CN103824795A - Graphite boat pretreatment substitution piece and graphite boat pretreatment method - Google Patents
Graphite boat pretreatment substitution piece and graphite boat pretreatment method Download PDFInfo
- Publication number
- CN103824795A CN103824795A CN201210475475.7A CN201210475475A CN103824795A CN 103824795 A CN103824795 A CN 103824795A CN 201210475475 A CN201210475475 A CN 201210475475A CN 103824795 A CN103824795 A CN 103824795A
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- Prior art keywords
- graphite boat
- sheet
- preliminary treatment
- boat
- pretreatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Abstract
The invention provides a graphite boat pretreatment substitution piece and a graphite boat pretreatment method. In the prior art, a graphite boat is pretreated through no-load pretreatment or silicon chip fully-loaded pretreatment, which causes relatively-high cost or bad pretreatment effect. The shape of the graphite boat pretreatment substitution piece is matched with process clamping points; the marginal area thickness range of the substitution piece is 100-300 mum, and the central area thickness range of the substitution piece is 1-3 mm; and thus the substitution piece can be reused many times. The graphite boat pretreatment method is characterized by, to begin with, providing a graphite boat for pretreatment, the graphite boat being provided with a plurality of process clamping points; next, providing a graphite boat pretreatment substitution piece, the number of which is matched with that of the graphite boat; then, arranging the graphite boat pretreatment substitution piece on the process clamping points of the graphite boat; and at last, arranging the graphite boat to chemical vapor deposition equipment to deposit silicon nitride. Therefore, the cost of pretreatment can be reduced, and the performance of the pretreatment is improved.
Description
Technical field
The present invention relates to solar cell and manufacture field, particularly a kind of graphite boat preliminary treatment substitutes sheet and graphite boat preprocess method.
Background technology
The antireflective film of making on crystalline silicon battery plate surface at present, adopts silicon nitride film mostly, and it has good light anti-reflection and surface passivation effect, is the deielectric-coating that has good physics, chemical property simultaneously.In manufacture of solar cells technique, generally adopt the mode of CVD (chemical vapour deposition (CVD)), wherein modal a kind of mode is tubular type PECVD (plasma reinforced chemical vapour deposition).In the manufacturing process of tubular type PECVD equipment, in order to realize disposable plating multi-disc silicon chip, multi-disc silicon chip need to be fixed in the graphite boat of special construction requirement.Graphite boat is as the carrying tool of silicon chip, and it has good conductivity, thermal conductivity and toughness, and silicon chip is carried on graphite boat and has also played electrode effect, and a slice silicon chip is arranged on graphite boat by three technique stuck points conventionally.If therefore silicon chip is not put well, do not touch completely on graphite boat, electric field will produce change, causes coating film thickness inhomogeneous.
To new or through the graphite boat of overpickling, because graphite surface has certain roughness, and between the atomic layer of graphite material, adhesion is not high, easily produce graphite powder abscission, simultaneously because tubular type PECVD is the PECVD of direct-type, if plasma is directly beaten on graphite boat sheet surface and also can be made the graphite powder of graphite boat sheet come off, and surface has roughness can cause plated film inhomogeneous.Therefore we need to carry out preliminary treatment to new graphite boat, are exactly at the certain thickness silicon nitride film of graphite boat plated surface last layer, improve surperficial evenness, can protect graphite boat simultaneously, and the graphite powder that reduces graphite boat drops.
Prior art is mainly adopted in two ways for the preprocess method of graphite boat: (1), empty boat preliminary treatment, directly carry out preliminary treatment by new or cleaned graphite boat in unloaded situation; (2), fully loaded silicon chip preliminary treatment, silicon chip on all planting on the boat sheet of graphite boat, silicon chip is plugged on boat sheet by technique stuck point, now the gap between technique stuck point and boat sheet is all occupied by silicon chip.
There is respectively following problem in above-mentioned two kinds of preprocess methods: when empty boat preliminary treatment, technique stuck point is in exposed state, do not have object to block, therefore in preprocessing process, meeting silicon nitride film in the gap of technique stuck point and technique stuck point and boat sheet, causes in normal coating process process, and conductivity, thermal conductivity between technique stuck point and silicon chip are all affected, thereby cause silicon nitride film deposition inhomogeneous, cause a large amount of need to do over again and affect the silicon nitride film aberration sheet of product quality; When fully loaded silicon chip preliminary treatment, between technique stuck point and boat sheet, gap is occupied by silicon chip, therefore in the gap of technique stuck point and boat sheet, almost there is no silicon nitride deposition, can not cause aberration sheet at production coating process, but because silicon chip is very thin, deposit after a large amount of silicon nitrides, silicon chip easily bends, even break, cannot Reusability, cause high cost.
Therefore, how to provide the alternative sheet of a kind of graphite boat preliminary treatment and graphite boat preprocess method to be run into solve above-mentioned graphite boat pretreating process the problem that affects processing performance or high cost, become industry technical problem urgently to be resolved hurrily.
Summary of the invention
The object of the invention is to provide a kind of graphite boat preliminary treatment to substitute sheet and graphite boat preprocess method, can reduce preliminary treatment cost and improve preliminary treatment performance by described replacement sheet and processing method.
For achieving the above object, the invention provides a kind of graphite boat preliminary treatment and substitute sheet, preliminary treatment after cleaning for graphite boat, described graphite boat comprises the boat sheet of multiple stacked settings, on described each boat sheet, comprise multiple for carrying the technique stuck point of workpiece sheet, shape and described technique stuck point that described graphite boat preliminary treatment substitutes sheet match, and its fringe region thickness range is 100～300 μ m, and its center area thickness scope is 1～3mm.
In a preferred embodiment, it is that the length of side is the square of 125mm or 156mm that described graphite boat preliminary treatment substitutes sheet, and described foursquare fringe region is wedge shape, and the end thickness of described wedge shape is 100～300 μ m.
In further preferred embodiment, corresponding three the technique stuck points of described each alternative sheet, described technique stuck point is supported on respectively three sides of each alternative sheet, and described each replacement sheet is arranged on boat sheet by corresponding technique stuck point inclination 5 to 10 degree.
In a preferred embodiment, the material that described graphite boat preliminary treatment substitutes sheet is graphite or carbon fiber.
The present invention also provides a kind of graphite boat preprocess method, and the method comprises the following steps: a, provide one to carry out pretreated graphite boat, have multiple technique stuck points on described graphite boat; B, provide the graphite boat preliminary treatment described in the as above any one matching with graphite boat quantity to substitute sheet; C, by described graphite boat preliminary treatment substitute sheet be arranged on the technique stuck point of described graphite boat; D, described graphite boat is set to deposited silicon nitride in chemical vapor depsotition equipment.
In a preferred embodiment, in step c, described chemical vapor depsotition equipment is plasma reinforced chemical vapour deposition equipment.
In a preferred embodiment, the method also comprises step e, by hydrofluoric acid solution, the alternative sheet of described graphite boat preliminary treatment is cleaned.
In a preferred embodiment, step e carries out after silicon nitride deposition carrying out in 4 to 6 steps d again.
With unloaded preliminary treatment meeting in prior art cause performance not good compared with, graphite boat preprocess method of the present invention first provides one to carry out pretreated graphite boat, on described graphite boat, there are multiple technique stuck points, then provide the graphite boat preliminary treatment matching with graphite boat quantity to substitute sheet, afterwards described graphite boat preliminary treatment is substituted to sheet and be arranged on the technique stuck point of described graphite boat, finally described graphite boat is set to deposited silicon nitride in chemical vapor depsotition equipment.The present invention can avoid the region for example contacting with silicon chip on technique stuck point without the region of plating silicon nitride to plate silicon nitride, thereby has improved pretreated performance.
With fully loaded silicon chip preliminary treatment meeting in prior art cause cost higher compared with, shape and described technique stuck point that graphite boat preliminary treatment of the present invention substitutes sheet match, its fringe region thickness range is 100～300 μ m, and its center area thickness scope is 1～3mm, can supply repeatedly Reusability.The present invention can reduce pretreated cost.
Accompanying drawing explanation
Fig. 1 is the front view that graphite boat preliminary treatment of the present invention substitutes sheet 1;
Fig. 2 is the end view that graphite boat preliminary treatment of the present invention substitutes sheet 1;
Fig. 3 is the composition structural representation that graphite boat preliminary treatment of the present invention substitutes the applied graphite boat 2 of sheet 1;
Fig. 4 is the enlarged diagram of the a-quadrant in Fig. 3;
Fig. 5 is the flow chart of the embodiment of graphite boat preprocess method of the present invention.
Specific embodiments
Describe object of the present invention and effect in detail below in conjunction with specific embodiment and accompanying drawing.
Referring to Fig. 1 to Fig. 4, graphite boat preliminary treatment of the present invention substitutes the preliminary treatment after sheet 1 cleans for graphite boat 2, described graphite boat 2 comprises the boat sheet 20 of multiple stacked settings, on described each boat sheet 20, comprise multiple for carrying the technique stuck point 200 of workpiece sheet, shape and described technique stuck point 200 that described graphite boat preliminary treatment substitutes sheet 1 match, its fringe region thickness range is 100～300 μ m, its center area thickness scope is 1～3mm, and the material that described graphite boat preliminary treatment substitutes sheet 1 is the material of the corrosion-and high-temp-resistants such as graphite or carbon fiber.In the present embodiment, it is that the length of side is the square of 125mm or 156mm that described graphite boat preliminary treatment substitutes sheet, described foursquare fringe region is wedge shape, and the end thickness of described wedge shape is 100～300 μ m, and the material that described graphite boat preliminary treatment substitutes sheet 1 is carbon fiber.
Continue referring to Fig. 4, described each graphite boat preliminary treatment substitutes corresponding three the technique stuck points 200 of sheet 1, be arranged on boat sheet 20 by corresponding technique stuck point 200 5 to 10 degree that tilt when described graphite boat preliminary treatment substitutes sheet 1, now three corresponding technique stuck points 200 are supported on respectively each graphite boat preliminary treatment and substitute three sides of sheet 1.
When use the graphite boat preliminary treatment shown in Fig. 1 and Fig. 2 substitute sheet 1 by after cleaning or new graphite boat 2 while carrying out preliminary treatment, need by the preliminary treatment of multi-disc graphite boat substitute sheet 1 every be all arranged on boat sheet 20 by three technique stuck points 200 as shown in Figure 4, afterwards graphite boat 2 is arranged on to silicon nitride film in PECVD equipment reaction chamber.Substitute on sheet 1 and deposit after certain thickness silicon nitride film and (approximately carry out 4 to 6 silicon nitride preliminary treatment deposition) until graphite boat preliminary treatment, the silicon nitride that need graphite boat preliminary treatment be substituted to sheet 1 surface by hydrofluoric acid solution washes away, bending will be produced otherwise graphite boat preliminary treatment substitutes sheet 1, thereby pretreated effect can be affected.
Referring to Fig. 5, first graphite boat preprocess method of the present invention carries out step S50, provides one to carry out pretreated graphite boat, has multiple technique stuck points on described graphite boat, and the material of described technique stuck point also can be graphite.
Then continue step S51, provide graphite boat preliminary treatment as depicted in figs. 1 and 2 to substitute sheet.
Then continue step S52, described graphite boat preliminary treatment is substituted to sheet and be arranged on the technique stuck point of described graphite boat.
Then continue step S53, described graphite boat is set to deposited silicon nitride in chemical vapor depsotition equipment.In the present embodiment, described chemical vapor depsotition equipment is plasma reinforced chemical vapour deposition equipment.
Then continue step S54, by hydrofluoric acid solution, described graphite boat preliminary treatment is substituted to sheet and clean, the mass percent concentration of described hydrofluoric acid is 5% to 10%; Preferred step S54 carries out after 4 to 6 step S53 carrying out again.
In sum, graphite boat preprocess method of the present invention first provides one to carry out pretreated graphite boat, on described graphite boat, there are multiple technique stuck points, then provide the graphite boat preliminary treatment matching with graphite boat quantity to substitute sheet, afterwards described graphite boat preliminary treatment is substituted to sheet and be arranged on the technique stuck point of described graphite boat, finally described graphite boat is set to deposited silicon nitride in chemical vapor depsotition equipment.The present invention can avoid the region for example contacting with silicon chip on technique stuck point without the region of plating silicon nitride to plate silicon nitride, thereby has improved pretreated performance.Shape and described technique stuck point that graphite boat preliminary treatment of the present invention substitutes sheet match, and its fringe region thickness range is 100～300 μ m, and its center area thickness scope is 1～3mm, can supply repeatedly Reusability.The present invention can reduce pretreated cost.。
Claims (8)
1. a graphite boat preliminary treatment substitutes sheet, preliminary treatment after cleaning for graphite boat, described graphite boat comprises the boat sheet of multiple stacked settings, on described each boat sheet, comprise multiple for carrying the technique stuck point of workpiece sheet, it is characterized in that, shape and described technique stuck point that described graphite boat preliminary treatment substitutes sheet match, and its fringe region thickness range is 100～300 μ m, and its center area thickness scope is 1～3mm.
2. graphite boat preliminary treatment according to claim 1 substitutes sheet, it is characterized in that, it is that the length of side is the square of 125mm or 156mm that described graphite boat preliminary treatment substitutes sheet, and described foursquare fringe region is wedge shape, and the end thickness of described wedge shape is 100～300 μ m.
3. graphite boat preliminary treatment according to claim 2 substitutes sheet, it is characterized in that, corresponding three the technique stuck points of described each alternative sheet, described technique stuck point is supported on respectively three sides of each alternative sheet, and described each replacement sheet is arranged on boat sheet by corresponding technique stuck point inclination 5 to 10 degree.
4. graphite boat preliminary treatment according to claim 1 substitutes sheet, it is characterized in that, the material that described graphite boat preliminary treatment substitutes sheet is graphite or carbon fiber.
5. a graphite boat preprocess method, is characterized in that, the method comprises the following steps: a, provide one to carry out pretreated graphite boat, have multiple technique stuck points on described graphite boat; B, provide the graphite boat preliminary treatment as described in claims 1 to 3 item any one that matches with graphite boat quantity to substitute sheet; C, by described graphite boat preliminary treatment substitute sheet be arranged on the technique stuck point of described graphite boat; D, described graphite boat is set to deposited silicon nitride in chemical vapor depsotition equipment.
6. graphite boat preprocess method according to claim 5, is characterized in that, in step c, described chemical vapor depsotition equipment is plasma reinforced chemical vapour deposition equipment.
7. graphite boat preprocess method according to claim 5, is characterized in that, the method also comprises step e, by hydrofluoric acid solution, the alternative sheet of described graphite boat preliminary treatment cleaned.
8. graphite boat preprocess method according to claim 7, is characterized in that, step e carries out after silicon nitride deposition carrying out in 4 to 6 steps d again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210475475.7A CN103824795A (en) | 2012-11-19 | 2012-11-19 | Graphite boat pretreatment substitution piece and graphite boat pretreatment method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210475475.7A CN103824795A (en) | 2012-11-19 | 2012-11-19 | Graphite boat pretreatment substitution piece and graphite boat pretreatment method |
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| CN103824795A true CN103824795A (en) | 2014-05-28 |
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| CN201210475475.7A Pending CN103824795A (en) | 2012-11-19 | 2012-11-19 | Graphite boat pretreatment substitution piece and graphite boat pretreatment method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105112888A (en) * | 2015-08-27 | 2015-12-02 | 常州天合光能有限公司 | Saturation method of graphite boat |
| CN105470344A (en) * | 2015-09-28 | 2016-04-06 | 阳光大地（福建）新能源有限公司 | Method for prolonging service lifetime of graphite boat |
| CN106024681A (en) * | 2016-07-27 | 2016-10-12 | 苏州阿特斯阳光电力科技有限公司 | Laminated membrane, graphite boat containing laminated membrane and preparation method thereof and graphite boat cleaning method |
| CN107267963A (en) * | 2017-06-22 | 2017-10-20 | 通威太阳能（合肥）有限公司 | Method for improving color of PECVD (plasma enhanced chemical vapor deposition) coating film |
| CN111304635A (en) * | 2020-02-28 | 2020-06-19 | 苏州拓升智能装备有限公司 | Pre-coating method for preventing dust generation of graphite boat |
-
2012
- 2012-11-19 CN CN201210475475.7A patent/CN103824795A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105112888A (en) * | 2015-08-27 | 2015-12-02 | 常州天合光能有限公司 | Saturation method of graphite boat |
| CN105470344A (en) * | 2015-09-28 | 2016-04-06 | 阳光大地（福建）新能源有限公司 | Method for prolonging service lifetime of graphite boat |
| CN105470344B (en) * | 2015-09-28 | 2017-04-26 | 阳光中科（福建）能源股份有限公司 | Method for prolonging service lifetime of graphite boat |
| CN106024681A (en) * | 2016-07-27 | 2016-10-12 | 苏州阿特斯阳光电力科技有限公司 | Laminated membrane, graphite boat containing laminated membrane and preparation method thereof and graphite boat cleaning method |
| CN106024681B (en) * | 2016-07-27 | 2018-12-28 | 苏州阿特斯阳光电力科技有限公司 | Stack membrane includes its graphite boat and preparation method thereof and graphite boat cleaning method |
| CN107267963A (en) * | 2017-06-22 | 2017-10-20 | 通威太阳能（合肥）有限公司 | Method for improving color of PECVD (plasma enhanced chemical vapor deposition) coating film |
| CN107267963B (en) * | 2017-06-22 | 2019-04-26 | 通威太阳能（合肥）有限公司 | Method for improving color of PECVD (plasma enhanced chemical vapor deposition) coating film |
| CN111304635A (en) * | 2020-02-28 | 2020-06-19 | 苏州拓升智能装备有限公司 | Pre-coating method for preventing dust generation of graphite boat |
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Application publication date: 20140528 |