CN103882516B - The online feed supplement method of polycrystalline silicon ingot or purifying furnace - Google Patents
The online feed supplement method of polycrystalline silicon ingot or purifying furnace Download PDFInfo
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- CN103882516B CN103882516B CN201410111267.8A CN201410111267A CN103882516B CN 103882516 B CN103882516 B CN 103882516B CN 201410111267 A CN201410111267 A CN 201410111267A CN 103882516 B CN103882516 B CN 103882516B
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Abstract
The invention discloses a kind of online feed supplement method of polycrystalline silicon ingot or purifying furnace, solved the problem that the existing crucible consumptive material of existing polysilicon production process utilization rate is low and production output is had a greatly reduced quality. while comprising the chunk polysilicon material arranging in the silica crucible (23) in semi-molten shape, and in silica crucible (23), vacate can feed supplement height H (25) be greater than 100 millimeters time, open push-pull valve (8), hopper (12) is slided to the right, make the discharge end of screw(-type) feeder (10) enter into the left side feeding mouth (7) in guide storehouse (5), start screw(-type) feeder drive motors (13) and carry out feed supplement, polycrysalline silcon material in hopper (12) is by guide storehouse (5) and tremie pipe (4), and the two semicircle bumper flitch (22) that arrange through the outlet compartment of terrain at tremie pipe (4) enter into silica crucible (23). having realized the reduction of production unit product energy consumption and the production capacity of single device promotes.
Description
Technical field
The present invention relates to a kind of feed supplement method of polycrystalline silicon ingot or purifying furnace, particularly a kind of method of carrying out online feed supplement in polycrystalline silicon ingot or purifying furnace production process.
Background technology
Silica-based solar has advantageous advantage aspect alleviation energy shortage and protection of the environment. The key of its development of major effect is very high as the production process cost of the polysilicon of solar cell base-material, and particularly, in the growth course of polycrystalline silicon ingot casting, various loss accountings are very large. How to reduce the cost depletions of this production link, become domestic and international each manufacturer and wanted in a hurry the subject matter solving. At present, the growth of polycrystalline silicon ingot casting is mainly that silicon material is put in square high-purity silica pot, and that in crucible, puts into for the first time is bulk silicon material, irregular due to silicon material shape, and can there are a lot of gaps filling after material in crucible. In heating process subsequently, after the bulk silicon material fusing in crucible, can form certain clearance spaces on crucible top. Because crucible is to belong to disposable consumption product in process of production, can not making full use of of its space, has brought the low defect of consumptive material utilization rate, also makes production output have a greatly reduced quality.
Summary of the invention
The invention provides a kind of online feed supplement method of polycrystalline silicon ingot or purifying furnace, solved the technical problem that the existing crucible consumptive material of existing polysilicon production process utilization rate is low and production output is had a greatly reduced quality.
The present invention solves above technical problem by the following technical programs:
A kind of online feed supplement method of polycrystalline silicon ingot or purifying furnace, comprises the following steps:
The first step, on polycrystalline silicon ingot or purifying furnace furnace top cover, material-feeding port is set, guide storehouse is set on material-feeding port, the tremie pipe in guide storehouse is arranged on to the top of the silica crucible in polycrystalline silicon ingot casting furnace body by material-feeding port, guide rail left support plate and guide rail right support plate are set respectively on polycrystalline silicon ingot or purifying furnace furnace top cover, between guide rail left support plate and guide rail right support plate, rail plate is set, hopper is movably arranged on rail plate by hopper sliding bottom, bottom at hopper arranges screw(-type) feeder, polycrysalline silcon material is set in hopper, between hopper discharging opening and the left side feeding mouth in guide storehouse, telescopic guide bellows is set, the discharge end of screw(-type) feeder is arranged in guide bellows, on polycrystalline silicon ingot or purifying furnace furnace top cover, vavuum pump is set, the vacuum orifice of vavuum pump is connected together by the telescopic bleeding point arranging on bellows and hopper that vacuumizes,
Second step, the push-pull valve arranging on the left side feeding mouth in guide storehouse cuts out, start vavuum pump hopper is evacuated down to technological requirement state;
The 3rd step, determine theoretical feed supplement time t: the mass M of first determining the chunk polysilicon material filling in silica cruciblePiece, measure the temperature T after the chunk polysilicon material filling in silica crucible meltsLiquid, according to the melting temperature T of chunk polysilicon materialMoltenWith polysilicon liquid specific heat CLiquid, utilize following formula: QHalf=CLiquid（TLiquid-TMolten）MPiece/ 2, can calculate the theoretical heat Q that the chunk polysilicon material filling in silica crucible discharges in the time of semi-molten stateHalf; Again according to the temperature T of the polycrysalline silcon material arranging in hopper?With its specific heat C?, can calculate theoretical heat QHalfThe amount M all melting after being absorbed by polycrysalline silcon material?, computing formula is: M?=QHalf/[C?（TMolten-T?), in reinforced process, heater power output also can increase accordingly, therefore M now?Be the interpolation weight that is perfectly safe, finally can calculate theoretical feed supplement time t=M according to the delivery rate V of screw(-type) feeder?/V；
The 4th step, when the chunk polysilicon material arranging in silica crucible is during in semi-molten shape, and in silica crucible, vacate can feed supplement height H be greater than 100 millimeters time, open push-pull valve, hopper is slided to the right, make the discharge end of screw(-type) feeder enter into the left side feeding mouth in guide storehouse, start screw(-type) feeder drive motors and carry out feed supplement, polycrysalline silcon material in hopper is by guide storehouse and tremie pipe, and two semicircle bumper flitch that arrange through the outlet compartment of terrain at tremie pipe enter into silica crucible;
The 5th step, in the time that the feed supplement time reaches the theoretical feed supplement time that the 3rd step calculates, close screw(-type) feeder drive motors, hopper is slided left, make the discharge end of screw(-type) feeder leave the left side feeding mouth in guide storehouse, close push-pull valve, online feed supplement finishes.
The online feeding-system of a kind of polycrystalline silicon ingot or purifying furnace, comprise polycrystalline silicon ingot casting furnace body, on polycrystalline silicon ingot or purifying furnace furnace top cover, be provided with material-feeding port, on polycrystalline silicon ingot or purifying furnace furnace top cover, be respectively arranged with guide rail left support plate and guide rail right support plate, between guide rail left support plate and guide rail right support plate, be provided with rail plate, hopper is movably arranged on rail plate by hopper sliding bottom, bottom at hopper is provided with screw(-type) feeder, in hopper, be placed with polycrysalline silcon material, on the right flank of guide rail right support plate, be fixedly installed guide storehouse, the tremie pipe in guide storehouse is arranged on the top of the silica crucible in polycrystalline silicon ingot casting furnace body by material-feeding port, on the feeding mouth of the left side in guide storehouse, be provided with push-pull valve, between hopper discharging opening and the left side feeding mouth in guide storehouse, be provided with telescopic guide bellows, the discharge end of screw(-type) feeder is arranged in guide bellows, be connected with screw(-type) feeder drive motors at the left end of screw(-type) feeder, screw(-type) feeder drive motors is arranged on supporting seat, supporting seat is fixedly installed on hopper sliding bottom, on polycrystalline silicon ingot or purifying furnace furnace top cover, be provided with vavuum pump, the vacuum orifice of vavuum pump is connected together by the telescopic bleeding point arranging on bellows and hopper that vacuumizes.
Exit at tremie pipe is at least provided with two semicircle bumper flitch in compartment of terrain, is provided with guide observation window at the top in guide storehouse, and being provided with at the top of hopper can folding vaccum gland bonnet; In silica crucible, be provided with the chunk polysilicon material of semi-molten shape, that in silica crucible, vacates can feed supplement height H be greater than 100 millimeters.
The present invention is simple in structure, easy to operate, can determine rational feed supplement speed and feed supplement weight by calculating, and has realized the reduction of production unit product energy consumption and the production capacity of single device and has promoted.
Brief description of the drawings
Fig. 1 is structural representation of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in detail:
A kind of online feed supplement method of polycrystalline silicon ingot or purifying furnace, comprises the following steps:
The first step, material-feeding port 3 is set on polycrystalline silicon ingot or purifying furnace furnace top cover 2, guide storehouse 5 is set on material-feeding port 3, the tremie pipe in guide storehouse 54 is arranged on to the top of the silica crucible 23 in polycrystalline silicon ingot casting furnace body 1 by material-feeding port 3, guide rail left support plate 15 and guide rail right support plate 16 are set respectively on polycrystalline silicon ingot or purifying furnace furnace top cover 2, between guide rail left support plate 15 and guide rail right support plate 16, rail plate 17 is set, hopper 12 is movably arranged on rail plate 17 by hopper sliding bottom 18, in the bottom of hopper 12, screw(-type) feeder 10 is set, in hopper 12, place polycrysalline silcon material, between hopper discharging opening 11 and the left side feeding mouth 7 in guide storehouse 5, telescopic guide bellows 9 is set, the discharge end of screw(-type) feeder 10 is arranged in guide bellows 9, vavuum pump 19 is set on polycrystalline silicon ingot or purifying furnace furnace top cover 2, the vacuum orifice of vavuum pump 19 is connected together by the telescopic bleeding point 21 arranging on bellows 20 and hopper 12 that vacuumizes,
Second step, by the left side feeding mouth 7 in guide storehouse 5 arrange push-pull valve 8 close, start vavuum pump 19 hopper 12 is evacuated down to technological requirement state;
The 3rd step, determine theoretical feed supplement time t: the mass M of first determining the chunk polysilicon material filling in silica crucible 23Piece, measure the temperature T after the chunk polysilicon material filling in silica crucible 23 meltsLiquid, according to chunk polysilicon material melting temperature TMoltenWith polysilicon liquid specific heat CLiquid, utilize following formula: QHalf=CLiquid（TLiquid-TMolten）MPiece/ 2, can calculate the theoretical heat Q that the chunk polysilicon material filling in silica crucible 23 discharges in the time of semi-molten stateHalf; Again according to the temperature T of the polycrysalline silcon material arranging in hopper 12?With its specific heat C?, can calculate theoretical heat QHalfThe amount M all melting after being absorbed by polycrysalline silcon material?, computing formula is: M?=QHalf/[C?（TMolten-T?), finally can calculate theoretical feed supplement time t=M according to the delivery rate V of screw(-type) feeder 10?/V；
The 4th step, when the chunk polysilicon material arranging in silica crucible 23 is during in semi-molten shape, and in silica crucible 23, vacate can feed supplement height H 25 be greater than 100 millimeters time, open push-pull valve 8, hopper 12 is slided to the right, make the discharge end of screw(-type) feeder 10 enter into the left side feeding mouth 7 in guide storehouse 5, start screw(-type) feeder drive motors 13 and carry out feed supplement, polycrysalline silcon material in hopper 12 is by guide storehouse 5 and tremie pipe 4, and two semicircle bumper flitch 22 that arrange through the outlet compartment of terrain at tremie pipe 4 enter into silica crucible 23;
The 5th step, in the time that the feed supplement time reaches the theoretical feed supplement time that the 3rd step calculates, close screw(-type) feeder drive motors 13, hopper 12 is slided left, make the discharge end of screw(-type) feeder 10 leave the left side feeding mouth 7 in guide storehouse 5, close push-pull valve 8, online feed supplement finishes.
The online feeding-system of a kind of polycrystalline silicon ingot or purifying furnace, comprise polycrystalline silicon ingot casting furnace body 1, on polycrystalline silicon ingot or purifying furnace furnace top cover 2, be provided with material-feeding port 3, on polycrystalline silicon ingot or purifying furnace furnace top cover 2, be respectively arranged with guide rail left support plate 15 and guide rail right support plate 16, between guide rail left support plate 15 and guide rail right support plate 16, be provided with rail plate 17, hopper 12 is movably arranged on rail plate 17 by hopper sliding bottom 18, be provided with screw(-type) feeder 10 in the bottom of hopper 12, in hopper 12, be provided with polycrysalline silcon material, on the right flank of guide rail right support plate 16, be fixedly installed guide storehouse 5, the tremie pipe 4 in guide storehouse 5 is arranged on the top of the silica crucible 23 in polycrystalline silicon ingot casting furnace body 1 by material-feeding port 3, on the left side in guide storehouse 5 feeding mouth 7, be provided with push-pull valve 8, between hopper discharging opening 11 and the left side feeding mouth 7 in guide storehouse 5, be provided with telescopic guide bellows 9, the discharge end of screw(-type) feeder 10 is arranged in guide bellows 9, be connected with screw(-type) feeder drive motors 13 at the left end of screw(-type) feeder 10, screw(-type) feeder drive motors 13 is arranged on supporting seat 14, supporting seat 14 is fixedly installed on hopper sliding bottom 18, on polycrystalline silicon ingot or purifying furnace furnace top cover 2, be provided with vavuum pump 19, the vacuum orifice of vavuum pump 19 is connected together by the telescopic bleeding point 21 arranging on bellows 20 and hopper 12 that vacuumizes.
Exit at tremie pipe 4 is at least provided with two semicircle bumper flitch 22 in compartment of terrain, is provided with guide observation window 6 at the top in guide storehouse 5, and being provided with at the top of hopper 12 can folding vaccum gland bonnet 26; In silica crucible 23, be provided with the chunk polysilicon material of semi-molten shape, that in silica crucible 23, vacates can feed supplement height H 25 be greater than 100 millimeters.
Polycrystalline silicon casting ingot process process is divided double teacher: heating, fusing, long crystalline substance, annealing, cooling. There are different state of the art and technical parameter in each stage. In the 8th step of M8 melting stage, now silicon material starts, from top fusing, to flow to crucible bottom, and crucible upper space constantly reserves. After, along with the continuous fusing of silicon material, the space more on crucible top reserves. Now, hopper 12 is shifted out left along rail plate 17, push-pull valve 8 cuts out, open the hopper cover of hopper 12, add inward particulate material, after adding, close hopper cover, open vavuum pump 19, hopper 12 is vacuumized, vacuum is opened push-pull valve 8 after arriving target, advances hopper 12 to feed supplement position to the right, open screw(-type) feeder 10 to furnace charge, now, the particulate material of minor diameter can lentamente in heating crucible, be observed the fusing situation of silicon material in crucible by feed supplement mechanism by the peep hole at top. This hopper particulate material can operate after having mended repeatedly, carries out repeatedly feed supplement. If every stove batch recruitment is on average according to 150 kilograms of calculating, unit silicon ingot energy consumption, through actual measurement of comparison, reduces by 14%, by original 8 degree/kilogram drop to 6.9 degree/kilogram, every equipment capacity improves 20%, the comprehensive non-silicon cost 18% of unit silicon ingot, and effect is very obvious.
Claims (1)
1. the online feed supplement method of polycrystalline silicon ingot or purifying furnace, comprises the following steps:
The first step, material-feeding port (3) is set on polycrystalline silicon ingot or purifying furnace furnace top cover (2), guide storehouse (5) is set on material-feeding port (3), the tremie pipe of guide storehouse (5) (4) is arranged on to the top of the silica crucible (23) in polycrystalline silicon ingot casting furnace body (1) by material-feeding port (3), guide rail left support plate (15) and guide rail right support plate (16) are set respectively on polycrystalline silicon ingot or purifying furnace furnace top cover (2), between guide rail left support plate (15) and guide rail right support plate (16), rail plate (17) is set, hopper (12) is movably arranged on rail plate (17) by hopper sliding bottom (18), in the bottom of hopper (12), screw(-type) feeder (10) is set, in hopper (12), place polycrysalline silcon material, between hopper discharging opening (11) and the left side feeding mouth (7) of guide storehouse (5), telescopic guide bellows (9) is set, the discharge end of screw(-type) feeder (10) is arranged in guide bellows (9), vavuum pump (19) is set on polycrystalline silicon ingot or purifying furnace furnace top cover (2), the vacuum orifice of vavuum pump (19) is connected together with the upper bleeding point (21) arranging of hopper (12) by the telescopic bellows (20) that vacuumizes,
Second step, the push-pull valve (8) that the left side feeding mouth (7) of guide storehouse (5) is above arranged are closed, and start vavuum pump (19) hopper (12) is evacuated down to technological requirement state;
The 3rd step, determine theoretical feed supplement time t: the mass M of first determining the chunk polysilicon material filling in silica crucible (23)Piece, measure the temperature T after the chunk polysilicon material filling in silica crucible (23) meltsLiquid, according to the melting temperature T of chunk polysilicon materialMoltenWith polysilicon liquid specific heat CLiquid, utilize following formula:
QHalf=CLiquid（TLiquid-TMolten）MPiece/ 2, can calculate the theoretical heat Q that the chunk polysilicon material filling in silica crucible (23) discharges in the time of semi-molten stateHalf; Again according to the temperature T of the polycrysalline silcon material arranging in hopper (12)?With its specific heat C?, can calculate theoretical heat QHalfThe amount M all melting after being absorbed by polycrysalline silcon material?, computing formula is: M?=QHalf/[C?（TMolten-T?), finally can calculate theoretical feed supplement time t=M according to the delivery rate V of screw(-type) feeder (10)?/V；
The 4th step, the chunk polysilicon material arranging in the silica crucible (23) is during in semi-molten shape, and in silica crucible (23), vacate can feed supplement height H (25) be greater than 100 millimeters time, open push-pull valve (8), hopper (12) is slided to the right, make the discharge end of screw(-type) feeder (10) enter into the left side feeding mouth (7) in guide storehouse (5), start screw(-type) feeder drive motors (13) and carry out feed supplement, polycrysalline silcon material in hopper (12) is by guide storehouse (5) and tremie pipe (4), and the two semicircle bumper flitch (22) that arrange through the outlet compartment of terrain at tremie pipe (4) enter into silica crucible (23),
The 5th step, in the time that the feed supplement time reaches the theoretical feed supplement time that the 3rd step calculates, close screw(-type) feeder drive motors (13), hopper (12) is slided left, make the discharge end of screw(-type) feeder (10) leave the left side feeding mouth (7) in guide storehouse (5), close push-pull valve (8), online feed supplement finishes.
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| CN110004490A (en) * | 2019-04-28 | 2019-07-12 | 浙江启瑞电子有限公司 | Lasting feed mechanism and its application method for metallic silicon smelting furnace |
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| JP4742254B2 (en) * | 2000-11-29 | 2011-08-10 | 独立行政法人物質・材料研究機構 | Single crystal growth method |
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