CN103818871A - Heat energy and electromagnetic energy self-powered microsensor in radio frequency transceiving component of internet of things - Google Patents
Heat energy and electromagnetic energy self-powered microsensor in radio frequency transceiving component of internet of things Download PDFInfo
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- CN103818871A CN103818871A CN201410058567.4A CN201410058567A CN103818871A CN 103818871 A CN103818871 A CN 103818871A CN 201410058567 A CN201410058567 A CN 201410058567A CN 103818871 A CN103818871 A CN 103818871A
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Abstract
The invention discloses a heat energy and electromagnetic energy self-powered microsensor in a radio frequency transceiving component of an internet of things. Via antenna and an MEMS (micro electro mechanical system) thermopile, and with rectifying circuits, large capacitors and a voltage stabilizing circuit, the self-powered microsensor capable of utilizing heat energy emitted from a radio frequency transmitter and stray wave electromagnetic energy around the radio frequency transceiving component is formed. Compared with the existing radio frequency transceiving component, the radio frequency transceiving component with the heat energy and electromagnetic energy self-powered microsensor has the advantages that problems about radiation, stray wave interference and energy loss are solved, and a stable direct-current voltage source is provided for the circuits. The heat energy and electromagnetic energy self-powered microsensor is simple in technology, compatible with a GaAsMMIC (GaAs monolithic microwave integrated circuit) technology and convenient to integrate. Furthermore, the heat energy and electromagnetic energy self-powered microsensor can collect two kinds of energy and is high in energy collecting efficiency and capable of improving performance of the radio frequency transceiving component.
Description
Technical field
The present invention proposes heat and electromagnetic energy self-powered microsensor in Internet of Things radio-frequency receiving-transmitting component, belongs to the technical field of microelectromechanical systems.
Background technology
Internet of Things is by information sensing devices such as radio frequency identification, infrared inductor, global positioning system, laser scanners, by the agreement of agreement, any article is connected with internet, enter row information to exchange and communicate, to realize Weigh sensor, positioning, tracking, monitoring and a kind of network of management.Radio-frequency receiving-transmitting component is also that heat dissipation problem and power consumption issues in the important component in Internet of Things, radio-frequency receiving-transmitting component are essential in any microwave study.Most common radio frequency sending set is that microwave power amplifier consumes big energy in the emitter based on superhet, the system, is dissipated by form of heat so that the temperature of whole system rises so that reliability step-down.Most common radio-frequency transmitter is the receiver based on superhet, and the low-noise amplifier during it is constituted needs DC voltage bias.As MEMS technology develops, on the one hand, utilize the Seebeck effect of MEMS thermopile, by thermoelectric pile so that the converting heat dissipated of emitter is DC voltage, this DC voltage is subjected to charging energy-storing to bulky capacitor, and then DC voltage is exported by mu balanced circuit, provide DC offset voltage to the low-noise amplifier of receiver；On the other hand, the electromagnetic energy of the stray wave around radio-frequency receiving-transmitting component is gathered using antenna, direct current biasing is provided to the low-noise amplifier of receiver by rectification circuit and mu balanced circuit.So as to solve the problems, such as the heat dissipation problem of microwave power amplifier of transmitter system, stray wave for radio-frequency receiving-transmitting component interference problem and receiver low-noise amplifier self-powered, make the heat in Internet of Things radio-frequency receiving-transmitting component and electromagnetic energy self-powered microsensor is implemented as possibility.
The content of the invention
Technical problem:It is an object of the invention to provide the heat in a kind of Internet of Things radio-frequency receiving-transmitting component and electromagnetic energy self-powered microsensor, the burning voltage output that self-powered microsensor is obtained is supplied to low-noise amplifier to do DC offset voltage, thus solve the problems, such as the heat dissipation problem of the microwave power amplifier of transmitter system, stray wave for radio-frequency receiving-transmitting component interference problem and receiver low-noise amplifier self-powered.
Technical scheme：Its structure is mainly to be made up of the component for four separation being distributed by square four side being disposed vertically in microwave power amplifier heat sink outer surface, and wherein this four components are using GaAs substrate, and its positive and negative structure is antenna and MEMS thermopile respectively.Place antenna in four sides wherein on the outside of square, place MEMS thermopile in four sides on the inside of square, the hot junction of MEMS thermopile is close to heat sink outer surface, cold end is close to heat sink, it is aided with rectification circuit, bulky capacitor and mu balanced circuit again, constitutes the self-powered microsensor of the stray wave electromagnetic energy formation around the heat energy dissipated using radio frequency sending set and radio-frequency receiving-transmitting thermomechanical components.
Heat and electromagnetic energy self-powered microsensor in the Internet of Things radio-frequency receiving-transmitting component of the present invention are made up of MEMS thermopile and antenna, and rectification circuit, bulky capacitor and mu balanced circuit are aided with periphery：
The microsensor body for four separation being distributed by square four side that the microsensor is disposed vertically by the heat sink outer surface of microwave power amplifier is constituted, wherein hot and electromagnetic energy self-powered microsensor body is using gallium arsenide substrate as substrate, the positive and negative structure of microsensor body is antenna and by MEMS thermopile metal thermocouple arm respectively, semiconductor thermocouple arm interlock be connected constitute thermoelectric pile, place antenna in four sides on the outside of wherein described square, the coplanar waveguide transmission line that antenna is made up of the ground wire by signal wire and its both sides accesses peripheral rectification circuit, and be connected with bulky capacitor composition electromagnetic energy collection structure with mu balanced circuit；And one group of thermoelectric pile for being connected and constituting that interlocked by MEMS thermopile metal thermocouple arm, semiconductor thermocouple arm is respectively placed at the four sides on the inside of the square, its hot junction leans against heat sink outer surface, cold end constitutes thermal energy collecting structure close to heat sink by four groups of end to end thermoelectric piles and collection electric capacity；
The self-powered microsensor realizes the function for both collection of energy of heat energy and electromagnetic wave energy simultaneously.The heat energy that microwave power amplifier dissipates in radio-frequency receiving-transmitting component is collected by MEMS thermopile, the heat dispersion of radio frequency sending set is improved；And antenna have collected the spuious wave energy in radio-frequency receiving-transmitting component, the Electro Magnetic Compatibility of radio-frequency receiving-transmitting component is improved.
The component for four separation being distributed in the design of heat sink outer surface and preparation of the microwave power amplifier of radio frequency sending set by square four side, this four components are using GaAs substrate, place antenna in four sides on the outside of square, place MEMS thermopile in the four sides of inner side, place in the outside of four groups of thermoelectric pile cold ends close to heat sink outer surface and heat sink to help to radiate with stabilized operating temperature in the wherein hot junction of MEMS thermopile.
In the course of work of the microwave power amplifier of radio frequency sending set, substantial amounts of thermal dissipation is had, thermograde is produced in heat sink heat sink direction, the temperature difference is formed.Four component substrate inner surfaces being disposed vertically in the heat sink outer surface of microwave power amplifier place MEMS thermopile, wherein MEMS thermopile is made up of metal thermocouple arm and semiconductor thermocouple arm, four groups of thermoelectric piles are connected, DC voltage will be produced at head and the tail two ends based on Seebeck effect.The DC voltage is added on bulky capacitor, the storage of heat energy can be achieved.By the DC voltage of storage by mu balanced circuit, to obtain galvanic current pressure.
In the course of work of radio-frequency receiving-transmitting component, have substantial amounts of spurious electromagnetic waves energy dissipation, it is ubiquitous in the environment of radio-frequency receiving-transmitting component, in order to which self-powered microsensor is integrated into a device, the electromagnetic energy of self-powered microsensor can be collected part and MEMS thermopile is integrated.The outer surface for four component substrates being disposed vertically in the heat sink outer surface of microwave power amplifier places antenna, the electromagnetic energy that four antennas are received is respectively connected to rectification circuit, the DC voltage of generation is respectively connected to four bulky capacitors, the storage of electromagnetic energy can be achieved.By the DC voltage of storage by mu balanced circuit, to obtain galvanic current pressure.
When radio-frequency transmitter works, the galvanic current pressure obtained by above heat energy and electromagnetic energy is supplied to low-noise amplifier as direct current biasing, it is achieved thereby that the basic function of the self-powered microsensor.Therefore, by heat energy and the recycling of electromagnetic energy, the energy ezpenditure of radio-frequency receiving-transmitting component is effectively improved, can not only improve the heat dispersion of emitter, interference of the stray wave for radio-frequency receiving-transmitting component can also be improved, the Electro Magnetic Compatibility of radio-frequency receiving-transmitting component is improved.
Beneficial effect：Heat and electromagnetic energy self-powered microsensor in the Internet of Things radio-frequency receiving-transmitting component of the present invention not only realize the collection for both energy of heat energy and spurious electromagnetic waves energy simultaneously, solve the problems, such as the self-powered of low-noise amplifier in radio-frequency receiving-transmitting component, and effectively improve the heat dispersion of radio frequency sending set, the Electro Magnetic Compatibility of radio-frequency receiving-transmitting component is improved, energy loss is reduced.
Brief description of the drawings
Fig. 1 is the hot schematic diagram with electromagnetic energy self-powered microsensor in Internet of Things radio-frequency receiving-transmitting component.
Fig. 2 is the hot plane structure chart looked out with electromagnetic energy self-powered microsensor on the inside of A-A' faces in Internet of Things radio-frequency receiving-transmitting component.
Fig. 3 is the hot plane structure chart inwardly seen on the outside of A-A' faces with electromagnetic energy self-powered microsensor in Internet of Things radio-frequency receiving-transmitting component.
Figure includes：Heat sink 1, heat sink 2, microsensor body 3, gallium arsenide substrate 4, MEMS thermopile metal thermocouple arm 5, MEMS thermopile semiconductor thermocouple arm 6, antenna 7, coplanar waveguide transmission line signal wire 8, ground wire 9, collects electric capacity 10, bulky capacitor 11,12,13,14, rectification circuit 15,16,17,18, mu balanced circuit 19, low-noise amplifier 20.
Embodiment
The specific embodiment of heat and electromagnetic energy self-powered microsensor in the Internet of Things radio-frequency receiving-transmitting component of the present invention is as follows：
The heat and electromagnetism self-powered microsensor 3 are constituted using MEMS thermopile and antenna, and bulky capacitor, rectification circuit, mu balanced circuit are aided with periphery：
The component 3 for four separation being distributed in the design of the outer surface of heat sink 1 and preparation of the microwave power amplifier of radio frequency sending set by square four side, this four components 3 are using GaAs substrate 4, place antenna 7 in four sides on the outside of square, place MEMS thermopile in the four sides of inner side, place heat sink 2 to help to radiate with stabilized operating temperature close to heat sink outer surface, and in the outside of four groups of thermoelectric pile cold ends in the wherein hot junction of MEMS thermopile.
In the course of work of the microwave power amplifier of radio frequency sending set, substantial amounts of thermal dissipation is had, thermograde is produced in the direction of 1 heat sink of heat sink 2, the temperature difference is formed.The inner surface for the substrate 4 of four components 3 being disposed vertically in the heat sink outer surface of microwave power amplifier places MEMS thermopile, wherein MEMS thermopile is made up of metal thermocouple arm 5 and semiconductor thermocouple arm 6, four groups of thermoelectric piles are connected, DC voltage will be produced at head and the tail two ends based on Seebeck effect.The DC voltage is added on bulky capacitor 10, the storage of heat energy can be achieved.By the DC voltage of storage by mu balanced circuit 19, to obtain galvanic current pressure.
In the course of work of radio-frequency receiving-transmitting component, substantial amounts of spurious electromagnetic waves energy dissipation is had.The outer surface for the substrate 4 of four components 3 being disposed vertically in the outer surface of heat sink 1 of microwave power amplifier places antenna 7, the electromagnetic energy that four groups of antennas 7 are received accesses rectification circuit 15 after being spread out of by the signal wire 8 of coplanar waveguide transmission line, ground wire 9,16,17,18, the DC voltage of generation is respectively connected to four bulky capacitors 11,12,13,14, the storage of electromagnetic energy can be achieved.By the DC voltage of storage by mu balanced circuit 19, to obtain galvanic current pressure.
When radio-frequency transmitter works, the galvanic current pressure obtained by above heat energy and electromagnetic energy is supplied to low-noise amplifier 20 as direct current biasing, it is achieved thereby that the function of the self-powered microsensor.
The preparation method of heat and electromagnetic energy self-powered microsensor in Internet of Things radio-frequency receiving-transmitting component：
1）Prepare gallium arsenide substrate 3：From the semi-insulating GaAs substrate of extension, wherein extension N+The doping concentration of GaAs is 1018cm-3, its square resistance is 100~130 Ω/；
2）In a face Epitaxial growth N of gallium arsenide substrate+GaAs.GaAs forms figure and the ohmic contact regions of the semiconductor thermocouple arm 6 of thermoelectric pile as thermoelectric pile GaAs arm；
3）Anti-carve N+GaAs, it is 10 to form its doping concentration17cm-3Thermoelectric pile semiconductor thermocouple arm 6；
4）Photoetching：The photoresist in gold germanium ni au place will be retained by removing；
5）Gold germanium ni au is sputtered, as thermoelectric pile metal arm 5, the thickness of gold germanium ni au is
, wherein gold germanium nickel and GaAs formation Ohmic contact；
6）Peel off, form the metal thermocouple arm 5 of thermoelectric pile；
7）In the another side photoetching of gallium arsenide substrate：The local photoresist of first layer gold will be retained by removing；
8）First layer gold is evaporated, its thickness is 0.3 μm；
9）Peel off, form the signal wire 8 and ground wire 9 of antenna 7 and coplanar waveguide transmission line；
10）Titanium/gold/titanium is evaporated, its thickness is 500/1500/
：Evaporate the down payment for plating；
11）Photoetching：The photoresist in place will be electroplated by removing；
12）Plating gold, its thickness is 2 μm；
13）Remove photoresist：The photoresist in place need not be electroplated by removing；
14）Titanium/gold/titanium is anti-carved, corrodes down payment, the signal wire 8 and ground wire 9 of antenna 7 and coplanar waveguide transmission line is formed.
Distinguish whether be the structure standard it is as follows：
Heat and electromagnetic energy self-powered microsensor positive and negative structure in the Internet of Things radio-frequency receiving-transmitting component of the present invention are antenna and MEMS thermopile respectively.The self-powered microsensor realizes the function for both collection of energy of heat energy and electromagnetic wave energy simultaneously.The heat energy that microwave power amplifier dissipates in radio-frequency receiving-transmitting component is collected by MEMS thermopile, the heat dispersion of radio frequency sending set is improved；And antenna have collected the spuious wave energy in radio-frequency receiving-transmitting component, the Electro Magnetic Compatibility of radio-frequency receiving-transmitting component is improved.
Meet conditions above structure be considered as the present invention Internet of Things radio-frequency receiving-transmitting component in heat and electromagnetic energy self-powered microsensor.
Claims (1)
1. in a kind of Internet of Things radio-frequency receiving-transmitting component heat and electromagnetic energy self-powered microsensor, it is characterised in that the microsensor by microwave power amplifier heat sink（1）The microsensor body for four separation being distributed by square four side that outer surface is disposed vertically（3）Constitute, wherein hot and electromagnetic energy self-powered microsensor body（3）With gallium arsenide substrate（4）For substrate, microsensor body（3）Positive and negative structure be antenna respectively（7）With by MEMS thermopile metal thermocouple arm（5）, semiconductor thermocouple arm（6）Staggeredly be connected the thermoelectric pile constituted, wherein antenna is placed at the four sides on the outside of the square（7）, antenna（7）By by signal wire（8）And its ground wire of both sides（9）The peripheral rectification circuit of coplanar waveguide transmission line access of composition（15,16,17,18）, and and bulky capacitor（11,12,13,14）Constitute electromagnetic energy collection structure and mu balanced circuit（19）Connection；And the four sides on the inside of the square respectively places one group by MEMS thermopile metal thermocouple arm（5）, semiconductor thermocouple arm（6）Staggeredly be connected the thermoelectric pile constituted, and its hot junction leans against heat sink（1）Outer surface, cold end is close to heat sink（2）, by four groups of end to end thermoelectric piles and collection electric capacity（10）Constitute thermal energy collecting structure；
The self-powered microsensor realizes the function for both collection of energy of heat energy and electromagnetic wave energy simultaneously.The heat energy that microwave power amplifier dissipates in radio-frequency receiving-transmitting component is collected by MEMS thermopile, the heat dispersion of radio frequency sending set is improved；And antenna have collected the spuious wave energy in radio-frequency receiving-transmitting component, the Electro Magnetic Compatibility of radio-frequency receiving-transmitting component is improved.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410058567.4A CN103818871B (en) | 2014-02-20 | 2014-02-20 | Heat in Internet of Things radio-frequency receiving-transmitting assembly and electromagnetic energy self-powered microsensor |
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| CN201410058567.4A CN103818871B (en) | 2014-02-20 | 2014-02-20 | Heat in Internet of Things radio-frequency receiving-transmitting assembly and electromagnetic energy self-powered microsensor |
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| CN103818871A true CN103818871A (en) | 2014-05-28 |
| CN103818871B CN103818871B (en) | 2015-09-16 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1890821A (en) * | 2003-12-02 | 2007-01-03 | 巴特尔纪念研究所 | Thermoelectric devices and applications for the same |
| US7564267B1 (en) * | 2008-02-15 | 2009-07-21 | Sharp Laboratories Of America, Inc. | Thermal electric logic circuit |
| JP2010232113A (en) * | 2009-03-30 | 2010-10-14 | Otax Co Ltd | Rf-mems switch, manufacturing method of rf-mems switch, antenna changeover device, cellphone, portable information terminal equipment and equipment for ic test |
| CN102650718A (en) * | 2011-02-28 | 2012-08-29 | 深圳新飞通光电子技术有限公司 | Refrigeration-type coaxial packaging light-emitting tube core |
| CN103105531A (en) * | 2013-01-18 | 2013-05-15 | 东南大学 | Micro electro-mechanical online microwave frequency detector and detecting method thereof |
| US20130335173A1 (en) * | 2012-06-01 | 2013-12-19 | Purdue Research Foundation | Tunable cavity resonator |
-
2014
- 2014-02-20 CN CN201410058567.4A patent/CN103818871B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1890821A (en) * | 2003-12-02 | 2007-01-03 | 巴特尔纪念研究所 | Thermoelectric devices and applications for the same |
| US7564267B1 (en) * | 2008-02-15 | 2009-07-21 | Sharp Laboratories Of America, Inc. | Thermal electric logic circuit |
| JP2010232113A (en) * | 2009-03-30 | 2010-10-14 | Otax Co Ltd | Rf-mems switch, manufacturing method of rf-mems switch, antenna changeover device, cellphone, portable information terminal equipment and equipment for ic test |
| CN102650718A (en) * | 2011-02-28 | 2012-08-29 | 深圳新飞通光电子技术有限公司 | Refrigeration-type coaxial packaging light-emitting tube core |
| US20130335173A1 (en) * | 2012-06-01 | 2013-12-19 | Purdue Research Foundation | Tunable cavity resonator |
| CN103105531A (en) * | 2013-01-18 | 2013-05-15 | 东南大学 | Micro electro-mechanical online microwave frequency detector and detecting method thereof |
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