CN103896224A - Device for preparing high-purity nitrogen trifluoride by removing impurities in nitrogen trifluoride by use of rectification method - Google Patents
Device for preparing high-purity nitrogen trifluoride by removing impurities in nitrogen trifluoride by use of rectification method Download PDFInfo
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- CN103896224A CN103896224A CN201210590686.5A CN201210590686A CN103896224A CN 103896224 A CN103896224 A CN 103896224A CN 201210590686 A CN201210590686 A CN 201210590686A CN 103896224 A CN103896224 A CN 103896224A
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- heat exchanger
- nitrogen trifluoride
- connecting tube
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- adsorption column
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Abstract
The invention relates to a device for preparing high-purity nitrogen trifluoride by removing impurities in nitrogen trifluoride by use of a rectification method. The device comprises a connecting valve, a rectifying device, connecting pipelines and the like; the rectifying device is covered with an insulating layer, and is composed of a medium-pressure rectifying tower and a low-pressure rectifying tower, a heat exchanger E1, a heat exchanger E2 and the like are mounted inside and outside the rectifying device, the connecting valve is connected with an adsorption column by virtue of a connecting pipeline; the adsorption column is connected with the heat exchanger E1 and a low-temperature adsorption column by virtue of the connecting pipelines, the low-temperature adsorption column is connected with the heat exchanger E2, a heat exchanger E4 and a heat exchanger E3 by virtue of the connecting pipelines, and the medium-pressure rectifying tower is connected with subsequent equipment by virtue of the connecting pipeline. The device has the advantages of reasonable structural design, convenience in use and continuous production, and in addition, the mass fraction of the produced nitrogen trifluoride is more than 98%.
Description
Technical field
The invention belongs to the device of production chemical product, particularly relate to a kind of rectification method and remove the device that impurity in nitrogen trifluoride is prepared high-purity nitrogen trifluoride.
Background technology
In existing technology, while manufacturing gas of nitrogen trifluoride, for removing impurity wherein, the mode of employing is; The nitrogen trifluoride that comprises carbon tetrafluoride foreign matter is infiltrated in zeolite 3A, 4A or 5A bed, nitrogen trifluoride is optionally adsorbed onto on described bed by connecting tube, then by nitrogen trifluoride desorption from the bed, aforesaid way can not Comprehensive removal impurity, consume overlong time, inapplicable continuous production, and output capacity is relatively low.
Summary of the invention
The present invention for solve the technical problem existing in known technology provide a kind of rational in infrastructure, can produce continuously, and the higher rectification method of output capacity is removed the device that impurity in nitrogen trifluoride is prepared high-purity nitrogen trifluoride.
The technical scheme that the present invention takes for the technical problem existing in solution known technology is:
Impurity in rectification method removal nitrogen trifluoride is prepared the device of high-purity nitrogen trifluoride, comprise at least more than one connection valve 12, compressor, water cooler, rectifier unit 15, connecting tube 11 etc., described rectifier unit is to be made up of middle pressure rectifying tower 7 and low-pressure distillation tower 9, heat exchanger E5 8 is housed therein, heat exchanger E6 10, its outside connection is equipped with heat exchanger E1 2, heat exchanger E2 4, heat exchanger E4 5, heat exchanger E3 6, adsorption column 1 is connected with heat exchanger E1 2 by connecting tube, heat exchanger E1 is connected with cryogenic absorption post 3 by connecting tube, cryogenic absorption post is by connecting tube and heat exchanger E2 4, heat exchanger E4 5, heat exchanger E3 6 is connected, middle pressure rectifier 7 is by connecting tube and heat exchanger E5 8, low-pressure distillation tower 9, heat exchanger E6 10, condenser 13 is connected, condenser is connected with follow-up equipment.
The present invention can also adopt following technical scheme:
The outside of described rectifier unit (15) is coated with an insulation layer (14).
Advantage and positively effect that the present invention has are: reasonable in design, easy to use, can produce continuously, output capacity is high, the nitrogen trifluoride massfraction of production is more than 98%.
Brief description of the drawings
Fig. 1 is structural representation of the present invention.
In figure: 1, adsorption column; 2, heat exchanger E1; 3, cryogenic absorption post; 4, heat exchanger E2; 5, heat exchanger E4; 6, heat exchanger E3; 7, middle pressure rectifying tower; 8, heat exchanger E5; 9, low-pressure distillation tower; 10, heat exchanger E6; 11, connecting tube; 12, connect valve; 13, condenser; 14, thermal insulation layer; 15, rectifier unit.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further described.
With reference to Fig. 1, impurity in rectification method removal nitrogen trifluoride is prepared the device of high-purity nitrogen trifluoride, comprise at least more than one connection valve 12, compressor, water cooler, rectifier unit 15, connecting tube 11 etc., the outside of described rectifier unit is coated with an insulation layer 14, and formed by middle pressure rectifying tower 7 and low-pressure distillation tower 9, heat exchanger E5 8 is housed therein, heat exchanger E6 10, its outside connection is equipped with heat exchanger E1 2, heat exchanger E2 4, heat exchanger E4 5, heat exchanger E3 6, adsorption column 1 is connected with heat exchanger E1 2 by connecting tube, heat exchanger E1 is connected with the cryogenic absorption post 3 of in-built activated alumina by connecting tube, cryogenic absorption post is by connecting tube and heat exchanger E2 4, heat exchanger E4 5, heat exchanger E3 6 is connected, middle pressure rectifier 7 is by connecting tube and heat exchanger E5 8, low-pressure distillation tower 9, heat exchanger E6 10, condenser 13 is connected, condenser is connected with follow-up equipment.
Working process of the present invention is:
Use time of the present invention, first open corresponding connection valve 12, make each parts in normal operating conditions, according to step, first, by thick nitrogen trifluoride product compression, remove part H
2o and CO
2, and it is cooling, make cooling rear gas enter the adsorption column 1 that molecular sieve is housed, C0
2and H
20 is further removed, and tetrafluoro-methane is also lowered.Then in heat exchanger E1 2, be cooled to by low temperature nitrogen after-70 DEG C, enter the cryogenic absorption post 3 of in-built activated alumina, now N
2f
2, N
2f
4, N
20 is removed, and tetrafluoro-methane further reduces.Then the gas of approximately-70 DEG C enters the about 0.6MPa by middle pressure rectifying tower 7() and the about 0.2MPa of low-pressure distillation tower 9() rectifier unit that forms, inside and outside this device, be provided with heat exchanger E2 4, heat exchanger E3 6, heat exchanger E4 5, heat exchanger E5 8 and heat exchanger E6 10, wherein heat exchanger E2 4 is middle pressure rectifying tower 7 tower bottom reboilers, heat exchanger E3 6, heat exchanger E4 5 are vaporizer, heat exchanger E5 8 is the intermediate condenser reboiler of holding concurrently, and heat exchanger E6 10 is low-pressure distillation tower 9 trim the top of column condensers.In the middle pressure rectifying tower 7 of rectifier unit and low-pressure distillation tower 9, carry out repeatedly gas-to-liquid contact and mass transfer, finally discharge 99.999% high-purity nitrogen trifluoride by low-pressure distillation tower 9 tower bottoms, and by discharging the impure waste material of high boiling point (approximately containing 80% nitrogen trifluoride) at the bottom of middle pressure rectifying tower 7 towers, discharge lower-boiling impurity waste material (54%He, 36%N by low-pressure distillation tower 9 tower tops
2with approximately 9.5% nitrogen trifluoride).
Claims (2)
1. the impurity in a rectification method removal nitrogen trifluoride is prepared the device of high-purity nitrogen trifluoride, comprise at least more than one connection valve (12), compressor, water cooler, rectifier unit (15), connecting tube (11) etc., it is characterized in that: rectifier unit (15) is to be made up of middle pressure rectifying tower (7) and low-pressure distillation tower (9), heat exchanger E5(8 is housed) therein, heat exchanger E6(10), its outer heat exchanger E1(2 that is equipped with) heat exchanger E2(4), heat exchanger E4(5), heat exchanger E3(6), adsorption column (1) is by connecting tube and heat exchanger E1(2) be connected, heat exchanger E1 is connected with cryogenic absorption post (3) by connecting tube, cryogenic absorption post is by connecting tube and heat exchanger E2(4), heat exchanger E4(5), heat exchanger E3(6) be connected, middle pressure rectifier (7) is by connecting tube and heat exchanger E5(8), low-pressure distillation tower (9), heat exchanger E6(10), condenser (13) is connected.
2. the impurity in rectification method removal nitrogen trifluoride according to claim 1 is prepared the device of high-purity nitrogen trifluoride, it is characterized in that: the outside of described rectifier unit (15) is coated with an insulation layer (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210590686.5A CN103896224A (en) | 2012-12-31 | 2012-12-31 | Device for preparing high-purity nitrogen trifluoride by removing impurities in nitrogen trifluoride by use of rectification method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210590686.5A CN103896224A (en) | 2012-12-31 | 2012-12-31 | Device for preparing high-purity nitrogen trifluoride by removing impurities in nitrogen trifluoride by use of rectification method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103896224A true CN103896224A (en) | 2014-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210590686.5A Pending CN103896224A (en) | 2012-12-31 | 2012-12-31 | Device for preparing high-purity nitrogen trifluoride by removing impurities in nitrogen trifluoride by use of rectification method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3782969A1 (en) | 2019-08-22 | 2021-02-24 | Fujian Yongjing Technology Co., Ltd. | Process of fluorinating inorganic or organic compounds by direct fluorination |
-
2012
- 2012-12-31 CN CN201210590686.5A patent/CN103896224A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3782969A1 (en) | 2019-08-22 | 2021-02-24 | Fujian Yongjing Technology Co., Ltd. | Process of fluorinating inorganic or organic compounds by direct fluorination |
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Application publication date: 20140702 |