CN103930279A

CN103930279A - Mask printing method and device

Info

Publication number: CN103930279A
Application number: CN201280055683.XA
Authority: CN
Inventors: 加藤光昭; 松崎直树
Original assignee: Fuji Machine Manufacturing Co Ltd
Current assignee: Fuji Corp
Priority date: 2011-11-14
Filing date: 2012-11-07
Publication date: 2014-07-16
Anticipated expiration: 2032-11-07
Also published as: CN103930279B; WO2013073426A1; JP2013103417A; JP5829494B2

Abstract

This method and device improve mask cleaning, and involve printing a printing agent in a state in which a mask is supported from below by a pair of mask support members, or, after printing, separating the mask and the circuit substrate in a state in which the mask is supported from below by the pair of mask support members. If the distance L between the substrate (206)-side end of the portion of a mask (412) that is supported by a mask suction support member (62) and the boundary between the mask (412) and a mask holding sheet (414) is greater than or equal to the sum of width F of the mask suction support member (62) and width W of a wiping unit (627), then the wiping unit (627) is moved from the supported portion of the mask (412) up to the end position on the side opposite of the substrate (206) to wipe away solder. If said distance L is smaller than the sum of width F and width W, then, after passing the portion of the mask (412) in contact with the substrate (206), the wiping unit (627) is separated from the mask (412) and the mask (412) is wiped up while the mask (412) is moved in a direction parallel with the mask (412) up to the aforementioned boundary.

Description

Mask printing process and device

Technical field

The present invention relates in the printing of being carried out print paste by a pair of mask support component from the state of supported underneath mask, or the method separating and the device that after printing, are carried out from the state of supported underneath mask mask and circuit substrate by a pair of mask support component, particularly relate to the cleaning of mask.

Background technology

In following patent documentation 1 to 3, record respectively the mask printing equipment cleaning by the lower surface of wiper blade wiping mask.The clearing apparatus that mask printing equipment that patent documentation 1 is recorded is recorded possesses the main cleaning part that is arranged on the upstream side of suction unit on the moving direction of suction unit, clearing apparatus in the time of cleaning, the secondary cleaning part that is arranged on downstream, and above-mentioned suction unit, main cleaning part and secondary cleaning part contact with mask via wiper blade.Clearing apparatus is from moving to clean end position along the predefined clean starting position of mask, be attached to the wiping based on secondary cleaning part of the paste scolder on the lower surface of mask, the attraction based on suction unit that is attached near paste scolder inner peripheral surface or the opening of through hole of mask and wiping, the wiping based on main cleaning part at the residual paste scolder of suction unit wiping, thereby carry out wiping in the residual mode of dirt of avoiding as far as possible mask.

In addition, in the mask printing equipment of recording at patent documentation 2, known size based on circuit substrate and clearing apparatus along the known size more than needed that is set in upstream side and the downstream side of circuit substrate on the moving direction of mask, the automatically clean starting position of computing clearing apparatus and clean end position, thus the part that the circuit substrate of mask is contacted is cleaned.

In addition, the mask printing equipment that patent documentation 3 is recorded possesses a pair of mask support component, in the time of the printing of the paste scolder to circuit substrate and when the separation from mask of circuit substrate, the two parts that the both side ends from circuit substrate of mask departed from from below support.In the time that mask cleans, a pair of mask support component drop to and mask between allow the position entering of clearing apparatus, and mask is cleaned from below by clearing apparatus.

Patent documentation 1: Japanese kokai publication hei 10-100388 communique

Patent documentation 2: Japanese kokai publication hei 11-165402 communique

Patent documentation 3: TOHKEMY 2006-281712 communique

Summary of the invention

But, the mask printing equipment of recording as patent documentation 3, supported in the mask printing equipment of mask by a pair of mask support component, also have room for improvement.The part for example contacting for the circuit substrate of mask is carried out wiping, clearing apparatus stops at the position of departing from from this part of mask, but sometimes remain the paste scolder after wiper blade wiping in this part, be attached to mask support component and cause stainedly, so practicality can't be referred to as fully.Particularly the application's applicant has developed a kind of mask printing equipment, mask support component is made as to the attraction hole having to upper surface open, support the mask absorption support component of mask by attracting air to adsorb from this attraction hole, but in the time that mask support component adsorbs and supports mask, the paste scolder that is attached to the lower surface of mask is inhaled into and attracts in hole and stop up, and bring obstacle may to the absorption support of mask.

The present invention makes taking above-mentioned situation as background, problem is in the printing of being carried out print paste by a pair of mask support component from the state of supported underneath mask, or after printing, carried out from the state of supported underneath mask the improvement of the mask cleaning in the method separating and the device of mask and circuit substrate by a pair of mask support component.

Above-mentioned problem solves by following scheme, a kind of method of print paste being printed to circuit substrate by mask printing equipment, and aforementioned mask printing equipment comprises: (A) mask holding device, keeps the mask that is formed with multiple through holes, (B) base plate keeping device is held in circuit substrate parallel with this mask below the mask being kept by aforementioned mask holding device, (C) screeding device, moves along the mask being kept by aforementioned mask holding device, makes to load print paste in the upper surface of this mask by above-mentioned multiple through holes, and the circuit substrate being kept by aforesaid substrate holding device is printed, (D) approach/separator, by making aforementioned mask holding device and the relatively lifting of aforesaid substrate holding device, and make the mask that kept by mask holding device closer to each other with the circuit substrate being kept by base plate keeping device/separate, (E) a pair of mask support component, be positioned at the mask being kept by aforementioned mask holding device, from being held in that two parts that the both side ends of circuit substrate of aforesaid substrate holding device departs from contact or approaching Support Position, in the time utilizing above-mentioned screeding device to print with utilize at least one party of above-mentioned approach/separator when mask is separated with circuit substrate, the lower surface of mask is supported, and (F) clearing apparatus, comprise the extraction unit that (a) extracts rectangular wiper blade out, (b) the withdrawal portion this wiper blade being regained and (c) have and will press on the pressing component of the press surface on the lower surface of aforementioned mask in the above-mentioned wiper blade of extending between above-mentioned extraction unit and withdrawal portion, this clearing apparatus enters into by above-mentioned approach/separator between the mask and circuit substrate after separated from one another, the lower surface that edge mask moves, the lower surface of wiping mask is carried out on limit by pressed on the above-mentioned wiper blade of lower surface of aforementioned mask by above-mentioned pressing component, (G) mask support component mobile device, in the time utilizing above-mentioned screeding device to print with utilize the above-mentioned at least one party of above-mentioned approach/separator when mask is separated with circuit substrate, make above-mentioned a pair of mask support component be positioned at above-mentioned Support Position, in the time utilizing above-mentioned clearing apparatus to clean, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, in aforementioned mask printing process, utilizing above-mentioned screeding device to print after print paste, by above-mentioned approach/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, under this state, above-mentioned clearing apparatus is cleaned, in the time of this cleaning, after the part that the part of the lower surface that is pressed on aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade is contacted from the mask support component with being positioned at above-mentioned Support Position of this mask moves to the position of leaving to the opposition side of above-mentioned circuit substrate, separate from the lower surface of aforementioned mask.

Above-mentioned problem also solves by following scheme, a kind of method of print paste being printed to circuit substrate by mask printing equipment, aforementioned mask printing equipment comprises: (i) mask holding device, and the mask that is formed with multiple through holes in metal film-making is opened and is located at the mask body forming on mask frame and keeps via the low elasticity coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making, (ii) base plate keeping device is held in circuit substrate parallel with this mask below the mask being kept by aforementioned mask holding device, (iii) screeding device, moves along the mask being kept by aforementioned mask holding device, makes to load print paste in the upper surface of this mask by above-mentioned multiple through holes, and the circuit substrate being kept by aforesaid substrate holding device is printed, (iv) approach/separator, by making aforementioned mask holding device and the relatively lifting of aforesaid substrate holding device, and make the mask that kept by mask holding device closer to each other with the circuit substrate being kept by base plate keeping device/separate, (v) a pair of mask support component, be positioned at the mask being kept by aforementioned mask holding device, from being held in that two parts that the both side ends of circuit substrate of aforesaid substrate holding device departs from contact or approaching Support Position, in the time utilizing above-mentioned screeding device to print with utilize at least one party of above-mentioned approach/separator when mask is separated with circuit substrate, the lower surface of mask is supported, (vi) clearing apparatus, comprise the extraction unit that (a) extracts rectangular wiper blade out, (b) the withdrawal portion this wiper blade being regained and (c) have and will press on the pressing component of the press surface on the lower surface of aforementioned mask in the above-mentioned wiper blade of extending between above-mentioned extraction unit and withdrawal portion, this clearing apparatus enters into by above-mentioned approach/separator between the mask and circuit substrate after separated from one another, the lower surface that edge mask moves, the lower surface of wiping mask is carried out on limit by pressed on the above-mentioned wiper blade of lower surface of aforementioned mask by above-mentioned pressing component, and (vii) mask support component mobile device, in the time utilizing above-mentioned screeding device to print with utilize the above-mentioned at least one party of above-mentioned approach/separator when mask is separated with circuit substrate, make above-mentioned a pair of mask support component be positioned at above-mentioned Support Position, in the time utilizing above-mentioned clearing apparatus to clean, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, in aforementioned mask printing process, utilizing above-mentioned screeding device to print after print paste, by above-mentioned approach/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, under this state, above-mentioned clearing apparatus is cleaned, in the time of this cleaning, after the end of the part at least contacting with circuit substrate of this mask has exceeded the part side of aforementioned mask support component contact, before arriving the border of this mask and above-mentioned low elasticity coefficient sheet, what make above-mentioned wiper blade presses on the part on the lower surface of aforementioned mask by above-mentioned pressing component, in the direction parallel with the lower surface of aforementioned mask, proceed mobile on one side, carry out the action that wipes separating from the lower surface of this mask on one side.

Above-mentioned problem also solves by following scheme, and mask printing equipment comprises: (i) mask holding device, keeps the mask that is formed with multiple through holes, (ii) base plate keeping device is held in circuit substrate parallel with this mask below the mask being kept by aforementioned mask holding device, (iii) screeding device, moves along the mask being kept by aforementioned mask holding device, makes to load print paste in the upper surface of this mask by above-mentioned multiple through holes, and the circuit substrate being kept by aforesaid substrate holding device is printed, (iv) approach/separator, by making aforementioned mask holding device and the relatively lifting of aforesaid substrate holding device, and make the mask that kept by mask holding device closer to each other with the circuit substrate being kept by base plate keeping device/separate, (v) a pair of mask support component, be positioned at the mask being kept by aforementioned mask holding device, from being held in that two parts that the both side ends of circuit substrate of aforesaid substrate holding device departs from contact or approaching Support Position, in the time utilizing above-mentioned screeding device to print with utilize at least one party of above-mentioned approach/separator when mask is separated with circuit substrate, the lower surface of mask is supported, (vi) clearing apparatus, comprise the extraction unit that (a) extracts rectangular wiper blade out, (b) the withdrawal portion this wiper blade being regained and (c) have and will press on the pressing component of the press surface on the lower surface of aforementioned mask in the above-mentioned wiper blade of extending between above-mentioned extraction unit and withdrawal portion, this clearing apparatus enters into by above-mentioned approach/separator between the mask and circuit substrate after separated from one another, the lower surface that edge mask moves, the lower surface of wiping mask is carried out on limit by pressed on the above-mentioned wiper blade of lower surface of aforementioned mask by above-mentioned pressing component, (vii) pressing component mobile device, produces in order to make above-mentioned wiper blade carry out the required motion of wiping to the lower surface of mask the above-mentioned pressing component of this clearing apparatus, (viii) cleaning control device, controls the movement of above-mentioned pressing component by controlling this pressing component mobile device, and (ix) mask support component mobile device, in the time utilizing above-mentioned screeding device to print with utilize the above-mentioned at least one party of above-mentioned approach/separator when mask is separated with circuit substrate, make above-mentioned a pair of mask support component be positioned at above-mentioned Support Position, in the time utilizing above-mentioned clearing apparatus to clean, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, and above-mentioned cleaning control device comprises: (1.) input unit, can input the information relevant to the size of the mask being kept by aforementioned mask holding device and the circuit substrate that kept by aforesaid substrate holding device, and (2.) motion determination section, based on the above-mentioned information of being inputted by this input unit, to should make above-mentioned pressing component produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of aforementioned mask, approaching/separating with moving movement along mask and determine as to move as follows to mask including this pressing component: make being pressed on after part that the part of the lower surface of aforementioned mask contacts from the mask support component with being positioned at above-mentioned Support Position of this mask moves to along mask the position of leaving to the opposition side of above-mentioned circuit substrate by above-mentioned pressing component of above-mentioned wiper blade, separate from the lower surface of aforementioned mask.

Above-mentioned problem also solves by following scheme, mask printing equipment comprises: (Α) mask holding device, and the mask that is formed with multiple through holes in metal film-making is opened and is located at the mask body forming on mask frame and keeps via the low elasticity coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making, (Β) base plate keeping device is held in circuit substrate parallel with this mask below the mask being kept by aforementioned mask holding device, (Γ) screeding device, moves along the mask being kept by aforementioned mask holding device, makes to load print paste in the upper surface of this mask by above-mentioned multiple through holes, and the circuit substrate being kept by aforesaid substrate holding device is printed, (Δ) approach/separator, by making aforementioned mask holding device and the relatively lifting of aforesaid substrate holding device, and make the mask that kept by mask holding device closer to each other with the circuit substrate being kept by base plate keeping device/separate, (Ε) a pair of mask support component, be positioned at the mask being kept by aforementioned mask holding device, from being held in that two parts that the both side ends of circuit substrate of aforesaid substrate holding device departs from contact or approaching Support Position, at least one party in the time of the printing based on above-mentioned screeding device when based on the separating of the above-mentioned approach/mask of separator and circuit substrate, supports the lower surface of mask, (Ζ) clearing apparatus, comprise the extraction unit that (a) extracts rectangular wiper blade out, (b) the withdrawal portion this wiper blade being regained and (c) have and will press on the pressing component of the press surface on the lower surface of aforementioned mask in the above-mentioned wiper blade of extending between above-mentioned extraction unit and withdrawal portion, this clearing apparatus enters into by above-mentioned approach/separator between the mask and circuit substrate after separated from one another, the lower surface that edge mask moves, the lower surface of wiping mask is carried out on limit by pressed on the above-mentioned wiper blade of lower surface of aforementioned mask by above-mentioned pressing component, (Η) pressing component mobile device, produces in order to make above-mentioned wiper blade carry out the required motion of wiping to the lower surface of mask the above-mentioned pressing component of this clearing apparatus, (θ) cleaning control device, controls the movement of above-mentioned pressing component by controlling this pressing component mobile device, and (Ι) mask support component mobile device, above-mentioned at least one party in the time of the printing based on above-mentioned screeding device when based on the separating of the above-mentioned approach/mask of separator and circuit substrate, make above-mentioned a pair of mask support component be positioned at above-mentioned Support Position, in the time of the cleaning based on above-mentioned clearing apparatus, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, and above-mentioned cleaning control device comprises: (α) input unit, can input the information relevant to the size of the mask being kept by aforementioned mask holding device and low elasticity coefficient sheet and the circuit substrate that kept by aforesaid substrate holding device, and (β) motion determination section, based on the above-mentioned information of being inputted by this input unit, to should make above-mentioned pressing component produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of mask, approaching/separating with moving movement along mask and determine as to move as follows to mask including this pressing component: after the end of the part at least contacting with circuit substrate of this mask has exceeded the part side contacting with aforementioned mask support component, before arriving the border of this mask and above-mentioned low elasticity coefficient sheet, make the part on the lower surface that is pressed on aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade, in the direction parallel with the lower surface of aforementioned mask, proceed mobile on one side, carry out the action that wipes separating from the lower surface of this mask on one side.

As clearing apparatus, for example, can adopt as lower device: form extraction unit by donor rollers, form withdrawal portion by take up roll, make take up roll rotation by roll driving apparatus, thus, the wiper blade of being supplied with by donor rollers press on the lower surface of mask and the part that is used in wiping is reeled by take up roll by pressing component; Or adopt as lower device: as recorded in TOHKEMY 2010-201797 communique, form extraction unit by guide reel, form withdrawal portion by driven roller and pinch roll, the wiper blade of annular shape around be hung on guide reel and be clipped in driven roller and pinch roll between, make driven roller rotation by roll driving apparatus, thus, the part that presses on the lower surface of mask by pressing component of wiper blade is being carried out after wiping mask lower surface, the print paste adhering to by wiper blade cleaning portion is removed, and returns and circulates to guide reel.

Invention effect

According to mask printing process of the present invention, the part that presses on mask of wiper blade moves to the position of the part contacting with mask support component of having passed through mask, therefore except the part contacting with circuit substrate of the lower surface of mask, by wiper blade wiping, and go out print paste from this part entirety wiping by the part entirety of mask supporting units support.Therefore, the print paste being attached in the part contacting with circuit substrate of lower surface of mask is wiped out, can not pollute circuit substrate, and the print paste of being assembled by wiper blade wiping, the print paste that is attached to wiper blade adhere to and remain in the part by mask supporting units support of mask, avoid being attached to mask support component and situation about polluting.

According to another mask printing process of the present invention, the part edge of the lower surface that presses on mask of wiper blade the direction parallel with the lower surface of mask and moves limit separation, thus, the print paste that limit wiping was wiped before separating, limit separates from mask.This wipes the part of action between the part contacting with circuit substrate of mask and the end of this part and mask and the border of low elasticity coefficient sheet and carries out, this wipes the part contacting with mask support component that action executing part comprises mask, adhere to and residue in the print paste of this part but can reduce, and wiper blade is separated from mask, after the movement of part of the lower surface that presses on mask that makes wiper blade stops, compare with situation about vertically separating, print paste is to the minimizing of adhering to of mask support component.According to wiping action, by control movement in the direction parallel with lower surface mask wiper blade with from the separating of mask, can shorten the displacement of the part of the lower surface that presses on mask of wiper blade, and wiping dirt.And, for low elasticity coefficient sheet, do not carry out wiping, can avoid the damage of low elasticity coefficient sheet.

According to mask printing equipment of the present invention, can make the part entirety by mask supporting units support of the part wiping mask that presses on mask of wiper blade.

According to other mask printing equipment of the present invention, can make the part that presses on mask of wiper blade carry out mask lower surface wipe action.

The mode of invention

Below, in these Shen feelings exemplified with think can carry out patent application invention (following, be sometimes referred to as " can apply for invention ".Can apply for that the invention that invention comprises that the scope of patent application is recorded is the invention of the present application or its subordinate concept or upperseat concept invention, sometimes comprise the invention of other concepts) several modes, and they are described.Each mode and claim similarly, are distinguished into item, to every mark numbering, record as required with the form of numbering of the item of quoting other.This to be only can applying for that in order making the understanding of invention is easy, to be not the situation that the combination that forms the structural element that can apply for invention is defined as to following every record.; can apply for that invention should make an explanation with reference to the record, prior art, technology general knowledge etc. that accompany every record, embodiment; as long as meet this explanation, the mode of be also attached with the mode of other structural element in every mode, having deleted structural element from every mode also can become the mode that can apply for invention.

In addition, following every in, (3) item is equivalent to claim 1, and (6) item is equivalent to claim 2, and (7) item is equivalent to claim 3, (8) item is equivalent to claim 4, (9) item is equivalent to claim 5, and (21) item is equivalent to claim 6, and (22) item is equivalent to claim 7, (23) item is equivalent to claim 8, and (24) item is equivalent to claim 9.

(1) a mask printing process, is characterized in that, comprising:

Printing process, is being formed with the upper surface mounting print paste of mask of multiple through holes, by the scraper plate moving along the upper surface of mask make this print paste by above-mentioned through hole to the circuit substrate printing of below that is configured in mask;

Separation circuit, after the enforcement of this printing process, under the state of lower surface that makes to be positioned at a pair of mask supporting units support aforementioned mask the Support Position of departing from from the both side ends of foregoing circuit substrate, make this mask and foregoing circuit substrate separated from one another, afterwards, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position; And

Cleaning operation, between the circuit substrate and mask separated from one another by implementing this separation circuit, make to comprise that (a) extracts withdrawal portion that the extraction unit of rectangular wiper blade, (b) regain this wiper blade out and (c) have the clearing apparatus that the above-mentioned wiper blade of extending is pressed on to the pressing component of the press surface of the lower surface of aforementioned mask between above-mentioned extraction unit and withdrawal portion enters, this clearing apparatus is moved along the lower surface of aforementioned mask, make thus the lower surface of above-mentioned wiper blade wiping aforementioned mask

In this cleaning operation, make being pressed on after part that the part of the lower surface of aforementioned mask contacts from the mask support component with being positioned at above-mentioned Support Position of this mask moves to the position of leaving to the opposition side of above-mentioned circuit substrate by above-mentioned pressing component of above-mentioned wiper blade, its lower surface from aforementioned mask is separated.

According to the mask printing process of this record, about the cleaning of mask, can obtain and (3) effect, effect that the mask printing process of recording is same.And, in the time making mask and circuit substrate separated from one another, support mask by a pair of mask support component, therefore easily separate, and can separate well.

Mask similarly, can be opened and be located on mask frame via low elasticity coefficient sheet with (4) mask of recording, also can not open and be located on mask frame via low elasticity coefficient sheet.In (2) and (3) mask printing process of recording and (21) mask printing equipment of recording too.

Mask support component and the lower surface of mask between there is gap, can only in the time supporting mask, be positioned at Support Position with the state contacting with the lower surface of mask, also can be positioned at Support Position with the state contacting with the lower surface of mask all the time.And, mask support component can be by mask and mask support component relatively moving in the direction perpendicular to mask, make mask and mask support component separated from one another and keep out of the way from Support Position, also can be by mask and mask support component relatively moving and keeping out of the way from Support Position in the direction of lower surface that is parallel to mask.In addition, circuit substrate can contact with the lower surface of mask or approach.Approach refer to and mask between there is all the time gap, but in the time print paste being printed to circuit substrate by through hole, become the state that mask contacts with circuit substrate.These situations in (2)～(6) mask printing process of recording and (21), (22) mask printing equipment of recording too.

Wiper blade can be not make wiper blade move and carry out with the mode that mask vertically declines from the separation of the lower surface of mask on the direction that is parallel to mask, can be so that wiper blade edge mask moves the mode that limit declines and tilt to separate with respect to mask and carry out yet.The in the situation that of vertical separation, in the direction that is parallel to mask, do not need separatory space, can promptly separate, in the situation that tilting to separate, can separate by the lower surface limit of wiper blade wiping mask on limit, can make the print paste that residues in mask reduce.

(2) a mask printing process, is characterized in that, comprising:

Printing process, be formed with multiple through holes mask below, with this mask configuration circuit substrate abreast, and configure a pair of mask support component in the Support Position of departing from from the both side ends of this circuit substrate, at the upper surface mounting print paste of aforementioned mask, by the scraper plate moving along the upper surface of this mask make this print paste by above-mentioned through hole to above-mentioned circuit substrate printing;

Separation circuit, after the enforcement of this printing process, makes aforementioned mask and foregoing circuit substrate separated from one another, and above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position; And

Cleaning operation, in the enforcement by this separation circuit and between circuit substrate and mask separated from one another, make to comprise that (a) extracts withdrawal portion that the extraction unit of rectangular wiper blade, (b) regain this wiper blade out and (c) have the clearing apparatus that the above-mentioned wiper blade of extending is pressed on to the pressing component of the press surface of the lower surface of aforementioned mask between above-mentioned extraction unit and withdrawal portion enters, this clearing apparatus is moved along the lower surface of aforementioned mask, make thus the lower surface of above-mentioned wiper blade wiping aforementioned mask

A pair of mask support component and the lower surface of mask between there is all the time gap, the state configuration supporting to contact with the lower surface of mask when can supporting mask in when printing, the also state configuration to contact with the lower surface of mask all the time.

According to the mask printing process of this record, about the cleaning of mask, can obtain and (3) effect, effect that the mask printing process of recording is same.And, in the time that circuit substrate is printed, support mask and print well by a pair of mask support component.About (5) mask printing process of recording too.

(3) a mask printing process, is the method for print paste being printed to circuit substrate by mask printing equipment, and aforementioned mask printing equipment comprises:

Mask holding device, keeps the mask that is formed with multiple through holes;

Base plate keeping device is held in circuit substrate parallel with this mask below the mask being kept by aforementioned mask holding device;

Screeding device, moves along the mask being kept by aforementioned mask holding device, makes to load print paste in the upper surface of this mask by above-mentioned multiple through holes, and the circuit substrate being kept by aforesaid substrate holding device is printed;

Approach/separator, by making aforementioned mask holding device and the relatively lifting of aforesaid substrate holding device, and make the mask that kept by mask holding device closer to each other with the circuit substrate being kept by base plate keeping device/separate;

A pair of mask support component, be positioned at the mask being kept by aforementioned mask holding device, from being held in that two parts that the both side ends of circuit substrate of aforesaid substrate holding device departs from contact or approaching Support Position, at least one party in the time of the printing based on above-mentioned screeding device when based on the separating of the above-mentioned approach/mask of separator and circuit substrate, supports the lower surface of mask;

Clearing apparatus, comprise extraction unit that (a) extract rectangular wiper blade out, withdrawal portion that (b) regains this wiper blade and (c) have and will press on the pressing component of the press surface on the lower surface of aforementioned mask in the above-mentioned wiper blade of extending between above-mentioned extraction unit and withdrawal portion, this clearing apparatus enters into by above-mentioned approach/separator between the mask and circuit substrate after separated from one another, the lower surface that edge mask moves, and the lower surface of wiping mask is carried out on limit by pressed on the above-mentioned wiper blade of lower surface of aforementioned mask by above-mentioned pressing component; And

Mask support component mobile device, above-mentioned at least one party in the time of the printing based on above-mentioned screeding device when based on the separating of the above-mentioned approach/mask of separator and circuit substrate, make above-mentioned a pair of mask support component be positioned at above-mentioned Support Position, in the time of the cleaning based on above-mentioned clearing apparatus, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position

Aforementioned mask printing process is characterised in that,

After the printing of the print paste based on above-mentioned screeding device, by above-mentioned approach/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, under this state, above-mentioned clearing apparatus is cleaned, in the time of this cleaning, after the part that part on the lower surface that is pressed on aforementioned mask by above-mentioned pressing component that makes above-mentioned wiper blade contacts from the mask support component with being positioned at above-mentioned Support Position of this mask moves to the position of leaving to the opposition side of above-mentioned circuit substrate, separate from the lower surface of aforementioned mask.

At this, about the Support Position contacting with mask of a pair of mask support component, as long as a pair of mask support component supports mask in the time of printing, it is the initial position contacting with mask from printing starts, as long as a pair of mask support component supports mask when the separating of mask and circuit substrate, be initial from separating the position contacting with mask starting.And, about the Support Position close to mask of a pair of mask support component, as long as all the time and have gap between mask but a pair of mask support component time supports mask in printing, becoming the position that contacts the state supporting with mask in the time that through hole is pressed into print paste, as long as mask being supported when the separating of mask and circuit substrate, be in the time that mask separates, to become the position that contacts the state supporting with mask at circuit substrate.As mask support component, in the time using mask described later absorption support component, the Support Position close to mask of a pair of mask support component is the position that becomes the state that mask support component contacts with mask by adsorbing.

According to the mask printing process of this record, at least one party in the time that print paste prints to circuit substrate during with the separating of mask and circuit substrate, supports mask by a pair of mask support component, can print well and at least one party who separates.For (6) mask printing process of recording too.

(4) a mask printing process, is characterized in that, comprising:

Printing process, use the mask that is formed with multiple through holes in metal film-making to open and be located at the mask body forming on mask frame via the low elasticity coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making, at the upper surface mounting print paste of aforementioned mask, by the scraper plate moving along the upper surface of mask make this print paste by above-mentioned through hole to the circuit substrate printing of below that is disposed at this mask;

Separation circuit, after the enforcement of this printing process, make to be positioned at the lower surface of a pair of mask supporting units support aforementioned mask the Support Position of departing from from the both side ends of foregoing circuit substrate, under this state, make this mask and foregoing circuit substrate separated from one another, afterwards, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position; And

In this cleaning operation, after the end of the part at least contacting with circuit substrate of this mask has exceeded the part side contacting with aforementioned mask support component, before arriving the border of this mask and above-mentioned low elasticity coefficient sheet, what make above-mentioned wiper blade presses on the part on the lower surface of aforementioned mask by above-mentioned pressing component, in the direction parallel with the lower surface of aforementioned mask, proceed on one side to move, carry out the action that wipes separating from the lower surface of this mask on one side.

According to the mask printing process of this record, about the cleaning of mask, can obtain and (6) effect, effect that the mask printing process of recording is same.

(5) a mask printing process, is characterized in that, comprising:

Printing process, use the mask that is formed with multiple through holes in metal film-making to open and be located at the mask body forming on mask frame via the low elasticity coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making, below mask, with this mask configuration circuit substrate abreast, and configure a pair of mask support component in the Support Position of departing from from the both side ends of this circuit substrate, at the upper surface mounting print paste of aforementioned mask, by the scraper plate that moves along the upper surface of mask by this print paste by above-mentioned through hole to above-mentioned circuit substrate printing;

(6) a mask printing process, is the method for print paste being printed to circuit substrate by mask printing equipment, and aforementioned mask printing equipment comprises:

Mask holding device, opens and is located at the mask body forming on mask frame and keeps via the low elasticity coefficient sheet less than the coefficient of elasticity of above-mentioned metal film-making the mask that is formed with multiple through holes in metal film-making;

Aforementioned mask printing process is characterised in that,

After the printing of the print paste based on above-mentioned screeding device, by above-mentioned approach/separator make mask and circuit substrate separated from one another, and by aforementioned mask support component mobile device, above-mentioned a pair of mask support component is kept out of the way from above-mentioned Support Position, under this state, above-mentioned clearing apparatus is cleaned, in the time of this cleaning, after the end of the part at least contacting with circuit substrate of this mask has exceeded the part side contacting with aforementioned mask support component, before arriving the border of this mask and above-mentioned low elasticity coefficient sheet, what make above-mentioned wiper blade presses on the part on the lower surface of aforementioned mask by above-mentioned pressing component, in the direction parallel with the lower surface of aforementioned mask, proceed mobile on one side, carry out the action that wipes separating from the lower surface of this mask on one side.

(7) the mask printing process of recording to any one in (6) item according to (4) item, wherein, in the time utilizing above-mentioned clearing apparatus to clean mask, in the end of a side of the close foregoing circuit substrate of the part contacting with aforementioned mask support component of mask, and between the border of aforementioned mask and above-mentioned low elasticity coefficient sheet, the part that presses on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade is being remained under the state of pressed state, when exist from the part contacting with aforementioned mask support component of aforementioned mask move to the position left to the opposition side of above-mentioned circuit substrate required enough apart from time, after moving to this position, separate from mask, when do not exist this apart from time carry out the above-mentioned action that wipes.

According to the mask printing process of this record, can according to the end of a side of the close circuit substrate of the part contacting with mask support component of mask, and mask and the border of low elasticity coefficient sheet between distance select cleaning mode, if this distance is abundant, wiper blade is carried out wiping and passes through the part entirety contacting with mask support component of mask, can with this part not the mode of residual print paste clean.Even if distance is insufficient, by wiping action, the wiping that the part contacting with mask support component of mask is avoided carrying out with the interference edge of low elasticity coefficient sheet in limit, can reduce print paste adhering to mask support component.Make wiper blade move to the position of leaving from the part contacting with mask support component of mask, and cannot drive print paste out of, but by the wiping of print paste based on wiping action, can reduce print paste adhering to mask support component.

Abundant in above-mentioned distance, when the part of the lower surface that presses on mask of wiper blade separates from mask to move to the state of the above-mentioned position of leaving, wiper blade moves to the position of leaving from the part by mask supporting units support of mask, even if therefore print paste residues in separated part, also can not be attached to mask support component and cause stained, can make wiper blade vertically separate with respect to mask, also can separate obliquely.

(8) the mask printing process of recording to any one in (7) item according to (1) item, wherein, use mask absorption support component as aforementioned mask support component, aforementioned mask absorption support component has the attraction hole in upper surface open, by attracting air to adsorb support aforementioned mask from this attraction hole.

In the time of printing, in the situation that mask support component supports mask, prevent that by the absorption of mask mask from preventing the decline of printing precision with respect to the deviation of circuit substrate, in the time separating, mask support component adsorbs in situation about supporting mask, and print paste easily comes off from through hole.

Be no matter part at the lower surface that presses on mask of wiper blade after the part with the contact of mask support component of mask moves to the position of leaving to the opposition side of circuit substrate from the lower surface of mask separates, or in the case of carrying out the wiping action of lower surface of mask, the part contacting with mask support component of mask is all by wiper blade wiping, therefore in the time that mask absorption support component adsorbs support to mask, the print paste that is attached to mask is inhaled into and attracts in hole, reduces the situation that pore stops up that occurs.

(9) the mask printing process of recording to any one in (8) item according to (1) item, wherein, comprise that residual print paste removes operation: making the latter stage in above-mentioned cleaning operation of above-mentioned wiper blade wiping aforementioned mask is again separating part with the part that above-mentioned wiper blade separates, and thus the print paste that residues in this separating part is removed.

By removing residual print paste, for example, even if mask support component touches the separating part separating with wiper blade of mask, also can avoid residual print paste to be attached to mask support component and to cause stained situation, or avoid the print paste that residues in mask solidify and cause the cleaning of mask to become difficult situation.And, reduce the wash number of mask by removing residual print paste, can change the minimizing of number of times and realize the raising of printing efficiency or the life-span of mask improves based on mask.

(10) according to (9) mask printing process of recording, wherein, carry out above-mentioned residual print paste according to the set point number of above-mentioned cleaning operation and remove operation.

Set point number can be once, can be also more than twice repeatedly.Remove if carry out residual print paste, can make mask clean, and the cleaning time be elongated, if but set point number for repeatedly, can suppress the increase based on the time of cleaning and the decline of the printing usefulness that causes, and carry out residual print paste and remove.

(11) according to (9) item or (10) mask printing process of recording, wherein, by and with (a) make to immerse the wet type wiping of the above-mentioned separating part of above-mentioned wiper blade wiping that has liquid, and then (b) make the dry type wiping of the above-mentioned separating part of above-mentioned wiper blade wiping that does not immerse liquid carry out above-mentioned residual print paste to remove operation.

According to wet type wiping, easily wiping is attached to the lower surface of mask and the print paste that solidifies, by back to back dry type wiping, liquid or the residual print paste of wiping of the lower surface that is attached to mask is removed, and it is cleaner that mask becomes.

(12) the mask printing process of recording to any one in (11) item according to (1) item, wherein, printing paste scolder is as above-mentioned print paste.

In print paste, except paste scolder, also comprise for example electric conductivity paste or insulator paste.

(21) a mask printing equipment, is characterized in that, comprising:

Mask holding device, keeps the mask that is formed with multiple through holes;

Clearing apparatus, comprise extraction unit that (a) extract rectangular wiper blade out, withdrawal portion that (b) regains this wiper blade and (c) have and will press on the pressing component of the press surface on the lower surface of aforementioned mask in the above-mentioned wiper blade of extending between above-mentioned extraction unit and withdrawal portion, this clearing apparatus enters into by above-mentioned approach/separator between the mask and circuit substrate after separated from one another, the lower surface that edge mask moves, and the lower surface of wiping mask is carried out on limit by pressed on the above-mentioned wiper blade of lower surface of aforementioned mask by above-mentioned pressing component;

Pressing component mobile device, produces in order to make above-mentioned wiper blade carry out the required motion of wiping to the lower surface of mask the above-mentioned pressing component of this clearing apparatus;

Cleaning control device, controls the movement of above-mentioned pressing component by controlling this pressing component mobile device; And

And above-mentioned cleaning control device comprises:

Input unit, can input the information relevant to the size of the mask being kept by aforementioned mask holding device and the circuit substrate that kept by aforesaid substrate holding device; And

Motion determination section, based on the above-mentioned information of being inputted by this input unit, to should make above-mentioned pressing component produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of aforementioned mask, approaching/separating with moving movement along mask and determine as to move as follows to mask including this pressing component: make being pressed on after part that the part of the lower surface of aforementioned mask contacts from the mask support component with being positioned at above-mentioned Support Position of this mask moves to along mask the position of leaving to the opposition side of above-mentioned circuit substrate by above-mentioned pressing component of above-mentioned wiper blade, separate from the lower surface of aforementioned mask.

Input unit can be that guidance panel, keyboard etc. are operated by operator and the device that carries out the input of data, can be also the part of reading in that is stored in canned data in memory cell in the control device of mask printing equipment or external memory.

According to the mask printing equipment of this record, can suitably implement (3) method of recording.

(22) a mask printing equipment, is characterized in that, comprising:

And above-mentioned cleaning control device comprises:

Input unit, can input the information relevant to the size of the mask being kept by aforementioned mask holding device and low elasticity coefficient sheet and the circuit substrate that kept by aforesaid substrate holding device; And

Motion determination section, based on the above-mentioned information of being inputted by this input unit, to should make above-mentioned pressing component produce in order to make above-mentioned wiper blade carry out wiping to the lower surface of mask, approaching/separating with moving movement along mask and determine as moving as follows to mask including this pressing component: after the end of the part at least contacting with circuit substrate of this mask has exceeded the part side contacting with aforementioned mask support component, before arriving the border of this mask and above-mentioned low elasticity coefficient sheet, make the part being pressed on the lower surface of aforementioned mask by above-mentioned pressing component of above-mentioned wiper blade in the direction parallel with the lower surface of aforementioned mask, proceed mobile on one side, carry out the action that wipes separating from the lower surface of this mask on one side.

According to the mask printing equipment of this record, can suitably implement (6) method of recording.

(23) according to (22) mask printing equipment of recording, wherein, in the time utilizing above-mentioned clearing apparatus to clean mask, in the end of a side of the close foregoing circuit substrate of the part contacting with aforementioned mask support component of mask, and between the border of mask and above-mentioned low elasticity coefficient sheet, pressing in the part of the lower surface of aforementioned mask and remaining under the state of pressed state by above-mentioned pressing component above-mentioned wiper blade, when exist from the part contacting with aforementioned mask support component of aforementioned mask move to the position left to the opposition side of above-mentioned circuit substrate required enough apart from time, above-mentioned motion determination section should make the motion that above-mentioned pressing component produces determine the motion separating from mask for after moving to this position, when do not exist this apart from time, above-mentioned motion determination section should make the motion that above-mentioned pressing component produces determine as carrying out the above-mentioned motion that wipes action.

According to the mask printing equipment of this record, can suitably implement (7) method of recording.

(24) the mask printing process of recording to any one in (23) item according to (21) item, wherein, above-mentioned a pair of mask support component is respectively mask absorption support component, aforementioned mask absorption support component has the attraction hole in upper surface open, by attracting air to adsorb support mask from this attraction hole.

Above-mentioned (9) feature and above-mentioned (21) Feature Combination of recording respectively to (24) item recorded respectively to (12) item can be adopted.

Brief description of the drawings

Fig. 1 is the side view that diagrammatically represents the mask printing equipment of the embodiment that can apply for invention.

Fig. 2 is the side view that represents mask bracing or strutting arrangement, base plate keeping device and the baseplate support device etc. of aforementioned mask printing equipment.

Fig. 3 is the stereogram that represents aforementioned mask bracing or strutting arrangement etc.

Fig. 4 is the top view that represents the mask absorption support component of aforementioned mask bracing or strutting arrangement.

Fig. 5 is the side view cutaway drawing that represents a part for aforesaid substrate bracing or strutting arrangement.

Fig. 6 is the side view cutaway drawing that represents aforementioned mask bracing or strutting arrangement etc.

Fig. 7 is the top view that represents the mask holding device of aforementioned mask printing equipment.

Fig. 8 is the top view that represents the screeding device of aforementioned mask printing equipment.

Fig. 9 is the stereogram that represents the fore-and-aft direction regulon of the apparatus for adjusting position of aforementioned mask holding device.

Figure 10 is the stereogram that represents the scraper head lowering or hoisting gear of above-mentioned screeding device.

Figure 11 is the stereogram that represents the scraper head of above-mentioned screeding device.

Figure 12 is the stereogram representing together with the clearing apparatus of aforementioned mask printing equipment and mobile device etc.

Figure 13 represents clearing apparatus in aforementioned mask printing equipment and the stereogram of sweeping fluid apparatus for coating.

Figure 14 removes a part for clearing apparatus main body and represents the side view (part section) of above-mentioned clearing apparatus.

Figure 15 is the block diagram that represents the control device of aforementioned mask printing equipment.

Figure 16 is the figure of the printing of the moving into of circuit substrate in explanation aforementioned mask printing equipment, support, paste scolder etc.

To be explanation should make one of motion that the pressing component of above-mentioned clearing apparatus produces figure that leaves position moving movement in when cleaning to Figure 17.

To be explanation should make motion that the pressing component of above-mentioned clearing apparatus produces in when cleaning to Figure 18 that another wipes the figure of motion.

Figure 19 is the figure that amount of residual solder that explanation produces the pressing component of above-mentioned clearing apparatus to carry out while leaving position moving movement is removed.

Figure 20 is the figure that explanation produces the pressing component of above-mentioned clearing apparatus to wipe amount of residual solder that when motion carries out to be removed.

Figure 21 is the flow chart that is illustrated in the cleaning mode of storing in the ROM of the computer that becomes main body of above-mentioned control device and sets routine.

Figure 22 is the flow chart that is illustrated in the mask cleaning routine of storing in the ROM of above-mentioned computer.

Detailed description of the invention

Below, with reference to accompanying drawing, explanation can be applied for working of an invention mode.In addition, can apply for that invention is except following embodiment, headed by the mode of the record of mode of foregoing invention, the knowledge based on those skilled in the art can be implemented in the mode of having implemented various changes.

Conduct can be applied for the mask printing equipment of an embodiment for invention, and Fig. 1 diagrammatically represents to implement as the mask printing equipment of mask printing process of an embodiment that can apply for invention.In this mask printing equipment, although also unexposed to the part beyond can applying for inventing relevant part, but the mask printing equipment of recording with the description of Japanese Patent Application 2010-110428 and the description of Japanese Patent Application 2010-102298 of the applicant's application similarly forms, and describes simply.

The printing equipment main body 10 of this mask printing equipment assembles the one such as base 12 (with reference to Fig. 3), multiple truss, beam and post, is provided with base plate keeping device 14 and mask bracing or strutting arrangement 16 in its anterior lower side.As shown in Figure 2, mask bracing or strutting arrangement 16 comprise mask bracing or strutting arrangement main body 60, as the mask absorption support component 62,64 of a pair of mask support component, as the mask absorption support component driving and reversing mechanism 66,68 of mask support component driving and reversing mechanism.As shown in Figure 3, mask absorption support component the 62, the 64th, movable member, possess respectively the supporting leg body 70 of a shape and tabular supporter 72, can be the upper surface that mode that fore-and-aft direction moves is located at mask bracing or strutting arrangement main body 60 along the direction parallel with the mask that is held in mask holding device described later.In this mask printing equipment, the direction parallel with the carrying direction of the circuit substrate based on substrate transfer apparatus is made as to left and right directions, the direction orthogonal with carrying direction is made as to fore-and-aft direction.Left and right directions and fore-and-aft direction are level.Mask absorption support component driving and reversing mechanism 66 possesses two cylinders 80 that are arranged in mask bracing or strutting arrangement main body 60, by stretching of piston rod, is guided and mask absorption support component 62 is moved by guiding device 81.Narrate in the back about mask support component driving and reversing mechanism 68.

As shown in Figure 2, each supporter 72 of mask absorption support component 62,64 is arranged in the beam portion 84 of supporting leg body 70 in the mode that can rotate around the axis parallel with carrying direction by axle 82, by and each supporting leg body 70 between the application of force unit that sets up a kind of as the draft helical spring 86 of elastomeric element, to the direction application of force that approaches beam portion 84.The rotation limit of the supporter 72 of the application of force based on spring 86 is limited to beam portion 84 butts by supporter 72, and is supported for the attitude of level.

The mask absorption support component of supporter 72 from beam portion 84 to the opposing party is side-prominent, and its upper surface entirety forms mask supporting surface 90, and the lower surface of protuberance forms substrate bearing plane 92.And, supporter 72 and top secure component described later side in opposite directions are as mask absorption support component 62 shown in Figure 4, across and the length direction entirety of supporter 72 be gently bending by the convex ground that repeatedly function or trigonometric function curve form, become the inclined side 94 tilting with respect to the length direction of scraper plate described later.The bottom of the side of supporter 72 is recessed to a side contrary to secure component by the two ends of inclined side 94, and forms a plane parallel side 96 parallel with carrying direction, thus the edge of delimitation substrate bearing plane 92.On supporter 72, be formed with the multiple attractions hole 98 in these mask supporting surface 90 upper sheds.Attract hole 98 that supporter 72 is connected and formed along thickness direction, as shown in Figure 3, the path 99 forming via surface opening thereon in beam portion 84 and being connected with vacuum plant 100, thereby attraction air.

Mask bracing or strutting arrangement 16 lifting by mask bracing or strutting arrangement lowering or hoisting gear 110.As shown in Figure 3, mask bracing or strutting arrangement lowering or hoisting gear 110 comprises guiding device 112 and lifting drive 114.This lifting drive 114 comprises: with can not be along axially relatively moving and can not counterrotating mode being located at four feeding screws 116 of mask bracing or strutting arrangement main body 60; With can not be along four nuts 118 that axially relatively move and can counterrotating mode be located at base 12 and screw togather respectively with four feeding screws 116; And relative whirligig 120.Whirligig 120 possesses relatively: electro-motor 124; Comprise multiple pulleys 126 of four pulleys 126 that arrange integratedly respectively with four nuts 118; And around 128 (with reference to the Fig. 6) that are with that are hung on pulley 126; Four nuts 118 rotate simultaneously, thereby make dead root feeding screws 116 simultaneously along moving axially, and mask bracing or strutting arrangement 16 is guided by guiding device 112 and with respect to 10 liftings of printing equipment main body.Guiding device 112 comprises guide rod 130 and guide sleeve 132.As pulley 126 and be with 128, preferably synchronous pulley and Timing Belt, as feeding screws 116, preferably ball-screw, as electro-motor 124, preferably servo motor etc. can be rotated the electro-motor of the control of angle.About following feeding screws, pulley, band and electro-motor too.

As shown in Figure 3, aforesaid substrate holding device 14 comprises baseplate support device 150 and side fastener 152.Side fastener 152 comprises fastener main body 154, a pair of secure component 156,158 and secure component drive unit 160 (with reference to Fig. 2).Secure component 156,158 elongated shape respectively, is installed on side frame 162,164.Side frame 162 is fixed on fastener main body 154 abreast with carrying direction, and secure component 156 is fixed on the upper end of this side frame 162 with the length direction attitude parallel with carrying direction.After, sometimes secure component 156 is called to fixing secure component.As shown in Figure 4, by fixing secure component 156 be made as the plane fastening surface 166 parallel with carrying direction with this secure component 158 side in opposite directions, the top at the back side is set as and has the bending corresponding with above-mentioned inclined side 94 and the inclined side 168 parallel with inclined side 94.A side that is provided with fixing secure component 156 in a pair of secure component 156,158 of this mask printing equipment is face side or front side, and the mask absorption support component 62 of fixing secure component 156 sides in a pair of mask absorption support component 62,64 is positioned at front side.

Side frame 164 is in shaped door as shown in Figure 3, as shown in Figure 2, can be located at movably fastener main body 154 along fore-and-aft direction.Side frame 164 moves by carrying width change device 184, the interval of change and side frame 162, thus change board carrying width.This carrying width change device 184 comprises: as the electro-motor 182 of drive source; With a pair of movement transferring 190, comprise respectively multiple pulleys 186 and with 188 and the rotation of electro-motor 182 is converted to rectilinear motion and transmits to side frame 164.

Secure component 158, moves by secure component drive unit 160 with the parallel attitude of carrying direction and remain on side frame 164 approaching the mode separating with a side of the both sides end face of circuit substrate with length direction.After, sometimes secure component 158 is called to movable secure component 158.Movable secure component 158 and fixing secure component 156 similarly, by being made as fastening surface 192 with substrate 206 side in opposite directions, are made as inclined side 194 by the top at the back side.Although secure component drive unit 160 has omitted detailed diagram and explanation, comprise a pair of driver element taking cylinder as drive source.

As shown in Figure 2, be separately installed with at side frame 162,164 can rotate annular and be with 200, rotate by the band whirligig 204 taking electro-motor 202 as drive source respectively, thereby will be carried with the attitude of level with 200 circuit substrates 206 that supported both side ends (after, referred to as substrate 206) by a pair of.Be with 200 and band whirligig 204 form substrate transfer apparatus 208.In the time of carrying, not fastening base 206 of secure component 156,158, allows that it moves, and in the both sides of substrate 206, it is moved and is guided, and as substrate-guided parts performance function, and side frame 162,164 forms track component.

Aforementioned mask absorption support component driving and reversing mechanism 68 possesses two cylinders 210, as the cylinder 210 of a side shown in Fig. 2, its cylinder housing 212 is fixed on the supporting leg body 70 of mask absorption support component 64, and side frame 164 engages with the holding section 216 of the leading section of piston rod 214 in the mode that can relatively move and can not relatively move along fore-and-aft direction along above-below direction.Therefore, mask absorption support component 64 is by the driving of above-mentioned carrying width change device 184, and move along fore-and-aft direction according to the width of substrate 206 (size under the state being kept by base plate keeping device 14 in the direction parallel with fore-and-aft direction) together with side frame 164, by stretching of piston rod 214, guide and move along fore-and-aft direction with respect to side frame 164 and then with respect to movable secure component 158 by guiding device 81.By the driving of the mask absorption support component 62,64 based on mask absorption support component driving and reversing mechanism 66,68, thereby change the interval in the direction parallel with these masks.Mask absorption support component driving and reversing mechanism 66,68 forms mask support component interval change device.And although the diagram of omission, mask absorption support component 64 is fixed on mask bracing or strutting arrangement main body 60 by mask support component fixture.

It is a kind of as multiple supporting pins 234 (with reference to Fig. 5) of substrate adsorption support component that aforesaid substrate bracing or strutting arrangement 150 comprises apparatus main body 230 (with reference to Fig. 3), pin brace table 232 and substrate supporting member.This baseplate support device 150 supports substrate 206 from below by supporting pin 234 and adsorbs maintenance, the front end face of supporting pin 234 is made as to the supporting surface 236 of level, and the cup 238 of the rubber system of being provided with.This baseplate support device 150 similarly forms with the baseplate support device that TOHKEMY 2002-118399 communique is recorded, and description thereof is omitted.

Base plate keeping device 14 lifting by base plate keeping device lowering or hoisting gear 250.Base plate keeping device lowering or hoisting gear 250 comprises lifting drive 252 as shown in Figure 3.This lifting drive 252 comprises rotating and can not be arranged on four nuts 254 and the relative whirligig 256 in mask bracing or strutting arrangement main body 60 along axially movable mode.As shown in Figure 6, whirligig 256 comprises relatively: electro-motor 260; Multiple pulleys 262 including the pulley 262 arranging integratedly with four nuts 254; And on these pulleys 262, be with 264 around hanging over.

As shown in Figure 6, baseplate support device 150 is guided by the guiding device 274 that comprises guide rod 270 and guide sleeve 272, and passes through lifting drive 276 with respect to 152 liftings of side fastener.Guiding device 274 and lifting drive 276 form baseplate support device lowering or hoisting gear 278.

As shown in Figure 3, lifting drive 276 comprises: with four feeding screws 280 that can relatively rotate and can not stretch out along the mode axially relatively moving downwards from baseplate support device main body 230; Be fixed on fastener main body 154, can not rotate and can not be along axially movable four nuts 282; And relative whirligig 284.Four feeding screws 280 screw togather with nut 282 respectively, and also screw togather with four nuts 254 of above-mentioned lifting drive 252.Whirligig 284 comprises relatively: be arranged on the electro-motor 286 in baseplate support device main body 230; Comprise the multiple pulleys 288 that are separately positioned on four pulleys 288 on feeding screws 280; And on these pulleys 288, be with 290 around being hung on.

Under the rotation halted state of four feeding screws 280, by nut 254 being rotated relative to whirligig 256, make thus feeding screws 280 liftings, base plate keeping device 14 is with respect to 16 liftings of mask bracing or strutting arrangement.This lifting is by guide rod 270,130 guiding.The rotation halted state of four feeding screws 280 can by make holding torque act on electro-motor 286 remain rotation halted state obtain.And, by four feeding screws 280 are rotated, make baseplate support device 150 with respect to 152 liftings of side fastener.Now, holding torque acts on 260, four nuts 254 of electro-motor and remains rotation halted state.In the time of the lifting of mask bracing or strutting arrangement 16, base plate keeping device 14 and 16 1 liftings of mask bracing or strutting arrangement.In the present embodiment, nut 254 and relative whirligig 256 jointly form lifting drive 252 with feeding screws 280.

As shown in Figure 1, above base plate keeping device 14 and mask bracing or strutting arrangement 16, be that the topmost of printing equipment main body 10 is provided with mask holding device 390 and screeding device 392.Mask holding device 390 comprises mask frame bearing piece 400 and the apparatus for adjusting position 402 shown in Fig. 7, mask body 410 is held in to the attitude of level.Mask body 410 is that mask 412 is opened the structure being located on mask frame 416 via mask retention tab 414.Mask 412 is formed with multiple through holes 420 on the printing zone 418 of the sheet of for example stainless steel of metal system.Mask retention tab 414 compares by coefficient of elasticity and forms the little low elasticity coefficient sheet of the metal film-making of mask 412, for example by the adhesive tape that utilizes acrylic acid system, the sheet laminated net of polyester is formed, between the outer peripheral edges of lower surface and the lower surface of mask frame 416 of mask 412, open and be located on mask 412 to apply towards the state of the tension force of the direction of mask frame 416 side stretchings.Mask 412 and mask frame 416 are square or rectangular, and the mask 412Yi Qi center state consistent with mask Kuang416 center opened and be located on mask frame 416.In the present embodiment, in the parallel direction of the fore-and-aft direction with mask printing equipment of mask body 410, be of a size of width, the direction parallel with carrying direction or left and right directions is of a size of length.About substrate 206, mask absorption support component 62,64, secure component 156,158 too.

The size of mask frame 416 is general on the circuit substrate of multiple kinds.Mask 412 has substrate 206 and contacts together with a pair of secure component 156,158 and guarantee the width from the supported portion of supported underneath by the mask supporting surface 90 of above-mentioned a pair of mask absorption support component 62,64, and the width of mask retention tab 414 exists multiple kinds according to the size of mask 412.On fore-and-aft direction, the distance with between the end of the contrary side of mask 412 sides and the end of mask 412 sides of mask retention tab 414 of mask frame 416 is made as to the width of mask retention tab 414.

Mask frame bearing piece 400 bears mask frame 416 from below, as shown in Figure 7, and the multiple cylinders 428 as fixture that possess a pair of receiving portion 426 and mask frame 416 is pressed and fixed to this pair of receiving portion 426.Apparatus for adjusting position 402 is arranged between printing equipment main body 10 and mask frame bearing piece 400, by regulating the position of mask frame bearing piece 400, eliminate the mask 412 that is held in mask frame bearing piece 400 and the relative position deviation of substrate 206 that is held in aforesaid substrate holding device 14.

Apparatus for adjusting position 402 comprises: two fore-and-aft direction regulons 434 that separate one another along left and right directions; The left and right directions regulon 436 separating along fore-and-aft direction from these two fore-and-aft direction regulons 434; And the float support unit 438 separating along left and right directions from this left and right directions regulon 436.In each fore-and-aft direction position regulating unit 434, as typically a side represented in Fig. 9, comprising: be fixed on abreast the guiding piece 444 of printing equipment main body 10 with fore-and-aft direction; The feeding screws 446 arranging in mode parallel with this guiding piece 444 and can not be mobile vertically; The electro-motor 448 that drives this feeding screws 446 to rotate; And sliding part 450, by the rotation of electro-motor 448, sliding part 450 is moved along fore-and-aft direction.Another sliding part 452 relatively moves and is held in freely this sliding part 450 along left and right directions, and rotary part 454 is held in this sliding part 452 freely around the rotation rotation of vertical.

As shown in Figure 7, left and right directions regulon 436 comprises guiding piece 464, feeding screws 466, electro-motor 468, sliding part 470,472 and rotary part 474.Its basic structure is identical with fore-and-aft direction regulon 434, and difference is: guiding piece 464 and feeding screws 466 configure abreast with left and right directions; And sliding part 470 has on fore-and-aft direction long shape and sliding part 472 along fore-and-aft direction with larger distance moving freely.Float support unit 438 comprises: the guiding piece 480 parallel with fore-and-aft direction; Mobile sliding part 482 freely on this guiding piece 480; On this sliding part 482, move another sliding part 484 freely along left and right directions; And can be held in around the mode of the rotation rotation of vertical the rotary part 486 of this sliding part 484; In the time of the position adjustments of the mask frame bearing piece 400 of the work based on unit 434,436, allow moving freely and bearing load in the horizontal direction of corresponding part of mask frame bearing piece 400.

As shown in double dot dash line in Fig. 7, be fixed with the screeding device main body 500 of above-mentioned screeding device 392 at the upper surface of aforementioned mask frame bearing piece 400.As shown in Figure 8, in screeding device main body 500, scraper plate sliding part 504 is supported for and can moves along fore-and-aft direction, and by scraper plate sliding part drive unit 506, limit is moved by two guiding piece 502 leading edges that form guiding device.Scraper plate sliding part drive unit 506 in present embodiment comprises multiple pulleys 510, is with 512 around what be hung on these multiple pulleys 510; And drive an electro-motor being rotated 514 in multiple pulleys 510.

On scraper plate sliding part 504, be equipped with two scraper heads 520 shown in Figure 11 and make respectively the scraper head lowering or hoisting gear 524,526 (with reference to Figure 10) of two scraper head 520 liftings.Scraper head lowering or hoisting gear 524,526 comprises respectively Lift Part 528,530 and lifting drive 532,534.Lifting drive 532,534 comprises feeding screws 536, nut 538, electro-motor 540 (with reference to Fig. 8), pulley 542 and is with 544 (with reference to Figure 10).Respectively scraper plate 546 is held in to its length direction attitude parallel with carrying direction by 2 scraper heads 520.

As shown in Fig. 1 and Figure 12, the part that is provided with aforesaid substrate holding device 14 and mask bracing or strutting arrangement 16 of printing equipment main body 10 and be provided with mask holding device 390 and the part of screeding device 392 between part, be provided with reference mark camera head 560, clearing apparatus 562, sweeping fluid apparatus for coating 564 (with reference to Figure 13) and mobile device 566.As shown in figure 12, mobile device 566 comprises sliding part 570 and sliding part drive unit 572.Sliding part drive unit 572 comprise with can around the axis parallel with fore-and-aft direction rotation and can not along axially movable mode be installed on printing equipment main body 10 feeding screws 576, be fixed on nut 578 and electro-motor 580 on sliding part 570, feeding screws 576 rotates by electro-motor 580, thus, sliding part 570 is guided and is moved along fore-and-aft direction by the guiding piece 582 that forms guiding device.

On above-mentioned sliding part 570, clearing apparatus 562 is installed, clearing apparatus 562 is moved along fore-and-aft direction.And as shown in figure 12, the mode that another sliding part 584 can move along left and right directions to be guided by guiding piece 586 is located at sliding part 570, moves by omitting illustrated feeding screws and electro-motor.On this sliding part 584, reference mark camera head 560 is installed, the reference mark of being located at mask 412 and substrate 206 is made a video recording.

The details of above-mentioned clearing apparatus 562 are as shown in Figure 13, Figure 14.Clearing apparatus main body 600 is fixed on above-mentioned sliding part 570, as the part performance function of sliding part 570.In clearing apparatus main body 600, two roller holding devices 602 (side is only shown in Figure 13) along fore-and-aft direction partition distance keep, and maintain rectangular wiper blade 604.Roller holding device 602 is held in donor rollers 606 and take up roll 608 respectively can be around the axis rotation parallel with left and right directions, this donor rollers 606 is as the extraction unit that wiper blade 604 is supplied with to be rolled into the state of web-like, and this take up roll 608 is as the withdrawal portion that the wiper blade of finishing using 604 is reeled.In two roller holding devices 602, the roller holding device 602 that donor rollers 606 is kept forms extraction unit holding device, and the roller holding device 602 that take up roll 608 is kept forms withdrawal portion holding device.In this clearing apparatus 562, donor rollers 606 is only supported for and can be rotated by clearing apparatus main body 600, with respect to this, take up roll 608 rotates by the electro-motor 610 as roll driving apparatus, carry the part from donor rollers 606 to take up roll 608 transition (following, to be called transition part 612) of wiper blade 604.And donor rollers 606 is arranged on rear side, take up roll 608 is arranged on front side.Donor rollers and take up roll both sides rotate by roll driving apparatus, carry wiper blade 604, and can apply tension force or lax to transition part.

Between roller 606,608, be provided with sheet press device 620.Sheet press device 620 comprises pressing component 622 and makes the cylinder 624 of the two ejector half as pressing component drive unit of these pressing component 622 liftings.Pressing component 622 is made up of the expanded material with continuous air bubbles, has in the direction parallel with the axis of roller 606,608 long elongate in shape, and its upper surface forms transition part 612 is pressed on to the press surface 626 on the lower surface of mask 412.The part of the lower surface that is pressed against mask 412 of wiper blade 604 is called cleaning part 627.

In addition, pressing component 622 possesses extension the suction port 628 to press surface 626 openings in its total length.As shown in figure 14, pressing component 622 is kept by holding member 630, and on this holding member 630, possesses opening 632, and this opening 632 has the length roughly the same with suction port 628.Opening 632 has more towards bottom and the shape that cross-sectional area more broadens is connected with negative pressure generating device 634 in its lower end.Negative pressure generating device 634 is well-known structures, therefore omit diagram and detailed explanation, but utilize the pressure drop of surrounding of the nozzle that sprays forced air to produce negative pressure, thereby produce negative pressure at the central portion of the length direction of opening 632 and suction port 628.Consequently, via opening 632, suction port 628 and cleaning part 627, in the total length of suction port 628, roughly attract equably air, and attract sweeping fluid described later together with this air, remain in the scolder in the through hole 420 of mask 412.

In above-mentioned clearing apparatus main body 600, be fixedly provided with the sheet support component 640 that transition part 612 is supported, but move between the lifting position that pressing component 622 is given prominence at the down position of being drawn in downwards by sheet support component 640 with from sheet support component 640 upward by cylinder 624, approach, separate with mask 412, thereby cleaning part 627 is pressed or cleaning part 627 is separated from mask 412 to mask 412.And, cylinder 624 is being held in clearing apparatus main body 600 around the mode of the rotation rotation parallel with fore-and-aft direction by back shaft 642, therefore pressing component 622 is pressed against mask 412 with uniform pressure in total length, thereby ensures that cleaning part 627 connects airtight well in the lower surface of mask 412.

Sweeping fluid is coated on above-mentioned cleaning part 627 by the sweeping fluid apparatus for coating 564 arranging by the rear portion at printing machine 10.As shown in figure 13, sweeping fluid apparatus for coating 564 comprises sweeping fluid dispense tip 652 and the dispense tip mobile device 654 that this sweeping fluid dispense tip 652 is moved along the direction parallel with the axis of roller 606,608, draw back under the state that end position moves at above-mentioned sliding part 570, sweeping fluid dispense tip 652 is installed on printing equipment main body 10 in the mode of the top that is positioned at clearing apparatus 562 (being the cleaning part 627 of wiper blade 604 strictly speaking).The end position that retreats of sliding part 570 is positions that clearing apparatus 562 becomes the state that rearward departs from, keeps out of the way from base plate keeping device 14, mask bracing or strutting arrangement 16, mask holding device 390 and screeding device 392 on fore-and-aft direction, thereby clearing apparatus 562 is positioned at as the retreating position that retreats end position.

Sweeping fluid dispense tip 652 is held in the moving-member 658 being guided by guiding piece 656, this moving-member 658 being by comprising electro-motor 660, pulley 662 and moving with 664 dispense tip mobile device 654, makes thus sweeping fluid dispense tip 652 moving in moving range arbitrarily.Therefore, sweeping fluid dispense tip 652 be defined as cleaning part 627 the cleaning that in fact should carry out mask 412 part and be coated with sweeping fluid.Sweeping fluid is taking solvent as main body, from omitting illustrated sweeping fluid feedway, pressurized and supply with to the nozzle of sweeping fluid dispense tip 652, and the sweeping fluid flatly spraying from nozzle is born by the bearing part 670 arranging in opposite directions with this nozzle, drips to cleaning part 627.

This mask printing equipment control device 680 is as shown in Figure 15 controlled.Control device 680 forms taking computer 682 as main body, be not connected with electro-motor 124 electric actuators such as grade via drive circuit 684 in its input/output section, and, be connected with respectively the fluid actuators such as cylinder 80 etc. and negative pressure generating device 634 via control valve drive circuit 686 and control valve 688 etc.Also directly be connected with each encoder 700 of the servo motor of the drive source of the various devices that form this mask printing equipment in input and output portion, via controlling and image processing apparatus 702 and be connected with reference mark camera head 560, be connected with guidance panel 704 via control circuit 706.Guidance panel 704 possesses operating portion 708 and display frame 710 etc., and operator can limit observes the demonstration of display frame 710, and the input of data, instruction etc. etc. is carried out on limit.And, in the ROM of computer 682, store and control various devices and for carrying out the program shown in the program of printing and the flow chart of Figure 21, Figure 22 of scolder etc.

The printing of the scolder that this mask printing equipment carries out substrate 206 is described.

In the time moving into substrate 206 to this mask printing equipment, as shown in Figure 16 (a), it is retreating position that mask bracing or strutting arrangement 16 is positioned at decline end position, and base plate keeping device 14, baseplate support device 150 are respectively with respect to mask bracing or strutting arrangement 16, side fastener 152 and be positioned at decline end position.And mask absorption support component 62,64 is positioned at rear position, mask absorption support component 64 is not fixed on mask bracing or strutting arrangement main body 60.Rear position is that mask absorption support component 62,64 is adjacent with secure component 156,158 and from being held in the position of the state that the both side ends parallel with carrying direction of substrate 206 of base plate keeping device 14 depart from the horizontal direction or in the direction parallel with mask 412.And movable secure component 158 is positioned at from substrate 206 and separates and not fastening separation point position or off-position.

The substrate 206 of moving into mask printing equipment by substrate transfer apparatus 208 stops at predefined stop position in carrying direction.This position is to be scheduled to the carrying direction Shang center of substrate 206 and the carrying direction Shang center of mask 412 position when consistent.On fore-and-aft direction, mask frame bearing piece 400 moves by fore-and-aft direction regulon 434, thus, move position when mask 412 is consistent to the center of being scheduled to both according to the size of substrate 206, under substrate 206 state consistent with mask 412 center, prints.

After substrate 206 stops, as shown in Figure 16 (b), mask absorption support component 62,64 forwards moves position.Anterior position is that substrate bearing plane 92 is positioned at secure component 156,158 and the position with 200 top.And base plate keeping device 14 rises with respect to mask bracing or strutting arrangement 16, as shown in Figure 16 (c), secure component 156,158 and substrate bearing plane 92 butts.

Next, baseplate support device 150 rises with respect to side fastener 152.As shown in Figure 16 (d), supporting pin 234 contacts with substrate 206 thus, by substrate 206 from being with 200 to lift, make its both side ends respectively with substrate bearing plane 92 butts.If the climb of baseplate support device 150 is excessive, the active force that supporter 68 overcomes spring 86 rotates and keeps out of the way, thereby avoids the damage of substrate 206.

Next, secure component drive unit 160 is worked, makes movable secure component 158 approach substrate 206, in the near future as shown in Figure 16 (e), and fixing secure component 156 between clamp substrate 206 and fixed.After fastening, supply with negative pressure to supporting pin 234, absorption substrate 206, is supported with the attitude of level by supporting surface 236.

After absorption, as shown in Figure 16 (f), base plate keeping device 14 is declined with respect to mask bracing or strutting arrangement 16, secure component 156,158 and substrate 206 are separated from substrate bearing plane 92.And, as shown in Figure 16 (g), mask absorption support component 62,64 is rearward retreated position, mask is adsorbed to support component 64 and be fixed on mask bracing or strutting arrangement main body 60.

Next, as shown in Figure 16 (h), make base plate keeping device 14 increase with respect to mask bracing or strutting arrangement 16, make secure component 156,158 and substrate 206 between mask absorption support component 62,64, make their upper surface be positioned at the plane identical with mask supporting surface 90.Under this state, inclined side 94 is closer to each other and in opposite directions with inclined side 168,194, but as shown in Figure 4, the length direction with respect to scraper plate 546 in top view of the gap between them tilts.Therefore,, in the time of the printing of scolder, scraper plate 546 can not drop in the gap between mask absorption support component 62,64 and secure component 156,158.In addition, in Figure 16, for easy understanding, the gap between substrate 206 and secure component 156,158 is illustrated turgidly, although therefore the gap between inclined side 94,194 illustrates significantly, in fact little than it.

And, reference mark camera head 560 is moved, carry out on mask 412, substrate 206 shooting of the mark forming respectively, both the obtaining of position deviation, correction etc.Above-mentioned shootings etc. are well-known, and description thereof is omitted.After shooting, reference mark camera head 560, in carrying direction, departs from from the space between mask 412 and substrate 206, moves to the retreating position of keeping out of the way.

And, make mask bracing or strutting arrangement 16 increase.Base plate keeping device 14 is stopped with respect to mask bracing or strutting arrangement 16, rise together with mask bracing or strutting arrangement 16 and approach mask 412, as shown in Figure 16 (i), each upper surface of mask supporting surface 90 and secure component 156,158 and substrate 206 is contacted with the lower surface of mask 412.The position of mask absorption support component 62,64 is now Support Position, mask supporting surface 90 is that the ratio of the lower surface of mask 412 makes part that secure component 156,158, substrate 206 carry out contact separation part in the outer part, contact with the two parts that depart from from the both side ends of substrate 206, and from attracting hole 98 to attract air and adsorb mask 412, its lower surface is supported.And, scraper plate 546 is contacted with the upper surface of mask 412, move along this upper surface, thereby scolder is moved, fill and substrate 206 is printed to through hole 420.

After printing, substrate 206 is separated from mask 412.In the present embodiment, mask bracing or strutting arrangement 16 is declined keeping mask absorption support component 62,64 to adsorb under the state of mask 412.Base plate keeping device 14 is keeping under the state rising with respect to mask bracing or strutting arrangement 16, declines with mask bracing or strutting arrangement 16 one.Therefore, as shown in Figure 16 (j), mask 412 is stretched and bending downwards by mask absorption support component 62,64, and substrate 206 declines with the state that keeps contacting with mask 412.

Mask absorption support component 62,64 and substrate 206 sharply stop under the state of the distance of allowing by the strain of mask retention tab 414 that declined integratedly.Thus, produce the inertia force towards the direction of substrate 206 at the scolder that is attached to substrate 206 to the interior filling of through hole 420, thereby adhesive force increases.After stopping, keeping under the state of mask absorption support component 62,64 absorption masks 412, mask bracing or strutting arrangement 16 and base plate keeping device 14 rise on the position during integratedly to printing shown in Figure 16 (i).After rising, the absorption of mask being adsorbed to 62,64 pairs of masks 412 of support component is removed.And, base plate keeping device 14 is declined with respect to mask bracing or strutting arrangement 16, support under the state of mask 412 at mask absorption support component 62,64, substrate 206 is separated with low speed from mask 412, the scolder having increased to the adhesive force of substrate 206 has been extracted from through hole 420 effectively.

After separation, mask bracing or strutting arrangement 16 declines with the speed higher than the separating rate separating from mask 412 of substrate 206, and base plate keeping device 14 also integratedly declines.Between this decrement phase, the fastening releasing by side fastener 152 to substrate 206, and baseplate support device 150 is declined with respect to side fastener 152, substrate 206 is loaded in being with on 200.In addition, also the operation shown in Figure 16 (j) can be omitted, after printing finishes, under the state of removing in the absorption of mask being adsorbed to 62,64 pairs of masks 412 of support component, base plate keeping device 14 is declined with respect to mask bracing or strutting arrangement 16, mask 412 is supported under the state of mask absorption support component 62,64, substrate 206 is separated from mask 412.

Cleaning to mask 412 describes.

If because printing makes the lower surface of mask 412 remain dirt or remains scolder at through hole 420, printing quality declines, and therefore will carry out the cleaning of mask 412.In the time of cleaning, mask bracing or strutting arrangement 16 is positioned at retreating position, and base plate keeping device 14 and baseplate support device 150 are all positioned at decline end position, separate from mask 412.Clearing apparatus 562 is kept out of the way to retreating position in the time not cleaning, and allows that substrate 206 grades contact to mask 412, in the time of cleaning, forwards moves from retreating position, enters in the space between base plate keeping device 14 and mask bracing or strutting arrangement 16 and mask 412.

And, by cylinder 624 make pressing component 622 upwards raise-position be set up liter, press surface 626 is pressed the cleaning part of wiper blade 604 627 to the lower surface of mask 412.Under this state, forwards linearity ground is mobile by mobile device 566 for clearing apparatus 562, and pressing component 622 moves along the lower surface of mask 412, and by the dirt of the lower surface of cleaning part 627 wiping masks 412.The retreating position of clearing apparatus 562 is set in the rear portion of mask printing equipment, and, drive the take up roll 608 rotating to be arranged on front side with respect to donor rollers 606 by electro-motor 610, therefore clearing apparatus 562 is pressed against in wiper blade 604 under the state of mask 412 and only forwards moves from retreating position, wiper blade 604 due to and mask 412 between friction and can not carry out wiping from roller 606,608 with being drawn out.Therefore, mask absorption support component 62 sides of being located at front side of wiping in a pair of mask absorption support component 62,64 finish, and the state separating from mask 412 in wiper blade 604, clearing apparatus 562 returns to retreating position.In this mask printing equipment, by cleaning along moving the movement on the fore-and-aft direction of mask 412 and lifting including pressing component 622.

Should make the width etc. of the mask retention tab 414 of width based on substrate 206 of motion that pressing component 622 produces and mask body 410 and determine in when cleaning.As shown in Figure 17 (a), the end of close substrate 206 1 sides of the supported portion that the mask absorption support component 62 by being positioned at cleaning end side of mask 412 supports, and the distance L between the border of mask 412 and mask retention tab 414 is the width F of mask supporting surface 90 and more than the width W sum of cleaning part 627, cleaning part 627 is pressed under the pressed state of lower surface of mask 412 in maintenance, existence makes this cleaning part 627 move to the situation of the required enough distances in the position left to the opposition side of substrate 206 from the supported portion of mask 412, the motion that should make pressing component 622 produce is decided to be following motion: as shown in Figure 17 (b), cleaning part 627 being moved to make under the above-mentioned state that leaves position after clearing apparatus 562 stops, as shown in Figure 17 (c), pressing component 622 is declined, cleaning part 627 vertically and is as the crow flies separated downwards with mask 412.This motion is called and leaves position moving movement.At this, the border of mask 412 and mask retention tab 414 delimited by the end of mask 412 sides of mask retention tab 414.In addition, in Figure 17 and Figure 18, become miscellaneous for fear of diagram, even if be in fact pressed against on the position of state of mask 412 in wiper blade 604, the also state diagram clearing apparatus 562 to separate.And, what approached, separate with mask 412 by lifting is pressing component 622, donor rollers 606 and take up roll 608 do not approach, separate, but in order easily to understand the lifting of pressing component 622, illustrate the also state of a lifting of donor rollers 606 and take up roll 608.For the Figure 19 illustrating below and Figure 20 too.

As shown in Figure 17 (a), the width C of width S, the width B of substrate 206 and the part contacting with mask 412 of secure component 156 of the width M of above-mentioned distance L by mask frame, mask retention tab 414 obtains.Width M and width C and above-mentioned width F and width W are fixing set value in the structure of mask printing equipment.Width M is also the width of mask body 410.Width S and width B are the values that can change according to the kind of the kind of mask body 410, substrate 206, as described later, inputted by operator, but obtain the width of mask 412 by computing according to width S and width M, obtain distance L, therefore the input of width S is the input of the information relevant to the size of mask 412.In the situation that making pressing component 622 generations leave position moving movement, the end that cleaning starting position is made as the downstream of cleaning part 627 is positioned at compared with the upper end with upstream side of the moving direction (rear side is to the front side) part contacting with substrate 206, in the time of cleaning of mask 412 such position, position that side has upstream separated ship clearance A, and the above-mentioned position of leaving is made as cleaning end position.Ship clearance A is set value, but also can change.Above-mentioned position can be considered to determine taking the width B of substrate 206 as benchmark.So be decided to be and leave the moving movement of position in the motion that should make pressing component 622 produce, as shown in Figure 17 (c), be carried to the position of departing from from the supported portion of mask 412 by the scolder after cleaning part 627 wipings, in the time that mask absorption support component 62 supports mask 412, can not adhere to.

With respect to this, as shown in figure 18, width at substrate 206 is large, mask absorption support component 62, a part of 64 becomes in the situation with mask retention tab 414 state in opposite directions, above-mentioned distance L is than in the little situation of the width W sum of the width F of mask supporting surface 90 and cleaning part 627, the motion that should make pressing component 622 produce is decided to be following motion: as shown in Figure 18 (a), after the end of the part contacting with substrate 206 of mask 412 has exceeded supported portion side, as shown in Figure 18 (b), before arriving the border of mask 412 and mask retention tab 414, in making cleaning part 627 continue to move in the direction parallel with the lower surface of mask 412, separate with the lower surface of mask 412, wipe action.This motion is called and wipes motion.By wiping action, cleaning part 627 separates obliquely with respect to mask 412, at this, as shown in Figure 18 (a), cleaning part 627 by the part contacting with substrate 206 of mask 412 to supported portion side by after position be made as wipe action starting position, the separation starting position that cleaning part 627 separates from mask 412.And, cleaning starting position with leave position moving movement and similarly determine, the end in the downstream on moving direction in the time of cleaning that cleaning end position is made as cleaning part 627 is positioned at the position on the border of mask 412 and mask retention tab 414.

According to this mask printing equipment, can carry out dry type wiping and wet type wiping, this dry type wiping refers to: under the state of lower surface that wiper blade 604 is pressed on to mask 412, pressing component 622 is moved along mask 412, make wiper blade 604 wipings be attached to the scolder of the lower surface of mask 412; This wet type wiping refers to: make sweeping fluid infiltrate wiper blade 604, this wiper blade 604 pressed on to the lower surface of mask 412, along mask 412 move and wiping be attached to the lower surface of mask 412 scolder, be attached to the scolder of the inner peripheral surface of through hole 420.At this, supply with negative pressure to the suction port 628 of pressing component 622, follow the attraction of dirt and carry out wet type wiping, and making pressing component 622 slow speed when than dry type wiping move to carry out wet type wiping.And, at this, carry out in the situation of wet type wiping, and then carry out dry type wiping.So, wet type wiping is the cleaning more careful than dry type wiping, at this, will only have the cleaning of dry type wiping as common cleaning, using wet type wiping as special cleaning.Cleaning is in the time that set point number is carried out in printing and carry out, but special cleaning is carried out once after having carried out set point number in cleaning conventionally.In addition, the translational speed of the pressing component 622 when wet type wiping can be set as size arbitrarily.

In the time carrying out dry type wiping, clearing apparatus 562 is from cleaning starting position after cleaning end position moves, and cleaning part 627 returns to retreating position with the state separating from mask 412.During this period or next cleaning start time, carry wiper blade 604, cleaning part 627 is made up of new and clean wiper blade 604.In the time carrying out wet type wiping, before clearing apparatus 562 moves from retreating position to cleaning starting position, be coated with sweeping fluid by sweeping fluid dispense tip 652 to cleaning part 627.And, moistening cleaning part 627 is contacted with mask 412 and carry out wiping, after cleaning end position moves, cleaning part 627, under the state separating from mask 412, moves and carries wiper blade 604 to cleaning starting position, and cleaning part 627 is clean face.And cleaning part 627 moves with the state contacting with mask 412 and carries out wiping, after cleaning end position moves, the state separating from mask 412 at cleaning part 627, clearing apparatus 562 returns to retreating position.

At this, in the time of special cleaning, carry out amount of residual solder and remove.It is following operation that amount of residual solder is removed: move at clearing apparatus 562 under the state of cleaning end position, collect by the wiping based on cleaning part 627, thereby be the soil release of the separating part of cleaning part 627 by the part corresponding with cleaning end position that remains in mask 412.Therefore, clearing apparatus 562 is worked in the mode of the separating part separating with cleaning part 627 by wiper blade 604 wiping masks 412.

To leave the moving movement of position in the motion that should make pressing component 622 produce, as shown in Figure 17 (c), cleaning part 627 is stopped at through the position of supported portion of mask 412, and vertically separate from mask 412, therefore, scolder remains in the part that cleaning part 627 contacts in the time that the cleaning of mask 412 finishes.This part is the separating part that wiper blade 604 is separated in the latter stage of cleaning operation.Therefore, as shown in Figure 19 (a), if position when cleaning part 627 is finished with respect to cleaning moves to the position adjacent in downstream with cleaning position while finishing as shown in Figure 19 (b) from the position adjacent with the upstream side of the moving direction in when cleaning, can wiping residue in the scolder of mask 412.Therefore, as shown in Figure 19 (a), the downstream side of cleaning part 627 position consistent with the end of the opposition side supported portion, substrate 206 of mask 412 is made as to amount of residual solder and removes starting position, as shown in Figure 19 (b), by remove from amount of residual solder starting position downstream side shifting the position of distance of twice of width W of cleaning part 627 be made as amount of residual solder and remove end position.As shown in Figure 19 (a), the width F of the width B of the position of above-mentioned position based on substrate 206, substrate 206, the width C of secure component 156, mask supporting surface, the width W of cleaning part 627 and computing.The position of substrate 206 obtains by the stop position of substrate 206 and the size of substrate 206.

Be to wipe motion in the case of making the motion that pressing component 622 produces, as shown in Figure 20 (a), the above-mentioned action starting position that wipes is made as to amount of residual solder and removes starting position, as shown in Figure 20 (b), be made as amount of residual solder and remove end position wiping cleaning end position in motion.Scolder is on the fore-and-aft direction of mask 412, remain in the part that makes cleaning part 627 move and decline along mask 412, mask 412 be the separating part that makes wiper blade 604 separation latter stage in cleaning operation from wiping action starting position to part corresponding to cleaning end position.

In addition, to leave the moving movement of position in the motion that should make pressing component 622 produce, above-mentioned distance L is than width F and little apart from 2W sum, the end of the opposition side of substrate 206 sides of the supported portion of mask 412, and mask 412 and the border of mask retention tab 414 between distance than apart from the little situation of 2W, the position that the downstream side of cleaning part 627 is positioned to the border of mask 412 and retention tab 414 is made as amount of residual solder and removes end position.Remove starting position and amount of residual solder while removing the computing of end position in amount of residual solder, the end of the opposition side of substrate 206 sides of the supported portion of mask 412, and mask 412 and the border of mask retention tab 414 between distance obtain by deduct width F from distance L, and with compare apart from 2W.Even if this distance is larger than width W, but than little apart from 2W in the situation that, should make the motion that pressing component 622 produces also can be for wiping motion.

Amount of residual solder is removed by dry type wiping or wet type wiping and is undertaken.In the situation that being undertaken by dry type wiping, cleaning part 627 is removed starting position from cleaning end position to amount of residual solder with the state separating from mask 412 and is moved.Now, carry wiper blade 604 and the stained face of reeling, cleaning part 627 is new and clean face.Pressing component 622 is removed on starting position and to be risen and after cleaning part 627 being pressed on to the lower surface of mask 412 in amount of residual solder, keeps pressed state and removes end position to amount of residual solder and move, cleaning part 627 wiping amount of residual solder.Pressing component 622 amount of residual solder remove end position stop after decline, cleaning part 627 with respect to mask 412 as the crow flies downwards separate.

Carrying out amount of residual solder by wet type wiping while removing, clearing apparatus 562 moves to cleaning end position, and cleaning part 627 returns to retreating position with the state separating from mask 412.And, carry wiper blade 604 and be coated with sweeping fluid to the cleaning part 627 of clean face.Under this state, clearing apparatus 562 is removed starting position to amount of residual solder and is moved, and cleaning part 627 is contacted with mask 412, carries out removing based on the amount of residual solder of wet type wiping.Pressing component 622, removing to amount of residual solder after end position moves, separates downwards as the crow flies with respect to mask 412, removes starting position move to amount of residual solder.And, carry wiper blade 604 and make cleaning part 627 for clean state contacts with mask 412, carry out dry type wiping.After wiping finishes, clearing apparatus 562 is kept out of the way to retreating position.

Based on the flow chart shown in Figure 21, explanation should make the decision of the motion that pressing component 622 produces, the setting of cleaning content.This setting is to carry out before the beginning of the solder printing to a series of substrate 206, step 1 (after, referred to as S1.Also identical in other step) in, message and the cuit etc. of urging the input of the width B of substrate 206 and the width S of mask retention tab 414 to carry out in display frame 710, shown.Next carry out S2, input whether complete judgement.Each width B, the width S of operator's input substrate 206 and mask retention tab, before inputting complete instruction input, carry out S1, S2 repeatedly.

If input completely, the judgement of S2 becomes "Yes" and carries out S3, and width B and width S are stored in width data memory.Width data memory is located at the RAM of computer 682 and is formed memory cell.Next carry out S4, the width B of the substrate 206 based on inputted and the width S of mask retention tab 414 and set value and the motion, cleaning starting position and the cleaning end position that determine to make pressing component 622 produce.Set value is width F, the ship clearance A of the mask supporting surface 90 of width C, the mask absorption support component 62,64 of the part contacting with mask 412 of width W, the secure component 156,158 of width M, the cleaning part 627 of mask frame 416 at this, first, as illustrated based on Figure 17 and Figure 18, calculate distance L, motion is determined as leaving position moving movement and wiping any in motion.

Next carry out S5, message and the cuit etc. of the input of urging cleaning content are presented in display frame 710.At this, as cleaning content, input the content of the execution interval of the execution interval of cleaning conventionally, special cleaning, common cleaning, the content of special cleaning.Conventionally the execution interval of cleaning and special cleaning is set by the input of print pass N1, N2 respectively.The check result of for example print inspection machine based on scolder is checked to the printing state of substrate 206 of this execution interval and setting, for example, by checking that to be judged to be to print the ratio of bad substrate 206 higher, print pass is set lesser, cleans continually.Conventionally the content of cleaning is by being that arbitrary selection of carrying out dry type wiping is once or twice set, and the content of special cleaning only shows in this decision, is wet type wiping once and the dry type wiping once and then carried out.Conventionally the enforcement of cleaning is necessary, but the enforcement of special cleaning is arbitrarily, by inputting and do not carry out cleaning especially to print pass N2 input 0.And in the situation that carrying out special cleaning, as print pass N2, input ratio print pass N1 is large and be the value of integral multiple, having carried out { (N2/N1), after the common cleaning of-1} time, carrying out special cleaning once.

Next carry out S6, input whether complete judgement.Before input is complete, repeatedly carry out S5, S6, if input completely, being judged to be "Yes" of S6 and carry out S7, by should making of determining in the S4 motion that pressing component 622 produces etc. and conventionally clean content and be stored in common cleaning memory.

Next carry out S8, in S5, determine whether and set special cleaning.This judges by print pass N2 whether do not carry out as 0, if 0 is not cleaned especially, the judgement of S8 becomes "No" and the execution of routine finishes.If print pass N2 is not 0, being judged to be "Yes" of S8 and carry out S9 shows the mode (i) that amount of residual solder removes～(iii), operator is selected in display frame 710.Amount of residual solder remove with special cleaning similarly, { (N2/N1), after the common cleaning of-1} time, carry out once, in the time carrying out (N2/N1) inferior cleaning, carry out once having carried out.In S9, also to clean especially and implement to indicate that F is set to 1, the situation of special cleaning is carried out in storage.And, in S10, input whether complete judgement, before input is complete, repeatedly carry out S9 and S10.

If input completely, the judgement of S10 becomes "Yes" and carries out S11, determines whether that carrying out amount of residual solder removes.In S9, selection mode (ii) or mode (iii), if select amount of residual solder to remove enforcement, the judgement of S11 becomes "Yes" and carries out S12, as illustrated based on Figure 19 and Figure 20, set starting position and end position that amount of residual solder is removed.After setting, carry out S13, should making of determining in the S4 motion that pressing component 622 produces etc. and amount of residual solder are removed to starting position, the end position that content, amount of residual solder remove and be stored in special cleaning memory together with special cleaning content.Remove if do not carry out amount of residual solder, the judgement of S11 becomes "No" and carries out S14, should make motion that pressing component 622 produces etc. and clean especially content to be stored in special cleaning memory.

After scolder starts to the printing of substrate 206, carry out the mask cleaning routine shown in Figure 22.In the S21 of this routine, for a substrate 206, carry out the judgement whether printing of scolder finishes.Before printing finishes, repeatedly carry out S21, if printing finishes, the judgement of S21 becomes "Yes" and carries out S22, each count value C1, the C2 of first, second counter increases by 1, counts respectively to the print pass for carrying out cleaning conventionally and for the print pass of carrying out special cleaning.Next,, in S23, for whole substrate 206, judge whether the printing of scolder finishes.Whether, if not last substrate 206, S23 becomes "No" and carries out S24, judge the count value C1 of the print pass counting for carrying out cleaning conventionally as more than the print pass N1 first inputting.Take a decision as to whether and carry out the period of cleaning conventionally, if printing is not yet carried out N1 time, S24 becomes "No" and carries out S21.

Carry out, before N1 time, repeatedly carrying out S21～S24 in printing.If printing is carried out N1 time, the judgement of S24 becomes "Yes" and carries out S25, implements mark and whether carries out the judgement of cleaning especially according to whether being provided with special cleaning.If clean especially, the judgement of S25 becomes "Yes" and carries out S26, judges that whether the count value C2 of the second counter is as more than the print pass N2 first inputting.Judge whether print pass has reached the number of times that carries out special cleaning, if not yet reach print pass N2, S26 becomes "No" and carries out S27, and count value C1 is reset to 0.And, carry out S28, the motion of reading common cleaning content and pressing component 622 from common cleaning memory, carries out S29 according to them, carries out mask cleaning.

Due to count value, C2 does not reset, and therefore in the time next carrying out S22, count value C1 is since 0 counting, but the value of count value C2 during from the execution of previous S22 continues to increase.Before count value C2 becomes more than N2, repeatedly carry out S21～S29, if more than becoming N2, the judgement of S26 becomes "Yes" and carries out S30.And, after count value C1, C2 are reset, carry out S31, the motion of reading special cleaning content and pressing component 622 from special cleaning memory, carries out S32 according to its content, cleans.If the enforcement that amount of residual solder is removed is set, carries out amount of residual solder according to setting and remove.

In S30, count value C1, C2 are reset, and thus, in the time next carrying out S22, all count from 0, in the time that printing is carried out N1 time, conventionally clean, and in the time that printing is carried out N2 time, clean especially.For predetermined whole substrate 206, if print, the judgement of S23 becomes "Yes" and carries out S33, carries out count value C1, C2 and cleans especially the replacement of implementing mark and the execution that finishes routine.In the situation that not carrying out special cleaning, the judgement of S25 becomes "No" and carries out S27～S29, conventionally cleans.And, before the judgement of S23 becomes "Yes", repeatedly carry out S21～S25, S27～S29, in the time carrying out the printing of N1 time, conventionally clean.

From the above description, in the present embodiment, mobile device 566 and cylinder 624 form pressing component mobile device, mask support component lowering or hoisting gear 110 and base plate keeping device lowering or hoisting gear 250 form approach/separator, and mask support component lowering or hoisting gear 110 forms mask support component mobile device.And guidance panel 704 forms input unit, the part of the execution S4 of control device 680 forms motion determination section, and the part of carrying out S29 and S32 forms cleaning enforcement division, and they form cleaning control device.

In addition, can in the time carrying out one-step print, once clean, this cleaning also can be undertaken by special cleaning.And, in the time conventionally cleaning, also can carry out amount of residual solder and remove.And, in the time of special cleaning, also can carry out all the time amount of residual solder and remove.

For example removing of residual print paste can be supplied with negative pressure to the suction port of pressing component 622 628, attracts scolder, and makes pressing component 622 lifting and make cleaning part 627 beat mask 412 repeatedly gradually, carries out thus dry type wiping or wet type wiping.For example, can pass through the control of control valve 688, cut at short notice the compressed-air actuated supply of two air chambers of reversing cylinder 624, carry out thus the past Complex motion gradually of pressing component 622, the vibration bringing device of electromagnetic type also can be set and make pressing component up-down vibration, carry out thus the past Complex motion gradually of pressing component 622.Can form vibration bringing device by ultrasonic wave vibration device.

Or can pass through pressing component 622, cleaning part 627 is pressed to the part that remains scolder of mask 412, keeping making under the state that pressing component 622 stops, carry by take up roll 608 coiling wiper blade 604, the face of the wiping mask 412 of wiper blade 604 is changed into the new clean face that there is no dirt, and the residual scolder of wiping.In the time that wiper blade is circulating sheet, wiper blade is pressed to mask, under the state that keeps making pressing component to stop, making wiper blade circulation and carry, the part of the formation cleaning part of wiper blade is changed into clean face, and wiping amount of residual solder.So wiper blade is pressed on to mask, under the state that keeps pressing component is stopped, carrying wiper blade and wiping amount of residual solder, what preferably pressing component produced reduces to the pressing force of mask cleaning part during than cleaning.

In addition, no matter be for common cleaning, or for special cleaning, its cleaning content can suitably be set by user, for example, can will carry out continuously the dry type wiping of twice as special cleaning, also can be using the continuous wet type wiping of twice and dry type wiping once afterwards as special cleaning.

And, in the time of dry type wiping, can supply with negative pressure and carry out the attraction of print paste to pressing component.

In addition, be no matter clearing apparatus remove Cheng Yidong time or backhaul while moving, can carry out by wiper blade the wiping of mask.In this case, extraction unit and withdrawal portion are all preferably the structure of rotating by motor.In cleaning when cleaning in the time removing Cheng Yidong and backhaul are moved, clearing apparatus leaves respectively position moving movement and wipes any of motion.Motion can be identical in the time removing Cheng Yidong and when backhaul is moved, also can be different.

In addition, clearing apparatus entirety also can be by lowering or hoisting gear and lifting, make thus pressing component lifting and approach, separate with mask, thereby make wiper blade with mask contact, separate.In this case, pressing component mobile device is clearing apparatus mobile device.

In addition, pressing component is produced wipe motion in the situation that, can be the part that presses on mask of wiper blade after the end of a side of close circuit substrate of the part contacting with mask support component that has exceeded mask, start to wipe action.

Description of reference numerals

10: printing equipment main body 14: base plate keeping device 16: mask bracing or strutting arrangement 18: mask holding device 62,64: mask absorption support component 392: screeding device 412: mask 562: clearing apparatus 604: wiper blade 680: control device

Claims

1. a mask printing process, is the method for print paste being printed to circuit substrate by mask printing equipment, and described mask printing equipment comprises:

Mask holding device, keeps the mask that is formed with multiple through holes;

Base plate keeping device is held in parallel with this mask by circuit substrate below the mask being kept by described mask holding device;

Screeding device, moves along the mask being kept by described mask holding device, makes to load print paste in the upper surface of this mask by described multiple through holes, and the circuit substrate being kept by described base plate keeping device is printed;

Approach/separator, by making described mask holding device and the relatively lifting of described base plate keeping device, and make the mask that kept by mask holding device closer to each other with the circuit substrate being kept by base plate keeping device/separate;

A pair of mask support component, be positioned at the mask being kept by described mask holding device, from being held in that two parts that the both side ends of circuit substrate of described base plate keeping device departs from contact or approaching Support Position, in the time utilizing described screeding device to print with utilize at least one party of described approach/separator when mask is separated with circuit substrate, the lower surface of mask is supported;

Clearing apparatus, comprise the extraction unit that (a) extracts rectangular wiper blade out, (b) the withdrawal portion this wiper blade being regained and (c) have and will press on the pressing component of the press surface on the lower surface of described mask in the described wiper blade of extending between described extraction unit and withdrawal portion, this clearing apparatus enters into by described approach/separator between the mask and circuit substrate after separated from one another, move along the lower surface of mask on one side, carry out on one side the lower surface of wiping mask by pressed on described wiper blade on the lower surface of described mask by described pressing component, and

Mask support component mobile device, in the time utilizing described screeding device to print with utilize the described at least one party of described approach/separator when mask is separated with circuit substrate, make described a pair of mask support component be positioned at described Support Position, in the time utilizing described clearing apparatus to clean, above-mentioned a pair of mask support component is kept out of the way from described Support Position

Described mask printing process is characterised in that,

Utilizing described screeding device to print after print paste, by described approach/separator make mask and circuit substrate separated from one another, and by described mask support component mobile device, described a pair of mask support component is kept out of the way from described Support Position, under this state, described clearing apparatus is cleaned, in the time of this cleaning, after the part that part on the lower surface that is pressed on described mask by described pressing component that makes described wiper blade contacts from the mask support component with being positioned at described Support Position of this mask moves to the position of leaving to the opposition side of described circuit substrate, separate from the lower surface of described mask.

2. a mask printing process, is the method for print paste being printed to circuit substrate by mask printing equipment, and described mask printing equipment comprises:

Mask holding device, opens and is located at the mask body forming on mask frame and keeps via the coefficient of elasticity low elasticity coefficient sheet less than the coefficient of elasticity of described metal film-making the mask that is formed with multiple through holes in metal film-making;

Described mask printing process is characterised in that,

Utilizing described screeding device to print after print paste, by described approach/separator make mask and circuit substrate separated from one another, and by described mask support component mobile device, described a pair of mask support component is kept out of the way from described Support Position, under this state, described clearing apparatus is cleaned, in the time of this cleaning, after the end of the part at least contacting with circuit substrate of this mask has exceeded the part side contacting with described mask support component, before arriving the border of this mask and described low elasticity coefficient sheet, what make described wiper blade presses on the part on the lower surface of described mask by described pressing component, in the direction parallel with the lower surface of described mask, proceed mobile on one side, carry out the action that wipes separating from the lower surface of this mask on one side.

3. mask printing process according to claim 2, wherein,

In the time utilizing described clearing apparatus to clean mask, in the end of a side of the close described circuit substrate of the part contacting with described mask support component of mask, and between the border of described mask and described low elasticity coefficient sheet, part on the lower surface that is pressed on described mask by described pressing component of described wiper blade is being remained under the state of pressed state, when exist from the part contacting with described mask support component of described mask move to the position left to the opposition side of described circuit substrate required enough apart from time, after moving to this position, separate from mask, when do not exist this apart from time wipe action described in carrying out.

4. according to the mask printing process described in any one in claim 1～3, wherein,

Use mask absorption support component as described mask support component, described mask absorption support component has the attraction hole in upper surface open, supports described mask by attracting air to adsorb from this attraction hole.

5. according to the mask printing process described in any one in claim 1～4, wherein,

Comprise that residual print paste removes operation: make described wiper blade again described in wiping the latter stage in described cleaning operation of mask be separating part with the part that described wiper blade separates, thus the print paste that residues in this separating part is removed.

6. a mask printing equipment, is characterized in that, comprising:

Mask holding device, keeps the mask that is formed with multiple through holes;

Clearing apparatus, comprise the extraction unit that (a) extracts rectangular wiper blade out, (b) the withdrawal portion this wiper blade being regained and (c) have and will press on the pressing component of the press surface on the lower surface of described mask in the described wiper blade of extending between described extraction unit and withdrawal portion, this clearing apparatus enters into by described approach/separator between the mask and circuit substrate after separated from one another, move along the lower surface of mask on one side, carry out on one side the lower surface of wiping mask by pressed on described wiper blade on the lower surface of described mask by described pressing component,

Pressing component mobile device, produces in order to make described wiper blade carry out the required motion of wiping to the lower surface of mask the described pressing component of this clearing apparatus;

Cleaning control device, controls the movement of described pressing component by controlling this pressing component mobile device; And

Mask support component mobile device, in the time utilizing described screeding device to print with utilize the described at least one party of described approach/separator when mask is separated with circuit substrate, make described a pair of mask support component be positioned at described Support Position, in the time utilizing described clearing apparatus to clean, described a pair of mask support component is kept out of the way from described Support Position

And described cleaning control device comprises:

Input unit, can input the information relevant to the size of the mask being kept by described mask holding device and the circuit substrate that kept by described base plate keeping device; And

Motion determination section, based on the described information of being inputted by this input unit, to should make described pressing component produce in order to make described wiper blade carry out wiping to the lower surface of described mask, approaching/separating and determining as to move as follows along moving the movement of mask to mask including this pressing component: what make described wiper blade presses on the part on the lower surface of described mask by described pressing component, the part contacting from the mask support component with being positioned at described Support Position of this mask, after moving to along mask the position of leaving to the opposition side of described circuit substrate, separate from the lower surface of described mask.

7. a mask printing equipment, is characterized in that, comprising:

And described cleaning control device comprises:

Input unit, can input the information relevant to the size of the mask being kept by described mask holding device and low elasticity coefficient sheet and the circuit substrate that kept by described base plate keeping device; And

Motion determination section, based on the described information of being inputted by this input unit, to should make described pressing component produce in order to make described wiper blade carry out wiping to the lower surface of mask, approaching/separating with moving movement along mask and determine as to move as follows to mask including this pressing component: after the end of the part at least contacting with circuit substrate of this mask has exceeded the part side contacting with described mask support component, before arriving the border of this mask and described low elasticity coefficient sheet, what make described wiper blade presses on the part on the lower surface of described mask by described pressing component, in the direction parallel with the lower surface of described mask, proceed mobile on one side, carry out the action that wipes separating from the lower surface of this mask on one side.

8. mask printing equipment according to claim 7, wherein,

In the time utilizing described clearing apparatus to clean mask, in the end of a side of the close described circuit substrate of the part contacting with described mask support component of mask, and between the border of mask and low elasticity coefficient sheet, part on the lower surface that is pressed on described mask by described pressing component of described wiper blade is being remained under the state of pressed state, when exist from the part contacting with described mask support component of described mask move to the position left to the opposition side of described circuit substrate required enough apart from time, described motion determination section should make the motion that described pressing component produces determine the motion separating from mask for after moving to this position, when do not exist this apart from time, described motion determination section should make motion that described pressing component produces determine the motion for wiping action described in carrying out.

9. according to the mask printing equipment described in any one in claim 6～8, wherein,

Described a pair of mask support component is respectively mask absorption support component, and described mask absorption support component has the attraction hole in upper surface open, by attracting air to adsorb support mask from this attraction hole.