CN103868590B - 一种光谱范围可调节的连续宽带短波光源 - Google Patents
一种光谱范围可调节的连续宽带短波光源 Download PDFInfo
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CN201410133765.2A CN103868590B (zh) | 2014-04-03 | 2014-04-03 | 一种光谱范围可调节的连续宽带短波光源 |
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CN103868590A CN103868590A (zh) | 2014-06-18 |
CN103868590B true CN103868590B (zh) | 2016-01-27 |
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CN106092936B (zh) * | 2016-07-28 | 2022-06-24 | 青岛崂应海纳光电环保集团有限公司 | 一种光谱能量调节装置 |
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CN1630811A (zh) * | 2002-02-07 | 2005-06-22 | 应用光学电子光学及光谱学开发研究所 | 中阶梯谱仪的波长校准组件和方法 |
CN102636265A (zh) * | 2012-04-17 | 2012-08-15 | 中国科学院合肥物质科学研究院 | 一种基于便携式测量高效紫外吸收光谱的光学系统 |
CN103018010A (zh) * | 2012-11-30 | 2013-04-03 | 北京振兴计量测试研究所 | 一种光源光谱调制装置 |
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JP4521548B2 (ja) * | 2005-01-11 | 2010-08-11 | レーザーテック株式会社 | 検査装置、検査方法及びパターン基板の製造方法 |
JP2010109242A (ja) * | 2008-10-31 | 2010-05-13 | Canon Inc | 照明光学系及び露光装置 |
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CN1630811A (zh) * | 2002-02-07 | 2005-06-22 | 应用光学电子光学及光谱学开发研究所 | 中阶梯谱仪的波长校准组件和方法 |
CN102636265A (zh) * | 2012-04-17 | 2012-08-15 | 中国科学院合肥物质科学研究院 | 一种基于便携式测量高效紫外吸收光谱的光学系统 |
CN103018010A (zh) * | 2012-11-30 | 2013-04-03 | 北京振兴计量测试研究所 | 一种光源光谱调制装置 |
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Inventor after: Zhang Zhiguo Inventor after: Zhou Yuan Inventor after: Qin Feng Inventor after: Zhang Yungang Inventor after: Zhao Hua Inventor after: Zheng Yangdong Inventor before: Zhang Zhiguo Inventor before: Qin Feng Inventor before: Zhang Yungang Inventor before: Zhou Yuan Inventor before: Zhao Hua Inventor before: Zheng Yangdong |
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