CN103854936B - A kind of manufacture method of rectangle comb-type slow wave structure - Google Patents
A kind of manufacture method of rectangle comb-type slow wave structure Download PDFInfo
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- CN103854936B CN103854936B CN201210524105.8A CN201210524105A CN103854936B CN 103854936 B CN103854936 B CN 103854936B CN 201210524105 A CN201210524105 A CN 201210524105A CN 103854936 B CN103854936 B CN 103854936B
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Abstract
The present invention relates to the manufacture method of a kind of double or single rectangle comb-type slow wave structure.It is mainly comprised the following steps：Aperture plate blank, up and down rectangle comb bottom plate and rectangle comb structural tube shell are combed above and below manufacture；With laser cutting method up and down comb aperture plate blank on produce above and below rectangle comb aperture plate；Will up and down rectangle comb aperture plate be respectively welded above and below rectangle comb bottom plate on, formed without electron beam channel rectangle up and down comb structure；Above and below semicircle electron beam channel, formation rectangle comb structure are produced in the comb structure of rectangle up and down without electron beam channel；Rectangle comb structure up and down is finally filled in double rectangle and combs structural tube shell, double-row rectangular comb-like slow wave structure is made；Or lower rectangle comb structure is only filled in single rectangle comb structural tube shell, single rectangle comb-type slow wave structure is made.Rectangle comb-type slow wave structure manufactured by the present invention can be used for microwave, millimeter wave, submillimeter wave or even THz travelling-wave tubes, backward wave tube and distribution klystron (EIK) etc..
Description
Technical field
The invention belongs to vacuum electron device technology and Terahertz Technology field, particularly a kind of double or single square
The manufacture method of shape comb-type slow wave structure.
Background technology
In recent years, research of the people to THz fields at home and abroad all causes high enthusiasm.Terahertz (Tera-
Hertz, abbreviation THz, 1Thz=1012Hz) frequency range between microwave and it is infrared between, the definition of its specific frequency range has a variety of
Saying：One of which saying refers to frequency range 0.1THz~10THz, and corresponding wavelength is from 3000 μm~30 μm；It is another to press
According to the definition of wavelength, it is believed that it represents electromagnetic wave of the wavelength as 1mm~100 μm, corresponding frequency is 300GHz~3000GHz,
So THz ripples can be referred to as submillimeter wave again.
No matter using which kind of definition, status of the THz ripples in electromagnetic spectrum is all extremely important.The long-wave band of THz frequency spectrums with
Millimeter wave coincides, and its short-wave band coincides with infrared light, is transition region of the macroscopic classical theories to Bcs Theory, is also
Electronics is referred to as " Terahertz space (the THz gap) " of electromagnetic spectrum to the transition region of photonic propulsion.
Because Terahertz Technology is in electronics and optical intersection, it is in basic research, new and high technology and national defence skill
Acquired a special sense in art, great attention is all received in countries in the world.2004, THz science and technology was chosen as " changing by U.S. government
One of become ten big technologies of future world "；THz technologies were classified as " the big key strategy of national mainstay ten by Japan in 2005
First of target ", researched and developed by national efforts；Rutherford National Laboratories of Britain and Cambridge University, Li Zi universities etc.
More than ten universities；Scientific research institutions and the colleges and universities such as Cohn universities, the Hamburg universities of Germany, are all actively developing THz research works
Make；European countries also utilize the fund tissue of the European Union big merger research project of transnational multidisciplinary participation；Russia
National academy of sciences specially set up a THz project.At present a THz technology is formd in worldwide to grind
Study carefully climax.Multidigit was specially held in " Xiangshan Science Conferences ", host country in THz research fields for this in the Chinese government in 2005
Influential academician specially discusses the development problem of China's THz causes, and has formulated the development plan of China's THz technologies.
Due to the special nature such as THz wave bands have low photon energy, bandwidth, pulse is narrow, radiation is small, signal to noise ratio is high, its
Widely paid close attention in physics, chemistry, astronomy, biology etc..Meanwhile, in common data communication, space research, material
The direction such as spectrum, medical imaging, environment and Food Monitoring, movement and satellite communication, space remote sensing, military radar has important
Researching value and it is widely applied potentiality.
The vacuum electron devices such as travelling-wave tubes, backward wave tube, show in millimeter wave traveling wave tube and submillimeter wave frequency range at present
Good application prospect.In Russia, the backward wave tube until 1THz is had now been developed at present.The core of travelling-wave tubes and backward wave tube
Part is all slow-wave structure.The slow-wave structure being used widely at present has helix line slow-wave system and its abnormal structure；
Comb teeth shape slow wave system and its abnormal structure；The linear slow wave system of bar；Coupler shape slow wave system etc..These slow wave circuits exist
Respectively there are its advantage and disadvantage, but certainly most of frequency range being all unsuitable for more than W-waveband in different working frequency range and application scenario.
In W-waveband, ladder track is a kind of slow wave circuit for being suitable for short millimeter band high power travelling wave tube, can in structure
Regard the coupling cavity configuration of not prominent section as, although coupled impedance is not high, interaction efficiency and gain are not so good as coupler, but it
Distinctive process structure so that it is particularly suitable for use in W-waveband work, the Millitron that Varian companies develop, working frequency is
80-100GHz, continuous wave power 100W.
In W-waveband and with super band, folded waveguide slow-wave structure is that a kind of people study more slow-wave structure.For example,
Electricity 12 uses folded waveguide to succeed in developing W-waveband 10W CW TWT in the country.Domestic University of Electronic Science and Technology is with
The device of 0.22THz or 0.3THz frequency ranges is being studied using folded waveguide by electronics research institute of the academy of sciences of state etc., but at present also
Do not compare detailed report.
In addition, a kind of Terahertz slow-wave structure of greatest concern is exactly comb-type slow wave structure.Although comb-type slow wave structure coupling
Close impedance less high, but size is larger compared with other slow-wave structures, and structure is relatively easy, and machining accuracy is easier to reach,
Perfect heat-dissipating, and this structure and its abnormal structure are available in whole millimere-wave band, or even submillimeter region travelling-wave tubes.
Research to this structure, California university Berkeley has delivered a series of paper, and groundwork is slow wave knot
The slow wave property calculation and the manufacture method of slow-wave structure of structure.At home, CAS Electronics Research Institute has also carried out one
A little researchs, have delivered some achievements in research.The same research group of the application also proposes with regard to the manufacture method of this slow-wave structure
An other national inventing patent application is crossed, and has been accepted, number of patent application is：2011 10050042.2.The application
There is certain relevance with the next item up application, but the next item up application mainly gives and manufactures double rectangle comb based on Wire EDM
The embodiment of shape slow-wave structure, it is of the invention then propose another different embodiment, it is specifically shown in following side
Case is described.It is noted that the country there is no successfully manufacture to work in 0.2THz with the slow-wave structure of super band at present, therefore this hair
It is bright that there is significant application value.
The content of the invention
In order to overcome the drawbacks described above that prior art is present, the present invention proposes a kind of manufacturer of rectangle comb-type slow wave structure
Method.
This method of the present invention includes：A kind of manufacture method of rectangle comb-type slow wave structure, this method includes：Manufacture comb grid
Net blank, rectangle comb bottom plate and rectangle comb structural tube shell；Comb aperture plate blank is handled to obtain with laser cutting method
Rectangle combs aperture plate；Aperture plate is combed using rectangle and rectangle comb bottom plate obtains rectangle comb structure；Rectangle comb structure is inserted into rectangle comb
Structural tube shell, obtains rectangle comb-type slow wave structure.
Can be for developing microwave, millimeter wave, submillimeter wave using the rectangle comb-type slow wave structure manufactured by the present invention
To (EIK) such as THz travelling-wave tubes, backward wave tube and distribution klystrons, and it is particularly suitable for the above-mentioned device in 0.2-1THz frequency ranges
Using.
Brief description of the drawings
Fig. 1 is double (including single) the rectangle comb-type slow wave structure manufacturing process flow diagram based on laser cutting；
Fig. 2 is that upper and lower rectangle combs aperture plate blank schematic diagram, and (a) is front view, and (b) is side view, and (c) is top view；
Fig. 3 is that upper rectangle combs aperture plate figure, and (a) is front view, and (b) is sectional side view, and (c) is top view；
Fig. 4 is that lower rectangle combs aperture plate figure, and (a) is top view, and (b) is sectional side view, and (c) is top view；
Fig. 5 is the laser light incident back side shape appearance figure that a upper rectangle processed with laser cutting method combs aperture plate；
Fig. 6 is rectangle comb bottom plate schematic diagram up and down, and (a) is front view, and (b) is side view, and (c) is top view；
Fig. 7 is to comb structural representation without rectangle in electron beam channel, and (a) is front view, and (b) is side view, and (c) is top view
Figure；
Fig. 8 is to comb structural representation without rectangle under electron beam channel, and (a) is front view, and (b) is side view, and (c) is top view
Figure；
Fig. 9 is that upper rectangle combs structural representation, and (a) is front view, and (b) is side view, and (c) is top view；
Figure 10 is that lower rectangle combs structural representation, and (a) is front view, and (b) is side view, and (c) is top view；
Figure 11 is single rectangle comb-type slow wave structure shell schematic diagram, and (a) is orthogonal view, and (b) is top view；
Figure 12 is single rectangle comb-type slow wave structure schematic diagram, and (a) is front view, and (b) is top view；
Figure 13 is single rectangle comb-type slow wave structure reinforcement process schematic diagram；
Figure 14 is double-row rectangular comb-like slow wave structure shell schematic diagram, and (a) is orthogonal view, and (b) is top view；
Figure 15 is double-row rectangular comb-like slow wave structure schematic diagram, and (a) is orthogonal view, and (b) is top view；
Figure 16 is double-row rectangular comb-like slow wave structure reinforcement process schematic diagram.
Embodiment
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
Each component symbol implication in accompanying drawing is as follows：Fig. 2：1- Left-side supports position edge, and 2- Right side supports position edge,
3- rectangles comb aperture plate reserved area, L- length, W- width, T- thickness.Fig. 3：1- Left-side supports position edge, and 2- Right side supports are determined
Position edge, 4- rectangular through slot, 5- rectangle grid beams.Fig. 4：1- Left-side supports position edge, 2- Right side supports positioning edge, 6- rectangles
Groove, 7- rectangle grid beams.Fig. 5：8- edges burr remnants.Fig. 6：L- length, W- width, D- thickness.Fig. 7：The upper rectangle comb bottoms of 9-
Plate, the upper rectangle comb aperture plates of 10-.Fig. 8：Rectangle combs rectangle comb aperture plate under bottom plate, 12- under 11-.Fig. 9：13- semicircle electronics notes are logical
Road.Figure 10：14- semicircle electron beam channels.Figure 11：The single rectangle comb structural tube shells of 15-, 16- electromagnetic wave coupling channels.Figure
12：Rectangle combs rectangle comb aperture plate under bottom plate, 12-, the single rectangle comb structural tube shells of 15- under 11-.Figure 13：Rectangle combs bottom under 11-
Rectangle combs aperture plate, the single rectangle comb structural tube shells of 15-, 17- hot-extrusion molds under plate, 12-.Figure 14：The double rectangle comb knots of 18-
Structure shell.Figure 15：Rectangle comb aperture plate under rectangle comb bottom plate under the upper rectangle comb bottom plates of 9-, the upper rectangle comb aperture plates of 10-, 11-, 12-,
The single rectangle comb structural tube shells of 18-.Figure 16：Rectangle comb bottom plate under the upper rectangle comb bottom plates of 9-, the upper rectangle comb aperture plates of 10-, 11-,
Rectangle combs aperture plate, 17- hot-extrusion molds, the single rectangle comb structural tube shells of 18- under 12-.
The present invention proposes a kind of manufacture method of rectangle comb-type slow wave structure, and the general principle that this method is realized is：It is first sharp
Cut with rectangle aperture plate above and below being produced with laser cutting method on metal cladding, or first with laser cutting with wire electric discharge
Cut the method being combined produced on billot above and below rectangle aperture plate；Then it will be divided rectangle aperture plate up and down by Diffusion Welding mode
It is not welded on upper and lower bottom plate, so as to form the comb structure of rectangle up and down of no electron beam channel；Thereafter wire cutting method is recycled
Semicircle electron beam channel is produced in the above-mentioned comb structure of rectangle up and down without electron beam channel, so that above and below needed for being formed
Rectangle combs structure；The above-mentioned comb structure of rectangle up and down is finally entered double-row rectangular comb-like slow wave structure shell, so as to be made
Required double-row rectangular comb-like slow wave structure；Or above-mentioned lower rectangle comb structure only entered single rectangle comb-type slow wave structure
With shell, so that required single rectangle comb-type slow wave structure is made.
Fig. 1 is the manufacture method flow chart of rectangle comb-type slow wave structure of the present invention, according to the present invention, can manufacture single or double
Rectangle comb-type slow wave structure is arranged, Fig. 1 shows its manufacturing process flow diagram, specifically includes following steps：
(1) Wire EDM or other any feasible method manufacture upper and lower comb aperture plate blanks as shown in Figure 2 are utilized.Should
The L being shaped as in a strip thin plate, Fig. 2 of blank indicates the length of the blank, and W indicates the width of the blank, and T indicates the hair
The thickness of base.The length L of blank is determined by the length of required slow-wave structure, and tolerance is in ± below 0.005mm；The width of blank
The summation of the width at the width of slow-wave structure and Left-side support positioning edge and Right side support positioning edge for needed for, and tolerance
Also in ± below 0.005mm, the thickness of redundant layer needed for thickness the T thickness and following process of slow-wave structure for needed for of blank it
With.The upper and lower comb aperture plate blank of manufacture completion is divided into three parts with dotted line in Fig. 2：Left-side support positioning edge 1, right side branch
Support positioning edge 2 and rectangle comb aperture plate reserved area 3, in addition, wherein L represents length, W represents width, and T represents thickness.
The size of upper and lower comb aperture plate blank is identical.
To manufacture it is upper and lower comb aperture plate blank material can be molybdenum or other fusing points more than 1000 DEG C, it is nonmagnetic,
Any metal material with preferable machining property and with preferable electric conductivity.
(2) made with laser cutting method in the rectangle comb aperture plate reserved area 3 of the upper and lower comb aperture plate blank shown in Fig. 2
The rectangular through slot of series of identical size is made, so as to produce upper rectangle comb aperture plate as shown in Figure 3.These rectangular through slot along
The length direction of upper and lower comb aperture plate blank is uniformly arranged, and 4 in Fig. 3 denote one of rectangular through slot, and 5 denote it
In a grid beam.In upper rectangle comb aperture plate as shown in Figure 3, upper and lower ends are started with grid beam.The technology of the art
Personnel can be according to corresponding to device wavelength determine the size and grid beam size of above-mentioned rectangular through slot.Grid cantilever thickness is typically with leading to
Quite, designer can utilize grasped design meanses to optimize design and give and determine well width.
(3) made with laser cutting method in the rectangle comb aperture plate reserved area 3 of the upper and lower comb aperture plate blank shown in Fig. 2
The rectangular through slot of series of identical size is made, so as to produce lower rectangle comb aperture plate as shown in Figure 4.These rectangular through slot along
The length direction of upper and lower comb aperture plate blank is uniformly arranged, and 6 in Fig. 4 denote one of rectangular through slot, and 7 denote it
In a grid beam.In lower rectangle comb aperture plate as shown in Figure 4, upper and lower ends are started with the groove of gap, and upper and lower ends
Gap groove a rectangular through slot of the width sum with being in intermediate region width it is identical.The rectangular through slot of lower rectangle comb
Size and grid beam size are identical with upper rectangle comb.
(4) in the reverse side for the laser light incident for passing through the upper and lower comb aperture plate that step 2 and step 3 are produced, in rectangular through slot
Edge generally there are many edge burr remnants.Fig. 5 gives a upper rectangle processed with laser cutting method and combs aperture plate
Laser light incident back side row looks figure, the multiplication factor of the figure is 50.In the figure, label 8 has indicated these edge burr remnants.
Accordingly, it is now desired to the upper and lower comb aperture plate produced with western sand paper or the polishing of smoothing tool grinding stone by step 2 and step 3
The reverse side of laser light incident, to remove these edge burr remnants.The thickness of the removed part of polishing should be reserved redundant layer
Thickness.
(5) the upper and lower comb aperture plate produced by step 2 and step 3 can also be arranged on appropriate fixture, Ran Houyong
The jagged one side of upper and lower comb aperture plate is removed redundant layer by Wire EDM or electric spark method.Certainly, the portion removed
The thickness divided should be the thickness of reserved redundant layer.
(6) the upper and lower comb aperture plate that chemically cleaning is produced by step 2- steps 3, then with electro-plating method or
Other any Appropriate methods copper facing or cover copper on upper and lower comb aperture plate, about 5 μm of copper film.
(7) using milling or Wire EDM or other any feasible method manufactures, upper and lower rectangle combs bottom as shown in Figure 6
Plate, its length and width is identical with the length and width of upper and lower carding base, is equally respectively designated as L and W.This upper and lower rectangle comb
The thickness of bottom plate is expressed as D in figure 6, and this size should ensure that bottom plate has enough intensity, can be taken as 0.5-1.5mm, also may be used
To be taken as other appropriate numerical value.Dimensional tolerance should be in ± below 0.005mm.Material first choice molybdenum or other fusing points exist
More than 1000 DEG C, any metal material nonmagnetic, with preferable machining property and with preferable electric conductivity.
(8) chemically clean the upper and lower rectangle produced by step 7 and comb bottom plate.The material of such as bottom plate is not copper,
Then with electro-plating method or other any Appropriate method copper facing or copper must be covered, about 5 μm of copper film.
(9) by appropriate die clamper, upper rectangle as shown in Figure 3 is combed the rectangle up and down shown in aperture plate and Fig. 6 and combs bottom
Plate is placed into hydrogen stove or vacuum drying oven under the conditions of 1000 DEG C by overlaping as shown in Figure 7 and is incubated about 0.5 hour, with reality
Existing Diffusion Welding therebetween.Specific Diffusion Welding condition can realize that the two is reliably welded as target and optimized.Welding
Acquisition is as shown in Figure 7 afterwards denotes in rectangle comb bottom plate, 10 signs without 9 in rectangle comb structure, figure in electron beam channel
Rectangle combs aperture plate.
(10) by appropriate die clamper, lower rectangle as shown in Figure 4 is combed the rectangle up and down shown in aperture plate and Fig. 6 and combs bottom
Plate, to realize Diffusion Welding therebetween, obtains such as Fig. 8 by overlaping as shown in Figure 8 with step 9 identical method
Shown denotes lower rectangle comb bottom plate, the lower rectangle comb aperture plate of 12 signs without 11 in rectangle comb structure, figure under electron beam channel.
(11) with electric spark wire cutting method by step 9 obtain without in electron beam channel rectangle comb structure on manufacture such as
The semicircle electron beam channel shown in 13 in Fig. 9, so as to obtain upper rectangle comb structure as shown in Figure 9.Semicircle electronics note is logical
The axial location in road is general to comb on intersection of the body structure surface with symmetrical configuration face in upper rectangle, and designer can also note electronics
Passage is placed in other positions.
(12) manufacture in structure is combed without rectangle under electron beam channel what is obtained by step 10 with electric spark wire cutting method
Semicircle electron beam channel as shown in 14 in Figure 10, so as to obtain lower rectangle comb structure as shown in Figure 10.Semicircle electronics
The axial location for noting passage is general on the intersection that lower rectangle combs body structure surface and symmetrical configuration face, and designer can also be electricity
Son note passage is placed in other positions.
(13) the upper and lower rectangle comb structure by step 11 and step 12 is cleaned with ultrasonic cleaning method, then with plating
Method copper facing, about 5 μm of copper film.They are further inserted hydrogen stove, 0.5 hour is incubated under the conditions of 500-600 DEG C, makes copper film jail
Gu.
(14) in the case where manufacturing single rectangle comb-type slow wave structure, omit and upper rectangle comb structure is manufactured in above-mentioned steps
All steps.Then with Wire EDM or other any Appropriate method processing single rectangle comb structure as shown in figure 11
With shell, with 15 signs in figure, the design of shell size should be taken into account step 6,8 and the size of internal part that causes of step 13
Change.Material therefor first choice Monel, also other optional fusing points are more than 1000 DEG C, nonmagnetic, add with preferable machinery
Work performance and any metal material with preferable electric conductivity.Then using chemical method cleaning.
(15) by appropriate die clamper, lower rectangle comb structure as shown in Figure 10 is inserted into as shown in figure 11 single
In rectangle comb structural tube shell, so as to form single rectangle comb-type slow wave structure as shown in figure 12.The lower rectangle comb structure
It can be slide fit or tight slide fit to comb the dimensional fits between structural tube shell with single rectangle., can be with suitably in jammed operation
Equipment single rectangle comb structural tube shell is heated to 700 DEG C -900 DEG C, i.e., so can be with using so-called " hot extrusion " technique
Make operation more smooth.
(16) the single rectangle comb-type slow wave structure Jing Guo step 15 is filled in the hot extrusion as indicated by label 17 in Figure 13
In compression mould, hydrogen stove is together inserted, 0.5 hour is incubated under the conditions of 600-900 DEG C.Hot-extrusion mold 17 can use graphite, molybdenum
Or other any low coefficient of thermal expansion materials are manufactured with any feasible method.Taken out after cooling.Now, single rectangle pectination slow wave
Structural tube shell clamps lower rectangle comb structure to contract 0.01-0.03mm.To the final single rectangle pectination slow wave of this acquisition
Structure.
(17) in the case where manufacturing double-row rectangular comb-like slow wave structure, above-mentioned steps 14- steps 16 are omitted, and start this
Step.Structural tube shell, figure are combed with Wire EDM or other any Appropriate method processing double rectangle as shown in figure 14
It is middle with 18 signs, the design of shell size should be taken into account step 6,8 and the change in size of internal part that causes of step 13.It is used
Material first choice Monel, also can select other fusing points it is more than 1000 DEG C, nonmagnetic, with preferable machining property and tool
There is any metal material of preferable electric conductivity.Then using chemical method cleaning.
(18) by appropriate die clamper, upper rectangle as shown in Figure 9 is combed structure and lower rectangle as shown in Figure 10 is combed
Structure is piled up in opposite directions, is inserted into double rectangle as shown in figure 14 comb structural tube shell, so as to be formed as shown in figure 15
Double-row rectangular comb-like slow wave structure.Now, the ECDC of two semicircle electron beam channels in rectangle comb structure up and down
As a circular channel.Dimensional fits between the upper and lower rectangle comb structure and double rectangle comb structural tube shell can be with
It is slide fit or tight slide fit.In jammed operation, can with appropriate equipment double rectangle comb structural tube shell be heated to 700 DEG C-
900 DEG C, i.e., using so-called " hot extrusion " technique, can so it make operation more smooth.
(19) double-row rectangular comb-like slow wave structure Jing Guo step 18 is filled in the hot extrusion as indicated by label 17 in Figure 16
In compression mould, hydrogen stove is together inserted, 0.5 hour is incubated under the conditions of 600-900 DEG C.Hot-extrusion mold 17 in step 15 with being adopted
Mould is identical.Taken out after cooling.Now, double-row rectangular comb-like slow wave structure shell is to contract 0.01-0.03mm,
Upper and lower rectangle comb structure is clamped.To this final double-row rectangular comb-like slow wave structure of acquisition.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail it is bright, should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., should be included in the guarantor of the present invention
Within the scope of shield.
Claims (30)
1. a kind of manufacture method of rectangle comb-type slow wave structure, this method includes：
(1) manufacture comb aperture plate blank, rectangle comb bottom plate and rectangle comb structural tube shell；
(2) comb aperture plate blank is handled with laser cutting method to obtain rectangle comb aperture plate；
(3) comb aperture plate using rectangle and rectangle comb bottom plate obtains rectangle comb structure；
(4) rectangle comb structure is inserted into rectangle comb structural tube shell, obtains rectangle comb-type slow wave structure；
Wherein comb aperture plate blank is the strip thin plate using Wire EDM or other any feasible methods manufactures, length with
The length of rectangle comb-type slow wave structure is identical, and aperture plate reserved area, width both sides point are combed in the centre of width for rectangle
Not Wei Left-side support positioning edge and Right side support positioning edge, thickness for rectangle comb-type slow wave structure thickness and following process
The thickness sum of required redundant layer；
Step (2) is specially to manufacture a series of in the rectangle of comb aperture plate blank combs aperture plate reserved area using laser cutting method
The rectangular through slot of identical size obtains rectangle comb aperture plate, and length direction of these rectangular through slot along comb aperture plate blank is arranged
Part between row, groove is referred to as grid beam, and grid cantilever thickness is equal with groove width；
Wherein, the comb aperture plate blank, rectangle comb bottom plate and rectangle comb structural tube shell are respectively upper and lower comb aperture plate blank, upper,
Lower rectangle comb bottom plate and double rectangle comb structural tube shell, then the rectangle comb-type slow wave structure obtained is double rectangle pectination slow wave
In structure, upper rectangle comb aperture plate, upper and lower ends are started with grid beam；In lower rectangle comb aperture plate, upper and lower ends are opened with the groove of gap
Begin, and the width of a rectangular through slot of the width sum of the gap groove of upper and lower ends with being in intermediate region is identical.
2. according to the method described in claim 1, the material of comb aperture plate blank is fusing point more than 1000 DEG C, nonmagnetic, tool
There is any metal material of preferable machining property and conductive energy.
3. according to the method described in claim 1, the material of comb aperture plate blank is molybdenum.
4. rectangle comb bottom according to the method described in claim 1, is wherein manufactured in step (1) with milling or electric spark wire cutting method
Plate, rectangle comb floor length and width are identical with combing the length and width of aperture plate blank respectively, thickness mechanical strength needed for
Requirement selection.
5. method according to claim 4, the thickness of rectangle comb bottom plate is taken as 0.5-1.5mm.
6. the method according to claim 4 or 5, the material of rectangle comb bottom plate be fusing point more than 1000 DEG C, it is nonmagnetic,
Any metal material with preferable machining property and with preferable electric conductivity.
7. the material of the method according to claim 4 or 5, wherein rectangle comb bottom plate is molybdenum.
8. method according to claim 6, if the material of rectangle comb bottom plate is not copper, carries out copper facing or covers copper, copper
Film is 5 μm.
9. rectangle comb structural tube according to the method described in claim 1, is wherein manufactured in step (1) with Wire EDM
Shell.
10. the method according to claim 1 or 9, wherein rectangle comb structural tube shell material for fusing point 1000 DEG C with
On, it is nonmagnetic, with preferable machining property and it is conductive can any metal material.
11. the material of the method according to claim 1 or 9, wherein rectangle comb structural tube shell is Monel.
12. method according to claim 9, is cleaned wherein manufacturing good rectangle comb structural tube shell using chemical method.
13. according to the method described in claim 1, wherein, obtain rectangle comb aperture plate after, beaten with fine sandpaper or smoothing tool grinding stone
The reverse side of laser light incident, or electricity consumption spark method are ground, the jagged one side that rectangle is combed aperture plate removes redundant layer, is removed
Part thickness for reserved redundant layer thickness.
14. according to the method described in claim 1, obtain after rectangle comb aperture plate, then using chemical method cleaning rectangle comb grid
Net, and combed with electro-plating method in rectangle and copper facing or cover copper on aperture plate, copper film is 5 μm.
15. according to the method described in claim 1, wherein step (3) is specially that rectangle comb aperture plate and rectangle comb bottom plate is overlapping
Together, it is placed into hydrogen stove or vacuum drying oven and is incubated 0.5 hour under the conditions of 1000 DEG C, realizes diffusion welding (DW) therebetween
Connect, obtain no electron beam channel rectangle comb structure.
16. method according to claim 15, is combed in structure with electric spark wire cutting method without electron beam channel rectangle
The semicircle electron beam channel of manufacture, so as to obtain rectangle comb structure.
17. method according to claim 16, the axial location of semicircle electron beam channel rectangle comb body structure surface with
On the intersection in rectangle comb symmetrical configuration face.
18. method according to claim 16, manufacture is cleaned with ultrasonic cleaning method the square of semicircle electron beam channel
Shape combs structure, then uses electro-plating method copper facing, and copper film is 5 μm.
19. the rectangle comb structure after copper facing, is further inserted hydrogen stove, 500-600 by method according to claim 18
0.5 hour is incubated under the conditions of DEG C, makes copper film firm.
20. according to the method described in claim 1, wherein step (4) is specially that upper rectangle is combed structure and lower rectangle comb structure
It is piled up in opposite directions, is inserted into double rectangle comb structural tube shell, obtains double-row rectangular comb-like slow wave structure.
21. method according to claim 20, jammed operation uses " hot extrusion " technique, i.e., with appropriate equipment double
Rectangle comb structural tube shell is heated to 700 DEG C of -900 DEG C of progress.
22. method according to claim 20, obtained double-row rectangular comb-like slow wave structure is filled in hot-extrusion mold,
Hydrogen stove is together inserted, 0.5 hour is incubated under the conditions of 600-900 DEG C, is taken out after cooling.
23. method according to claim 22, hot-extrusion mold is manufactured with low coefficient of thermal expansion materials.
24. according to method any one of in claim 1,4,9,16,20, the double-row rectangular comb-like slow wave structure of manufacture
Travelling-wave tubes, backward wave tube and distribution klystron for microwave, millimeter wave, submillimeter wave or even THz.
25. a kind of manufacture method of rectangle comb-type slow wave structure, this method includes：
(1) manufacture comb aperture plate blank, rectangle comb bottom plate and rectangle comb structural tube shell；
(2) comb aperture plate blank is handled with laser cutting method to obtain rectangle comb aperture plate；
(3) comb aperture plate using rectangle and rectangle comb bottom plate obtains rectangle comb structure；
(4) rectangle comb structure is inserted into rectangle comb structural tube shell, obtains rectangle comb-type slow wave structure；
Wherein comb aperture plate blank is the strip thin plate using Wire EDM or other any feasible methods manufactures, length with
The length of rectangle comb-type slow wave structure is identical, and aperture plate reserved area, width both sides point are combed in the centre of width for rectangle
Not Wei Left-side support positioning edge and Right side support positioning edge, thickness for rectangle comb-type slow wave structure thickness and following process
The thickness sum of required redundant layer；
Step (2) is specially to manufacture a series of in the rectangle of comb aperture plate blank combs aperture plate reserved area using laser cutting method
The rectangular through slot of identical size obtains rectangle comb aperture plate, and length direction of these rectangular through slot along comb aperture plate blank is arranged
Part between row, groove is referred to as grid beam, and grid cantilever thickness is equal with groove width；
Wherein described comb aperture plate blank, rectangle comb bottom plate and rectangle comb structural tube shell are respectively lower comb aperture plate blank, lower rectangle
Bottom plate and single rectangle comb structural tube shell are combed, then the rectangle comb-type slow wave structure obtained is single rectangle comb-type slow wave structure,
In lower rectangle comb aperture plate, upper and lower ends are started with the groove of gap, and the gap groove of upper and lower ends width sum with being in
The width of one rectangular through slot of intermediate region is identical.
26. method according to claim 25, wherein step (4) are specially that lower rectangle comb structure is inserted into single rectangle
Comb in structural tube shell, obtain single rectangle comb-type slow wave structure.
27. method according to claim 26, jammed operation uses " hot extrusion " technique, i.e., with appropriate equipment single
Rectangle comb structural tube shell is heated to 700 DEG C of -900 DEG C of progress.
28. method according to claim 26, obtained single rectangle comb-type slow wave structure is filled in hot-extrusion mold,
Hydrogen stove is together inserted, 0.5 hour is incubated under the conditions of 600-900 DEG C, is taken out after cooling.
29. method according to claim 28, hot-extrusion mold is manufactured with low coefficient of thermal expansion materials.
30. the method according to claim 25 or 26, the single rectangle comb-type slow wave structure of manufacture is used for microwave, millimeter
Ripple, the travelling-wave tubes of submillimeter wave or even THz, backward wave tube and distribution klystron.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3876962A (en) * | 1974-01-17 | 1975-04-08 | Varian Associates | Oscillation suppressor for ring-bar slow wave structure |
| CN1208241A (en) * | 1997-06-13 | 1999-02-17 | Eev有限公司 | Grids |
| CN102184821A (en) * | 2011-04-12 | 2011-09-14 | 南京三乐电子信息产业集团有限公司 | Method for manufacturing grid of millimeter-wave traveling wave tube |
| CN102655068A (en) * | 2011-03-02 | 2012-09-05 | 中国科学院电子学研究所 | Manufacturing method of double-row rectangular comb-like slow wave structure |
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2012
- 2012-12-07 CN CN201210524105.8A patent/CN103854936B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3876962A (en) * | 1974-01-17 | 1975-04-08 | Varian Associates | Oscillation suppressor for ring-bar slow wave structure |
| CN1208241A (en) * | 1997-06-13 | 1999-02-17 | Eev有限公司 | Grids |
| CN102655068A (en) * | 2011-03-02 | 2012-09-05 | 中国科学院电子学研究所 | Manufacturing method of double-row rectangular comb-like slow wave structure |
| CN102184821A (en) * | 2011-04-12 | 2011-09-14 | 南京三乐电子信息产业集团有限公司 | Method for manufacturing grid of millimeter-wave traveling wave tube |
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