CN103881594A

CN103881594A - Method and apparatus for bonding workpieces

Info

Publication number: CN103881594A
Application number: CN201310703371.1A
Authority: CN
Inventors: 横田道也
Original assignee: Shin Etsu Engineering Co Ltd
Current assignee: Shin Etsu Engineering Co Ltd
Priority date: 2012-12-19
Filing date: 2013-12-19
Publication date: 2014-06-25
Anticipated expiration: 2033-12-19
Also published as: JP5346116B1; TWI560059B; TW201429723A; CN103881594B; KR102091884B1; JP2014118537A; KR20140079725A

Abstract

The invention provides a method and an apparatus for bonding workpieces, which suppresses workpiece deformation and adhesive solidification contraction and simultaneously causes the adhesive to solidify integrally and formally. The apparatus for bonding the workpiece according to the invention causes one part of the adhesive (3) clamped between the overlapped workpiece (1,2) to partially and temporarily solidify and the workpieces (1,2). Afterwards, the adhesive (3) is integrally divided into a plurality of areas and partial formal solidification occur on divided areas (3b,3c,3d) in multiple times successively. Therefore, even total area of integer of the adhesive (3) is large, the parts which are divided into a plurality of narrow areas are respectively and successively solidified. Therefore, compared with a method of formally solidifying integer of large-area adhesive in one time, the method provided by the invention is advantageous in that temperature increase amount of the workpieces (1,2) in each time of formal solidification and solidification contraction amount of the divided areas (3b,3c,3d) in the adhesive (3) are greatly reduced.

Description

Workpiece applying method and workpiece laminating apparatus

Technical field

The present invention relates to a kind of for to such as flat-panel monitor (FPD) or contact panel or 3D(3 dimension) plate workpiece such as the FDP of indicating meter or e-book etc. is with the workpiece applying method of another sheet plate workpieces such as binding agent laminating protective glass or FPD and for implementing the workpiece laminating apparatus of the method.

Background technology

In the past, as this workpiece applying method and workpiece laminating apparatus, known have a following content: the mode that spreads all over whole with binding agent is supplied with binding agent (UV cured resin) to the one side of at least one workpiece, then another workpiece of fitting on binding agent, afterwards the outer rim of binding agent of at least one surface integral that spreads over the pair of workpieces of having been fitted is irradiated to the interim hertzian wave (UV light) that solidifies use, only form interim solidified portion in the outer rim of binding agent thus, prevent mobile the overflowing of causing of binding agent, make binding agent entirety formal curing (for example referring to Patent Document 1) by formal solidifying with electromagnetic irradiation afterwards.

Patent documentation 1: Japanese Patent Publication 2012-73534 communique

In recent years, for the object of miniaturization and, the thickness that forms the glass substrate etc. of a slice workpiece thins down, and to the fit situation of the deformable film being made up of organic materials of glass substrate, thereby the structural strength of workpiece or panel entirety is in downtrending.And, according to the bonding between glass substrate in the past, also have the organic materialss such as Polarizer are sandwiched between glass substrate and situation about boning, according to finished product object, exist the thickness of the binding agent being formed by UV cured resin etc. after solidifying to approach the situation of substrate thickness.

Change although there is variation or the material of this layer structure, with in the past the same, comparatively strict to the requirement of the contraposition tolerance range between workpiece.

And, in display panel, have the panel of the connection section with the circuit substrate that flexible base, board (FPC:Flexible printed circuits) etc. is sandwiched to one side of overlapping workpiece and be connected.

But, be inorganic materials with respect to the main glass substrate as workpiece, the binding agent or the film etc. that are made up of UV cured resin etc. are organic materials, their coefficient of thermal expansion difference.If to the glass substrate as inorganic materials to clamp mode overlapped film or the Polarizer etc. of the binding agent being formed by UV cured resin, and irradiate etc. and to carry out thermofixation and fit by UV, because of different reasons that become distortion such as producing warpage or distortion of coefficient of thermal expansion separately.

Even in this case, as in the past, glass substrate has thickness to a certain degree and structural strength when higher, does not produce the distortion such as warpage or distortion.

But, in aforesaid workpiece applying method in the past, after a part that makes binding agent (UV cured resin) is irradiated interim solidifying by UV, make the big area part that becomes binding agent entirety irradiate disposable formal solidifying by UV, if therefore as in recent years, the structural strength of workpiece itself declines, irradiate the energy of giving owing to solidifying towards large-area binding agent entirety formal with UV, when the temperature rise of whole workpiece, large-area binding agent generation cure shrinkage etc., produce the distortion such as warpage or distortion, between the workpiece being temporarily fixed, produce position deviation.

Therefore, exist and fail with pinpoint accuracy, workpiece to be positioned each other, and the problem such as decrease in yield.

Especially, laminating has from an avris of workpiece and sandwiches flexible base, board (FPC) etc. and when the display panel of the circuit substrate that is connected, the thickness of the binding agent (UV cured resin) at the position of insertion flexible base, board etc. becomes thicker than the thickness of other binding agents, even if therefore irradiate the multiple positions with the interim cured binders of point-like by UV under the state of lap position of determining workpiece, but owing to irradiating the energy of giving with respect to the big area part that becomes binding agent entirety by formal solidifying with UV, the interim cure site of point-like becomes fulcrum and whole workpiece becomes yielding, the workpiece being temporarily fixed produces position deviation to the other side direction etc. each other, cannot realize desired workpiece setting accuracy each other.

Summary of the invention

The present invention to be to address this is that as problem, and its object is to suppress the distortion of workpiece and the cure shrinkage of binding agent while makes that binding agent entirety is formal solidifies etc.

In order to realize this object, be by mutual opposed pair of workpieces contraposition based on workpiece applying method of the present invention, and it is overlapping to be sandwiched in mode therebetween with binding agent, the workpiece applying method of the described workpiece of curing laminating by described binding agent, wherein, possess: temporary fixed operation, local interim the solidifying of a part of 3a that makes to be sandwiched in the described binding agent between described workpiece carrys out temporary fixed described workpiece; And formal curing process, utilize the shadow mask that described binding agent entirety is divided into multiple cut zone, by each irradiation hertzian wave of multiple described cut zone is made described binding agent entirety difference, formally solidified successively.

In addition, be the workpiece laminating apparatus via the pair of workpieces of and mutual contraposition opposite by the curing binding agent laminating of rayed based on workpiece laminating apparatus of the present invention, wherein, possess: Stage microscope, loads the described workpiece that accompanies described binding agent in immovable mode, shadow mask, is arranged towards loading to move in the opposed position of described workpiece of described Stage microscope freely with quilt, and Lighting Division, carries out rayed via described shadow mask towards described binding agent, and mobile member, described shadow mask is relatively moved with respect to loading in the described workpiece of described Stage microscope, described binding agent has and is divided into the cut zone in multiple regions with the opposed described shadow mask of described workpiece, described shadow mask has the variform multiple light-shielding patterns of printing opacity towards the described cut zone of described binding agent from described Lighting Division in the mode that the travel direction based on described mobile member is arranged to described shadow mask respectively, described mobile member is controlled so as to respect to moving intermittently described shadow mask from described Lighting Division towards the irradiated region of described Stage microscope described light-shielding pattern is suspended respectively, described Lighting Division is controlled so as in the time that described mobile member suspends and carries out respectively rayed towards the described light-shielding pattern of described shadow mask, make the described cut zone of described binding agent successively, carrying out respectively part formally solidifies, thereby formally solidify described binding agent entirety.

Based on having in the applying method of the present invention of aforementioned feature, make local interim the solidifying of a part that is sandwiched in the binding agent between overlapping workpiece carry out interim fixation workpiece, afterwards binding agent entirety is divided into multiple regions, make these cut zone several times, respectively, successively, formal solidifying, thus, even in the time that the total area of binding agent entirety is wider, be divided into multiple narrow area positions also across the time difference processing that is cured successively respectively, therefore compared with disposable formal method of solidifying large-area binding agent entirety, the cure shrinkage of the cut zone in temperature rise amount and the binding agent of the workpiece producing in the time of each formal solidifying significantly reduces.

Therefore, can suppress the distortion of workpiece and the cure shrinkage of binding agent while make that binding agent entirety is formal solidifies.

Its result, with irradiate a part for interim cured binders (UV cured resin) with UV after, irradiate the disposable formal curing previous methods of big area part that becomes binding agent entirety is compared by UV, can not produce workpiece position deviation each other, can carry out each other contraposition to workpiece with pinpoint accuracy, realize the raising of yield rate.

And, although the material of workpiece or binding agent changes, also can realize the setting accuracy of workpiece height each other.

Especially, when laminating has the display panel of the circuit substrate that sandwiches the plate-shaped members such as flexible base, board (FPC) from an avris of workpiece and be connected, the workpiece being temporarily fixed also can, to position deviations such as the other side directions, can not be realized desired workpiece setting accuracy each other each other.

And, based on having in the workpiece laminating apparatus of the present invention of aforementioned feature, make the light-shielding pattern of shadow mask move intermittently with respect to the workpiece on Stage microscope by mobile member, in the time that suspending, it carries out rayed by light-shielding pattern towards binding agent from Lighting Division, it is formally curing that the cut zone of binding agent is carried out successively, respectively part thus, thereby binding agent entirety is formally solidified.

Therefore formal cured binders entirety effectively when, can suppressing the distortion of workpiece and the cure shrinkage of binding agent.

Its result, realizes the high speed of working speed.

Brief description of the drawings

Fig. 1 is the explanatory view that represents the related workpiece applying method of embodiments of the present invention, (a) be the vertical view while representing that temporary fixed operation finishes, (b) be the primary vertical view representing in formal curing process, (c) vertical view while being finishing for the first time in representing to solidify just, (d) be the secondary vertical view representing in formal curing process, the vertical view while being (e) finishing for the second time in representing to solidify just.

Fig. 2 is the integrally-built explanatory view that represents the related workpiece laminating apparatus of embodiments of the present invention, (a) is vertical section front view, is (b) to amplify cross-sectional plan view.

Fig. 3 is the explanatory view that represents the related workpiece applying method of other embodiment of the present invention, (a) be the vertical view while representing that temporary fixed operation finishes, (b) be the primary vertical view representing in formal curing process, (c) be the vertical view while representing to finish for the first time in formal curing process, (d) being the secondary vertical view representing in formal curing process, is (e) vertical view while representing finishing for the second time in formal curing process.

Fig. 4 is the integrally-built explanatory view that represents the related workpiece laminating apparatus of other embodiment of the present invention, (a) is vertical section front view, is (b) to amplify cross-sectional plan view.

Fig. 5 is the explanatory view that represents the related workpiece applying method of other embodiment of the present invention, (a) be the vertical view while representing that temporary fixed operation finishes, (b) be the primary vertical view representing in formal curing process, (c) be the vertical view while representing finishing for the first time in formal curing process, (d) be the secondary vertical view representing in formal curing process, (e) be the vertical view while representing finishing for the second time in formal curing process, (f) be the vertical view for the third time representing in formal curing process, (g) be the vertical view while representing finishing for the third time in formal curing process.

Fig. 6 is the explanatory view that represents the variation of shadow mask, is (a) vertical view of the 2nd shadow mask, is (b) vertical view of the 3rd shadow mask.

Fig. 7 is the explanatory view that represents the variation of shadow mask, is (a) vertical view of the 2nd shadow mask, is (b) vertical view of the 3rd shadow mask.

Fig. 8 is the explanatory view that represents the variation of shadow mask, is (a) vertical view of the 2nd shadow mask, is (b) vertical view of the 3rd shadow mask.

Fig. 9 is the integrally-built explanatory view that represents the related workpiece laminating apparatus of other embodiment of the present invention, (a) is vertical section front view, is (b) to amplify cross-sectional plan view.

1,2-workpiece, 3-binding agent, a part (temporary fixed portion) for 3a-binding agent, 3b, 3c, 3d-cut zone, 4-shadow mask, 4a-light-shielding pattern (the first light-shielding pattern), 4b-light-shielding pattern (the second light-shielding pattern), 4c-light-shielding pattern (the 3rd light-shielding pattern), 4p-mask plate, 11-Stage microscope, 12-Lighting Division, 13-mobile member.

Embodiment

Below, with reference to the accompanying drawings embodiments of the present invention are elaborated.

The related workpiece applying method of embodiments of the present invention is by the mutual contraposition of opposed pair of

workpieces

1,2, with binding agent 3 be sandwiched in mode therebetween carry out under without bubble state overlapping, the method for the curing laminating

workpiece

1,2 by binding agent 3.

If describe in detail, as shown in Fig. 1, Fig. 3, Fig. 5, the related workpiece applying method of embodiments of the present invention comprises: temporary fixed operation, make to be sandwiched in local interim the solidifying of a part of 3a of the binding agent 3 between

plate workpiece

1,2, temporary

fixed workpiece

1,2 under the state of contraposition respectively; And formal curing process, to carry out respectively several times, successively part formal curing by being split into multiple each

cut zone

3b, 3c, 3d to make binding agent 3 entirety.

As

workpiece

1,2, use in the flat-panel monitors (FPD) such as such as liquid-crystal display (LCD), OLED display (OLED), plasma display (PDP), flexible display or contact panel or 3D(3 dimension) FPD of use in indicating meter or e-book etc. and transparent glass substrate or PES(Poly-Ether-Sulphone) etc. transparent plastic film and synthetic resins substrate processed or protective glass and barrier glass etc.

Especially,

workpiece

1,2 comprise the organic materialss such as Polarizer are sandwiched to the surface of substrate and workpiece that the back side bonds or with binding agent 3 described later to thering is the fit workpiece of another sheet single board substrate or same group substrate of the workpiece of connection section of the circuit substrate that flexible base, board (FPC:Flexible printed circuits) etc. is sandwiched to one side of overlapping substrate and be connected.

And

workpiece

1,2 can also use in its production phase and be arranged a slice workpiece before the separation that

multiple workpiece

1,2 are set.

And, at the peripheral part of

workpiece

1,2,

multiple registration mark

1a, 2a are set, also superimposed with pinpoint accuracy contraposition by these registration marks 1a, 2a.Preferably the outer shape of

workpiece

1,2 is for example formed as the formed objects such as rectangle, and overlapping outer rim separately each other.

Binding agent 3 utilizes by the curing transparent material of electromagnetic irradiation.Specifically, utilize to have by absorbing the luminous energy of specific wavelength and carries out polymerization, thereby be cured to show the light-curing adhesive etc. of close-burning light solidified.

As the concrete example of binding agent 3, preferably utilize and react with ultraviolet luminous energy and be changed to the ultraviolet curable resin (UV cured resin) of solid from aqueous chemical.

And, preferably before overlapped

works

1,2 any one party of the opposed faces of

workpiece

1,2 or both sides utilize formed by divider etc. quantitatively spue nozzle from just binding agent 3 is coated with at first when curing the identical desired shape of shape.

And binding agent 3 to clamp under the overlapping state of the mode of this binding agent, by multiple shadow mask 4 described later etc., is split into

multiple cut zone

3b, 3c, 3d at the applied opposed faces in

workpiece

1,2 and

workpiece

1,2.

In addition, before coating binding agent 3, in advance carry out degassedly to being mixed in bubble in binding agent 3, in the time of coating, also should be noted and avoid being involved in bubble.

,, in the front operation of temporary fixed operation described later, by the past known method, carry out successively painting process, the overlapping step of

workpiece

1,2 and the contraposition operation of

workpiece

1,2 of binding agent 3.

In the painting process of binding agent 3, by the nozzle that quantitatively spues (not shown) etc., any one face of the opposed faces to

workpiece

1,2 or two faces coating binding agents 3.

In the overlapping step of

workpiece

1,2, by overlapping device (not shown) etc., at vacuum atmosphere or reach in the atmosphere or atmosphere of specified vacuum degree, to any one in the applied

workpiece

1,2 that has binding agent 3 overlapping another or the overlapping applied

workpiece

1,2 that has binding agent 3, binding agent 3 is sandwiched between

workpiece

1,2.

In the contraposition operation of

workpiece

1,2, by the location detector such as pick up camera (not shown), multiple registration mark 1a, the 2a of the peripheral part that is arranged at

superimposed workpiece

1,2 are carried out to position detection, by another being moved according to the driving mechanism of this position detection data linkage (not shown) with respect to any one of

workpiece

1,2 to XY θ direction, thus with pinpoint

accuracy contraposition workpiece

1,2 each other.

In the temporary fixed operation of carrying out, as shown in Fig. 1 (a), Fig. 3 (a), Fig. 5 (a), in the binding agent 3 being sandwiched between

workpiece

1,2, make local interim the solidifying of a part of 3a of its coated face after this front operation.Thus, local temporary

fixed workpiece

1,2, even and if be solidified into the

workpiece

1,2 that this is temporarily fixed and be transplanted on other place, the degree that the alignment between

workpiece

1,2 can position deviation yet temporarily.

In the concrete example of the temporary fixed operation shown in Fig. 1 (a), Fig. 3 (a), Fig. 5 (a), in the rectangle binding agent 3 being sandwiched between

rectangular piece

1,2, its four angle part is carried out rayed (UV irradiation) or carried out rayed (UV irradiation) by mask with point-like with point-like, make thus its respectively, part solidifies temporarily, forms the temporary fixed 3a of portion of multiple (4) point-like in the mode of the predetermined distance vacated respectively.

And, as other examples, though but the position beyond not shown four angle parts that the temporary fixed 3a of portion can be disposed to rectangle the binding agent 3 or shape of the temporary fixed 3a of portion is formed as to other shapes beyond point-like.

In the formal curing process carrying out after temporary fixed operation, as shown in Fig. 1 (b)～(e), Fig. 3 (b)～(e), Fig. 5 (b)～(g), in the binding agent 3 being sandwiched between

workpiece

1,2, each

cut zone

3b, 3c, the 3d that its coated face entirety is formed by being split into multiple regions carries out respectively several times, successively part and formally solidifies.

Thus, the cure shrinkage of the temperature rise amount of

workpiece

1,2 producing while being suppressed to each formal solidifying and cut zone 3b, the 3c of

binding agent

3,3d can not become large.

And, preferably use light-curing adhesive as binding agent 3, in formal curing process, use the variform multiple shadow mask 4 of the printing opacity from Lighting Division 12 described later with respect to binding agent 3, the kind that changes shadow mask 4 for binding agent 3 is carried out rayed, makes thus cut

zone

3b, 3c, 3d carry out successively, respectively part and formally solidifies.

Multiple shadow mask 4 has the variform multiple light-shielding pattern 4a of printing opacity, 4b, 4c separately accordingly with the shape of

cut zone

3b, 3c, 3d.In multiple light-

shielding pattern

4a, 4b, 4c, offered difform multiple light hole 4h separately, respectively to stacking these light holes of Z direction 4h, be formed as thus seamlessly covering the coated face entirety of binding agent 3.

Now, preferably fix and carry out light-struck position from Lighting Division 12 described later, with respect to this, cut zone 3b, the 3c, the either party of 3d or cut

zone

3b, 3c, the 3d both sides of multiple shadow mask 4 and binding agent 3 that make multiple shadow mask 4 or be sandwiched in the binding agent 3 between

workpiece

1,2 relatively move (transmission), make

cut zone

3b, 3c, 3d carry out successively, respectively part and formally solidify.

In addition, as required can also be in formal curing process for the first time and for the second time or other moment carry out for detection of having or not the bubble that is contained in the bubble in binding agent 3 to detect operation.

In the concrete example of the formal curing process shown in Fig. 1 (b)～(e), Fig. 3 (b)～(e), using and being offered difform light-

shielding pattern

4a, 4b(light hole 4h separately for the first time and for the second time in formal curing process) the first shadow mask 41 and the second shadow mask 42, make cut zone 3b, the 3c of binding agent 3 divide 2 times, to carry out part successively, respectively formal curing.

In the concrete example of the formal curing process shown in Fig. 5 (b)～(g), in formal curing process for the first time, for the second time and for the third time in use offered difform light-

shielding pattern

4a, 4b, 4c(light hole 4h separately) the first shadow mask 41, the second shadow mask 42 and the 3rd shadow mask 43, make cut

zone

3b, 3c, the 3d of binding agent 3 divide 3 times, to carry out respectively part successively formal curing.

Especially, in formal curing process shown in Fig. 1 (b), Fig. 5 (b) for the second time in, the light hole 4h that is used in the light-shielding pattern 4a in primary the first shadow mask 41 in formal curing process is formed as frame shape, at least cover outer peripheral portion entirety in rectangle binding agent 3.

Thus, formal the 1st cut zone 3b that solidifies the outer peripheral portion that is configured in binding agent 3 at first, therefore in rectangle binding agent 3, the uncured portion of central side is stopped and can outwards not stretch by the formal cured portion of outer peripheral portion, prevents from being caused from the outer peripheral edges of

workpiece

1,2 and being overflowed by the mobility of binding agent 3.

And, as other examples, but binding agent 3 entirety can be divided into 4 above regions though not shown, use 4 kinds of above shadow mask 4 to make it carry out respectively several times, successively part by 4 above cut zone to these regions and formally solidify, or the light hole 4h of the light-shielding pattern 4a in the first shadow mask 41 is changed to the shape beyond frame shape.

And, preferably use with multiple difform light-

shielding pattern

4a, 4b, 4c(light hole 4h as shadow mask 4) the mask plate 4p that forms to the continuous mode of prescribed direction, in formal curing process, make mask plate 4p mobile to the formation direction (directions X) of light-

shielding pattern

4a, 4b, 4c, carry out rayed towards binding agent 3 respectively by multiple light-

shielding pattern

4a, 4b, 4c, make thus cut

zone

3b, 3c, the 3d of binding agent 3 carry out successively, respectively part and formally solidify.

The workpiece applying method related according to this embodiments of the present invention, in temporary fixed operation, makes a part for the coated face that is sandwiched in the binding agent 3 between overlapping

workpiece

1,2 with local interim solidifying such as point-like, and

workpiece

1,2 is temporarily fixed thus.

Afterwards, in formal curing process, the coated face entirety of binding agent 3 is divided into multiple regions, makes these

cut zone

3b, 3c, 3d carry out respectively several times, successively part and formally solidify.

Thus, even in the time that the total area of the coated face entirety of binding agent 3 is wider, be divided into multiple narrow area positions also across the time difference processing that is cured successively respectively, therefore compared with disposable formal method of solidifying large-area binding agent entirety, cut zone 3b, the 3c in temperature rise amount and the binding agent 3 of the

workpiece

1,2 producing in the time of each formal solidifying, the cure shrinkage of 3d significantly reduce.

Therefore when, can suppressing the distortion such as warpage or distortion of

workpiece

1,2 and the cure shrinkage of binding agent 3, make formal the solidifying of binding agent 3 entirety.

Its result,

workpiece

1,2 can not produce position deviation each other, can position each

other workpiece

1,2 with pinpoint accuracy, realizes the raising of yield rate.

And, although the material of

workpiece

1,2 or binding agent 3 changes, also can realize the setting accuracy of the height between

workpiece

1,2.

Especially, use light-curing adhesive as binding agent 3, in formal curing process, use the variform multiple shadow mask 4 of the printing opacity from Lighting Division 12 described later with respect to binding agent 3, the kind that binding agent 3 is changed to shadow mask 4 is carried out rayed, make thus cut

zone

3b, 3c, 3d carry out successively, respectively part while formally solidifying, according to the different printing opacity shapes of multiple shadow mask 4 and respectively formal cured binders 3 entirety and can residual uncured portion of cut zone 3b, the 3c of

binding agent

3,3d.

Therefore, can cut apart reliably binding agent 3 entirety and it is formally solidified.

Its result, can realize the further raising of the setting accuracy between

workpiece

1,2.

And, as the variform multiple shadow mask 4 of the printing opacity with respect to binding agent 3, use with multiple difform light-

shielding pattern

4a, 4b, the mask plate 4p that 4c forms to the continuous mode of prescribed direction, in formal curing process, make mask plate 4p to light-

shielding pattern

4a, 4b, the formation direction of 4c moves, by light-

shielding pattern

4a, 4b, 4c carries out rayed towards binding agent 3 respectively, make thus the cut zone 3b of

binding agent

3, 3c, 3d successively, carry out respectively part while formally solidifying, the cut zone 3b of

binding agent

3, 3c, 3d is formally solidified according to the different printing opacity shapes of multiple shadow mask 4.

Therefore, can effectively cut apart binding agent 3 entirety and it is formally solidified.

Its result, can realize the high speed of working speed.

And, for the workpiece laminating apparatus A that implements the related workpiece applying method of embodiments of the present invention by the pair of workpieces of opposite and

mutual contraposition

1,2 via being sandwiched in therebetween and fitting by the curing binding agent 3 of electromagnetic rayed.

If describe in detail,, as shown in Fig. 2, Fig. 4, Fig. 9, the related workpiece laminating apparatus A of embodiments of the present invention possesses and has as main composition important document: Stage microscope 11, and immovably mounting accompanies the

workpiece

1,2 of binding agent 3; Shadow mask 4, is moved freely and arranges along loading in the

workpiece

1,2 of Stage microscope 11; Lighting Division 12, carries out rayed via shadow mask 4 towards binding agent 3; Mobile member 13, makes shadow mask 4 relatively be moved back and forth with respect to loading in the

workpiece

1,2 of Stage microscope 11; And control member 14, respectively start control Lighting Division 12 and mobile member 13 etc.

Stage microscope 11 is level and smooth mounting surface, and its surface is provided with the retaining member (not shown) for loading and unloading the

workpiece

1,2 that keeps freely mutual

contraposition overlapping workpiece

1,2 or be temporarily fixed in aforementioned temporary fixed operation.

Use and attract chuck or electrostatic chuck or adhere to chuck or their combination as this retaining member.

Lighting Division 12 is by having the formations such as the unit of the electromagnetic wave irradiation lamps such as ultraviolet ray (UV) lamp, and be configured to by control member 14 starts described later and control, towards Lighting Division 12 with loaded the hertzian wave 12b such as the irradiated region 12a irradiation ultraviolet radiation that formed in the

workpiece

1,2 of Stage microscope 11.

Mobile member 13 keeps freely shadow mask 4 and its driving mechanism moving to prescribed direction etc. is formed by loading and unloading, and be configured to by control member 14 starts described later and control, shadow mask 4 is moved back and forth relatively and intermittently with respect to the irradiated region 12a of the

workpiece

1,2 towards Stage microscope 11 from Lighting Division 12.

Shadow mask 4 has cut

zone

3b, 3c, the variform multiple light-shielding pattern 4a of printing opacity of 3d, 4b, the 4c towards binding agent 3 from Lighting Division 12 in the mode that the travel direction based on mobile member 13 is arranged towards shadow mask 4 respectively as used herein., use to prescribed direction (directions X) and also offered continuously the mask plate 4p of difform multiple light hole 4h separately as shadow mask 4.

And preferably Stage microscope 11, Lighting Division 12 and mobile member 13 are disposed in the working spaces 10 that implements the shading devices such as ultraviolet ray.

Working spaces 10 has for making

workpiece

1,2 and becoming the shutter door 10a that the mask plate 4p etc. of shadow mask 4 comes in and goes out, and be configured to by the supply members such as transfer robot (not shown)

workpiece

1,2 is loaded in the prescribed position of Stage microscope 11, the mask plate 4p that becomes shadow mask 4 is transferred to mobile member 13.

Control member 14 is for having respectively the controller of the pilot circuit being electrically connected with the shutter door 10a of Lighting Division 12, mobile member 13, working spaces 10 etc., carry out as follows start control, according to the program that is pre-set in pilot circuit, at

workpiece

1,2 and shadow mask 4(mask plate 4p) by after being moved into, make mobile member 13 starts make shadow mask 4(mask plate 4p) move back and forth intermittently and make Lighting Division 12 to light intermittently.

If describe in detail, mobile member 13 is controlled by start as follows, in the moment of being set by control member 14, with respect to from Lighting Division 12 towards the irradiated region of Stage microscope 11 12a, make shadow mask 4(mask plate 4p) light-

shielding pattern

4a, 4b, 4c(light hole 4h) suspend separately respectively setting-up time.

Lighting Division 12 is controlled by start as follows, in the moment of being set by control member 14, with the shadow mask 4(mask plate 4p based on mobile member 13) time-out interlock, towards shadow mask 4(mask plate 4p) light-

shielding pattern

4a, 4b, 4c(light hole 4h) in any carry out respectively the rayed of hertzian wave 12b such as ultraviolet ray, cut

zone

3b, 3c, the 3d that makes binding agent 3 is successively, part is formally curing.

The workpiece laminating apparatus A related according to this embodiments of the present invention, light-

shielding pattern

4a, 4b, the 4c of shadow mask 4 move with respect to the

workpiece

1,2 on Stage microscope 11 intermittently by mobile member 13, in the time that suspending, it carries out rayed by light-

shielding pattern

4a, 4b, 4c towards binding agent 3 from Lighting Division 12, thus, it is formally curing that the cut zone 3b of

binding agent

3,3c, 3d carry out successively, respectively part.

Therefore, can suppress the distortion such as warpage or distortion of

workpiece

1,2 and the cure shrinkage of binding agent 3 while make that binding agent 3 entirety is formal solidifies.

Its result, can realize the high speed of working speed.

[embodiment 1]

Then, with reference to the accompanying drawings various embodiments of the present invention are described.

As shown in Fig. 1 (a)～(e), in the related workpiece applying method of embodiments of the invention 1, binding agent 3 is sandwiched between

workpiece

1,2 with the rectangle of the profile that is less than workpiece 1,2.As the variform multiple shadow mask 4 of printing opacity, in formal curing process for the first time in, use has the first shadow mask 41 of the first light-shielding pattern 4a that is offered frame shape light hole 4h, ensuing for the second time in, use has the second shadow mask 42 of the second light-shielding pattern 4b that is offered rectangle light hole 4h, make cut zone 3b, the 3c of binding agent 3 divide 2 times, carry out part successively, respectively and formally solidify.

,, with respect to the frame shape light hole 4h in the first light-shielding pattern 4a of the first shadow mask 41, the rectangle light hole 4h in the second light-shielding pattern 4b of the second shadow mask 42 is formed as chimeric shape and size mutually.

The workpiece applying method related according to this embodiments of the invention 1, in formal curing process for the first time in, as shown in Fig. 1 (b), by the first light-shielding pattern 4a(light hole 4h of the first shadow mask 41) carry out rayed with frame shape, as shown in Fig. 1 (c), in binding agent 3, make local formal the solidifying of cut zone 3b of frame shape.In ensuing formal curing process for the second time in, as shown in Figure 1 (d) shows, by the second light-shielding pattern 4b(light hole 4h of the second shadow mask 42) carry out rayed with rectangle, as shown in Fig. 1 (e), local formal curing rectangle cut zone 3c in binding agent 3, thus make formal the solidifying of binding agent 3 entirety.

Thus, have advantages of and can effectively make binding agent 3 entirety formal curing with minimum process number.

Especially, in illustrated example, be expressed as follows situation, between the overlapping

workpiece

1,2 of clamping binding agent 3, insert the plate-shaped members 5 such as flexible base plate (FPC) from its one side (minor face) side near

registration mark

1a, 2a, laminating has the display panel of the circuit substrate (not shown) being connected by plate-shaped member 5.

According to this illustrated example, even have from one side (minor face) side of

workpiece

1,2 and sandwich the plate-shaped members 5 such as flexible base plate (FPC) and when the display panel of the circuit substrate that is connected in laminating, the

workpiece

1,2 being temporarily fixed can, at upper position deviations such as the other side (long limit) directions, can not be realized desired

workpiece

1,2 setting accuracy each other each other.

Thus, although have advantages of that the layer structural changes of

workpiece

1,2 also can realize the setting accuracy of

workpiece

1,2 height each other,

And, in the related workpiece laminating apparatus A of embodiment 1 shown in Fig. 2 (a) and (b), the workpiece being temporarily fixed in temporary fixed

operation

1,2 is moved into working spaces 10, and workpiece is immovably being remained under the state of Stage microscope 11, by mobile member 13, the mask plate 4p that becomes shadow mask 4 is moved with respect to workpiece with 2 stages to directions X.

The mask plate 4p that becomes shadow mask 4 is above had the frame shape light hole 4h of the first light-shielding pattern 4a and the rectangle light hole 4h of the second light-shielding pattern 4b in the mode to directions X adjacency by cutting.

Thus, having advantages of can be with simple structure formal cured binders 3 entirety effectively.

[embodiment 2]

As Fig. 3 (a)～(e) and Fig. 4 (a), (b) shown in, in the related workpiece applying method of embodiments of the invention 2, as the variform multiple shadow mask 4 of printing opacity, in formal curing process for the first time in, use has and is offered along the first shadow mask 41 of the first light-shielding pattern 4a of cornerwise X-shaped light hole 4h of rectangle binding agent 3, ensuing for the second time in, use has the second shadow mask 42 of the second light-shielding pattern 4b that is offered (4) the trilateral light hole 4h being clamped by the diagonal lines of rectangle binding agent 3, make the cut zone 3b of

binding agent

3, 3c divides 2 times, successively, carrying out respectively part formally solidifies, this structure is different from the embodiment 1 shown in Fig. 1 and Fig. 2, structure is in addition identical with the embodiment 1 shown in Fig. 1 and Fig. 2.

,, with respect to the X-shaped light hole 4h in the first light-shielding pattern 4a of the first shadow mask 41, (4) the trilateral light hole 4h in the second light-shielding pattern 4b of the second shadow mask 42 is formed as chimeric shape and size mutually.

And, in the related workpiece laminating apparatus A of embodiment 2 shown in Fig. 4 (a) and (b), on the mask plate 4p that becomes shadow mask 4, there are the X-shaped light hole 4h of the first light-shielding pattern 4a and (4) trilateral light hole 4h of the second light-shielding pattern 4b in the mode to directions X adjacency by cutting.

According to the related workpiece applying method of this embodiments of the invention 2 and workpiece laminating apparatus A, in formal curing process for the first time in, as shown in Figure 3 (b), by the first light-shielding pattern 4a(light hole 4h of the first shadow mask 41) carry out rayed with X-shaped, as shown in Figure 3 (c), in binding agent 3, make local formal the solidifying of cut zone 3b of X-shaped.In ensuing formal curing process for the second time in, as shown in Fig. 3 (d), by the second light-shielding pattern 4b(light hole 4h of the second shadow mask 42) carry out rayed with (4) trilateral, as shown in Fig. 4 (e), in binding agent 3, make local formal the solidifying of (4) trilateral cut zone 3c, thereby whole binding agents 3 are formally solidified.

Therefore, can obtain the action effect identical with embodiment 1.

[embodiment 3]

As shown in Fig. 5 (a)～(e), in the related workpiece applying method of embodiments of the invention 3, as the variform multiple shadow mask 4 of printing opacity, in formal curing process for the first time in, use has the first shadow mask 41 of the first light-shielding pattern 4a that is offered frame shape light hole 4h, ensuing for the second time in, use has the second shadow mask 42 of the second light-shielding pattern 4b of the light hole 4h that is offered square black and white grid apperance, ensuing for the third time in, use has the 3rd shadow mask 43 of the 3rd light-shielding pattern 4c of the light hole 4h that is offered square black and white grid apperance, make the cut zone 3b of

binding agent

3, 3c, 3d divides 3 times, successively, carrying out respectively part formally solidifies, this structure is different from the embodiment 1 shown in Fig. 1 and Fig. 2, structure is in addition identical with the embodiment 1 shown in Fig. 1 and Fig. 2.

; with respect to the frame shape light hole 4h in the first light-shielding pattern 4a of the first shadow mask 41, in the second light-shielding pattern 4b of the second shadow mask 42, will in the light hole 4h of black and white grid apperance mutual staggered square and the 3rd light-shielding pattern 4c of the 3rd shadow mask 43, the light hole 4h of black and white grid apperance mutual staggered square be formed as to chimeric shape and size mutually.

The workpiece applying method related according to this embodiments of the invention 3, in formal curing process for the first time in, as shown in Fig. 5 (b), by the first light-shielding pattern 4a(light hole 4h of the first shadow mask 41) carry out rayed with frame shape, as shown in Fig. 5 (c), in binding agent 3, make local formal the solidifying of frame shape cut zone 3b.In ensuing formal curing process for the second time in, as shown in Fig. 5 (d), by the second light-shielding pattern 4b(light hole 4h of the second shadow mask 42) carry out rayed with black and white grid apperance, as shown in Figure 5 (e) shows, in binding agent 3, make local formal the solidifying of cut zone 3c of black and white grid apperance, thereby make formal the solidifying of binding agent 3 entirety.Ensuing formal curing process for the third time in, as shown in Fig. 5 (f), by the 3rd light-shielding pattern 4c(light hole 4h of the 3rd shadow mask 43) carry out rayed with black and white grid apperance, as shown in Figure 5 (g) shows, in binding agent 3, make local formal the solidifying of cut zone 3d of black and white grid apperance, thereby whole binding agents 3 are formally solidified.

Thus, binding agent 3 entirety be divided into less area and make reliably it formally solidify.

Therefore, compared with embodiment 1 or embodiment 2, can further suppress the distortion such as warpage or distortion of

workpiece

1,2 and the cure shrinkage of binding agent 3, having advantages of can be with pinpoint

accuracy positioning workpieces

1,2 more each other.

In addition, the shape of light hole 4h in the shape of light hole 4h in the second light-shielding pattern 4b of the second shadow mask 42 and the 3rd light-shielding pattern 4c of the 3rd shadow mask 43 is not limited to black and white grid apperance, and its variation is shown in to Fig. 6 (a) and (b), Fig. 7 (a) and (b) and Fig. 8 (a) and (b).

In variation shown in Fig. 6 (a) and (b), the shape of the light hole 4h in the 3rd light-shielding pattern 4c of the shape of the light hole 4h in the second light-shielding pattern 4b of the second shadow mask 42 and the 3rd shadow mask 43 is made as respectively to rectangle staggered mutual chimeric black and white grid apperance mutually.

In variation shown in Fig. 7 (a) and (b), the shape of light hole 4h in the second light-shielding pattern 4b of the second shadow mask 42 is made as to multiple circles to the globule apperance of arranging in length and breadth, the shape of the light hole 4h in the 3rd light-shielding pattern 4c of the 3rd shadow mask 43 is made as to the apperance mutual chimeric with globule apperance.

In variation shown in Fig. 8 (a) and (b), the shape of the light hole 4h in the 3rd light-shielding pattern 4c of the shape of the light hole 4h in the second light-shielding pattern 4b of the second shadow mask 42 and the 3rd shadow mask 43 is made as respectively to trilateral staggered mutual chimeric black and white grid apperance mutually.

And, in the related workpiece laminating apparatus A of embodiment 3 shown in Fig. 9 (a) and (b), the workpiece being temporarily fixed in temporary fixed

operation

1,2 is immovably remained under the state of Stage microscope 11, with respect to workpiece, the mask plate 4p that becomes shadow mask 4 is moved with 3 stages to directions X by mobile member 13.

Become the upper light hole 4h that is had the light hole 4h of the frame shape light hole 4h of the first light-shielding pattern 4a and the black and white grid apperance of the second light-shielding pattern 4b etc. and the black and white grid apperance of the 3rd light-shielding pattern 4c etc. in the mode to directions X adjacency by cutting of mask plate 4p of shadow mask 4.

Thus, have advantages of and can with simple structure, binding agent 3 entirety are divided into less area and make reliably it formal curing.

In addition, in the related workpiece laminating apparatus A of aforesaid embodiment 1, embodiment 2 and embodiment 3, the workpiece being temporarily fixed in temporary fixed

operation

1,2 is immovably remained under the state of Stage microscope 11, with respect to workpiece, the mask plate 4p that becomes shadow mask 4 is moved with 2 stages or 3 stages to directions X by mobile member 13, but be not limited to this, can also under the state that mutual

contraposition overlapping workpiece

1,2 is immovably remained on to Stage microscope 11, carry out successively temporary fixed operation and formal curing process.

And, can also fixedly become the mask plate 4p of shadow mask 4, make

workpiece

1,2 and Stage microscope 11 together move or make mask plate 4p and

workpiece

1,2 and Stage microscope 11 both sides to relatively move with the multistage with respect to mask plate.

Claims

1. a workpiece applying method, it is mutual opposed pair of workpieces contraposition, and it is overlapping to be sandwiched in mode therebetween with binding agent, and by the described workpiece of curing laminating of described binding agent, described workpiece applying method is characterised in that to possess:

Temporary fixed operation, makes local interim the solidifying of a part that is sandwiched in the described binding agent between described workpiece carry out temporary fixed described workpiece; And

Formal curing process, utilizes the shadow mask that described binding agent entirety is divided into multiple cut zone, by each the irradiation hertzian wave to multiple described cut zone, described binding agent entirety is formally solidified respectively successively.

2. workpiece applying method according to claim 1, is characterized in that:

Use light-curing adhesive as described binding agent,

In described formal curing process, utilize the variform multiple described shadow mask of printing opacity with respect to described binding agent, carry out rayed by the kind that described binding agent is changed to described shadow mask, make described cut zone local formal curing respectively successively.

3. workpiece applying method according to claim 1 and 2, is characterized in that:

As the variform multiple described shadow mask of the printing opacity with respect to described binding agent, utilize the mask plate forming to the continuous mode of prescribed direction with multiple difform light-shielding patterns,

In described formal curing process, move described mask plate to the formation direction of described light-shielding pattern, carry out rayed towards described binding agent respectively by described light-shielding pattern, make thus the described cut zone of described binding agent local formal curing respectively successively.

4. a workpiece laminating apparatus, it is via the pair of workpieces of and mutual contraposition opposite by the curing binding agent laminating of rayed, and described workpiece laminating apparatus is characterised in that to possess:

Stage microscope, loads the described workpiece that accompanies described binding agent in immovable mode;

Shadow mask, is arranged towards loading to move in the opposed position of described workpiece of described Stage microscope freely with quilt;

Lighting Division, carries out rayed via described shadow mask towards described binding agent; And

Mobile member, makes described shadow mask be relatively moved with respect to loading in the described workpiece of described Stage microscope,

Described binding agent has and is divided into the cut zone in multiple regions with the opposed described shadow mask of described workpiece,

Described shadow mask has the variform multiple light-shielding patterns of printing opacity towards the described cut zone of described binding agent from described Lighting Division in the mode that the travel direction to the described shadow mask of being undertaken by described mobile member is arranged respectively,

Described mobile member is controlled so as to respect to moving intermittently described shadow mask from described Lighting Division towards the irradiated region of described Stage microscope described light-shielding pattern is suspended respectively,

Described Lighting Division is controlled so as in the time that described mobile member suspends and carries out respectively rayed towards the described light-shielding pattern of described shadow mask, make the described cut zone of described binding agent carry out respectively successively part and formally solidify, thereby formally solidify described binding agent entirety.