CN103954435B - Device and the detection method thereof of a kind of detected phase delay and Polarization Dependent Loss - Google Patents

Device and the detection method thereof of a kind of detected phase delay and Polarization Dependent Loss Download PDF

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CN103954435B
CN103954435B CN201410180864.6A CN201410180864A CN103954435B CN 103954435 B CN103954435 B CN 103954435B CN 201410180864 A CN201410180864 A CN 201410180864A CN 103954435 B CN103954435 B CN 103954435B
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phase delay
centerdot
overbar
delay device
rotating disk
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CN103954435A (en
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张璐
胡强高
罗勇
王玥
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Accelink Technologies Co Ltd
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Abstract

The present invention relates to comprise that a kind of detected phase postpones and device and the detection method thereof of Polarization Dependent Loss, device comprises and is provided with the feedback control system (7) of computing module and the first phase delay device (10), the second phase delay device (11), and computing module is provided with the first phase delay device (10) and the second phase delay device (11) phase delay angle δ1、δ2And polarized dependent loss PDL1、PDL2Relational expression:<maths num=" 0001 "></maths><maths num="0002"></maths><maths num="0003"></maths>photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I (k π+pi/2, k π+pi/2), I (k π, k π+pi/2), I (k π+π/4, π/4, k π+3) and I (k π+pi/2, k π+π) be that photodetector (6) is at same wavelength to be measured place, the photoelectric current data of measuring under different value of K, or photodetector (6) is at same wavelength to be measured place, the mean value of all photoelectric current data under different value of K, adopt apparatus of the present invention and method, can measure the fast shaft position of two unknown broadband phase delay devices simultaneously, phase-delay characteristic and PDL characteristic.

Description

Device and the detection method thereof of a kind of detected phase delay and Polarization Dependent Loss
Technical field
The invention belongs to polarization optics detection field, particularly a kind of phase delay that simultaneously detects two phase delay devicesThe method of characteristic and Polarization Dependent Loss characteristic and device.
Background technology
Phase delay device (or phase compensator) is widely used basic optical element in Experiments of Optics and optical instrument,It is to utilize the birefringence effect of material to be made. When linearly polarized light passes through this device perpendicular to phase delay device surfaceTime, in incident light, electric vector is parallel to the component (e light) of phase delay device optical axis and the component perpendicular to phase delay device optical axisThe speed difference that (o light) is propagated in phase delay device, has one conventionally thereby see through between the e light of phase delay device and o lightFixed phase difference, makes transmitted light have multiple possible polarization characteristic. In principle, say any material with birefringence effectCan be used for making phase delay device, for example generally adopt by birefringece crystals such as quartz, calcite, magnesium fluoride or micasCrystalline phase delayer, the liquid crystal phase delay device made, and magnetic liquid under external magnetic field, W sheet etc. But,Above-mentioned all material, except having birefringence effect, also has dichroism, and this can directly cause relevant damage of polarization of deviceConsumption (PDL, PolarizationDependentLoss); And the phase-delay characteristic of phase delay device and dichroism are (PDL characteristic) are all functions of wavelength, within the scope of some common wavelengths, the PDL characteristic of phase delay device can be produced device performanceRaw very large impact. For example, in rotation double compensation device formula wide spectrum ellipsometer (PCSCA type ellipsometer), two whirl compensator C1、C2Phase-delay characteristic and the accurate measurement of PDL characteristic be the prerequisite that realizes high-acruracy survey, any remaining polarization is all by shadowRing the precision to polarimetry. If consider whirl compensator C1、C2Polarization Dependent Loss characteristic, the work of PCSCA type ellipsometerMake algorithm and must make necessary correction. Therefore, the phase-delay characteristic of two whirl compensators and PDL characteristic are to overall performanceAll there is material impact.
The method of measuring polarizer phase delay or PDL has a variety of, but does not have anyly can measure two simultaneouslyThe phase-delay quantity of polarizer and PDL more can not measure phase delay spectral characteristic and the PDL light of two polarizers simultaneouslySpectral property.
Summary of the invention
Object of the present invention is exactly in order to address the above problem, and the phase delay that simultaneously detects two phase delay devices is providedAnd method and the device of Polarization Dependent Loss (PDL) characteristic, it belongs to non-cpntact measurement, simultaneously two phase places of fast detectingThe phase delay of delayer and PDL characteristic; Easy to use efficient, can be used for carrying out two in actual production and research work simultaneouslyThe direct calibration of the phase delay of unknown phase delayer and PDL characteristic, and measurement result is not subject to light source and detector spectrumThe impact of characteristic.
To achieve these goals, the present invention adopts following technical scheme:
A device for detected phase delay and Polarization Dependent Loss, comprises natural daylight light source, feedback control system, natureThe parallel natural daylight of radiant outgoing successively by the polarizer that altogether transmission axle is placed, the first rotating disk, the second rotating disk, analyzer,Photodetector, the first rotating disk is connected with the first motor, and the second rotating disk is connected with the second motor; The feedback control system electrical resistivity survey of sharing the same lightSurvey device, the first motor, connected collection analysis photoelectric current data FEEDBACK CONTROL the first motor and the second motor realized of the second motorRotation status; Described the first rotating disk and the second rotating disk are hollow structure, are provided with fixing in described the first rotating disk hollow structureThe positioner of the first phase delay device, is provided with the location of fixing the second phase delay device in described the second rotating disk hollow structureDevice, described feedback control system is provided with computing module, is provided with computing module and calculates the first phase delay device (10) and theTwo phase delayer (11) phase delay angle δ1、δ2And polarized dependent loss PDL1、PDL2
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
PDL 1 ( indB ) = - 5 lg I ( k&pi; , k&pi; + &pi; 2 ) I ( k&pi; , k&pi; )
PDL 2 ( indB ) = - 5 lg I ( k&pi; + &pi; 2 , k&pi; + &pi; ) I ( k&pi; , k&pi; )
Wherein, k be nonnegative integer (k=0,1,2 ...), photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I(k π+pi/2, k π+pi/2), I (k π, k π+pi/2), I (k π+π/4, π/4, k π+3) and I (k π+pi/2, k π+π) are that photodetector existsThe photoelectric current data of measuring under same wavelength to be measured place, different value of K, or photodetector at same wavelength to be measured place, noWith the mean value of the lower all photoelectric current data of k value.
Described photodetector is photodiode or photomultiplier or CCD linear array or area array sensor, its operating waveLong scope covers the operating wavelength range of the first phase delay device and the second phase delay device.
The described polarizer and analyzer adopt dichroic polarizer or birefringent polarizer, and its operating wavelength range coversThe operating wavelength range of the first phase delay device and the second phase delay device.
Described natural daylight light source is broadband lamp or the wavelength adjustable type lamp that output characteristics is stable, its workWave-length coverage covers the operating wavelength range of the first phase delay device and the second phase delay device.
In the light emitting source output light path of described natural daylight light source, be provided with expand-collimation lens set.
Apply the method that described device carries out detected phase delay and Polarization Dependent Loss, comprise the steps: stepRapid one: regulate analyzer parallel with the polarization direction of the polarizer; Step 2: regulate the first phase delay device, the second phase delayThe polarization direction of the parallel polarizer of device; Step 3: in the same way, synchronized rotation the first rotating disk and the second rotating disk, feedback control system is adoptedCollection is at the photoelectric current data I at corresponding detection wavelength place (k π, k π), I (k π+π/4, k π+π/4), I (k π+pi/2, k π+pi/2) and I (kπ/4, π+3, π/4, k π+3), wherein k is nonnegative integer, at the definition of counting initial time k=0, after this first rotating disk and the second rotating diskEvery rotation half cycle k value increases by 1; Calculate respectively the photoelectric current root-mean-square valve at each wavelength place I &OverBar; ( k&pi; , k&pi; ) = &Sigma; i = 0 k [ I ( i&pi; , i&pi; ) ] 2 k , I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) = &Sigma; i = 0 k { [ I ( i&pi; + &pi; 4 , i&pi; + &pi; 4 ) ] 2 + [ I ( i&pi; + 3 &pi; 4 , i&pi; + 3 &pi; 4 ) ] 2 } 2 k With I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) = &Sigma; i = 0 k [ I ( i&pi; + &pi; 2 , i&pi; + &pi; 2 ) ] 2 k ; Regulate the quick shaft direction of the second phase delay device, make it and the first phase placeThe quick shaft direction of delayer is mutually vertical; Step 4: the zero clearing of k value is restarted to counting, and method of counting is identical with step 3,In the same way, synchronized rotation the first rotating disk and the second rotating disk, feedback control system is captured in the photoelectric current data I at corresponding detection wavelength place(k π, k π+pi/2), I (k π+π/4, π/4, k π+3), I (k π+pi/2, k π+π) and I (π/4, k π+3, π/4, k π+5), calculate respectively Fang JunRoot I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) = &Sigma; i = 0 k [ I ( i&pi; , i&pi; + &pi; 2 ) ] 2 k , I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) = &Sigma; i = 0 k { [ I ( i&pi; + &pi; 4 , i&pi; + 3 &pi; 4 ) ] 2 + [ I ( i&pi; + 3 &pi; 4 , i&pi; + 5 &pi; 4 ) ] 2 } 2 k With I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) = &Sigma; i = 0 k [ I ( i&pi; + &pi; 2 , i&pi; + &pi; ) ] 2 k ; Step 5: the computing module by feedback control system calculates first-phaseThe phase delay angle δ of position delayer and the second phase delay device1、δ2, and calculate polarized dependent loss PDL1And PDL2
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I &OverBar; ( k&pi; , k&pi; ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I &OverBar; ( k&pi; , k&pi; ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
PDL 1 ( indB ) = - 10 lg D 2 D 1 = - 5 lg I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) I &OverBar; ( k&pi; , k&pi; )
PDL 2 ( indB ) = - 10 lg L 2 L 1 = - 5 lg I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) I &OverBar; ( k&pi; , k&pi; ) , Testing process finishes.
Between described step 1 and step 2, also comprise the steps: step 1-1: the fast axle of searching the second phase delay deviceOrientation, carries out after mark, and it is taken off from the second rotating disk; Step 1-2: search the fast axis direction of the first phase delay device, andCarry out mark, then the second phase delay device is put back to the second rotating disk.
The specific implementation of searching phase delay device fast axis direction in described step 1-1, step 1-2 is: phase place is prolongedDevice is fixed on rotating disk late, ensures and light path devices transmission axle placement altogether, and rotary turnplate is until the photoelectricity of photodetector outputStream reaches maximum.
Apply the method that described device carries out detected phase delay and Polarization Dependent Loss, it is characterized in that, compriseFollowing steps: step 1: regulate analyzer parallel with the polarization direction of the polarizer; Step 2: regulate the first phase delay device, theThe polarization direction of the parallel polarizer of two phase delayer; Step 3: in the same way, synchronized rotation the first rotating disk and the second rotating disk, feedbackControl system is captured in photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4) and I (k π+pi/2, the k at corresponding detection wavelength placeπ+pi/2), wherein k is nonnegative integer; Regulate the quick shaft direction of the second phase delay device, make it fast with the first phase delay deviceDirection of principal axis is mutually vertical; Step 4: the zero clearing of k value is restarted to counting, in the same way, synchronized rotation the first rotating disk and the second rotating disk,Feedback control system is captured in photoelectric current data I (k π, k π+pi/2), I (k π+π/4, π/4, k π+3) and the I at corresponding detection wavelength place(k π+pi/2, k π+π); Step 5: by feedback control system and computing module
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
PDL 1 ( indB ) = - 5 lg I ( k&pi; , k&pi; + &pi; 2 ) I ( k&pi; , k&pi; )
PDL 2 ( indB ) = - 5 lg I ( k&pi; + &pi; 2 , k&pi; + &pi; ) I ( k&pi; , k&pi; ) Calculating the first phase delay device and second phase place at all k values place prolongsDevice phase delay angle δ late1k、δ2k, and calculate polarized dependent loss PDL1kAnd PDL2k; To the δ at all k values place1k、δ2k、PDL1kAnd PDL2kAsk quadratic sum, get root-mean-square valve, testing process finishes.
Between described step 1 and step 2, also comprise the steps: step 1-1: the fast axle of searching the second phase delay deviceOrientation, carries out after mark, and it is taken off from the second rotating disk; Step 1-2: search the fast axis direction of the first phase delay device, andCarry out mark, then the second phase delay device is put back to the second rotating disk.
Beneficial effect of the present invention:
1) measuring method of the present invention belongs to non-cpntact measurement, can measure the fast of two unknown broadband phase delay devices simultaneouslyShaft position, phase-delay characteristic and PDL characteristic, easy to use efficient, can be used for carrying out in actual production and research work simultaneouslyThe direct calibration of the phase-delay quantity of two unknown zero level phase delay devices.
2) in multi-wavelength light electric explorer, the characteristic of each probe unit and incident intensity the unknown, do not needComplicated Fourier analysis and solve and can demarcate rapidly and accurately two zero level phase delay devices to be measured at ripple to be investigated simultaneouslyThe phase delay spectrum of section.
3), with respect to other measuring method, the measured zero level phase delay device phase delay of the present invention is wider, bothCan be 1/4 phase delay device, can not be also 1/4 phase delay device.
Brief description of the drawings
Fig. 1 is phase delay device phase-delay characteristic involved in the present invention and Polarization Dependent Loss characteristic measuring deviceUniversal architecture schematic diagram;
Fig. 2 is phase delay device phase-delay characteristic involved in the present invention and Polarization Dependent Loss characteristic measuring deviceDetection method flow chart;
Wherein:
1, lamp; 2, the polarizer;
3, the first rotating disk; 4, the second rotating disk;
5, analyzer; 6, photodetector;
7, feedback control system; 8, the first motor;
9, the second motor; 10, the first phase delay device;
11, the second phase delay device; 20: heat-conducting silicone grease;
Detailed description of the invention
Innovative point of the present invention has been to provide the phase delay damage relevant with polarization that simultaneously detects two phase delay devicesMethod and the device of consumption (PDL) characteristic. Below in conjunction with embodiment, the present invention is described in detail.
The device for fast detecting of the phase-delay characteristic of phase delay device of the present invention and Polarization Dependent Loss characteristicStructure as shown in Figure 1: comprise natural daylight light source 1 and feedback control system 7, the parallel natural daylight of natural daylight light source 1 outgoing is complied withInferior to transmission axle is placed altogether the polarizer 2, the first rotating disk 3, the second rotating disk 4, analyzer 5, photodetector 6, the first rotating disks 3Be connected with the first motor 8, the second rotating disk 4 is connected with the second motor 9; Feedback control system 7 is with photodetector 6, the first motor8, the connected rotation shape of realizing collection analysis photoelectric current data FEEDBACK CONTROL the first motor 8 and the second motor 9 of the second motor 9State; Described the first rotating disk 3 and the second rotating disk 4 are hollow structure, in described the first rotating disk 3 hollow structures, are provided with fixing first-phaseThe positioner of position delayer 10, is provided with the location of fixing the second phase delay device 11 in described the second rotating disk 4 hollow structuresDevice. In the present embodiment, adopt the periphery of hollow structure to have multiple locating holes, by this locating hole, by the first phase delay device10 and second phase delay device 11 be separately fixed at the hollow structure part of the first rotating disk 3 and the second rotating disk 4; And by the first motor8 and second motor 9 control respectively the rotation status of the first rotating disk 3 and the second rotating disk 4.
Described feedback control system 7 is provided with computing module, and computing module is provided with and calculates the first phase delay device 10 HesThe second phase delay device 11 phase delay angle δ1、δ2And polarized dependent loss PDL1、PDL2Relational expression:
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
PDL 1 ( indB ) = - 5 lg I ( k&pi; , k&pi; + &pi; 2 ) I ( k&pi; , k&pi; )
PDL 2 ( indB ) = - 5 lg I ( k&pi; + &pi; 2 , k&pi; + &pi; ) I ( k&pi; , k&pi; )
Wherein, k be nonnegative integer (k=0,1,2 ...), photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I(k π+pi/2, k π+pi/2), I (k π, k π+pi/2), I (k π+π/4, π/4, k π+3) and I (k π+pi/2, k π+π) are that photodetector 6 existsThe photoelectric current data of measuring under same wavelength to be measured place, different value of K, or photodetector 6 at same wavelength to be measured place, noWith the mean value of the lower all photoelectric current data of k value.
Described natural daylight light source 1 is broadband lamp or the wavelength adjustable type lamp that output characteristics is stable, its workMake the operating wavelength range that wave-length coverage can cover the first phase delay device 10 and the second phase delay device 11. In concrete applicationIn, according to the spot size of this light source and beam quality, in the light emitting source output light path of natural daylight light source 1, be provided with expand-standardStraight set of lenses.
The described polarizer 2 and analyzer 5 can adopt the one in dichroic polarizer or birefringent polarizer, its workWave-length coverage can cover the operating wavelength range of the first phase delay device 10 and the second phase delay device 11.
The application requirements of described the first rotating disk 3 and the second rotating disk 4 is that the rotation precision of two rotating disks all should meet feedback controlThe control requirement of system 7 processed, common commercial product all can meet this application requirements.
Described photodetector 6 is photodiode, photomultiplier or CCD (Charge-coupledDevice) lineBattle array or area array sensor, carry out data for the photo-signal detecting is reached to feedback control system 7 through data collecting cardProcess, its operating wavelength range can cover the operating wavelength range of the first phase delay device 10 and the second phase delay device 11.
After the photoelectric current data that described feedback control system 7 collection analysis photodetectors 6 detect, according to certain anti-Feedback control algolithm is sent the rotation status of pulse signal through motor driver adjustment motor.
Described the first motor 8 and the second motor 9 and motor driver thereof are selected servomotor, p-m step motor or anti-Answer formula stepper motor, and the motor driver matching with the motor of above every type. Due to the first rotating disk 3 in the present inventionBe connected with the first motor 8, the second rotating disk 4 is connected with the second motor 9, and controls respectively first by the first motor 8 and the second motor 9The rotation status of rotating disk 3 and the second rotating disk 4, also can select in practical application by single motor and the integrated system of single rotating diskMake electric turntable commodity together and come respectively as the first rotating disk 3 and the first motor 8 that are connected, and be connected secondRotating disk 4 and the second motor 9.
Described the first phase delay device 10 and the second phase delay device 11 all for by crystalline material, polymeric material, liquid crystal,All possess phase delay function the single or compound phase delay devices of the making such as the magnetic liquid under external magnetic field etc.Optics.
The phase delay angle of a kind of phase delay device of the present invention and the checkout gear of Polarization Dependent Loss characteristicAs shown in Figure 2, its concrete steps are as follows for the process of practical function:
Step 1: regulate analyzer 5 parallel with the polarization direction of the polarizer 2;
Step 2: the first phase delay device 10, the second phase delay device 11 are individually fixed in to the first rotating disk 3, second and turnOn the positioner of dish 4, regulate the quick shaft direction of the first phase delay device 10 and the second phase delay device 11 to be parallel to each other, this is fastDirection of principal axis is parallel to each other with the polarizer 2 and the polarization direction of analyzer 5 simultaneously;
Step 3: with angular speed w in the same way, synchronized rotation the first rotating disk 3 and the second rotating disk 4, now anglec of rotation C1=C2=Wt, feedback control system 7 is according to the concrete testing requirement of the first phase delay device 10 and the second phase delay device 11 is captured inThe photoelectric current data I (C at corresponding detection wavelength place1,C2), especially I (k π, k π), I (k π+π/4, k π+π/4) and I (k π+pi/2, kπ+pi/2), wherein k is nonnegative integer (at the counting initial time of t=0, definition k=0, every rotation half cycle k value increase by 1); DetectIt is to detect phase delay angle and the Polarization Dependent Loss of two phase delay devices in a certain certain wave strong point that requirement is actuallyCharacteristic, still detects phase delay angle characteristic and the Polarization Dependent Loss spy of two phase delay devices in a certain wave-length coverageProperty, in the time being the latter's testing requirement, need to be captured in by detector array the light at all wavelengths place in required wave-length coverageCurrent data, finally obtains the phase delay angle spectral characteristic of two phase delay devices in this wave-length coverage relevant with polarizationLoss spectra characteristic. Anglec of rotation C1、C2After changing k π, stop sampling, now the neglecting greatly concrete detection case and can establish voluntarily of k valueDetermine, then regulate the quick shaft direction of the second phase delay device 11, make it mutually to hang down with the quick shaft direction of the first phase delay device 10Directly, keep the quick shaft direction of the first phase delay device 10 and the polarization direction of the polarizer 2 and analyzer 5 to be parallel to each other simultaneously, thisThe anglec of rotation of latter two phase delay device meets relational expression C2=C1+π/2;
Step 4: the zero clearing of k value is restarted to counting, simultaneously with same angular velocity in the same way, synchronized rotation the first rotating disk 3 andThe second rotating disk 4, feedback control system 7 is captured in the photoelectric current data I (C at corresponding detection wavelength place1,C2), especially I (k π, k π+Pi/2), I (k π+π/4, π/4, k π+3) and I (k π+pi/2, k π+π); In computing module by feedback control system 7, arrange aboutThe phase delay angle δ of the first phase delay device 10 and the second phase delay device 111、δ2, and polarized dependent loss PDL1WithPDL2Computing formula, calculate and export at each detection wavelength place the first phase delay device 10 and the second phase delay device 11Characteristic. When calculating the first phase delay device 10 and the second phase delay device 11 phase delay angle δ at all k values place1k、δ2k, and calculate polarized dependent loss PDL1kAnd PDL2kAfter, to the δ at all k values place1k、δ2k、PDL1kAnd PDL2kAsk quadratic sum alsoGet its root-mean-square valve, testing process finishes.
Calculating the first phase place A delayer 10 and the second phase delay device that in the computing module of feedback control system 7, arrange11 phase delay angle δ1、δ2, and calculate polarized dependent loss PDL1And PDL2Formula be specially:
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
PDL 1 ( indB ) = - 5 lg I ( k&pi; , k&pi; + &pi; 2 ) I ( k&pi; , k&pi; )
PDL 2 ( indB ) = - 5 lg I ( k&pi; + &pi; 2 , k&pi; + &pi; ) I ( k&pi; , k&pi; )
The phase delay angle of a kind of phase delay device as above and the detection method of Polarization Dependent Loss characteristic, instituteState between step 1 and step 2 and also comprise the steps:
Step 1-1: search the fast axis direction of the second phase delay device 11, carry out after mark, it is got from the second rotating disk 4Under;
Step 1-2: search the fast axis direction of the first phase delay device 10, and carry out mark, then by the second phase delayDevice 11 is put back to the second rotating disk 4.
The specific implementation of searching phase delay device fast axis direction in described step 1-1, step 1-2 is: phase place is prolongedDevice is fixed on rotating disk late, ensures and light path devices transmission axle placement altogether, and rotary turnplate is until the photoelectricity of photodetector outputStream reaches maximum.
The phase delay angle of a kind of phase delay device as above and the detection method of Polarization Dependent Loss characteristic, instituteState the phase delay angle δ arranging in feedback control system 7 in step 41、δ2、PDL1And PDL2Each light in computing formulaCurrent data, both can adopt each measurement photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I (k π+pi/2, k π+π/2), I (k π, k π+pi/2), I (k π+π/4, π/4, k π+3) and I (k π+pi/2, k π+π), wherein integer k=0,1,2 ..., respectivelyObtain the δ under several different value of K1k、δ2k、PDL1kAnd PDL2kValue, then the δ to all k values place respectively1k、δ2k、PDL1kAnd PDL2kSummation is averaged, and obtains final δ1、δ2、PDL1And PDL2Data; Also can adopt other various measures that reduce error, exampleAs, can in step 3, calculate respectively the following root-mean-square valve of each wavelength place photoelectric currentWithAnd in step 4, calculate respectively root-mean-square valve WithThen the calculating δ, arranging in feedback control system 71、δ2、PDL1And PDL2Formula in, adopt above-mentioned root-mean-square valveReplace respectively corresponding I (C1,C2), obtain eachThe δ at wavelength to be measured place1、δ2、PDL1And PDL2Data are also preserved output data, end operation. Its idiographic flow comprises following stepRapid:
Step 1: regulate analyzer 5 parallel with the polarization direction of the polarizer 2;
Step 2: the polarization direction that regulates the first phase delay device 10, the parallel polarizer 2 of the second phase delay device 11;
Step 3: in the same way, synchronized rotation the first rotating disk 3 and the second rotating disk 4, feedback control system 7 is captured in corresponding detectionPhotoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I (k π+pi/2, k π+pi/2) and I (π/4, k π+3, k π+3 at wavelength placeπ/4), wherein k is nonnegative integer, in counting initial time definition k=0, after this first rotating disk 3 and the every rotation of the second rotating disk 4 halfWeek k value increase by 1; Calculate respectively the root-mean-square valve of each wavelength place photoelectric current
I &OverBar; ( k&pi; , k&pi; ) = &Sigma; i = 0 k [ I ( i&pi; , i&pi; ) ] 2 k
I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) = &Sigma; i = 0 k { [ I ( i&pi; + &pi; 4 , i&pi; + &pi; 4 ) ] 2 + [ I ( i&pi; + 3 &pi; 4 , i&pi; + 3 &pi; 4 ) ] 2 } 2 k
I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) = &Sigma; i = 0 k [ I ( i&pi; + &pi; 2 , i&pi; + &pi; 2 ) ] 2 k ; The quick shaft direction that regulates the second phase delay device 11, makesThe quick shaft direction with the first phase delay device 10 mutually vertical;
Step 4: the zero clearing of k value is restarted to counting, and method of counting is identical with step 3, in the same way, synchronized rotation firstRotating disk 3 and the second rotating disk 4, feedback control system 7 is captured in photoelectric current data I (k π, k π+pi/2), the I at corresponding detection wavelength place(k π+π/4, π/4, k π+3), I (k π+pi/2, k π+π) and I (π/4, k π+3, π/4, k π+5), calculate respectively root-mean-square valve
I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) = &Sigma; i = 0 k [ I ( i&pi; , i&pi; + &pi; 2 ) ] 2 k ,
I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) = &Sigma; i = 0 k { [ I ( i&pi; + &pi; 4 , i&pi; + 3 &pi; 4 ) ] 2 + [ I ( i&pi; + 3 &pi; 4 , i&pi; + 5 &pi; 4 ) ] 2 } 2 k
I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) = &Sigma; i = 0 k [ I ( i&pi; + &pi; 2 , i&pi; + &pi; ) ] 2 k ;
Step 5: by the formula arranging in feedback control system 7 computing modules
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I &OverBar; ( k&pi; , k&pi; ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I &OverBar; ( k&pi; , k&pi; ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) ]
PDL 1 ( indB ) = - 10 lg D 2 D 1 = - 5 lg I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) I &OverBar; ( k&pi; , k&pi; )
PDL 2 ( indB ) = - 10 lg L 2 L 1 = - 5 lg I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) I &OverBar; ( k&pi; , k&pi; )
Calculate the phase delay angle δ of the first phase delay device 10 and the second phase delay device 111、δ2, and calculate polarizationDependent loss PDL1And PDL2, testing process finishes.
Introduce the theoretical foundation of every formula in above-mentioned steps three and step 4 below. According to the relevant reason of polarization opticsOpinion, the Stokes of the natural daylight that the natural daylight light source 1 in Fig. 1 shown device sends represents Sin, detects with photodetector 6The Stokes of optical signal represent to meet between Sout following relation:
Sout=MA·MC2(C22,D1,D2)·MC1(C11,L1,L2)·MP·Sin(1)
Wherein, MP、MA、MC1、MC2Be respectively the polarizer 2, analyzer 5, the first phase delay device 10 and the second phase delayThe Muller matrix of device 11; C1、δ1、L1、L2Be respectively the fast axle of the first phase delay device 10 with respect to the folder of polarizer polarization directionThe dichroism of the phase-delay quantity of angle, the first phase delay device 10 and the fast axle of the first phase delay device 10 and slow axis absorbsCoefficient; In like manner, C2、δ2、D1、D2Be respectively the fast axle of the second phase delay device 11 with respect to the angle of polarizer polarization direction,The dichroism absorption coefficient of the phase-delay quantity of two phase delayer 11 and the fast axle of the second phase delay device 11 and slow axis.The Stokes of the natural daylight that natural daylight light source 1 sends is expressed as:
S in = S 0 S 1 S 2 S 3 = 1 0 0 0
The Muller matrix of the polarizer 2 and analyzer 5: M P = M A = 1 2 &CenterDot; 1 1 0 0 1 1 0 0 0 0 0 0 0 0 0 0
The Muller matrix of the first phase delay device 4:
M C 1 ( C 1 , &delta; 1 , L 1 , L 2 ) = L 1 2 + L 2 2 ( L 1 2 - L 2 2 ) &CenterDot; cos 2 C 1 ( L 1 2 - L 2 2 ) &CenterDot; sin 2 C 1 0 ( L 1 2 - L 2 2 ) &CenterDot; cos 2 C 1 ( L 1 2 + L 2 2 ) &CenterDot; cos 2 2 C 1 + 2 L 1 L 2 cos &delta; 1 &CenterDot; sin 2 2 C 1 1 2 &CenterDot; sin 4 C 1 &CenterDot; ( L 1 2 + L 2 2 - 2 L 1 L 2 cos &delta; 1 ) - 2 L 1 L 2 sin &delta; 1 &CenterDot; sin 2 C 1 ( L 1 2 - L 2 2 ) &CenterDot; sin 2 C 1 1 2 &CenterDot; sin 4 C 1 &CenterDot; ( L 1 2 + L 2 2 - 2 L 1 L 2 cos &delta; 1 ) ( L 1 2 + L 2 2 ) &CenterDot; sin 2 2 C 1 + 2 L 1 L 2 cos &delta; 1 &CenterDot; cos 2 2 C 1 2 L 1 L 2 sin &delta; 1 &CenterDot; cos 2 C 1 0 2 L 1 L 2 sin &delta; 1 &CenterDot; sin 2 C 1 - 2 L 1 L 2 sin &delta; 1 &CenterDot; cos 2 C 1 2 L 1 L 2 cos &delta; 1
The Muller matrix of the second phase delay device 5:
M C 2 ( C 2 , &delta; 2 , D 1 , D 2 ) = D 1 2 + D 2 2 ( D 1 2 - D 2 2 ) &CenterDot; cos 2 C 2 ( D 1 2 - D 2 2 ) &CenterDot; sin 2 C 2 0 ( D 1 2 - D 2 2 ) &CenterDot; cos 2 C 2 ( D 1 2 + D 2 2 ) &CenterDot; cos 2 2 C 2 + 2 D 1 D 2 cos &delta; 2 &CenterDot; sin 2 2 C 2 1 2 &CenterDot; sin 4 C 2 &CenterDot; ( D 1 2 + D 2 2 - 2 D 1 D 2 cos &delta; 2 ) - 2 D 1 D 2 sin &delta; 2 &CenterDot; sin 2 C 2 ( D 1 2 - D 2 2 ) &CenterDot; sin 2 C 2 1 2 &CenterDot; sin 4 C 2 &CenterDot; ( D 1 2 + D 2 2 - 2 D 1 D 2 cos &delta; 2 ) ( D 1 2 + D 2 2 ) &CenterDot; sin 2 2 C 2 + 2 D 1 D 2 cos &delta; 2 &CenterDot; cos 2 2 C 2 2 D 1 D 2 sin &delta; 2 &CenterDot; cos 2 C 2 0 2 D 1 D 2 sin &delta; 2 &CenterDot; sin 2 C 2 - 2 D 1 D 2 sin &delta; 2 &CenterDot; cos 2 C 2 2 D 1 D 2 cos &delta; 2
The expression of the S0 component of output optical signal Sout is:
S 0 ( D 1 , D 2 , L 1 , L 2 , &delta; 1 , &delta; 2 , C 1 , C 2 ) = [ D 1 2 + D 2 2 + ( D 1 2 - D 2 2 ) &CenterDot; cos 2 C 2 ] &CenterDot; [ L 1 2 + L 2 2 + ( L 1 2 - L 2 2 ) &CenterDot; cos 2 C 1 ] + + [ ( D 1 2 - D 2 2 ) &CenterDot; cos 2 C 2 + ( D 1 2 + D 2 2 ) &CenterDot; cos 2 2 C 2 + 2 D 1 D 2 cos &delta; 2 &CenterDot; sin 2 2 C 2 ] &CenterDot; [ ( L 1 2 - L 2 2 ) &CenterDot; cos 2 C 1 + ( L 1 2 + L 2 2 ) &CenterDot; cos 2 2 C 1 + 2 L 1 L 2 cos &delta; 1 &CenterDot; sin 2 2 C 1 ] + + [ ( D 1 2 - D 2 2 ) &CenterDot; sin 2 C 2 + 1 2 &CenterDot; ( D 1 2 + D 2 2 - 2 D 1 D 2 cos &delta; 2 ) &CenterDot; sin 4 C 2 ] &CenterDot; [ ( L 1 2 - L 2 2 ) &CenterDot; sin 2 C 1 + 1 2 &CenterDot; ( L 1 2 + L 2 2 - 2 L 1 L 2 cos &delta; 1 ) &CenterDot; sin 4 C 1 ] - - 4 D 1 D 2 L 1 L 2 sin &delta; 1 sin &delta; 2 sin 2 C 1 sin 2 C 2
Due at any wavelength place, the output photoelectric stream of 6 corresponding probe units of photodetector is proportional to this wavelength placeThe light intensity of output optical signal S0 component,
I(C1,C2)=η·S0(D1,D2,L1,L212,C1,C2)(2)
Wherein real number η is 1 the proportionality coefficient of being less than of considering that the impact of the factor such as detective quantum efficiency introduces, this value andResult of calculation last in the present invention is irrelevant. As shown from the above formula, output photoelectric stream is actually C1、C2、D1、D2、L1、L2、δ1、δ2Function, for the convenience that follow-up formula (3.a~3.f) and (4.a~4.d) represent, be abbreviated as I (C herein1,C2)。In the situation that systematic function is stable, at any one definite wavelength place, photoelectric current I (C1,C2) about independent variable C1And C2AllBe to be the function of π in the cycle, and have following relation to occur in several special angle:
I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) = I ( k&pi; + 3 &pi; 4 , k&pi; + 3 &pi; 4 ) = &eta; &CenterDot; [ 2 D 1 2 L 1 2 + 2 D 2 2 L 2 2 + 4 D 1 D 2 L 1 L 2 cos ( &delta; 1 + &delta; 2 ) ] - - - ( 3 . a )
I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) = I ( k&pi; + 3 &pi; 4 , k&pi; + 5 &pi; 4 ) = &eta; &CenterDot; [ 2 D 2 2 L 1 2 + 2 D 1 2 L 2 2 + 4 D 1 D 2 L 1 L 2 cos ( &delta; 1 - &delta; 2 ) ] - - - ( 3 . b )
I ( k&pi; , k&pi; ) = 8 &eta;D 1 2 L 1 2 - - - ( 3 . c )
I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) = 8 &eta;D 2 2 L 2 2 - - - ( 3 . d )
I ( k&pi; , k&pi; + &pi; 2 ) = 8 &eta;D 2 2 L 1 2 - - - ( 3 . e )
I ( k&pi; + &pi; 2 , k&pi; + &pi; ) = 8 &eta;D 1 2 L 2 2 - - - ( 3 . f )
Utilize above formula can obtain the phase-delay quantity of the first phase delay device 4 and the second phase delay device 5:
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ] - - - ( 4 . a )
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I ( k&pi; , k&pi; ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I ( k&pi; , k&pi; ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I ( k&pi; , k&pi; + &pi; 2 ) - I ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I ( k&pi; + &pi; 2 , k&pi; + &pi; ) ] - - - ( 4 . b )
The polarized dependent loss PDL of the first phase delay device 4 and the second phase delay device 51、PDL2With dichroic separatelyPass between property absorption coefficient is:
PDL 1 ( indB ) = - 10 lg D 2 D 1 = - 5 lg I ( k&pi; , k&pi; + &pi; 2 ) I ( k&pi; , k&pi; ) - - - ( 4 . c )
PDL 2 ( indB ) = - 10 lg L 2 L 1 = - 5 lg I ( k&pi; + &pi; 2 , k&pi; + &pi; ) I ( k&pi; , k&pi; ) - - - ( 4 . d )
In formula (4.a-4.d), along with the increase of k value (integer k=0,1,2 ...), at each wavelength to be measured, all can in placeObtain many group photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I (k π+pi/2, k π+pi/2), I (k π, k π+pi/2), I (kπ+π/4, π/4, k π+3) and I (k π+pi/2, k π+π); For eliminating the rotation of the first phase delay device 10 and the second phase delay device 11The impact in the slight error sources such as angular deviation, photodetector noise can adopt the various errors that reduce in specific implementation processMeasure, both can in abovementioned steps three and step 4, adopt the photoelectric current data under each k value, obtain respectively several notWith the δ under k value1k、δ2k、PDL1kAnd PDL2kValue, then the δ to all k values place respectively1k、δ2k、PDL1kAnd PDL2kAsk quadratic sum, andGet its r.m.s., obtain final δ1、δ2、PDL1And PDL2Data; Also can adopt other various measures that reduce error,For example, can in step 3, calculate respectively the following root-mean-square valve of each wavelength place photoelectric current WithAnd in step 4, calculate respectively root-mean-square valve WithThen, arrange in feedback control system 7Calculate δ1、δ2、PDL1And PDL2Formula in, adopt above-mentioned root-mean-square valveReplace respectively corresponding I (C1,C2), asShown in formula (5.a-5.d), obtain the δ at each wavelength to be measured place1、δ2、PDL1And PDL2Data are also preserved output data, endOperation.
&delta; 1 = 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I &OverBar; ( k&pi; , k&pi; ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] + 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) ] - - - ( 5 . a )
&delta; 2 = 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) 2 I &OverBar; ( k&pi; , k&pi; ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) ] - 1 2 &CenterDot; cos - 1 [ 4 I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) - I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) - I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) 2 I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) ] - - - ( 5 . b )
PDL 1 ( indB ) = - 10 lg D 2 D 1 = - 5 lg I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) I &OverBar; ( k&pi; , k&pi; ) - - - ( 5 . c )
PDL 2 ( indB ) = - 10 lg L 2 L 1 = - 5 lg I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) I &OverBar; ( k&pi; , k&pi; ) - - - ( 5 . d )
Wherein, the expression formula of each root-mean-square valve is as follows:
I &OverBar; ( k&pi; , k&pi; ) = &Sigma; i = 0 k [ I ( i&pi; , i&pi; ) ] 2 k
I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; 2 ) = &Sigma; i = 0 k [ I ( i&pi; + &pi; 2 , i&pi; + &pi; 2 ) ] 2 k
I &OverBar; ( k&pi; + &pi; 4 , k&pi; + &pi; 4 ) = &Sigma; i = 0 k { [ I ( i&pi; + &pi; 4 , i&pi; + &pi; 4 ) ] 2 + [ I ( i&pi; + 3 &pi; 4 , i&pi; + 3 &pi; 4 ) ] 2 } 2 k
I &OverBar; ( k&pi; , k&pi; + &pi; 2 ) = &Sigma; i = 0 k [ I ( i&pi; , i&pi; + &pi; 2 ) ] 2 k
I &OverBar; ( k&pi; + &pi; 2 , k&pi; + &pi; ) = &Sigma; i = 0 k [ I ( i&pi; + &pi; 2 , i&pi; + &pi; ) ] 2 k
I &OverBar; ( k&pi; + &pi; 4 , k&pi; + 3 &pi; 4 ) = &Sigma; i = 0 k { [ I ( i&pi; + &pi; 4 , i&pi; + 3 &pi; 4 ) ] 2 + [ I ( i&pi; + 3 &pi; 4 , i&pi; + 5 &pi; 4 ) ] 2 } 2 k
By reference to the accompanying drawings the specific embodiment of the present invention is described although above-mentioned, not the present invention is protected to modelThe restriction of enclosing, one of ordinary skill in the art should be understood that, on the basis of technical scheme of the present invention, those skilled in the art are notNeed to pay various amendments that creative work can make or distortion still in protection scope of the present invention.

Claims (10)

1. a device for detected phase delay and Polarization Dependent Loss, is characterized in that: comprise natural daylight light source (1), feedbackControl system (7), the parallel natural daylight of natural daylight light source (1) outgoing is successively by the polarizer (2), first that transmission axle is placed altogetherRotating disk (3), the second rotating disk (4), analyzer (5), photodetector (6), the first rotating disk (3) is connected with the first motor (8), and secondRotating disk (4) is connected with the second motor (9); The same photodetector of feedback control system (7) (6), the first motor (8), the second motor(9) be connected and realize the rotation status of collection analysis photoelectric current data FEEDBACK CONTROL the first motor (8) and the second motor (9); InstituteState the first rotating disk (3) and the second rotating disk (4) is hollow structure, in described the first rotating disk (3) hollow structure, be provided with and fix firstThe positioner of phase delay device (10), is provided with and fixes the second phase delay device in described the second rotating disk (4) hollow structure(11) positioner, described feedback control system (7) is provided with computing module and calculates the first phase delay device (10) and secondPhase delay device (11) phase delay angle δ1、δ2And polarized dependent loss PDL1、PDL2
&delta; 1 = 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + &pi; 4 ) - I ( k &pi; , k &pi; ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) 2 I ( k &pi; , k &pi; ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) &rsqb; + 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + 3 &pi; 4 ) - I ( k &pi; , k &pi; + &pi; 2 ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; ) 2 I ( k &pi; , k &pi; + &pi; 2 ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; ) &rsqb;
&delta; 2 = 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + &pi; 4 ) - I ( k &pi; , k &pi; ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) 2 I ( k &pi; , k &pi; ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) &rsqb; - 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + 3 &pi; 4 ) - I ( k &pi; , k &pi; + &pi; 2 ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; ) 2 I ( k &pi; , k &pi; + &pi; 2 ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; ) &rsqb;
PDL 1 ( i n d B ) = - 5 lg I ( k &pi; , k &pi; + &pi; 2 ) I ( k &pi; , k &pi; )
PDL 2 ( i n d B ) = - 5 lg I ( k &pi; + &pi; 2 , k &pi; + &pi; ) I ( k &pi; , k &pi; )
Wherein, k be nonnegative integer (k=0,1,2 ...), photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I (k π+Pi/2, k π+pi/2), I (k π, k π+pi/2), I (k π+π/4, π/4, k π+3) and I (k π+pi/2, k π+π) be photodetector (6) withThe photoelectric current data of measuring under one wavelength to be measured place, different value of K, or photodetector (6) at same wavelength to be measured place, noWith the mean value of the lower all photoelectric current data of k value.
2. the device of a kind of detected phase delay according to claim 1 and Polarization Dependent Loss, is characterized in that: described inPhotodetector (6) is photodiode or photomultiplier or CCD linear array or area array sensor, and its operating wavelength range coversThe operating wavelength range of the first phase delay device (10) and the second phase delay device (11).
3. the device of a kind of detected phase delay according to claim 1 and Polarization Dependent Loss, is characterized in that: described inThe polarizer (2) and analyzer (5) adopt dichroic polarizer or birefringent polarizer, and its operating wavelength range covers first-phaseThe operating wavelength range of position delayer (10) and the second phase delay device (11).
4. the device of a kind of detected phase delay according to claim 1 and Polarization Dependent Loss, is characterized in that: described inNatural daylight light source (1) is broadband lamp or the wavelength adjustable type lamp that output characteristics is stable, its operating wavelength rangeCover the operating wavelength range of the first phase delay device (10) and the second phase delay device (11).
5. the device of a kind of detected phase delay according to claim 1 and Polarization Dependent Loss, is characterized in that: described inIn the light emitting source output light path of natural daylight light source (1), be provided with expand-collimation lens set.
6. application rights requires device described in 1 to carry out a method for detected phase delay and Polarization Dependent Loss, and its feature existsIn, comprise the steps:
Step 1: regulate analyzer (5) parallel with the polarization direction of the polarizer (2);
Step 2: the polarization direction that regulates the first phase delay device (10), the parallel polarizer of the second phase delay device (11) (2);
Step 3: in the same way, synchronized rotation the first rotating disk (3) and the second rotating disk (4), feedback control system (7) is captured in corresponding inspectionSurvey wavelength place photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4), I (k π+pi/2, k π+pi/2) and I (π/4, k π+3, k π+3 π/4), wherein k is nonnegative integer, at counting initial time definition k=0, after this first rotating disk (3) and the second rotating disk (4) often revolveTurn half cycle k value and increase by 1; Calculate respectively the photoelectric current root-mean-square valve at each wavelength place I &OverBar; ( k &pi; + &pi; 4 , k &pi; + &pi; 4 ) = &Sigma; i = 0 k { &lsqb; I ( i &pi; + &pi; 4 , i &pi; + &pi; 4 ) &rsqb; 2 + &lsqb; I ( i &pi; + 3 &pi; 4 , i &pi; + 3 &pi; 4 ) &rsqb; 2 } 2 k WithRegulate the quick shaft direction of the second phase delay device (11), make it mutually vertical with the quick shaft direction of the first phase delay device (10);
Step 4: the zero clearing of k value is restarted to counting, and method of counting is identical with step 3, in the same way, synchronized rotation the first rotating disk(3) and the second rotating disk (4), feedback control system (7) be captured in corresponding detection wavelength place photoelectric current data I (k π, k π+pi/2),I (k π+π/4, π/4, k π+3), I (k π+pi/2, k π+π) and I (π/4, k π+3, π/4, k π+5), calculate respectively root-mean-square valve I &OverBar; ( k &pi; + &pi; 4 , k &pi; + 3 &pi; 4 ) = &Sigma; i = 0 k { &lsqb; I ( i &pi; + &pi; 4 , i &pi; + 3 &pi; 4 ) &rsqb; 2 + &lsqb; I ( i &pi; + 3 &pi; 4 , i &pi; + 5 &pi; 4 ) &rsqb; 2 } 2 k With I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; ) = &Sigma; i = 0 k &lsqb; I ( i &pi; + &pi; 2 , i &pi; + &pi; ) &rsqb; 2 k ;
Step 5: calculate the first phase delay device (10) and the second phase delay device by the computing module of feedback control system (7)(11) phase delay angle δ1、δ2, and calculate polarized dependent loss PDL1And PDL2
&delta; 1 = 1 2 &CenterDot; cos - 1 &lsqb; 4 I &OverBar; ( k &pi; + &pi; 4 , k &pi; + &pi; 4 ) - I &OverBar; ( k &pi; , k &pi; ) - I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) 2 I &OverBar; ( k &pi; , k &pi; ) &CenterDot; I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) &rsqb; + 1 2 &CenterDot; cos - 1 &lsqb; 4 I &OverBar; ( k &pi; + &pi; 4 , k &pi; + 3 &pi; 4 ) - I &OverBar; ( k &pi; , k &pi; + &pi; 2 ) - I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; ) 2 I &OverBar; ( k &pi; , k &pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; ) &rsqb;
&delta; 2 = 1 2 &CenterDot; cos - 1 &lsqb; 4 I &OverBar; ( k &pi; + &pi; 4 , k &pi; + &pi; 4 ) - I &OverBar; ( k &pi; , k &pi; ) - I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) 2 I &OverBar; ( k &pi; , k &pi; ) &CenterDot; I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) &rsqb; - 1 2 &CenterDot; cos - 1 &lsqb; 4 I &OverBar; ( k &pi; + &pi; 4 , k &pi; + 3 &pi; 4 ) - I &OverBar; ( k &pi; , k &pi; + &pi; 2 ) - I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; ) 2 I &OverBar; ( k &pi; , k &pi; + &pi; 2 ) &CenterDot; I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; ) &rsqb;
PDL 1 ( i n d B ) = - 10 lg D 2 D 1 = - 5 lg I &OverBar; ( k &pi; , k &pi; + &pi; 2 ) I &OverBar; ( k &pi; , k &pi; )
PDL 2 ( i n d B ) = - 10 lg L 2 L 1 = - 5 lg I &OverBar; ( k &pi; + &pi; 2 , k &pi; + &pi; ) I &OverBar; ( k &pi; , k &pi; ) , Testing process finishes.
7. the detection method of a kind of phase delay and Polarization Dependent Loss according to claim 6, is characterized in that: described stepRapid one and step 2 between also comprise the steps:
Step 1-1: search the fast axis direction of the second phase delay device (11), carry out after mark, it is got from the second rotating disk (4)Under;
Step 1-2: search the fast axis direction of the first phase delay device (10), and carry out mark, then by the second phase delay device(11) put back to the second rotating disk (4).
8. the detection method of a kind of phase delay and Polarization Dependent Loss according to claim 7, is characterized in that: described stepThe specific implementation of searching phase delay device fast axis direction in rapid 1-1, step 1-2 is: phase delay device is fixed on to rotating diskUpper, ensure and light path devices transmission axle placement altogether, rotary turnplate is until the photoelectric current of photodetector output reaches maximum.
9. application rights requires device described in 1 to carry out a method for detected phase delay and Polarization Dependent Loss, and its feature existsIn, comprise the steps:
Step 1: regulate analyzer (5) parallel with the polarization direction of the polarizer (2);
Step 2: the polarization direction that regulates the first phase delay device (10), the parallel polarizer of the second phase delay device (11) (2);
Step 3: in the same way, synchronized rotation the first rotating disk (3) and the second rotating disk (4), feedback control system (7) is captured in corresponding inspectionSurvey photoelectric current data I (k π, k π), I (k π+π/4, k π+π/4) and the I (k π+pi/2, k π+pi/2) at wavelength place, wherein k is non-negative wholeNumber; Regulate the quick shaft direction of the second phase delay device (11), make it mutually to hang down with the quick shaft direction of the first phase delay device (10)Directly;
Step 4: the zero clearing of k value is restarted to counting, and in the same way, synchronized rotation the first rotating disk (3) and the second rotating disk (4), feedback is controlledSystem processed (7) is captured in photoelectric current data I (k π, k π+pi/2), I (k π+π/4, π/4, k π+3) and I (the k π at corresponding detection wavelength place+π/2,kπ+π);
Step 5: the first phase delay device (10) and second that is calculated all k values place by the computing module of feedback control system (7)Phase delay device (11) phase delay angle δ1k、δ2k, and calculate polarized dependent loss PDL1kAnd PDL2k
&delta; 1 = 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + &pi; 4 ) - I ( k &pi; , k &pi; ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) 2 I ( k &pi; , k &pi; ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) &rsqb; + 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + 3 &pi; 4 ) - I ( k &pi; , k &pi; + &pi; 2 ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; ) 2 I ( k &pi; , k &pi; + &pi; 2 ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; ) &rsqb;
&delta; 2 = 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + &pi; 4 ) - I ( k &pi; , k &pi; ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) 2 I ( k &pi; , k &pi; ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; 2 ) &rsqb; - 1 2 &CenterDot; cos - 1 &lsqb; 4 I ( k &pi; + &pi; 4 , k &pi; + 3 &pi; 4 ) - I ( k &pi; , k &pi; + &pi; 2 ) - I ( k &pi; + &pi; 2 , k &pi; + &pi; ) 2 I ( k &pi; , k &pi; + &pi; 2 ) &CenterDot; I ( k &pi; + &pi; 2 , k &pi; + &pi; ) &rsqb;
PDL 1 ( i n d B ) = - 5 lg I ( k &pi; , k &pi; + &pi; 2 ) I ( k &pi; , k &pi; )
To the δ at all k values place1k、δ2k、PDL1kAnd PDL2kAsk quadratic sum, get Fang JunRoot, testing process finishes.
10. the detection method of a kind of phase delay and Polarization Dependent Loss according to claim 9, is characterized in that: described inBetween step 1 and step 2, also comprise the steps:
Step 1-1: search the fast axis direction of the second phase delay device (11), carry out after mark, it is got from the second rotating disk (4)Under;
Step 1-2: search the fast axis direction of the first phase delay device (10), and carry out mark, then by the second phase delay device(11) put back to the second rotating disk (4).
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