CN202323103U - Heat preservation and insulation cylinder for mono-crystalline silicon growing furnace - Google Patents
Heat preservation and insulation cylinder for mono-crystalline silicon growing furnace Download PDFInfo
- Publication number
- CN202323103U CN202323103U CN2012200755879U CN201220075587U CN202323103U CN 202323103 U CN202323103 U CN 202323103U CN 2012200755879 U CN2012200755879 U CN 2012200755879U CN 201220075587 U CN201220075587 U CN 201220075587U CN 202323103 U CN202323103 U CN 202323103U
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- thermoscreen
- heat preservation
- heat
- insulation
- growing furnace
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Abstract
The utility model discloses a heat preservation and insulation cylinder for a mono-crystalline silicon growing furnace. The heat preservation and insulation cylinder comprises an outer heat preservation cylinder and is characterized in that: an inner heat preservation screen is arranged on the inner wall of the outer heat preservation cylinder; and the inner heat preservation screen is made of carbon/carbon composite material. The inner heat preservation screen comprises at least more than two subsection heat insulation screens which are sleeved in sequence. A notch or groove connection structure is arranged between the subsection heat insulation screens; and the subsection heat insulation screens are connected through connection rings. Preferably, the inner heat preservation screen comprises the three subsection heat insulation screens which are an upper-section heat insulation screen, a middle-section heat insulation screen and a lower-section heat insulation screen in sequence; a through hole is formed in the lower section heat insulation screen; and the outer heat preservation cylinder is made of graphite felt or carbon felt. With the adoption of the heat preservation and insulation cylinder provided by the utility model, the mono-crystalline silicon growing furnace has higher high-temperature intensity and lower heat conduction coefficient. Not only is the thickness of the heat preservation and insulation cylinder reduced, but also the replacement cost of the heat preservation and insulation cylinder is reduced.
Description
Technical field
The utility model relates to the monocrystalline silicon growing furnace technical field, relates in particular to a kind of monocrystalline silicon growing furnace and uses the heat insulating tube.
Background technology
Monocrystalline silicon growing furnace is the major equipment that electronics, photovoltaic industry generally adopt, and maximum operation (service) temperature is up to 1600 ℃.In the silicon single crystal rod pulling process, in order in stove, to set up a stable thermal field, reduce thermosteresis, cut down the consumption of energy, the heat insulating device with good thermal insulation property is set around the well heater skin, it is the indispensable integral part of monocrystaline silicon stove.At present these heat insulating device great majority are made up of high-strength, high-purity, high-density graphite internal layer and the graphite felt or the charcoal felt that are coated on the graphite internal layer.Graphite intensity is low, and general folding strength is that 13～15Mpa, thermal conductivity height are generally big at 140W/MK, thermal expansivity, so heat insulation effect is undesirable, and then causes heat insulation effect poor, and energy consumption is high; In addition, also have at present directly by the heat insulating device that charcoal/the raw material of wood-charcoal material is processed, its good combination property, existing higher high temperature strength has lower thermal conductivity coefficient again.But because the heat insulating device that this charcoal/the raw material of wood-charcoal material is processed is configured in the monocrystalline silicon growing device; Because of receiving the influence of air temperature and current; The partial loss of heat insulating tube that this moment, charcoal/raw material of wood-charcoal material was processed produces silication in the part and is consumed easily, even also can be lowered its thermal and insulating performance; And if shortened the life-span. integral replacing, then cost is very high.
The utility model content
The utility model provides a kind of novel monocrystalline silicon growing furnace to use the heat insulating tube to the deficiency of prior art.This heat insulating tube can not only improve heat insulating effect, and is convenient to local replacing, reduces use cost.
The technical scheme that the utility model solves the problems of the technologies described above is following: a kind of monocrystalline silicon growing furnace is used the heat insulating tube; Comprise outer heat-preservation cylinder; It is characterized in that the inwall of heat-preservation cylinder is provided with interior thermoscreen outside said, said interior thermoscreen is processed by carbon/carbon composite.
The beneficial effect of the utility model is: owing to set up the interior thermoscreen of being processed by carbon/carbon composite in the heat-preservation cylinder outside, this carbon/carbon composite density is low, is generally 1.4～1.6g/cm
3, intensity is high, general folding strength is the low 8～10W/MK that is generally of 110～130Mpa, thermal conductivity.Therefore the heat insulating screen good combination property of being processed by carbon/carbon composite has higher high temperature strength and lower thermal conductivity coefficient.Than present widely used graphite heat insulating tube, can make the total thickness of heat-preservation cylinder be kept to 1/3 of former graphite material, reduced the heat-transfer effect of self simultaneously, increased keeping warmth space in the stove.
On the basis of technique scheme, the utility model can also be done following improvement.
Further, said interior thermoscreen comprises the plural at least segmentation thermoscreen of belled successively.
Adopt the beneficial effect of above-mentioned further scheme to be; Because in deposition process; Thermoscreen can be consumed because of the part produces silication easily; Even this moment, the partial loss of heat insulating tube of processing of charcoal/raw material of wood-charcoal material also can influence effect of heat insulation, and this part phenomenon that is depleted is distributing along short transverse.The utility model is provided with multistage segmentation thermoscreen, then can change the segmentation thermoscreen of corresponding position according to the concrete position that produces loss, greatly reduces replacement cost like this.
Further, be provided with seam or groove syndeton between said each segmentation thermoscreen.Said seam is meant to be provided with in abutting connection with the position at each segmentation thermoscreen is convenient to concavo-convex of adjacent segment belled; Said groove is meant and is provided with domatic in abutting connection with the position at each segmentation thermoscreen.
Adopt the beneficial effect of above-mentioned further scheme to be, seam or groove are set can be so that the segmentation thermoscreen be changed flexibly, and interface is smooth.
Further, also be provided with between said each segmentation thermoscreen and be used for the firm adjacent shack of segmentation thermoscreen up and down that connects.
Adopt the beneficial effect of above-mentioned further scheme to be, shack is set makes between the adjacent sectional thermoscreen engaging more firm, and be convenient to connect.
Further, said interior thermoscreen comprises three segmentation thermoscreens, is followed successively by epimere thermoscreen, stage casing thermoscreen and hypomere thermoscreen, and said hypomere thermoscreen is provided with through hole.
Adopt the beneficial effect of above-mentioned further scheme to be, adopt three-stage structure can make packaging assembly simple, can reduce replacement cost preferably simultaneously.Through hole is used for shielding gas such as argon gas.
Further, said outer heat-preservation cylinder is processed by graphite felt or charcoal felt.
Adopt the beneficial effect of above-mentioned further scheme to be, owing to adopt thermoscreen in the carbon/carbon composite, guaranteed effect of heat insulation, corresponding outer heat-preservation cylinder can adopt common lagging material to reduce the whole cost of heat insulating tube.
Description of drawings
Fig. 1 is the structural representation of the utility model.
In Fig. 1,1, interior thermoscreen; 1-1, epimere thermoscreen; 1-2, stage casing thermoscreen; 1-3, hypomere thermoscreen; 2, outer heat-preservation cylinder; 3, groove; 4, through hole.
Embodiment
Below in conjunction with accompanying drawing the principle and the characteristic of the utility model are described, institute gives an actual example and only is used to explain the utility model, is not the scope that is used to limit the utility model.
As shown in Figure 1, a kind of monocrystalline silicon growing furnace is used the heat insulating tube, comprises outer heat-preservation cylinder 2, it is characterized in that, thermoscreen 1 in the inwall of heat-preservation cylinder 2 is provided with outside said, said in thermoscreen 1 process by carbon/carbon composite.Said carbon/carbon composite is a kind of by the material that constitutes after high strength carbon cellulose fiber and the carbon element matrix process greying enhancement process.
Thermoscreen 1 comprises three segmentation thermoscreens in said, is followed successively by epimere thermoscreen 1-1, stage casing thermoscreen 1-2 and hypomere thermoscreen 1-3, and said hypomere thermoscreen 1-3 is provided with through hole 4.
Be provided with groove 3 syndetons between said each segmentation thermoscreen.Said groove 3 is meant and is provided with domatic in abutting connection with the position at each segmentation thermoscreen.
Said outer heat-preservation cylinder 2 is processed by graphite felt or charcoal felt.
The above is merely the preferred embodiment of the utility model, and is in order to restriction the utility model, not all within the spirit and principle of the utility model, any modification of being done, is equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (6)
1. a monocrystalline silicon growing furnace is used the heat insulating tube, comprises outer heat-preservation cylinder, it is characterized in that, the inwall of heat-preservation cylinder is provided with interior thermoscreen outside said, and said interior thermoscreen is processed by carbon/carbon composite.
2. monocrystalline silicon growing furnace according to claim 1 is used the heat insulating tube, it is characterized in that, said interior thermoscreen comprises the plural at least segmentation thermoscreen of belled successively.
3. monocrystalline silicon growing furnace according to claim 2 is used the heat insulating tube, it is characterized in that, is provided with seam or groove syndeton between said each segmentation thermoscreen.
4. monocrystalline silicon growing furnace according to claim 2 is used the heat insulating tube, it is characterized in that, also is provided with between said each segmentation thermoscreen to be used for the firm adjacent shack of segmentation thermoscreen up and down that connects.
5. use the heat insulating tube according to each described monocrystalline silicon growing furnace of claim 2～4; It is characterized in that; Thermoscreen comprises three segmentation thermoscreens in said, is followed successively by epimere thermoscreen, stage casing thermoscreen and hypomere thermoscreen, and said hypomere thermoscreen is provided with through hole.
6. use the heat insulating tube according to each described monocrystalline silicon growing furnace of claim 2～4, it is characterized in that, said outer heat-preservation cylinder is processed by graphite felt or charcoal felt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200755879U CN202323103U (en) | 2012-03-02 | 2012-03-02 | Heat preservation and insulation cylinder for mono-crystalline silicon growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200755879U CN202323103U (en) | 2012-03-02 | 2012-03-02 | Heat preservation and insulation cylinder for mono-crystalline silicon growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202323103U true CN202323103U (en) | 2012-07-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200755879U Expired - Fee Related CN202323103U (en) | 2012-03-02 | 2012-03-02 | Heat preservation and insulation cylinder for mono-crystalline silicon growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202323103U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103882511A (en) * | 2014-03-04 | 2014-06-25 | 无锡宝优科技有限公司 | Spliced type curing insulation barrel for direct-pulling single crystal furnace |
| CN105463567A (en) * | 2016-02-04 | 2016-04-06 | 晶科能源有限公司 | Polycrystalline ingot casting furnace and thermal insulation cage thereof |
| CN112626609A (en) * | 2020-12-15 | 2021-04-09 | 南京晶能半导体科技有限公司 | Thermal field capable of adjusting convection of semiconductor monocrystalline silicon melt and monocrystalline furnace |
| CN113106537A (en) * | 2021-06-11 | 2021-07-13 | 浙江晶科能源有限公司 | Single crystal furnace for preparing monocrystalline silicon and preparation method of monocrystalline silicon |
-
2012
- 2012-03-02 CN CN2012200755879U patent/CN202323103U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103882511A (en) * | 2014-03-04 | 2014-06-25 | 无锡宝优科技有限公司 | Spliced type curing insulation barrel for direct-pulling single crystal furnace |
| CN105463567A (en) * | 2016-02-04 | 2016-04-06 | 晶科能源有限公司 | Polycrystalline ingot casting furnace and thermal insulation cage thereof |
| CN112626609A (en) * | 2020-12-15 | 2021-04-09 | 南京晶能半导体科技有限公司 | Thermal field capable of adjusting convection of semiconductor monocrystalline silicon melt and monocrystalline furnace |
| CN112626609B (en) * | 2020-12-15 | 2022-02-01 | 南京晶能半导体科技有限公司 | Thermal field capable of adjusting convection of semiconductor monocrystalline silicon melt and monocrystalline furnace |
| CN113106537A (en) * | 2021-06-11 | 2021-07-13 | 浙江晶科能源有限公司 | Single crystal furnace for preparing monocrystalline silicon and preparation method of monocrystalline silicon |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20150302 |
|
| EXPY | Termination of patent right or utility model |