CN103869111B - A kind of universal needle stand and using method thereof - Google Patents
A kind of universal needle stand and using method thereof Download PDFInfo
- Publication number
- CN103869111B CN103869111B CN201410059942.7A CN201410059942A CN103869111B CN 103869111 B CN103869111 B CN 103869111B CN 201410059942 A CN201410059942 A CN 201410059942A CN 103869111 B CN103869111 B CN 103869111B
- Authority
- CN
- China
- Prior art keywords
- resistance
- probe
- dielectric breakdown
- needle stand
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The present invention provides a kind of universal needle stand and using method thereof, including probe, resistance, selection switch, source measurement unit；Described probe, described selection switch and are connected in series to form loop between the measurement unit of described source；Resistance described in described selection on-off control accesses described loop or by described resistive short.When testing sample is implemented dielectric breakdown test by described probe, switch is selected to be accessed in described loop by described resistance by described；When testing sample is implemented conventionally test by described probe, select switch by described resistive short by described.Use a kind of universal needle stand of the present invention and using method thereof, by increasing by one, there is rotation access resistance circuit or the double-throw selector of wire circuit, the electric current of dielectric breakdown moment can be efficiently reduced, test and conventionally test by selecting the compatible electric current of switch can become suddenly big dielectric breakdown.
Description
Technical field
The present invention relates to the technical field of laying out pattern in microelectronics, particularly relate to a kind of annular coherent and bridging layout structure and the short circuit of technological process wire thereof and short-circuit verification method.
Background technology
Schematic diagram when Fig. 1 is that in existing needle stand, test sample does not punctures, schematic diagram when Fig. 2 is that in existing needle stand, test sample punctures, refer to shown in Fig. 1 and Fig. 2.Including source measurement unit 1 and probe 2, source measurement unit 1 is connected in series with each other with probe 2.In wafer scale reliability testing, need measure medium breakdown voltage, breakdown in a flash at medium, drastically become big by the electric current of probe 2, produce a large amount of Joule heat, cause probe because temperature is too high acupuncture with heated needle.When medium does not punctures, similar electric capacity, infinite, the electric current now by probe 2 is the least, below microampere rank (10-6Ampere).Puncture rear dielectric resistance to diminish, at 10 ohms.Assume that the voltage applied is 1V, then puncturing the electric current that moment passes through is 0.1A, punctures immediate current and has changed 100,000 times, and Joule heat is equal to current squaring, and resistance, the product of time, the Joule heat of generation adds 1010Times, cause probe 2 because temperature is too high acupuncture with heated needle.
The Chinese patent of the patent No. 201210497627.3 prevents the device of semi-automatic probe station probe acupuncture with heated needle, including source measuring unit and probe, described source measuring unit and probe form loop each other, also including the resistive element being located between described source measuring unit and probe, described resistance components in series is in the loop of described source measuring unit and probe.Owing to having resistance in its circuit, when testing sample is implemented conventionally test by probe, its efficiency does not has the needle stand of existing non-resistance effective.
The heat convection type cooling attachment device of the Chinese patent probe station of the patent No. 201220438244.4, described heat convection type cooling attachment device is arranged on above the adapter of described probe station, including an external rotor axial-flow fan and a wind scooper, described wind scooper is connected to the lower section of described external rotor axial-flow fan, and both are tightly connected.Forming the airflow layer horizontal movement of certain altitude in probe station cavity, thus promote integrated air circulation, accelerate under the effect of thermal convection current, in cavity, high temperature air opening before and after probe station flows out, and serves the effect accelerating probe station cooling.But owing to probe punctures test sample, puncturing the substantial amounts of Joule heat of moment generation, cause probe temperature to increase too fast, cooling attachment device cannot carry out cooling process in time.
Summary of the invention
In view of the above problems, the present invention provides a kind of universal needle stand and using method thereof.
The present invention solves the technical scheme that technical problem used:
A kind of universal needle stand, wherein, including probe, resistance, selection switch, source measurement unit；Described probe, described selection switch and are connected in series to form loop between the measurement unit of described source；Resistance described in described selection on-off control accesses described loop or by described resistive short.
The universal needle stand of above-mentioned one, wherein, described selection switch is commutator, and an access point of described commutator electrically connects with described resistance, another access point of described commutator and wire electrical connection.
The universal needle stand of above-mentioned one, wherein, the Standard resistance range of described resistance is between 10 Europe to 10000 Europe.
The universal needle stand of above-mentioned one, wherein, including test support, described probe, described source measurement unit and described selection switch lay respectively in described test support.
The universal needle stand of above-mentioned one, wherein, also includes the medium being connected with described probe.
The using method of a kind of universal needle stand, wherein, including the universal needle stand described in above-mentioned any one；When testing sample is implemented dielectric breakdown test by described probe, select switch to access in described loop by described resistance by described, become big by probe current described in described resistance suppression dielectric breakdown moment；When testing sample is implemented conventionally test by described probe, select switch by described resistive short by described, it is achieved proper testing.
The using method of above-mentioned a kind of universal needle stand, wherein, described resistance reduces the Joule heat of dielectric breakdown moment generation.
Technique scheme has the advantage that or beneficial effect:
By increasing by one, there is rotation access resistance circuit or the double-throw selector of wire circuit, it is possible to efficiently reduce the electric current of dielectric breakdown moment, test and conventionally test by selecting the compatible electric current of switch can become suddenly big dielectric breakdown.
Accompanying drawing explanation
With reference to appended accompanying drawing, more fully to describe embodiments of the invention.But, appended accompanying drawing is merely to illustrate and illustrates, is not intended that limitation of the scope of the invention.
Schematic diagram when Fig. 1 is that in existing needle stand, test sample does not punctures；
Schematic diagram when Fig. 2 is that in existing needle stand, test sample punctures；
Fig. 3 be the present invention a kind of universal needle stand in test sample schematic diagram when not puncturing；
Fig. 4 be the present invention a kind of universal needle stand in test sample schematic diagram when puncturing.
Detailed description of the invention
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, but not as limiting to the invention.
Fig. 3 be the present invention a kind of universal needle stand in test sample schematic diagram when not puncturing, Fig. 4 be the present invention a kind of universal needle stand in test sample schematic diagram when puncturing, refer to shown in Fig. 3 and Fig. 4.The universal needle stand of one of the present invention, includes probe 3, resistance 6, selects switch 5 and source measurement unit 4, and probe 3 for implementing conventionally test and dielectric breakdown test to testing sample；Probe 3, selection switch and are connected in series to form loop between 5 and source measurement unit 4, meanwhile, select switch 5 control resistance 6 access loop or make resistance 6 short-circuit.
The present invention the most also has a following embodiment:
In further embodiment of the present invention, continuing with seeing shown in Fig. 3 and Fig. 4.Selecting switch 5 is commutator, and an access point of commutator electrically connects with resistance 6, and another access point and a wire 7 of commutator electrically connect.
In further embodiment of the present invention, the Standard resistance range of resistance 6 is between 10 Europe to 10000 Europe.
In further embodiment of the present invention, including test support, probe 3, source measurement unit 4 and selection switch 5 lay respectively in test support.
In further embodiment of the present invention, also include the medium being connected with probe 3.
The using method of a kind of universal needle stand of the present invention, refers to shown in Fig. 1 and Fig. 2, and when being not powered on resistance, when test sample (medium) does not punctures, similar electric capacity, infinite, the electric current now by probe 2 is the least, below microampere rank (10-6Ampere).Puncture rear test sample resistance to diminish, at 10 ohms.Assume that the voltage that source measuring unit 1 applies is 1V, then puncturing the electric current that moment passes through is 0.1A, punctures immediate current and adds 100,000 times, and Joule heat is equal to electric current, voltage, the product of time, the Joule heat puncturing moment adds 100,000 times, cause probe 2 because temperature is too high acupuncture with heated needle.Refer to shown in Fig. 3 and Fig. 4, increase after selecting switch 5, select switch that resistance 6 is accessed loop, after adding resistance (about 1k ohm), ohmically voltage drop is the product of electric current and resistance, in millivolt rank, so whole circuit is had little to no effect by the resistance plus a 1k ohm, when not puncturing, by the electric current of probe 3 below microampere rank (10-6Ampere).Puncturing moment, the resistance of whole circuit adds puncture rear dielectric resistance equal to resistance, and about 1k ohm is then about 1 milliampere (10 by the electric current of probe 3-3Ampere), to compare when being not powered on resistance (wearing the electric current that moment passes through is 0.1A), the change puncturing immediate current is lowered by 100 times, and the Joule heat of generation reduces 10,000 times, serves the effect of protection probe 3.When carrying out other conventionally tests, select switch 5 access wire circuit 7, by resistive short, test will not be had an impact.Compatible electric current meeting moment can become big dielectric breakdown by selection switch 5 and test the test with other routines.
For a person skilled in the art, after reading described above, various changes and modifications will be apparent to undoubtedly.Therefore, appending claims should regard whole variations and modifications of true intention and the scope containing the present invention as.In Claims scope, the scope of any and all equivalence and content, be all considered as still belonging to the intent and scope of the invention.
Claims (2)
1. the using method of a universal needle stand, it is characterised in that described universal pin
Seat includes that probe, resistance, selection switch, source measurement unit, described probe, described selection leave
Close and be connected in series to form loop, described in described selection on-off control between the measurement unit of described source
Resistance accesses described loop or by described resistive short；
When testing sample is implemented dielectric breakdown test by described probe, will by described selection switch
Described resistance accesses in described loop, by probe described in described resistance suppression dielectric breakdown moment
Electric current becomes big, infinite and by the electricity of described probe when wherein this testing sample does not punctures
Stream is in microampere rank namely 10-6Below An Pei, and in dielectric breakdown moment, whole circuit
Resistance adds the dielectric resistance after dielectric breakdown, the resistance of the most whole circuit equal to described resistance
Equal to 1k ohm, it is 10 by the electric current of described probe-3Ampere；
When testing sample is implemented conventionally test by described probe, by described selection switch by described
Resistive short, it is achieved proper testing.
The using method of universal needle stand the most as claimed in claim 1, it is characterised in that
Described resistance reduces the Joule heat of dielectric breakdown moment generation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410059942.7A CN103869111B (en) | 2014-02-21 | 2014-02-21 | A kind of universal needle stand and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410059942.7A CN103869111B (en) | 2014-02-21 | 2014-02-21 | A kind of universal needle stand and using method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103869111A CN103869111A (en) | 2014-06-18 |
| CN103869111B true CN103869111B (en) | 2016-08-17 |
Family
ID=50907867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410059942.7A Active CN103869111B (en) | 2014-02-21 | 2014-02-21 | A kind of universal needle stand and using method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103869111B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1797017A (en) * | 2004-12-22 | 2006-07-05 | 中芯国际集成电路制造(上海)有限公司 | Breakdown testing structure for capacitor of preventing damage caused by middle and large current of semiconductor device |
| CN101055305A (en) * | 2006-04-12 | 2007-10-17 | 通用汽车环球科技运作公司 | Circuit diagnostics switch system |
| CN201440146U (en) * | 2009-08-11 | 2010-04-21 | 中芯国际集成电路制造(上海)有限公司 | Probe card |
| CN201845028U (en) * | 2010-10-16 | 2011-05-25 | 中芯国际集成电路制造(上海)有限公司 | Probe card |
| TW201142301A (en) * | 2010-05-17 | 2011-12-01 | Luken Technologies | Probe unit gender of LCD inspection system |
| CN103018500A (en) * | 2012-11-29 | 2013-04-03 | 上海华力微电子有限公司 | Device for preventing probe on semi-automatic probe station from being burnt |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6175228B1 (en) * | 1998-10-30 | 2001-01-16 | Agilent Technologies | Electronic probe for measuring high impedance tri-state logic circuits |
| JP2012013446A (en) * | 2010-06-29 | 2012-01-19 | Advantest Corp | Pin electronics circuit and testing apparatus using the same |
-
2014
- 2014-02-21 CN CN201410059942.7A patent/CN103869111B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1797017A (en) * | 2004-12-22 | 2006-07-05 | 中芯国际集成电路制造(上海)有限公司 | Breakdown testing structure for capacitor of preventing damage caused by middle and large current of semiconductor device |
| CN101055305A (en) * | 2006-04-12 | 2007-10-17 | 通用汽车环球科技运作公司 | Circuit diagnostics switch system |
| CN201440146U (en) * | 2009-08-11 | 2010-04-21 | 中芯国际集成电路制造(上海)有限公司 | Probe card |
| TW201142301A (en) * | 2010-05-17 | 2011-12-01 | Luken Technologies | Probe unit gender of LCD inspection system |
| CN201845028U (en) * | 2010-10-16 | 2011-05-25 | 中芯国际集成电路制造(上海)有限公司 | Probe card |
| CN103018500A (en) * | 2012-11-29 | 2013-04-03 | 上海华力微电子有限公司 | Device for preventing probe on semi-automatic probe station from being burnt |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103869111A (en) | 2014-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105092050A (en) | Method and device for detecting overheat fault of GIS (Gas Insulated Switchgear) internal conductors | |
| CN103954899B (en) | A kind of method of real-time measuring diode transient temperature rise | |
| CN107490736A (en) | The method and device that a kind of nondestructive measurement electronic functional module internal temperature and thermal resistance are formed | |
| CN102645628B (en) | Fixed-high and fixed-low fault injecting circuit and method for online test of digital circuit board | |
| CN103869111B (en) | A kind of universal needle stand and using method thereof | |
| TWI251677B (en) | Semiconductor device, computer system, docking station, driver card and method to burn in a semiconductor device | |
| CN104303063B (en) | Method and apparatus for determining the temperature calibration indicatrix of the semiconductor devices of power electric device | |
| CN105810664A (en) | Electromigration structure of test metal line | |
| CN201440146U (en) | Probe card | |
| CN102393500B (en) | Test method for diode pair with common-cathode or common-anode packaging mode | |
| CN219533328U (en) | Integrated circuit chip aging test device | |
| CN103018500A (en) | Device for preventing probe on semi-automatic probe station from being burnt | |
| CN108181571A (en) | A kind of electromigration accelerated test method | |
| CN205506990U (en) | Electron wire rod detection device | |
| CN106291267B (en) | The electrical property test instrument of spacecraft thermal test multicore cable | |
| CN209264886U (en) | The detection system of quality is electrically connected between a kind of conductor | |
| CN205793423U (en) | A kind of MWD downhole instrument warmer | |
| CN107728034A (en) | New Type Power Devices auto-control electrostatic protection test system and method | |
| CN115825567A (en) | Device and method for testing resistance value change of welding spot | |
| CN109375044A (en) | The method and system of quality are electrically connected between a kind of detection conductor | |
| CN206450338U (en) | A kind of isolation switch contact temperature real-time monitoring device | |
| CN108279342B (en) | Different voltage performance test system of component | |
| CN107228994B (en) | High-voltage alternating-current cable load cyclic heating method | |
| CN205301368U (en) | Detect contact and detection device | |
| CN104698282A (en) | Resistance-temperature characteristic testing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |