CN103808733A - Focusing method of automatic optical detection device - Google Patents
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- CN103808733A CN103808733A CN201410075333.0A CN201410075333A CN103808733A CN 103808733 A CN103808733 A CN 103808733A CN 201410075333 A CN201410075333 A CN 201410075333A CN 103808733 A CN103808733 A CN 103808733A
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Abstract
The invention discloses a focusing method of an automatic optical detection device. The focusing method comprises the following steps: determining a plurality of distances to be selected according to the focusing distance of a first object to be detected in a plurality of objects to be detected, wherein the first object to be detected is adjacent to a second object to be detected; shooting a plurality of corresponding images to be selected of the second object to be detected according to the plurality of distances to be selected; and selecting the image with the highest definition as a detection image of the second object to be detected from the images to be selected, and carrying out a detection program.
Description
Technical field
The present invention relates to a kind of focusing method of automatic optical detection device, more particularly, is about a kind of automatic optical detection device method to multiple determinand focusings fast.
Background technology
In the relevant field of integrated circuit, test is an important link automatically.Automatically test is the whether normal flow process of function for judging an integrated circuit wafer.And more must judge for the integrated circuit with optical lens whether its optical lens has flaw.
Whether there is flaw at the optical lens that determines an integrated circuit wafer, can take the image of this optical lens, judge in camera lens, whether there is the flaw such as scratch or stain with this image.And judge in camera lens whether have flaw with image, must obtain enough image clearly.Therefore, how fast a large amount of determinands being focused, is problem to be solved during optics is tested automatically.
Summary of the invention
Because above problem, the present invention proposes a kind of focusing method of automatic optical detection device, this focusing method is in the time of a determinand focusing on a pallet, according on pallet adjacent to the another one of this determinand or the focusing of multiple determinands from, the focusing that decides this determinand from.Because the focusing distance difference of determinand adjacent on pallet is little, therefore utilize the method to focus to multiple determinands rapidly, thereby reduce the time of detecting required cost.
The focusing method of a kind of automatic optical detection device of realizing according to the one or more embodiment of the present invention, be suitable for (the device under test of the multiple determinands on a pallet, DUT) focusing, this focusing method comprises according to the corresponding focusing of the first determinand in aforementioned multiple determinands from determining multiple distances to be selected, and the first determinand is adjacent to the second determinand.With described multiple distances to be selected, the second determinand is taken to corresponding image multiple to be selected, and from these images to be selected, select the detection image of conduct the second determinand that sharpness is the highest, to carry out further trace routine.
The focusing method of the another kind of automatic optical detection device of realizing according to the one or more embodiment of the present invention, be suitable for (the device under test of the multiple determinands on a pallet, DUT) focusing, this focusing method comprises according to the corresponding focusing of the first determinand in described multiple determinands from the first distance to be selected that determines the second determinand and the second distance to be selected, and wherein the first determinand is adjacent to the second determinand.With the first distance to be selected, the second determinand is taken to the first image to be selected.With the second distance to be selected, the second determinand is taken to the second image to be selected.The relatively sharpness of the first image to be selected and the sharpness of the second image to be selected, to determine the relation of the 3rd distance to be selected with respect to the first distance to be selected or the second distance to be selected.With the 3rd distance to be selected, the second determinand is taken to the 3rd image to be selected, and at least according to the first image to be selected, the second image to be selected and the 3rd image to be selected, determine the detection image of the second determinand, so that the second determinand is carried out to trace routine.
According to the focusing method of automatic optical detection device of the present invention, according to adjacent and completed the focusing information of the determinand of focusing, decide the possible focusing of current determinand from, and can be further according to multiple determinands judge focusing from variation tendency, and can be further according to continuous two images to be selected of same determinand are decided to further focusing direction, generally speaking can significantly reduce the time of the required cost of focusing, therefore can improve the optics efficiency of test automatically.
The explanation of the above explanation about content of the present invention and following embodiment is in order to demonstration and explanation spirit of the present invention and principle, and provides claims of the present invention further to explain.
Accompanying drawing explanation
The pick-up unit functional block diagram of Fig. 1 for realizing according to the method in one embodiment of the invention.
The pick-up unit operation chart of Fig. 2 for realizing according to the method in one embodiment of the invention.
Fig. 3 is the sharpness distribution plan according to one embodiment of the invention.
Fig. 4 A is the flawless image of detected part according to determinand in one embodiment of the invention.
Fig. 4 B is the detected part image defective according to determinand in one embodiment of the invention.
The pick-up unit operation chart of Fig. 5 for realizing according to the method in one embodiment of the invention.
Fig. 6 is the focusing method process flow diagram according to one embodiment of the invention.
Fig. 7 A is the part process flow diagram of the focusing method in one embodiment of the invention.
Fig. 7 B is the part process flow diagram that is connected in Fig. 7 A in the focusing method in one embodiment of the invention.
Fig. 7 C is the part process flow diagram that is connected in Fig. 7 A in the focusing method in one embodiment of the invention.
Wherein:
1 pick-up unit
11 store module
13 filming image modules
15 process module
17 detect module
19 pallets
20,30,40 determinands
21,31,41 focusing reference surface
23,33,43 detected part
402 default patterns
406 flaw images
F
1-f
13to be selected to focal plane
C
20, C
30sharpness distribution curve
D
1displacement parameter
Embodiment
In embodiment, describe below detailed features of the present invention and advantage in detail, its content is enough to make any related art techniques person of haveing the knack of understand technology contents of the present invention and implement according to this, and according to the disclosed content of this instructions, claims and accompanying drawing, any related art techniques person of haveing the knack of can understand object and the advantage that the present invention is relevant easily.Following embodiment further describes viewpoint of the present invention, but non-to limit the scope of the invention anyways.
A kind of pick-up unit of realizing according to the method in one embodiment of the invention, please refer to Fig. 1 and Fig. 2, the pick-up unit functional block diagram of Fig. 1 for realizing according to the method in one embodiment of the invention, the pick-up unit operation chart of Fig. 2 for realizing according to the method in one embodiment of the invention.As shown in Figure 1, pick-up unit 1 comprises storage module 11, filming image module 13, processes module 15 and detect module 17.Wherein, process module 15 and be electrically connected to storage module 11 and filming image module 13.Be electrically connected to processing module 15 and detect module 17.Pick-up unit 1 can be in order to detect the multiple determinands on a pallet.
Will focus to detect to the one or more determinands on pallet 19 time, generally speaking process module 15 and can control filming image module 13, come determinand to take multiple images to be selected with multiple predeterminable ranges.Take Fig. 2 as example, when first determinand 20 being focused and detected, process module 15 (not being illustrated in Fig. 2) and control filming image module 13, with 13 predeterminable ranges, sequentially focusing is to be selected extremely to be selected to focal plane f13 to focal plane f1.Can obtain thus 13 images to be selected.Wherein, the depth of field of filming image module 13, can select to equal or be a bit larger tham two adjacent for example, distances to focal plane (to be selected to focal plane f5 and to be selected to focal plane f6) to be selected.And aftertreatment module 15 is analyzed in these 13 images to be selected, every image corresponds to the part image of the focusing reference surface 21 of determinand 20, by this part image of analyzing every image to be selected, decide an image to be selected to have the focusing reference surface 21 of " correctly " focusing to determinand 20.
Please further refer to Fig. 3, it is the sharpness distribution plan according to one embodiment of the invention.Processing module 15 can, all recording corresponding to the sharpness of image block of focusing reference surface 21 in these 13 images to be selected, form as the sharpness distribution curve C20 in Fig. 3.As shown in Figure 2, focusing reference surface 21 is just in time aimed to be selected to focal plane f7, therefore can be by finding to correspond to the image to be selected to focal plane f7 to be selected in sharpness distribution curve C20, image block at focusing reference surface 21 has the highest sharpness, thus, process module 15 can select corresponding to be selected to the image to be selected of focal plane f7 the detection image as determinand 20, and with this detect image focusing from, namely focusing to be selected to the predeterminable range of focal plane f7 as a reference distance.Then detecting module 17 can be accordingly, and (detecting image and this reference distance) carries out a trace routine to determinand 20.
In simple terms, processing module 15 can be to these 13 image to be selected, all analyze the image block corresponding to focusing reference surface 21, to determine in these 13 images to be selected, a highest image to be selected of sharpness that corresponds to the image block of focusing reference surface 21 is elected detection image as, and by corresponding focusing from being set as reference distance so that detect module 17 determinand 20 is carried out to trace routine.
In the trace routine that detection module 17 will be carried out the detected part of determinand 20 23, detect module 17 can control filming image modules 13 according to aforesaid focusing from (namely focusing to focusing reference surface 21/ to be selected to the focusing of focal plane f7 from), and according to displacement parameter d1 reset focusing from, to focus to the top of detected part 23.With the example of Fig. 2, control exactly 13 focusings of filming image module to be selected to focal plane f5, and it is to be selected to focal plane f6, to be selected to focal plane f7, to be selected to focal plane f8 sequentially to focus, the detected part 23 of determinand 20 is carried out the filming image of one or many, to obtain one or more detection image simultaneously.Obtain detecting after image, detect module 17 and detect image with the methods analyst of optical identification, to confirm whether detected part 23 has flaw.
The method of described optical identification, for instance, please refer to Fig. 4 A and Fig. 4 B, and Fig. 4 A system is according to the flawless image of detected part of determinand in one embodiment of the invention, and Fig. 4 B system is according to the detected part image defective of determinand in one embodiment of the invention.If generally speaking detected part 23 does not have flaw, can as shown in Figure 4 A, in the image block corresponding to detected part 23 in image, only there is default pattern 402 to the taken detection image of determinand.Otherwise, if detected part 23 has flaw (scratch, impurity), as shown in Figure 4 B, in image corresponding in the image block of detected part 23 except having default pattern 402, also have flaw image 406.Accordingly, in the image block corresponding to detected part, there is unexpected pattern when detecting in module 17 judgement detection images, can judge that examined determinand has flaw in detected part.
Conventionally processing module 15 will focus so that when detecting module 17 determinand 30 being carried out to trace routine, process module 15 and can repeat aforementioned for the performed a series of actions of determinand 20 to determinand 30 by control filming image modules 13 to determinand 30.But in the time that the quantity of determinand is huge, very consuming time of such focusing testing process.
In one embodiment of the invention, go back to Fig. 2, determinand 20 is executed after aforesaid focusing flow process when processing module 15, can, storing in module 11, record the corresponding focusing defection of focusing reference surface 21 of determinand 20 and focus to be selected to focal plane f7.And in the time processing module 15 and will then control filming image module 13 determinand 30 is focused, even to be selected different to focal plane because the focusing reference surface 31 of determinand 30 corresponds to from the focusing reference surface 21 of determinand 20, can (the vertical position of adjacent two determinands in other words Z axis position be not identical haply) far short of what is expected yet, so can select by be selected to be selected to focal plane to the N centered by the f7 of focal plane, as " may to focal plane " of the focusing reference surface 31 corresponding to determinand 30, wherein N be positive integer.
For example N is 5, that select exactly to be selected to focal plane f5 to be selected to focal plane f9 totally five to be selected to focal plane.Therefore, process module 15 and can control filming image module 13 to correspond to aforementioned five be selected to be selected to five of focal plane distances to be selected, carry out the focusing reference surface 31 to determinand 30 respectively and take image to be selected.Thus, filming image module 13 photographs five images to be selected of determinand 30, can carry out respectively the analysis of sharpness to these five images to be selected and process module 15, obtains as the sharpness distribution curve C30 in Fig. 3.Finally, processing module 15 can be from these five image to be selected, selects a highest image to be selected of sharpness of the image block that corresponds to focusing reference surface 31.According to Fig. 3, process module 15 and equally can select focusing to the image to be selected to focal plane f7 to be selected, and detection image using it as determinand 30, with a series of trace routines of carrying out as aforementioned, determinand 20 being carried out.
Please refer to Fig. 3 simultaneously, it should be noted that, even the position relationship (on Z axis) of determinand 20 and determinand 30 as shown in Figure 2 position on same surface level, but the sharpness of the image to be selected that determinand 20 is obtained distributes, still can distribute different from the sharpness of the image to be selected that determinand 30 is obtained.Even if be the to be selected image for example, to focal plane (to be selected to focal plane f7) corresponding to be selected equally, its sharpness is not identical.Lid is because sharpness is for the decorative pattern on the focusing reference surface of each determinand, as " CAP " printed words on Fig. 4 A or Fig. 4 B, analyze, but the sharpness of the decorative pattern between each determinand itself just can not be identical, therefore, default sharpness threshold value of setting that can not be independent is simplified this flow process, otherwise the sharpness that may have all images to be selected that some determinand is corresponding is all no more than default sharpness threshold value, and causes focusing.
Preceding method is directly with the focusing information of previous determinand, for example focusing from or to focal plane, be used as center with determine to be selected to the multiple focusings when previous determinand filmed image from or to focal plane.For example in aforesaid example by correctly focus focusing reference surface 20 to be selected to focal plane f7 centered by, selected to be selected to focal plane f5 to be selected to focal plane f9 as taking the multiple to be selected to focal plane of image to be selected to determinand 30.But, can be further with the focusing information of multiple determinands before, infer a focusing from variation tendency, and multiple possible to be selected to focal plane or distance to be selected according to the suitable selection of this variation tendency, take multiple images to be selected with the determinand to current.Below hereby narrate for example wherein a kind of implementation mode.
Please refer to Fig. 5, its pick-up unit operation chart for realizing according to the method in one embodiment of the invention.As shown in Figure 5, will be to determinand 20 when processing module 15, determinand 30, when determinand 40 is focused with determinand 50, first, processing module 15 is first controlled filming image module 13 and is aimed at determinand 20, with multiple predeterminable ranges focus respectively to be selected to focal plane f1 to be selected to focal plane f13, determinand 20 is taken to totally ten three images to be selected, then due to as shown in Figure 5, focusing reference surface 21 approaches to be selected to focal plane f6 most, therefore the focusing defection of determinand 20 is focused to be selected to focal plane f6 according to aforesaid method, accordingly with aforesaid trace routine, detect module 17 and control 13 focusings of filming image module to be selected to after the f4 of focal plane, to negative Z-direction with different focusings from repeatedly to determinand 20 shot detection images, so that the detected part 23 of identification determinand 20 has indefectible.
Then, processing module 15 is controlled filming image module 13 and is aimed at determinand 30, now can be according to the focusing information of determinand 20, the namely focusing of determinand 20 from, approach the to be selected to focal plane f6 of focusing reference surface 21 most, select to be selected to focal plane f4 to be selected to focal plane f8.Processing module 15 controls filming image module 13 and focuses respectively these five and to be selected image to be selected is taken to determinand 30 in focal plane.According to preceding method flow process, due to as shown in Figure 5, the focusing reference surface 31 of determinand 30 approaches to be selected to focal plane f5 most, can assert the detection image that is determinand 30 to the corresponding image to be selected of focal plane f5 to be selected so process module 15, detect module 17 and the detected part 33 of determinand 30 detected according to aforementioned trace routine according to this to allow, and assert focusing to the focusing that is determinand 30 to focal plane f5 predeterminable range to be selected from.
Then in the time that processing module 15 is controlled filming image module 13 and is aimed at determinand 40 and prepare determinand 40 to focus.Because being recorded in, the focusing information of aforementioned determinand 20 and determinand 30 (focusing from or to focal plane) stores module 11, therefore be roughly positioned to be selected to focal plane f6 according to the focusing reference surface 21 of determinand 20, and that the focusing reference surface 31 of determinand 30 is roughly positioned at is to be selected to the such information of focal plane f5, processing module 15, can to predict that the focusing reference surface 41 of determinand 40 may roughly be positioned to be selected to focal plane f4.Therefore process module 15 can control filming image module 13 focus respectively to be selected to focal plane f2 to the image to be selected of focal plane f6 being taken to five determinands 40 to be selected.Can be known by Fig. 5, in fact the focusing reference surface 41 of determinand 40 approaches to be selected to focal plane f5 most, therefore process module 15 and still calculate to be selectedly in the corresponding image to be selected of focal plane f5, the sharpness of the image block of focusing reference surface 41 is higher than the sharpness of image block same in other several images to be selected.Thereby process module 15 can select to be selected to the corresponding image to be selected of focal plane f5 the detection image as determinand 40, detect module 17 and with aforementioned trace routine, the detected part 43 of determinand 40 detected.
Can be found out by previous example, in one embodiment of the invention, processing module 15 is not that the simple focusing information with determinand 30 decides the multiple to be selected to focal plane or multiple distance to be selected of determinand 40.Process module 15 can be further according to the focusing information of the focusing information collocation determinand 30 of determinand 20, predict and select the multiple to be selected to focal plane and/or distance to be selected of determinand 40.
Therefore, about the focusing method of one embodiment of the invention, can be with reference to Fig. 6, it is according to the focusing method process flow diagram of one embodiment of the invention.As shown in step S610: respectively the first determinand is taken to image to be selected with N predeterminable range, N is positive integer.As shown in step S620: the focusing that decides the first determinand according to the image to be selected of N the first determinand from.As shown in step S630: according to the focusing of the first determinand from, from N predeterminable range, select M adjacent distance to be selected, with to take the individual image to be selected of M adjacent to the second determinand of the first determinand, wherein M is less than N.As shown in step S640: the focusing that decides the second determinand according to the image of M the second determinand from.
In another embodiment of the present invention, continue referring to Fig. 5, having controlled filming image module 13 when processing module 15 completes determinand 20 after focusing flow process, process module 15 by focusing information recode relevant determinand 20 storing in module 11, so when processing module 15 and will controlling filming image module 13 determinand 30 is focused, processing module 15 can first be controlled filming image module 13 and aim at determinand 30, and focus in to be selected to focal plane f6, take the first image to be selected of determinand 30.Process module 15 and also analyze in the first image to be selected, corresponding to the sharpness of the image block of the part of the focusing reference surface 31 of determinand 30.
Then, process module 15 and can control filming image module 13 and focus in to be selected for example, to focal plane (to be selected to focal plane f5) adjacent to one of them to focal plane f6 to be selected, and take the second image to be selected of determinand 30.Process in module 15 same analysis the second images to be selected, corresponding to the sharpness of the image block of the part of the focusing reference surface 31 of determinand 30, and aftertreatment module 15 can be found the image block of the part that corresponds to equally focusing reference surface 31, focusing has higher sharpness to be selected to second of focal plane f5 image to be selected.Accordingly, process module 15 and can expect and to be selected, focal plane f4 is taken to the 3rd image to be selected to determinand 30 if controls filming image module 13 focusing, in the 3rd image to be selected, the image block corresponding to the part of the reference surface 31 of focusing may have better sharpness.
To be selected, focal plane f4 is taken to the 3rd image to be selected to determinand 30 when processing module 15 working control filming image module 13 focusings, and while processing module 15 actual analysis the 3rd image to be selected, processing module 15 can find, in aforementioned three images to be selected, sharpness corresponding to the image block of the part of the focusing reference surface 31 of determinand 30 in the second image to be selected is the highest, therefore processes module 15 and just can select the detection image of the second image to be selected as determinand 30.Detect module 17 and then detect image and corresponding focusing information according to this: focus in to be selected to focal plane f5, with aforesaid trace routine, the detected part 33 of determinand 30 is detected.
Therefore, the focusing method in another embodiment of the present invention, can comprise as the flow process of Fig. 7 A to Fig. 7 C, and wherein Fig. 7 A to Fig. 7 C is respectively the part process flow diagram of the focusing method in one embodiment of the invention.As shown in step S710: with the first focusing from determinand being taken to the first image to be selected.As shown in step S720: be greater than the first focusing from the second focusing from determinand being taken to the second image to be selected.As shown in step S730: judge whether the sharpness of the first image to be selected is greater than the sharpness of the second image to be selected.
If the sharpness of the first image to be selected is greater than the sharpness of the second image to be selected, as shown in step S740: be less than the first focusing from the 3rd focusing from come to determinand take the 3rd image to be selected.And as shown in step S742: judge whether the sharpness of the 3rd image to be selected is less than the sharpness of the first image to be selected.If the sharpness of the 3rd image to be selected is less than the sharpness of the first image to be selected, as shown in step S744: the detection image using the first image to be selected as determinand.Otherwise as shown in step S746: with the first focusing from the second focusing as new from, with the 3rd focusing from the first focusing as new from then getting back to step S740.
If the sharpness of the first image to be selected is less than the sharpness of the second image to be selected, as shown in step S750: be greater than the second focusing from the 3rd focusing from come to determinand take the 3rd image to be selected.And as shown in step S752: judge whether the sharpness of the 3rd image to be selected is less than the sharpness of the second image to be selected.If the sharpness of the 3rd image to be selected is less than the sharpness of the second image to be selected, as shown in step S754: the detection image using the second image to be selected as determinand.Otherwise as shown in step S756: with the second focusing from the first focusing as new from, with the 3rd focusing from the second focusing as new from then getting back to step S750.
In another embodiment, if step S720 be less than the first focusing from the second focusing from determinand being taken to the second image to be selected, in step S730, in the time that the sharpness of the first image to be selected is greater than the sharpness of the second image to be selected, set the 3rd focusing from be greater than the first focusing from; In the time that the sharpness of the first image to be selected is less than the sharpness of the second image to be selected, set the 3rd focusing from be less than the second focusing from, remaining flow process is similar, repeats no more.So, the spirit of other parts of the present invention of arranging in pairs or groups, even can, only to a determinand focusing three times to four times, just complete the focusing correct for determinand, and can carry out further trace routine to determinand.
According to spirit of the present invention, filming image module 13 can be applied sensitization coupling element (charge-coupled detector, CCD), complementary metal oxide semiconductor (CMOS) junction electric crystal light sensing apparatus (complementary metal-oxide semiconductor photo detector, CMOS PD) or other be suitable for induction the device of filmed image, and the captured image of filming image module 13 can be GTG (grayscale) or full-color image, and the present invention is not limited.
Similarly, according to spirit of the present invention, processing module 15 can be by Application Specific Integrated Circuit (application-specific integrated circuit with detection module 17, ASIC), advanced reduced instruction set computer machine (advanced RISC machine, ARM), CPU (central processing unit) (central processing unit, CPU), single-chip controller or other equipment that is suitable for carrying out computing and steering order realizes, the present invention is not as limit.
In sum, the focusing method of realizing according to the one or more embodiment of the present invention and the pick-up unit of adopting said method, in the time will focusing to a determinand, can according to the focusing of adjacent determinand from decide the possible focusing of this determinand from, thereby reduce significantly the time to each determinand focusing, accelerated the flow process of automatic test.
Although the present invention with aforesaid embodiment openly as above, so it is not in order to limit the present invention.Without departing from the spirit and scope of the present invention, the change of doing and retouching, all belong to scope of patent protection of the present invention.The protection domain defining about the present invention please refer to the protection domain of claims of the application.
Claims (10)
1. a focusing method for automatic optical detection device, in order to the multiple determinands on a pallet are focused, is characterized in that, this focusing method comprises:
(a) according to the focusing of one first determinand in those determinands from determining M distance to be selected, this M distance to be selected differs from one another, M is greater than one integer;
(b) image to be selected to M the second determinand of one second determinand shooting with this M distance to be selected, this second determinand is adjacent to this first determinand, and the image to be selected of this M the second determinand corresponds respectively to this M distance to be selected; And
(c) select the highest image of sharpness in the image to be selected of this M the second determinand to detect image as one of this second determinand.
2. the focusing method of automatic optical detection device according to claim 1, is characterized in that: wherein in step (a), using the focusing of this first determinand from as center to determine this M distance to be selected.
3. the focusing method of automatic optical detection device according to claim 1, is characterized in that, more comprises:
(d) image to be selected to N the first determinand of this first determinand shooting with N predeterminable range, the image to be selected of this N the first determinand corresponds respectively to this N predeterminable range, and N is the integer that is greater than M; And
(e) according to the highest image of sharpness in the image to be selected of this N the first determinand, the focusing that determines this first determinand from.
4. a focusing method for automatic optical detection device, in order to the multiple determinands on a pallet are focused, is characterized in that, this focusing method comprises:
(a) according to the focusing of one first determinand in those determinands from determine one first focusing from one second focusing from;
(b) with this first focusing to one second determinand take one first image to be selected, this second determinand is adjacent to this first determinand;
(c) with this second focusing from this second determinand is taken to one second image to be selected;
(d) according to the sharpness of this first image to be selected and the sharpness of this second image to be selected, determine one the 3rd focusing from;
(e) with the 3rd focusing from this second determinand is taken to one the 3rd image to be selected; And
(f), in the time that the sharpness of the 3rd image to be selected is less than this first image to be selected or this second image to be selected, according to the sharpness of this first image to be selected and sharpness the greater of this second image to be selected, determine that of this second determinand detects image.
5. the focusing method of automatic optical detection device according to claim 4, is characterized in that, more comprises:
(g) in the time that the sharpness of the 3rd image to be selected is greater than this first image to be selected and this second image to be selected, according to the 3rd focusing from determine new this first focusing from this second focusing from, and repeating step (b) is to step (e).
6. the focusing method of automatic optical detection device according to claim 4, it is characterized in that: wherein in step (a), using the focusing of this first determinand from as this first focusing from, and this second focusing from be greater than this first focusing from.
7. the focusing method of automatic optical detection device according to claim 6, is characterized in that, wherein, in step (d), comprises:
(d1) in the time that the sharpness of this first image to be selected is greater than the sharpness of this second image to be selected, set the 3rd focusing from be less than this first focusing from; And
(d2) in the time that the sharpness of this first image to be selected is less than the sharpness of this second image to be selected, set the 3rd focusing from be greater than this second focusing from.
8. the focusing method of automatic optical detection device according to claim 4, it is characterized in that: wherein in step (a), using the focusing of this first determinand from as this first focusing from, and this second focusing from be less than this first focusing from.
9. the focusing method of automatic optical detection device according to claim 8, is characterized in that, wherein, in step (d), comprises:
(d1) in the time that the sharpness of this first image to be selected is greater than the sharpness of this second image to be selected, set the 3rd focusing from be greater than this first focusing from; And
(d2) in the time that the sharpness of this first image to be selected is less than the sharpness of this second image to be selected, set the 3rd focusing from be less than this second focusing from.
10. the focusing method of automatic optical detection device according to claim 4, is characterized in that, more comprises:
(h) with multiple predeterminable ranges, this first determinand is taken the image to be selected of multiple the first determinands, the image to be selected of the plurality of the first determinand corresponds respectively to the plurality of predeterminable range; And
(i) according to the highest image of sharpness in the image to be selected of the plurality of the first determinand, the focusing that determines this first determinand from.
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| CN105812835A (en) * | 2014-12-31 | 2016-07-27 | 联想(北京)有限公司 | Information processing method and electronic device |
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