CN103805965A

CN103805965A - Hook assembly for film plating of plate type PECVD graphite block

Info

Publication number: CN103805965A
Application number: CN201210445320.9A
Authority: CN
Inventors: 张晓丹; 姚蝶; 胡翔; 黄良吉
Original assignee: SHANGHAI SHENZHOU NEW ENERGY DEVELOPMENT Co Ltd
Current assignee: SHANGHAI SHENZHOU NEW ENERGY DEVELOPMENT Co Ltd
Priority date: 2012-11-08
Filing date: 2012-11-08
Publication date: 2014-05-21

Abstract

The present invention relates to a hook assembly for film plating of a plate type PECVD graphite block. The hook assembly comprises hooks and blocking sheets, wherein a graphite frame is provided with a plurality of frame grids for placing silicon wafers, the hooks are arranged on the periphery of the frame grids of the graphite frame, the blocking sheets are arranged on the periphery of the silicon wafer, the hook comprises a main body and hook bodies on both sides of the main body, the distance between the hook bodies is less than or equal to 2.5 mm, and the inner side of the hook body presents the arc guiding angle shape, such that the silk-screen printing hook points after film plating of the silicon wafer are positioned outside the gate line. Compared with the hook assembly in the prior art, the hook assembly of the present invention has advantages of improvement of damage on the graphite frame edge strip due to force applying and the like.

Description

A kind of board-like PECVD graphite block plated film hanging hook assembly

Technical field

The present invention and a kind of photovoltaic industry plated film, especially relate to a kind of board-like PECVD graphite block plated film hanging hook assembly.

Background technology

In crystal silicon solar energy battery technique, all need to plate one deck and rise at battery surface the film of antireflective and passivation dual function, due to numerous superiority of back side coating film, existing battery process all has back side coating film step.In coating process, need to adopt hook supporting silicon chip, before using, size graphite frame is linked up with after plated film, silk screen printing hook point is all in grid line, graphite frame catch jut in use for some time deposited silicon nitride causes silicon chip edge aberration, affect outward appearance, existing market is more and more stricter to cell piece appearance requirement, and hook point leans in grid line and the not attached market demands of product of edge aberration.

Board-like PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment carrier---graphite frame is using after current size hook plated film, has following several point defects:

A. graphite circle hook point is apart from silicon chip edge > 3mm, and hook point, because hook point place is without plated film, exists and directly affects product appearance, the defect of remote effect grid line sintering in silk screen printing meeting in grid line;

B. graphite frame catch jut in use for some time deposited silicon nitride cause silicon chip edge aberration, exist and directly affect product appearance, the defect of remote effect grid line sintering.

Summary of the invention

Object of the present invention is exactly to provide a kind of board-like PECVD graphite block plated film hanging hook assembly that improves the stressed damage of graphite frame edge strip in order to overcome the defect that above-mentioned prior art exists.

Object of the present invention can be achieved through the following technical solutions: a kind of board-like PECVD graphite block plated film hanging hook assembly, comprise hook and catch, graphite frame is provided with multiple for placing the sash of silicon chip, described hook is arranged on the sash surrounding of graphite frame, described catch is arranged on silicon chip surrounding, described hook comprises the coupler body of body and body both sides, it is characterized in that, hook spacing≤the 2.5mm of described coupler body, coupler body inner side is circular arc lead angle shape, makes silicon chip film-coated rear silk screen printing hook point all beyond grid line.

The hook spacing of described coupler body is 2mm.

Described catch is U-shaped shape, and it is provided with projection in bottom on one side, and this protruding height is greater than silicon wafer horizontal placement location 2mm, prevents that silicon chip from skidding off.

Compared with prior art, the present invention has the following advantages:

1. change former hook fixed form, improve the stressed damage phenomenon of graphite frame edge strip..

2. the design of circular arc lead angle is done in hook inner side, makes silicon chip naturally enter position, reduces silicon chip collision fragment risk

Novel hook use after silk screen printing hook point obviously keep to the side edge beyond grid line, average headway 2.0mm (as figure below), directly improves product appearance after grid line sintering

4. new catch lower end hill height reduces 1mm than existing catch hill height, uses after new-type catch, and catch periphery thickness improves 0.3～0.6nm, make catch position around thickness improve and overall thickness is unaffected, directly improve outward appearance.

5. to improve cost low, effective for Novel hook catch.

Accompanying drawing explanation

Fig. 1 is the structural representation that the present invention links up with;

Fig. 2 is the structural representation of catch of the present invention.

Embodiment

Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.

Embodiment 1

As shown in Figure 1, a kind of board-like PECVD graphite block plated film hanging hook assembly, comprise hook 1 and catch 2, graphite frame is provided with that multiple described hook is arranged on the sash surrounding of graphite frame for placing the sash of silicon chip, and described catch is arranged on silicon chip surrounding, described hook comprises the coupler body 12 of body 11 and body both sides, the hook spacing a=2.5mm of described coupler body, coupler body inner side is circular arc lead angle shape, makes silicon chip film-coated rear silk screen printing hook point all beyond grid line.

As shown in Figure 2, described catch 2 is U-shaped shape, it is provided with projection 21 in bottom on one side, catch 2 lower end hill height reduce 1mm than existing catch hill height, and the height of this projection 21 is greater than silicon wafer horizontal placement location 2mm, prevents that silicon chip from skidding off, use after new-type catch, catch periphery thickness improves 0.3～0.6nm, make catch position around thickness improve and overall thickness is unaffected, directly improve outward appearance.

Embodiment 2

A kind of board-like PECVD graphite block plated film hanging hook assembly, comprise hook and catch, graphite frame is provided with multiple for placing the sash of silicon chip, described hook is arranged on the sash surrounding of graphite frame, described catch is arranged on silicon chip surrounding, and described hook comprises the coupler body of body and body both sides, the hook spacing a=2mm of described coupler body, coupler body inner side is circular arc lead angle shape, makes silicon chip film-coated rear silk screen printing hook point all beyond grid line.

Hook becomes bending fixing with catch, changes former hook fixed form, reduces the stressed damage of graphite frame edge strip, and the design of circular arc lead angle is done in hook inner side, bottom, makes silicon chip naturally enter position, reduces collision fragment risk, and catch size projection reduces 1mm.

Claims

1. a board-like PECVD graphite block plated film hanging hook assembly, comprise hook and catch, graphite frame is provided with multiple for placing the sash of silicon chip, described hook is arranged on the sash surrounding of graphite frame, and described catch is arranged on silicon chip surrounding, and described hook comprises the coupler body of body and body both sides, it is characterized in that, hook spacing≤the 2.5mm of described coupler body, coupler body inner side is circular arc lead angle shape, makes silicon chip film-coated rear silk screen printing hook point all beyond grid line.

2. the board-like PECVD graphite block of one according to claim 1 plated film hanging hook assembly, is characterized in that, the hook spacing of described coupler body is 2mm.

3. the board-like PECVD graphite block of one according to claim 1 plated film hanging hook assembly, is characterized in that, described catch is U-shaped shape, and it is provided with projection in bottom on one side, and this protruding height is greater than silicon wafer horizontal placement location 2mm, prevents that silicon chip from skidding off.