CN103916048B - Piezoelectric vibration generation device and manufacture method thereof - Google Patents
Piezoelectric vibration generation device and manufacture method thereof Download PDFInfo
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- CN103916048B CN103916048B CN201310004914.0A CN201310004914A CN103916048B CN 103916048 B CN103916048 B CN 103916048B CN 201310004914 A CN201310004914 A CN 201310004914A CN 103916048 B CN103916048 B CN 103916048B
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Abstract
The present invention discloses the manufacture method of a kind of piezoelectric vibration generation device, including: (1) obtains piezoelectric element subelement by laser welding batch, installs piezoelectric patches and free oscillator to obtain piezoelectric element on each piezoelectric element subelement；(2) providing the pedestal in hollow structure, the hollow structure of pedestal forms containing cavity；(3) provide at least two piezoelectric elements, piezoelectric element is installed on pedestal in parallel to each other, and makes the free oscillator of piezoelectric element be placed in containing cavity；(4) provide bottom, bottom correspondence is covered on the two ends of pedestal；(5) providing at least two conduction capillaries, conduction capillary is connected with piezoelectric element and passes through a bottom thus form conductive electrode.Owing to using laser welding to obtain piezoelectric element subelement with batch, during carrying out Assembling Production, it is simple to exactitude position, thus improving assembly precision, batch production substantially increases production efficiency, thus reduces production cost.Separately, invention additionally discloses a kind of piezoelectric vibration generation device.
Description
Technical field
The present invention relates to micro-energy technology field, particularly relate to a kind of piezoelectric vibration generation device and manufacturer thereof
Method.
Background technology
Along with fast development and the application of minute mechanical and electrical system (MEMS, NEMS) technology, drive wireless
The development of sensor-based network technology, and progressively real in industry, space flight, communication, business, consumption and military field
Show commercial applications, but still faced an extremely serious problem, the most how to ensure these wireless sensings
The electric energy supply of unit and mobile communication equipment.Traditional method is to use battery, but owing to constituting wireless sensing
The unit component substantial amounts of network and mobile communication equipment, volume is small, and position disperses, and this just requires it
Power supply device has that volume is little, usefulness is high, easy of integration, unmanned and be not required to the features such as replacing.So,
Use conventional batteries can not meet the demand for development of radio sensing network and mobile communication equipment.
Therefore, a kind of can be micro-nano system provide reliably and with long-term confession electric energy miniature power generating device meet the tendency and
Raw, it is by absorbing the mechanical energy (such as vibrations, wind energy, air-flow energy etc.) in environment and/or heat energy, the sun
Energy, electrostatic energy etc., thus in corresponding system, produce electric power output.Existing miniature power generating device is general
Including piezoelectric vibration generation device, magnetoelectricity shaking generating set or electrostatic shaking generating set, no matter which kind of is micro-
Type TRT, using bonding agent to carry out Assembling Production is a kind of conventional means, and this exists for assembly precision
The problem that difference, quality are unstable and assembly cost is high.
Therefore, it is necessary to provide, a kind of assembly precision is high, production efficiency is high and the piezoelectric shock generating of low cost
Device and its manufacture method are to solve the deficiencies in the prior art.
Summary of the invention
It is an object of the invention to provide the manufacture method of a kind of piezoelectric vibration generation device, by the party's legal system
When making piezoelectric vibration generation device, assembly precision is high, production efficiency is high and low cost.
Another object of the present invention is to provide a kind of piezoelectric vibration generation device, assembling essence in its manufacture process
Degree is high, production efficiency is high and low cost, and the simple in construction of this piezoelectric vibration generation device, and volume is little, thick
Spend thin, usefulness is high.
For achieving the above object, the technical scheme is that the system of a kind of piezoelectric vibration generation device is provided
Making method, it comprises the steps: that (1) obtains piezoelectric element subelement, often by laser welding batch
Piezoelectric patches and free oscillator is installed to obtain piezoelectric element on one described piezoelectric element subelement；(2) provide
Pedestal, described pedestal is hollow structure, and the hollow structure of described pedestal forms containing cavity；(3) provide at least
Piezoelectric element described in two, is installed on described pedestal in parallel to each other by described piezoelectric element, and makes described pressure
The free oscillator of electricity assembly is placed in described containing cavity；(4) provide bottom, described bottom correspondence lid is set
Two ends in described pedestal；(5) at least two conduction capillaries, described conduction capillary and described piezoelectricity group are provided
Part is connected and passes through bottom described in thus form conductive electrode.
It is preferred that above-mentioned steps (1) also specifically includes following steps: (11) provide a metallic matrix plate,
It is provided with at least two metallic matrix on described metallic matrix plate；(12) a cantilever sheet, described cantilever are provided
The cantilever sheet corresponding with described metallic matrix quantity it is provided with in sheet；(13) described cantilever sheet is corresponding
It is installed on described metallic matrix plate, and makes described cantilever sheet and described metallic matrix one_to_one corresponding, and pass through
Described cantilever sheet is positioned by location structure with metallic matrix plate；(14) will one to one by laser welding
Described at least two, cantilever sheet is disposably welded as a whole with described metallic matrix；(15) by pelletizing by one a pair
The described cantilever sheet that should be welded as a whole and described metallic matrix take off thus obtain multiple piezoelectric element list
Unit；(16) some piezoelectric patches are provided, bonding multiple on the cantilever sheet of piezoelectric element subelement each described
Piezoelectric patches, and multiple described piezoelectric patches is arranged radially；(17) provide multiple free oscillator, be bonded with
Bonding free oscillator on the cantilever sheet of the described piezoelectric element subelement of piezoelectric patches, and described free oscillator is corresponding
It is adhered to the center position of another side relative to described piezoelectric patches, thus forms piezoelectric element.
It is preferred that described metallic matrix plate structure in the form of sheets, described metallic matrix plate is provided with at least one
Metallic matrix bar, each described metallic matrix bar is provided with at least two metallic matrix.
It is preferred that described cantilever sheet structure in the form of sheets, described cantilever sheet is provided with at least one cantilever
Slip, each described cantilever slip is provided with at least two cantilever sheet.
It is preferred that described cantilever sheet is rounded or square sheet shape, the center position of described cantilever sheet is formed
Central active region, is provided with at least one elastic arm around described central active region, and described elastic arm outer has
There is the supporting part of structure ringwise, be respectively provided with certain between described central active region, elastic arm and supporting part
Gap, is distributed with support bridge to connect adjacent central active region, elastic arm and supporting part in described gap.
It is preferred that described elastic arm has several, between adjacent described elastic arm, it is respectively provided with certain gap,
Described gap is distributed with support bridge to connect adjacent described elastic arm.
It is preferred that multiple described piezoelectric patches are radially arranged on described cantilever sheet, and multiple described pressure
The two ends of electricity sheet are adhered to central active region and the supporting part of described cantilever sheet, and multiple described piezoelectric patches respectively
It is in series or in parallel.
It is preferred that described piezoelectric patches to be relaxor ferroelectric monocrystal thin film, piezoelectric fabric thin film, piezopolymer thin
Film, piezo-electricity composite material thin film, there are lead piezoelectric ceramics lead zirconate titanate piezoelectric sheet, PMN-PT piezoelectricity
Sheet, leadless piezoelectric ceramics Barium metatitanate. sheet, leadless piezoelectric ceramics sheet, niobate lead-free piezoelectric ceramics sheet or niobium
Nickel acid potassium piezoelectric patches.
It is preferred that described piezoelectric patches is strip or trapezoidal shape.
It is preferred that described piezoelectric element is two, piezoelectric element described in two is correspondingly arranged in the two of described pedestal
End, the free oscillator of piezoelectric element described in two is all placed in described containing cavity, and piezoelectric element described in two
The free end of free oscillator is connected.
It is preferred that described free oscillator is permanent magnet.
It is preferred that described permanent magnet is for single or multiple；More specifically, when described free oscillator is multiple
During permanent magnet, the opposite polarity of the opposite face of multiple described permanent magnets.
Compared with prior art, due to the manufacture method of piezoelectric vibration generation device of the present invention, Laser Welding is passed through
Connect batch obtain piezoelectric element subelement, on piezoelectric element subelement each described install piezoelectric patches and from
By oscillator to obtain piezoelectric element, then at least two piezoelectric element is installed on pedestal, and pacifies on pedestal
Fill bottom thus obtain piezoelectric vibration generation device；Laser welding is used to obtain piezoelectric element subelement with batch,
During carrying out Assembling Production, it is simple to exactitude position, thus improving assembly precision, batch production is significantly
Improve production efficiency, thus reduce production cost.
Accordingly, the present invention also provides for what a kind of manufacture method using above-mentioned piezoelectric vibration generation device manufactured
Piezoelectric vibration generation device, it include pedestal, bottom, at least two piezoelectric elements and at least two conduction capillaries,
Wherein, described pedestal is hollow structure, and the hollow structure of described pedestal forms containing cavity；Press described at least two
Electricity assembly is arranged on described pedestal and is parallel to each other, and the free oscillator of piezoelectric element described at least two houses
In described containing cavity, described conduction capillary is connected with described piezoelectric element and passes through bottom described in
And form conductive electrode.
It is preferred that described piezoelectric element includes piezoelectric element subelement, free oscillator and multiple piezoelectric patches, institute
State piezoelectric element subelement and be installed on one end of described pedestal corresponding with described containing cavity；Multiple described pressures
Electricity sheet is radially adhered to the one side of described piezoelectric element subelement；Described free oscillator is adhered to institute
State the center position of the another side relative to described piezoelectric patches of piezoelectric element subelement, and described freedom
Oscillator is placed in described containing cavity.
It is preferred that described piezoelectric element subelement includes cantilever sheet and supports the metallic matrix of described cantilever sheet,
Offering the perforate corresponding with described cantilever sheet on described metallic matrix, described cantilever sheet is correspondingly arranged in institute
Stating tapping and be integrated with described metallic matrix laser welding, described piezoelectric piece bonding is in described cantilever sheet
One side, described free oscillator is adhered to the center position of the another side of the most described piezoelectric patches.
Compared with prior art, due to piezoelectric vibration generation device of the present invention, its piezoelectric piece bonding is in described outstanding
The surface of arm pieces, can setting area big, improve generating efficiency；And when shaking, described cantilever sheet drives described
Piezoelectric patches shakes along its vertical direction so that piezoelectric patches keeps efficient deformation and vibrations, mechanical energy conversion efficiency
Height, improves generating efficiency further；And cantilever chip architecture is simple, volume is little, thickness is thin, usefulness is high and becomes
This is low；And in the production process of this piezoelectric vibration generation device, obtain piezoelectricity group by laser welding with batch
Part subelement, in production process, assembly precision is high, production efficiency is high and low cost.
Accompanying drawing explanation
Fig. 1 is the flow chart of the manufacture method of piezoelectric vibration generation device of the present invention.
Fig. 2 is the sub-process figure of step S01 in Fig. 1.
Fig. 3 is the structural representation of metallic matrix plate of the present invention.
Fig. 4 is the structural representation of cantilever sheet of the present invention.
Fig. 5 is that cantilever sheet of the present invention is installed on the structural representation on metallic matrix plate.
Fig. 6 is the view that the metallic matrix plate after welding and cantilever sheet carry out pelletizing.
Fig. 7 is the enlarged diagram of piezoelectric element subelement of the present invention.
Fig. 8 is the top view of piezoelectric element of the present invention.
Fig. 9 is the structural representation of piezoelectric vibration generation device of the present invention.
Figure 10 is the sectional view of Fig. 9.
Figure 11 is the exploded view of Fig. 9.
Figure 12 is the decomposing schematic representation of piezoelectric element subelement in Fig. 9.
Detailed description of the invention
With reference now to accompanying drawing, describing embodiments of the invention, element numbers similar in accompanying drawing represents similar unit
Part.The manufacture method of the piezoelectric vibration generation device that the present invention provides, during carrying out Assembling Production,
Being easy to exactitude position, thus improve assembly precision, batch production substantially increases production efficiency, thus reduces
Production cost.
As it is shown in figure 1, the manufacture method of piezoelectric vibration generation device provided by the present invention, it includes as follows
Step:
S01: obtain piezoelectric element subelement, at piezoelectric element list each described by laser welding batch
Piezoelectric patches and free oscillator is installed to obtain piezoelectric element in unit；
S02: providing pedestal, described pedestal is hollow structure, the hollow structure of described pedestal forms containing cavity；
S03: piezoelectric element described at least two is provided, described piezoelectric element is installed on described base in parallel to each other
On seat, and the free oscillator of described piezoelectric element is made to be placed in described containing cavity；
S04: bottom is provided, described bottom correspondence is covered on the two ends of described pedestal；And
S05: providing at least two conduction capillaries, described conduction capillary is connected with described piezoelectric element and passes
Wherein bottom described in thus form conductive electrode.
As in figure 2 it is shown, in the manufacture method of above-mentioned piezoelectric vibration generation device, described step S01 also has
Body comprises the steps:
S11: a metallic matrix plate is provided, described metallic matrix plate is provided with at least two metallic matrix；
S12: provide a cantilever sheet, described cantilever sheet is provided with corresponding with described metallic matrix quantity
Cantilever sheet；
S13: described cantilever sheet correspondence is installed on described metallic matrix plate, and makes described cantilever sheet and institute
State metallic matrix one_to_one corresponding, and by location structure, described cantilever sheet is positioned with metallic matrix plate；
S14: by laser welding by disposable with described metallic matrix for cantilever sheet described at least two one to one
It is welded as a whole；
S15: described cantilever sheet one_to_one corresponding being welded as a whole by pelletizing and described metallic matrix take off from
And obtain multiple piezoelectric element subelement；
S16: some piezoelectric patches are provided, bonding multiple on the cantilever sheet of piezoelectric element subelement each described
Piezoelectric patches, and multiple described piezoelectric patches is arranged radially；
S17: provide multiple free oscillator, at the cantilever sheet of the described piezoelectric element subelement being bonded with piezoelectric patches
Above bonding free oscillator, and described free oscillator correspondence is adhered to the another side relative to described piezoelectric patches
Center position, thus form piezoelectric element.
Shown in Fig. 3-Fig. 8, manufacture method and process to piezoelectric vibration generation device of the present invention are entered
Row describes in detail.
As shown in Figure 3, Figure 4, metallic matrix plate structure in the form of sheets of the present invention, each metallic matrix plate
On at least one metallic matrix bar 31 is set, each described metallic matrix bar 31 is provided with at least two metal
Matrix 311, in the present embodiment, described metallic matrix plate only has a metallic matrix bar 31, this Metal Substrate
Ten metallic matrixes 311 it are provided with on body bar 31；Certainly, the Metal Substrate each metallic matrix bar 31 arranged
The quantity of body 311 is not limited, and the structure of metallic matrix plate is also not limited thereto, it is also possible to for other
Shape, it arranges multiple metallic matrix 311；Accordingly, described cantilever sheet structure in the form of sheets,
Be provided with at least one cantilever slip 32 in described cantilever sheet, each described cantilever slip 32 is provided with to
Few two cantilever sheets 321, and cantilever sheet 321 quantity and position are all corresponding with metallic matrix 311；This reality
Executing in example, cantilever sheet only has a cantilever slip 32, the structure of cantilever slip 32 and metallic matrix bar
The structure of 31 is the most corresponding；It is to be appreciated that described cantilever slip 32 is not limited to this shape, as long as its
Cantilever sheet 321 and metallic matrix 311 one_to_one corresponding of upper setting.
It is laid with electronic circuit on described metallic matrix plate and connects pad, at each metallic matrix bar 31
Marginal position has been positioned apart from location structure 312；The marginal position of each cantilever slip 32 also compartment of terrain
Being provided with location structure 322, the location structure 312 that metallic matrix bar 31 is arranged sets on cantilever slip 32
The location structure 322 put is the most corresponding, for realizing both be accurately positioned.
As it is shown in figure 5, before welding, cantilever slip 32 correspondence in the present embodiment is installed on metal
In matrix strips 31, both press edge strip benchmark para-position, then by both upper location structures 312,322 arranged
Position；Now, described cantilever sheet 321 and metallic matrix 311 one_to_one corresponding；After completing, by swashing
All cantilever sheets 321 being correspondingly arranged disposably are welded as a whole by photocoagulation with metallic matrix 311, thus
Batch forms multiple piezoelectric element subelement.
Shown in Fig. 6, Fig. 7, the above-mentioned metallic matrix bar 31 in strip has welded with cantilever slip 32
After, pelletizing step need to be carried out, to obtain single piezoelectric element subelement 131；Specifically, one will be welded as
The cantilever sheet 321 of body takes off one by one with metallic matrix 311, thus obtains single piezoelectric element subelement 131
(see figure 7), wherein, cantilever sheet 321 is welded as a whole with metallic matrix 311 by solder joint 323 thereon.
Further in conjunction with shown in Fig. 7, the described rounded flake of cantilever sheet 321, in described cantilever sheet 321
Formation central active region, heart position 321a, is provided with at least one around described central active region 321a elastic
Arm 321b, described elastic arm 321b outer has the supporting part 321c of structure ringwise, described central active region
It is respectively provided with certain gap between 321a, elastic arm 321b and supporting part 321c, described gap is distributed with
Support bridge 321d is to connect adjacent central active region 321a, elastic arm 321b and supporting part 321c；Preferably
Ground, described elastic arm 321b has several, be respectively provided with between adjacent described elastic arm 321b certain between
Gap, is distributed with support bridge 321d to connect adjacent described elastic arm 321b in described gap.It is appreciated that
Ground, the shape of described cantilever sheet 321 is not limited thereto, it is also possible to is arranged to other shape, such as, sets
It is set to square structure.
Shown in Fig. 7, Fig. 8, the piezoelectric element subelement 131 that above-mentioned pelletizing is obtained assemble further with
Obtain piezoelectric element；Specifically, the cantilever sheet 321 of piezoelectric element subelement 131 arranges multiple piezoelectricity
Sheet 132, multiple piezoelectric patches 132 are arranged radially, and the two ends of each piezoelectric patches 132 are adhered to respectively
The central active region 321a and supporting part 321c of cantilever sheet 321, meanwhile, the two ends of piezoelectric patches 132 are by weldering
Pin is derived, and multiple described piezoelectric patches 132 is in series or parallel connection.Preferably, described piezoelectric patches 132 is for relaxing
Henan ferro-electricity single crystal thin film, piezoelectric fabric thin film, piezoelectric polymer thin-film, piezo-electricity composite material thin film and, have
Lead piezoelectric ceramics lead zirconate titanate piezoelectric sheet, PMN-PT piezoelectric patches, leadless piezoelectric ceramics Barium metatitanate. sheet,
Leadless piezoelectric ceramics sheet, niobate lead-free piezoelectric ceramics sheet or niobium nickel acid potassium piezoelectric patches；Described piezoelectric patches 132
In strip or trapezoidal shape, especially optimum with trapezoidal shape.Then, piezoelectric element subelement 131 is pacified
Fill free oscillator (figure does not regards), specifically, free oscillator be adhered to the central active region 321a of cantilever sheet 321,
And described free oscillator correspondence is adhered to the another side relative to described piezoelectric patches 132, thus formed complete
Piezoelectric element.
Then, assemble piezoelectric element further to obtain piezoelectric vibration generation device.In the present invention one
In embodiment, it is provided that pedestal and bottom, this pedestal is hollow structure, and the hollow structure of described pedestal is formed and holds
Put chamber, during installation, piezoelectric element correspondence be installed on described pedestal and make described piezoelectric element be parallel to each other,
And make the free oscillator of piezoelectric element be placed in described containing cavity；Then, bottom is covered on the two of pedestal
End, obtains a piezoelectric vibration generation device installing conduction capillary.
In the preferred embodiment of the present invention, it is provided that two piezoelectric elements, two piezoelectric element correspondences are connected
In the two ends of pedestal, and the free oscillator of two piezoelectric elements is all placed in described containing cavity, and makes two piezoelectricity
The free end of the free oscillator of assembly is connected, and two bottoms are covered on the two ends of pedestal respectively；Then, then will
Two conduction capillaries are installed on pedestal, and make conduction capillary and two piezoelectric elements be connected and pass through one
Bottom and form two conductive electrodes.
Due to the manufacture method of piezoelectric vibration generation device of the present invention, obtain piezoelectricity group by laser welding batch
Part subelement 131, installs piezoelectric patches 132 and free oscillator on piezoelectric element subelement 131 each described
To obtain piezoelectric element, then at least two piezoelectric element is installed on pedestal, and makes piezoelectric element the most flat
OK, and on pedestal, bottom is installed thus obtains complete piezoelectric vibration generation device；Owing to using Laser Welding
Connect and obtain piezoelectric element subelement 131 with batch, during carrying out Assembling Production, it is simple to exactitude position,
Thus improving assembly precision, batch production substantially increases production efficiency, thus reduces production cost.
Knot shown in Fig. 9-Figure 12, to a specific embodiment of piezoelectric vibration generation device of the present invention
Structure illustrates.
In a preferred embodiment of piezoelectric vibration generation device of the present invention, it include bottom, pedestal, two
Root conduction capillary 30 and at least two piezoelectric element, described pedestal is hollow structure, the hollow knot of described pedestal
Being configured to containing cavity, at least two piezoelectric element is respectively arranged on pedestal and is parallel to each other, at least two piezoelectricity
The free oscillator of assembly is placed in described containing cavity, and two conduction capillaries 30 are connected with at least two piezoelectric element
Connect and pass through a bottom and form conductive electrode.
Preferably, described pedestal can be one, it is possible to is integrally connected by multiple according to assembling needs,
In the present embodiment, pedestal is preferably two, and pedestal described in two is respectively the first pedestal 12 and the second pedestal 22.
And the piezoelectric element in this enforcement is also two, two piezoelectric elements are respectively the first piezoelectric element 13 and the second pressure
Electricity assembly 23, correspondingly, described piezoelectric vibration generation device also includes the first bottom 11 and the second bottom 21.
Concrete, the first pedestal 12 is in hollow structure, and the hollow structure of the first pedestal 12 forms first and houses
Chamber 121, the first piezoelectric element 13 is installed in the upper end of the first pedestal 12, and the first bottom 11 is covered on first
The upper end of pedestal 12, and this first bottom 11 is internally provided with a projection 111, plays position-limiting action.Accordingly,
Second pedestal 22 is in hollow structure, and the hollow structure of the second pedestal 22 forms the second containing cavity 221；Second pressure
Electricity assembly 23 is installed in the lower end of the second pedestal 22, and the second bottom 21 is covered on the lower end of the second pedestal 22,
And second the upper end of pedestal 22 be connected with the lower end of the first pedestal 12, the free end of the first piezoelectric element 13
It is connected with the free end of the second piezoelectric element 23.
Shown in Fig. 8-Figure 12, described first piezoelectric element 13 includes piezoelectric element subelement 131, piezoelectricity
Sheet 132 and free oscillator 133, wherein, piezoelectric element subelement 131 includes cantilever sheet 321 and supports described
The metallic matrix 311 of cantilever sheet 321, described metallic matrix 311 offers relative with described cantilever sheet 321
The perforate answered, described cantilever sheet 321 be correspondingly arranged in described tapping and with described metallic matrix 311 laser
It is welded as a whole；Multiple described piezoelectric patches 132 are adhered to the one side of described cantilever sheet 321, and multiple pressure
Electricity sheet 132 is radially arranged, and the two ends of piezoelectric patches 132 are derived by probe, described piezoelectric patches 132
In strip or trapezoidal shape；Described free oscillator 133 is adhered to the another side of the most described piezoelectric patches 132
Center position；When being installed on the first pedestal 12, piezoelectric element subelement 131 is supported in the first pedestal
One end of 12, and make described free oscillator 133 be placed in described first containing cavity 121.
The structure of the second piezoelectric element 23 is identical with the structure of the first piezoelectric element 13, is not repeating.
It addition, in the present invention, the free oscillator 133 of the first piezoelectric element 13 and the second piezoelectric element 23
The free end of free oscillator 233 is connected, and free oscillator 133,233 is permanent magnet, and free oscillator 133,
233 can be a permanent magnet, it is also possible to be multiple permanent magnets, when free oscillator 133,233 be multiple forever
During magnet, the obverse opposite polarity (see figure 10) of two adjacent permanent magnets
The cantilever sheet of described first piezoelectric element 13 and the complete phase of structure of the cantilever sheet of the second piezoelectric element 23
With, below as a example by the cantilever sheet 321 of the first piezoelectric element 13, electricity shaking generating set of the present invention is hanged
The concrete structure of arm pieces illustrates.
Refering to shown in Figure 12, the described rounded flake of cantilever sheet 321, the centre bit of described cantilever sheet 321
Put place and form central active region 321a, described central active region 321a is provided with at least one elastic arm
321b, described elastic arm 321b outer has the supporting part 321c of structure ringwise, described central active region
It is respectively provided with certain gap between 321a, elastic arm 321b and supporting part 321c, described gap is distributed with
Support bridge 321d is to connect adjacent central active region 321a, elastic arm 321b and supporting part 321c；Preferably
Ground, described elastic arm 321b has several, be respectively provided with between adjacent described elastic arm 321b certain between
Gap, is distributed with support bridge 321d to connect adjacent described elastic arm 321b in described gap.In this enforcement
In example, the elastic arm 321b of cantilever sheet 321 has four, all has certain between adjacent elastic arm 321b
Gap, is distributed with support bridge 321d to connect adjacent elastic arm 321b, in each gap in described gap
Support bridge 321d have two.Support bridge 321d in same gap is uniform along described central active region 321a
Distribution, being interspersed along described central active region 321a of the support bridge 321 in adjacent segment.Certainly, institute
State elastic arm 321b not to be limited with four, it is also possible to be two, three or other numbers, support bridge 321d
Quantity correspondence increase and decrease.This structure of this cantilever sheet 321 makes it can be vertical along it when by external force
Direction is shaken, thus drives piezoelectric patches 132 thereon to shake along its vertical direction, keeps efficient deformation and shake
Dynamic, mechanical energy conversion efficiency is high, improves generating efficiency；Furthermore, described cantilever sheet 321 simple in construction, body
Long-pending little, thickness is thin, usefulness is high and low cost.
Preferably, described cantilever sheet by metal material (such as rustless steel), metal-oxide (such as aluminium oxide),
Nonmetallic materials (such as plastics), nonmetal oxide (such as) silicon dioxide or ceramic material are made.
When piezoelectric vibration generation device of the present invention is positioned on mobile electronic product or terminal, along with movement
Electronic product or the movement of terminal, the cantilever sheet 321 of described piezoelectric vibration generation device can occur resonance thus
Drive piezoelectric patches 132 produce deformation, the deformation of piezoelectric patches 132 can make its produce one piezoelectricity output, so,
Due to cantilever sheet 321 and the vibrations repeatedly of piezoelectric patches 132, just it is able to continuously generation output voltage, thus
Electric energy is provided to mobile electronic product or terminal or repeatedly charges to its battery.
It should be noted that in above-described embodiment, described cantilever sheet 321 is circular configuration, certainly, cantilever
The structure of sheet 321 is not limited thereto, and described cantilever sheet 321 can also be triangular in shape, square or polygon
Other deformable bodys of shape, assembly etc..
Due to piezoelectric vibration generation device of the present invention, its piezoelectric patches 132 is adhered to the table of described cantilever sheet 321
Face, can setting area big, improve generating efficiency；And when shaking, described cantilever sheet 321 drives described piezoelectricity
Sheet 132 shakes along its vertical direction so that piezoelectric patches 132 keeps efficient deformation and vibrations, and mechanical energy is changed
Efficiency is high, improves generating efficiency further；And cantilever chip architecture is simple, volume is little, thickness is thin, usefulness is high
And low cost；And in the production process of this piezoelectric vibration generation device, pressed with batch by laser welding
Electricity assembly subelement 131, in production process, assembly precision is high, production efficiency is high and low cost.
Above disclosed only the preferred embodiments of the present invention, can not limit the present invention with this certainly
Interest field, the equivalent variations therefore made according to scope of the present invention patent, still belong to the present invention and contained
Scope.
Claims (15)
1. the manufacture method of a piezoelectric vibration generation device, it is characterised in that comprise the steps:
(1) piezoelectric element subelement is obtained, at piezoelectric element list each described by laser welding batch
Piezoelectric patches and free oscillator is installed to obtain piezoelectric element in unit；
(2) providing pedestal, described pedestal is hollow structure, and the hollow structure of described pedestal forms containing cavity；
(3) provide piezoelectric element described at least two, described piezoelectric element is installed on described base in parallel to each other
On seat, and the free oscillator of described piezoelectric element is made to be placed in described containing cavity；
(4) two bottoms are provided, by the described two bottoms corresponding two ends being covered on described pedestal respectively；And
(5) providing at least two conduction capillaries, described conduction capillary is connected with described piezoelectric element and passes
Wherein bottom described in thus form conductive electrode；
Wherein, described step (1) specifically includes following steps:
(11) a metallic matrix plate is provided, described metallic matrix plate is provided with at least two metallic matrix；
(12) a cantilever sheet is provided, described cantilever sheet is provided with relative with described metallic matrix quantity
The cantilever sheet answered；
(13) described cantilever sheet correspondence is installed on described metallic matrix plate, and make described cantilever sheet with
Described metallic matrix one_to_one corresponding, and by location structure, described cantilever sheet is positioned with metallic matrix plate；
(14) by laser welding by cantilever sheet described at least two one to one with described metallic matrix once
Property is welded as a whole；
(15) the described cantilever sheet being welded as a whole by one_to_one corresponding by pelletizing is taken off with described metallic matrix
Thus obtain multiple piezoelectric element subelement；
(16) some piezoelectric patches are provided, bonding many on the cantilever sheet of piezoelectric element subelement each described
Individual piezoelectric patches, and multiple described piezoelectric patches is arranged radially；
(17) multiple free oscillator is provided, at the cantilever of the described piezoelectric element subelement being bonded with piezoelectric patches
Bonding free oscillator on sheet, and described free oscillator correspondence is adhered to the another side relative to described piezoelectric patches
Center position, thus form piezoelectric element.
2. the manufacture method of piezoelectric vibration generation device as claimed in claim 1, it is characterised in that described gold
Belong to parent plate structure in the form of sheets, described metallic matrix plate is provided with at least one metallic matrix bar, Mei Gesuo
State and on metallic matrix bar, be provided with at least two metallic matrix.
3. the manufacture method of piezoelectric vibration generation device as claimed in claim 1, it is characterised in that described outstanding
Arm pieces plate structure in the form of sheets, described cantilever sheet is provided with at least one cantilever slip, each described cantilever
At least two cantilever sheet it is provided with on slip.
4. the manufacture method of piezoelectric vibration generation device as claimed in claim 1, it is characterised in that described outstanding
Arm pieces is rounded or square sheet shape, and the center position of described cantilever sheet forms central active region, around institute
Stating central active region and be provided with at least one elastic arm, described elastic arm outer has the support of structure ringwise
Portion, is respectively provided with certain gap between described central active region, elastic arm and supporting part, in described gap all
Support bridge is distributed to connect adjacent central active region, elastic arm and supporting part.
5. the manufacture method of piezoelectric vibration generation device as claimed in claim 4, it is characterised in that described bullet
Property arm has several, is respectively provided with certain gap, is all distributed in described gap between adjacent described elastic arm
There is support bridge to connect adjacent described elastic arm.
6. the manufacture method of piezoelectric vibration generation device as claimed in claim 4, it is characterised in that Duo Gesuo
State piezoelectric patches to be radially arranged on described cantilever sheet, and the two ends of multiple described piezoelectric patches are the most bonding
In central active region and the supporting part of described cantilever sheet, and multiple described piezoelectric patches is in series or parallel connection.
7. the manufacture method of piezoelectric vibration generation device as claimed in claim 6, it is characterised in that described pressure
Electricity sheet is that relaxor ferroelectric monocrystal thin film, piezoelectric fabric thin film, piezoelectric polymer thin-film, piezo-electricity composite material are thin
Film, there are lead piezoelectric ceramics lead zirconate titanate piezoelectric sheet, PMN-PT piezoelectric patches, leadless piezoelectric ceramics titanium
Acid barium sheet, leadless piezoelectric ceramics sheet, niobate lead-free piezoelectric ceramics sheet or niobium nickel acid potassium piezoelectric patches.
8. the manufacture method of piezoelectric vibration generation device as claimed in claim 6, it is characterised in that described pressure
Electricity sheet is strip or trapezoidal shape.
9. the manufacture method of piezoelectric vibration generation device as claimed in claim 1, it is characterised in that described pressure
Electricity assembly is two, and piezoelectric element described in two is correspondingly arranged in the two ends of described pedestal, piezoelectric element described in two
Free oscillator be all placed in described containing cavity, and the free end phase of the free oscillator of piezoelectric element described in two
Connect.
10. the manufacture method of piezoelectric vibration generation device as claimed in claim 9, it is characterised in that described
Free oscillator is permanent magnet.
The manufacture method of 11. piezoelectric vibration generation device as claimed in claim 10, it is characterised in that described
Permanent magnet is for single or multiple.
The manufacture method of 12. piezoelectric vibration generation device as claimed in claim 11, it is characterised in that multiple
The opposite polarity of the opposite face of described permanent magnet.
13. use the manufacture method of the piezoelectric vibration generation device as described in any one of claim 1-12 to manufacture
Piezoelectric vibration generation device, it is characterised in that include pedestal, bottom, at least two piezoelectric elements and at least two
Root conduction capillary, wherein, described pedestal is hollow structure, and the hollow structure of described pedestal forms containing cavity；
Piezoelectric element described at least two is arranged on described pedestal and is parallel to each other, and piezoelectric element described at least two
Free oscillator is placed in described containing cavity, and described conduction capillary is connected with described piezoelectric element and passes it
In bottom described in one and form conductive electrode.
14. piezoelectric vibration generation device as claimed in claim 13, it is characterised in that described piezoelectric element bag
Include:
Piezoelectric element subelement, described piezoelectric element subelement be installed on described pedestal one end and with described appearance
Put chamber corresponding；
Multiple piezoelectric patches, multiple described piezoelectric patches are radially adhered to the one of described piezoelectric element subelement
Side；And
Free oscillator, described free oscillator be adhered to described piezoelectric element subelement relative to described piezoelectric patches
The center position of another side, and described free oscillator is placed in described containing cavity.
15. piezoelectric vibration generation device as claimed in claim 14, it is characterised in that described piezoelectric element
Unit includes: cantilever sheet and support the metallic matrix of described cantilever sheet, described metallic matrix offers and institute
State the perforate that cantilever sheet is corresponding, described cantilever sheet be correspondingly arranged in described tapping and with described metallic matrix
Laser welding is integrated, and described piezoelectric piece bonding is in the one side of described cantilever sheet, and described free oscillator is bonding
Center position in the another side of the most described piezoelectric patches.
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| CN201310004914.0A CN103916048B (en) | 2013-01-07 | 2013-01-07 | Piezoelectric vibration generation device and manufacture method thereof |
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| CN201310004914.0A CN103916048B (en) | 2013-01-07 | 2013-01-07 | Piezoelectric vibration generation device and manufacture method thereof |
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| CN103916048B true CN103916048B (en) | 2016-10-12 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6469421B1 (en) * | 1998-10-26 | 2002-10-22 | Seiko Instruments Inc. | Piezoelectric device and production method thereof |
| US7197799B2 (en) * | 2003-12-02 | 2007-04-03 | Seiko Epson Corporation | Method for manufacturing a piezoelectric device |
| JP2008141307A (en) * | 2006-11-30 | 2008-06-19 | Citizen Holdings Co Ltd | Piezoelectric vibrator, its manufacturing method, and physical quantity sensor |
| CN102797517A (en) * | 2012-09-01 | 2012-11-28 | 浙江师范大学 | Electricity generation device for oil gas pipeline monitoring system |
-
2013
- 2013-01-07 CN CN201310004914.0A patent/CN103916048B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6469421B1 (en) * | 1998-10-26 | 2002-10-22 | Seiko Instruments Inc. | Piezoelectric device and production method thereof |
| US7197799B2 (en) * | 2003-12-02 | 2007-04-03 | Seiko Epson Corporation | Method for manufacturing a piezoelectric device |
| JP2008141307A (en) * | 2006-11-30 | 2008-06-19 | Citizen Holdings Co Ltd | Piezoelectric vibrator, its manufacturing method, and physical quantity sensor |
| CN102797517A (en) * | 2012-09-01 | 2012-11-28 | 浙江师范大学 | Electricity generation device for oil gas pipeline monitoring system |
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| CN103916048A (en) | 2014-07-09 |
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