CN103838274B - A kind of multichannel water-cooled temperature controlling system and control method - Google Patents
A kind of multichannel water-cooled temperature controlling system and control method Download PDFInfo
- Publication number
- CN103838274B CN103838274B CN201210475503.5A CN201210475503A CN103838274B CN 103838274 B CN103838274 B CN 103838274B CN 201210475503 A CN201210475503 A CN 201210475503A CN 103838274 B CN103838274 B CN 103838274B
- Authority
- CN
- China
- Prior art keywords
- temperature
- water
- cooled
- branch road
- controlling system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Control Of Temperature (AREA)
Abstract
The open a kind of multichannel water-cooled temperature controlling system of the present invention, for accurately controlling the temperature of multiple controlled plant, it is characterized in that, this multichannel water-cooled temperature controlling system comprises: temperature control unit, splitter, branch road water temperature regulation device, current collector, water-cooled temperature sensor, object temperature sensor, measurement module and control module. Compared with prior art, multichannel water-cooling system provided by the present invention, it is not necessary to use multiple temperature control unit device, and this system is simple for structure, it may be achieved be applied to multiple object and each object has the application scenario of differing temps circulation fluid requirement.
Description
Technical field
The present invention relates to a kind of Temperature-controlled appliance technical field, particularly relate to a kind of multichannel water-cooled temperature controlling system and control method.
Background technology
In semicon industry, it is necessary to the component of some key are carried out steady temperature control, the projection object lens in such as lithography machine. The heat load that these key components and partss have is big, and some heat loads fluctuation is big, and some temperature control precisions require height, and in current industry, general employing water-cooling pattern carries out temperature control. This water-cooled temperature controlling system uses Special temp controlling equipment to control the temperature of key components and parts by the mode of the circulation fluid and vital part generation heat exchange that provide controlled temperature.
Patent CN200910054733.2 provides the water-cooled temperature controlling system of a kind of projection lens of lithography machine, as shown in fig. 1. This device uses one to be called that temperature control unit 141(is hereinafter referred to as TCU, TemperatureControlUnit) device provides the circulation fluid of controlled temperature, the water jacket 151 that this circulation fluid is transported to projection lens of lithography machine carries out heat exchange, thus reaches the object of control objective temperature. The program only proposes the water cooling temperature control method for single object (such as object lens water jacket), cannot be applied to the water cooling temperature control application scenario of multiple object.
Patent CN200910050404.0 provides the water-cooled temperature controlling system of a kind of projection lens of lithography machine equally, as shown in Figure 2. The improvements of this device are: through splitter, the circulation fluid that TCU provides is divided into multiply tributary, flow through multiple object, as projected the component such as object lens, silicon wafer stage, mask platform, finally synthesizing one by current collector again flows back to TCU, thus achieves the water cooling temperature control for multiple object. The problems such as this patent emphasis solves the projection time-lag effect of object lens water cooling temperature control system and the big phenomenon of time constant is brought length steady time, control accuracy are not high. But, the defect of its scheme is: for the different operating modes of multiple object, it may also be useful to same TCU, can only use the circulation fluid of uniform temp, thus does not reach best temperature control effect. In a word, the application scenario that the program can not be applied to multiple object and each object has the circulation fluid of differing temps to require.
Summary of the invention
The defect existed to overcome in prior art, the present invention provides a kind of multichannel water-cooled temperature controlling system and control method can be applied to multiple object, and can for multiple object accurate temperature controlling.
In order to realize foregoing invention object, the open a kind of multichannel water-cooled temperature controlling system of the present invention, for accurately controlling the temperature of multiple controlled plant, it is characterized in that, this multichannel water-cooled temperature controlling system comprises: temperature control unit, for the circulation fluid providing temperature precisely controlled, there is the pumping to circulation fluid, heating, refrigeration and accurately control the controlling functions of outlet circulation fluid temperature; Splitter, is connected with this temperature control unit, according to the traffic demand of multiple object, this circulation fluid can be divided into multiple branch road; Branch road water temperature regulation device, is connected with this splitter, for regulating the circulation fluid temperature of branch road corresponding to each controlled plant, has the heat regulation to circulation fluid and mixing functions, and can realize the accurate output to heating power; Current collector, is connected with this temperature control unit, for the circulation fluid of multiple branch road being merged into a road and inputs this temperature control unit; Water-cooled temperature sensor, gathers the entrance water temperature of each object respective branch; Object temperature sensor, gathers the temperature of each controlled plant; Measure module, export excitation to water-cooled temperature sensor and object temperature sensor, sensor measurement signal is changed; Control module, according to the observed value that measurement module records, by control algorithm, actuation temperature control unit and the work of each branch road water temperature regulation device.
Further, at each branch road, flow control valve is housed, the circulating fluid flow rate of each controlled plant adjustable. This branch road water temperature regulation device comprises mixing tank and well heater, and well heater regulates heating power by heating period and dutycycle. Further, the step that the water temperature regulation device by controlling each branch road controls the water temperature of each branch road is comprised.
Further, tandem feedback control method controlling brancher water temperature regulation device is adopted. This tandem feedback control method comprises: a. carrys out calculation deviation value Tobja_err according to the desired temperature Tobja_SV of controlled plant and actual measured value Tobja_PV; B. the desired temperature Twater1_SV of the water-cooled entrance corresponding to this controlled plant is calculated according to Tobja_err; C. calculation deviation value Twater1_err is carried out according to this desired temperature Twater1_SV and water-cooled temperature actual measured value Twater1_PV; D. the heating output signal of the branch road water temperature regulation device corresponding to controlled plant is calculated according to Twater1_err; E. according to this heating output signal this temperature adjustment module of control. This step b and d all adopts pid algorithm to calculate.
Compared with prior art, multichannel water-cooling system provided by the present invention, it is not necessary to use multiple temperature control unit device, and this system is simple for structure, it may be achieved be applied to multiple object and each object has the application scenario of differing temps circulation fluid requirement.
Meanwhile, multichannel water-cool control method provided by the present invention, it is possible to reduce the time constant of controlled plant, it is possible to improve the operating frequency of system, it is possible to the immunity from interference of enhanced system and the change of load is had certain immunity from interference. The reduction of time constant, it is meant that the shortening of control passage, thus make control action kou more timely, response speed is faster, and Mass Control must be improved.
Accompanying drawing explanation
Can be further understood by following detailed Description Of The Invention and institute's accompanying drawings about the advantages and spirit of the present invention.
Fig. 1 is the structural representation of a kind of water-cooled temperature controlling system used in prior art;
Fig. 2 is the structural representation of another kind of water-cooled temperature controlling system used in prior art;
Fig. 3 is the structural representation of illustrated water-cooled temperature controlling system;
Fig. 4 is the control schematic flow sheet of illustrated water-cooled temperature controlling system.
Embodiment
Below in conjunction with accompanying drawing, specific embodiments of the invention are described in detail.
A kind of multichannel water-cooled temperature controlling system that the present invention proposes, the circulation fluid that TCU is exported by this multichannel water-cooled temperature controlling system by current collector, splitter is supplied to multiple controlled plant respectively, it is achieved the low cost of system and the efficient utilization of resource. Reduced the temperature of circulation fluid by TCU, and realize the accurate temperature controller that immunity from interference is strong. The temperature of each road water-cooled is raised respectively, it is achieved to the independent regulating and control of the temperature of each road water-cooled by each branch road water temperature regulation device. The time constant of controlled plant is reduced, fast reaction speed, it is to increase immunity from interference and robustness by tandem feedback control algorithm.
Illustrated multichannel water-cooled temperature controlling system comprises with lower component: temperature control unit (TemperatureControlUnit, TCU), splitter, branch road water temperature regulation device, temperature control object, current collector, water-cooled temperature sensor, object temperature sensor, measurement module, control module, water-cooled piping system. Wherein temperature control unit, it is provided that the circulation fluid that temperature is precisely controlled, has the functions such as the pumping to circulation fluid, heating, refrigeration, and has the precise temp controlling functions to outlet circulation fluid. Splitter, according to the traffic demand of multiple object, is divided into multichannel by circulation fluid, and the flow control valve for each branch road is housed, it is possible to realizes the circulating fluid flow rate to each object and regulates; Branch road water temperature regulation device, for regulating the circulation fluid temperature in the corresponding water route of each object, has the heat regulation to circulation fluid and mixing functions, and can realize the accurate output to heating power; Temperature control object is controlled plant; Current collector, synthesizes a road by circulation fluid again from each object; Water-cooled temperature sensor, gathers the entrance water temperature in the corresponding water route of each object, controls for the temperature for this road water-cooled; Object temperature sensor, gathers the temperature of each object, controls for the temperature for each object; Measure module, export excitation to water-cooled temperature sensor and object temperature sensor, sensor measurement signal is changed; Control module, according to the observed value that measurement module records, by each control algorithm, drives TCU and the work of each branch road water temperature regulation device; Water-cooled piping system, it is provided that the pipeline of circulation fluid flowing.
Below with reference to Fig. 3, multichannel water-cooled temperature controlling system disclosed in this invention is described in detail. As shown in Figure 3, Fig. 3 is the structural representation of illustrated water-cooled temperature controlling system. This system needs the object of temperature control to comprise: object lens 210 and cavity air 212.
New wind, from new wind entrance 200, enters gas piping through filter 201, at gas piping internal recycle under the driving of blower fan 202. From blower fan gas out through air inlet pipeline 203, enter primary heat exchanger 204 and secondary heat exchanger 206, carry out heat exchange with the recirculated water of controlled temperature, it is achieved to the temperature control of gas. Controlled gas enters cavity 212 through static pressure chamber 207 and super high efficient filter 208. Object lens 210 are washed in this controlled gas. This gas, through air return pipeline 213, returns to blower fan 202 entrance, is recycled.
Multichannel water-cooling system designed by this system comprises: temperature control unit 1 comprises the functional components such as pumping, heating, refrigeration, it is provided that the circulation fluid that temperature is precisely controlled. This circulation fluid, through water pipe 101, is transported to spreader plate 102 and is divided into three tunnels. This spreader plate 102 is also with flow valve 2,3,4, it is possible to realize the Flow-rate adjustment of each road water-cooled. Three road circulation fluids are transported to branch road water temperature regulation device 5,6,7 by water pipe 103,104,105 respectively; It is transported to temperature survey frock 8,10,12 again by water pipe 106,107,108. With temperature sensor 9,11,13 in temperature survey frock, it is possible to measure the water-cooled temperature of each road circulation respectively. Wherein a road water-cooled is transported to object lens 210 through water pipe 111, then is transported to collector plate 115 through water pipe 114 from object lens 210. Two-way water-cooled is transported to primary heat exchanger 204 and secondary heat exchanger 206 through water pipe 109,110 in addition, then is transported to collector plate 115 through water pipe 112,113. Again synthesized one circulation fluid by collector plate 115, return to temperature control unit 1 through water pipe 116, be recycled. Multichannel water-cooling system provided by the present invention does not need to use multiple temperature control unit device, and this system is simple for structure, it may be achieved be applied to multiple object and each object has the application scenario of differing temps circulation fluid requirement.
Controlling System designed by this system comprises: temperature sensor 9,11,13, it is possible to measure the water-cooled temperature of each road circulation respectively. Temperature sensor 205, it is possible to measure the gas temperature of primary heat exchanger outlet. Temperature sensor 209, it is possible to measure gas temperature in cavity. Temperature sensor 211, it is possible to measure objective temperature. Measure module 14, it is possible to realize the power supply excitation to temperature sensor 9,11,13,205,209,211, signals collecting, signal amplification, AD conversion. Control module comprises TT&C system 15 and electric control box 16 two portions, TT&C system 15 can realize the parameter transform to measurement signal, data Storage & Display, by each water cooling temperature control algorithm and object temperature control algorithm, the desired temperature of accounting temperature control unit and the set(ting)value of branch road water temperature regulation device, drive branch road water temperature regulation device by electric control box 16.
This branch road water temperature regulation device 5,6,7 comprises mixing tank and well heater. This well heater can regulate heating power by heating period and dutycycle. Heating period and dutycycle are calculated by TT&C system 15, drive through electric control box 16 and realize.
Measure module 14 and comprise the measurement hardware circuit such as pinboard, high-precision environment parameter measurement plate card.
TT&C system 15 comprises the hardware such as VME cabinet, PPC, PC, netting twine, and runs the content such as measurement drive software thereon, control drive software, TCU drive software, electric control box drive software, interface software.
In order to accurately control this multichannel water-cooled temperature controlling system, the present invention provides a set of control method. This control method carries out tandem feedback control for each object. Serials control improves one of very effective scheme of process control quality, its advantage is: the time constant that can reduce controlled plant, the operating frequency of raising system, the immunity from interference of enhanced system and the change of load is had certain immunity from interference. The reduction of time constant, it is meant that the shortening of control passage, thus make control action kou more timely, response speed is faster, and Mass Control must be improved.
Controlling System carrys out calculation deviation value Tlens_err according to the desired temperature Tlens_SV of object lens and actual measured value Tlens_PV, and then Tlens_err input control algorithm calculates the desired temperature Twater1_SV of water-cooled entrance corresponding to object lens. Carry out calculation deviation value Twater1_err according to Twater1_SV and water-cooled temperature actual measured value Twater1_PV, then Twater1_err input control algorithm is calculated the heating output signal H1 of branch road water temperature regulation device corresponding to object lens. Same method, Controlling System calculates Thex1_err, Twater2_SV, Twater2_err, H2, Thex2_err, Twater3_SV, Twater3_err, H3 respectively. Controlling System, according to Twater1_SV, Twater2_SV, Twater3_SV, exports the set(ting)value TCU_SV of TCU according to corresponding strategy, thus drives TCU to work. Controlling System, according to H1, H2, H3, drives each branch road water temperature regulation device to work respectively. TCU, according to TCU_SV, drives the functional components such as pumping, heating, refrigeration by special control algorithm, it is achieved TCU exports the accurate control of circulation fluid temperature.
The control algorithm that calculating Twater1_SV, Twater2_SV, Twater3_SV etc. adopt is pid algorithm.
The control algorithm that calculating H1, H2, H3 etc. adopt is pid algorithm.
The strategy calculating TCU_SV is: the Schwellenwert getting in Twater1_SV, Twater2_SV, Twater3_SV, and subtracts certain deviation value Kj. This deviation value can differing temps scope residing for Twater1_SV, Twater2_SV, Twater3_SV and different.
The concrete temperature control flow process of this control method, as shown in Figure 4. The actual measured value Tobja_PV that Controlling System obtains according to the desired temperature Tobja_SV by temperature control object a and the temperature sensor 305 by object a carrys out calculation deviation value Tobja_err, is then calculated by Tobja_err input object a temperature control algorithm 301 by the desired temperature Twatera_SV of water-cooled entrance corresponding to temperature control object a. Carry out calculation deviation value Twatera_err according to Twatera_SV and the water-cooled temperature actual measured value Twatera_PV that obtains by water-cooled 1 temperature sensor 304, then Twatera_err is inputted water-cooled 1 temperature control algorithm 302 and calculates by the heating output signal H1 of branch road water temperature regulation device 303 corresponding to temperature control object a. Same method, Controlling System calculates Thex1_err, Twater2_SV, Twater2_err, H2, Thex2_err, Twater3_SV, Twater3_err, H3 respectively. Controlling System, according to Twater1_SV, Twater2_SV, Twater3_SV, controls, according to TCU, the set(ting)value TCU_SV that algorithm 600 exports TCU, thus drives TCU to work. Controlling System, according to H1, H2, H3, drives each branch road water temperature regulation device to work respectively. TCU, according to TCU_SV, drives the functional components such as pumping, heating, refrigeration by special control algorithm, it is achieved TCU exports the accurate control of circulation fluid temperature.
Control method for this multichannel water-cooled temperature controlling system provided by the present invention, the time constant of controlled plant can be reduced, the operating frequency of system can be improved, it is possible to the immunity from interference of enhanced system and the change of load is had certain immunity from interference. The reduction of time constant, it is meant that the shortening of control passage, thus make control action kou more timely, response speed is faster, and Mass Control must be improved.
The preferred embodiment of the just the present invention described in this specification sheets, above embodiment is only in order to illustrate the technical scheme of the present invention but not limitation of the present invention. The technical scheme that all those skilled in the art can be obtained by logical analysis, reasoning, or a limited experiment under this invention's idea, all should be within the scope of the present invention.
Claims (7)
1. a multichannel water-cooled temperature controlling system, for accurately controlling the temperature of multiple controlled plant, it is characterised in that, described multichannel water-cooled temperature controlling system comprises:
Temperature control unit, for the circulation fluid providing temperature precisely controlled, has the pumping to circulation fluid, heating, refrigeration and accurately controls the controlling functions of outlet circulation fluid temperature;
Splitter, is connected with described temperature control unit, according to the traffic demand of multiple object, described circulation fluid can be divided into multiple branch road;
Branch road water temperature regulation device, is connected with described splitter, for regulating the circulation fluid temperature of branch road corresponding to each controlled plant, has the heat regulation to circulation fluid and mixing functions, and can realize the accurate output to heating power;
Current collector, is connected with described temperature control unit, for the circulation fluid of multiple branch road being merged into a road and inputs described temperature control unit;
Water-cooled temperature sensor, gathers the entrance water temperature of each object respective branch;
Object temperature sensor, gathers the temperature of each controlled plant;
Measure module, export excitation to water-cooled temperature sensor and object temperature sensor, sensor measurement signal is changed;
Control module, according to the observed value that measurement module records, by control algorithm, actuation temperature control unit and the work of each branch road water temperature regulation device.
2. multichannel water-cooled temperature controlling system as claimed in claim 1, it is characterised in that at each branch road, flow control valve is housed, the circulating fluid flow rate of each controlled plant adjustable.
3. multichannel water-cooled temperature controlling system as claimed in claim 1, it is characterised in that, described branch road water temperature regulation device comprises mixing tank and well heater, and well heater regulates heating power by heating period and dutycycle.
4. one kind adopts the control method of multichannel water-cooled temperature controlling system as claimed in claim 1, it is characterised in that comprising the step of the water temperature by controlling the water temperature regulation device of each branch road and control each branch road.
5. the control method of multichannel water-cooled temperature controlling system as claimed in claim 4, it is characterised in that, adopt tandem feedback control method controlling brancher water temperature regulation device.
6. the control method of multichannel water-cooled temperature controlling system as claimed in claim 5, it is characterised in that, described tandem feedback control method comprises:
A. desired temperature Tobja_SV and actual measured value Tobja_PV according to controlled plant carrys out calculation deviation value Tobja_err;
B. the desired temperature Twater1_SV of the water-cooled entrance corresponding to described controlled plant is calculated according to Tobja_err;
C. calculation deviation value Twater1_err is carried out according to described desired temperature Twater1_SV and water-cooled temperature actual measured value Twater1_PV;
D. the heating output signal of the branch road water temperature regulation device corresponding to controlled plant is calculated according to Twater1_err;
E. according to the described heating output signal described branch road water temperature regulation device of control.
7. the control method of multichannel water-cooled temperature controlling system as claimed in claim 6, it is characterised in that, described step b and d all adopts pid algorithm to calculate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210475503.5A CN103838274B (en) | 2012-11-22 | 2012-11-22 | A kind of multichannel water-cooled temperature controlling system and control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210475503.5A CN103838274B (en) | 2012-11-22 | 2012-11-22 | A kind of multichannel water-cooled temperature controlling system and control method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103838274A CN103838274A (en) | 2014-06-04 |
| CN103838274B true CN103838274B (en) | 2016-06-01 |
Family
ID=50801898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210475503.5A Active CN103838274B (en) | 2012-11-22 | 2012-11-22 | A kind of multichannel water-cooled temperature controlling system and control method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103838274B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105373158A (en) * | 2014-08-28 | 2016-03-02 | 上海微电子装备有限公司 | Gas temperature control system |
| CN104317167A (en) * | 2014-10-27 | 2015-01-28 | 中国科学院长春光学精密机械与物理研究所 | Gaseous environment acquisition control system for lithography projection lens internal chamber |
| CN106556149B (en) * | 2015-09-29 | 2019-03-05 | 中国石化扬子石油化工有限公司 | Multiple branch circuit multi-burner heating furnace branch balance control method and system |
| CN107665006B (en) * | 2016-07-29 | 2020-04-10 | 上海微电子装备（集团）股份有限公司 | Temperature control system and control method |
| CN107364949A (en) * | 2017-08-10 | 2017-11-21 | 河海大学 | Water quality adjusting system and its application method before the biochemical wastewater treatment of highlands |
| CN111367333B (en) * | 2020-05-06 | 2024-04-26 | 长沙航空职业技术学院 | High-precision distributed water-cooling temperature control device and method |
| CN112230692B (en) * | 2020-10-27 | 2022-03-22 | 浙江大学 | Multi-path temperature control system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006080194A (en) * | 2004-09-08 | 2006-03-23 | Nikon Corp | Temperature controller, exposure device and manufacturing method therefor |
| CN101551595A (en) * | 2009-04-30 | 2009-10-07 | 上海微电子装备有限公司 | Temperature control method for projection objective of photoetching machine |
| CN101609262A (en) * | 2009-07-14 | 2009-12-23 | 上海微电子装备有限公司 | The temperature control equipment of projection lens of lithography machine |
| CN201402416Y (en) * | 2008-07-10 | 2010-02-10 | 辛格尔温度技术有限公司 | Temperature control system and device with same |
| CN102540750A (en) * | 2010-12-30 | 2012-07-04 | 上海微电子装备有限公司 | Environment control system of lithographic equipment |
-
2012
- 2012-11-22 CN CN201210475503.5A patent/CN103838274B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006080194A (en) * | 2004-09-08 | 2006-03-23 | Nikon Corp | Temperature controller, exposure device and manufacturing method therefor |
| CN201402416Y (en) * | 2008-07-10 | 2010-02-10 | 辛格尔温度技术有限公司 | Temperature control system and device with same |
| CN101551595A (en) * | 2009-04-30 | 2009-10-07 | 上海微电子装备有限公司 | Temperature control method for projection objective of photoetching machine |
| CN101609262A (en) * | 2009-07-14 | 2009-12-23 | 上海微电子装备有限公司 | The temperature control equipment of projection lens of lithography machine |
| CN102540750A (en) * | 2010-12-30 | 2012-07-04 | 上海微电子装备有限公司 | Environment control system of lithographic equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103838274A (en) | 2014-06-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103838274B (en) | A kind of multichannel water-cooled temperature controlling system and control method | |
| CN108592165B (en) | A kind of heat exchange station system optimal control method | |
| JP4829818B2 (en) | Operation control method for 1 pump heat source equipment | |
| CN103676651A (en) | Method for predicting and controlling steam temperatures of boilers on basis of state observation model | |
| KR101343863B1 (en) | Variable Flow Heating Control System and Heating Control Method using thereof | |
| CN103969965B (en) | The device of accurate control submersible photoetching apparatus soaking liquid temperature and Temp. control method thereof | |
| CN104061818A (en) | Temperature-control and energy-saving circulating water operation system | |
| CN107145175A (en) | A kind of steam generator feed temperature controls simulation system | |
| CN111397257B (en) | Temperature control device and method | |
| CN102095447A (en) | Multi-medium combined heat exchanger test bed | |
| CN104101105A (en) | Method and device used for compound control of crude oil heater temperature | |
| CN105373158A (en) | Gas temperature control system | |
| CN104158071B (en) | Constant temperature processing device and method for cooling water under variable working conditions | |
| JP2006224040A (en) | Method and apparatus for controlling temperature of reactor | |
| CN106524822A (en) | Liquid mixing and temperature adjusting method of cooling process of heat transformation | |
| JP5944957B2 (en) | Heat source system control method and apparatus | |
| CN203135201U (en) | Device for controlling temperature of excimer gas laser discharge chamber | |
| CN103176369B (en) | For the immersion liquid attemperating unit of liquid immersion lithography | |
| CN204830333U (en) | Become water temperature control system suitable for air conditioner two stage pump system | |
| CN204943786U (en) | Be applicable to the vari-able flow control system of air-conditioning Primary pump system | |
| CN111595603B (en) | Improved testing device for testing water chilling unit with heat recovery function | |
| JP2019525110A (en) | Heating system | |
| CN104696059A (en) | Cooling system and control method thereof for water-cooled engine water tank | |
| JP2019194753A (en) | Temperature control system, temperature control method, manufacturing apparatus and inspection device | |
| EP3495912B1 (en) | Parallel valve control |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder |