CN103837974A - Optical system of microscope lens with infinite tube length - Google Patents
Optical system of microscope lens with infinite tube length Download PDFInfo
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- CN103837974A CN103837974A CN201410067677.7A CN201410067677A CN103837974A CN 103837974 A CN103837974 A CN 103837974A CN 201410067677 A CN201410067677 A CN 201410067677A CN 103837974 A CN103837974 A CN 103837974A
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Abstract
The invention discloses an optical system of a microscope lens with the infinite tube length, and belongs to a refraction-reflection type optical system. The optical system sequentially comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens in the optical axis direction of the microscope lens optical system. The first lens, the second lens and the third lens have the negative focal power and are bent to the object surface, the fourth lens and the fifth lens are biconcave negative lenses, the sixth lens is a biconvex positive lens, the seventh lens has the positive focal power and is bent to the object surface, an aperture diaphragm is located at the position of the front surface of the third lens, and the object surface is located at the position of the rear focal surface of the microscope lens with the infinite tube length. According to the optical system, a refraction-reflection type structure is adopted, the maximum numerical aperture is 0.93, the shortest focal length is 2.15 mm, and the imaging quality is approximately the imaging quality of complete imaging; the optical system is small in lens number, compact in structure, small in size and light in weight, and completely meets the technical requirements of a microscope for deep ultraviolet detection.
Description
Technical field
The present invention relates to microcobjective optical system, particularly a kind ofly detect for deep ultraviolet the microcobjective optical system that microscopical tube length is unlimited.
Background technology
Deep ultraviolet detects microscope and has great using value in each fields such as physics, chemistry, material science, life sciences, especially in semi-conductor industry and optoelectronics industry field, it is a kind of very important testing equipment that deep ultraviolet detects microscope, it can the detection after exposure, development, etching etc. for the litho pattern on silicon chip (or mask), can go up for quick observation silicon chip (or mask) whole structure of litho pattern, can be for measuring litho pattern live width (CD) and defects detection etc.
For example, according to international semiconductor Technology Roadmap (ITRS), the key index of the mask of 90nm node technology is: on proximity correction (OPC) mask, the characteristic width of chromium line is 106nm, and the characteristic dimension of defect is 72nm.On the silicon chip of 90nm node technology, the key index of exposure figure is: the live width of intensive line is 90nm, and the width of intensive contact hole is 115nm.In order to grasp the exposure effect of the litho pattern on silicon chip (or mask), need one to there is high-resolution deep ultraviolet and detect optical microscope.The deep ultraviolet detection system (U-UVF248) of Olympus Corp is exactly this type of microscope, and its highest resolution is 80nm, adopts 248nm wavelength light source, and the enlargement ratio of its microcobjective is 100 times, and numerical aperture NA is 0.9, and working distance is 0.2mm.
Along with the lasting guiding of the market demand, semiconductor technology is obtained continuous progress, testing equipment also needs to improve constantly the testing requirement of its technical indicator with coupling photoetching technique, need a kind of highest resolution is the deep ultraviolet detection microscope of 70nm for this reason, the enlargement ratio β of its microcobjective is 100 times, numerical aperture NA is 0.93, and operation wavelength is 248nm.
On conventional art, microcobjective has 2 kinds of forms: the object lens that first conjugate distance is limited, and the conjugate distance standard of China's regulation microcobjective is 195mm, it two is object lens that conjugate distance is unlimited, or is called the object lens that tube length is unlimited.The microcobjective that tube length is unlimited, with lens barrel object lens (Tube lens, be called again compensation object lens, or attachment objective) combination, object is imaged onto infinity by the former, and the latter is the focal plane position at lens barrel object lens by the picture re-imaging of unlimited distance, be parallel light path between the two, can insert neatly light-splitting device, filtering device, polarizer etc. and not produce aberration, light path design layout is very convenient, and does not affect the measuring accuracy of detection system.
Application number is 201310010338.0 Chinese patent (January 11 2013 applying date, application people is Harbin Institute of Technology), a kind of infinite image distance microcobjective optical system is disclosed, according to its main claim, numerical aperture NA only reaches 0.8, and shortest focal length just reaches 6mm, and maximum multiplying power reaches 250/6=41.7 doubly, operation wavelength is 632.8nm, can calculate the about 200nm of its highest resolution.For detecting microscopical index request in semi-conductor industry and optoelectronics industry field, greatly differ from each other.And, the lens data providing in table 1 and table 2 in its embodiment, insufficient disclosure.
Summary of the invention
The object of the present invention is to provide the microcobjective optical system that a kind of tube length is unlimited.It is 70nm that a kind of deep ultraviolet detects microscopical highest resolution, can expose for litho pattern, detection after development, etching, can be used for observing fast the whole structure of litho pattern, can be used for measuring litho pattern live width (CD) etc.It is 100 times that described deep ultraviolet detection microscope requires the enlargement ratio β of its microcobjective, and numerical aperture NA is 0.93, and operation wavelength is 248.35nm.
The object of the present invention is achieved like this:
The microcobjective that tube length is unlimited, is a kind of catadioptric objective, along its optical axis direction, comprises successively first lens, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens; Described first lens, the second lens and the 3rd lens have negative power, and bend towards object plane; The 4th lens and the 5th lens are double-concave negative lens; The 6th lens are biconvex positive lenss; The 7th lens have positive light coke, and bend towards object plane; Aperture diaphragm is positioned at the front face location of the 3rd lens, and object plane is positioned at the back focal plane position of the microcobjective that described tube length is unlimited;
Design according to reverse optical path, light is propagated to the right from the image planes of left side infinity, pass through successively the refraction of first lens, the second lens, the 3rd lens and the 4th lens, on the rear surface of the 4th lens, be coated with reflectance coating, light is reflected to the left, successively through the refraction of the 4th lens, the 3rd lens and the second lens, on the front surface of the second lens, be coated with reflectance coating, light is reflected to the right, successively through the refraction of the second lens, the 3rd lens, the 5th lens, the 6th lens and the 7th lens, to imaging on object plane; The 5th lens are annular lens, and there is a manhole at center, can embed the 4th lens;
The microcobjective that described tube length is unlimited, all seven lens all adopt the fused quartz material of high permeability, and the fused quartz material of optional Corning Incorporated 7980 trades mark also can select the Lithosil of Schott AG
tMq0/1-E248 fused quartz material.
The unlimited microcobjective optical system of tube length of the present invention compared with prior art, has following advantage and good effect:
1, tube length of the present invention is unlimited microcobjective optical system adopts catadioptric configuration, realizes very large numerical aperture with the lens numbers of trying one's best few, and image quality approaches and improves imaging;
2, the microcobjective optical system optical lens that tube length of the present invention is unlimited is few, compact conformation, and volume is little, lightweight;
3, the microcobjective optical system that tube length of the present invention is unlimited meets completely for deep ultraviolet and detects microscopical technical requirement and application requirements.
Accompanying drawing explanation
Fig. 1 is structure and the index path of the microcobjective optical system that tube length of the present invention is unlimited;
Fig. 2 is the structural drawing of the 4th lens of the microcobjective optical system that tube length of the present invention is unlimited;
Fig. 3 is the structural drawing of the second lens of the microcobjective optical system that tube length of the present invention is unlimited;
Fig. 4 is the structural drawing of the 5th lens of the microcobjective optical system that tube length of the present invention is unlimited;
Fig. 5 is the modulation transfer function figure of the microcobjective optical system that tube length of the present invention is unlimited;
Fig. 6 is the RMS wave aberration distribution plan of the microcobjective optical system that tube length of the present invention is unlimited;
Fig. 7 is microcobjective optical system spherical aberration, astigmatism, the curvature of field, the distortion distribution plan that tube length of the present invention is unlimited.
Embodiment
To the unlimited microcobjective optical system of tube length of the present invention be described in further detail below, but should not limit protection scope of the present invention with this.
The object of the present invention is to provide and a kind ofly detect for deep ultraviolet the microcobjective optical system that microscopical tube length is unlimited.It is 70nm that described deep ultraviolet detects microscopical highest resolution, can expose for litho pattern, detection after development, etching, can be used for observing fast the whole structure of litho pattern, can be used for measuring litho pattern live width (CD) etc.It is 100 times that described deep ultraviolet detection microscope requires the enlargement ratio β of its microcobjective, numerical aperture NA is 0.93, operation wavelength is 248.35nm, therefore all lens all adopt the fused quartz material of high permeability, the fused quartz material of optional Corning Incorporated 7980 trades mark, also can select the Lithosil of Schott AG
tMq0/1-E248 fused quartz material.
(focal length is f to the microcobjective that tube length is unlimited
1), (Tube lens, is called again compensation object lens, or attachment objective, and focal length is f with lens barrel object lens
2) combination, object is imaged onto infinity by the former, the latter is the focal plane position at lens barrel object lens by the picture re-imaging of unlimited distance, be parallel light path between the two, can insert neatly light-splitting device, filtering device, polarizer etc. and not produce aberration, light path design layout is very convenient, and does not affect the measuring accuracy of detection system.It is the requirement of 100 times that the two combination realizes enlargement ratio β, and its relation is as follows:
The entrance pupil diameter D that described deep ultraviolet detects the microcobjective that microscope requirement tube length is unlimited is 4mm, and numerical aperture NA is 0.93, determines the focal distance f of the microcobjective that tube length is unlimited according to following formula
1for:
Conventionally, the visual field of high x Microscope Objective is less, when objective angular field be no more than objective focal length 1/20th time, can obtain satisfied image quality, objective line visual field 2y is:
According to the focal distance f of above formula and microcobjective
1selected objective line visual field 2y is 0.1mm.The constrained parameters of the microcobjective optical system that tube length of the present invention is unlimited are as shown in table 1.
The microcobjective optical system constrained parameters that table 1 tube length is unlimited
| Constraint project | Parameter |
| Operation wavelength | 248.35nm |
| Objective line visual field | 0.1mm |
| Numerical aperture | 0.93 |
| Focal length | 2.1505mm |
| Entrance pupil diameter | 4mm |
| Object lens working distance | >2.5mm |
| Wave aberration RMS value | < 71m λ (being 17.6nm) |
Embodiment of microcobjective that tube length of the present invention is unlimited, as shown in Figure 1, is a kind of catadioptric objective, and object plane 101 is positioned at right side, and image planes are positioned at left side infinity, and according to design in the other direction, light is propagated from the image planes in left side object plane 101 to the right.The unlimited microcobjective of described tube length, along its optical axis direction, comprises first lens L1, the second lens L2, the 3rd lens L3, the 4th lens L4, the 5th lens L5, the 6th lens L6, the 7th lens L7 successively.Described first lens L1, the second lens L2 and the 3rd lens L3 have negative power, and bend towards object plane 101; The 4th lens L4 and the 5th lens L5 are double-concave negative lens; The 6th lens L6 is biconvex positive lens; The 7th lens L7 has positive light coke, and bends towards object plane 101.Aperture diaphragm is positioned at front surface 303 positions of the 3rd lens L3, and object plane 101 is positioned at the back focal plane position of the microcobjective that described tube length is unlimited.
As shown in Figure 1, light is propagated to the right from the image planes of left side infinity, pass through successively first lens L1, the second lens L2, the refraction of the 3rd lens L3 and the 4th lens L4, on the rear surface 402 of the 4th lens L4, be coated with reflectance coating, light is reflected to the left, successively through the 4th lens L4, the refraction of the 3rd lens L3 and the second lens L2, on the front surface 201 of the second lens L2, be coated with reflectance coating, light is reflected to the right, successively through the second lens L2, the 3rd lens L3, the 5th lens L5, the refraction of the 6th lens L6 and the 7th lens L7, to imaging on object plane 101.
The 4th lens L4 as shown in Figure 2, is coated with reflectance coating on its rear surface 402, and light is reflected to the left, and front surface 401 and rear surface 402 are all concave surfaces.
The second lens L2 as shown in Figure 3, is coated with reflectance coating on its front surface 201, and light is reflected to the right, and front surface 201 is convex surfaces, and rear surface 202 is concave surfaces.
As shown in Figure 4, its front surface 501 and rear surface 502 are all concave surfaces to the 5th lens L5, are annular lens, and there is a manhole at center, can embed the 4th lens L4.
The microcobjective that described tube length is unlimited, all seven lens all adopt the fused quartz material of high permeability, and the fused quartz material of optional Corning Incorporated 7980 trades mark also can select the Lithosil of Schott AG
tMq0/1-E248 fused quartz material.
According to the unlimited microcobjective optical system constrained parameters of tube length in table 1 above, the design data of the microcobjective optical system that tube length disclosed by the invention is unlimited is as shown in table 2, and table 2 has provided the specific design parameter value of every a slice lens of the microcobjective optical system that the tube length of the present embodiment is unlimited.
The design parameter of the microcobjective optical system that table 2 tube length of the present invention is unlimited
When under the Parameter Conditions such as operation wavelength in table 1, visual field, numerical aperture, known according to the analytical calculation of professional optical design software CODE_V, its aberration correction degree is as follows.
Fig. 5 has shown the modulation transfer function of the microcobjective optical system that the tube length of the present embodiment is unlimited, approaches diffraction limit.Fig. 6 is the distribution of the RMS wave aberration of the microcobjective optical system that the tube length of the present embodiment is unlimited, and maximal value is 6.73nm.This has reflected that the image quality of the microcobjective optical system that tube length of the present invention is unlimited approaches and has improved imaging.
Fig. 7 is spherical aberration, astigmatism, the curvature of field, the distortion figure of the microcobjective optical system that the tube length of the present embodiment is unlimited.
Adopt the microcobjective optical system that tube length of the present invention is unlimited, meet completely for deep ultraviolet and detect microscopical technical requirement, image quality is good, and reaches actual deep ultraviolet and detect microscopical application requirements.
Claims (5)
1. the microcobjective optical system that tube length is unlimited, comprise successively first lens, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens and the 7th lens along its optical axis direction, it is characterized in that, described first lens, the second lens and the 3rd lens have negative power, and bend towards object plane; The 4th lens and the 5th lens are double-concave negative lens; The 6th lens are biconvex positive lenss; The 7th lens have positive light coke, and bend towards object plane; Aperture diaphragm is positioned at the front face location of the 3rd lens, and object plane is positioned at the back focal plane position of the microcobjective that described tube length is unlimited.
2. the microcobjective optical system that tube length as claimed in claim 1 is unlimited, is characterized in that, the first to the 7th described lens form a kind of refractive and reflective optical system.
3. the microcobjective optical system that tube length as claimed in claim 2 is unlimited, it is characterized in that, design according to reverse optical path, light is propagated to the right from the image planes of left side infinity, pass through successively first lens, the second lens, the refraction of the 3rd lens and the 4th lens, on the rear surface of the 4th lens, be coated with reflectance coating, light is reflected to the left, successively through the 4th lens, the refraction of the 3rd lens and the second lens, on the front surface of the second lens, be coated with reflectance coating, light is reflected to the right, successively through the second lens, the 3rd lens, the 5th lens, the refraction of the 6th lens and the 7th lens, to imaging on object plane.
4. the microcobjective optical system that tube length as claimed in claim 1 is unlimited, is characterized in that, described the 5th lens are annular lens, and there is a manhole at center, can embed described the 4th lens.
5. the microcobjective optical system that tube length as claimed in claim 1 is unlimited, is characterized in that, all seven lens all adopt the fused quartz material of high permeability to make.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2016037323A1 (en) * | 2014-09-10 | 2016-03-17 | 深圳市大族激光科技股份有限公司 | Photographic objective lens |
| CN108732738A (en) * | 2017-04-21 | 2018-11-02 | 莱卡微系统Cms有限责任公司 | For microscopical immersion objective |
| CN108873289A (en) * | 2018-09-04 | 2018-11-23 | 中国科学院长春光学精密机械与物理研究所 | Microcobjective optical system and optical device |
| CN110244442A (en) * | 2019-07-01 | 2019-09-17 | 达科为（深圳）医疗设备有限公司 | A kind of novel objective lens array applied to more visual field parallel imagings |
| CN111458837A (en) * | 2020-04-09 | 2020-07-28 | 江苏匠岭半导体有限公司 | Broadband low-dispersion lens |
| CN111837077A (en) * | 2018-03-20 | 2020-10-27 | 科磊股份有限公司 | Arbitrary wavefront compensator for Deep Ultraviolet (DUV) optical imaging systems |
| WO2021000567A1 (en) * | 2019-07-01 | 2021-01-07 | 达科为（深圳）医疗设备有限公司 | High-performance ultra-small microscope objective lens having large field-of-view |
| WO2022042189A1 (en) * | 2020-08-27 | 2022-03-03 | 厦门大学 | Objective lens, optical imaging device, optical system, and test method of optical system |
| CN115598818A (en) * | 2022-10-17 | 2023-01-13 | 佛山迈奥光学科技有限公司（Cn） | Industrial detection dry-type microscope objective |
| CN117270185A (en) * | 2023-11-17 | 2023-12-22 | 长春长光智欧科技有限公司 | Micro-optical system with large numerical aperture and wide spectrum |
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| CN111837077A (en) * | 2018-03-20 | 2020-10-27 | 科磊股份有限公司 | Arbitrary wavefront compensator for Deep Ultraviolet (DUV) optical imaging systems |
| CN108873289A (en) * | 2018-09-04 | 2018-11-23 | 中国科学院长春光学精密机械与物理研究所 | Microcobjective optical system and optical device |
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| WO2021000567A1 (en) * | 2019-07-01 | 2021-01-07 | 达科为（深圳）医疗设备有限公司 | High-performance ultra-small microscope objective lens having large field-of-view |
| CN110244442A (en) * | 2019-07-01 | 2019-09-17 | 达科为（深圳）医疗设备有限公司 | A kind of novel objective lens array applied to more visual field parallel imagings |
| CN111458837A (en) * | 2020-04-09 | 2020-07-28 | 江苏匠岭半导体有限公司 | Broadband low-dispersion lens |
| WO2022042189A1 (en) * | 2020-08-27 | 2022-03-03 | 厦门大学 | Objective lens, optical imaging device, optical system, and test method of optical system |
| CN115598818A (en) * | 2022-10-17 | 2023-01-13 | 佛山迈奥光学科技有限公司（Cn） | Industrial detection dry-type microscope objective |
| CN115598818B (en) * | 2022-10-17 | 2023-04-25 | 佛山迈奥光学科技有限公司 | Industrial detection dry microscope objective |
| CN117270185A (en) * | 2023-11-17 | 2023-12-22 | 长春长光智欧科技有限公司 | Micro-optical system with large numerical aperture and wide spectrum |
| CN117270185B (en) * | 2023-11-17 | 2024-02-20 | 长春长光智欧科技有限公司 | Micro-optical system with large numerical aperture and wide spectrum |
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