CN103882511A - Spliced type curing insulation barrel for direct-pulling single crystal furnace - Google Patents
Spliced type curing insulation barrel for direct-pulling single crystal furnace Download PDFInfo
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- CN103882511A CN103882511A CN201410076146.4A CN201410076146A CN103882511A CN 103882511 A CN103882511 A CN 103882511A CN 201410076146 A CN201410076146 A CN 201410076146A CN 103882511 A CN103882511 A CN 103882511A
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Abstract
The invention provides a spliced type curing insulation barrel for a direct-pulling single crystal furnace. The overall barrel is of a conical tubular structure and comprises upper, middle and lower segments of the insulating barrel, wherein the upper, middle and lower segments of the insulating barrel are all of a double-layer structure divided into an inner layer structure and an outer layer structure; each outer layer structure is formed by processing leftover materials of a cured felt cut off in a thermal field of a polycrystalline furnace according to the concrete size of the insulation barrel of the single crystal furnace, and the insulation barrel is formed at the segmented positions by use of a high temperature resisting molybdenum wire through hooping and shaping. A production period comprises a few days only, and raw materials are leftover materials generated in production of other products, so the shortcoming of high price of an integral type curing insulation barrel is overcome, simultaneously wastes are utilized, resources are not wasted, environment is not polluted, and energy conservation and emission reduction are realized.
Description
Technical field
The present invention relates to a kind of splice type czochralski crystal growing furnace and solidify insulated tank, belong to field of mechanical technique.
Background technology
Czochralski crystal growing furnace is semicon industry and the important production unit of photovoltaic industry, although this year, photovoltaic industry was received certain impact, development prospect is still become better.Because single crystal growing furnace is high-energy equipment, so the heat-insulating property of thermal field is just extremely important, single crystal growing furnace is in the past all generally the mode that is wound around with the soft felt thermal insulation layer as single crystal growing furnace, this material price is cheap, easy to use, but heat-insulating property is poor, corrosion resistance is short poor work-ing life, within general about 1 year, just need blowing out to change thermal insulation layer, impurity and ash content high, the raising of industry requirement thereupon, such as N-type cell piece, high-efficiency battery sheet.Especially semicon industry is had higher requirement in every respect for pulling of crystals silicon chip, the more and more not competent such demand of soft felt that traditional soft felt is especially domestic, after serve on Mitsubishi's stove of high-end type such as the Kai Kesi of the U.S., Japan and occurred all-in-one-piece curing felt insulated tank.Solidifying the softer felt of felt insulated tank heat insulation effect is significantly improved, corrosion resistance also significantly improves work-ing life, general continuous production is more than 3 years, but also brought unit price very expensive, need customization and very long problem of customized production cycle, generally need about 6 months from being dosed into out product.
Summary of the invention
The invention provides a kind of splice type czochralski crystal growing furnace and solidify insulated tank, can overcome the above defect, high insulating effect, making processes energy-conserving and environment-protective, and fabrication cycle is short.
For solving above technical problem, the invention provides following technical scheme: a kind of splice type czochralski crystal growing furnace solidifies insulated tank, described curing insulated tank entirety is conic tube structure, comprise the insulated tank of three segmentations in upper, middle and lower, the insulated tank of three segmentations of upper, middle and lower is bilayer structure, be divided into endothecium structure and layer structure, described layer structure is formed by the curing felt cutting of polycrystalline ingot furnace thermal field, and described insulated tank is shaped and formed well by resistant to elevated temperatures molybdenum filament hoop in segmentation place.
Further, described endothecium structure by graphite or CC insulated tank as support.
Further, described layer structure by hard felt material as thermal insulation layer.
Further, described layer structure is the cylindrical tube structure being spliced to form by the parallel close-packed arrays of several heat insulating strips.
Further, the thickness of described layer structure is 50mm.
Further, the top internal diameter of upper insulated tank is 672mm.
Further, the top internal diameter of middle insulated tank is 745mm.
Further, the top internal diameter of outer insulated tank is 762mm.
This splice type czochralski crystal growing furnace the present invention relates to solidifies insulated tank, described insulated tank has been inherited the high insulating effect of monoblock type insulated tank, the feature of the high long service life of erosion resistance, also overcome the curing insulated tank price customization production cycle of monoblock type long simultaneously, production cycle only needs several days, because raw material is the tailing of producing other products, also overcome the high shortcoming of price that monoblock type is solidified insulated tank, and it is free from environmental pollution to have accomplished that resource is not wasted in utilization of waste material, has accomplished energy-saving and emission-reduction.
Brief description of the drawings
Fig. 1 is that a kind of splice type czochralski crystal growing furnace of the present invention solidifies segmentation insulated tank structure iron on insulated tank;
Fig. 2 is that a kind of splice type czochralski crystal growing furnace of the present invention solidifies segmentation insulated tank structure iron in insulated tank;
Fig. 3 is that a kind of splice type czochralski crystal growing furnace of the present invention solidifies segmentation insulated tank structure iron under insulated tank.
Embodiment
As shown in Figure 1-Figure 3, solidify insulated tank entirety and be conic tube structure, comprise the insulated tank of three segmentations in upper, middle and lower, the insulated tank of three segmentations of upper, middle and lower is bilayer structure, be divided into endothecium structure and layer structure, endothecium structure by graphite or CC insulated tank as support.
Described layer structure is by hard felt material as thermal insulation layer, and described layer structure is formed by the curing felt cutting of polycrystalline ingot furnace thermal field, is specially the cylindrical tube structure being spliced to form by the parallel close-packed arrays of several heat insulating strips, and its thickness is 50mm.
The top internal diameter of upper insulated tank is 672mm, and the top internal diameter of middle insulated tank is 745mm, and the top internal diameter of outer insulated tank is 762mm.The height of upper insulated tank is 247mm, and the height of middle insulated tank is 558mm, and the height of lower insulated tank is 320mm.Upper, middle and lower insulated tank is installed after lower order installation, shaped well with resistant to elevated temperatures molybdenum filament hoop in segmentation place, insulated tank is made.
Embodiment of the present invention does not form the restriction to the application's scope; every within the spirit and principle of the present invention design, any amendment that one of skill in the art can make, be equal to and replace and within improvement etc. all should be included in protection scope of the present invention.
Claims (8)
1. a splice type czochralski crystal growing furnace solidifies insulated tank, it is characterized in that, described curing insulated tank entirety is conic tube structure, comprise the insulated tank of three segmentations in upper, middle and lower, the insulated tank of three segmentations of upper, middle and lower is bilayer structure, be divided into endothecium structure and layer structure, described layer structure is formed by the curing felt cutting of polycrystalline ingot furnace thermal field, and described insulated tank is shaped and formed well by resistant to elevated temperatures molybdenum filament hoop in segmentation place.
2. a kind of splice type czochralski crystal growing furnace according to claim 1 solidifies insulated tank, it is characterized in that, described endothecium structure by graphite or CC insulated tank as support.
A kind of splice type czochralski crystal growing furnace according to claim 1 solidify insulated tank, it is characterized in that, described layer structure by hard felt material as thermal insulation layer.
4. a kind of splice type czochralski crystal growing furnace according to claim 1 solidifies insulated tank, it is characterized in that, described layer structure is the cylindrical tube structure being spliced to form by the parallel close-packed arrays of several heat insulating strips.
5. a kind of splice type czochralski crystal growing furnace according to claim 3 solidifies insulated tank, it is characterized in that, the thickness of described layer structure is 50mm.
6. a kind of splice type czochralski crystal growing furnace according to claim 1 solidifies insulated tank, it is characterized in that, the top internal diameter of upper insulated tank is 672mm.
7. a kind of splice type czochralski crystal growing furnace according to claim 1 solidifies insulated tank, it is characterized in that, the top internal diameter of middle insulated tank is 745mm.
8. a kind of splice type czochralski crystal growing furnace according to claim 1 solidifies insulated tank, it is characterized in that, the top internal diameter of outer insulated tank is 762mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410076146.4A CN103882511A (en) | 2014-03-04 | 2014-03-04 | Spliced type curing insulation barrel for direct-pulling single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410076146.4A CN103882511A (en) | 2014-03-04 | 2014-03-04 | Spliced type curing insulation barrel for direct-pulling single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103882511A true CN103882511A (en) | 2014-06-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410076146.4A Pending CN103882511A (en) | 2014-03-04 | 2014-03-04 | Spliced type curing insulation barrel for direct-pulling single crystal furnace |
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| CN (1) | CN103882511A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306512A (en) * | 2018-11-27 | 2019-02-05 | 上海骐杰碳素材料有限公司 | A kind of solidification heat-preservation cylinder |
| CN116535226A (en) * | 2023-04-10 | 2023-08-04 | 湖南博邦山河新材料有限公司 | Heat preservation layer for high-temperature induction furnace and preparation method thereof |
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| CN202323103U (en) * | 2012-03-02 | 2012-07-11 | 烟台鲁航炭材料科技有限公司 | Heat preservation and insulation cylinder for mono-crystalline silicon growing furnace |
| CN102691099A (en) * | 2012-06-14 | 2012-09-26 | 中国科学院半导体研究所 | Multilayer-structure inner heat shield for sapphire crystal furnace adopting Kyropoulos method |
| CN102759273A (en) * | 2012-08-01 | 2012-10-31 | 大连隆田科技有限公司 | Multilayer heat insulation barrel device and production method thereof |
| CN202558963U (en) * | 2012-04-25 | 2012-11-28 | 浙江华友电子有限公司 | Thermal insulation cylinder for single crystal furnace |
| CN202849596U (en) * | 2012-10-18 | 2013-04-03 | 北京京仪世纪电子股份有限公司 | Insulation material of single crystal furnace thermal field |
| CN203715785U (en) * | 2014-03-04 | 2014-07-16 | 无锡宝优科技有限公司 | Splicing straight pulling single crystal furnace solidification thermal insulation barrel |
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2014
- 2014-03-04 CN CN201410076146.4A patent/CN103882511A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202323103U (en) * | 2012-03-02 | 2012-07-11 | 烟台鲁航炭材料科技有限公司 | Heat preservation and insulation cylinder for mono-crystalline silicon growing furnace |
| CN202558963U (en) * | 2012-04-25 | 2012-11-28 | 浙江华友电子有限公司 | Thermal insulation cylinder for single crystal furnace |
| CN102691099A (en) * | 2012-06-14 | 2012-09-26 | 中国科学院半导体研究所 | Multilayer-structure inner heat shield for sapphire crystal furnace adopting Kyropoulos method |
| CN102759273A (en) * | 2012-08-01 | 2012-10-31 | 大连隆田科技有限公司 | Multilayer heat insulation barrel device and production method thereof |
| CN202849596U (en) * | 2012-10-18 | 2013-04-03 | 北京京仪世纪电子股份有限公司 | Insulation material of single crystal furnace thermal field |
| CN203715785U (en) * | 2014-03-04 | 2014-07-16 | 无锡宝优科技有限公司 | Splicing straight pulling single crystal furnace solidification thermal insulation barrel |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306512A (en) * | 2018-11-27 | 2019-02-05 | 上海骐杰碳素材料有限公司 | A kind of solidification heat-preservation cylinder |
| CN109306512B (en) * | 2018-11-27 | 2024-03-15 | 上海骐杰碳素材料有限公司 | Solidifying heat-preserving cylinder |
| CN116535226A (en) * | 2023-04-10 | 2023-08-04 | 湖南博邦山河新材料有限公司 | Heat preservation layer for high-temperature induction furnace and preparation method thereof |
| CN116535226B (en) * | 2023-04-10 | 2023-12-01 | 湖南博邦山河新材料有限公司 | Heat preservation layer for high-temperature induction furnace and preparation method thereof |
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Application publication date: 20140625 |
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