CN103954447B - A kind of cutting error measurement method of harmonic speed reducer flexible gear - Google Patents

A kind of cutting error measurement method of harmonic speed reducer flexible gear Download PDF

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CN103954447B
CN103954447B CN201410046137.0A CN201410046137A CN103954447B CN 103954447 B CN103954447 B CN 103954447B CN 201410046137 A CN201410046137 A CN 201410046137A CN 103954447 B CN103954447 B CN 103954447B
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gear
measurement
error
cutting error
cutting
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CN103954447A (en
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孔德军
张垒
付贵忠
王文昌
叶存冬
王进春
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Changzhou University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2416Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of gears

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  • Length Measuring Devices By Optical Means (AREA)
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Abstract

本发明涉及谐波减速器用柔性齿轮,特指一种谐波减速器用柔性齿轮的切削误差测量方法。激光探头发出两道距离一定的平行激光束,分别射在不同的齿面上,再由探头输出各自测出的距离。若出现过切或欠切,齿厚必然会发生变化,从而导致探头输出信号的变化,由滚齿机的切削深度和刀具磨损引起的切削误差就可以由输出信号的差异计算出来,同时还可以通过旋转齿轮,测量其全齿来降低由于调整齿轮和探头相对位置引起的定位误差,达到制造质量控制的要求。

The invention relates to a flexible gear for a harmonic reducer, in particular to a cutting error measurement method for a flexible gear for a harmonic reducer. The laser probe emits two parallel laser beams with a certain distance, and shoots them on different tooth surfaces respectively, and then the probe outputs the distances measured by each. If over-cut or under-cut occurs, the tooth thickness will inevitably change, resulting in a change in the output signal of the probe. The cutting error caused by the cutting depth of the gear hobbing machine and tool wear can be calculated from the difference in the output signal. For gears, measure its full teeth to reduce the positioning error caused by adjusting the relative position of the gear and the probe, and meet the requirements of manufacturing quality control.

Description

一种谐波减速器用柔性齿轮的切削误差测量方法A Cutting Error Measurement Method of Flexible Gear Used in Harmonic Reducer

技术领域technical field

本发明涉及谐波减速器用柔性齿轮,通过激光探头和旋转测量台系统对齿廓的切削误差进行测量;为减小传统测量方法中千分尺和范Kuven线对测量过程造成的不便和对测量结果造成的误差,本发明专利提出了一种谐波减速器用柔性齿轮的切削误差测量方法,属于先进装备精密制造技术。The invention relates to a flexible gear for a harmonic reducer, which measures the cutting error of the tooth profile through a laser probe and a rotating measuring platform system; in order to reduce the inconvenience caused by the micrometer and the Kuven line in the traditional measurement method to the measurement process and the damage to the measurement result The error of the present invention proposes a cutting error measurement method of the flexible gear used in the harmonic reducer, which belongs to the precision manufacturing technology of advanced equipment.

背景技术Background technique

谐波减速器主要结构分别为谐波发生器、柔性外齿齿轮和刚性内齿齿圈。谐波减速器具有较高的减速率且几乎不存在齿侧间隙,它以高定位精度、较好的可重复性、高转矩、高效率和低磨损等特点在工业机器人、机床、医疗器械和航天器等方面受到广泛应用。由于多应用在精密制造业,谐波减速器零部件的尺寸公差要求也越来越严格,因此为保证其零部件的制造精度,必须精确测量零部件的切削误差并同时将误差信息反馈给机床从而控制制造精度。然而,对于谐波减速器而言,柔性齿轮的制造精度控制尤为困难,其切削精度大概只在几个微米之间,会大大影响谐波减速器的性能。一般对柔性齿轮的切削误差的测量,是通过测量一个由柔性齿轮、范Kuven线和千分尺组成的系统来实现的。将线嵌在相邻两齿之间,用千分尺压住线并测量此时的齿顶圆直径,如果切削过程中出现过切,那么相邻两齿之间的间距会增加,范Kuven线会向齿轮中心移动,利用这种方法得到的测量数据与参考数据比较就能得到柔性齿轮的切削误差。但是实际操作起来非常困难,因为齿轮尺寸非常小,还具有很好的弹性,并且在测量时必须停止切削,这使得整个测量过程不稳定、效率低而且数据很难保证精确。基于齿轮尺寸过小难以测量,同时要保证尺寸精度和测量效率的问题,本发明专利提出一种使用两个激光探头和旋转测量台的测量系统对柔性齿轮的切削误差进行非接触式、无弹性变形的测量方法,能有效提高测量精度和测量效率。The main structure of the harmonic reducer is a harmonic generator, a flexible external gear and a rigid internal gear. The harmonic reducer has a high deceleration rate and almost no tooth backlash. It is featured in high positioning accuracy, good repeatability, high torque, high efficiency and low wear in industrial robots, machine tools, and medical equipment. and spacecraft are widely used. Since it is mostly used in the precision manufacturing industry, the dimensional tolerance requirements of harmonic reducer parts are becoming more and more stringent. Therefore, in order to ensure the manufacturing accuracy of its parts, it is necessary to accurately measure the cutting error of the parts and feed back the error information to the machine tool at the same time. Thereby controlling the manufacturing precision. However, for the harmonic reducer, it is particularly difficult to control the manufacturing accuracy of the flexible gear, and its cutting accuracy is only about a few microns, which will greatly affect the performance of the harmonic reducer. Generally, the measurement of the cutting error of flexible gears is realized by measuring a system consisting of flexible gears, Fan Kuven lines and micrometers. Insert the wire between two adjacent teeth, press the wire with a micrometer and measure the diameter of the addendum circle at this time. If overcut occurs during cutting, the distance between two adjacent teeth will increase, and the Van Kuven wire will Moving towards the center of the gear, the cutting error of the flexible gear can be obtained by comparing the measured data obtained by this method with the reference data. But the actual operation is very difficult, because the gear size is very small and has good elasticity, and the cutting must be stopped during the measurement, which makes the whole measurement process unstable, inefficient and difficult to guarantee accurate data. Based on the fact that the size of the gear is too small to measure, and the dimensional accuracy and measurement efficiency must be ensured, the patent of this invention proposes a measurement system using two laser probes and a rotating measuring table to measure the cutting error of the flexible gear in a non-contact and inelastic manner. The deformation measurement method can effectively improve the measurement accuracy and measurement efficiency.

发明内容Contents of the invention

本发明专利涉及的谐波减速器用柔性齿轮切削误差的测量系统由两个平行激光探头和旋转测量台构成,激光探头发出两道距离一定的平行激光束,分别射在不同的齿面上,再由探头输出各自测出的距离。若出现过切或欠切,齿厚必然会发生变化,从而导致探头输出信号的变化,由滚齿机的切削深度和刀具磨损引起的切削误差就可以由输出信号的差异计算出来。同时还可以通过旋转齿轮,测量其全齿来降低由于调整齿轮和探头相对位置引起的定位误差,达到制造质量控制的要求。The measurement system for the cutting error of the flexible gear used in the harmonic reducer involved in the patent of the present invention is composed of two parallel laser probes and a rotating measuring table. The respective measured distances are output by the probes. If overcut or undercut occurs, the tooth thickness will inevitably change, resulting in a change in the output signal of the probe. The cutting error caused by the cutting depth of the gear hobbing machine and tool wear can be calculated from the difference in the output signal. At the same time, the positioning error caused by adjusting the relative position of the gear and the probe can be reduced by rotating the gear and measuring its entire tooth, so as to meet the requirements of manufacturing quality control.

附图说明Description of drawings

图1测量系统示意图;Figure 1 Schematic diagram of the measurement system;

1-激光探头;2-柔性齿轮;3-旋转测量台。1-laser probe; 2-flexible gear; 3-rotary measuring table.

图2参考齿轮校准测量示意图;Figure 2 Schematic diagram of reference gear calibration measurement;

m10-激光探头1测量出的距离;m20-激光探头2测量出的距离;θi-齿轮旋转的角度;mA探头到节圆的距离;θA-两探头测出距离相等时转过的角度;D-两个激光探头间距离。m 10 - the distance measured by laser probe 1 ; m 20 - the distance measured by laser probe 2; θ i - the angle of gear rotation; m A the distance from the probe to the pitch circle; The passing angle; D-distance between two laser probes.

图3待测齿轮的测量示意图;Figure 3 is a schematic diagram of the measurement of the gear to be tested;

m1-激光探头1测量出的距离;m2-激光探头2测量出的距离;mB-两探头测出的距离相等时的距离;θB-两探头测出的距离相等时转过的角度;Δα-切削误差。m 1 - the distance measured by laser probe 1; m 2 - the distance measured by laser probe 2; m B - the distance when the distances measured by the two probes are equal; θ B - the distance turned when the distances measured by the two probes are equal Angle; Δα-cutting error.

图4旋转一圈两测头测量差值示意图。Figure 4 is a schematic diagram of the measurement difference between the two probes in one revolution.

图5旋转多圈测量后各齿轮的测量平均值Δmave示意图。Fig. 5 is a schematic diagram of the measured average value Δm ave of each gear after multi-turn measurement.

具体实施方式detailed description

(1)如图1测量系统示意图,利用静压圆柱夹具将柔性齿轮固定安装在旋转测量台上,测量台通过步进电机驱动;再将两个激光探头平行固定在与齿轮同等高度处,激光探头采用LC-2420型激光位移传感器,分辨率为10nm;两个位移传感器通过AD模块与计算机相连,进行数据采集与计算。(1) As shown in the schematic diagram of the measurement system in Figure 1, the flexible gear is fixedly installed on the rotating measuring platform by using a static pressure cylindrical fixture, and the measuring platform is driven by a stepping motor; then two laser probes are fixed in parallel at the same height as the gear, and the laser The probe adopts LC-2420 laser displacement sensor with a resolution of 10nm; the two displacement sensors are connected to the computer through the AD module for data collection and calculation.

(2)在实际测量前,先选择图2中柔性外齿齿轮作为参考齿轮进行校准测量;调节两平行探头之间的距离,使得激光在齿面上的两个测量点均位于齿轮节圆上,这样可以将测量点周围的小范围测量区域看成一条直线;如图2所示,在测量参考齿轮的两个轮齿时,随着齿轮的顺时针转动,m10逐渐减小,m20逐渐增大,当转过θA后二者相等时即是两个探头到节圆的距离,此时两个测量点均位于节圆上。(2) Before the actual measurement, first select the flexible external tooth gear in Figure 2 as the reference gear for calibration measurement; adjust the distance between the two parallel probes so that the two measurement points of the laser on the tooth surface are located on the pitch circle of the gear , so that the small-scale measurement area around the measurement point can be regarded as a straight line; as shown in Figure 2, when measuring the two teeth of the reference gear, as the gear rotates clockwise, m 10 gradually decreases, and m 20 Gradually increase, when the two are equal after turning θ A , it is the distance from the two probes to the pitch circle, and at this time the two measurement points are located on the pitch circle.

所述的参考齿轮指切削误差满足误差范围内的柔性齿轮,并视该齿轮切削误差为0;The reference gear refers to a flexible gear whose cutting error meets the error range, and the cutting error of the gear is regarded as 0;

误差范围一般参考齿轮精度相关国标,具体的误差范围视实际加工的技术要求而定。The error range generally refers to the relevant national standards for gear precision, and the specific error range depends on the actual processing technical requirements.

(3)换上需要测量的齿轮后,转动齿轮进行测量,此时得出的转动角度与测量距离之间的关系如图3所示,mB为两探头测出的相等距离,与参考齿轮比较,mA与mB间的误差Δα即为切削误差;但是图2和图3所表示的切削误差均是在不考虑齿轮偏心误差、转动误差及其他误差的情况下得到的理论值,要得到实际精确误差需要将外部影响因素考虑在内。(3) After replacing the gear to be measured, turn the gear to measure. The relationship between the rotation angle and the measurement distance obtained at this time is shown in Figure 3. m B is the equal distance measured by the two probes, and the reference gear In comparison, the error Δα between m A and m B is the cutting error; however, the cutting errors shown in Figure 2 and Figure 3 are all theoretical values obtained without considering the gear eccentric error, rotation error and other errors. Obtaining the actual precise error needs to take external influence factors into account.

所述需要测量的齿轮与参考齿轮应为同种齿轮。The gear to be measured and the reference gear should be of the same kind.

(4)数据收集及计算:测量台通过步进电机驱动,每转一次收集一次数据,因此收集的数据以离散的形式出现,通过计算可以比较精确的求出其误差,在水平面内建立X-Y坐标系,Y轴与激光平行,由图3可知当激光探头2测量的距离(即m2)等于mA时,激光探头1的测量结果可用mA+2Δα表示,则m1与m2可表示为(4) Data collection and calculation: The measuring platform is driven by a stepping motor and collects data once per revolution, so the collected data appears in a discrete form, and the error can be calculated more accurately through calculation, and the XY coordinates are established in the horizontal plane The Y axis is parallel to the laser. It can be seen from Fig. 3 that when the distance measured by the laser probe 2 (i.e. m 2 ) is equal to mA, the measurement result of the laser probe 1 can be expressed by mA + 2Δα, then m 1 and m 2 can be expressed for

m1=mA+2Δα+{eCcosθi+eXi)}tanφ1i)+eCsinθi+eYi) (1)m 1 =m A +2Δα+{e C cosθ i +e Xi )}tanφ 1i )+e C sinθ i +e Yi ) (1)

m2=mA+{eCcosθi+eXi)}tanφ2i)+eCsinθi+eYi),i=1,2,…,N (2)m 2 =m A +{e C cosθ i +e Xi )}tanφ 2i )+e C sinθ i +e Yi ), i=1, 2, ..., N (2)

其中N为齿轮齿数;eC为齿轮偏心误差;eX和eY分别为齿轮在X和Y轴方向的转动误差;Φ1和Φ2分别为两个测量齿面与X轴的夹角,均通过测量得到数据,θi为齿轮转动角度,通过测量台内置角度传感器实时测量。Among them, N is the number of gear teeth; e C is the eccentric error of the gear; e X and e Y are the rotation errors of the gear in the X and Y axis directions respectively; Φ 1 and Φ 2 are the angles between the two measured tooth surfaces and the X axis, The data are obtained through measurement, and θi is the gear rotation angle, which is measured in real time by the built-in angle sensor of the measuring platform.

将(1)(2)相减后得到Subtract (1)(2) to get

由(3)式可知相减后Y方向的误差完全消除了,为了减小X方向的误差,将齿轮旋转一周后将测量得到的Δm求平均值即得Δmave It can be seen from the formula (3) that the error in the Y direction is completely eliminated after the subtraction. In order to reduce the error in the X direction, the measured Δm is averaged after the gear is rotated once to obtain Δm ave

其中 in

通过实时测量得到m1和m2的值可以计算出测量差值Δm的平均值Δmave,ΔEX也可以通过测量eC、eX、Φ1和Φ2以及实时测量的旋转角度θi计算出来,则最终较为精确的切削误差Δα即可通过求得;从结果可以看出Y方向的误差已经消除,ΔEX主要是由X方向的误差大小决定的,只要通过多次旋转测量取平均值即可大幅度减小,通过此方法测出的Δα,即为柔性齿轮的切削误差。The average value Δm ave of the measurement difference Δm can be calculated by obtaining the values of m 1 and m 2 through real-time measurement, and ΔE X can also be calculated by measuring e C , e X , Φ 1 and Φ 2 and the real-time measured rotation angle θ i Then the final and more accurate cutting error Δα can be obtained; from the results, it can be seen that the error in the Y direction has been eliminated, and ΔE X is mainly determined by the size of the error in the X direction, as long as the average value is obtained through multiple rotation measurements It can be greatly reduced, and the Δα measured by this method is the cutting error of the flexible gear.

为验证该方法可行性,选取切削误差分别为-6μm、0、+6μm的三个齿轮试样进行测试实验,图4为三个齿轮试样分别旋转一圈测得的两个测头测量差值Δm,其横坐标表示旋转角度,纵坐标表示两测头的测量差值,从图中可以看出测量结果中包含了偏心误差和转动误差等外部影响因素;图5为三个齿轮试样分别旋转多圈测量后得到的测量差值的平均值Δmave,其横坐标表示不同的切削误差,纵坐标表示Δmave,σ表示其测量不确定度即Δmave的平均误差,从图中可以看出Δmave与切削误差呈线性关系,符合(4)式规律,表示该测量方法是可行的,三个齿轮的测量不确定度为±1.83μm,满足生产线的实际要求。In order to verify the feasibility of this method, three gear samples with cutting errors of -6 μm, 0, and +6 μm were selected for testing experiments. Figure 4 shows the measurement differences of the two probes measured by the three gear samples rotating one circle respectively. The value of Δm, the abscissa indicates the rotation angle, and the ordinate indicates the measurement difference between the two probes. It can be seen from the figure that the measurement results include external factors such as eccentricity error and rotation error; Figure 5 shows three gear samples The average value Δm ave of the measurement difference obtained after the multi-turn measurement respectively, the abscissa represents different cutting errors, the ordinate represents Δm ave , and σ represents the measurement uncertainty, which is the average error of Δm ave , from the figure It can be seen that Δm ave has a linear relationship with the cutting error, which conforms to the law of (4), indicating that the measurement method is feasible. The measurement uncertainty of the three gears is ±1.83μm, which meets the actual requirements of the production line.

Claims (5)

1. a kind of cutting error measurement method of harmonic speed reducer flexible gear, it is characterised in that the measuring method is included such as Lower step:
(1) flexible gear is fixedly mounted on wheel measuring platform using static pressure cylinder fixture, test desk is driven by stepper motor It is dynamic;Again by two laser probes it is parallel be fixed on at gear equal height;
(2) before actually measurement, first to carrying out calibration measurement with reference to gear;Adjust the distance between two parallel probes so that swash Two measurement points of the light on the flank of tooth are respectively positioned on pitch circle, now laser probe 1 measure apart from m10Visited equal to laser First 2 measure apart from m20Equal to probe to pitch circle apart from mA
(3) change after the gear for needing to measure, rotate gear is measured, mBThe distance when distance measured of being popped one's head in for two is equal, With reference gear ratio compared with mAWith mBBetween error delta α be cutting error, be theoretical value;
(4) Data Collection and calculating:Test desk by driving stepper motor, every turn once collect a data, therefore collect Data occur in discrete form, and the exact value of cutting error is obtained by calculating, X-Y coordinate, Y-axis are set up in the horizontal plane It is parallel with laser, when the measurement of laser probe 2 is apart from m2Equal to mAWhen, the measurement result m of laser probe 11M can be usedA+ 2 Δ α tables Show, then m1With m2It is represented by
m1=mA+2Δα+{eCcosθi+eXi)}tanφ1i)+eCsinθi+eYi) (1)
m2=mA+{eCcosθi+eXi)}tanφ2i)+eCsinθi+eYi), i=1,2 ..., N (2)
Wherein N is number of gear teeth;eCFor gear eccentricity error;eXAnd eYRespectively gear is in X and the rotation error of Y direction;Φ1 And Φ2The angle of the respectively two measurement flank of tooth and X-axis, obtains data, θ by measurementiFor pinion rotation angle, pass through survey Amount platform built-in angular sensor is measured in real time;
Obtained after (1) (2) are subtracted each other:
Understand that the error for subtracting each other rear Y-direction is completely eliminated by (3) formula, in order to reduce the error of X-direction, gear is rotated a circle The Δ m that measurement is obtained afterwards, which averages, produces Δ mave
Wherein
M is obtained by measuring in real time1And m2Value can calculate measurement difference DELTA m average value Δ mave, Δ EXIt can also lead to Cross measurement eC、eX、Φ1And Φ2And the anglec of rotation θ measured in real timeiCalculate, then final cutting error delta α exact value 2 Δ α=Δ m can be passed throughave-ΔEXTry to achieve;The error for finding out Y-direction from result has been eliminated, Δ EXMainly by X-direction What error size was determined, can significantly it reduce as long as being averaged by multiple rotary measurement, the Δ measured by the method α, as flexible gear cutting error.
2. a kind of cutting error measurement method of harmonic speed reducer flexible gear as claimed in claim 1, it is characterised in that: The laser probe uses LC-2420 type laser displacement sensors, and resolution ratio is 10nm;Two displacement transducers pass through A/D module It is connected with computer, carries out data acquisition with calculating.
3. a kind of cutting error measurement method of harmonic speed reducer flexible gear as claimed in claim 1, it is characterised in that It is described make it that two measurement points of the laser on the flank of tooth are respectively positioned on finger on pitch circle:In two gear teeth of the measurement with reference to gear When, rotated clockwise with reference to gear edge, m10It is gradually reduced, m20Gradually increase, when turning over θAIt is two spies when the latter two are equal Head arrives the distance of pitch circle, and now two measurement points are respectively positioned on pitch circle.
4. a kind of cutting error measurement method of harmonic speed reducer flexible gear as claimed in claim 1, it is characterised in that: Described reference gear refers to cutting error and meets flexible gear in error range, and regards the gear cutting error as 0.
5. a kind of cutting error measurement method of harmonic speed reducer flexible gear as claimed in claim 1, it is characterised in that: The gear for needing to measure with reference to gear with should be gear of the same race.
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