CN103941101B - High-frequency medium relative dielectric constant measuring circuit and method and discreteness measuring method - Google Patents
High-frequency medium relative dielectric constant measuring circuit and method and discreteness measuring method Download PDFInfo
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- CN103941101B CN103941101B CN201410140138.1A CN201410140138A CN103941101B CN 103941101 B CN103941101 B CN 103941101B CN 201410140138 A CN201410140138 A CN 201410140138A CN 103941101 B CN103941101 B CN 103941101B
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Abstract
The invention discloses a high-frequency medium relative dielectric constant epsilon r measuring circuit and method. The circuit comprises a metal cavity, a network analyzer and an oscilloscope. A radio frequency stimulating and coupling input port and a radio frequency stimulating and coupling output port are arranged on the edges of the two ends of the metal cavity. The network analyzer is connected with a simulation information source input end of the metal cavity through a coaxial cable. The oscilloscope is connected with a resonance signal coupling output end of the metal cavity through a coaxial cable, an inner conductor is inserted into a cavity hole together with an insulator, the inner conductor penetrates through a lower bottom plate of the cavity and is then in a short-circuit state, and then copper braded wires of the coaxial cable are unfolded and welded to the cavity. The other end of each cable is connected with a cable head which is connected with the oscilloscope. The invention further discloses a high-frequency medium relative dielectric constant epsilon r discreteness measuring method. According to the high-frequency medium relative dielectric constant epsilon r measuring circuit and method and the discreteness measuring method, the thickness of any dielectric substrate at any frequency can be measured without adding any auxiliary devices, and the operation is simple and easy to conduct.
Description
Technical field
Surveyed the present invention relates to medium substrate parameter measuring technical field, more particularly to a kind of high-frequency dielectric relative dielectric constant
Amount circuit, method and discreteness measuring method.
Background technology
The relative dielectric constant ε of microwave-medium substraterIt is parameter most basic during microwave planar circuit is designed, εrIt is discrete
Directly affect the performance of microwave circuit.Prior art generally measures high-frequency dielectric substrate relative dielectric constant using the resonance method：It is first
First process an English steel resonant cavity for high stable, by measured medium sheet fabrication into cavity bore identical sample disc,
Insert resonant cavity and measure acquisition εr.However, because sample disc is difficult to survey accurate less than 1mm, therefore can not process thin；
And because the size of English steel resonant cavity is fixed, thus frequency of oscillation is that measurement frequency is also just secured, thus, Zhi Neng
Measured under single fixed frequency, due to εrIt is that dispersion characteristics are presented with the difference of working frequency, as shown in figure 1, the above method
True dielectric constant of the microwave circuit in working frequency can not be measured.In addition, in the production process of high-frequency dielectric sheet material,
Also relative dielectric constant skewness in plate face occurs, existing measuring method can not measure this discrete, it is necessary in existing survey
Increase some special equipments in amount system, cause system complex, cost is improved.
The content of the invention
The present invention proposes a kind of high-frequency dielectric relative dielectric constant εrMeasuring circuit, method and discreteness measuring method,
Optional frequency, arbitrary medium substrate thickness can be measured, and be not required to add any auxiliary equipment, it is simple and easy to apply.
A kind of high-frequency dielectric relative dielectric constant ε proposed by the present inventionrMeasuring circuit, including：
Metallic cavity, sets excitation information source input fenestra and excitation information source output window at the metallic cavity edges at two ends
Hole；
Network Analyzer, is input into fenestra and is connected by the first coaxial cable with the excitation information source of the metallic cavity, described
The inner wire of the first coaxial cable first end inserts the input fenestra together with insulator, and the inner wire penetrates the wire chamber
Body lower shoe forms short-circuit condition, and the first coaxial cable copper litz wire is welded with the metallic cavity；Described first is coaxial
Another termination end of cable is simultaneously connected with the Network Analyzer；
Oscillograph, exports fenestra and is connected by the second coaxial cable with the excitation information source of the metallic cavity, and described second
The inner wire of coaxial cable first end penetrates the gold together with the insulator insertion excitation information source output fenestra, the inner wire
Category cavity lower shoe forms short-circuit condition, and the second coaxial cable copper litz wire is welded with the metallic cavity；Described second
Another termination end of coaxial cable is simultaneously connected with the oscillograph.
Dielectric-slab or complex media plate are pressed preferably for double-side copper-applying layers of foil, its two-sided institute's coating foil constitutes wire chamber
Body case, is coated with conducting resinl and forms the metallic cavity in four sides of two-sided deposited Copper Foil dielectric-slab material；For powder or its
His liquid measures medium, and metallic cavity is the metal shell for loading medium, and cavity is opening one side, loads medium rear enclosed chamber
Body.
Preferably, the length, width and height of the metallic cavity are respectively a, b, h, wherein housing depth
Preferably, a diameter of φ 0.15mm of the inner wire, a diameter of φ 0.41mm of insulator.
Preferably, fenestra is opened up at edge 3-5mm on the metallic cavity center line.
Preferably, a diameter of φ 0.42mm of the fenestra.
A kind of high-frequency dielectric substrate relative dielectric constant εrMeasuring method, comprises the following steps：
By measurement frequency range set to more slightly wider than working frequency, first resonance peak, i.e. H are found out on oscillograph101Mould
Resonant frequency, measure the resonant frequency；
By formulaCalculate the ε of fillerr, wherein, c is the light velocity, f0It is the H for measuring101Resonance is frequently
Rate, a, b are two length of sides of metallic cavity；
If surveyed resonant frequency f0When deviateing desirable value, the ε of above formula calculating will be pressedrValue sets metallic cavity as datum
After a boundary values, b boundary values is calculated by above formula, resonant frequency can be fallen required f by adjustment cavity V0, then calculated by above formula and make
With the ε under frequencyr。
Preferably, the length of side of the metallic cavity is effective internal diameter.
A kind of high-frequency dielectric substrate relative dielectric constant εrDiscrete type measuring method, including：
Measured piece is considered as a rectangular cavity for filled media, during resonance, stationary field, edge is formed in metallic cavity
Metallic cavity side forms half nodal point, and its resonance wavelength can be characterized as the following formula：
Wherein a, b, h are the internal diameter size of metallic cavity length, and m, n, p are the half-wave set up along metallic cavity side
Number；
The length, width and height of metallic cavity are respectively a, b, h, and wherein housing depth isTherefore half wave number can not be set up
Stationary field, therefore p=0；
For fundamental wave, m=n=1, above formula can be reduced to
In addition to amplitude highest fundamental wave H101, a series of shown promises peak value frequency that shakes represents gold on the oscillograph
The different standing wave numbers encouraged in category cavity, i.e., m=2,3,4 ..., n=1,2,3,4 ... in above formula；The permutation and combination of m, n is formed
H102, H202, H201, H203 ... wait various oscillation modes；
The m of different mode, n values are substituted into above-mentioned calculating εrValue, if the calculating on each resonance frequency is all identical, that
εrPlate face distribution be uniform, be non-equal if calculated value is variant.
Preferably, the ε on each resonance frequencyrRoot mean square is εrDiscrete valuation.
It is theoretical according to Classical Electromagnetic Field in the present invention, ground with the actual demand of manufacturing process with reference to microwave circuits
The simple and easy to apply of system quickly and accurately measures relative dielectric constant of the various medium sheet materials in the working frequency of microwave circuit
εrε in value and same plate facerCentrifugal pump, its relative dielectric constant ε can be measured to dielectric material under required working frequencyr
Value, its certainty of measurement is 2%.
Brief description of the drawings
Fig. 1 is εrThe schematic diagram of dispersion characteristics is presented with the difference of working frequency；
Fig. 2 is embodiment of the present invention metallic cavity structure chart；
Fig. 3 is embodiment of the present invention miniature RF cable structural representation；
Fig. 4 is embodiment of the present invention input port, the coupled structure figure of output port；
Fig. 5 is the structural representation of embodiment of the present invention test circuit.
Specific embodiment
The embodiment of the present invention 1 proposes a kind of high-frequency dielectric relative dielectric constant εrMeasuring circuit, as shown in figure 5, including：
Metallic cavity 10, sets excitation information source input fenestra and excitation information source output at the edges at two ends of the metallic cavity 10
Fenestra；
Network Analyzer 20, is input into fenestra and is connected by the first coaxial cable with the excitation information source of the metallic cavity 10,
The inner wire of the first coaxial cable first end inserts the input fenestra together with insulator, and the inner wire penetrates the gold
Category cavity lower shoe forms short-circuit condition, and the first coaxial cable copper litz wire is welded with the metallic cavity；Described first
Coaxial cable second terminates end and is connected with the Network Analyzer 20；
Oscillograph 30, is connected by the second coaxial cable with the output fenestra of the metallic cavity 10, and described second is coaxial
The inner wire of cable first end inserts the output fenestra together with insulator, and the inner wire penetrates the metallic cavity lower shoe
Short-circuit condition is formed, the second coaxial cable copper litz wire is welded with the metallic cavity 10；Second coaxial cable
Two termination ends are simultaneously connected with the oscillograph 30.
Wherein, metallic cavity is as shown in Fig. 2 length, width and height are respectively a, b, h, wherein housing depthIt is two-sided deposited
The thickness of Copper Foil medium substrate, substrate media thickness h=0.254 of the product that appears on the market at present, 0.50,0.635,0.80,1.00,
1.50、2.00mm。
A, b size can be by working frequency f0With measured material εrValuation, according to formula（1）Calculate,
In formula：C-the light velocity, f0- the H for measuring101Resonant frequency, a, b are two length of sides of metallic cavity（Effective internal diameter）.
A=b can be set.Input port, the output port of RF excitation couplings are set at cavity edges at two ends, with SFF microminiature polytetrafluoroethyl-nes
Alkene insulating radio frequency cable is drawn.
The fenestra of a diameter of φ 0.42mm of excitation coupling is opened at edge 3-5mm on chamber central line.
Make the input of the excitation information source of resonator and the coupling output of resonance signal, microminiature radio-frequency cable with coaxial cable
The structure of SFF-59-0.4 is as shown in Figure 3.Reference picture 4, inner wire is inserted into Fig. 2 cavitys φ 0.42 together with the insulators of φ 0.41
In hole, inner wire φ 0.15 penetrates cavity lower shoe and forms short-circuit condition, then coaxial cable copper litz wire is launched and and cavity
Welding, in another termination SMA ends of cable to be linked with test system.
The embodiment of the present invention 2 provides a kind of high-frequency dielectric substrate relative dielectric constant εrMeasuring method, applies in such as Fig. 5
In shown measuring circuit, comprise the following steps：
By measurement frequency range set to more slightly wider than working frequency, first resonance peak, i.e. H are found out on oscillograph101Mould
Resonant frequency, measure the resonant frequency；
By formulaCalculate the ε of fillerr, wherein, c is the light velocity, f0It is the H for measuring101Resonance is frequently
Rate, a, b are two length of sides of metallic cavity；
If surveyed resonant frequency f0When deviateing desirable value, the ε of above formula calculating will be pressedrValue sets metallic cavity as datum
After a boundary values, b boundary values is calculated by above formula, resonant frequency can be fallen required f by adjustment cavity V0, then calculated by above formula and make
With the ε under frequencyr。
The embodiment of the present invention 3 provides a kind of high-frequency dielectric substrate relative dielectric constant εrDiscrete type measuring method, is tested
Part can be considered a rectangular cavity for filled media（Or it is square）.
During resonance, stationary field is formed in cavity, half nodal point is formed along cavity side, its resonance wavelength can be characterized as the following formula：
In above formula：A, b, h are the internal diameter size of cavity length, and m, n, p are half wave number set up along cavity side.
Because h is less thanTherefore the stationary field of half wave number can not be set up, therefore p=0.
For fundamental wave, m=n=1, above formula can be reduced to
Except amplitude highest fundamental wave H101Outward, still there are other modes of resonance.A series of shown promises are shaken peak value on oscillograph
Frequency represents the different standing wave numbers encouraged in chamber, i.e. formula（2）In m=2,3,4 ..., n=1,2,3,4 ....The arrangement group of m, n
Conjunction forms H102、H202、H201、H203... wait various oscillation modes.By the m of different mode, n value substitution formulas（2）Calculate εrValue, such as
Calculating of the fruit on each resonance frequency is all identical, then εrPlate face distribution be uniform.If calculated value is variant, it is
Non- equal, the root mean square definition of its each difference is εrDiscrete valuation.
The above, the only present invention preferably specific embodiment, but protection scope of the present invention is not limited thereto,
Any one skilled in the art the invention discloses technical scope in, technology according to the present invention scheme and its
Inventive concept is subject to equivalent or change, should all be included within the scope of the present invention.
Claims (15)
1. a kind of high-frequency dielectric relative dielectric constant measuring circuit, it is characterised in that including：
Metallic cavity, sets excitation information source input fenestra and excitation information source output fenestra at the metallic cavity edges at two ends；
Network Analyzer, is input into fenestra and is connected by the first coaxial cable with the excitation information source of the metallic cavity, and described first
The inner wire of coaxial cable first end inserts the input fenestra together with insulator, and the inner wire is penetrated under the metallic cavity
Base plate forms short-circuit condition, and the first coaxial cable copper litz wire is welded with the metallic cavity；First coaxial cable
Another termination end and be connected with the Network Analyzer；
Oscillograph, exports fenestra and is connected by the second coaxial cable with the excitation information source of the metallic cavity, and described second is coaxial
The inner wire of cable first end penetrates the wire chamber together with the insulator insertion excitation information source output fenestra, the inner wire
Body lower shoe forms short-circuit condition, and the second coaxial cable copper litz wire is welded with the metallic cavity；Described second is coaxial
Another termination end of cable is simultaneously connected with the oscillograph.
2. the high-frequency dielectric relative dielectric constant measuring circuit according to right wants 1, it is characterised in that for two-sided deposited Copper Foil
Laminating media plate, its two-sided institute's coating foil constitutes metallic cavity shell, is applied in four sides of double-side copper-applying layers of foil pressure dielectric-slab
The metallic cavity is formed with conducting resinl；Medium is measured for powder, metallic cavity is the metal shell for loading medium, and cavity is
It is opening on one side, load medium rear enclosed cavity.
3. the high-frequency dielectric relative dielectric constant measuring circuit according to right wants 1, it is characterised in that the metallic cavity
Length is respectively a, b, h, wherein housing depthResonance wavelength when λ g are metallic cavity resonance, εrIt is metal
The relative dielectric constant of cavity.
4. the high-frequency dielectric relative dielectric constant measuring circuit according to right wants 1, it is characterised in that the inner wire it is straight
Footpath is φ 0.15mm, a diameter of φ 0.41mm of insulator.
5. the high-frequency dielectric relative dielectric constant measuring circuit according to right wants 1, it is characterised in that in the metallic cavity
On the heart line fenestra is opened up at edge 3-5mm.
6. the high-frequency dielectric relative dielectric constant measuring circuit according to right wants 1, it is characterised in that the diameter of the fenestra
It is φ 0.42mm.
7. a kind of high-frequency dielectric substrate relative dielectric constant measuring method, it is characterised in that use a kind of high-frequency dielectric substrate phase
Dielectric constant metering circuit is measured, the measuring circuit includes：Metallic cavity, sets at the metallic cavity edges at two ends
Put excitation information source input fenestra and excitation information source output fenestra；Network Analyzer, by the first coaxial cable and the wire chamber
The excitation information source input fenestra connection of body, the inner wire of the first coaxial cable first end inserts the input together with insulator
Fenestra, the inner wire penetrates the metallic cavity lower shoe and forms short-circuit condition, the first coaxial cable copper litz wire with
The metallic cavity welding；Another termination end of first coaxial cable is simultaneously connected with the Network Analyzer；Oscillography
Device, exports fenestra and is connected by the second coaxial cable with the excitation information source of the metallic cavity, second coaxial cable first
The inner wire at end penetrates the metallic cavity lower shoe together with the insulator insertion excitation information source output fenestra, the inner wire
Short-circuit condition is formed, the second coaxial cable copper litz wire is welded with the metallic cavity；Second coaxial cable is another
Termination end is simultaneously connected with the oscillograph；
The measuring method specifically includes following steps：
By measurement frequency range set to more slightly wider than working frequency, first resonance peak, i.e. H are found out on oscillograph101Mould it is humorous
Vibration frequency, measures the resonant frequency；
By formulaCalculate the relative dielectric constant ε of metallic cavityr, wherein, c is the light velocity, f0Measure
H101The resonant frequency of mould, a, b is respectively the length and width of metallic cavity；
If surveyed resonant frequency f0When deviateing desirable value, the ε of above formula calculating will be pressedrValue is used as datum, setting metallic cavity a sides
After value, b boundary values is calculated by above formula, resonant frequency can be fallen required f by the volume V for adjusting metallic cavity0, then calculated by above formula
Go out in required resonant frequency f0Under εr。
8. the high-frequency dielectric substrate relative dielectric constant measuring method according to right wants 7, it is characterised in that the metal
The length of side of cavity is effective internal diameter.
9. the high-frequency dielectric substrate relative dielectric constant measuring method according to right wants 7, it is characterised in that for two-sided deposited
Copper Foil is laminated dielectric-slab, and its two-sided institute's coating foil constitutes metallic cavity shell, and four sides of dielectric-slab are pressed in double-side copper-applying layers of foil
Face is coated with conducting resinl and forms the metallic cavity；Medium is measured for powder, metallic cavity is the metal shell for loading medium, chamber
Body is opening one side, loads medium rear enclosed cavity.
10. the high-frequency dielectric substrate relative dielectric constant measuring method according to right wants 7, it is characterised in that the metal
The length of cavity is respectively a, b, h, wherein housing depthResonance wavelength when λ g are metallic cavity resonance,
εrIt is the relative dielectric constant of metallic cavity.
The 11. high-frequency dielectric substrate relative dielectric constant measuring method according to right wants 7, it is characterised in that led in described
A diameter of φ 0.15mm of body, a diameter of φ 0.41mm of insulator.
The 12. high-frequency dielectric substrate relative dielectric constant measuring method according to right wants 7, it is characterised in that the metal
On chamber central line fenestra is opened up at edge 3-5mm.
The 13. high-frequency dielectric substrate relative dielectric constant measuring method according to right wants 7, it is characterised in that the fenestra
A diameter of φ 0.42mm.
14. a kind of high-frequency dielectric substrate relative dielectric constant discrete type measuring methods, it is characterised in that use a kind of high-frequency dielectric
Substrate relative dielectric constant measuring circuit is measured, and the measuring circuit includes：Metallic cavity, the end edge of the metallic cavity two
Excitation information source input fenestra and excitation information source output fenestra are set at edge；Network Analyzer, by the first coaxial cable with it is described
The excitation information source input fenestra connection of metallic cavity, the inner wire of the first coaxial cable first end inserts institute together with insulator
Input fenestra is stated, the inner wire penetrates the metallic cavity lower shoe and forms short-circuit condition, and the first coaxial cable copper is compiled
Line is knitted to be welded with the metallic cavity；Another termination end of first coaxial cable simultaneously connects with the Network Analyzer
Connect；Oscillograph, exports fenestra and is connected by the second coaxial cable with the excitation information source of the metallic cavity, and described second is coaxial
The inner wire of cable first end penetrates the wire chamber together with the insulator insertion excitation information source output fenestra, the inner wire
Body lower shoe forms short-circuit condition, and the second coaxial cable copper litz wire is welded with the metallic cavity；Described second is coaxial
Another termination end of cable is simultaneously connected with the oscillograph；
The measuring method specifically includes following steps：
Measured piece is considered as a rectangular cavity for filled media, during resonance, stationary field is formed in metallic cavity, along metal
Cavity side forms half nodal point, and its resonance wavelength can be characterized as the following formula：
Wherein a, b, h are the internal diameter size of metallic cavity length, and m, n, p are half wave number set up along metallic cavity side；
The length of metallic cavity is respectively a, b, h, and wherein housing depth isWhen λ g are metallic cavity resonance
Resonance wavelength, εrIt is the relative dielectric constant of metallic cavity, therefore the stationary field of half wave number can not be set up, therefore p=0；
For fundamental wave, m=n=1, above formula can be reduced toC is the light velocity, f0It is the H for measuring101Mould it is humorous
Vibration frequency；
Except amplitude highest fundamental wave H101Outward, a series of resonance peak frequencies shown on the oscillograph represent wire chamber
The different standing wave numbers for being encouraged in vivo, i.e., m=2,3,4 ..., n=1,2,3,4 ... in above formula；The permutation and combination shape of m, n
Into H102、H202、H201、H203... various oscillation modes；
The m of different oscillation modes, n values are substituted into above-mentioned formulaCalculate εrValue, such as
Result of calculation of the fruit on each resonance peak frequency is all identical, then εrPlate face distribution be uniform, if result of calculation
It is variant, then it is non-homogeneous.
15. high-frequency dielectric substrate relative dielectric constant discrete type measuring methods according to claim 14, it is characterised in that
ε on each resonance peak frequencyrRoot mean square is εrDiscrete valuation.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| RU2787650C1 (en) * | 2022-02-04 | 2023-01-11 | Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г.Ромашина" | Method for determining the relative permittivity of materials with losses |
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| TWI550282B (en) * | 2015-11-11 | 2016-09-21 | 財團法人金屬工業研究發展中心 | Dielectric constant measurement method and apparatus |
| CN107514972B (en) * | 2016-06-16 | 2024-05-31 | 广州司南技术有限公司 | Method and device for detecting thickness and uniformity in ultra-long metal cavity |
| CN109212322B (en) * | 2018-10-31 | 2020-03-24 | 厦门大学 | Method for detecting complex dielectric constant of nano film by multifunctional rectangular cavity perturbation method |
| CN111257370B (en) * | 2020-03-05 | 2021-03-23 | 西北工业大学 | Device and method for measuring dielectric constant and metal conductivity of copper-clad plate |
| CN111366790A (en) * | 2020-04-29 | 2020-07-03 | 青岛零频新材料科技有限公司 | Dielectric constant measuring method and system |
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| CN1271745C (en) * | 2004-03-09 | 2006-08-23 | 惠州学院 | Special cavity resonator and testing method for mediat resonator material at 8mm band test |
| CN102116804A (en) * | 2010-12-29 | 2011-07-06 | 电子科技大学 | Method for testing complex dielectric constant of microwave dielectric material |
| CN102590230A (en) * | 2012-01-12 | 2012-07-18 | 天津大学 | Microwave resonant cavity sensor and measurement system for measuring concentration of solution |
| CN102608431B (en) * | 2012-03-12 | 2014-01-29 | 浙江大学 | Coaxial-dielectric circular waveguide resonant cavity with frequency range of 1GHz-8GHz and dielectric parameter testing method |
| CN102798766B (en) * | 2012-08-03 | 2014-07-30 | 浙江大学 | Method for testing microwave dielectric property of high-loss dielectric substance |
| CN103487666B (en) * | 2013-09-25 | 2015-12-23 | 长沙新图仪器有限公司 | A kind of resonator cavity proving installation for material dielectric constant test |
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| RU2787650C1 (en) * | 2022-02-04 | 2023-01-11 | Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г.Ромашина" | Method for determining the relative permittivity of materials with losses |
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