CN103901233B - Optical fiber probe with polarization property and preparation method thereof - Google Patents
Optical fiber probe with polarization property and preparation method thereof Download PDFInfo
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- CN103901233B CN103901233B CN201410145043.9A CN201410145043A CN103901233B CN 103901233 B CN103901233 B CN 103901233B CN 201410145043 A CN201410145043 A CN 201410145043A CN 103901233 B CN103901233 B CN 103901233B
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Abstract
The invention discloses a kind of optical fiber probe with polarization property and preparation method thereof。This optical fiber probe includes bare fibre probe and metallic film; bare fibre probe is prepared by the oval core polarization maintaining optical fibre after removing protective layer; its one end is needle point structure; needle point lower surface is oval; there is groove along the long axis direction of needle point lower surface in needle point top, needle point top portion is slit into two lobes of symmetry, and metallic film covers the surface of the bare fibre probe except groove; form two lobe metallic films at needle point top, two lobe metallic films and groove form surface plasma and strengthen structure。The method can significantly improve the radiance of tips of probes dipole daughter, improve relevant signal to noise ratio, preparation process easily accurately controls, and favorable repeatability。This optical fiber probe decapacitation is applied to outside NFM, moreover it is possible to be applied to the detection of Raman spectrum, white-light nanometer ellipsometer and ultrafast pump。
Description
Technical field
The invention belongs to weak optical signal detection technical field, more particularly, to a kind of optical fiber probe with polarization property and preparation method thereof。
Background technology
Near field optic refers to the optical field distribution in distance light source or one wave-length coverage of object, in near-field region, both comprise the radiation field composition propagated to far field, also comprise the evanscent field composition that " depending on " increases with the distance leaving surface in body surface, its intensity and decay rapidly。NFM then refers to and carries out optical measurement near field, this technological break-through light diffraction limit in far field, makes spatial resolution limit be no longer influenced by any restriction in principle。Additionally, NFM is also equipped with changing the ability of sample surfaces nano-scale structures, and then can apply in nanometer manufacture and nanoimprinting technology。Therefore, NFM is in material science, and the field such as bioscience and medical science is applied widely。
Operationally, incident collimated laser beam exceedes the cirtical angle of total reflection and excites evanscent field at sample surfaces NFM。After the needle point of near-field optical probe enters the evanscent field region of sample surfaces, owing to the total reflection of local is suppressed, evanscent field optical signal enters optical fiber via near-field optical probe end coupling, and converts light signals into the signal of telecommunication by Photodetection system, it is thus achieved that the spectral information of sample surfaces。In near-field optical microscope system, one of most important technology is exactly design and the preparation of near-field optical probe, wherein the efficiency of transmission of the probe shape meeting influential system of near-field optical probe, the spatial resolution of the size of probe tip then decision systems。When the aperture of near-field optical probe is less, the spatial resolution of system is higher；If but aperture is too small, the cut-off frequency of near-field optical probe raises, and signal light intensity weakens, and signal to noise ratio reduces, and spatial resolution reduces on the contrary。Therefore, it is necessary to optimize the structural design of near-field optical probe, prepare coupling efficiency and the high near-field optical probe of to-noise ratio。
Summary of the invention
Disadvantages described above or Improvement requirement for prior art, the invention provides a kind of optical fiber probe with polarization property and preparation method thereof, the radiance of tips of probes dipole daughter can be significantly improved, improve relevant signal to noise ratio, preparation process easily accurately controls, and favorable repeatability。This optical fiber probe decapacitation is applied to outside NFM, moreover it is possible to be applied to the detection of Raman spectrum, white-light nanometer ellipsometer and ultrafast pump。
For achieving the above object, according to one aspect of the present invention, it is provided that a kind of optical fiber probe with polarization property, it is characterised in that include bare fibre probe and metallic film；Described bare fibre probe is prepared by the oval core polarization maintaining optical fibre after removing protective layer; one end of described bare fibre probe is needle point structure; needle point lower surface is oval, and needle point top exists groove along the long axis direction of needle point lower surface, and needle point top portion is slit into two lobes of symmetry；Described metallic film covers the surface of the described bare fibre probe except described groove, forms two lobe metallic films at needle point top, and described two lobe metallic films and described groove form surface plasma and strengthen structure。
Preferably, the thickness of described metallic film is 50～150nm。
Preferably, the groove width of described groove is 10～50nm。
Preferably, the material of described metallic film is gold, silver or aluminum。
It is another aspect of this invention to provide that the preparation method providing a kind of above-mentioned optical fiber probe, it is characterised in that comprise the steps:
(1) choose oval core polarization maintaining optical fibre, remove protective layer, obtain bare fibre；
(2) employing draws cone method or chemical etching method to form needle point in one end of bare fibre, and this needle point is class duckbill, and needle point lower surface is oval, constitutes two surface intersections one ridge line of formation of duckbill structure, and the major axis of this ridge line and needle point lower surface is coplanar；
(3) body structure surface obtained in described step (2) plates layer of metal thin film；
(4) excise one section of ridge line at needle point top along ridge line direction, the fiber-optic core material making cut part is exposed outside, makes metallic film be slit into two lobes in needle point top portion simultaneously；
(5) along the long axis direction of needle point lower surface, core exposed for needle point top being divided into two lobes, thus forming the air gap between two lobe metallic films, completing the preparation of optical fiber probe。
Preferably; described step (2) is particularly as follows: using the mixed solution containing HF and NH4F as etching liquid; the lid layer organic solvent insoluble in this etching liquid is covered as protection liquid on etching liquid surface; plain fiber portion is inserted perpendicularly into etching liquid; optical fiber lower end is made to be exposed in etching liquid, until needle point is formed。
In general, by the contemplated above technical scheme of the present invention compared with prior art, have the advantages that
1, strengthening without ambient field, field when utilizing two lobe metallic films of tips of probes can effectively merge far-near field electromagnet mode bidirectional coupled strengthens, thus significantly improving the radiance of tips of probes dipole daughter。
2, adopt oval core polarization maintaining optical fibre, by birefringence effect, eliminate that ordinary optic fibre is asymmetric due to stress and the polarization state change of light that causes, can improve the signal to noise ratio that is concerned with。
3, preparation process easily accurately controls, and favorable repeatability。
Accompanying drawing explanation
Fig. 1 is the schematic diagram adopting chemical etching method to prepare needle point；
Fig. 2 is the structural representation after the body structure surface after needle point is formed plates layer of metal thin film, and wherein, (a) is front view；B () is top view；C () is right view；
Fig. 3 is metallic film structural representation after needle point top portion is slit into two lobes, and wherein, (a) is front view；B () is top view；C () is right view；
Fig. 4 is the final optical fiber probe structural representation prepared, and wherein, (a) is front view；B () is top view；C () is right view；D () is axonometric chart。
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated。Should be appreciated that specific embodiment described herein is only in order to explain the present invention, is not intended to limit the present invention。As long as just can be mutually combined additionally, technical characteristic involved in each embodiment of invention described below does not constitute conflict each other。
The optical fiber probe with polarization property of the embodiment of the present invention includes bare fibre probe and metallic film。Bare fibre probe is prepared by the oval core polarization maintaining optical fibre after removing protective layer; its one end is needle point structure; needle point lower surface is oval; groove is there is in needle point top along the long axis direction of needle point lower surface; needle point top portion is slit into two lobes of symmetry; metallic film covers the bare fibre detecting probe surface except groove, forms two lobe metallic films at needle point top, and this two lobes metallic film and groove form surface plasma and strengthen structure。
Wherein, metallic film material is gold, silver or aluminum, and thickness is 50～150nm, and reason is in that, for plasma enhancing structure, the thickness of metallic film is too small, and Kelvin effect is not notable, but the thickness of metallic film crosses the waste that conference causes material unnecessary。According to the surface plasma body resonant vibration requirement to size, the groove width of groove is 10～50nm。
The above-mentioned optical fiber probe with polarization property can be prepared as follows:
(1) choose oval core polarization maintaining optical fibre, remove protective layer, obtain bare fibre。
(2) employing draws cone method or chemical etching method to form needle point in one end of bare fibre, and this needle point is class duckbill, and needle point lower surface is oval, constitutes two surface intersections one ridge line of formation of duckbill structure, and the major axis of this ridge line and needle point lower surface is coplanar。
Chemical etching method is particularly as follows: using the mixed solution containing HF and NH4F as etching liquid; the lid layer organic solvent insoluble in this etching liquid is covered as protection liquid on etching liquid surface; plain fiber portion is inserted perpendicularly into etching liquid, makes optical fiber lower end be exposed in etching liquid, until needle point is formed。
(3) body structure surface that magnetron sputtering technique obtains in step (2) is utilized to plate layer of metal thin film。
(4) utilizing focused ion bundle micro-nano technology technology, excise one section of ridge line at needle point top along ridge line direction, the fiber-optic core material making cut part is exposed outside, makes metallic film be slit into two lobes in needle point top portion simultaneously。
(5) utilizing focused ion bundle micro-nano technology technology, along the long axis direction of needle point lower surface, core exposed for needle point top is divided into two lobes, thus forming the air gap between two lobe metallic films, completing the preparation of optical fiber probe。
For making those skilled in the art be more fully understood that the present invention, below in conjunction with specific embodiment, the preparation method of the optical fiber probe with polarization property of the present invention is described in detail。
Embodiment 1
There is the preparation method of the optical fiber probe of polarization property particularly as follows:
(1) choosing oval core polarization maintaining optical fibre, it is 12cm that cutting makes its length, removes resinous coat, obtains bare fibre, cleaned up with ethanol and deionized water successively by bare fibre。
(2) by HF solution that mass fraction is 40%, deionized water and NH4F solution 3:5:40 mix homogeneously by volume that mass fraction is 40%, obtaining etching liquid, cover lid layer glycerol on etching liquid surface as protection liquid, the thickness of protection liquid is 2mm。As it is shown in figure 1, plain fiber portion is inserted perpendicularly into etching liquid, making optical fiber lower end be exposed in etching liquid, after etching 10h, needle point is formed。This needle point is class duckbill, and needle point lower surface is oval, and two surface intersections constituting duckbill structure form a ridge line, and this ridge line is coplanar with the major axis of needle point lower surface。
(3) after the structure that step (2) obtains being cleaned up with ethanol and deionized water successively, utilizing magnetron sputtering technique at its plated surface last layer aluminum film, thickness is 150nm, forms structure as shown in Figure 2。
(4) utilizing focused ion bundle micro-nano technology technology, excise one section of ridge line at needle point top along ridge line direction, the fiber-optic core material making cut part is exposed outside, makes metallic film be divided into two lobes at needle point top simultaneously, forms structure as shown in Figure 3。
(5) focused ion bundle micro-nano technology technology is utilized, long axis direction along needle point lower surface, the core that needle point top is exposed is formed groove, needle point top portion is slit into two lobes of symmetry, groove width is 50nm, thus forming the air gap between two lobe metallic films, completing the preparation of optical fiber probe, the optical fiber probe structure finally given is as shown in Figure 4。
As shown in Figure 4, the optical fiber probe prepared as stated above includes bare fibre probe 2 and metallic film 1, one end of bare fibre probe 2 is needle point structure, needle point lower surface is oval, and major axis is 6 μm, and short axle is 3 μm, groove 3 is there is in needle point top along the long axis direction of needle point lower surface, needle point top portion is slit into two lobes of symmetry, and metallic film 1 covers the surface of the bare fibre probe 2 except groove 3, and the two lobe metallic films at needle point top and groove 3 form surface plasma and strengthen structure。
Embodiment 2
There is the preparation method of the optical fiber probe of polarization property particularly as follows:
(1) choosing oval core polarization maintaining optical fibre, it is 10cm that cutting makes its length, removes resinous coat, obtains bare fibre, cleaned up with ethanol and deionized water successively by bare fibre。
(2) by HF solution that mass fraction is 40%, deionized water and NH4F solution 3:5:40 mix homogeneously by volume that mass fraction is 40%, obtaining etching liquid, cover lid layer glycerol on etching liquid surface as protection liquid, the thickness of protection liquid is 2mm。Plain fiber portion being inserted perpendicularly into etching liquid, makes optical fiber lower end be exposed in etching liquid, after etching 10h, needle point is formed。This needle point is class duckbill, and needle point lower surface is oval, and two surface intersections constituting duckbill structure form a ridge line, and this ridge line is coplanar with the major axis of needle point lower surface。
(3) after the structure that step (2) obtains being cleaned up with ethanol and deionized water successively, utilizing magnetron sputtering technique at its plated surface last layer silverskin, thickness is 50nm。
(4) utilizing focused ion bundle micro-nano technology technology, excise one section of ridge line at needle point top along ridge line direction, the fiber-optic core material making cut part is exposed outside, makes metallic film be divided into two lobes at needle point top simultaneously。
(5) utilize focused ion bundle micro-nano technology technology, along the long axis direction of needle point lower surface, the core that needle point top is exposed forms groove, needle point top portion is slit into two lobes of symmetry, groove width is 10nm, thus forming the air gap between two lobe metallic films, completes the preparation of optical fiber probe。
The structure of ordinary optic fibre or suffered mechanical stress can not be full symmetric, cause that light can make polarization state that irregular change occurs in communication process because of birefringence。The present invention adopts oval core polarization maintaining optical fibre, by the elliptic design of fibre core, it is artificially induced known stress so that light produces stronger birefringence when propagating, now the Changing Pattern of polarization state can be tried to achieve according to known stress, thus can eliminate the irregular impact of polarization state。
During test sample, flashlight arrives surface plasma field and strengthens structure, motivates surface plasma between two lobe metallic films, and when the gap when between two lobe metallic films meets wave vector matching condition, an enhancement effect will occur gap location。The coupled entrance fiber-optic transfer of enhanced flashlight also converts light signals into the signal of telecommunication by Photodetection system, it is thus achieved that the spectral information of sample surfaces, thus realizing breaking through the imaging of diffraction limit of far-field。
The invention is not limited in above-described embodiment, specifically, metallic film material is not limited to silver or aluminum, and thickness is not limited to 50nm or 150nm, and the groove width of groove is not limited to 10nm or 50nm, more generally, metallic film material can be any one in gold, silver or aluminum, and thickness can be any value within the scope of 50～150nm, for instance 80nm or 100nm, groove width can be any value within the scope of 10～50nm, for instance 20nm or 30nm。
Those skilled in the art will readily understand; the foregoing is only presently preferred embodiments of the present invention; not in order to limit the present invention, all any amendment, equivalent replacement and improvement etc. made within the spirit and principles in the present invention, should be included within protection scope of the present invention。
Claims (6)
1. a preparation method with the optical fiber probe of polarization property, described optical fiber probe includes bare fibre probe and metallic film；Described bare fibre probe is prepared by the oval core polarization maintaining optical fibre after removing protective layer; one end of described bare fibre probe is needle point structure; needle point lower surface is oval, and needle point top exists groove along the long axis direction of needle point lower surface, and needle point top portion is slit into two lobes of symmetry；Described metallic film covers the surface of the described bare fibre probe except described groove, forms two lobe metallic films at needle point top, and described two lobe metallic films and described groove form surface plasma and strengthen structure；It is characterized in that, comprise the steps:
(1) choose oval core polarization maintaining optical fibre, remove protective layer, obtain bare fibre；
(2) employing draws cone method or chemical etching method to form needle point in one end of bare fibre, and this needle point is class duckbill, and needle point lower surface is oval, constitutes two surface intersections one ridge line of formation of duckbill structure, and the major axis of this ridge line and needle point lower surface is coplanar；
(3) body structure surface obtained in described step (2) plates layer of metal thin film；
(4) excise one section of ridge line at needle point top along ridge line direction, the fiber-optic core material making cut part is exposed outside, makes metallic film be slit into two lobes in needle point top portion simultaneously；
(5) along the long axis direction of needle point lower surface, core exposed for needle point top being divided into two lobes, thus forming the air gap between two lobe metallic films, completing the preparation of optical fiber probe。
2. the preparation method of optical fiber probe as claimed in claim 1, it is characterised in that described step (2) is particularly as follows: will containing HF and NH4The mixed solution of F, as etching liquid, covers the lid layer organic solvent insoluble in this etching liquid as protection liquid, plain fiber portion is inserted perpendicularly into etching liquid, makes optical fiber lower end be exposed in etching liquid, until needle point is formed on etching liquid surface。
3. the preparation method of optical fiber probe as claimed in claim 1 or 2, it is characterised in that the thickness of described metallic film is 50～150nm。
4. the preparation method of optical fiber probe as claimed in claim 1 or 2, it is characterised in that the width of described the air gap is 10～50nm。
5. the preparation method of optical fiber probe as claimed in claim 1 or 2, it is characterised in that the material of described metallic film is gold, silver or aluminum。
6. the optical fiber probe prepared by the method according to any one of claim 1 to 5。
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| CN104101737A (en) * | 2014-07-11 | 2014-10-15 | 华中科技大学 | Manufacture method of optical fiber probe |
| CN106033092B (en) * | 2015-03-09 | 2018-09-07 | 中国科学院物理研究所 | A kind of optical fiber probe and preparation method thereof |
| BR102015010352B1 (en) * | 2015-05-07 | 2021-05-04 | Instituto Nacional De Metrologia, Qualidade E Tecnologia - Inmetro | metallic device for near-field optical microscopy and spectroscopy and its fabrication method |
| TWI595870B (en) | 2015-09-24 | 2017-08-21 | 曾效參 | Optical needle with lightguide groove and method for preparation thereof |
| TWI546071B (en) | 2015-09-24 | 2016-08-21 | 曾效參 | Optical Needle |
| TW201713060A (en) | 2015-09-24 | 2017-04-01 | 曾效參 | Lightguide assembly |
| KR20240096853A (en) * | 2016-12-22 | 2024-06-26 | 매직 립, 인코포레이티드 | Methods and systems for fabrication of shaped fiber elements for scanning fiber displays |
| CN108614130B (en) * | 2018-04-20 | 2023-08-25 | 华中科技大学 | Transmission-enhanced nano annular near-field optical probe and preparation method thereof |
| CN109212667A (en) * | 2018-08-29 | 2019-01-15 | 武汉理工大学 | The optical fiber optical tweezers probe with secondary cone angle prepared with two step method |
| CN110967528B (en) * | 2018-09-30 | 2023-03-24 | 中国计量科学研究院 | Scanning probe |
| CN112051213B (en) * | 2020-08-07 | 2021-11-16 | 北京航空航天大学 | Optical diagnostic probe for measuring local plasma and measuring method thereof |
| CN112964908B (en) * | 2021-02-04 | 2022-05-20 | 西安交通大学 | Scattering type tapered tip optical fiber probe for exciting and collecting near-field optical signals and working method thereof |
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