CN103885178B - MOEMS bistable state raster translation optical modulator and array thereof - Google Patents
MOEMS bistable state raster translation optical modulator and array thereof Download PDFInfo
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- CN103885178B CN103885178B CN201410119728.6A CN201410119728A CN103885178B CN 103885178 B CN103885178 B CN 103885178B CN 201410119728 A CN201410119728 A CN 201410119728A CN 103885178 B CN103885178 B CN 103885178B
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Abstract
The present invention relates to light modulator technologies field, be specifically related to a kind of grating light modulator and manufacture method thereof and array: MOEMS bistable state raster translation optical modulator comprises silicon substrate 1 and the insulation course on it 2, grating 6 passes through elastic supporting beams flying shore above insulation course 2, brace summer is made up of beam body 5 and support column 4, the middle part of beam body is connected with grating, the two-layer compound beam that Liang Tiwei is made up of different thermal expansion coefficient material, grating immediately below be provided with lower reflecting surface 3; External current driving device 7, can produce the electric current of different amplitude, frequency.The present invention utilizes a kind of removable slit with bistable characteristic brace summer can switch dual stable position under electrothermal drive, avoid grating in unstable state position resident be subject to power-supply fluctuation interference and cause position excursion reduce diffraction efficiency problem occur, reach the object preventing adhesion failure from occurring simultaneously, and have driving circuit stability requirement low, realize advantage easy, low in energy consumption.
Description
Technical field
The present invention relates to light modulator technologies field, be specifically related to a kind of grating light modulator and manufacture method thereof and array.
Background technology
MOEMS(Micro-Opto-Electro-MechanicalSystems, Micro-Opto-Electro-Mechanical Systems) technology is MEMS (Micro-Electro-MechanicalSystems, MEMS (micro electro mechanical system)) the further fusion of technology and optical technology, have born advantage, it can realize the integrated of micro-optical component and control circuit, has and can manufacture in enormous quantities, unit cost is low, volume is small, fast response time, the advantages such as dependable performance.At present, obtain development at a high speed based on the photomodulator of MOEMS technology manufacture with its excellent performance and apply widely, typically have the Digital Micromirror Device DMD of TIX and the grating light valve GLV of silicon light machine tool company, they have also been obtained widespread use in Projection Display, adaptive optics, sensor, optical communication, microminiaturized optical table etc.Utilize MOEMS technology to realize the more wider functional exploitation derived the operation of the intensity of light, phase place, polarization and control, become the important application Development Trend in this field.The grating light modulator based on MOEMS proposed by University Of Chongqing, utilize Principle of Grating Diffraction to realize optical modulation and achieve plentiful and substantial achievement in research in shadow casting technique's application, but existing grating light modulator, the application number proposed as University Of Chongqing is translational grating light modulator disclosed in the Chinese invention patent of 200510020186.8, higher to the control overflow of the spacing of upper and lower reflecting surface, do not powering up and powering up two positions easily along with the drift of driving circuit voltage fluctuation forming position, the spacing parameter of upper and lower reflecting surface and design parameter is caused to there are differences, the diffracting effect of expection can not be obtained.Particularly under voltage condition of exerting pressure, the a certain height that beam rests on drawn-down position determines by driving voltage, if and to stop position be kept unsettled constant at a certain height when contactless mode is drop-down, will keep applying constant voltage always, higher to the stability requirement of driving circuit, add the complexity of driving circuit.In addition, in Long-Time Service process, when electrostatic drop-down due to interference occur under overdraw and cause adhesive phenomenon after, once the surface forces such as the electrostatic force that produces of Van der Waals force between translational grating light modulator upper and lower surface, trapped charge accumulation exceed the elastic-restoring force of semi-girder, when not having other additional pulling force upwards, adhesion is easily caused to make device to upspring and to lose efficacy.If but changed devices function mode, translational grating light modulator upper and lower surface contact when making drop-down, although ensure that device position stable and without drift, but would be more prone to cause device adhesion failure.
Summary of the invention
In view of this, in order to solve the problem, the present invention proposes the bistable state raster translation optical modulator that a kind of MOEMS technology manufactures, utilize a kind of removable slit with bistable characteristic brace summer can switch stable position under electrothermal drive, avoid grating in unstable state position resident be subject to power-supply fluctuation interference and cause position excursion reduce diffraction efficiency problem occur, reach the object preventing adhesion failure from occurring simultaneously, and have driving circuit stability requirement low, realize advantage easy, low in energy consumption.。
The technical solution adopted for the present invention to solve the technical problems is as follows:
The MOEMS bistable state raster translation optical modulator that the present invention proposes, comprises following structure:
Silicon substrate and the insulation course be arranged on silicon substrate;
Grating, by elastic supporting beams flying shore above insulation course, described grating covering metal reverberation in elastic substrates is formed, described elastic supporting beams is made up of beam body and support column, the two ends of beam body are fixedly installed on insulation course by support column, the middle part of beam body is fixedly connected with grating, the two-layer compound beam that Liang Tiwei is made up of different thermal expansion coefficient material, primer forms compressive stress adding man-hour, quilting material forms tension stress adding man-hour, wherein has at least layer of material to conduct electricity and forms by the support column at two ends the two poles of the earth that electricity connects;
Lower reflecting surface, is arranged on the insulation course below grating;
Current driving device, is connected to form loop with the conductive material bipolar layer in composite beam, can produces the drive current of different amplitude, different frequency.
Further, described elastic supporting beams has two, and two sides relative with grating are respectively connected.
Further, the gap variable between grating surface and lower reflecting surface, when the obstructed excess current of the elastic supporting beams connecting grating, spacing is (2n-1) λ/4; And during by electric current, spacing is n λ/2.
Further, form the double layer material of described elastic supporting beams, primer is polysilicon, and quilting material is aluminium; The primer of grating is polysilicon, and quilting material is aluminium; Lower reflecting surface materials is aluminium; The material of insulation course is silicon dioxide.
Further, form the material of described elastic supporting beams, can also expand to three layers, intermediate layer material is polysilicon, and top layer and primer are aluminium, and adding polysilicon layer formation in man-hour compressive stress, it is 0 that aluminium lamination forms stress; The primer of grating is polysilicon, and quilting material is aluminium; Lower reflecting surface materials is aluminium; The material of insulation course is silicon dioxide.
The present invention also provides the grating light modulator array of described MOEMS bistable state raster translation optical modulator composition, the grating light modulator array of described MOEMS bistable state raster translation optical modulator composition is formed side by side by least 2 MOEMS bistable state raster translation optical modulators, wherein each MOEMS bistable state raster translation optical modulator all can under driving circuit controls self contained function, form the different dot matrix of diffracting effect.
The present invention also openly manufactures the method for MOEMS bistable state raster translation optical modulator as above, comprises the steps:
1) thermal oxide layer of silicon dioxide on a silicon substrate;
2) on the silicon dioxide layer of step 1) gained low-pressure chemical vapor phase deposition one deck silicon nitride as insulation course;
3) in step 2) sputtering photoetching aluminium on the insulation course of gained, the wire forming multiple lower reflecting surface of answering with upper strata grating pair and power up for grating;
4) deposit silicon dioxide is as sacrifice layer on the insulating layer to adopt plasma reinforced chemical vapour deposition method, and etching forms the anchor point for holding support column;
5) depositing polysilicon etch brace summer and grating;
6) sputter on the top layer and brace summer of grating and etch aluminium, forming the brace summer of reflecting surface and double layer material;
7) with HF sour eating away sacrifice layer, make grating unsettled.
Present invention utilizes following characteristic: the brace summer fixed of both-end is due to the action of compressive stress of inner pre-add, under external force can unstability upward or two, below position warpage, until internal stress disappears, two stable position above or below formation, after external force is cancelled, beam can keep stable position voluntarily, until next time enough strong reverse direction External Force Acting makes brace summer switch between two stable states.The brace summer that in the present invention, both-end is fixing, owing to there is upper and lower two-layer different materials, utilizes and adds the technical arrangement plan in man-hour it can be made in advance to produce different internal stress directions, and when making to cool, beam reaches fixing stable position to the fixed-direction unstability controlled.This stress direction can by adding the materials at two layers generation stress reversion that electric current makes thermal expansivity different, beam is moved round about, and be switched to another stable state, until after after removing electric current, temperature drops to threshold temperature, stress beam distribution is replied and is caused it can be returned to original stable position again.The position of these two stable states is determined by the character of material.This bistable state type of drive is after reaching each stable position, the position of beam is all very stable, not easily along with the electric current fuctuation within a narrow range of extraneous driving circuit is drifted about, only after electric current applies or cancels the certain threshold value of arrival, there is reversion and the bistable state position of beam just can be caused to switch in stress distribution, so lower to the stability requirement of current driving device, driving circuit realizes comparatively simple.
In order to make drive circuit power consumption lower, type of drive is more stable in Long-Time Service, by further technical scheme, composite beam material can also be expanded to three layers: intermediate layer material is pre-formed when compressive stress makes both-end support has unstability to be inclined to generation bistable characteristic, and two-layer for driving layer up and down, make the unstability direction of beam deflect to different directions when powering up.Preferred interlayer material is polysilicon, and top layer and primer are aluminium, and adding polysilicon layer formation in man-hour compressive stress, it is 0 that aluminium lamination forms stress.
Describe by further technical scheme, the position of these two stable states, the spacing namely between grating surface and lower reflecting surface, when the obstructed excess current of the elastic supporting beams connecting grating, spacing is (2n-1) λ/4; And during by electric current, spacing is n λ/2.This just makes the phase differential of upper and lower two-layer optical grating reflection light, when obstructed electric current, is π, is formed to interfere to disappear mutually in the position of diffraction light zero level; When by electric current, phase differential is 2 π, and in the position of diffraction light zero level, formation is interfered long mutually.So this stable position that to be two modulation effects best, this position is can by realizing the design of brace summer parameter and Controlling Technology parameter.
The present invention is in bistable two fixed positions because removable slit is surperficial respectively at applying electric current with under removing electric current two states, not easily there is the phenomenon that the application number as University Of Chongqing's proposition is translational grating light modulator position excursion disclosed in the Chinese invention patent of 200510020186.8, lower to the requirement of driving circuit stability; Owing to all getting along well in bistable two positions lower surface contact in removable slit surface, so also not easily there is adhesion failure phenomenon after Long-Time Service; Even if accidentally adhere to, the stress distribution reversion utilizing electrothermal drive to cause can make removable slit surface obtain pulling force upwards and break away from adhesion failure.
Other advantages of the present invention, target, to set forth in the following description to a certain extent with feature, and to a certain extent, based on will be apparent to those skilled in the art to investigating hereafter, or can be instructed from the practice of the present invention.Target of the present invention and other advantages can by instructionss below, claims, and in accompanying drawing, specifically noted structure realizes and obtains.
Accompanying drawing explanation
Fig. 1 is single pixel MOEMS bistable state raster translation optical modulator structural drawing of the present invention.
Fig. 2 is the schematic diagram that shown MOEMS bistable state raster translation optical modulator forms array.
Fig. 3 is the schematic diagram of single pixel MOEMS bistable state raster translation optical modulator stress warpage situation when not adding electric current.
The schematic diagram of stress warpage situation when Fig. 4 is single pixel MOEMS bistable state raster translation optical modulator non-electric current.
Fig. 5 is the schematic diagram that trilaminate material composite beam list pixel MOEMS bistable state raster translation optical modulator primer adds electric stress warpage situation.
Fig. 6 is the schematic diagram that trilaminate material composite beam list pixel MOEMS bistable state raster translation optical modulator quilting material adds electric stress warpage situation.
In figure: 1. silicon substrate, 2. insulation course, 3. descend reflecting surface, 4. elastic supporting beams support column 5. elastic supporting beams beam body, 6. grating, 7, current driving device.
Embodiment
Below will be described in detail preferred embodiment of the present invention.
See Fig. 1, the MOEMS bistable state raster translation optical modulator of the present embodiment comprises silicon substrate 1 and is arranged at the insulation course 2 on silicon substrate, grating 6 passes through elastic supporting beams flying shore above insulation course 2, described grating covering metal reverberation in elastic substrates is formed, described elastic supporting beams is made up of beam body 5 and support column 4, the two ends of beam body 5 are fixedly installed on insulation course 2 by support column 4, the middle part of beam body is fixedly connected with grating, the two-layer compound beam that Liang Tiwei is made up of different thermal expansion coefficient material, the preferred polysilicon of primer, form compressive stress man-hour adding, the preferred aluminium of quilting material, form tension stress man-hour adding, wherein aluminium lamination is conducted electricity and is formed the two poles of the earth of electricity connection by the support column 4 at two ends, grating immediately below insulation course on be provided with lower reflecting surface 3, external current driving device 7, can be connected to form loop with the conductive material bipolar layer in composite beam, can produce the drive current of different amplitude, different frequency.
Above-mentioned MOEMS bistable state raster translation optical modulator is made by following technological process:
1) thermal oxide layer of silicon dioxide on a silicon substrate;
2) on the silicon dioxide layer of step 1) gained low-pressure chemical vapor phase deposition one deck silicon nitride as insulation course;
3) in step 2) sputtering photoetching aluminium on the insulation course of gained, the wire forming multiple lower reflecting surface of answering with upper strata grating pair and power up for grating;
4) deposit silicon dioxide is as sacrifice layer on the insulating layer to adopt plasma reinforced chemical vapour deposition method, and etching forms the anchor point for holding support column;
5) depositing polysilicon etch brace summer and grating;
6) sputter on the top layer and brace summer of grating and etch aluminium, forming the brace summer of reflecting surface and double layer material;
7) with HF sour eating away sacrifice layer, make grating unsettled.
MOEMS bistable state raster translation optical modulator is mainly used in forming grating light modulator array, can be widely used on display, projection, printing, optical communication, spectrometer, to realize the switching gate to multiple beam, the volume and weight of these instrument and equipments can be reduced.
See Fig. 2, MOEMS bistable state raster translation optical modulator is mainly used in forming grating light modulator array, array at least 2 MOEMS bistable state raster translation optical modulators form side by side, also be provided with driving circuit, make the bistable state height that wherein each MOEMS bistable state raster translation optical modulator all can move up and down different respectively under current driving device controls.
Present invention utilizes following characteristic: the brace summer fixed of both-end is due to the action of compressive stress of inner pre-add, under external force can unstability upward or two, below position warpage, until internal stress disappears, two stable position above or below formation, after external force is cancelled, beam can keep stable position voluntarily, until next time enough strong reverse direction External Force Acting makes brace summer switch between two stable states.The position of these two stable states is determined by the character of material.See Fig. 3, in the present invention there is upper and lower two-layer different materials in brace summer 5.By add make man-hour primer formed compressive stress, quilting material formed tension stress.The material that there is compressive stress due to bottom in cooling procedure has the trend of expansion, and the material of top layer formation tension stress has the trend of contraction, arrow in Fig. 3 is seen in direction, both-end brace summer is sunk and reaches the first stable position, this position is initial position, does not need to add electric current and just can reach.Both-end brace summer 5 sink and the grating 6 be attached thereto in centre position is declined, and the distance h preferably now between grating 6 and lower reflecting surface 3 is (2n-1) λ/4, gets λ/4 as during n=1.On the other hand, when brace summer 5 adds electric current driving time, see Fig. 4, because materials at two layers expansion coefficient is different, such as preferred quilting material is aluminium, and primer is polysilicon, because the expansion coefficient of aluminium is greater than polysilicon, make the inflationary spiral of top layer aluminium be greater than the inflationary spiral of underlying polysilicon, in fact produce stress reversion distribution at materials at two layers interface place, causing both-end brace summer 5 to upwarp the second stable position.In this position, the distance h preferably now between grating 6 and lower reflecting surface 3 is n λ/2, gets λ/2 as during n=1.Until after after removing electric current, temperature drops to threshold temperature, stress beam distribution is replied and is caused it can be returned to original stable position again.Preferred two bistable state height make the phase differential of upper and lower two-layer optical surface reflection ray, when obstructed electric current, are π, formed the most capable and experiencedly relate to the effect that disappears mutually in the position of diffraction light zero level; When by electric current, phase differential is 2 π, is formed the most capable and experiencedly relate to mutually long-acting fruit in the position of diffraction light zero level.So this stable position that to be two modulation effects best, this position is can by design and the Controlling Technology parameter of brace summer parameter and add size of current to realize.This bistable state type of drive is after reaching each stable position, the beam body that compound substance is formed reaches the steady state (SS) that stress is close to 0, so insensitive to current fluctuation, need larger electric current change to cause stress reversion can make it again unstability and be switched to rightabout stable state.So lower to the stability requirement of current driving device, driving circuit realizes comparatively simple.
The present invention is in bistable two fixed positions because removable slit is surperficial respectively at applying electric current with under removing electric current two states, not easily there is the phenomenon that the application number as University Of Chongqing's proposition is translational grating light modulator position excursion disclosed in the Chinese invention patent of 200510020186.8, lower to the requirement of driving circuit stability; Owing to all getting along well in bistable two positions lower surface contact in removable slit surface, so also not easily there is adhesion failure phenomenon after Long-Time Service; Even if accidentally adhere to, the stress distribution reversion utilizing electrothermal drive to cause can make removable slit surface obtain pulling force upwards and break away from adhesion failure.
In order to make drive circuit power consumption lower, type of drive is more stable in Long-Time Service, by further technical scheme, composite beam material can also be expanded to three layers, see Fig. 5 and Fig. 6. intermediate layer material is pre-formed when compressive stress makes both-end support has unstability to be inclined to generation bistable characteristic, and two-layer for driving layer up and down, make the unstability direction of beam deflect to different directions when powering up.Preferred interlayer material is polysilicon, and top layer and primer are aluminium, and adding polysilicon layer formation in man-hour compressive stress, it is 0 that aluminium lamination forms stress.In Fig. 5, when heating at bottom aluminium galvanization separately, because the expansion coefficient of aluminium is greater than polysilicon, making the inflationary spiral of bottom aluminium be greater than the inflationary spiral of middle level polysilicon, causing both-end brace summer 5 to sink to the first stable position.In Fig. 6, when heating at top layer aluminium separately, the inflationary spiral of top layer aluminium is greater than the inflationary spiral of middle level polysilicon, causing both-end brace summer 5 to upwarp the second stable position.This 3-layer composite material support beam structure coordinates corresponding type of drive, make beam once arrive stable position, electric current can be removed at once drive, bistable state due to beam is mainly determined by intermediate laminate stress and all larger polysilicon layer of elasticity coefficient, so can not electric current be added when bistable state and maintain position stability, drive circuit power consumption is approximately zero after stabilization, can reduce drive circuit power consumption generally.
Current driving device 7 adopts the existing mature technology in this area, according to different array requests, adopts active matrix driving or passive drive mode.The electrode outlet line of driving circuit can obtain while this structure of making simultaneously.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (6)
1.MOEMS bistable state raster translation optical modulator, is characterized in that comprising:
Silicon substrate and the insulation course be arranged on silicon substrate;
Grating, by elastic supporting beams flying shore above insulation course, described grating covering metal reverberation in elastic substrates is formed, described elastic supporting beams is made up of beam body and support column, the two ends of beam body are fixedly installed on insulation course by support column, the middle part of beam body is fixedly connected with grating, the two-layer compound beam that Liang Tiwei is made up of different thermal expansion coefficient material, primer forms compressive stress adding man-hour, quilting material forms tension stress adding man-hour, wherein has at least layer of material to conduct electricity and forms by the support column at two ends the two poles of the earth that electricity connects;
Lower reflecting surface, is arranged on the insulation course below grating;
Current driving device, is connected to form loop with the conductive material bipolar layer in composite beam, can produces the drive current of different amplitude, different frequency.
2. MOEMS bistable state raster translation optical modulator as claimed in claim 1, is characterized in that: described elastic supporting beams has two, and two sides relative with grating are respectively connected.
3. the MOEMS bistable state raster translation optical modulator according to any one of claim 1 to 2, is characterized in that: the gap variable between grating surface and lower reflecting surface.
4. MOEMS bistable state raster translation optical modulator as claimed in claim 1, it is characterized in that: the double layer material forming described elastic supporting beams, primer is polysilicon, and quilting material is aluminium; The primer of grating is polysilicon, and quilting material is aluminium; Lower reflecting surface materials is aluminium; The material of insulation course is silicon dioxide.
5. a MOEMS bistable state raster translation optical modulator, is characterized in that comprising:
Silicon substrate and the insulation course be arranged on silicon substrate;
Grating, by elastic supporting beams flying shore above insulation course, described grating covering metal reverberation in elastic substrates is formed, the primer of grating is polysilicon, quilting material is aluminium, described elastic supporting beams is made up of beam body and support column, the two ends of beam body are fixedly installed on insulation course by support column, the middle part of beam body is fixedly connected with grating, beam body is three layers of composite beam, and intermediate layer material is polysilicon, and top layer and primer are aluminium, adding polysilicon layer formation in man-hour compressive stress, aluminium lamination stress is 0; Wherein the aluminium lamination of top layer and bottom distinguishes the two poles of the earth that can be connected by the support column formation electricity at two ends, and the aluminium lamination of top layer and bottom can distinguish On current;
Lower reflecting surface, is arranged on the insulation course below grating;
Current driving device, can be connected to form loop with the two poles of the earth of the top layer that conducts electricity in composite beam or bottom respectively, can produce the drive current of different amplitude, different frequency.
6. the grating light modulator array of the MOEMS bistable state raster translation optical modulator composition according to any one of claim 1 to 5, it is characterized in that: the grating light modulator array of described MOEMS bistable state raster translation optical modulator composition is formed side by side by least 2 MOEMS bistable state raster translation optical modulators, wherein each MOEMS bistable state raster translation optical modulator all can under current driving device controls self contained function.
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| CN108716914B (en) * | 2018-05-29 | 2020-05-19 | 东南大学 | MOEMS gyroscope based on nano grating and processing method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1658009A (en) * | 2005-01-13 | 2005-08-24 | 重庆大学 | Raster translation optical modulator and array |
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| KR20090025837A (en) * | 2007-09-07 | 2009-03-11 | 삼성전기주식회사 | Mems and optical modulator having temperature compensation layer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1658009A (en) * | 2005-01-13 | 2005-08-24 | 重庆大学 | Raster translation optical modulator and array |
Non-Patent Citations (3)
| Title |
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| Elimination of Stress-Induced Curvature in Thin-Film Structures;Thomas G.Bifano 等;《Journal of Microelectromechanical systems》;20021031;第11卷(第5期);第592－597页 * |
| 光栅光调制器阵列翘曲问题分析;张智海等;《纳米技术与精密工程》;20071231;第5卷(第4期);第343－346页 * |
| 光栅平动式光调制器的残余应力自测量方法和试验;张智海等;《机械工程学报》;20100430;第46卷(第8期);第12－17页 * |
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