CN103868461A - Device and method for thickness measurement - Google Patents
Device and method for thickness measurement Download PDFInfo
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- CN103868461A CN103868461A CN201210528211.3A CN201210528211A CN103868461A CN 103868461 A CN103868461 A CN 103868461A CN 201210528211 A CN201210528211 A CN 201210528211A CN 103868461 A CN103868461 A CN 103868461A
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Abstract
The invention provides a device and a method for thickness measurement. The device comprises a support including an upper support and a lower support, a pair of laser probes located on the upper support and the lower support respectively, a measurement platform installed on the support, and a moving portion for driving a sample under test to move along a first direction with respect to the pair of laser probes and a second direction intersecting the first direction. According to the device and the method, during measurement of the thickness of the sample under test, the probes for measurement are not in pressure contact with the sample under test, a to-be-tested portion of which is kept flat and tidy. Therefore the device and the method are especially suitable for measuring the thickness of a flexible object such as a flexible bonding magnet. Besides, surface thickness distribution data of the sample under test are obtained accurately and quickly by means of the only pair of laser probes.
Description
Technical field
The present invention relates to a kind of apparatus and method of detect thickness, by sample is moved on both direction with respect to thickness measure probe, measure the apparatus and method of the thickness of sample any point in particular to one.
Background technology
Flexible bonded magnet is generally for example, by magnetic (comprising ferromagnetic oxide powder, NdFeB magnetic powder, neodymium iron nitrogen magnetic) and high polymer binder compound, make through techniques such as extrusion molding, calendering formation, injection mouldings, there is good flexibility and elasticity, can be processed into the various complicated shapes such as strip, sheet.A large amount of uses was ferrite flexible magnet in the past, was generally used for the industries such as refrigerator, disinfection cabinet, kitchen cabinet, toy, stationery, advertisement.Its dimension precision requirement is very low, is mainly to use the simple survey instrument such as milscale, slide calliper rule when detect thickness.Due to the needs of modernized society's development, the demand of high-performance flexible bonded permanent magnet is increased day by day, these magnets are mainly used in the fields such as small and special electric machine, and its dimensional accuracy is had higher requirement.
Due to the special physical property of flexible bonded magnet, i.e. its good flexibility and elasticity, general contact method for measuring thickness can cause larger error.For example, in patent document 1, measurer for thickness is to be mainly made up of clock gauge and sensor, relies on the curved surface of measuring head to realize some contact, thereby can reduce the error that thin slice warpage and local flatness are brought.But the measurement of contact must apply certain pressure, and contact head can not be meticulous, otherwise easily wear and tear or scratch measured sample.And coming institute for the good material of this elasticity of flexible magnet, contact measurement method is because crimp meeting causes measuring error, and the contact measurement of a single point can not react the actual thickness of magnetic sheet.
Current contactless measurement, mainly contains radioactivity survey (for example gamma ray) and laser measurement method.The former is applicable to micron-sized measurement, as coating film thickness measurement etc., although the latter is proper to the thickness measure of flexible bonded magnet, also has some problems.
Laser measurement method is divided into single lasing light emitter and measures and two lasing light emitters measurements.For flexible bonded magnet, single lasing light emitter measuring method unreliable, this is because flexible magnet has flexibility, can not ensure that magnetic sheet is to be fitted in completely with reference on platform.And measure for two lasing light emitters, must make upper and lower a pair of laser probe accurately focus on a bit upper of sample, and sample can not torsional deformation, the measurement point of sample is same plane.For example, the specialized laser devices that patent document 2 is measured sheet metal thickness has upper and lower a pair of laser measurement source, when sheet material measurement class material, can effectively eliminate measuring error.But for the such special material of flexible magnet, not bending can not ensure sample measurement time, and can only carry out line sweep in the time of actual measurement, can not obtain the face thickness distribution situation of sample.
Patent document 1:CN1884963A
Patent document 2:CN1800776A
Summary of the invention
In view of this, an object of the present invention is to provide a kind of measurer for thickness and method for measuring thickness, make neither with sample pressure contact, make the measured part of sample entirely measure the thickness of sample again.
To achieve these goals, the invention provides a kind of measurer for thickness, comprising: support, comprises upper bracket and lower bracket; A pair of laser probe, lays respectively at described upper bracket and described lower bracket; Test desk, is installed to described support; And moving part, for sample is moved along first direction with the second direction that described first direction intersects with respect to described a pair of laser probe.
To achieve these goals, the present invention also provides a kind of method for measuring thickness, use measurer for thickness of the present invention, by described moving part, sample is moved along described first direction and/or described second direction on one side, measure the thickness of sample on one side by described a pair of laser probe.
According to measurer for thickness of the present invention and method for measuring thickness, in the time measuring the thickness of sample, measuring sonde not with sample pressure contact, and the measured part of sample keeps smooth, therefore, be particularly suitable for measuring flexible bonded magnet etc. and have the thickness of flexible object.And only can obtain accurately and quickly the face thickness distributed data of sample by a pair of laser probe.
Brief description of the drawings
Fig. 1 is according to the structural representation of the measurer for thickness of one embodiment of the present invention.
Fig. 2 illustrates the concrete structure of the sample moving part of measurer for thickness shown in Fig. 1.
Fig. 3 illustrates the concrete structure of the applicator member of measurer for thickness shown in Fig. 1.
Fig. 4 is the thickness distribution figure that uses a sample recording of measurer for thickness of the present invention.
Fig. 5 is the thickness distribution figure that uses another sample of recording of measurer for thickness of the present invention.
Embodiment
As shown in Figure 1, 2, comprise support 1 according to the measurer for thickness of one embodiment of the present invention.Support 1 has upper bracket and lower bracket.Laser probe 4 on being fixed with in upper bracket is fixed with lower laser probe 7 in lower bracket.Upper and lower laser probe 4,7 forms a pair of laser probe.
Measurer for thickness also comprises test board 10.Test board 10 is tabular, is installed to support 1, can move with respect to support 1 along directions X.On test board 10, there is rectangular slot (not shown).The bearing of trend of slit is parallel with directions X, makes in the time that test board 10 moves along directions X, and the laser beam of upper and lower laser probe 4,7 is positioned at slit scope all the time.Like this, in the time that the measured part of sample 9 is positioned at slit, upper and lower laser probe 4,7 is measured respectively the upper and lower surface of the measured part of sample 9 and is arrived the distance of upper and lower laser probe 4,7, thereby obtains the thickness of sample 9, the error of avoiding thus unidirectional thickness measure to bring.
Measurer for thickness also comprises test desk moving part 6.The quantity of test desk moving part 6 can be two, lays respectively at the both sides of the lower bracket of support 1, can be also one.The effect of test desk moving part 6 is that test desk 10 is moved along directions X, thereby can measure the thickness of any point of sample 9 on directions X.Test desk moving part 6 adopts for example screw-nut structure, and leading screw is along directions X setting, and test board 10 is fixed to screw.Like this, in the time that leading screw rotates, test board 10 is along with screw moves along directions X together.Test desk moving part 6 can also adopt other structure, for example belt wheel transmission mechanism.
On test board 10, sample moving part 2 is installed.Sample moving part 2 adopts for example screw-nut structure, and provides power by motor 11.Leading screw 14 is supported by the support portion 12 that is fixed on test board 10, and for example, along intersect the Y-direction setting of (vertical) with directions X, sample push pedal 3 is fixed to screw 13.In addition, support portion 12 is also supported with the polished rod 15 for leading, and screw 13 is also through polished rod 15.Like this, in the time that leading screw 14 rotates, sample push pedal 3 is along with screw 13 moves along Y-direction together.Sample push pedal 3 has the push pedal portion 30 vertical with test board 10.In the time that sample 9 is placed on test board 10, push pedal portion 30 contacts with a side of sample 9.In the time that sample moving part 2 makes sample push pedal 3 move along Y-direction, sample 9 is promoted by the push pedal portion 30 of sample push pedal 3, also move along Y-direction, thereby can make sample 9 different piece in the Y direction be positioned at the slit of test board 10, to measure the thickness of sample 9 any point in the Y direction.Sample moving part 2 can also adopt other structure, for example belt wheel transmission mechanism.
By being used in conjunction with test desk moving part 6 and sample moving part 2, can realize the thickness measure of any point to sample 9.
In addition, as shown in Figures 1 to 3, applicator member 8 is also installed on test board 10, for the measured part of sample 9 part being around pressed in to the test surfaces 5 of test board 10, makes measured part entirely be positioned at slit place, thereby reduce measuring error.As shown in Figure 3, applicator member 8 comprises the supporting base 18 being positioned on test surfaces 5, the eccentric wheel 17 being supported by supporting base 18, and a pair of compressing tablet 16 contacting with the periphery of eccentric wheel 17.Eccentric wheel 17 is connected to motor 11.In the time that motor 11 rotates, compressing tablet 16, by eccentric wheel 17 jack-up, leaves sample 9.At this moment, sample moving part 2 makes sample 9 move along Y-direction.Then, along with being further rotated of eccentric wheel 17, compressing tablet 16, because self gravitation falls, is pressed on sample 9, and a pair of compressing tablet 16 lays respectively at the upstream and downstream side of Y-direction with respect to the slit of test board 10.
Adopt above-mentioned measurer for thickness, upper and lower laser probe fixes its position by mechanical framework, thereby can make the focusing of laser probe very accurate.When measurement, adopt compressing tablet to compress peripheral part of measured part, make measured part (being positioned at the part of slit) can remain on same level position, improved measuring accuracy.And, by the time measuring, sample is moved on both direction with respect to laser probe, can measure the thickness of sample any point.
Measurer for thickness of the present invention, in the time of flexible magnet that detect thickness is 0.1～3.0mm, measuring accuracy can reach 0.01mm, as shown in Figure 4,5.
Describe the present invention although above in detail by embodiment,, the invention is not restricted to above-mentioned embodiment.Those skilled in the art are known, without departing from the spirit of the invention within the scope, can carry out various distortion to the present invention.Protection scope of the present invention is as the criterion with claims.
Claims (10)
1. a measurer for thickness, comprising:
Support, comprises upper bracket and lower bracket;
A pair of laser probe, lays respectively at described upper bracket and described lower bracket;
Test desk, is installed to described support; And
Moving part, for making sample move along first direction with the second direction that described first direction intersects with respect to described a pair of laser probe.
2. measurer for thickness according to claim 1, is characterized in that, described moving part comprises:
Test desk moving part, for making described test desk move along described first direction; And
Sample moving part, for moving sample on described test desk along described second direction.
3. measurer for thickness according to claim 2, is characterized in that, described test desk moving part and described sample moving part adopt screw-nut structure or belt wheel transmission mechanism.
4. measurer for thickness according to claim 2, is characterized in that, described sample moving part comprises sample push pedal, for moving along described second direction, moves along described second direction to promote sample.
5. measurer for thickness according to claim 1, is characterized in that, described test desk is tabular, has the gap of running through described test desk on above-below direction.
6. measurer for thickness according to claim 5, is characterized in that, described gap is parallel to described first direction.
7. measurer for thickness according to claim 5, is characterized in that, also comprises applicator member, for sample being exerted pressure towards described test desk.
8. measurer for thickness according to claim 7, is characterized in that, a pair of compressing tablet that described applicator member comprises eccentric wheel and contacts with described eccentric periphery.
9. measurer for thickness according to claim 8, is characterized in that, described a pair of compressing tablet lays respectively at upstream side and the downstream along described second direction with respect to described gap.
10. a method for measuring thickness, use according to the measurer for thickness described in any one in claim 1～9, by described moving part, sample is moved along described first direction and/or described second direction on one side, measure the thickness of sample on one side by described a pair of laser probe.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210528211.3A CN103868461B (en) | 2012-12-10 | 2012-12-10 | A kind of measurer for thickness and method for measuring thickness |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210528211.3A CN103868461B (en) | 2012-12-10 | 2012-12-10 | A kind of measurer for thickness and method for measuring thickness |
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| CN103868461A true CN103868461A (en) | 2014-06-18 |
| CN103868461B CN103868461B (en) | 2018-06-05 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106225694A (en) * | 2016-08-31 | 2016-12-14 | 成都尽知致远科技有限公司 | A kind of integrated die surface measured film thickness instrument of intelligence |
| CN107074456A (en) * | 2014-11-10 | 2017-08-18 | 横滨橡胶株式会社 | The wear monitoring system of conveyer belt |
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|---|---|---|---|---|
| US5210593A (en) * | 1990-11-19 | 1993-05-11 | Fag Kugelfischer Georg Schafer Kgaa | Gauge for measuring the thickness of an unsupported web |
| CN201122093Y (en) * | 2007-11-01 | 2008-09-24 | 比亚迪股份有限公司 | Thickness measurement device |
| CN101382410A (en) * | 2008-08-26 | 2009-03-11 | 武汉钢铁(集团)公司 | Automatic detection apparatus for thin camber |
| CN102706286A (en) * | 2012-06-25 | 2012-10-03 | 哈尔滨工业大学 | Laser measurement device for thickness of plate |
| CN103398664A (en) * | 2013-08-09 | 2013-11-20 | 昆山允可精密工业技术有限公司 | Instrument for measuring thickness of thin plate with high bright reflective surface |
| CN104009201A (en) * | 2013-02-21 | 2014-08-27 | 株式会社日立电力解决方案 | Rolling device and thickness measuring system |
-
2012
- 2012-12-10 CN CN201210528211.3A patent/CN103868461B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5210593A (en) * | 1990-11-19 | 1993-05-11 | Fag Kugelfischer Georg Schafer Kgaa | Gauge for measuring the thickness of an unsupported web |
| CN201122093Y (en) * | 2007-11-01 | 2008-09-24 | 比亚迪股份有限公司 | Thickness measurement device |
| CN101382410A (en) * | 2008-08-26 | 2009-03-11 | 武汉钢铁(集团)公司 | Automatic detection apparatus for thin camber |
| CN102706286A (en) * | 2012-06-25 | 2012-10-03 | 哈尔滨工业大学 | Laser measurement device for thickness of plate |
| CN104009201A (en) * | 2013-02-21 | 2014-08-27 | 株式会社日立电力解决方案 | Rolling device and thickness measuring system |
| CN103398664A (en) * | 2013-08-09 | 2013-11-20 | 昆山允可精密工业技术有限公司 | Instrument for measuring thickness of thin plate with high bright reflective surface |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107074456A (en) * | 2014-11-10 | 2017-08-18 | 横滨橡胶株式会社 | The wear monitoring system of conveyer belt |
| CN107074456B (en) * | 2014-11-10 | 2019-03-12 | 横滨橡胶株式会社 | The wear monitoring system of conveyer belt |
| CN106225694A (en) * | 2016-08-31 | 2016-12-14 | 成都尽知致远科技有限公司 | A kind of integrated die surface measured film thickness instrument of intelligence |
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| Publication number | Publication date |
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| CN103868461B (en) | 2018-06-05 |
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