CN103684042B - Piezoelectric vibration generation device and manufacture method thereof - Google Patents
Piezoelectric vibration generation device and manufacture method thereof Download PDFInfo
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- CN103684042B CN103684042B CN201210316719.7A CN201210316719A CN103684042B CN 103684042 B CN103684042 B CN 103684042B CN 201210316719 A CN201210316719 A CN 201210316719A CN 103684042 B CN103684042 B CN 103684042B
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Abstract
The invention discloses a kind of piezoelectric vibration generation device, comprise support, elastic plate and piezoelectric patches.Described elastic plate is in flake, there is central movable portion, at least one elastic arm around described central movable portion and the outer movable part around described elastic arm, all there is certain gap between described central movable portion, elastic arm and outer movable part, be distributed with supporting bridge in described gap to connect adjacent central movable portion, elastic arm and outer movable part; Elastic plate described in described stent support; Described piezoelectric patches is located on described elastic plate, and has at least two conductive layers, is sandwiched in the pad that piezoelectric layer between two conductive layers and at least two can be electrically connected on external electrical device.The invention also discloses a kind of manufacture method of piezoelectric vibration generation device.Elastic plate of the present invention is in flake, and described piezoelectric patches is located at the surface of elastic plate, can setting area large, and during vibrations, described elastic belt moves piezoelectric patches and shakes along its vertical direction, and mechanical energy conversion efficiency is high; Moreover elastic plate of the present invention is simple, and volume is little, thickness is thin, usefulness is high and cost is low.
Description
Technical field
The invention belongs to micro-energy technology field, be specifically related to a kind of piezoelectric vibration generation device.
Background technology
The fast development of minute mechanical and electrical system (MEMS, NEMS) technology and application, drive the development of technology of wireless sensing network, and progressively achieve commercial applications in industry, space flight, communication, business, consumption and military field, but still face a very serious problem, namely how to ensure the electric energy supply of these wireless sensing units and mobile communication equipment.The way that traditional industry is comparatively popular uses battery, owing to forming the unit component substantial amounts of radio sensing network and mobile communication equipment, volume is small, and position disperses, this just require its power supply device to have volume is little, usefulness is high, easy of integration, unattended operation and do not need the features such as replacing.So, adopt conventional batteries can not meet the demand for development of radio sensing network and mobile communication equipment.
Therefore need a kind ofly to can be the miniature power generating device that micro-nano system provides confession electric energy reliably and with long-term, by the mechanical energy (as vibrations, wind energy, air flow energy etc.) in absorbing environmental and/or heat energy, solar energy, electrostatic energy etc., thus in its corresponding system, produce electric power output, and existing miniature power generating device generally comprises piezoelectric vibration generation device, magnetoelectricity shaking generating set or electrostatic shaking generating set, especially piezoelectric vibration generation device.But traditional piezoelectric vibration generation device by piezoelectric patches dress on a cantilever beam, when there are vibrations or moving, deformation is there is because of vibrations in piezoelectric patches on cantilever, like this, often due to cantilever bending produce displacement little, affect generating efficiency, and due to cantilever beam size-constrained, make piezoelectric patches limited size, generating efficiency is low.Moreover, existing piezoelectric vibration generation device, because the volume of cantilever is large, complex structure, and usefulness is low, make the volume of whole piezoelectric vibration generation device large, generating efficiency is low.
Therefore, the piezoelectric vibration generation device that a kind of generating efficiency is high, volume is little, structure is simple, cost is low is badly in need of.
Summary of the invention
The object of this invention is to provide the piezoelectric vibration generation device that a kind of generating efficiency is high, volume is little, structure is simple, cost is low.
Another object of the present invention is to provide the manufacture method of the piezoelectric vibration generation device that a kind of generating efficiency is high, volume is little, structure is simple, cost is low.
To achieve these goals, piezoelectric vibration generation device provided by the invention comprises support, elastic plate and piezoelectric patches.Described elastic plate is in flake, there is central movable portion, at least one elastic arm around described central movable portion and the outer movable part around described elastic arm, all there is certain gap between described central movable portion, elastic arm and outer movable part, be distributed with supporting bridge in described gap to connect adjacent central movable portion, elastic arm and outer movable part; Elastic plate described in described stent support; Described piezoelectric patches is located on described elastic plate, and has at least two conductive layers, is sandwiched in the pad that piezoelectric layer between two conductive layers and at least two can be electrically connected on external electrical device.
To achieve these goals, the manufacture method of piezoelectric vibration generation device provided by the invention, comprise the steps: to provide a laminar elastic plate, described elastic plate has central movable portion, at least one elastic arm around described central movable portion and the outer movable part around described elastic arm, all there is certain gap between described central movable portion, elastic arm and outer movable part, be distributed with supporting bridge in described gap to connect adjacent central movable portion, elastic arm and outer movable part; Described elastic plate arranges piezoelectric patches, described piezoelectric patches has at least two conductive layers, be sandwiched in the pad that piezoelectric layer between two conductive layers and at least two can be electrically connected on external electrical device; And a support is provided, the outer movable part of described elastic plate or central movable portion to be installed on described support thus to make elastic plate described in described stent support.
Compared with prior art, the elastic plate of piezoelectric vibration generation device of the present invention is in flake, and described piezoelectric patches is located at the surface of described elastic plate, can setting area large, improve generating efficiency; And during vibrations, described elastic plate drives described piezoelectric patches to shake along its vertical direction, piezoelectric patches is remained valid deformation and vibrations, and mechanical energy conversion efficiency is high, improves generating efficiency further.Moreover elastic plate of the present invention is simple, and volume is little, thickness is thin, usefulness is high and cost is low.
Particularly, described elastic arm has several, all has certain gap between adjacent elastic arm, and be distributed with supporting bridge in described gap to connect adjacent elastic arm, its coefficient of elasticity is little, can respond to small vibrations, improve generating efficiency.
Preferably, the supporting bridge in each gap has two at least.Supporting bridge in same gap is uniformly distributed along described central movable portion, and the supporting bridge in adjacent segment is interspersed along described central movable portion.
Preferably, described support has a cavity, described elastic plate is corresponding with the upper surface shape size of described cavity, and the outer movable part of described elastic plate is installed on the upper surface of described support, and the central movable portion of described elastic plate and elastic arm are just to described cavity.The program makes structure of the present invention simple, compact, be easy to assembling, and the area of piezoelectric patches is large.Certainly, described support also can have hollow chamber and upper end has the housing of opening for other, and elastic plate can be supported in the upper end of this housing.More specifically, described inside cavity is provided with resistance system, described cavity lower end is provided with base, described resistance system comprises the first magnet piece being installed on surface, described central movable portion and the second magnet piece be installed on described base, and described first magnet piece is identical with described second magnet piece opposite face polarity.Certainly, described resistance system also can be directly made up of extension spring.
Selectively, described support has a pole, the central movable portion of elastic plate described in the strut support of described support, the central movable portion of described elastic plate is installed on the pole upper surface of described support, and the outer movable part of described elastic plate and elastic arm are suspended on outside the pole of described support.One resistance system is arranged on the pole outer periphery of described support, the pole bottom of described support is provided with base, described resistance system comprises the first magnet piece being installed on movable part surface, described outer and the second magnet piece be installed on described base, and described first magnet piece is identical with described second magnet piece opposite face polarity.
Described resistance system provides thrust upwards when described elastic plate is bent downwardly to described elastic plate, provides downward pulling force when described elastic plate is bent upwards, thus forms a resonant cavity.Like this, when shaking generation, elastic belt moves piezoelectric patches and up and down reciprocatingly shakes, uninterrupted voltage is exported to make piezoelectric patches, when elastic plate bends downward into lower limit position, described resistance system provides thrust upwards to described elastic plate, prevented displacement component and damaged elastic plate and piezoelectric patches, otherwise, when elastic plate bends upwardly to upper extreme position, described resistance system provides downward pulling force to described elastic plate, himself gravity additional, back and forth shakes to form a simple harmonic vibration thus to make described elastic belt move piezoelectric patches.
Preferably, described piezoelectric vibration generation device also comprises the conduction capillary that at least two can be electrically connected on external electrical device, the outer wall of described support is provided with a capillary positioning seat, described capillary positioning seat comprises at least two location holes, and described conduction capillary correspondence to be installed in described location hole and to be electrically connected with the pad of described piezoelectric patches.
Preferably, described piezoelectric patches is corresponding with described elastic plate-shaped, and the interior edge of described piezoelectric patches is positioned at the district of central movable portion of described elastic plate, and the outer of described piezoelectric patches is positioned at the outer movable part of described elastic plate.
Preferably, offer a through hole in the middle of described piezoelectric patches, described through hole runs through two conductive layers of described piezoelectric patches.Described through hole can absorb stress, prevents described piezoelectric patches from breaking in vibrations process.
Accompanying drawing explanation
Fig. 1 is the three-dimensional assembly diagram of piezoelectric vibration generation device first embodiment of the present invention.
Fig. 2 is the three-dimensional exploded view of piezoelectric vibration generation device shown in Fig. 1.
Fig. 3 is the elastic plate of piezoelectric vibration generation device shown in Fig. 1 and the three-dimensional exploded view of piezoelectric patches, shows annexation therebetween.
Fig. 4 is the elastic plate of piezoelectric vibration generation device shown in Fig. 1 and the three-dimensional exploded view of resistance system, shows annexation therebetween.
Fig. 5 is the three-dimensional assembly diagram of piezoelectric vibration generation device second embodiment of the present invention.
Fig. 6 is the three-dimensional exploded view of piezoelectric vibration generation device shown in Fig. 5.
Fig. 7 is the elastic plate of piezoelectric vibration generation device shown in Fig. 5 and the three-dimensional exploded view of piezoelectric patches, shows annexation therebetween.
Fig. 8 is the profile of piezoelectric vibration generation device of the present invention 3rd embodiment.
Embodiment
By describing technology contents of the present invention, structural feature in detail, realized object and effect, accompanying drawing is coordinated to be explained in detail below in conjunction with execution mode.
First please refer to Fig. 1 and Fig. 2, illustrate the first embodiment of piezoelectric vibration generation device of the present invention.This piezoelectric vibration generation device 100 comprises support 11, elastic plate 12, piezoelectric patches 13, two conduction capillary 14 and resistance system 16.Described elastic plate 12 is in flake, there is central movable portion 121, around the elastic arm 122 in described central movable portion and the outer movable part 123 around described elastic arm 122, all there is certain gap 125 between described central movable portion 121, elastic arm 122 and outer movable part 123, be distributed with supporting bridge 124 in described gap 125 to connect adjacent central movable portion 121, elastic arm 12 and outer movable part 123.Described piezoelectric patches 13 is located at the surface of described elastic plate 12, and has at least two conductive layer (not shown), is sandwiched in piezoelectric layer (not shown) between two conductive layers and two pads 132.The outer movable part 123 of described elastic plate 12 to be installed on described support 11 thus to make described support 11 support described elastic plate 12 and described piezoelectric patches 13.Described resistance system 16 is assembled in described support 11, and connects described elastic plate 12, provides resistance and/or power when described elastic plate 12 is bending back and forth to described elastic plate 12.Described two conduction capillaries 14 are installed on described support 11 and with the pad 132 of described piezoelectric patches and are electrically connected, and described two conduction capillaries 14 can be electrically connected on external electrical device, the power supply circuits of such as mobile electronic product or terminal or charging circuit.When piezoelectric vibration generation device 100 of the present invention is positioned in mobile electronic product or terminal, along with the movement of mobile electronic product or terminal, resonance can be there is and thus drive piezoelectric patches 13 to produce deformation in the elastic plate 12 of described piezoelectric vibration generation device 100, the deformation of piezoelectric patches can make it produce a piezoelectricity output, like this, due to the vibrations repeatedly of elastic plate 12 and piezoelectric patches 13, just be able to continuously generation output voltage, thus provide electric energy to mobile electronic product or terminal or repeatedly charge to its battery.
Continue and please refer to Fig. 1 and Fig. 2, the outer wall of described support 11 is provided with a capillary positioning seat 112, is provided with two location holes in described capillary positioning seat 112, and described conduction capillary 14 correspondence is installed in described location hole.Described piezoelectric patches 13 is electrically connected by the pad 132 on it and conduction capillary 14.Concrete electric connection mode can be the modes such as metal wire welding, Metal Ball welding, tin welding.
Again please refer to Fig. 3, the elastic arm 122 of elastic plate 12 has four, all has certain gap 125 between adjacent elastic arm 122, is distributed with supporting bridge 124 to connect adjacent elastic arm 122 in described gap 125.Supporting bridge 124 in each gap 125 has two.Supporting bridge in same gap 125 is uniformly distributed along described central movable portion 121, and in adjacent segment, the supporting bridge 124 of 125 is interspersed along described central movable portion 121.Certainly, described elastic arm 122 also can be two, three or other numbers, and supporting bridge 124 also can increase and decrease according to actual requirement.This structure of this elastic plate 12 makes it can shake along its vertical direction when being subject to external force, thus drives the piezoelectric patches 13 on it to shake along its vertical direction, remain valid deformation and vibrations, and mechanical energy conversion efficiency is high, improves generating efficiency.Moreover elastic plate of the present invention is simple, and volume is little, thickness is thin, usefulness is high and cost is low.
Please refer to Fig. 2 and Fig. 4, described support 11 has a cavity 111, and described elastic plate 12 is installed on the upper end of described cavity 111, and the central movable portion 121 of described elastic plate 12 and elastic arm 122 are just to described cavity.Described cavity 111 lower end is provided with base 15.Described resistance system 16 comprises the first magnet piece 161 being installed on surface, described central movable portion 121 and the second magnet piece 162 be installed on described base 15, and described first magnet piece 161 is identical with described second magnet piece 162 opposite face polarity.Like this, when shaking generation, elastic plate 12 drives piezoelectric patches 13 vertical tremor, to make piezoelectric patches 13 output voltage, when elastic plate 12 bends downward into lower limit position under the Action of Gravity Field of the first magnet piece 161, magnetic field repulsive force can promote the first magnet piece 161 and on elastic plate 12 and piezoelectric patches 13 move upward, prevented displacement component and damaged elastic plate 12 and piezoelectric patches 13, otherwise, when elastic plate 12 bends upwardly to limes superiors, described elastic plate 12 can stop it to continue to move upward under the Action of Gravity Field of the first magnet piece 161, to form a simple harmonic vibration thus to make described elastic plate 12 drive piezoelectric patches 13 back and forth to shake.Certainly, described support 11 also can have hollow chamber and upper end has the housing of opening for other, and elastic plate 12 can be supported in the upper end of this housing and have the space of upper and lower displacement.Certainly, described resistance system also can be directly made up of extension spring.
Referring to figs. 1 to Fig. 3, described piezoelectric patches 13 is corresponding with described elastic plate 12 shape, and the interior edge of described piezoelectric patches 13 is positioned at the central movable portion 121 of described elastic plate 12, and the outer of described piezoelectric patches 13 is positioned at the outer movable part 123 of described elastic plate 12.Comprise a through hole 131 in the middle of described piezoelectric patches 13, described through hole 131 runs through two conductive layers up and down of described piezoelectric patches, and described through hole 131 can absorb stress, prevents described piezoelectric patches 13 from breaking in vibrations process.
Preferably, the outside of described piezoelectric patches 13 is also enclosed with at least one matrix.
Preferably, the week that the piezoelectric layer portion of described piezoelectric patches 13 is deposited on described piezoelectric patches 13 along and be formed centrally a space wherein.
Preferably, the piezoelectric layer of described piezoelectric patches 13 is deposited on the whole surface of described piezoelectric patches 13 and its at least one Conductive layer portions is deposited on the week of described piezoelectric patches 13 along making intermediate position form a space.
Preferably, described piezoelectric patches 13 is bonded in the surface of described elastic plate 12.
Preferably, described piezoelectric patches 13 is deposited directly to the surface of described elastic plate 12.
Preferably, optional own lead piezoelectric ceramics lead zirconate titanate (PZT) piezoelectric patches of described piezoelectric patches 13, PMN-PT (PMN-Pt) piezoelectric patches, or the leadless piezoelectric sheet such as leadless piezoelectric ceramics barium titanate (BT) leadless piezoelectric ceramics, niobate lead-free piezoelectric ceramics niobium nickel acid potassium (KNN) piezoelectric patches, its thickness is in the scope of 1 to 100 microns.Particularly, described PZT piezoelectric patches is individual layer PZT piezoelectric patches or multilayer PZT piezoelectric patches.Particularly, described PZT piezoelectric patches comprises overall structure PZT piezoelectric patches and/or non-integral PZT piezoelectric patches, and described non-integral PZT piezoelectric patches is formed by connecting by multi-disc radially-arranged strip PZT piezoelectric patches.
Preferably, described elastic plate 12 is by metal material as stainless steel, and nonmetallic materials are as plastics, and metal oxide such as aluminium oxide and nonmetal oxide such as silicon dioxide or ceramic material are formed.Be not limited to material listed in application documents.Described elastic plate 12 can be bonded by single or multiple lift basis material and make.
In the piezoelectric vibration generation device 100 of the first embodiment of the invention shown in Fig. 1 to Fig. 4, its elastic plate 12 is square sheets, and the cavity 111 of described support 11 is the regular prism of hollow, and described piezoelectric patches 13 is square.
Fig. 5 to Fig. 7 illustrates the second embodiment of piezoelectric vibration generation device of the present invention.This piezoelectric vibration generation device 100 ' from the different person of piezoelectric vibration generation device 100 of the first embodiment is: the elastic plate 12 ' of piezoelectric vibration generation device 100 ' is thin rounded flakes, the cylinder that the cavity 111 ' of its support 11 ' is hollow, described piezoelectric patches 13 ' is circular, and described base 15 ' is corresponding with cavity 111 ' lower end shape.
Fig. 8 is the 3rd embodiment of piezoelectric vibration generation device of the present invention.This piezoelectric vibration generation device 100 " from the different person of piezoelectric vibration generation device 100 of the first embodiment be: piezoelectric vibration generation device 100 " support 11 " be installed on the central movable portion 121 of described elastic plate 12 thus make described support 11 " support described elastic plate 12.Described support 11 " there is a pole 113 ", the central movable portion 121 of described elastic plate 12 is installed on described support 11 " pole 113 " upper surface, and the outer movable part 123 of described elastic plate 12 and elastic arm 122 are suspended on described support 11 " pole 113 " outside.Piezoelectric vibration generation device 100 " resistance system 16 " be installed on described support 11 " and pole 113 " outer periphery, described support 11 " pole 113 " bottom is provided with base 15 "; described resistance system 16 " comprise the first magnet piece 161 being installed on movable part 123 surface, described outer " and be installed on described base 15 " on the second magnet piece 162 ", described first magnet piece 161 " with described second magnet piece 162 " opposite face polarity is identical.Described first magnet piece 161 " and described second magnet piece 162 " be all hollow, to allow pole 113 " extend there through, i.e. described first magnet piece 161 " and described second magnet piece 162 " be positioned at described pole 113 " outer periphery.
The manufacture method of piezoelectric vibration generation device of the present invention, comprise the steps: to provide a laminar elastic plate, described elastic plate has central movable portion, at least one elastic arm around described central movable portion and the outer movable part around described elastic arm, all there is certain gap between described central movable portion, elastic arm and outer movable part, be distributed with supporting bridge in described gap to connect adjacent central movable portion, elastic arm and outer movable part; Described elastic plate arranges piezoelectric patches, described piezoelectric patches has at least two conductive layers, be sandwiched in the pad that piezoelectric layer between two conductive layers and at least two can be electrically connected on external electrical device; And a support is provided, the outer movable part of described elastic plate or central movable portion to be installed on described support thus to make elastic plate described in described stent support.
The elastic arm of the elastic plate in above-mentioned manufacture method has several, certain gap is all had between adjacent elastic arm, supporting bridge is distributed with to connect adjacent elastic arm in described gap, supporting bridge in each gap has two at least, and the supporting bridge in same gap is uniformly distributed along described central movable portion, the supporting bridge in adjacent segment is interspersed along described central movable portion.
Support in above-mentioned manufacture method has a cavity, the outer movable part of described elastic plate is installed on the upper surface of described support, and makes the central movable portion of described elastic plate and elastic arm just to described cavity.In described inside cavity, one resistance system is installed, the step of installing this resistance system comprises: install a base in described cavity lower end, first magnet piece and the second magnet piece are provided, described first magnet piece is installed on surface, described central movable portion, described second magnet piece is installed on described base, and makes described first magnet piece identical with described second magnet piece opposite face polarity
As another kind of execution mode, support in above-mentioned manufacture method has a pole, the central movable portion of described elastic plate is installed on the pole upper surface of described support, and the outer movable part of described elastic plate and elastic arm are suspended on outside the pole of described support.In the pole outer periphery of described support, one resistance system is installed, the step of installing this resistance system comprises: install a base in the pole bottom of described support, first magnet piece and the second magnet piece are provided, described first magnet piece is installed on movable part surface, described outer, described second magnet piece is installed on described base, and makes described first magnet piece identical with described second magnet piece opposite face polarity.
Above disclosedly be only the preferred embodiments of the present invention, certainly can not limit the interest field of the present invention with this, therefore according to the equivalent variations that the present patent application the scope of the claims is done, still belong to the scope that the present invention is contained.
Claims (38)
1. a piezoelectric vibration generation device, is characterized in that, comprising:
Elastic plate, described elastic plate is in flake, there is central movable portion, at least one elastic arm around described central movable portion and the outer movable part around described elastic arm, all there is certain gap between described central movable portion, elastic arm and outer movable part, be distributed with supporting bridge in described gap to connect adjacent central movable portion, elastic arm and outer movable part;
Support, supports described elastic plate; And
Piezoelectric patches, described piezoelectric patches is located on described elastic plate, and has at least two conductive layers, is sandwiched in the pad that piezoelectric layer between two conductive layers and at least two can be electrically connected on external electrical device.
2. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described elastic arm has several, all has certain gap between adjacent elastic arm, be distributed with supporting bridge to connect adjacent elastic arm in described gap.
3. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: the supporting bridge in each gap has two at least.
4. piezoelectric vibration generation device as claimed in claim 3, is characterized in that: the supporting bridge in same gap is uniformly distributed along described central movable portion.
5. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: the supporting bridge in adjacent segment is interspersed along described central movable portion.
6. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described elastic plate is made up of stainless steel, plastic cement, aluminium oxide, silicon dioxide or ceramic material.
7. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described elastic plate is bonded by single or multiple lift basis material and makes.
8. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described elastic plate is triangular in shape, polygon or circle.
9. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: the outer movable part of described elastic plate to be installed on described support thus to make elastic plate described in described stent support.
10. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: the central movable portion of described elastic plate to be installed on described support thus to make elastic plate described in described stent support.
11. piezoelectric vibration generation device as claimed in claim 1, it is characterized in that: described support has a cavity, the outer movable part of described elastic plate is installed on the upper surface of described support, and the central movable portion of described elastic plate and elastic arm are just to described cavity.
12. piezoelectric vibration generation device as claimed in claim 11, is characterized in that: also comprise the resistance system being installed on described inside cavity, and described resistance system provides resistance and/or power when described elastic plate is bending back and forth to described elastic plate.
13. piezoelectric vibration generation device as claimed in claim 12, it is characterized in that: described cavity lower end is provided with base, described resistance system comprises the first magnet piece being installed on surface, described central movable portion and the second magnet piece be installed on described base, and described first magnet piece is identical with described second magnet piece opposite face polarity.
14. piezoelectric vibration generation device as claimed in claim 1, it is characterized in that: described support has a pole, the central movable portion of described elastic plate is installed on the pole upper surface of described support, and the outer movable part of described elastic plate and elastic arm are suspended on outside the pole of described support.
15. piezoelectric vibration generation device as claimed in claim 14, it is characterized in that: the resistance system also comprising the pole outer periphery being installed on described support, described resistance system provides resistance and/or power when described elastic plate is bending back and forth to described elastic plate.
16. piezoelectric vibration generation device as claimed in claim 15, it is characterized in that: the pole bottom of described support is provided with base, described resistance system comprises the first magnet piece being installed on movable part surface, described outer and the second magnet piece be installed on described base, and described first magnet piece is identical with described second magnet piece opposite face polarity.
17. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: also comprise the conduction capillary that at least two can be electrically connected on external electrical device, are installed on described support and with the pad of described piezoelectric patches and are electrically connected.
18. piezoelectric vibration generation device as claimed in claim 17, is characterized in that: the outer wall of described support is provided with a capillary positioning seat, and described capillary positioning seat comprises at least two location holes, and described conduction capillary correspondence is installed in described location hole.
19. piezoelectric vibration generation device as claimed in claim 17, is characterized in that: described conduction capillary is welded by metal wire with the pad of described piezoelectric patches, Metal Ball is welded or tin welding and being electrically connected.
20. piezoelectric vibration generation device as claimed in claim 1, it is characterized in that: described piezoelectric patches is corresponding with described elastic plate-shaped, and the interior edge of described piezoelectric patches is positioned at the central movable portion of described elastic plate, the outer of described piezoelectric patches is positioned at the outer movable part of described elastic plate.
21. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: the outside of described piezoelectric patches is also enclosed with at least one matrix.
22. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: offer a through hole in the middle of described piezoelectric patches, described through hole runs through two conductive layers of described piezoelectric patches.
23. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: the week that the piezoelectric layer portion of described piezoelectric patches is deposited on described piezoelectric patches along and be formed centrally a space wherein.
24. piezoelectric vibration generation device as claimed in claim 1, it is characterized in that: the piezoelectric layer of described piezoelectric patches is deposited on the whole surface of described piezoelectric patches, and the week that its at least one Conductive layer portions is deposited on described piezoelectric patches along and make the centre position of described piezoelectric patches form a space.
25. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described piezoelectric piece bonding is on the surface of described elastic plate.
26. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described piezoelectric patches is deposited on the surface of described elastic plate.
27. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described piezoelectric patches thickness is in the scope of 1 to 100 microns.
28. piezoelectric vibration generation device as claimed in claim 1, is characterized in that: described piezoelectric patches is PZT piezoelectric patches, PMN-Pt piezoelectric patches or leadless piezoelectric sheet.
29. piezoelectric vibration generation device as claimed in claim 28, is characterized in that: described PZT piezoelectric patches is individual layer PZT piezoelectric patches or multilayer PZT piezoelectric patches.
30. piezoelectric vibration generation device as claimed in claim 28, is characterized in that: described PZT piezoelectric patches is overall structure PZT piezoelectric patches or is formed by connecting by multi-disc radially-arranged strip PZT piezoelectric patches.
The manufacture method of 31. 1 kinds of piezoelectric vibration generation device, is characterized in that, comprises the steps:
One laminar elastic plate is provided, described elastic plate has central movable portion, at least one elastic arm around described central movable portion and the outer movable part around described elastic arm, all there is certain gap between described central movable portion, elastic arm and outer movable part, be distributed with supporting bridge in described gap to connect adjacent central movable portion, elastic arm and outer movable part;
Described elastic plate arranges piezoelectric patches, described piezoelectric patches has at least two conductive layers, be sandwiched in the pad that piezoelectric layer between two conductive layers and at least two can be electrically connected on external electrical device; And
One support is provided, the outer movable part of described elastic plate or central movable portion is installed on described support thus makes elastic plate described in described stent support.
The manufacture method of 32. piezoelectric vibration generation device as claimed in claim 31, is characterized in that: described elastic arm has several, all has certain gap between adjacent elastic arm, is distributed with supporting bridge to connect adjacent elastic arm in described gap.
The manufacture method of 33. piezoelectric vibration generation device as claimed in claim 31, is characterized in that: the supporting bridge in each gap has two at least, and the supporting bridge in same gap is uniformly distributed along described central movable portion.
The manufacture method of 34. piezoelectric vibration generation device as claimed in claim 31, is characterized in that: the supporting bridge in adjacent segment is interspersed along described central movable portion.
The manufacture method of 35. piezoelectric vibration generation device as claimed in claim 31, it is characterized in that: described support has a cavity, the outer movable part of described elastic plate is installed on the upper surface of described support, and makes the central movable portion of described elastic plate and elastic arm just to described cavity.
The manufacture method of 36. piezoelectric vibration generation device as claimed in claim 35, it is characterized in that: also comprise step: in described inside cavity, one resistance system is installed, the step of installing this resistance system comprises: install a base in described cavity lower end, first magnet piece and the second magnet piece are provided, described first magnet piece is installed on surface, described central movable portion, described second magnet piece is installed on described base, and makes described first magnet piece identical with described second magnet piece opposite face polarity.
The manufacture method of 37. piezoelectric vibration generation device as claimed in claim 31, it is characterized in that: described support has a pole, the central movable portion of described elastic plate is installed on the pole upper surface of described support, and the outer movable part of described elastic plate and elastic arm are suspended on outside the pole of described support.
The manufacture method of 38. piezoelectric vibration generation device as claimed in claim 37, it is characterized in that: also comprise step: in the pole outer periphery of described support, one resistance system is installed, the step of installing this resistance system comprises: install a base in the pole bottom of described support, first magnet piece and the second magnet piece are provided, described first magnet piece is installed on movable part surface, described outer, described second magnet piece is installed on described base, and makes described first magnet piece identical with described second magnet piece opposite face polarity.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101621258A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Miniature power generating device based on piezoelectric crystal frequency converting mechanism |
| CN102064736A (en) * | 2010-12-08 | 2011-05-18 | 重庆大学 | Composite micro wind turbine generator |
| TW201212515A (en) * | 2010-04-28 | 2012-03-16 | Panasonic Elec Works Co Ltd | Power generation device with vibration unit |
| JP2012119400A (en) * | 2010-11-29 | 2012-06-21 | Japan Science & Technology Agency | Hybrid power generation element |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005069959A2 (en) * | 2004-01-21 | 2005-08-04 | The Regents Of The University Of Michigan | Method and micro power generator for generating electrical power from low frequency vibrational energy |
| US8410665B2 (en) * | 2010-12-23 | 2013-04-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS kinetic energy conversion |
-
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101621258A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Miniature power generating device based on piezoelectric crystal frequency converting mechanism |
| TW201212515A (en) * | 2010-04-28 | 2012-03-16 | Panasonic Elec Works Co Ltd | Power generation device with vibration unit |
| JP2012119400A (en) * | 2010-11-29 | 2012-06-21 | Japan Science & Technology Agency | Hybrid power generation element |
| CN102064736A (en) * | 2010-12-08 | 2011-05-18 | 重庆大学 | Composite micro wind turbine generator |
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