CN103940862A - 电化学传感器装置 - Google Patents
电化学传感器装置 Download PDFInfo
- Publication number
- CN103940862A CN103940862A CN201410027770.5A CN201410027770A CN103940862A CN 103940862 A CN103940862 A CN 103940862A CN 201410027770 A CN201410027770 A CN 201410027770A CN 103940862 A CN103940862 A CN 103940862A
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- electrode
- electrochemical sensor
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- 239000000758 substrate Substances 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims description 24
- 238000005538 encapsulation Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 2
- 230000004888 barrier function Effects 0.000 claims 2
- 239000003792 electrolyte Substances 0.000 abstract description 32
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 32
- 229910002091 carbon monoxide Inorganic materials 0.000 description 32
- 239000007789 gas Substances 0.000 description 22
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 15
- 230000008021 deposition Effects 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 238000000059 patterning Methods 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002608 ionic liquid Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 239000007784 solid electrolyte Substances 0.000 description 3
- IQQRAVYLUAZUGX-UHFFFAOYSA-N 1-butyl-3-methylimidazolium Chemical compound CCCCN1C=C[N+](C)=C1 IQQRAVYLUAZUGX-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZXMGHDIOOHOAAE-UHFFFAOYSA-N 1,1,1-trifluoro-n-(trifluoromethylsulfonyl)methanesulfonamide Chemical compound FC(F)(F)S(=O)(=O)NS(=O)(=O)C(F)(F)F ZXMGHDIOOHOAAE-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010719 annulation reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000013028 medium composition Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- -1 that is Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/404—Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors
- G01N27/4045—Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors for gases other than oxygen
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/004—CO or CO2
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
DCO[m2/s] | kH(CO)[atm] | csolvent[mole/m3] | A[mm2] | |
H2O | 10e-10 | 58280 | 55.5e3 | 0.16 |
[Bmim][NTf2] | 0.4e-10 | 950 | 3.4e3 | 1.1 |
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP13152411.8A EP2759832B1 (en) | 2013-01-23 | 2013-01-23 | Electrochemical sensor device |
EP13152411.8 | 2013-01-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103940862A true CN103940862A (zh) | 2014-07-23 |
CN103940862B CN103940862B (zh) | 2017-01-04 |
Family
ID=47713852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410027770.5A Active CN103940862B (zh) | 2013-01-23 | 2014-01-21 | 电化学传感器装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9395318B2 (zh) |
EP (1) | EP2759832B1 (zh) |
CN (1) | CN103940862B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2884242B1 (en) | 2013-12-12 | 2021-12-08 | ams International AG | Sensor Package And Manufacturing Method |
US20150211972A1 (en) * | 2013-12-19 | 2015-07-30 | Chistopher Hughes | Shear Stress Sensor |
US9513247B2 (en) | 2014-02-27 | 2016-12-06 | Ams International Ag | Electrochemical sensor |
US11268927B2 (en) | 2016-08-30 | 2022-03-08 | Analog Devices International Unlimited Company | Electrochemical sensor, and a method of forming an electrochemical sensor |
US10620151B2 (en) * | 2016-08-30 | 2020-04-14 | Analog Devices Global | Electrochemical sensor, and a method of forming an electrochemical sensor |
US11022579B2 (en) | 2018-02-05 | 2021-06-01 | Analog Devices International Unlimited Company | Retaining cap |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0514873A1 (en) * | 1991-05-24 | 1992-11-25 | Honda Giken Kogyo Kabushiki Kaisha | Heater type hybrid integrated circuit |
US20080128285A1 (en) * | 2006-12-04 | 2008-06-05 | Electronics And Telecommunications Research Institute | Electrochemical gas sensor chip and method of manufacturing the same |
US20120098075A1 (en) * | 2009-10-23 | 2012-04-26 | Alberto Lamagna | Integrated electronic device for detecting molecules and method of manufacture thereof |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
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US3616416A (en) | 1969-07-02 | 1971-10-26 | Hydronautics | Oxygen detector for analysis of oxygen in gaseous streams including an internal humidifier |
US4536274A (en) | 1983-04-18 | 1985-08-20 | Diamond Shamrock Chemicals Company | pH and CO2 sensing device and method of making the same |
US4913792A (en) * | 1987-07-28 | 1990-04-03 | Daikin Industries, Ltd. | Flammable-gas sensor |
US5215643A (en) * | 1988-02-24 | 1993-06-01 | Matsushita Electric Works, Ltd. | Electrochemical gas sensor |
JPH03183943A (ja) | 1989-12-14 | 1991-08-09 | Hitachi Ltd | 酸素センサ |
US5387329A (en) | 1993-04-09 | 1995-02-07 | Ciba Corning Diagnostics Corp. | Extended use planar sensors |
US5830337A (en) | 1996-07-24 | 1998-11-03 | Gastech, Inc. | Electrochemical gas sensor |
GB9625464D0 (en) | 1996-12-07 | 1997-01-22 | Central Research Lab Ltd | Gas sensor |
US6936147B2 (en) | 1999-11-19 | 2005-08-30 | Perkinelmer Las, Inc. | Hybrid film type sensor |
WO2002011225A1 (en) | 2000-07-27 | 2002-02-07 | City Technology Limited | Gas sensors |
JP2002174618A (ja) | 2000-12-07 | 2002-06-21 | Matsushita Electric Ind Co Ltd | 固体電解質型ガスセンサ |
DE10323858A1 (de) | 2003-05-26 | 2004-12-30 | Infineon Technologies Ag | Sensor-Element, Sensor-Array und Verfahren zum Herstellen eines Sensor-Elements |
ITMI20070099A1 (it) * | 2007-01-24 | 2008-07-25 | St Microelectronics Srl | Dispositivo elettronico comprendente dispositivi sensori differenziali mems e substrati bucati |
GB0704972D0 (en) | 2007-03-15 | 2007-04-25 | Varney Mark S | Neoteric room temperature ionic liquid gas sensor |
DE102008044240B4 (de) | 2008-12-01 | 2013-12-05 | Msa Auer Gmbh | Elektrochemischer Gassensor mit einer ionischen Flüssigkeit als Elektrolyt, welche mindestens ein Mono-, Di- oder Trialkylammonium-Kation enthält |
AU2009321615B2 (en) | 2008-12-01 | 2014-08-07 | Msa Europe Gmbh | Electrochemical gas sensors with ionic liquid electrolyte systems |
EP2241882A1 (fr) | 2009-04-15 | 2010-10-20 | Neroxis SA | Capteur électrochimique ampérométrique et son procédé de fabrication |
US9125625B2 (en) | 2010-06-10 | 2015-09-08 | The Regents Of The University Of California | Textile-based printable electrodes for electrochemical sensing |
EP2506001B1 (en) * | 2011-03-28 | 2013-11-20 | Stichting IMEC Nederland | Electrochemical Ethylene Sensor and Method for Monitoring Ethylene |
US8852513B1 (en) * | 2011-09-30 | 2014-10-07 | Silicon Laboratories Inc. | Systems and methods for packaging integrated circuit gas sensor systems |
WO2013059087A1 (en) | 2011-10-14 | 2013-04-25 | Mine Safety Appliances Company | Method for testing a gas sensor |
-
2013
- 2013-01-23 EP EP13152411.8A patent/EP2759832B1/en active Active
-
2014
- 2014-01-21 CN CN201410027770.5A patent/CN103940862B/zh active Active
- 2014-02-07 US US14/159,036 patent/US9395318B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0514873A1 (en) * | 1991-05-24 | 1992-11-25 | Honda Giken Kogyo Kabushiki Kaisha | Heater type hybrid integrated circuit |
US20080128285A1 (en) * | 2006-12-04 | 2008-06-05 | Electronics And Telecommunications Research Institute | Electrochemical gas sensor chip and method of manufacturing the same |
US20120098075A1 (en) * | 2009-10-23 | 2012-04-26 | Alberto Lamagna | Integrated electronic device for detecting molecules and method of manufacture thereof |
Non-Patent Citations (5)
Title |
---|
J. WOLLENSTEIN, J.A. PLAZA, C. CANE, Y. MIN, H. BOTTNER等: "A novel single chip thin film metal oxide array", 《SENSORS AND ACTUATORS B》 * |
J. WOLLENSTEIN,H. BOTTNER,M. JAEGLE,W.J. BECKER,E. WAGNER: "Material properties and the influence of metallic catalysts at the surface of highly dense SnO2 films", 《SENSORS AND ACTUATORS B》 * |
J.F. CURRIE, A. ESSALIK, J-C. MARUSIC: "Micromachined thin film solid state electrochemical CO2, NO2 and SO2 gas sensors", 《SENSORS AND ACTUATORS B》 * |
JÜRGEN WÖLLENSTEIN,GERD PLESCHER,GERD KÜHNER.ET AL: "Preparation, Morphology, and Gas-Sensing Behavior of Cr2-xTixO3+z Thin Films on Standard Silicon Wafers", 《IEEE SENSORS JOURNAL》 * |
ZHICHAO TAN, ROEL DAAMEN, AURÉLIE HUMBERT, KAMRAN SOURI等: "A 1.8V 11μW CMOS Smart Humidity Sensor for RFID Sensing Applications", 《IEEE ASIAN SOLID-STATE CIRCUITS CONFERENCE》 * |
Also Published As
Publication number | Publication date |
---|---|
CN103940862B (zh) | 2017-01-04 |
EP2759832A1 (en) | 2014-07-30 |
US20140202855A1 (en) | 2014-07-24 |
US9395318B2 (en) | 2016-07-19 |
EP2759832B1 (en) | 2020-11-11 |
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Owner name: AMS INTERNATIONAL LTD. Free format text: FORMER OWNER: KONINKL PHILIPS ELECTRONICS NV Effective date: 20150814 |
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Effective date of registration: 20150814 Address after: La Ville de Perth Applicant after: AMS INTERNATIONAL CO., LTD. Address before: Holland Ian Deho Finn Applicant before: Koninkl Philips Electronics NV |
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Effective date of registration: 20201204 Address after: Eindhoven Patentee after: Theo Testing Co.,Ltd. Address before: La Ville de Perth Patentee before: AMS INTERNATIONAL AG |
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