CN103856214B - 一种射频电源外部输入信号相位同步的方法 - Google Patents
一种射频电源外部输入信号相位同步的方法 Download PDFInfo
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- CN103856214B CN103856214B CN201210496827.7A CN201210496827A CN103856214B CN 103856214 B CN103856214 B CN 103856214B CN 201210496827 A CN201210496827 A CN 201210496827A CN 103856214 B CN103856214 B CN 103856214B
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- radio
- frequency
- signal
- frequency power
- power supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
Abstract
Description
Claims (5)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210496827.7A CN103856214B (zh) | 2012-11-28 | 2012-11-28 | 一种射频电源外部输入信号相位同步的方法 |
PCT/CN2012/087213 WO2014082360A1 (zh) | 2012-11-28 | 2012-12-21 | 一种射频电源外部输入信号相位同步的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210496827.7A CN103856214B (zh) | 2012-11-28 | 2012-11-28 | 一种射频电源外部输入信号相位同步的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103856214A CN103856214A (zh) | 2014-06-11 |
CN103856214B true CN103856214B (zh) | 2016-12-21 |
Family
ID=50827121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201210496827.7A Active CN103856214B (zh) | 2012-11-28 | 2012-11-28 | 一种射频电源外部输入信号相位同步的方法 |
Country Status (2)
Country | Link |
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CN (1) | CN103856214B (zh) |
WO (1) | WO2014082360A1 (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7010280B1 (en) * | 1998-11-19 | 2006-03-07 | Cadence Design Systems Inc. | Linear RF power amplifier and transmitter |
CN101231337A (zh) * | 2008-02-15 | 2008-07-30 | 哈尔滨工程大学 | 高精度时间同步装置 |
CN101640369A (zh) * | 2009-08-25 | 2010-02-03 | 深圳市大族激光科技股份有限公司 | 一种射频电源装置 |
CN101933402A (zh) * | 2008-01-31 | 2010-12-29 | 应用材料股份有限公司 | 用于等离子体腔室的电极的多相射频电源 |
CN102255606A (zh) * | 2011-07-25 | 2011-11-23 | 中国科学院微电子研究所 | 基于e类功率放大电路的固态射频电源 |
-
2012
- 2012-11-28 CN CN201210496827.7A patent/CN103856214B/zh active Active
- 2012-12-21 WO PCT/CN2012/087213 patent/WO2014082360A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7010280B1 (en) * | 1998-11-19 | 2006-03-07 | Cadence Design Systems Inc. | Linear RF power amplifier and transmitter |
CN101933402A (zh) * | 2008-01-31 | 2010-12-29 | 应用材料股份有限公司 | 用于等离子体腔室的电极的多相射频电源 |
CN101231337A (zh) * | 2008-02-15 | 2008-07-30 | 哈尔滨工程大学 | 高精度时间同步装置 |
CN101640369A (zh) * | 2009-08-25 | 2010-02-03 | 深圳市大族激光科技股份有限公司 | 一种射频电源装置 |
CN102255606A (zh) * | 2011-07-25 | 2011-11-23 | 中国科学院微电子研究所 | 基于e类功率放大电路的固态射频电源 |
Also Published As
Publication number | Publication date |
---|---|
WO2014082360A1 (zh) | 2014-06-05 |
CN103856214A (zh) | 2014-06-11 |
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Effective date of registration: 20201217 Address after: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee after: AoXin integrated circuit technology (Guangdong) Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Institute of Microelectronics Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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Effective date of registration: 20220428 Address after: 510000 room 710, Jianshe building, No. 348, Kaifa Avenue, Huangpu District, Guangzhou, Guangdong Patentee after: Ruili flat core Microelectronics (Guangzhou) Co.,Ltd. Address before: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee before: AoXin integrated circuit technology (Guangdong) Co.,Ltd. |
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