CN103920688B - A kind of buckle being installed on cleaning machine for cleaning semiconductor chip - Google Patents
A kind of buckle being installed on cleaning machine for cleaning semiconductor chip Download PDFInfo
- Publication number
- CN103920688B CN103920688B CN201410156981.9A CN201410156981A CN103920688B CN 103920688 B CN103920688 B CN 103920688B CN 201410156981 A CN201410156981 A CN 201410156981A CN 103920688 B CN103920688 B CN 103920688B
- Authority
- CN
- China
- Prior art keywords
- swivel plate
- lag
- cleaning
- buckle
- gripper shoe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of buckle being installed on cleaning machine for cleaning semiconductor chip, it comprises gripper shoe (1) and clamping device, gripper shoe (1) is provided with blind hole (2) and U-lag (3), blind hole is provided with magnet in (2), clamping device is made up of swivel plate (4) and fixed bar (5), swivel plate (4) is rotated by rotating shaft and is installed on two sidewalls of U-lag (3), the groove (6) that the top of the sidewall that swivel plate (4) is relative with U-lag (3) is provided with, fixed bar (5) is through U-lag (3) and be arranged on swivel plate (4); Gripper shoe (1) is provided with two U-lags (3), in two U-lags (3), is provided with clamping device.The invention has the beneficial effects as follows: bearing capacity is large, clamp chip retainer ring to be cleaned firm, easy to use, can effectively avoid flying out in high-speed rotation chips, cause the injury of product and personnel.
Description
Technical field
The present invention relates to semiconductor chip cleaning technique field, particularly a kind of buckle being installed on cleaning machine for cleaning semiconductor chip, it can avoid flying out of cleaning process chips well.
Background technology
At present; the cleaning machine that most enterprises is used; this cleaning machine is mainly used in cleaning chip and uses; it mainly comprises equipment body, cleaning dish and self-locking buckle; cleaning plate edge is equipped with multiple screwed hole; screwed hole ringwise shape is distributed in cleaning plate edge; before using; chip is fixed on chip retainer ring; again chip is placed in cleaning dish; then the safety cover of closing device, finally just can start cleaning machine, thus carries out high speed and high pressure cleaning to the chip in cleaning dish.But, sometimes because the position of workman's chip placement is not in place, chip is not placed in buckle, the chip of high velocity sweep is flown out together with chip retainer ring in such cleaning chamber, cause the equipment and spare part of surrounding and chip impaired, about 5000 beautiful gold/times of the loss amount of money, and be easy to cause casualties, use very dangerous, and operation also inconvenience.Therefore, this centrifugal force produced by High Rotation Speed starts buckle, centrifugal force just can work after must reaching certain speed, when starting buckle from static reaching in this process of certain speed, namely cannot lock chip retainer ring, cause chip and chip retainer ring to fly out.
The present invention completes clamping by the deadweight of chip retainer ring and the suction of magnet, chip retainer ring acted on fixed bar before this, because the gravity-actuated of chip retainer ring rotates, after chip retainer ring contacts with gripper shoe, chip retainer ring is held by magnet again, thus ensure cleaning machine this process that " reaches certain speed from static ", cleaning machine buckle fastens chip retainer ring always, the centrifugal force that follow-up High Rotation Speed produces can tighter by buckle pressure, is unlikely to the situation that chip flies out and occurs.
Summary of the invention
The object of the invention is to the shortcoming overcoming prior art, the buckle being installed on the cleaning machine for cleaning semiconductor chip that a kind of structure is simple, bearing capacity large, clamping chip retainer ring is firm, esy to use, safe and reliable is provided.
Object of the present invention is achieved through the following technical solutions: a kind of buckle being installed on cleaning machine for cleaning semiconductor chip, it comprises gripper shoe and clamping device, described gripper shoe is provided with blind hole and U-lag, clamping device is provided with in U-lag, magnet is provided with in described blind hole, described clamping device is made up of swivel plate and fixed bar, swivel plate is rotated by rotating shaft and is installed on two sidewalls of U-lag, the groove that the top of the sidewall that swivel plate is relative with U-lag is provided with, fixed bar is through U-lag and to be arranged on swivel plate and fixed bar and swivel plate upper surface are angle arranges.
Described gripper shoe is provided with two U-lags and two U-lags are positioned at the both sides of blind hole, in two U-lags, is provided with clamping device.
Two described U-lags are symmetrical arranged about blind hole.
The rectangular shape of described swivel plate, two long limits of swivel plate rotate respectively by rotating shaft and are installed on two sidewalls of U-lag.
It also comprises mount pad, and mount pad is arranged on the supporting plate, described mount pad is provided with two screwed holes.
The present invention has the following advantages: (1) gripper shoe of the present invention is provided with blind hole, magnet is provided with in blind hole, the groove that the top of the sidewall that swivel plate is relative with U-lag is provided with, fixed bar is through U-lag and to be arranged on swivel plate and fixed bar and swivel plate upper surface are angle arranges, before using, chip is fixed on chip retainer ring, again chip retainer ring is placed on fixed bar, because fixed bar is depressed by the deadweight of chip retainer ring, swivel plate overturns, groove on swivel plate is buckled on chip retainer ring, simultaneously when after chip retainer ring and gripper shoe surface contact, chip retainer ring holds by magnet, thus chip retainer ring is fixed in cleaning dish firmly, the chip of high velocity sweep is effectively prevented to fly out in cleaning dish, safe and reliable, bring conveniently to the operation of workman.(2) gripper shoe of the present invention is provided with two U-lags and two U-lags are positioned at the both sides of blind hole, clamping device is provided with in two U-lags, the groove of two clamping devices is buckled on chip retainer ring simultaneously, adds clamping force and bearing capacity, is applicable to the cleaning machine of different model.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is top view of the present invention;
Fig. 3 is the right view of Fig. 2;
In figure, 1-gripper shoe, 2-blind hole, 3-U shape groove, 4-swivel plate, 5-fixed bar, 6-groove, 7-mount pad, 8-screwed hole.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention will be further described, and protection scope of the present invention is not limited to the following stated:
As Figure 1-3, a kind of buckle being installed on cleaning machine for cleaning semiconductor chip, it comprises gripper shoe 1 and clamping device, described gripper shoe 1 is provided with blind hole 2 and U-lag 3, clamping device is provided with in U-lag 3, magnet is provided with in described blind hole 2, described clamping device is made up of swivel plate 4 and fixed bar 5, swivel plate 4 is rotated by rotating shaft and is installed on two sidewalls of U-lag 3, rotating shaft two ends have " E type snap close ", the groove 6 that the top of the sidewall that swivel plate 4 is relative with U-lag 3 is provided with, fixed bar 5 is through U-lag 3 and to be arranged on swivel plate 4 and fixed bar 5 and swivel plate 4 upper surface are that angle is arranged.
As shown in Figure 1 or 2, gripper shoe 1 is provided with two U-lags 3 and two U-lags 3 are positioned at the both sides of blind hole 2, two U-lags 3 are symmetrical arranged about blind hole 2, are provided with clamping device in two U-lags 3.
The rectangular shape of swivel plate 4, two long limits of swivel plate 4 rotate respectively by rotating shaft and are installed on two sidewalls of U-lag 3, because the upper and lower end structure of swivel plate 4 is different, cause swivel plate 4 upper and lower end weight different, on the rotary shaft can be automatically at an angle.
As shown in Figure 1 or 2, it also comprises mount pad 7, and mount pad 7 is arranged in gripper shoe 1, described mount pad 7 is provided with two screwed holes 8, is threaded connection and is fixed on the staving of cleaning machine by mount pad 7.
The course of work of the present invention is as follows: be fixed on chip retainer ring by chip before using, again chip retainer ring is placed on fixed bar 5, because fixed bar is depressed by the deadweight of chip retainer ring, swivel plate 4 overturns, groove 6 on swivel plate 4 is buckled on chip retainer ring, simultaneously when after chip retainer ring and gripper shoe 1 surface contact, magnet holds chip retainer ring, chip retainer ring is allowed to be close in gripper shoe 1, thus chip retainer ring is fixed in cleaning dish firmly, the chip of high velocity sweep is effectively prevented to fly out in cleaning dish, safe and reliable, bring conveniently to the operation of workman.
Claims (5)
1. one kind is installed on the buckle of the cleaning machine for cleaning semiconductor chip, it is characterized in that: it comprises gripper shoe (1) and clamping device, described gripper shoe (1) is provided with blind hole (2) and U-lag (3), U-lag is provided with clamping device in (3), magnet is provided with in described blind hole (2), described clamping device is made up of swivel plate (4) and fixed bar (5), swivel plate (4) is rotated by rotating shaft and is installed on two sidewalls of U-lag (3), the top of the sidewall that swivel plate (4) is relative with U-lag (3) is provided with groove (6), fixed bar (5) is through U-lag (3) and be arranged on that swivel plate (4) is upper and fixed bar (5) and swivel plate (4) upper surface are that angle is arranged.
2. a kind of buckle being installed on cleaning machine for cleaning semiconductor chip according to claim 1, it is characterized in that: described gripper shoe (1) is provided with two U-lags (3) and two U-lags (3) are positioned at the both sides of blind hole (2), in two U-lags (3), be provided with clamping device.
3. a kind of buckle being installed on cleaning machine for cleaning semiconductor chip according to claim 2, is characterized in that: two described U-lags (3) are symmetrical arranged about blind hole (2).
4. a kind of buckle being installed on cleaning machine for cleaning semiconductor chip according to claim 1, it is characterized in that: described swivel plate (4) rectangular shape, two long limits of swivel plate (4) rotate respectively by rotating shaft and are installed on two sidewalls of U-lag (3).
5. a kind of buckle being installed on cleaning machine for cleaning semiconductor chip according to claim 1, it is characterized in that: it also comprises mount pad (7), mount pad (7) is arranged in gripper shoe (1), described mount pad (7) is provided with two screwed holes (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410156981.9A CN103920688B (en) | 2014-04-18 | 2014-04-18 | A kind of buckle being installed on cleaning machine for cleaning semiconductor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410156981.9A CN103920688B (en) | 2014-04-18 | 2014-04-18 | A kind of buckle being installed on cleaning machine for cleaning semiconductor chip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103920688A CN103920688A (en) | 2014-07-16 |
| CN103920688B true CN103920688B (en) | 2015-11-18 |
Family
ID=51139219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410156981.9A Expired - Fee Related CN103920688B (en) | 2014-04-18 | 2014-04-18 | A kind of buckle being installed on cleaning machine for cleaning semiconductor chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103920688B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4437362A (en) * | 1981-10-26 | 1984-03-20 | Western Electric Co., Inc. | Tools for handling magnetic articles |
| CN101436564A (en) * | 2007-11-13 | 2009-05-20 | 株式会社迅动 | Substrate processing apparatus |
| CN202700873U (en) * | 2012-07-26 | 2013-01-30 | 江阴迪林生物电子技术有限公司 | Chip online cleaning device |
| CN203196968U (en) * | 2013-03-20 | 2013-09-18 | 上海亨通宏普通信技术有限公司 | Chip cleaning clamp of PLC optical branching device |
| CN103515777A (en) * | 2012-06-18 | 2014-01-15 | 深圳富泰宏精密工业有限公司 | Chip card holding structure and electronic device having the same |
| CN203778453U (en) * | 2014-04-18 | 2014-08-20 | 成都先进功率半导体股份有限公司 | Buckle arranged on cleaning machine for cleaning semiconductor chip |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008090973A (en) * | 2006-10-04 | 2008-04-17 | Fujitsu Ltd | Support fixture of chip product |
-
2014
- 2014-04-18 CN CN201410156981.9A patent/CN103920688B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4437362A (en) * | 1981-10-26 | 1984-03-20 | Western Electric Co., Inc. | Tools for handling magnetic articles |
| CN101436564A (en) * | 2007-11-13 | 2009-05-20 | 株式会社迅动 | Substrate processing apparatus |
| CN103515777A (en) * | 2012-06-18 | 2014-01-15 | 深圳富泰宏精密工业有限公司 | Chip card holding structure and electronic device having the same |
| CN202700873U (en) * | 2012-07-26 | 2013-01-30 | 江阴迪林生物电子技术有限公司 | Chip online cleaning device |
| CN203196968U (en) * | 2013-03-20 | 2013-09-18 | 上海亨通宏普通信技术有限公司 | Chip cleaning clamp of PLC optical branching device |
| CN203778453U (en) * | 2014-04-18 | 2014-08-20 | 成都先进功率半导体股份有限公司 | Buckle arranged on cleaning machine for cleaning semiconductor chip |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103920688A (en) | 2014-07-16 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151118 Termination date: 20170418 |
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| CF01 | Termination of patent right due to non-payment of annual fee |