfuric acid, phosphoric acid and ethylene glycol mixture, ratio 2:1:1 (2:2:1), temperature 80-100 DEG C, carries out electrochemical polish to metal aluminium electrode, time 1-10 minute;
D, employing alumilite process technique, under 1%-2% concentration electrolyte sulfuric acid solution or 2%-5% phosphorus concentration acid electrolyte solution or 1-5% concentration oxalic acid electrolyte solution (or three kinds of mixture solutions) condition, aluminium electrode is carried out to comprehensive anodic oxidation, form insulating barrier, thickness of insulating layer 1-200 micron, after cleaning, carry out sealing of hole and stabilisation heat treatment, treatment temperature 150-300 DEG C;
E, employing electrochemical filming technique, electrolyte can be distinguished electroless copper, nickel, chromium, molybdenum, platinum, the gold, silver solution of choice criteria; Alundum (Al2O3) surface of insulating layer at aluminium electrode forms the different metal membrane shield layers such as copper, nickel, chromium, molybdenum, platinum, gold, silver;
F, employing photo etched mask technique, transfer electrode radiating surface figure, preferably rectangle or circle of electrode radiating surface figure, is convenient to match focusing electrode, and wet etching removes metal film and di-aluminium trioxide film, forms the electromagnetic field radiation face of electrode;
G, employing photo etched mask technique, transfer electrode radiating surface figure, wet etching removes metal film and di-aluminium trioxide film, form the exit of electrode, the shape of exit can be circular, also square, dimensional requirement is little, can be 2mmm × 2mm, 3mmm × 3mm, Φ 2mm, Φ 3mm;
H, at the exit place of electrode, rf signal line is coupled together with screw, fix;
M, utilizing welding procedure, can be conducting resinl, soldering, argon arc welding, thermocompression bonding, stored energy welding, multicore shielding line is evenly welded on the metal screen layer of rf signal line surrounding, forms the electrode with electromagnetic-field-shielded function for RF heat therapy equipment.
N, employing mechanical processing technique are manufactured metallic shield, utilize metal solder technique, radome and shielding conductor are welded together, utilize and have machine screw radome to be fixed on the metal screen layer of electrode, make between radome and screen Metal Contact good, and there is certain hot strength.
Claims (4)
1. a RF heat therapy equipment electrode manufacturing method, is characterized in that described method is made up of following 17 work steps: electrode machine add-on type-alkali lye, acid solution cleaning polishing-anodic oxidation-form insulating barrier-electrochemistry metal-coated membrane-form metal screen layer-photo etched mask-wet etching goes metal film-wet etching deoxidation aluminium film-form electromagnetic field radiation face-photo etched mask-wet etching to go metal film-wet etching deoxidation aluminium film-form electrode leads to client-screw to connect rf signal line-welding shielding conductor-installation metallic shield.
2. RF heat therapy equipment electrode manufacturing method according to claim 1, is characterized in that utilizing anode oxidation method to make alundum (Al2O3) insulating barrier at aluminium electrode surface.
3. RF heat therapy equipment electrode manufacturing method according to claim 1, is characterized in that utilizing electrochemical filming technology to form shielding metal film layer at the alundum (Al2O3) surface of insulating layer of aluminium electrode.
4. RF heat therapy equipment electrode manufacturing method according to claim 1, is characterized in that utilizing photo etched mask method and wet etching method, etches electrode radiating surface and electrode leads to client.
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| CN201410205903.3A CN103956220B (en) | 2014-05-15 | 2014-05-15 | A kind of radio-frequency (RF) heat therapy equipment electrode manufacturing method |
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| CN201410205903.3A CN103956220B (en) | 2014-05-15 | 2014-05-15 | A kind of radio-frequency (RF) heat therapy equipment electrode manufacturing method |
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| CN103956220B CN103956220B (en) | 2016-12-07 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104161584A (en) * | 2014-08-05 | 2014-11-26 | 中国人民解放军总医院 | Novel low-temperature plasma operation device |
| CN106824733A (en) * | 2017-01-11 | 2017-06-13 | 上海爱声生物医疗科技有限公司 | A kind of ultrasonic transducer of matching layer optimization and preparation method thereof |
| CN108048891A (en) * | 2017-11-15 | 2018-05-18 | 重庆嘉萌鸿业科技有限公司 | A kind of aluminium alloy castings surface treatment method |
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| CN2704382Y (en) * | 2004-06-09 | 2005-06-15 | 南京恒埔伟业科技股份有限公司 | Radio-frequency thermotherapeutic devices |
| CN1955343A (en) * | 2005-10-24 | 2007-05-02 | 比亚迪股份有限公司 | Electroplating method of alluminium alloy surface |
| CN200953685Y (en) * | 2006-09-26 | 2007-09-26 | 蔡勇 | Aluminium-base insulating oxidized magnetic control sputtering metallized circuit board |
| CN101521986A (en) * | 2009-03-27 | 2009-09-02 | 浙江大学 | Metal base printed circuit board |
| CN202380112U (en) * | 2011-12-09 | 2012-08-15 | 上海光芯集成光学股份有限公司 | Device for carrying out anodic oxidation treatment on aluminum film |
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2014
- 2014-05-15 CN CN201410205903.3A patent/CN103956220B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2704382Y (en) * | 2004-06-09 | 2005-06-15 | 南京恒埔伟业科技股份有限公司 | Radio-frequency thermotherapeutic devices |
| CN1955343A (en) * | 2005-10-24 | 2007-05-02 | 比亚迪股份有限公司 | Electroplating method of alluminium alloy surface |
| CN200953685Y (en) * | 2006-09-26 | 2007-09-26 | 蔡勇 | Aluminium-base insulating oxidized magnetic control sputtering metallized circuit board |
| CN101521986A (en) * | 2009-03-27 | 2009-09-02 | 浙江大学 | Metal base printed circuit board |
| CN202380112U (en) * | 2011-12-09 | 2012-08-15 | 上海光芯集成光学股份有限公司 | Device for carrying out anodic oxidation treatment on aluminum film |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104161584A (en) * | 2014-08-05 | 2014-11-26 | 中国人民解放军总医院 | Novel low-temperature plasma operation device |
| CN104161584B (en) * | 2014-08-05 | 2017-08-08 | 中国人民解放军总医院 | New low-temperature plasma operation device |
| CN106824733A (en) * | 2017-01-11 | 2017-06-13 | 上海爱声生物医疗科技有限公司 | A kind of ultrasonic transducer of matching layer optimization and preparation method thereof |
| CN108048891A (en) * | 2017-11-15 | 2018-05-18 | 重庆嘉萌鸿业科技有限公司 | A kind of aluminium alloy castings surface treatment method |
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| CN103956220B (en) | 2016-12-07 |
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