CN103930279B

CN103930279B - Mask printing process and device

Info

Publication number: CN103930279B
Application number: CN201280055683.XA
Authority: CN
Inventors: 加藤光昭; 松崎直树
Original assignee: Fuji Machine Manufacturing Co Ltd
Current assignee: Fuji Corp
Priority date: 2011-11-14
Filing date: 2012-11-07
Publication date: 2016-01-13
Anticipated expiration: 2032-11-07
Also published as: WO2013073426A1; JP2013103417A; JP5829494B2; CN103930279A

Abstract

The mask carried out under improving the printing of carrying out print paste under the state supporting mask from below by a pair mask supporting member or the state supporting mask from below by a pair mask supporting member after printing in the method be separated of mask and circuit substrate, device cleans.The end of the side of the close substrate (206) of the supported portion supported by mask adsorbent support parts (62) of mask (412), and the distance (L) between the border of mask (412) and mask retention tab (414) is if more than width (W) sum of the width (F) of mask adsorbent support parts (62) and cleaning part (627), cleaning part (627) is then made to move to the position from the opposition side to substrate (206) and wiping solder left from the supported portion of mask (412), if distance (L) is less than width (F) and width (W) sum, then making after cleaning part (627) exceeded the part contacted with substrate (206) of mask (412), during the above-mentioned border of arrival, while move to the direction parallel with mask (412), while be separated from mask (412) and wipe action to mask (412).

Description

Mask printing process and device

Technical field

The present invention relates to the printing carrying out print paste under the state supporting mask from below by a pair mask supporting member, or carry out the method be separated and the device of mask and circuit substrate under the state supporting mask from below by a pair mask supporting member after printing, particularly relate to the cleaning of mask.

Background technology

The mask printing equipment being undertaken by the lower surface of wiper blade wiping mask cleaning is described respectively in following patent document 1 to 3.The moving direction that the clearing apparatus that the mask printing equipment that patent document 1 is recorded is recorded possesses suction unit, clearing apparatus when cleaning is arranged on the main cleaning part of the upstream side of suction unit, is arranged on the secondary cleaning part in downstream, and above-mentioned suction unit, main cleaning part and secondary cleaning part contact with mask via wiper blade.Clearing apparatus moves from the clean starting position preset along mask to clean end position, the wiping based on main cleaning part of the cream solder carry out the attraction based on suction unit of the cream solder be attached near the wiping based on secondary cleaning part of the cream solder on the lower surface of mask, the inner peripheral surface being attached to the through hole of mask or opening and wiping, remaining in suction unit wiping, thus to avoid the residual mode of the dirt of mask to carry out wiping as far as possible.

In addition, in the mask printing equipment that patent document 2 is recorded, known size based on circuit substrate and the size more than needed being set in the upstream side of circuit substrate and the known of downstream side on the moving direction of mask at clearing apparatus, the automatically clean starting position of computing clearing apparatus and clean end position, thus the part that the circuit substrate of mask contacts is cleaned.

In addition, the mask printing equipment that patent document 3 is recorded possesses a pair mask supporting member, when the printing of the cream solder to circuit substrate and the separation from mask of circuit substrate time, from below two parts departed from from the both side ends of circuit substrate of mask are supported.When mask cleans, a pair mask supporting member drops to the position entered of allowing clearing apparatus between mask, and is cleaned mask from below by clearing apparatus.

Patent document 1: Japanese Unexamined Patent Publication 10-100388 publication

Patent document 2: Japanese Unexamined Patent Publication 11-165402 publication

Patent document 3: Japanese Unexamined Patent Publication 2006-281712 publication

Summary of the invention

But, supporting in the mask printing equipment of mask by a pair mask supporting member as the mask printing equipment that patent document 3 is recorded, also having room for improvement.The part such as contacted for the circuit substrate of mask carries out wiping, clearing apparatus stops at the position of departing from from this part of mask, but the cream solder sometimes after this part remains wiper blade wiping, be attached to mask supporting member and cause stained, practicality like this can't be referred to as fully.Particularly the application applicant has developed a kind of mask printing equipment, mask supporting member is set to the suction hole had to upper surface open, by attracting the mask adsorbent support parts of air and adsorbent support mask from this suction hole, but when mask supporting member adsorbs and supports mask, the cream solder being attached to the lower surface of mask is inhaled in suction hole and blocks, and brings obstacle may to the adsorbent support of mask.

The present invention makes for background with above-mentioned situation, problem is the printing carrying out print paste under the state supporting mask from below by a pair mask supporting member, or carries out the improvement that the mask in the method be separated of mask and circuit substrate and device cleans under the state supporting mask from below by a pair mask supporting member after printing.

Above-mentioned problem is solved by following scheme, a kind of method of being printed to circuit substrate by print paste by mask printing equipment, and aforementioned mask printing equipment comprises: (A) mask holding device, keeps the mask being formed with multiple through hole, (B) base plate keeping device, is held in parallel with this mask by circuit substrate in the below of the mask kept by aforementioned mask holding device, (C) screeding device, moves along the mask kept by aforementioned mask holding device, makes the print paste of the upper surface being placed in this mask by above-mentioned multiple through hole, prints the circuit substrate kept by aforesaid substrate holding device, (D) close/separator, by making aforementioned mask holding device and aforesaid substrate holding device relatively be elevated, and make the mask that kept by mask holding device closer to each other with the circuit substrate kept by base plate keeping device/be separated, (E) a pair mask supporting member, be positioned at the mask kept by aforementioned mask holding device, two parts of departing from from the both side ends of the circuit substrate being held in aforesaid substrate holding device carry out contacting or close Support Position, when utilizing above-mentioned screeding device to print with utilize above-mentioned close/separator mask is separated with circuit substrate time at least one party, the lower surface of mask is supported, and (F) clearing apparatus, comprise the extraction unit that rectangular wiper blade is extracted out by (a), b retraction part that this wiper blade is regained by () and (c) have the pressing component above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the press surface on the lower surface of aforementioned mask, this clearing apparatus enter into by above-mentioned close/separator and separated from one another after mask and circuit substrate between, the lower surface that edge mask moves, while carried out the lower surface of wiping mask by the above-mentioned wiper blade of the lower surface being pressed on aforementioned mask by above-mentioned pressing component, (G) mask supporting member mobile device, when utilizing above-mentioned screeding device to print with utilize above-mentioned close/separator mask is separated with circuit substrate time above-mentioned at least one party, above-mentioned a pair mask supporting member is made to be positioned at above-mentioned Support Position, when utilizing above-mentioned clearing apparatus to clean, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, in aforementioned mask printing process, after utilizing above-mentioned screeding device to print print paste, by above-mentioned close/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, in this case, above-mentioned clearing apparatus is cleaned, when this cleaning, make after the part being pressed on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade to move to the position left the opposition side to above-mentioned circuit substrate from the part contacted with the mask supporting member being positioned at above-mentioned Support Position of this mask, be separated from the lower surface of aforementioned mask.

Above-mentioned problem is also solved by following scheme, a kind of method of print paste being printed to circuit substrate by mask printing equipment, aforementioned mask printing equipment comprises: (i) mask holding device, opens the mask body be located on mask frame keep the mask being formed with multiple through hole in metal film-making via the low elastic coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making, (ii) base plate keeping device, is held in parallel with this mask by circuit substrate in the below of the mask kept by aforementioned mask holding device, (iii) screeding device, moves along the mask kept by aforementioned mask holding device, makes the print paste of the upper surface being placed in this mask by above-mentioned multiple through hole, prints the circuit substrate kept by aforesaid substrate holding device, (iv) close/separator, by making aforementioned mask holding device and aforesaid substrate holding device relatively be elevated, and make the mask that kept by mask holding device closer to each other with the circuit substrate kept by base plate keeping device/be separated, (v) a pair mask supporting member, be positioned at the mask kept by aforementioned mask holding device, two parts of departing from from the both side ends of the circuit substrate being held in aforesaid substrate holding device carry out contacting or close Support Position, when utilizing above-mentioned screeding device to print with utilize above-mentioned close/separator mask is separated with circuit substrate time at least one party, the lower surface of mask is supported, (vi) clearing apparatus, comprise the extraction unit that rectangular wiper blade is extracted out by (a), b retraction part that this wiper blade is regained by () and (c) have the pressing component above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the press surface on the lower surface of aforementioned mask, this clearing apparatus enter into by above-mentioned close/separator and separated from one another after mask and circuit substrate between, the lower surface that edge mask moves, while carried out the lower surface of wiping mask by the above-mentioned wiper blade of the lower surface being pressed on aforementioned mask by above-mentioned pressing component, and (vii) mask supporting member mobile device, when utilizing above-mentioned screeding device to print with utilize above-mentioned close/separator mask is separated with circuit substrate time above-mentioned at least one party, above-mentioned a pair mask supporting member is made to be positioned at above-mentioned Support Position, when utilizing above-mentioned clearing apparatus to clean, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, in aforementioned mask printing process, after utilizing above-mentioned screeding device to print print paste, by above-mentioned close/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, in this case, above-mentioned clearing apparatus is cleaned, when this cleaning, after the end of the part at least contacted with circuit substrate of this mask has exceeded the part side that aforementioned mask support component contacts, before the border arriving this mask and above-mentioned low elastic coefficient sheet, make the part pressed on by above-mentioned pressing component on the lower surface of aforementioned mask of above-mentioned wiper blade, while proceed mobile on the direction parallel with the lower surface of aforementioned mask, while carry out being separated from the lower surface of this mask wipe action.

Above-mentioned problem is also solved by following scheme, and mask printing equipment comprises: (i) mask holding device, keeps the mask being formed with multiple through hole, (ii) base plate keeping device, is held in parallel with this mask by circuit substrate in the below of the mask kept by aforementioned mask holding device, (iii) screeding device, moves along the mask kept by aforementioned mask holding device, makes the print paste of the upper surface being placed in this mask by above-mentioned multiple through hole, prints the circuit substrate kept by aforesaid substrate holding device, (iv) close/separator, by making aforementioned mask holding device and aforesaid substrate holding device relatively be elevated, and make the mask that kept by mask holding device closer to each other with the circuit substrate kept by base plate keeping device/be separated, (v) a pair mask supporting member, be positioned at the mask kept by aforementioned mask holding device, two parts of departing from from the both side ends of the circuit substrate being held in aforesaid substrate holding device carry out contacting or close Support Position, when utilizing above-mentioned screeding device to print with utilize above-mentioned close/separator mask is separated with circuit substrate time at least one party, the lower surface of mask is supported, (vi) clearing apparatus, comprise the extraction unit that rectangular wiper blade is extracted out by (a), b retraction part that this wiper blade is regained by () and (c) have the pressing component above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the press surface on the lower surface of aforementioned mask, this clearing apparatus enter into by above-mentioned close/separator and separated from one another after mask and circuit substrate between, the lower surface that edge mask moves, while carried out the lower surface of wiping mask by the above-mentioned wiper blade of the lower surface being pressed on aforementioned mask by above-mentioned pressing component, (vii) pressing component mobile device, makes the above-mentioned pressing component of this clearing apparatus produce to make above-mentioned wiper blade carry out the motion needed for wiping to the lower surface of mask, (viii) cleaning control device, controlling the movement of above-mentioned pressing component by controlling this pressing component mobile device, and (ix) mask supporting member mobile device, when utilizing above-mentioned screeding device to print with utilize above-mentioned close/separator mask is separated with circuit substrate time above-mentioned at least one party, above-mentioned a pair mask supporting member is made to be positioned at above-mentioned Support Position, when utilizing above-mentioned clearing apparatus to clean, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, and above-mentioned cleaning control device comprises: (1.) input unit, the information relevant to the mask kept by aforementioned mask holding device and the size of circuit substrate that kept by aforesaid substrate holding device can be inputted, and (2.) motion determination section, based on the above-mentioned information inputted by this input unit, above-mentioned pressing component should be made to produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of aforementioned mask, comprise this pressing component to mask close/be separated and determine as to move as follows with moving of the movement along mask: make after the part pressing on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade to move to the position left the opposition side to above-mentioned circuit substrate from the part contacted with the mask supporting member being positioned at above-mentioned Support Position of this mask along mask, be separated from the lower surface of aforementioned mask.

Above-mentioned problem is also solved by following scheme, mask printing equipment comprises: (Α) mask holding device, opens the mask body be located on mask frame keep the mask being formed with multiple through hole in metal film-making via the low elastic coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making, (Β) base plate keeping device, is held in parallel with this mask by circuit substrate in the below of the mask kept by aforementioned mask holding device, (Γ) screeding device, moves along the mask kept by aforementioned mask holding device, makes the print paste of the upper surface being placed in this mask by above-mentioned multiple through hole, prints the circuit substrate kept by aforesaid substrate holding device, (Δ) close/separator, by making aforementioned mask holding device and aforesaid substrate holding device relatively be elevated, and make the mask that kept by mask holding device closer to each other with the circuit substrate kept by base plate keeping device/be separated, (Ε) a pair mask supporting member, be positioned at the mask kept by aforementioned mask holding device, two parts of departing from from the both side ends of the circuit substrate being held in aforesaid substrate holding device carry out contacting or close Support Position, when the printing based on above-mentioned screeding device with based on above-mentioned close/being separated of the mask of separator and circuit substrate time at least one party, the lower surface of mask is supported, (Ζ) clearing apparatus, comprise the extraction unit that rectangular wiper blade is extracted out by (a), b retraction part that this wiper blade is regained by () and (c) have the pressing component above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the press surface on the lower surface of aforementioned mask, this clearing apparatus enter into by above-mentioned close/separator and separated from one another after mask and circuit substrate between, the lower surface that edge mask moves, while carried out the lower surface of wiping mask by the above-mentioned wiper blade of the lower surface being pressed on aforementioned mask by above-mentioned pressing component, (Η) pressing component mobile device, makes the above-mentioned pressing component of this clearing apparatus produce to make above-mentioned wiper blade carry out the motion needed for wiping to the lower surface of mask, (θ) cleaning control device, controlling the movement of above-mentioned pressing component by controlling this pressing component mobile device, and (Ι) mask supporting member mobile device, when the printing based on above-mentioned screeding device with based on above-mentioned close/being separated of the mask of separator and circuit substrate time above-mentioned at least one party, above-mentioned a pair mask supporting member is made to be positioned at above-mentioned Support Position, when the cleaning based on above-mentioned clearing apparatus, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, and above-mentioned cleaning control device comprises: (α) input unit, the information relevant to the mask kept by aforementioned mask holding device and low elastic coefficient sheet and the size of circuit substrate that kept by aforesaid substrate holding device can be inputted, and (β) motion determination section, based on the above-mentioned information inputted by this input unit, above-mentioned pressing component should be made to produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of mask, comprise this pressing component to mask close/be separated with the movement along mask move determine for move as follows: after the end of the part at least contacted with circuit substrate of this mask has exceeded the part side contacted with aforementioned mask support component, before the border arriving this mask and above-mentioned low elastic coefficient sheet, make the part pressed on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade, while proceed mobile on the direction parallel with the lower surface of aforementioned mask, while carry out being separated from the lower surface of this mask wipe action.

As clearing apparatus, such as, can adopt as lower device: form extraction unit by donor rollers, retraction part is formed by take up roll, by roll driving apparatus, take up roll is rotated, thus, the wiper blade supplied by donor rollers press on the lower surface of mask by pressing component and the part being used in wiping is reeled by take up roll; Or adopt as lower device: as recorded in Japanese Unexamined Patent Publication 2010-201797 publication, extraction unit is formed by guide reel, retraction part is formed by driven roller and pinch roll, the wiper blade of annular shape hangs around guide reel and is clipped between driven roller and pinch roll, by roll driving apparatus, driven roller is rotated, thus, wiper blade press on the part of the lower surface of mask after wiping is carried out to mask lower surface by pressing component, the print paste adhered to by wiper blade cleaning part is removed, and returns and circulate to guide reel.

Invention effect

According to mask printing process of the present invention, the part pressing on mask of wiper blade moves to the position of the part contacted with mask supporting member that have passed mask, therefore except the part contacted with circuit substrate of the lower surface of mask, the channel floor supported by mask supporting member by wiper blade wiping, and goes out print paste from this channel floor wiping.Therefore, the print paste be attached in the part contacted with circuit substrate of the lower surface of mask is wiped out, circuit substrate can not be polluted, and the print paste to be assembled by wiper blade wiping, be attached to wiper blade print paste attachment and remain in the part supported by mask supporting member of mask, avoid being attached to mask supporting member and situation about polluting.

According to another mask printing process of the present invention, the part edge pressing on the lower surface of mask of wiper blade the direction parallel with the lower surface of mask and moves limit and be separated, and thus, the print paste that limit wiping is wiped before separation, while be separated from mask.This wipes action and carries out in the part contacted with circuit substrate of mask and the part between the end of this part and the border of mask and low elastic coefficient sheet, this wipes the part contacted with mask supporting member that action executing part comprises mask, but attachment can be reduced and residue in the print paste of this part, and wiper blade is separated from mask, make wiper blade press on the part of the lower surface of mask mobile stop after, compared with situation about being vertically separated, print paste reduces to the attachment of mask supporting member.According to wiping action, by the movement on the direction parallel with the lower surface of mask of control wiper blade and being separated from mask, the displacement pressing on the part of the lower surface of mask of wiper blade can be shortened, and wiping dirt.And, for low elastic coefficient sheet, do not carry out wiping, the damage of low elastic coefficient sheet can be avoided.

According to mask printing equipment of the present invention, the channel floor supported by mask supporting member pressing on the part wiping mask of mask of wiper blade can be made.

According to other mask printing equipment of the present invention, what the part pressing on mask of wiper blade can be made to carry out the lower surface of mask wipes action.

The mode of invention

Below, in these Shen feelings exemplified with think can carry out patent application invention (following, be sometimes referred to as " invention can be applied for ".Can apply for inventing invention and the present application or the invention of its subordinate concept or upperseat concept invention that the scope that comprises patent application records, sometimes comprise the invention of other concepts) several modes, and they to be described.Each mode, in the same manner as claim, is distinguished into item, to every reference numerals, records as required with the form of the numbering quoting other item.This is only in order to make the understanding can applying for invention easy, is not can apply for that the combination of the structural element invented is defined as the situation of following every record by forming.Namely, can apply for invention should with reference to accompanying every record, the record, prior art, technology general knowledge etc. of embodiment make an explanation, as long as meet this explanation, in every mode, be also attached with the mode of other structural element, delete from every mode the mode of structural element also can become can apply for invent a mode.

In addition, following every in, (3) item is equivalent to claim 1, and (6) item is equivalent to claim 2, and (7) item is equivalent to claim 3, (8) item is equivalent to claim 4, (9) item is equivalent to claim 5, and (21) item is equivalent to claim 6, and (22) item is equivalent to claim 7, (23) item is equivalent to claim 8, and (24) item is equivalent to claim 9.

(1) a mask printing process, is characterized in that, comprising:

Printing process, being formed with the upper surface mounting print paste of mask of multiple through hole, makes this print paste by above-mentioned through hole to the circuit substrate printing of below being configured in mask by the scraper plate of the upper surface movement along mask;

Separation circuit, after the enforcement of this printing process, under the state that a pair mask supporting member making to be positioned at the Support Position of departing from from the both side ends of foregoing circuit substrate supports the lower surface of aforementioned mask, make this mask and foregoing circuit substrate separated from one another, afterwards, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position; And

Cleaning operation, passing through to implement this separation circuit between circuit substrate separated from one another and mask, make to comprise (a) extracts the extraction unit of rectangular wiper blade out, this wiper blade is regained by (b) retraction part and (c) there is the clearing apparatus above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the pressing component of the press surface of the lower surface of aforementioned mask to enter, this clearing apparatus is moved along the lower surface of aforementioned mask, make the lower surface of above-mentioned wiper blade wiping aforementioned mask thus

In this cleaning operation, make the part pressing on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade from after the part contacted with the mask supporting member being positioned at above-mentioned Support Position of this mask moves to the position left the opposition side to above-mentioned circuit substrate, its lower surface from aforementioned mask is separated.

According to the mask printing process that this is recorded, about the cleaning of mask, the effect same with the mask printing process that (3) item is recorded, effect can be obtained.And, when making mask and circuit substrate is separated from one another, supporting mask by a pair mask supporting member, being therefore easily separated, and can be separated well.

In the same manner as the mask that mask and (4) item are recorded, can open via low elastic coefficient sheet and be located on mask frame, also can not open via low elastic coefficient sheet and be located on mask frame.In (2) item and the mask printing process of (3) item record and the mask printing equipment of (21) item record too.

Mask supporting member has gap between the lower surface of mask, only can be positioned at Support Position when supporting mask with the state contacted with the lower surface of mask, also can be positioned at Support Position with the state contacted with the lower surface of mask all the time.And, mask supporting member can by mask and mask supporting member perpendicular to the relative movement on the direction of mask, make mask and mask supporting member separated from one another and keep out of the way from Support Position, also can be kept out of the way from Support Position by the relative movement on the direction of lower surface being parallel to mask of mask and mask supporting member.In addition, circuit substrate can contact with the lower surface of mask or close.Between mask, there is gap close to referring to all the time, but when being printed to circuit substrate by print paste by through hole, become the state that mask contacts with circuit substrate.In the mask printing equipment that the mask printing process that these situations are recorded at (2) item ~ (6) item and (21) item, (22) item are recorded too.

Wiper blade from the separation of the lower surface of mask can move not make on the direction being parallel to mask wiper blade and with mask vertical the mode that declines carry out, also can move limit and decline and carry out relative to the mode that mask tilts to be separated to make wiper blade edge mask.When vertical separation, the direction being parallel to mask does not need separatory space, can promptly be separated, when tilting to be separated, can be separated by the lower surface limit of wiper blade wiping mask on limit, the print paste residuing in mask can be made to reduce.

(2) a mask printing process, is characterized in that, comprising:

Printing process, in the below of mask being formed with multiple through hole, with this mask configuration circuit substrate abreast, and configure a pair mask supporting member in the Support Position of departing from from the both side ends of this circuit substrate, at the upper surface mounting print paste of aforementioned mask, by the scraper plate of the upper surface movement along this mask, this print paste is printed to above-mentioned circuit substrate by above-mentioned through hole;

Separation circuit, after the enforcement of this printing process, make aforementioned mask and foregoing circuit substrate separated from one another, and above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position; And

Cleaning operation, in the enforcement by this separation circuit between circuit substrate separated from one another and mask, make to comprise (a) extracts the extraction unit of rectangular wiper blade out, this wiper blade is regained by (b) retraction part and (c) there is the clearing apparatus above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the pressing component of the press surface of the lower surface of aforementioned mask to enter, this clearing apparatus is moved along the lower surface of aforementioned mask, make the lower surface of above-mentioned wiper blade wiping aforementioned mask thus

A pair mask supporting member has gap all the time between the lower surface of mask, the state supported to contact with the lower surface of mask when can supporting mask when printing configures, and also can configure with the state contacted with the lower surface of mask all the time.

According to the mask printing process that this is recorded, about the cleaning of mask, the effect same with the mask printing process that (3) item is recorded, effect can be obtained.And, when printing circuit substrate, supporting mask by a pair mask supporting member and printing well.About (5) item record mask printing process too.

(3) a mask printing process, be the method for being printed to circuit substrate by print paste by mask printing equipment, aforementioned mask printing equipment comprises:

Mask holding device, keeps the mask being formed with multiple through hole;

Base plate keeping device, is held in parallel with this mask by circuit substrate in the below of the mask kept by aforementioned mask holding device;

Screeding device, moves along the mask kept by aforementioned mask holding device, makes the print paste of the upper surface being placed in this mask by above-mentioned multiple through hole, prints the circuit substrate kept by aforesaid substrate holding device;

Close/separator, by making aforementioned mask holding device and aforesaid substrate holding device relatively be elevated, and make the mask that kept by mask holding device closer to each other with the circuit substrate kept by base plate keeping device/be separated;

A pair mask supporting member, be positioned at the mask kept by aforementioned mask holding device, two parts of departing from from the both side ends of the circuit substrate being held in aforesaid substrate holding device carry out contacting or close Support Position, when the printing based on above-mentioned screeding device with based on above-mentioned close/being separated of the mask of separator and circuit substrate time at least one party, the lower surface of mask is supported;

Clearing apparatus, comprise extraction unit that rectangular wiper blade extracts out by (a), retraction part that this wiper blade is regained by (b) and (c) have the pressing component above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the press surface on the lower surface of aforementioned mask, this clearing apparatus enter into by above-mentioned close/separator and separated from one another after mask and circuit substrate between, the lower surface that edge mask moves, while carry out the lower surface of wiping mask by the above-mentioned wiper blade of the lower surface being pressed on aforementioned mask by above-mentioned pressing component; And

Mask supporting member mobile device, when the printing based on above-mentioned screeding device with based on above-mentioned close/being separated of the mask of separator and circuit substrate time above-mentioned at least one party, above-mentioned a pair mask supporting member is made to be positioned at above-mentioned Support Position, when the cleaning based on above-mentioned clearing apparatus, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position

The feature of aforementioned mask printing process is,

After the printing of the print paste based on above-mentioned screeding device, by above-mentioned close/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, in this case, above-mentioned clearing apparatus is cleaned, when this cleaning, pressed on after the part on the lower surface of aforementioned mask to move to the position left the opposition side to above-mentioned circuit substrate from the part contacted with the mask supporting member being positioned at above-mentioned Support Position of this mask by above-mentioned pressing component what make above-mentioned wiper blade, be separated from the lower surface of aforementioned mask.

At this, about the Support Position contacted with mask of a pair mask supporting member, as long as a pair mask supporting member supports mask when printing, it is then the initial i.e. front position contacted with mask from printing, as long as a pair mask supporting member supports mask when being separated of mask and circuit substrate, be then initial namely from being separated before the position that contacts with mask.And, about the Support Position close to mask of a pair mask supporting member, as long as all the time and there is gap between mask but a pair mask supporting member supports mask when printing, then become when being pressed into print paste to through hole the position contacting with mask and carry out the state supported, as long as support mask when being separated of mask and circuit substrate, be then become when circuit substrate is separated from mask the position contacting with mask and carry out the state supported.As mask supporting member, during the mask adsorbent support parts stated after a procedure, the Support Position close to mask of a pair mask supporting member is the position becoming the state that mask supporting member contacts with mask by adsorbing.

According to the mask printing process that this is recorded, when print paste prints to circuit substrate with at least one party during being separated of mask and circuit substrate, support mask by a pair mask supporting member, can carry out well printing and at least one party be separated.For (6) item record mask printing process too.

(4) a mask printing process, is characterized in that, comprising:

Printing process, mask metal film-making being formed with multiple through hole is used to open via the low elastic coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making the mask body be located on mask frame, at the upper surface mounting print paste of aforementioned mask, make this print paste by above-mentioned through hole to the circuit substrate printing of below being configured at this mask by the scraper plate of the upper surface movement along mask;

Separation circuit, after the enforcement of this printing process, a pair mask supporting member making to be positioned at the Support Position of departing from from the both side ends of foregoing circuit substrate supports the lower surface of aforementioned mask, in this case, make this mask and foregoing circuit substrate separated from one another, afterwards, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position; And

In this cleaning operation, after the end of the part at least contacted with circuit substrate of this mask has exceeded the part side contacted with aforementioned mask support component, before the border arriving this mask and above-mentioned low elastic coefficient sheet, make the part pressed on by above-mentioned pressing component on the lower surface of aforementioned mask of above-mentioned wiper blade, while proceed mobile on the direction parallel with the lower surface of aforementioned mask, that carries out being separated from the lower surface of this mask wipes action.

According to the mask printing process that this is recorded, about the cleaning of mask, the effect same with the mask printing process that (6) item is recorded, effect can be obtained.

(5) a mask printing process, is characterized in that, comprising:

Printing process, mask metal film-making being formed with multiple through hole is used to open via the low elastic coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making the mask body be located on mask frame, in the below of mask, with this mask configuration circuit substrate abreast, and configure a pair mask supporting member in the Support Position of departing from from the both side ends of this circuit substrate, at the upper surface mounting print paste of aforementioned mask, by the scraper plate of the upper surface movement along mask, this print paste is printed to above-mentioned circuit substrate by above-mentioned through hole;

(6) a mask printing process, be the method for being printed to circuit substrate by print paste by mask printing equipment, aforementioned mask printing equipment comprises:

Mask holding device, opens via the low elastic coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making the mask body be located on mask frame to the mask being formed with multiple through hole in metal film-making and keeps;

The feature of aforementioned mask printing process is,

After the printing of the print paste based on above-mentioned screeding device, by above-mentioned close/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair mask supporting member is kept out of the way from above-mentioned Support Position, in this case, above-mentioned clearing apparatus is cleaned, when this cleaning, after the end of the part at least contacted with circuit substrate of this mask has exceeded the part side contacted with aforementioned mask support component, before the border arriving this mask and above-mentioned low elastic coefficient sheet, make the part pressed on by above-mentioned pressing component on the lower surface of aforementioned mask of above-mentioned wiper blade, while proceed mobile on the direction parallel with the lower surface of aforementioned mask, while carry out being separated from the lower surface of this mask wipe action.

(7) according to the mask printing process that (4) item is recorded to any one in (6) item, wherein, when utilizing above-mentioned clearing apparatus to clean mask, in the end of the side of the close foregoing circuit substrate of the part contacted with aforementioned mask support component of mask, and between the border of aforementioned mask and above-mentioned low elastic coefficient sheet, under the state that the part pressing on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade is remained pressed state, when exist move to the enough distances needed for position from the opposition side to above-mentioned circuit substrate that leave from the part contacted with aforementioned mask support component of aforementioned mask time, be separated from mask after moving to this position, carry out when there is not this distance above-mentionedly wiping action.

According to the mask printing process that this is recorded, cleaning mode can be selected according to the distance between the end of the side of the close circuit substrate of the part contacted with mask supporting member of mask and the border of mask and low elastic coefficient sheet, if this distance is abundant, then the channel floor that with mask supporting member contact of wiper blade to mask carries out wiping and passes through, can to clean in the mode of the not residual print paste of this part.Even if apart from insufficient, by wiping action, while avoid the wiping of the part contacted with mask supporting member of carrying out mask with the interference edge of low elastic coefficient sheet, the attachment of print paste to mask supporting member can be reduced.Make wiper blade move to the position left from the part contacted with mask supporting member of mask, and print paste cannot be driven out of, but pass through, based on the wiping of the print paste wiping action, the attachment of print paste to mask supporting member can be reduced.

Abundant in above-mentioned distance, when the part pressing on the lower surface of mask of wiper blade is separated from mask with the state moving to the above-mentioned position left, wiper blade moves to the position left from the part supported by mask supporting member of mask, even if therefore print paste residues in separated part, also can not be attached to mask supporting member and cause stained, wiper blade can be made to be separated relative to mask vertical, also can be separated obliquely.

(8) according to the mask printing process that (1) item is recorded to any one in (7) item, wherein, use mask adsorbent support parts as aforementioned mask support component, aforementioned mask adsorbent support parts have the suction hole in upper surface open, by the adsorbent support aforementioned mask from this suction hole attraction air.

When printing, when mask supporting member supports mask, prevent mask to prevent the decline of printing precision relative to the deviation of circuit substrate by the absorption of mask, when being separated, when mask supporting member carries out adsorbent support to mask, print paste easily comes off from through hole.

No matter when being separated from the lower surface of mask after the part pressing on the lower surface of mask of wiper blade to move to the position left the opposition side to circuit substrate from the part contacted with mask supporting member of mask, or when carry out mask lower surface wipe action, the part contacted with mask supporting member of mask is all by wiper blade wiping, therefore when mask adsorbent support parts carry out adsorbent support to mask, the print paste being attached to mask is inhaled in suction hole, reduces the situation that air-hole blockage occurs.

(9) according to the mask printing process that (1) item is recorded to any one in (8) item, wherein, comprise residual print paste removal step: the part be separated with above-mentioned wiper blade in the latter stage of above-mentioned cleaning operation and the separate section that make above-mentioned wiper blade wiping aforementioned mask again, the print paste removing of this separate section will be residued in thus.

By removing residual print paste, such as, even if mask supporting member touches the separate section be separated with wiper blade of mask, also residual print paste can be avoided to be attached to mask supporting member and to cause stained situation, or avoid the print paste residuing in mask to solidify and cause the cleaning of mask to become the situation of difficulty.And, reducing the wash number of mask by removing residual print paste, can the minimizing of number of times be changed based on mask and realize the raising of printing efficiency or the life-span raising of mask.

(10) according to the mask printing process that (9) item is recorded, wherein, above-mentioned residual print paste removal step is carried out according to the set point number of above-mentioned cleaning operation.

Set point number can be once, also can be more than twice repeatedly.If carry out residual print paste removing, then mask can be made clean, and the time of cleaning is elongated, but if set point number be repeatedly, then can suppresses the increase based on the time of cleaning and the decline of printing usefulness that causes, and carry out residual print paste removing.

(11) according to the mask printing process that (9) item or (10) item are recorded, wherein, by also carrying out above-mentioned residual print paste removal step with the dry wipes that (a) makes immersion have wet wipe, and then (b) of the above-mentioned separate section of above-mentioned wiper blade wiping of liquid to make not immerse the above-mentioned separate section of above-mentioned wiper blade wiping of liquid.

According to wet wipe, easily wiping can be attached to the lower surface of mask and the print paste that solidifies, by back to back dry wipes, by print paste removing residual for the liquid or wiping that are attached to the lower surface of mask, mask becomes cleaner.

(12) according to the mask printing process that (1) item is recorded to any one in (11) item, wherein, printing cream solder is as above-mentioned print paste.

In print paste, except cream solder, also comprise such as electric conductivity paste or insulator paste.

(21) a mask printing equipment, is characterized in that, comprising:

Mask holding device, keeps the mask being formed with multiple through hole;

Clearing apparatus, comprise extraction unit that rectangular wiper blade extracts out by (a), retraction part that this wiper blade is regained by (b) and (c) have the pressing component above-mentioned wiper blade extended between above-mentioned extraction unit and retraction part being pressed on the press surface on the lower surface of aforementioned mask, this clearing apparatus enter into by above-mentioned close/separator and separated from one another after mask and circuit substrate between, the lower surface that edge mask moves, while carry out the lower surface of wiping mask by the above-mentioned wiper blade of the lower surface being pressed on aforementioned mask by above-mentioned pressing component;

Pressing component mobile device, makes the above-mentioned pressing component of this clearing apparatus produce to make above-mentioned wiper blade carry out the motion needed for wiping to the lower surface of mask;

Cleaning control device, controls the movement of above-mentioned pressing component by controlling this pressing component mobile device; And

And above-mentioned cleaning control device comprises:

Input unit, can input the information relevant to the mask kept by aforementioned mask holding device and the size of circuit substrate that kept by aforesaid substrate holding device; And

Motion determination section, based on the above-mentioned information inputted by this input unit, above-mentioned pressing component should be made to produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of aforementioned mask, comprise this pressing component to mask close/be separated and determine as to move as follows with moving of the movement along mask: make after the part pressing on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade to move to the position left the opposition side to above-mentioned circuit substrate from the part contacted with the mask supporting member being positioned at above-mentioned Support Position of this mask along mask, be separated from the lower surface of aforementioned mask.

Input unit can be that guidance panel, keyboard etc. are operated by operator and carry out the device of the input of data, also can be the part of reading in of carrying out being stored in the information stored in memory cell in the control device of mask printing equipment or external memory.

According to the mask printing equipment that this is recorded, the method that (3) item is recorded suitably can be implemented.

(22) a mask printing equipment, is characterized in that, comprising:

And above-mentioned cleaning control device comprises:

Input unit, can input the information relevant to the mask kept by aforementioned mask holding device and low elastic coefficient sheet and the size of circuit substrate that kept by aforesaid substrate holding device; And

Motion determination section, based on the above-mentioned information inputted by this input unit, above-mentioned pressing component should be made to produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of mask, comprise this pressing component to mask close/be separated with the movement along mask move determine for moving as follows: after the end of the part at least contacted with circuit substrate of this mask has exceeded the part side contacted with aforementioned mask support component, before the border arriving this mask and above-mentioned low elastic coefficient sheet, what make above-mentioned wiper blade presses on the part on the lower surface of aforementioned mask by above-mentioned pressing component while proceed mobile on the direction parallel with the lower surface of aforementioned mask, while carry out being separated from the lower surface of this mask wipe action.

According to the mask printing equipment that this is recorded, the method that (6) item is recorded suitably can be implemented.

(23) according to the mask printing equipment that (22) item is recorded, wherein, when utilizing above-mentioned clearing apparatus to clean mask, in the end of the side of the close foregoing circuit substrate of the part contacted with aforementioned mask support component of mask, and between the border of mask and above-mentioned low elastic coefficient sheet, by above-mentioned wiper blade press on by above-mentioned pressing component the state remaining pressed state in the part of the lower surface of aforementioned mask under, when exist move to the enough distances needed for position from the opposition side to above-mentioned circuit substrate that leave from the part contacted with aforementioned mask support component of aforementioned mask time, the motion that above-mentioned motion determination section should make above-mentioned pressing component produce determines to be from the motion that mask is separated after moving to this position, when there is not this distance, the motion that above-mentioned motion determination section should make above-mentioned pressing component produce determines as carrying out the above-mentioned motion wiping action.

According to the mask printing equipment that this is recorded, the method that (7) item is recorded suitably can be implemented.

(24) according to the mask printing process that (21) item is recorded to any one in (23) item, wherein, above-mentioned a pair mask supporting member is mask adsorbent support parts respectively, aforementioned mask adsorbent support parts have the suction hole in upper surface open, by the adsorbent support mask from this suction hole attraction air.

The Feature Combination that the feature above-mentioned (9) item to (12) item can recorded respectively and above-mentioned (21) item are recorded respectively to (24) item adopts.

Accompanying drawing explanation

Fig. 1 is the side view diagrammatically representing the mask printing equipment can applying for the embodiment invented.

Fig. 2 represents the mask support device of aforementioned mask printing equipment, the side view of base plate keeping device and baseplate support device etc.

Fig. 3 is the stereogram representing aforementioned mask bracing or strutting arrangement etc.

Fig. 4 is the top view of the mask adsorbent support parts representing aforementioned mask bracing or strutting arrangement.

Fig. 5 is the side view cutaway drawing of the part representing aforesaid substrate bracing or strutting arrangement.

Fig. 6 is the side view cutaway drawing representing aforementioned mask bracing or strutting arrangement etc.

Fig. 7 is the top view of the mask holding device representing aforementioned mask printing equipment.

Fig. 8 is the top view of the screeding device representing aforementioned mask printing equipment.

Fig. 9 is the stereogram of the fore-and-aft direction regulon of the apparatus for adjusting position representing aforementioned mask holding device.

Figure 10 is the stereogram of the scraper head lowering or hoisting gear representing above-mentioned screeding device.

Figure 11 is the stereogram of the scraper head representing above-mentioned screeding device.

Figure 12 is the stereogram represented together with mobile device etc. by the clearing apparatus of aforementioned mask printing equipment.

Figure 13 is the stereogram representing clearing apparatus in aforementioned mask printing equipment and sweeping fluid apparatus for coating.

Figure 14 is the side view (part section) part for clearing apparatus main body removing being represented above-mentioned clearing apparatus.

Figure 15 is the block diagram of the control device representing aforementioned mask printing equipment.

Figure 16 is the moving into of the circuit substrate illustrated in aforementioned mask printing equipment, support, the figure of the printing of cream solder etc.

Figure 17 illustrates one of the motion that the pressing component of above-mentioned clearing apparatus should be made to produce when the cleaning figure leaving position moving movement.

Figure 18 illustrates that another of motion that the pressing component of above-mentioned clearing apparatus should be made to produce when cleaning wipes the figure of motion.

The figure of the amount of residual solder removing that Figure 19 carries out when being and illustrating and make the generation of the pressing component of above-mentioned clearing apparatus leave position moving movement.

The figure of the amount of residual solder removing that Figure 20 carries out when being and illustrating and make the generation of the pressing component of above-mentioned clearing apparatus wipe motion.

Figure 21 represents to become at above-mentioned control device the flow chart that the cleaning mode stored in the ROM of the computer of main body sets routine.

Figure 22 is the flow chart representing the mask cleaning routine stored in the ROM of above computer

Detailed description of the invention

Below, with reference to accompanying drawing, explanation can apply for working of an invention mode.In addition, can apply for that invention is except following embodiment, headed by the mode that the mode one of foregoing invention is recorded, the knowledge based on those skilled in the art can be implemented in the mode implementing various change.

As the mask printing equipment can applying for the embodiment invented, Fig. 1 diagrammatically represents the mask printing equipment implemented as the mask printing process can applying for the embodiment invented.In this mask printing equipment, to can apply for that although the part of inventing beyond relevant part is also unexposed, but form in the same manner as the mask printing equipment that the description of Japanese Patent Application 2010-110428 applied for the applicant and the description of Japanese Patent Application 2010-102298 are recorded, be described simply.

Base 12 (with reference to Fig. 3), multiple truss, beam and post etc. integrally assemble by the printing equipment main body 10 of this mask printing equipment, are provided with base plate keeping device 14 and mask support device 16 in the lower side of its front portion.As shown in Figure 2, mask support device 16 comprise mask support apparatus main body 60, as a pair mask supporting member mask adsorbent support parts 62,64, mask adsorbent support parts driving and reversing mechanism 66,68 as mask supporting member driving and reversing mechanism.As shown in Figure 3, mask adsorbent support parts 62,64 are movable members, possess the supporting leg body 70 of a shape and the supporter 72 of tabular respectively, can be located at the upper surface of mask support apparatus main body 60 along the mode of the direction parallel with the mask being held in mask holding device described later and fore-and-aft direction movement.In this mask printing equipment, direction parallel for the carrying direction with the circuit substrate based on substrate transfer apparatus is set to left and right directions, the direction orthogonal with carrying direction is set to fore-and-aft direction.Left and right directions and fore-and-aft direction are level.Mask adsorbent support parts driving and reversing mechanism 66 possesses two cylinders 80 be arranged on mask support apparatus main body 60, and stretching by piston rod, is guided by guiding device 81 and mask adsorbent support parts 62 are moved.Describe later about mask supporting member driving and reversing mechanism 68.

As shown in Figure 2, each supporter 72 of mask adsorbent support parts 62,64 is arranged in the beam portion 84 of supporting leg body 70 by axle 82 in the mode can rotated around the axis parallel with carrying direction, by forcing unit a kind of namely as the draft helical spring 86 of elastomeric element of erection between each supporting leg body 70, exert a force to the direction close to beam portion 84.Rotation limit based on the supporter 72 of the force of spring 86 is abutted to beam portion 84 by supporter 72 and is limited, and is supported for the attitude of level.

The mask adsorbent support component side of supporter 72 from beam portion 84 to the opposing party is outstanding, and its upper surface entirety forms mask support face 90, and the lower surface of protuberance forms substrate bearing plane 92.And, supporter 72 with the top of secure component described later side in opposite directions as mask adsorbent support parts 62 shown in Figure 4, across and the length direction entirety of supporter 72 gently bend in the convex ground be made up of repeatedly function or trigonometric function curve, become the inclined side 94 tilted relative to the length direction of scraper plate described later.The bottom of the side of supporter 72 to recessed with secure component opposite side, and forms parallel with a carrying direction plane parallel side 96 by the two ends of inclined side 94, thus the edge of delimitation substrate bearing plane 92.Supporter 72 is formed the multiple suction holes 98 in this mask support face 90 upper shed.Suction hole 98 is through and formed along thickness direction by supporter 72, as shown in Figure 2, and the path 99 formed via surface opening thereon in beam portion 84 and being connected with vacuum plant 100, thus attract air.

Mask support device 16 is elevated by mask support device lowering or hoisting gear 110.As shown in Figure 3, mask support device lowering or hoisting gear 110 comprises guiding device 112 and lifting drive 114.This lifting drive 114 comprises: axially relative movement and the mode that can not relatively rotate can not be located at four feeding screws 116 of mask support apparatus main body 60; So that axially relative movement and the mode that can relatively rotate base 12 can not be located at and four nuts 118 screwed togather respectively with four feeding screws 116; And relative whirligig 120.Relative whirligig 120 possesses: electro-motor 124; Comprise multiple pulleys 126 of four pulleys 126 arranged integratedly respectively with four nuts 118; And hang around the band 128 (with reference to Fig. 6) of pulley 126; Four nuts 118 rotate simultaneously, thus dead root feeding screws 116 is moved in the axial direction simultaneously, and mask support device 16 is guided by guiding device 112 and is elevated relative to printing equipment main body 10.Guiding device 112 comprises guide rod 130 and guide sleeve 132.As pulley 126 and band 128, preferably synchronous pulley and Timing Belt, as feeding screws 116, preferred ball-screw, as electro-motor 124, preferred servo motor etc. can carry out the electro-motor of the control of the anglec of rotation.About following feeding screws, pulley, band and electro-motor too.

As seen in figures 2 and 3, aforesaid substrate holding device 14 comprises baseplate support device 150 and side fastener 152.Side fastener 152 comprises fastener main body 154, a pair secure component 156,158 and secure component drive unit 160 (with reference to Fig. 2).Secure component 156,158 is elongated shape respectively, is installed on side frame 162,164.Side frame 162 is fixed on fastener main body 154 abreast with carrying direction, and secure component 156 is fixed on the upper end of this side frame 162 with the attitude that length direction is parallel with carrying direction.After, sometimes secure component 156 is called fixing secure component.As shown in Figure 4, fixing secure component 156 being set to the plane fastening surface 166 parallel with carrying direction with this secure component 158 side in opposite directions, the top at the back side being set as there is bending and with the inclined side 94 parallel inclined side 168 corresponding with above-mentioned inclined side 94.The side being provided with fixing secure component 156 in a pair secure component 156,158 of this mask printing equipment is face side or front side, and the mask adsorbent support parts 62 of fixing secure component 156 side in a pair mask adsorbent support parts 62,64 are positioned at front side.

Side frame 164 is in shaped door as shown in Figure 3, as shown in Figure 2, can be located at fastener main body 154 movably along fore-and-aft direction.Side frame 164 is moved, the interval of change and side frame 162 by carrying width change device 184, thus changes board carrying width.This carrying width change device 184 comprises: as the electro-motor 182 of drive source; With a pair movement transferring 190, comprise multiple pulley 186 respectively and be with 188 and convert the rotation of electro-motor 182 to rectilinear motion and transmit to side frame 164.

Secure component 158 remaining on side frame 164 close to the mode be separated with a side of the both sides end face of circuit substrate, to be moved by secure component drive unit 160 with the parallel attitude in carrying direction with length direction.After, sometimes secure component 158 is called movable secure component 158.Movable secure component 158, in the same manner as fixing secure component 156, is set to fastening surface 192 by with substrate 206 side in opposite directions, the top at the back side is set to inclined side 194.Although secure component drive unit 160 eliminates detailed diagram and explanation, comprising with cylinder is a pair driver element of drive source.

As shown in Figure 2, the band 200 of the annular that can rotate is separately installed with at side frame 162,164, rotate respectively by the band whirligig 204 being drive source with electro-motor 202, thus the circuit substrate 206 (after, referred to as substrate 206) being supported both side ends by a pair band 200 is carried with the attitude of level.Band 200 and band whirligig 204 form substrate transfer apparatus 208.When carrying, the non-fastening base 206 of secure component 156,158, allows that it moves, and moves it in the both sides of substrate 206 and guide, and plays function as substrate-guided parts, and side frame 162,164 forms track component.

Aforementioned mask adsorbent support parts driving and reversing mechanism 68 possesses two cylinders 210, as the cylinder 210 of a side shown in Fig. 2, its cylinder housing 212 is fixed on the supporting leg body 70 of mask adsorbent support parts 64, and side frame 164 is can not can to engage along the mode of fore-and-aft direction relative movement with the holding section 216 of the leading section of piston rod 214 along above-below direction relative movement.Therefore, mask adsorbent support parts 64 are by the driving of above-mentioned carrying width change device 184, and move along fore-and-aft direction according to the width (size on direction parallel with fore-and-aft direction under the state kept by base plate keeping device 14) of substrate 206 together with side frame 164, stretching by piston rod 214, is guided by guiding device 81 and moves along fore-and-aft direction relative to side frame 164 and then relative to movable secure component 158.By the driving of the mask adsorbent support parts 62,64 based on mask adsorbent support parts driving and reversing mechanism 66,68, thus change and interval on the parallel direction of these masks.Mask adsorbent support parts driving and reversing mechanism 66,68 forms mask supporting member interval change device.And although the diagram of omission, mask adsorbent support parts 64 are fixed on mask support apparatus main body 60 by mask supporting member fixture.

Aforesaid substrate bracing or strutting arrangement 150 comprises a kind of namely as multiple supporting pins 234 (with reference to Fig. 5) of substrate adsorption support component of apparatus main body 230 (with reference to Fig. 3), pin brace table 232 and substrate supporting member.This baseplate support device 150 is supported substrate 206 from below by supporting pin 234 and adsorbs maintenance, the front end face of supporting pin 234 is set to the supporting surface 236 of level, and is provided with the cup 238 of rubber.Form in the same manner as the baseplate support device that this baseplate support device 150 and Japanese Unexamined Patent Publication 2002-118399 publication are recorded, omit the description.

Base plate keeping device 14 is elevated by base plate keeping device lowering or hoisting gear 250.Base plate keeping device lowering or hoisting gear 250 comprises lifting drive 252 as shown in Figure 3.This lifting drive 252 comprises rotating and the mode that can not move in the axial direction is arranged on four nuts 254 on mask support apparatus main body 60 and whirligig 256 relatively.As shown in Figure 6, relative whirligig 256 comprises: electro-motor 260; Comprise multiple pulleys 262 of the pulley 262 arranged integratedly with four nuts 254; And around the band 264 hung on these pulleys 262.

As shown in Figure 6, baseplate support device 150 is guided by the guiding device 274 comprising guide rod 270 and guide sleeve 272, and is elevated relative to side fastener 152 by lifting drive 276.Guiding device 274 and lifting drive 276 form baseplate support device lowering or hoisting gear 278.

As shown in Figure 3, lifting drive 276 comprises: relatively can to rotate downwards from baseplate support device main body 230 and can not four feeding screws 280 stretching out of the mode of axially relative movement; Be fixed on fastener main body 154, can not rotate and four nuts 282 that can not move in the axial direction; And relative whirligig 284.Four feeding screws 280 screw togather with nut 282 respectively, and also screw togather with four nuts 254 of above-mentioned lifting drive 252.Relative whirligig 284 comprises: be arranged on the electro-motor 286 in baseplate support device main body 230; Comprise multiple pulleys 288 of the pulley 288 be separately positioned on four feeding screws 280; And the band 290 hung around on these pulleys 288.

By making nut 254 rotate relative to whirligig 256 under the rotation halted state of four feeding screws 280, make feeding screws 280 be elevated thus, base plate keeping device 14 is elevated relative to mask support device 16.This lifting is guided by guide rod 270,130.The rotation halted state of four feeding screws 280 remains rotation halted state and obtains by making holding torque act on electro-motor 286.And, by making four feeding screws 280 rotate, baseplate support device 150 is elevated relative to side fastener 152.Now, holding torque acts on electro-motor 260, and four nuts 254 remain rotation halted state.When the lifting of mask support device 16, base plate keeping device 14 and mask support device 16 1 lifting.In the present embodiment, nut 254 and relative whirligig 256 jointly form lifting drive 252 with feeding screws 280.

As shown in Figure 1, above base plate keeping device 14 and mask support device 16, namely the topmost of printing equipment main body 10 is provided with mask holding device 390 and screeding device 392.Mask holding device 390 comprises the mask frame bearing piece 400 shown in Fig. 7 and apparatus for adjusting position 402, mask body 410 is held in the attitude of level.Mask body 410 is that the structure be located on mask frame 416 opened by mask 412 via mask retention tab 414.Mask 412 is formed with multiple through hole 420 on the printing zone 418 of the metal such as sheet of stainless steel.Mask retention tab 414 by coefficient of elasticity than forming the little low elastic coefficient sheet of the metal film-making of mask 412, such as by utilizing the adhesive tape of acrylic acid to be formed by sheet laminated for the net of polyester, between the outer peripheral edge of the lower surface of mask 412 and the lower surface of mask frame 416, be located on mask 412 to apply to open towards the state of the tension force in the direction of mask frame 416 side stretching.Mask 412 and mask frame 416 are in square or rectangular, and mask 412 is opened with the state that its center is consistent with the center of mask frame 416 and is located on mask frame 416.In the present embodiment, the direction parallel with the fore-and-aft direction of mask printing equipment of mask body 410 is of a size of width, the direction parallel with carrying direction or left and right directions is of a size of length.About substrate 206, mask adsorbent support parts 62,64, secure component 156,158 too.

The size of mask frame 416 is general on the circuit substrate of multiple kind.Mask 412 has substrate 206 and contacts together with a pair secure component 156,158 and guarantee the width of the supported portion supported from below by the mask support face 90 of above-mentioned a pair mask adsorbent support parts 62,64, and the width of mask retention tab 414 exists multiple kind according to the size of mask 412.In the longitudinal direction, by mask frame 416 and distance between the end of the end of mask 412 side opposite side and mask 412 side of mask retention tab 414 be set to the width of mask retention tab 414.

Mask frame bearing piece 400 bears mask frame 416 from below, as shown in Figure 7, possesses a pair receiving portion 426 and is pressed and the multiple cylinders 428 as fixture fixed to this pair receiving portion 426 by mask frame 416.Apparatus for adjusting position 402 is arranged between printing equipment main body 10 and mask frame bearing piece 400, by regulating the position of mask frame bearing piece 400, eliminate the mask 412 that is held in mask frame bearing piece 400 and the relative position deviation of substrate 206 being held in aforesaid substrate holding device 14.

Apparatus for adjusting position 402 comprises: two the fore-and-aft direction regulons 434 separated one another along left and right directions; The left and right directions regulon 436 separated from these two fore-and-aft direction regulons 434 along fore-and-aft direction; And the float support unit 438 to separate from this left and right directions regulon 436 along left and right directions.In each fore-and-aft direction position regulating unit 434, as Fig. 9 carries out expression, comprising: be fixed on the guiding piece 444 of printing equipment main body 10 abreast with fore-and-aft direction to a side typically; With parallel with this guiding piece 444 and can not the feeding screws 446 that arranges of the mode of movement vertically; Drive the electro-motor 448 that this feeding screws 446 rotates; And sliding part 450, by the rotation of electro-motor 448, sliding part 450 is moved along fore-and-aft direction.Another sliding part 452 is held in this sliding part 450 freely along left and right directions relative movement, and rotary part 454 is rotatably held in this sliding part 452 around the rotation of vertical.

As shown in Figure 7, left and right directions regulon 436 comprises guiding piece 464, feeding screws 466, electro-motor 468, sliding part 470,472 and rotary part 474.Its basic structure is identical with fore-and-aft direction regulon 434, and difference is: guiding piece 464 and feeding screws 466 configure abreast with left and right directions; And sliding part 470 has in the longitudinal direction long shape and sliding part 472 moves freely along fore-and-aft direction with larger distance.Float support unit 438 comprises: the guiding piece 480 parallel with fore-and-aft direction; Mobile sliding part 482 freely on this guiding piece 480; This sliding part 482 moves another sliding part 484 freely along left and right directions; And the rotary part 486 of this sliding part 484 is held in the mode that can rotate around the rotation of vertical; When the position adjustments of the mask frame bearing piece 400 of the work based on unit 434,436, allow moving freely and bearing load in the horizontal direction of the corresponding part of mask frame bearing piece 400.

As shown in double dot dash line in Fig. 7, be fixed with the screeding device main body 500 of above-mentioned screeding device 392 at the upper surface of aforementioned mask frame bearing piece 400.As shown in Figure 8, in screeding device main body 500, scraper plate sliding part 504 is supported for and can moves along fore-and-aft direction, by scraper plate sliding part drive unit 506, while moved by two guiding piece 502 leading edges forming guiding device.Scraper plate sliding part drive unit 506 in present embodiment comprises multiple pulley 510, hangs around the band 512 of this multiple pulley 510; And drive one in multiple pulley 510 electro-motor 514 carrying out rotating.

The scraper head lowering or hoisting gear 524,526 (with reference to Figure 10) scraper plate sliding part 504 being equipped with the scraper head 520 shown in two Figure 11 and make two scraper heads 520 be elevated respectively.Scraper head lowering or hoisting gear 524,526 comprises Lift Part 528,530 and lifting drive 532,534 respectively.Lifting drive 532,534 comprises feeding screws 536, nut 538, electro-motor 540 (with reference to Fig. 8), pulley 542 and band 544 (with reference to Figure 10).Respectively scraper plate 546 is held in its length direction attitude parallel with carrying direction by 2 scraper heads 520.

As shown in Fig. 1 and Figure 12, part between the part being provided with aforesaid substrate holding device 14 and mask support device 16 and the part being provided with mask holding device 390 and screeding device 392 of printing equipment main body 10, is provided with reference mark camera head 560, clearing apparatus 562, sweeping fluid apparatus for coating 564 (with reference to Figure 13) and mobile device 566.As shown in figure 12, mobile device 566 comprises sliding part 570 and sliding part drive unit 572.Sliding part drive unit 572 comprise can rotating around the axis parallel with fore-and-aft direction and the mode that can not move in the axial direction be installed on printing equipment main body 10 feeding screws 576, be fixed on nut 578 on sliding part 570 and electro-motor 580, feeding screws 576 is rotated by electro-motor 580, thus, sliding part 570 is guided by the guiding piece 582 forming guiding device and is moved along fore-and-aft direction.

Above-mentioned sliding part 570 installs clearing apparatus 562, clearing apparatus 562 is moved along fore-and-aft direction.And as shown in figure 12, another sliding part 584 can be located at sliding part 570 along the mode of left and right directions movement to be guided by guiding piece 586, by omitting illustrated feeding screws and electro-motor and moving.This sliding part 584 is provided with reference mark camera head 560, the reference mark being located at mask 412 and substrate 206 is made a video recording.

The details of above-mentioned clearing apparatus 562 are as shown in Figure 13, Figure 14.Clearing apparatus main body 600 is fixed on above-mentioned sliding part 570, and the part as sliding part 570 plays function.In clearing apparatus main body 600, two roller holding devices 602 (in Figure 13, a side being only shown) keep separated by a distance along fore-and-aft direction, and maintain rectangular wiper blade 604.Donor rollers 606 and take up roll 608 are held in and can rotate around the axis parallel with left and right directions by roller holding device 602 respectively, this donor rollers 606 is as extraction unit wiper blade 604 supplied with the state being rolled into web-like, and this take up roll 608 is as the retraction part wiper blade of finishing using 604 reeled.In two roller holding devices 602, extraction unit holding device is formed to the roller holding device 602 that donor rollers 606 keeps, retraction part holding device is formed to the roller holding device 602 that take up roll 608 keeps.In this clearing apparatus 562, donor rollers 606 is only supported for can be rotated by clearing apparatus main body 600, relative to this, take up roll 608 is rotated by the electro-motor 610 as roll driving apparatus, the part (hereinafter referred to as transition part 612) from from donor rollers 606 to take up roll 608 transition of conveying wiper blade 604.And donor rollers 606 is arranged on rear side, take up roll 608 is arranged on front side.Donor rollers and take up roll both sides are rotated by roll driving apparatus, conveying wiper blade 604, and can apply tension force or lax to transition part.

Sheet press device 620 is provided with between roller 606,608.Sheet press device 620 comprises the cylinder 624 of pressing component 622 and two ejector half as pressing component drive unit that this pressing component 622 is elevated.Pressing component 622 is made up of the expanded material with continuous air bubbles, has elongate in shape long on the direction of the axis being parallel with roller 606,608, and transition part 612 is pressed on the press surface 626 on the lower surface of mask 412 by its upper surface formation.The part being pressed against the lower surface of mask 412 of wiper blade 604 is called cleaning part 627.

In addition, pressing component 622 possesses and to extend over the entire length thereof and to the suction port 628 of press surface 626 opening.As shown in figure 14, pressing component 622 is kept by holding member 630, and on this holding member 630, possess opening 632, and this opening 632 has the length roughly the same with suction port 628.Opening 632 has the shape that more cross-sectional area more broadens towards bottom, is connected with negative pressure generating device 634 in its lower end.Negative pressure generating device 634 is well-known structures, therefore diagram and detailed description is omitted, but utilize the pressure drop of surrounding of the nozzle spraying forced air to produce negative pressure, thus produce negative pressure at the central portion of the length direction of opening 632 and suction port 628.Consequently, via opening 632, suction port 628 and cleaning part 627, the total length of suction port 628 attracts air roughly equably, and attract sweeping fluid described later together with this air, the solder remained in the through hole 420 of mask 412.

Above-mentioned clearing apparatus main body 600 is fixedly provided with the sheet support component 640 supported transition part 612, but pressing component 622 is moved between the down position drawn in downwards by sheet support component 640 and the lifting position of giving prominence to upward from sheet support component 640 by cylinder 624, close with mask 412, be separated, thus cleaning part 627 is pressed to mask 412 or cleaning part 627 is separated from mask 412.And, cylinder 624 is held in clearing apparatus main body 600 in the mode that can be rotated around the rotation parallel with fore-and-aft direction by back shaft 642, therefore pressing component 622 is pressed against mask 412 with uniform pressure in total length, thus ensures that cleaning part 627 is close contact in the lower surface of mask 412 well.

By the sweeping fluid apparatus for coating 564 arranged at the rear portion of printing machine 10, sweeping fluid is coated on above-mentioned cleaning part 627.As shown in figure 13, sweeping fluid apparatus for coating 564 comprises sweeping fluid dispense tip 652 and makes this sweeping fluid dispense tip 652 along the dispense tip mobile device 654 of the direction movement of the axis being parallel with roller 606,608, above-mentioned sliding part 570 draw back end position movement state under, sweeping fluid dispense tip 652 is installed on printing equipment main body 10 in the mode of the top being positioned at clearing apparatus 562 (being the cleaning part 627 of wiper blade 604 strictly speaking).The retrogressing end position of sliding part 570 is that clearing apparatus 562 becomes the position of state of rearward departing from from base plate keeping device 14, mask support device 16, mask holding device 390 and screeding device 392, keeping out of the way in the longitudinal direction, thus makes clearing apparatus 562 be positioned at retreating position as retreating end position.

Sweeping fluid dispense tip 652 is held in the moving-member 658 guided by guiding piece 656, this moving-member 658 moves by comprising the dispense tip mobile device 654 of electro-motor 660, pulley 662 and band 664, makes sweeping fluid dispense tip 652 move in arbitrary moving range thus.Therefore, sweeping fluid dispense tip 652 is defined as in fact should carrying out the part of the cleaning of mask 412 and be coated with sweeping fluid of cleaning part 627.Sweeping fluid is based on solvent, from the illustrated sweeping fluid feedway of omission, pressurized and nozzle to sweeping fluid dispense tip 652 supplies, from nozzle level the sweeping fluid that sprays born by the bearing part 670 arranged in opposite directions with this nozzle, drip to cleaning part 627.

This mask printing equipment control device 680 as shown in Figure 15 controls.Control device 680 is formed based on computer 682, electric actuator such as electro-motor 124 grade is not connected with via drive circuit 684 in its input/output section, and, the fluid actuators such as cylinder 80 etc. and negative pressure generating device 634 are connected with respectively via control valve drive circuit 686 and control valve 688 etc.Each encoder 700 of the servo motor of the drive source of the various devices forming this mask printing equipment is also directly connected with in input and output portion, be connected with reference mark camera head 560 via control and image processing apparatus 702, be connected with guidance panel 704 via control circuit 706.Guidance panel 704 possesses operating portion 708 and display frame 710 etc., and operator can observe the display of display frame 710, while carry out the input etc. of data, instruction etc. in limit.And, store in the ROM of computer 682 and control various device and for the program etc. shown in the program of printing of carrying out solder and the flow chart of Figure 21, Figure 22.

The printing of this mask printing equipment to the solder that substrate 206 carries out is described.

When moving into substrate 206 to this mask printing equipment, as shown in Figure 16 (a), mask support device 16 is positioned at decline end position and retreating position, and base plate keeping device 14, baseplate support device 150 are respectively relative to mask support device 16, side fastener 152 and be positioned at decline end position.And mask adsorbent support parts 62,64 are positioned at rear position, mask adsorbent support parts 64 are not fixed on mask support apparatus main body 60.Rear position be mask adsorbent support parts 62,64 in the horizontal direction or on the direction parallel with mask 412 with secure component 156, the 158 adjacent and positions of the state departed from from the both side ends parallel with carrying direction of the substrate 206 being held in base plate keeping device 14.And movable secure component 158 is positioned at and is separated and not fastening separation point position or off-position from substrate 206.

Stopped at the stop position preset on carrying direction to the substrate 206 that mask printing equipment is moved into by substrate transfer apparatus 208.This position be subscribe the center on the carrying direction of substrate 206 consistent with the center on the carrying direction of mask 412 time position.In the longitudinal direction, mask frame bearing piece 400 is moved by fore-and-aft direction regulon 434, thus, mask 412 subscribe to the size according to substrate 206 both center consistent time position move, print under the state that substrate 206 is consistent with the center of mask 412.

After substrate 206 stops, as shown in Figure 16 (b), mask adsorbent support parts 62,64 forwards position move.Anterior position is the position that substrate bearing plane 92 is positioned at the top of secure component 156,158 and band 200.Further, base plate keeping device 14 rises relative to mask support device 16, and as shown in Figure 16 (c), secure component 156,158 abuts with substrate bearing plane 92.

Next, baseplate support device 150 rises relative to side fastener 152.Thus as shown in Figure 16 (d), supporting pin 234 contacts with substrate 206, is lifted by substrate 206 from band 200, and its both side ends is abutted with substrate bearing plane 92 respectively.If the climb of baseplate support device 150 is excessive, then the active force that supporter 72 overcomes spring 86 carries out rotating and keeping out of the way, thus avoids the damage of substrate 206.

Next, secure component drive unit 160 is worked, make movable secure component 158 close to substrate 206, in the near future as shown in Figure 16 (e), between fixing secure component 156, clamp substrate 206 and fixed.After tightening, supply negative pressure to supporting pin 234, sorbing substrate 206, supported with the attitude of level by supporting surface 236.

After absorption, as shown in Figure 16 (f), base plate keeping device 14 is declined relative to mask support device 16, secure component 156,158 and substrate 206 are separated from substrate bearing plane 92.Further, as shown in Figure 16 (g), mask adsorbent support parts 62,64 are rearward retreated position, mask adsorbent support parts 64 are fixed on mask support apparatus main body 60.

Next, as shown in Figure 16 (h), make base plate keeping device 14 increase relative to mask support device 16, make secure component 156,158 and substrate 206 between mask adsorbent support parts 62,64, make their upper surface be positioned at the plane identical with mask support face 90.In this case, inclined side 94 and inclined side 168,194 closer to each other and in opposite directions, but as shown in Figure 4, the gap between them tilts relative to the length direction of scraper plate 546 in a top view.Therefore, when the printing of solder, scraper plate 546 can not drop in the gap between mask adsorbent support parts 62,64 and secure component 156,158.In addition, in figure 16, in order to easy understand, the gap between substrate 206 and secure component 156,158 is illustrated turgidly, although the gap therefore between inclined side 94,194 illustrates significantly, in fact little than it.

Further, reference mark camera head 560 is moved, carry out the shooting of the mark formed respectively on mask 412, substrate 206, both the obtaining of position deviation, correction etc.Above-mentioned shootings etc. are well-known, omit the description.After shooting, reference mark camera head 560, on carrying direction, departs from from the space between mask 412 and substrate 206, moves to the retreating position kept out of the way.

Further, mask support device 16 is made to increase.Base plate keeping device 14 is stopped relative to mask support device 16, to rise together with mask support device 16 and close to mask 412, as shown in Figure 16 (i), mask support face 90 is contacted with the lower surface of mask 412 with each upper surface of secure component 156,158 and substrate 206.The position of mask adsorbent support parts 62,64 is now Support Position, mask support face 90 be the ratio of the lower surface of mask 412 make secure component 156,158, substrate 206 carries out the part part in the outer part that separate, the two parts departed from the both side ends from substrate 206 contact, and attract air from suction hole 98 and adsorb mask 412, its lower surface is supported.Further, scraper plate 546 is contacted with the upper surface of mask 412, moves along this upper surface, thus solder is moved, fill to through hole 420 and substrate 206 is printed.

After printing, substrate 206 is made to be separated from mask 412.In the present embodiment, under the state keeping mask adsorbent support parts 62,64 to adsorb mask 412, mask support device 16 is declined.Base plate keeping device 14 is keeping under the state risen relative to mask support device 16, declines with mask support device 16 one.Therefore, as shown in Figure 16 (j), mask 412 is stretched by mask adsorbent support parts 62,64 and bends downwards, and substrate 206 declines to keep the state contacted with mask 412.

Mask adsorbent support parts 62,64 and substrate 206 are sharply stopped under the state that have dropped the distance of being allowed by the elastic deformation of mask retention tab 414 integratedly.Thus, the solder being attached to substrate 206 filling in through hole 420 produces towards the inertia force in the direction of substrate 206, thus adhesive force increases.After a stop, under the state keeping mask adsorbent support parts 62,64 to adsorb mask 412, mask support device 16 and base plate keeping device 14 rise integratedly on position during printing shown in Figure 16 (i).After rising, the absorption of mask adsorbent support parts 62,64 pairs of masks 412 is removed.And, base plate keeping device 14 is declined relative to mask support device 16, under the state that mask adsorbent support parts 62,64 support mask 412, substrate 206 is separated from mask 412 with low speed, and the solder added by the adhesive force to substrate 206 is extracted from through hole 420 effectively.

After isolation, mask support device 16 declines with the speed high from the separating rate of mask 412 separation than substrate 206, and base plate keeping device 14 also integratedly declines.Between this decrement phase, by the fastening releasing of side fastener 152 pairs of substrates 206, and baseplate support device 150 is declined relative to side fastener 152, substrate 206 is placed on band 200.In addition, also the operation shown in Figure 16 (j) can be omitted, after printing terminates, under the state that the absorption of mask adsorbent support parts 62,64 pairs of masks 412 is removed, base plate keeping device 14 is declined relative to mask support device 16, under the state making mask 412 be supported in mask adsorbent support parts 62,64, substrate 206 is separated from mask 412.

The cleaning of mask 412 is described.

If make because of printing the lower surface of mask 412 remain dirt or remain solder at through hole 420, then printing quality declines, and therefore will carry out the cleaning of mask 412.When cleaning, mask support device 16 is positioned at retreating position, and base plate keeping device 14 and baseplate support device 150 are all positioned at decline end position, are separated from mask 412.Clearing apparatus 562 is kept out of the way to retreating position when not cleaning, and allows that substrate 206 grade contacts to mask 412, forwards moving, entering in base plate keeping device 14 and the space between mask support device 16 and mask 412 when cleaning from retreating position.

Further, by cylinder 624 make pressing component 622 upwards raise-position be set up liter, the lower surface of the cleaning part 627 of wiper blade 604 to mask 412 presses by press surface 626.In this case, forwards linearity ground is mobile by mobile device 566 for clearing apparatus 562, and pressing component 622 moves along the lower surface of mask 412, and the dirt of lower surface by cleaning part 627 wiping mask 412.The retreating position of clearing apparatus 562 is set in the rear portion of mask printing equipment, and, driven by electro-motor 610 and the take up roll 608 that rotates is arranged on front side relative to donor rollers 606, therefore only forwards move from retreating position under the state that clearing apparatus 562 is pressed against mask 412 in wiper blade 604, wiper blade 604 can not carry out wiping with being drawn out from roller 606,608 due to the friction between mask 412.Therefore, mask adsorbent support parts 62 side of being located at front side of wiping in a pair mask adsorbent support parts 62,64 is terminated, and in wiper blade 604 from the state that mask 412 is separated, clearing apparatus 562 returns to retreating position.In this mask printing equipment, by comprising cleaning along the movement on the fore-and-aft direction of mask 412 and moving of lifting of pressing component 622.

The motion that pressing component 622 should be made to produce when cleaning based on the width of substrate 206 and the mask retention tab 414 of mask body 410 width etc. and determine.As shown in Figure 17 (a), the end of close substrate 206 side of the supported portion supported by the mask adsorbent support parts 62 being positioned at cleaning end side of mask 412, and the distance L between the border of mask 412 and mask retention tab 414 is more than the width F in mask support face 90 and the width W sum of cleaning part 627, under cleaning part 627 is pressed on the pressed state of the lower surface of mask 412 by maintenance, exist making this cleaning part 627 move to the enough distances needed for position from the opposition side to substrate 206 that leave from the supported portion of mask 412, the motion that pressing component 622 should be made to produce is decided to be following motion: as shown in Figure 17 (b), make clearing apparatus 562 stopping under making cleaning part 627 move to the above-mentioned state leaving position after, as shown in Figure 17 (c), pressing component 622 is declined, make cleaning part 627 and mask 412 vertically and be separated downwards as the crow flies.This motion is called and leaves position moving movement.At this, the border of mask 412 and mask retention tab 414 delimited by the end of mask 412 side of mask retention tab 414.In addition, in Figure 17 and Figure 18, in order to avoid diagram becomes miscellaneous, even if be in fact pressed against on the position of the state of mask 412 in wiper blade 604, also with the state be separated diagram clearing apparatus 562.And, close with mask 412 by lifting, what be separated is pressing component 622, donor rollers 606 and take up roll 608 do not carry out close, be separated, but in order to the lifting of easy understand pressing component 622, illustrate the state of a donor rollers 606 and take up roll 608 also lifting.To Figure 19 and Figure 20 illustrated later too.

As shown in Figure 17 (a), above-mentioned distance L is obtained by the width C of the part contacted with mask 412 of the width M of mask frame, the width S of mask retention tab 414, the width B of substrate 206 and secure component 156.Width M and width C and above-mentioned width F and width W are fixing set value in the structure of mask printing equipment.Width M is also the width of mask body 410.Width S and width B are the values that can change according to the kind of the kind of mask body 410, substrate 206, as described later, inputted by operator, but obtained the width of mask 412 by computing according to width S and width M, obtain distance L, therefore the input of width S is the input of the information relevant to the size of mask 412.When making pressing component 622 generation leave position moving movement, the part contacted with substrate 206 that the end that cleaning starting position is set to the downstream of cleaning part 627 is positioned at mask 412, on moving direction (rear side is to front side) when cleaning, upstream side has separated such position, the position of ship clearance A compared with the end of upstream side, above-mentioned position of leaving is set to cleaning end position.Ship clearance A is set value, but also can change.Above-mentioned position can be considered to determine for benchmark with the width B of substrate 206.So when the motion that pressing component 622 should be made to produce be decided to be leave position moving movement, as shown in Figure 17 (c), be carried to the position of departing from from the supported portion of mask 412 by the solder after cleaning part 627 wiping, can not adhere to when mask adsorbent support parts 62 pairs of masks 412 support.

Relative to this, as shown in figure 18, large at the width of substrate 206, mask adsorbent support parts 62, a part of 64 becomes with such when mask retention tab 414 state in opposite directions, above-mentioned distance L than the width F in mask support face 90 and the width W sum of cleaning part 627 little when, the motion that pressing component 622 should be made to produce is decided to be following motion: as shown in Figure 18 (a), after the end of the part contacted with substrate 206 of mask 412 has exceeded supported portion side, as shown in Figure 18 (b), before arriving the border of mask 412 and mask retention tab 414, while making cleaning part 627 continue to carry out movement on the direction parallel with the lower surface of mask 412, be separated with the lower surface of mask 412, carry out wiping action.This motion is called and wipes motion.By wiping action, cleaning part 627 is separated obliquely relative to mask 412, at this, as shown in Figure 18 (a), cleaning part 627 by the part contacted with substrate 206 of mask 412 to supported portion side by after position be set to and wipe action starting position, be i.e. the separation starting position that is separated from mask 412 of cleaning part 627.And cleaning starting position determines with leaving in the same manner as the moving movement of position, the end that cleaning end position is set to the downstream when cleaning on moving direction of cleaning part 627 is positioned at the position on the border of mask 412 and mask retention tab 414.

According to this mask printing equipment, dry wipes and wet wipe can be carried out, this dry wipes refers to: under the state of lower surface wiper blade 604 being pressed on mask 412, pressing component 622 is moved along mask 412, makes wiper blade 604 wiping be attached to the solder of the lower surface of mask 412; This wet wipe refers to: make sweeping fluid infiltrate wiper blade 604, this wiper blade 604 is pressed on the lower surface of mask 412, to move and wiping is attached to the solder of the lower surface of mask 412, is attached to the solder of the inner peripheral surface of through hole 420 along mask 412.At this, the suction port 628 to pressing component 622 supplies negative pressure, carries out wet wipe, and make pressing component 622 carry out wet wipe to move than speed slow during dry wipes with the attraction of dirt.And, at this, when carrying out wet wipe, and then carry out dry wipes.So, wet wipe is the cleaning more careful than dry wipes, at this, using only having the cleaning of dry wipes as usual cleaning, using wet wipe as special cleaning.Cleaning is carried out when set point number is carried out in printing, but special cleaning is carried out once after set point number has been carried out in usual cleaning.In addition, the translational speed of the pressing component 622 during wet wipe can be set as arbitrary size.

When carrying out dry wipes, clearing apparatus 562 is after from cleaning starting position to cleaning, end position moves, and cleaning part 627 returns to retreating position with the state be separated from mask 412.During this period or next cleaning start time, conveying wiper blade 604, cleaning part 627 is made up of new and clean wiper blade 604.When carrying out wet wipe, before move by starting position from retreating position to cleaning for clearing apparatus 562, be coated with sweeping fluid by sweeping fluid dispense tip 652 to cleaning part 627.Further, make moistening cleaning part 627 contact with mask 412 and carry out wiping, after moving to cleaning end position, cleaning part 627 is under the state be separated from mask 412, and move to cleaning starting position and carry wiper blade 604, cleaning part 627 is clean face.Further, cleaning part 627 moves with the state contacted with mask 412 and carries out wiping, and after moving to cleaning end position, at cleaning part 627 from the state that mask 412 is separated, clearing apparatus 562 returns to retreating position.

At this, carry out amount of residual solder removing when special cleaning.Amount of residual solder removing is following operation: under the state that clearing apparatus 562 moves to cleaning end position, collected by the wiping based on cleaning part 627, thus by remain in mask 412 with the soil release of the separate section of part corresponding to cleaning end position and cleaning part 627.Therefore, clearing apparatus 562 works in the mode of the separate section be separated with cleaning part 627 by wiper blade 604 wiping mask 412.

When leaving position moving movement in the motion that pressing component 622 should be made to produce, as shown in Figure 17 (c), cleaning part 627 is made to stop at the position of the supported portion that have passed through mask 412, and be vertically separated from mask 412, therefore, solder remains in the part that cleaning part 627 contacts at the end of the cleaning of mask 412.This part is separate section wiper blade 604 being separated in the latter stage of cleaning operation.Therefore, as shown in Figure 19 (a), if make cleaning part 627 relative to the position at the end of cleaning from the position adjacent with the upstream side of moving direction during cleaning move to as shown in Figure 19 (b) with clean at the end of the position adjacent in downstream, position, then wiping can residue in the solder of mask 412.Therefore, as shown in Figure 19 (a), by the downstream side of cleaning part 627 and the supported portion of mask 412, position that the end of the opposition side of substrate 206 is consistent is set to amount of residual solder and removes starting position, as shown in Figure 19 (b), the position of having moved the distance of the twice of the width W of cleaning part 627 from amount of residual solder removing starting position to side, downstream is set to amount of residual solder removing end position.As shown in Figure 19 (a), above-mentioned position is based on the width C of the width B of the position of substrate 206, substrate 206, secure component 156, the width F in mask support face, the width W of cleaning part 627 and computing.The position of substrate 206 is obtained by the stop position of substrate 206 and the size of substrate 206.

When the motion that pressing component 622 should be made to produce is for wiping motion, as shown in Figure 20 (a), the above-mentioned action starting position that wipes is set to amount of residual solder removing starting position, as shown in Figure 20 (b), the cleaning end position wiped in motion is set to amount of residual solder removing end position.Solder is on the fore-and-aft direction of mask 412, remain in and cleaning part 627 moved and the part declined along mask 412, mask 412 be separate section wiper blade 604 being separated in the latter stage of cleaning operation from wiping action starting position to cleaning part corresponding to end position.

In addition, when leaving position moving movement in the motion that pressing component 622 should be made to produce, above-mentioned distance L is less with distance 2W sum than width F, the end of the opposition side of substrate 206 side of the supported portion of mask 412, and the border of mask 412 and mask retention tab 414 between distance less than distance 2W when, the position downstream side of cleaning part 627 being positioned at the border of mask 412 and retention tab 414 is set to amount of residual solder removing end position.When amount of residual solder removing starting position and amount of residual solder remove the computing of end position, distance between the end of the opposition side of substrate 206 side of the supported portion of mask 412 and the border of mask 412 and mask retention tab 414 is obtained by deducting width F from distance L, and compares with distance 2W.Even if this distance is larger than width W, but when less than distance 2W, the motion that pressing component 622 should be made to produce also can for wiping motion.

Amount of residual solder removing is undertaken by dry wipes or wet wipe.When being undertaken by dry wipes, cleaning part 627 moves to amount of residual solder removing starting position from cleaning end position with the state be separated from mask 412.Now, conveying the wiper blade 604 and stained face that reels, cleaning part 627 is new and clean face.Pressing component 622 keeps pressed state and moves to amount of residual solder removing end position, cleaning part 627 wiping amount of residual solder after rising on amount of residual solder removing starting position and cleaning part 627 being pressed on the lower surface of mask 412.Pressing component 622 declines after amount of residual solder removing end position stops, and cleaning part 627 is separated downwards as the crow flies relative to mask 412.

When being carried out amount of residual solder removing by wet wipe, clearing apparatus 562 moves to cleaning end position, and cleaning part 627 returns to retreating position with the state be separated from mask 412.Further, wiper blade 604 is carried and cleaning part 627 to clean face is coated with sweeping fluid.In this case, clearing apparatus 562 moves to amount of residual solder removing starting position, and cleaning part 627 is contacted with mask 412, and the amount of residual solder of carrying out based on wet wipe removes.Pressing component 622, after moving to amount of residual solder removing end position, is separated downwards as the crow flies relative to mask 412, moves to amount of residual solder removing starting position.And conveying wiper blade 604 also makes cleaning part 627 for clean state and contacting with mask 412, carries out dry wipes.After wiping terminates, clearing apparatus 562 is kept out of the way to retreating position.

Based on the flow chart shown in Figure 21, the setting of the decision of the motion that pressing component 622 should be made to produce, cleaning content is described.This setting carries out before the beginning of the solder printing to a series of substrate 206, step 1 (after, referred to as S1.Also identical in other step) in, the message that the input that display frame 710 shows the urgency width B of substrate 206 and the width S of mask retention tab 414 performs and cuit etc.Whether complete following execution S2, carry out inputting judgement.Each width B, the width S of operator's input substrate 206 and mask retention tab, before inputting complete indicative input, carry out S1, S2 repeatedly.

If input complete, being then determined to be "Yes" of S2 and perform S3, width B and width S are stored in width data memory.Width data memory is located at the RAM of computer 682 and forms memory cell.Following execution S4, the motion determining based on the width B of inputted substrate 206 and the width S of mask retention tab 414 and set value to make pressing component 622 produce, cleaning starting position and cleaning end position.Set value is width F, the ship clearance A in the width M of mask frame 416, the width W of cleaning part 627, the width C of the part contacted with mask 412 of secure component 156,158, the mask support face 90 of mask adsorbent support parts 62,64 at this, first, as illustrated based on Figure 17 and Figure 18, calculate distance L, motion is determined for leaving position moving movement and wiping any one in motion.

Following execution S5, is presented at urging the message of the input of cleaning content and cuit etc. in display frame 710.At this, as cleaning content, input is the execution interval of cleaning, execution interval, the content of cleaning usually, the special content of cleaning of cleaning especially usually.The execution interval of usual cleaning and special cleaning sets respectively by the input of print pass N1, N2.This execution interval such as based on the print inspection machine that solder is checked to the printing state of substrate 206 check result and set, such as, be judged to be that by checking the ratio printing bad substrate 206 is higher, print pass sets fewer, cleans continually.The content of usual cleaning is by being that arbitrary selection of the dry wipes carried out once or twice sets, and the content of special cleaning only determines at this and shows, the dry wipes being once wet wipe once and and then carrying out.The enforcement of usual cleaning is necessary, but the enforcement of special cleaning is arbitrary, by print pass N2 input 0, input is not cleaned especially.And, when carrying out special cleaning, as print pass N2, inputting larger than print pass N1 and be the value of integral multiple, having carried out { after the usual cleaning of (N2/N1)-1} time, carrying out special cleaning once.

Whether complete following execution S6, carry out inputting judgement.Before input is complete, repeatedly perform S5, S6, if input complete, then the judgement of S6 is "Yes" and perform S7, by the motion that pressing component 622 should be made to produce determined in S4 etc. and usually cleaning content be stored in usually in cleaning memory.

Following execution S8, determines whether to set special cleaning in S8.This judges whether do not carried out as 0 by print pass N2, if 0 is not cleaned especially, S8 be determined to be "No" and the execution of routine terminates.If print pass N2 is not 0, then the judgement of S8 is "Yes" and perform S9, display frame 710 shows mode (i) ~ (iii) of amount of residual solder removing, operator is selected.Amount of residual solder removing, in the same manner as cleaning especially, { after the usual cleaning that (N2/N1)-1} is secondary, to be carried out once, whenever carrying out (N2/N1) secondary cleaning, is carried out once carrying out.In S9, also implementing to indicate that F is set to 1 by cleaning especially, storing the situation performing special cleaning.Further, in S10, carry out inputting whether complete judgement, before input is complete, repeatedly perform S9 and S10.

If input complete, being then determined to be "Yes" of S10 and perform S11, determines whether to carry out amount of residual solder removing.In S9, selection mode (ii) or mode (iii), if select amount of residual solder removing to implement, being then determined to be "Yes" of S11 and perform S12, as illustrated based on Figure 19 and Figure 20, the starting position of setting amount of residual solder removing and end position.After setting, perform S13, by the starting position of the motion that pressing component 622 should be made to produce determined in S4 etc. and amount of residual solder removing content, amount of residual solder removing, end position and to clean especially to be stored in together with content and clean in memory especially.If do not carry out amount of residual solder removing, being then determined to be "No" of S11 and perform S14, the motion that pressing component 622 should be made to produce etc. and special cleaning content are stored in special cleaning memory.

After solder starts to the printing of substrate 206, perform the mask cleaning routine shown in Figure 22.In the S21 of this routine, for a substrate 206, the judgement whether printing carrying out solder terminates.Before printing terminates, repeatedly perform S21, if printing terminates, being then determined to be "Yes" of S21 and perform S22, each count value C1, the C2 of first, second counter increase by 1, count respectively to the print pass for carrying out cleaning usually and the print pass for carrying out special cleaning.Next, in S23, for whole substrates 206, judge whether the printing of solder terminates.Whether if not last substrate 206, then S23 becomes "No" and performs S24, judge the count value C1 of the print pass counting for carrying out usually cleaning as more than the print pass N1 first inputted.Determine whether the period of carrying out cleaning usually, if printing is not yet carried out N1 time, then S24 becomes "No" and performs S21.

Carry out, before N1 time, repeatedly performing S21 ~ S24 in printing.If printing is carried out N1 time, being then determined to be "Yes" of S24 and perform S25, implements mark according to whether being provided with special cleaning and whether carrying out the judgement of cleaning especially.If clean especially, being then determined to be "Yes" of S25 and perform S26, judges that the count value C2 of the second counter is whether as more than the print pass N2 first inputted.Judge whether print pass reaches the number of times carrying out special cleaning, if not yet reach print pass N2, then S26 becomes "No" and performs S27, and count value C1 is reset to 0.Further, perform S28, from usually cleaning the motion that memory reads cleaning content and pressing component 622 usually, performing S29 according to them, carrying out mask cleaning.

Next because count value C2 does not reset, therefore when performing S22, count value C1 count from 0, but count value C2 continues increase from the value during execution of previous S22.Before count value C2 becomes more than N2, repeatedly perform S21 ~ S29, if become more than N2, being then determined to be "Yes" and performing S30 of S26.Further, after count value C1, C2 are reset, perform S31, read the motion of special cleaning content and pressing component 622 from special cleaning memory, perform S32 according to its content, clean.If the enforcement of amount of residual solder removing is set, then carry out amount of residual solder removing according to setting.

In S30, count value C1, C2 are reset, and thus, when next performing S22, all counting from 0, when printing carries out N1 time, usually cleaning, when printing carries out N2 time, cleaning especially.For predetermined whole substrate 206, if print, being then determined to be "Yes" of S23 and perform S33, carries out count value C1, C2 and special cleaning and implements the replacement of mark and terminate the execution of routine.When not carrying out special cleaning, being determined to be "No" of S25 and perform S27 ~ S29, cleans usually.Further, S23 be determined to be "Yes" before, repeatedly perform S21 ~ S25, S27 ~ S29, whenever carrying out the printing of N1 time, usually clean.

From the above description, in the present embodiment, mobile device 566 and cylinder 624 form pressing component mobile device, mask supporting member lowering or hoisting gear 110 and base plate keeping device lowering or hoisting gear 250 form close/separator, and mask supporting member lowering or hoisting gear 110 forms mask supporting member mobile device.And guidance panel 704 forms input unit, the part of the execution S4 of control device 680 forms motion determination section, and the part performing S29 and S32 forms cleaning enforcement division, and they form cleaning control device.

In addition, once can clean whenever carrying out one-step print, this cleaning also can be undertaken by special cleaning.And, when usually cleaning, also can amount of residual solder removing be carried out.And, when cleaning especially, also amount of residual solder removing can be carried out all the time.

The removing of residual print paste such as can supply negative pressure to the suction port 628 of pressing component 622, attracts solder, and makes pressing component 622 repeatedly be elevated gradually and make cleaning part 627 beat mask 412, carry out dry wipes or wet wipe thus.Such as, can by the control of control valve 688, cut the compressed-air actuated supply of two air chambers of reversing cylinder 624 at short notice, carry out the past Complex motion gradually of pressing component 622 thus, the vibration bringing device of electromagnetic type also can be set and make pressing component up-down vibration, carrying out the past Complex motion gradually of pressing component 622 thus.Vibration bringing device can be formed by ultrasonic wave vibration device.

Or can pressing component 622 be passed through, by the part pressing that remain solder of cleaning part 627 to mask 412, keeping under the state that pressing component 622 is stopped, to be reeled wiper blade 604 and carrying by take up roll 608, the face of the wiping mask 412 of wiper blade 604 is changed into the new clean face not having dirt, and the solder that wiping is residual.When wiper blade is circulating sheet, wiper blade is pressed to mask, keeping under the state that pressing component is stopped, making wiper blade circulate and carry, the part of the formation cleaning part of wiper blade is changed into clean face, and wiping amount of residual solder.So wiper blade is pressed on mask, keep carrying under the state that pressing component is stopped wiper blade and wiping amount of residual solder when, preferred pressing component produce by cleaning part to the pressing force of mask than reduction during cleaning.

In addition, no matter be for usual cleaning, or for special cleaning, its cleaning content suitably can be set by user, such as, to can carry out the dry wipes of twice continuously as special cleaning, also can using the wet wipe of continuous print twice and dry wipes once afterwards as special cleaning.

And, when dry wipes, can negative pressure be supplied to pressing component and carry out the attraction of print paste.

In addition, be no matter clearing apparatus remove Cheng Yidong time or backhaul when moving, the wiping of mask can be carried out by wiper blade.In this case, the structure that all rotates preferably by motor of extraction unit and retraction part.In cleaning when cleaning when removing Cheng Yidong and backhaul are moved, clearing apparatus carries out leaving position moving movement respectively and wipes any one of motion.Can be identical when motion is moved with backhaul when removing Cheng Yidong, also can be different.

In addition, clearing apparatus entirety also can be elevated by lowering or hoisting gear, make pressing component be elevated thus and close with mask, be separated, thus wiper blade contacted with mask, be separated.In this case, pressing component mobile device is clearing apparatus mobile device.

In addition, when make pressing component produce wipe motion, can be wiper blade the part pressing on mask exceeded mask the part contacted with mask supporting member close circuit substrate side end after, start to wipe action.

Description of reference numerals

10: printing equipment main body 14: base plate keeping device 16: mask support device 18: mask holding device 62,64: mask adsorbent support parts 392: screeding device 412: mask 562: clearing apparatus 604: wiper blade 680: control device.

Claims

1. a mask printing process is the method for being printed to circuit substrate by print paste by mask printing equipment, and described mask printing equipment comprises:

Mask holding device, keeps the mask being formed with multiple through hole;

Base plate keeping device, is held in parallel with this mask by circuit substrate in the below of the mask kept by described mask holding device;

Screeding device, moves along the mask kept by described mask holding device, makes the print paste of the upper surface being placed in this mask by described multiple through hole, print the circuit substrate kept by described base plate keeping device;

Close/separator, by making described mask holding device and described base plate keeping device relatively be elevated, and make the mask that kept by mask holding device closer to each other with the circuit substrate kept by base plate keeping device/be separated;

A pair mask supporting member, be positioned at the mask kept by described mask holding device, two parts of departing from from the both side ends of the circuit substrate being held in described base plate keeping device carry out contacting or close Support Position, when utilizing described screeding device to print with utilize described close/separator mask is separated with circuit substrate time at least one party, the lower surface of mask is supported;

Clearing apparatus, comprise the extraction unit that rectangular wiper blade is extracted out by (a), b retraction part that this wiper blade is regained by () and (c) have the pressing component described wiper blade extended between described extraction unit and retraction part being pressed on the press surface on the lower surface of described mask, this clearing apparatus enter into by described close/separator and separated from one another after mask and circuit substrate between, while move along the lower surface of mask, while carried out the lower surface of wiping mask by the described wiper blade pressed on by described pressing component on the lower surface of described mask, and

Mask supporting member mobile device, when utilizing described screeding device to print with utilize described close/separator mask is separated with circuit substrate time described at least one party, described a pair mask supporting member is made to be positioned at described Support Position, when utilizing described clearing apparatus to clean, above-mentioned a pair mask supporting member is kept out of the way from described Support Position

The feature of described mask printing process is,

After utilizing described screeding device to print print paste, by described close/separator make mask and circuit substrate separated from one another, and by described mask supporting member mobile device, described a pair mask supporting member is kept out of the way from described Support Position, in this case, described clearing apparatus is cleaned, when this cleaning, pressed on after the part on the lower surface of described mask to move to the position left the opposition side to described circuit substrate from the part contacted with the mask supporting member being positioned at described Support Position of this mask by described pressing component what make described wiper blade, be separated from the lower surface of described mask.

2. a mask printing process is the method for being printed to circuit substrate by print paste by mask printing equipment, and described mask printing equipment comprises:

Mask holding device, opens via the low elastic coefficient sheet that coefficient of elasticity is less than the coefficient of elasticity of described metal film-making the mask body be located on mask frame to the mask being formed with multiple through hole in metal film-making and keeps;

The feature of described mask printing process is,

After utilizing described screeding device to print print paste, by described close/separator make mask and circuit substrate separated from one another, and by described mask supporting member mobile device, described a pair mask supporting member is kept out of the way from described Support Position, in this case, described clearing apparatus is cleaned, when this cleaning, after the end of the part at least contacted with circuit substrate of this mask has exceeded the part side contacted with described mask supporting member, before the border arriving this mask and described low elastic coefficient sheet, make the part pressed on by described pressing component on the lower surface of described mask of described wiper blade, while proceed mobile on the direction parallel with the lower surface of described mask, while carry out being separated from the lower surface of this mask wipe action.

3. mask printing process according to claim 2, wherein,

When utilizing described clearing apparatus to clean mask, in the end of the side of the close described circuit substrate of the part contacted with described mask supporting member of mask, and between the border of described mask and described low elastic coefficient sheet, by under the state remaining pressed state by the described pressing component part pressed on the lower surface of described mask of described wiper blade, when exist move to the enough distances needed for position from the opposition side to described circuit substrate that leave from the part contacted with described mask supporting member of described mask time, be separated from mask after moving to this position, action is wiped described in carrying out when there is not this distance.

4. the mask printing process according to any one of claims 1 to 3, wherein,

Use mask adsorbent support parts as described mask supporting member, described mask adsorbent support parts have the suction hole in upper surface open, by the mask described in adsorbent support from this suction hole attraction air.

5. the mask printing process according to any one of claims 1 to 3, wherein,

Comprise residual print paste removal step: make the described wiper blade part be separated with described wiper blade in the latter stage of described cleaning operation of mask described in wiping and separate section again, the print paste removing of this separate section will be residued in thus.

6. a mask printing equipment, is characterized in that, comprising:

Mask holding device, keeps the mask being formed with multiple through hole;

Clearing apparatus, comprise the extraction unit that rectangular wiper blade is extracted out by (a), b retraction part that this wiper blade is regained by () and (c) have the pressing component described wiper blade extended between described extraction unit and retraction part being pressed on the press surface on the lower surface of described mask, this clearing apparatus enter into by described close/separator and separated from one another after mask and circuit substrate between, while move along the lower surface of mask, while carried out the lower surface of wiping mask by the described wiper blade pressed on by described pressing component on the lower surface of described mask,

Pressing component mobile device, makes the described pressing component of this clearing apparatus produce to make described wiper blade carry out the motion needed for wiping to the lower surface of mask;

Cleaning control device, controls the movement of described pressing component by controlling this pressing component mobile device; And

Mask supporting member mobile device, when utilizing described screeding device to print with utilize described close/separator mask is separated with circuit substrate time described at least one party, described a pair mask supporting member is made to be positioned at described Support Position, when utilizing described clearing apparatus to clean, described a pair mask supporting member is kept out of the way from described Support Position

Further, described cleaning control device comprises:

Input unit, can input the information relevant to the size of the mask kept by described mask holding device and the circuit substrate kept by described base plate keeping device; And

Motion determination section, based on the described information inputted by this input unit, described pressing component should be made to produce in order to make described wiper blade carry out wiping to the lower surface of described mask, comprise this pressing component to mask close/be separated and along mask movement move determine for move as follows: the part pressed on by described pressing component on the lower surface of described mask making described wiper blade, from the part contacted with the mask supporting member being positioned at described Support Position of this mask, after moving to along mask the position left the opposition side to described circuit substrate, be separated from the lower surface of described mask.

7. a mask printing equipment, is characterized in that, comprising:

Further, described cleaning control device comprises:

Input unit, can input the information relevant to the mask kept by described mask holding device and low elastic coefficient sheet and the size of circuit substrate that kept by described base plate keeping device; And

Motion determination section, based on the described information inputted by this input unit, described pressing component should be made to produce in order to make described wiper blade carry out wiping to the lower surface of mask, comprise this pressing component to mask close/be separated with the movement along mask move determine for move as follows: after the end of the part at least contacted with circuit substrate of this mask has exceeded the part side contacted with described mask supporting member, before the border arriving this mask and described low elastic coefficient sheet, make the part pressed on by described pressing component on the lower surface of described mask of described wiper blade, while proceed mobile on the direction parallel with the lower surface of described mask, while carry out being separated from the lower surface of this mask wipe action.

8. mask printing equipment according to claim 7, wherein,

When utilizing described clearing apparatus to clean mask, in the end of the side of the close described circuit substrate of the part contacted with described mask supporting member of mask, and between the border of mask and low elastic coefficient sheet, by under the state remaining pressed state by the described pressing component part pressed on the lower surface of described mask of described wiper blade, when exist move to the enough distances needed for position from the opposition side to described circuit substrate that leave from the part contacted with described mask supporting member of described mask time, the motion that described motion determination section should make described pressing component produce determines to be from the motion that mask is separated after moving to this position, when there is not this distance, motion that described motion determination section should make described pressing component produce determines the motion for wiping action described in carrying out.

9. the mask printing equipment according to any one of claim 6 ~ 8, wherein,

Described a pair mask supporting member is mask adsorbent support parts respectively, and described mask adsorbent support parts have the suction hole in upper surface open, by the adsorbent support mask from this suction hole attraction air.